CN113265622A - Correction plate system of vacuum evaporation machine - Google Patents
Correction plate system of vacuum evaporation machine Download PDFInfo
- Publication number
- CN113265622A CN113265622A CN202110736177.8A CN202110736177A CN113265622A CN 113265622 A CN113265622 A CN 113265622A CN 202110736177 A CN202110736177 A CN 202110736177A CN 113265622 A CN113265622 A CN 113265622A
- Authority
- CN
- China
- Prior art keywords
- correction
- vertical rod
- correction plate
- montant
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The application provides a correction board system of vacuum coating by vaporization machine, including setting up four correction plate structures at four corners of the main cavity room of vacuum coating by vaporization machine respectively, the correction plate structure includes: the vacuum evaporation coating machine comprises a vertical rod, a horizontal rod and a willow-leaf-shaped correcting leaf, wherein the horizontal rod is connected with the lower portion of the vertical rod and is horizontally arranged, the willow-leaf-shaped correcting leaf is located at the front portion of the horizontal rod and is horizontally arranged, the correcting leaf is fixed with the horizontal rod, the horizontal rod is fixed with the vertical rod, the horizontal rod is located between a crucible of the vacuum evaporation coating machine and a plating pot and plays a role in correcting the uniformity and the thickness of a film layer, the top end of the vertical rod is connected with a part providing kinetic energy through a driving shaft, the vertical rod can rotate and/or move up and down, and the vertical.
Description
Technical Field
The invention relates to the technical field of vacuum evaporation machines, in particular to a correction plate system of a vacuum evaporation machine.
Background
The vacuum evaporation plating machine is used for evaporating and gasifying a coating material (or called a coating material) by means of current heating, electron beam bombardment heating, ion source bombardment and the like under a vacuum condition, and then enabling gasified particles to fly to the surface of a substrate to be condensed, and finally forming a thin film. The vacuum evaporation has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like, thereby being widely applied. In the processing technique of vacuum evaporation, a crucible is adopted to gasify a coating material under the vacuum condition, and the crucible comprises: the evaporation coating device comprises an evaporation coating cavity and an evaporation coating source (source) arranged in the evaporation coating cavity, wherein the evaporation coating source is heated to evaporate evaporation coating materials evaporated in the evaporation coating source, the evaporation coating materials are upwards evaporated in a fan-shaped structure, a coating pot with an umbrella-shaped structure for bearing a coated workpiece is arranged above a crucible, and the coated workpiece is fixed on the coating pot, so that molecules of the evaporation coating materials are deposited on the coated workpiece to form a coating film.
During film coating, the concentration of an evaporant right above the evaporation source is high, so that the film layer on the workpiece of the middle ring of the bearing frame, which is just opposite to the evaporation source, is thick, and the film layer on the workpiece to be coated positioned on the upper ring (close to the center of the coating pot) and the film layer on the workpiece to be coated positioned on the lower ring (close to the edge of the coating pot) are thin. Therefore, in the prior art, a correction plate is arranged between a crucible and a plating pot, and a willow-leaf-shaped correction blade is arranged on the correction plate and used for shielding evaporant right above an evaporation source so as to reduce the thickness of a film layer on a plated piece opposite to the evaporation source, thereby correcting the difference of the thickness of the film layer on the plated piece positioned on different layers of circles on the plating pot. However, since the evaporation rate of the evaporation source, the deposition rate of the evaporation and the shape of the plated piece are different, and the requirements of the plated piece on the shape of the correction plate are different, one kind of film material generally corresponds to a correction plate with a fixed shape, the correction plate cannot be applied to a plurality of kinds of film materials, the universality is poor, different film materials need to be replaced by different correction plates during evaporation, the processing efficiency is low, and the cost is high.
In view of the above, the present invention provides a correction plate system of a vacuum evaporation machine, which has strong versatility, can satisfy various coating materials and coated workpieces, does not need to replace a correction plate, improves processing efficiency, and reduces cost.
Disclosure of Invention
The invention aims to provide a correction plate system of a vacuum evaporation machine, which has strong universality, can meet the requirements of various coating materials and coated workpieces, does not need to replace a correction plate, improves the processing efficiency and reduces the cost.
The utility model provides a correction board system of vacuum coating machine, by setting up four correction plate structures at four corners of vacuum coating machine's main cavity respectively and constitute, every structure of revising the plate is the same, all have the montant, the horizontal pole that sets up with the end-to-end connection and the level of montant, be located the willow leaf shape correction leaf of the front end and the level of horizontal pole setting, the horizontal pole is located the crucible and plates and play the effect of revising between the pot, a correction board structure rotates and/or up-and-down motion through a drive shaft and a part that provides kinetic energy. The number of the four cross rods to be opened is adjustable, 13 arrangement and combination modes are provided for the arrangement and combination from the number of the cross rods to be opened, namely 13 correction modes are provided, the opening angle of the cross rods is also adjustable, and the cross rods can move up and down, so that a plurality of correction modes are provided, the correction requirements of various film materials and coated workpieces can be met, the correction plate structure does not need to be replaced, the processing efficiency is improved, and the cost is reduced. The present applicant has completed the present application on this basis.
The utility model provides a correction plate system of vacuum coating evaporation machine, is including setting up four correction plate structure 1 at four corners of vacuum coating evaporation machine's main cavity respectively, correction plate structure 1 includes: montant 11, with montant 11 sub-unit connection and the horizontal setting horizontal pole 12, be located the anterior and the willow leaf shape correction leaf 13 of horizontal setting of horizontal pole 12, correction leaf 13 is fixed with horizontal pole 12, and horizontal pole 12 is fixed with montant 11, horizontal pole 11 is located between vacuum evaporation machine's crucible and the coating pot, plays the effect of the homogeneity and the thickness of correction rete, the top of montant 11 is connected with the part that provides kinetic energy through the drive shaft for montant 11 can rotate and/or up-and-down motion, thereby montant 11 drives horizontal pole 12 and correction leaf 13 and uses montant 11 as the horizontal rotation of center and/or up-and-down motion.
In some embodiments, the stem 11 is capable of rotation or the stem 11 is capable of rotation and up and down movement.
It is further preferred that the stem 11 is capable of rotation and up-and-down movement, and that rotation and up-and-down movement of the stem 11 are not simultaneous.
In some embodiments, the cross bars 12 of the four correction plate structures 1 are parallel to the side walls of the main chamber of the vacuum evaporation machine when the coating is not performed, and when the coating is performed, some or all of the cross bars 12 of the four correction plate structures 1 are opened, and the correction blades 13 are close to the center of the main chamber when the cross bars 12 are opened.
Further, the cross bars 12 of the four portions of the correction plate structure 1 are opened, and one, two, and three cross bars 12 are opened.
Further, the plurality of crossbars 12 can be opened simultaneously or alternately.
Further, the main cavity of the vacuum evaporation machine is one of a hollow square, rectangle or cylinder.
In some embodiments, the angles of the four corrector plate structures 1 when opened are the same or different.
Further, the angles of the four correcting plate structures 1 when being opened are fixed or not fixed.
Furthermore, the vertical rod 11, the horizontal rod 12 and the correcting blade 13 of the correcting plate structure 1 are all made of stainless steel.
In some embodiments, the length of the vertical rod 11 is greater than the height of the plating pot, and the length of the vertical rod 11 is 1.2 times to 3 times the height of the plating pot.
Further, the lower end of the vertical rod 11 is fixed with the cross rod 12, the vertical rod 11 is a cylinder, the lower end of the vertical rod 11 is provided with two oppositely arranged tangent planes and a horizontally arranged screw hole, and the screw penetrates through the screw hole to fix the vertical rod 11 and the cross rod 12.
In some embodiments, the cross bar 12 is a rectangular parallelepiped, the correction blade 13 is disposed on the upper surface of the cross bar 12, and the correction blade 13 is fixed to the upper surface of the cross bar 12 by two screws.
Further, the rear end of the cross rod 12 is provided with a vertically arranged through hole, two tangent planes are arranged in the through hole and used for placing the lower end of the vertical rod 11, the rear end of the cross rod 12 is also provided with a horizontal screw hole, and the screw hole corresponds to the horizontally arranged screw hole of the lower end of the vertical rod 11.
In some embodiments, the top end of the vertical rod 11 is connected to a magnetic fluid seal driving shaft 2, the magnetic fluid seal driving shaft 2 is disposed on the upper panel of the main cavity of the vacuum evaporation machine, the magnetic fluid seal driving shaft 2 is connected to a motor or a cylinder, and the motor or the cylinder provides kinetic energy to rotate and/or move up and down the rotating shaft of the magnetic fluid seal driving shaft 2, so as to drive the vertical rod 11, the cross rod 12 and the correction blade 13 to rotate and/or move up and down.
Further, the rotating shaft of the magnetic fluid seal driving shaft 2 penetrates through the upper panel of the main cavity of the vacuum coating machine, the upper part of the magnetic fluid seal driving shaft 2 is arranged on the upper panel, the lower part of the magnetic fluid seal driving shaft 2 is arranged below the upper panel, and the tail end of the magnetic fluid seal driving shaft 2 is fixed with the top end of the vertical rod 11 of the correction plate structure 1.
Further, a magnetic fluid sealing sleeve is sleeved outside a rotating shaft of the magnetic fluid sealing driving shaft 2, a flange is sleeved at the bottom of the magnetic fluid sealing sleeve and fixed with the upper panel of the main cavity, and the top end of the rotating shaft is connected with a motor or a cylinder through a gear.
Drawings
The above described and other features of the present disclosure will be more fully described when read in conjunction with the following drawings. It is appreciated that these drawings depict only several embodiments of the disclosure and are therefore not to be considered limiting of its scope. The present disclosure will be described more clearly and in detail by using the accompanying drawings.
Fig. 1 is a schematic structural view of a correction plate system and a main chamber of a vacuum evaporator according to the present invention.
Fig. 2 is a perspective view of a correction plate system of a vacuum evaporator according to the present invention when no film is applied.
Fig. 3 is a front view of a correction plate structure and a structure of a magnetic fluid seal driving shaft of a correction plate system of a vacuum evaporator according to the present application.
Fig. 4 is a schematic structural diagram of a cross bar and a correction blade of a correction plate system of a vacuum evaporator according to the present application.
Description of the main element symbols:
the device comprises a correcting plate structure 1, a vertical rod 11, a cross rod 12, a correcting blade 13 and a magnetic fluid sealing driving shaft 2.
Detailed Description
The following examples are described to aid in the understanding of the present application and are not, and should not be construed to, limit the scope of the present application in any way.
In the following description, those skilled in the art will recognize that components may be described throughout this discussion as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including being integrated within a single system or component).
Also, connections between components or systems are not intended to be limited to direct connections. Rather, data between these components may be modified, reformatted, or otherwise changed by the intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" and "fixed" are understood to encompass direct connections, indirect connections, or fixed through one or more intermediaries.
In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships commonly recognized in the product of the application, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance. The terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
Example 1:
a correction plate system of a vacuum evaporation machine, as shown in fig. 1-4, comprising four correction plate structures 1 respectively disposed at four corners of a main chamber of the vacuum evaporation machine, wherein the correction plate structure 1 comprises: montant 11, with montant 11's sub-unit connection and horizontal setting's horizontal pole 12, be located the anterior and the willow leaf shape of horizontal setting of horizontal pole 12 correction leaf 13, correction leaf 13 is fixed with horizontal pole 12, and horizontal pole 12 is fixed with montant 11, horizontal pole 11 is located between vacuum vapor deposition machine's crucible and the coating pot, plays the effect of the homogeneity and the thickness of correction rete, the top of montant 11 is passed through the drive shaft and is connected with the part that provides kinetic energy for montant 11 can rotate, thereby montant 11 drives horizontal pole 12 and correction leaf 13 and uses montant 11 as the central horizontal rotation.
Example 2:
a correction plate system of a vacuum evaporation machine, as shown in fig. 1-4, comprising four correction plate structures 1 respectively disposed at four corners of a main chamber of the vacuum evaporation machine, wherein the correction plate structure 1 comprises: montant 11, with montant 11's sub-unit connection and horizontal setting's horizontal pole 12, be located the anterior and the willow leaf shape correction leaf 13 of horizontal setting of horizontal pole 12, correction leaf 13 is fixed with horizontal pole 12, and horizontal pole 12 is fixed with montant 11, horizontal pole 11 is located between vacuum vapor deposition machine's crucible and the coating pot, plays the effect of the homogeneity and the thickness of correction rete, the top of montant 11 is passed through the drive shaft and is connected with the part that provides kinetic energy for montant 11 can rotate and up-and-down motion, thereby montant 11 drives horizontal pole 12 and correction leaf 13 and uses montant 11 as central horizontal rotation and up-and-down motion.
Rotation and the up-and-down motion of montant 11 do not go on simultaneously, when not coating film, four horizontal poles 12 of revising plate structure 1 are parallel with the lateral wall of the main cavity body of vacuum evaporation machine, and when coating film, four whole horizontal poles 12 of revising plate structure 1 are opened, and horizontal pole 12 is opened then revises the center that leaf 13 is close to the main cavity room, and four horizontal poles 12 are opened in step, and the main cavity body of vacuum evaporation machine is hollow cylinder. The angles of the four correcting plate structures 1 when being opened are different, and the vertical rods 11, the horizontal rods 12 and the correcting blades 13 of the correcting plate structures 1 are all made of stainless steel. The length of the vertical rod 11 is greater than the height of the plating pot, and the length of the vertical rod 11 is 2 times of the height of the plating pot. The lower end of the vertical rod 11 is fixed with the cross rod 12, the vertical rod 11 is a cylinder, the lower end of the vertical rod 11 is provided with two oppositely arranged tangent planes and a horizontally arranged screw hole, and the vertical rod 11 and the cross rod 12 are fixed by the aid of the screws penetrating through the screw holes. The cross bar 12 is a cuboid, the correction blade 13 is arranged on the upper surface of the cross bar 12, and the correction blade 13 is fixed with the upper surface of the cross bar 12 through two screws. The rear end of the cross rod 12 is provided with a vertically arranged through hole and two tangent planes are arranged in the through hole for placing the lower end of the vertical rod 11, the rear end of the cross rod 12 is also provided with a horizontal screw hole, and the screw hole corresponds to the position of the screw hole horizontally arranged at the lower end of the vertical rod 11. The top end of the vertical rod 11 is connected with the magnetic fluid seal driving shaft 2, the magnetic fluid seal driving shaft 2 is arranged on an upper panel of a main cavity of the vacuum evaporation machine, the magnetic fluid seal driving shaft 2 is connected with a motor or an air cylinder, and the motor or the air cylinder provides kinetic energy to enable a rotating shaft of the magnetic fluid seal driving shaft 2 to rotate and move up and down, so that the vertical rod 11, the cross rod 12 and the correction blade 13 are driven to rotate and move up and down. The rotating shaft of the magnetic fluid sealing driving shaft 2 penetrates through the upper panel of a main cavity body of the vacuum coating machine, the upper part of the magnetic fluid sealing driving shaft 2 is arranged on the upper panel, the lower part of the magnetic fluid sealing driving shaft 2 is arranged below the upper panel, and the tail end of the magnetic fluid sealing driving shaft 2 is fixed with the top end of a vertical rod 11 of the correction plate structure 1. A magnetic fluid sealing sleeve is sleeved outside a rotating shaft of the magnetic fluid sealing driving shaft 2, a flange is sleeved at the bottom of the magnetic fluid sealing sleeve and fixed with an upper panel of the main cavity body, and the top end of the rotating shaft is connected with a motor or a cylinder through a gear.
While various aspects and embodiments have been disclosed herein, it will be apparent to those skilled in the art that other aspects and embodiments can be made without departing from the spirit of the disclosure, and that several modifications and improvements can be made without departing from the spirit of the disclosure. The various aspects and embodiments disclosed herein are presented by way of example only and are not intended to limit the present disclosure, which is to be controlled in the spirit and scope of the appended claims.
Claims (10)
1. The utility model provides a correction board system of vacuum coating by vaporization machine which characterized in that, including four correction board structure (1) that set up four corners at the main cavity of vacuum coating by vaporization machine respectively, correction board structure (1) includes: montant (11), horizontal pole (12) that sets up with the sub-unit connection of montant (11) and level, be located anterior and the willow leaf shape correction leaf (13) of horizontal pole (12) and level setting, correction leaf (13) are fixed with horizontal pole (12), and horizontal pole (12) are fixed with montant (11), horizontal pole (12) are located between vacuum evaporation machine's crucible and the plating pot, play the effect of the homogeneity and the thickness of correction rete, the top of montant (11) is passed through the drive shaft and is connected with the part that provides kinetic energy for montant (11) can rotate and/or up-and-down motion, thereby montant (11) drive horizontal pole (12) and correction leaf (13) use montant (11) as central horizontal rotation and/or up-and-down motion.
2. The correction plate system of vacuum evaporator according to claim 1, wherein the vertical rod (11) is rotatable or the vertical rod (11) is rotatable and movable up and down.
3. The correction plate system of vacuum evaporator according to claim 2, wherein the vertical rod (11) is capable of rotating and moving up and down, and the rotation and the up and down movement of the vertical rod (11) are not performed simultaneously.
4. The correction plate system of vacuum evaporator according to claim 1, wherein the cross bars (12) of the four correction plate structures (1) are parallel to the side walls of the main chamber of the vacuum evaporator when the coating is not performed, and when the coating is performed, the cross bars (12) of part or all of the four correction plate structures (1) are opened, and the correction blades (13) are close to the center of the main chamber when the cross bars (12) are opened.
5. Correction plate system for a vacuum evaporator according to claim 4, characterized in that the cross bars (12) can be opened simultaneously or alternately.
6. The correction plate system of vacuum evaporator according to claim 1, wherein the four correction plate structures (1) are opened at the same or different angles.
7. The correction plate system of vacuum evaporator according to claim 6, wherein the angle of the four correction plate structures (1) when opened is fixed or not fixed.
8. The correction plate system of vacuum evaporator according to claim 1, wherein the length of the vertical rod (11) is greater than the height of the plating pot, and the length of the vertical rod (11) is 1.2-3 times the height of the plating pot.
9. The correction plate system of vacuum evaporator according to claim 1, wherein the cross bar (12) is a rectangular parallelepiped, the correction blade (13) is disposed on the upper surface of the cross bar (12), and the correction blade (13) is fixed to the upper surface of the cross bar (12) by two screws.
10. The correction plate system of vacuum evaporator according to claim 1, wherein the top end of the vertical rod (11) is connected to the magnetic fluid seal driving shaft (2), the magnetic fluid seal driving shaft (2) is disposed on the upper panel of the main cavity of the vacuum evaporator, the magnetic fluid seal driving shaft (2) is connected to a motor or a cylinder, the motor or the cylinder provides kinetic energy to rotate and/or move up and down the rotating shaft of the magnetic fluid seal driving shaft (2), thereby driving the vertical rod (11), the horizontal rod (12) and the correction blade (13) to rotate and/or move up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110736177.8A CN113265622A (en) | 2021-06-30 | 2021-06-30 | Correction plate system of vacuum evaporation machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110736177.8A CN113265622A (en) | 2021-06-30 | 2021-06-30 | Correction plate system of vacuum evaporation machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113265622A true CN113265622A (en) | 2021-08-17 |
Family
ID=77236187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110736177.8A Pending CN113265622A (en) | 2021-06-30 | 2021-06-30 | Correction plate system of vacuum evaporation machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113265622A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117127160A (en) * | 2023-08-30 | 2023-11-28 | 苏州佑伦真空设备科技有限公司 | Large-area film-plating substrate device |
| CN117127160B (en) * | 2023-08-30 | 2024-05-28 | 苏州佑伦真空设备科技有限公司 | Large-area film-plating substrate device |
-
2021
- 2021-06-30 CN CN202110736177.8A patent/CN113265622A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117127160A (en) * | 2023-08-30 | 2023-11-28 | 苏州佑伦真空设备科技有限公司 | Large-area film-plating substrate device |
| CN117127160B (en) * | 2023-08-30 | 2024-05-28 | 苏州佑伦真空设备科技有限公司 | Large-area film-plating substrate device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100392147C (en) | Pair target twin magnetic controlled sputtering ion plating deposition device | |
| CN101634012B (en) | Ion beam assisting magnetic control sputtering deposition method for surface protection | |
| CN201358298Y (en) | Magnetron and pulsed laser codeposition apparatus | |
| CN1743498A (en) | Rotary magnetic field planar target magnetic-controlled sputtering apparatus | |
| CN209816265U (en) | Sputtering target base with adjustable target position | |
| CN216074002U (en) | Correction plate system of vacuum evaporation machine | |
| CN215404477U (en) | Vacuum evaporation machine with double-pump structure | |
| CN206706198U (en) | Magnetic control sputtering device and magnetron sputtering apparatus | |
| CN113265622A (en) | Correction plate system of vacuum evaporation machine | |
| CN215163065U (en) | Quick detachable many caves crucible of vacuum coating by vaporization machine | |
| CN2399400Y (en) | Ion beam sputtering film coating machine | |
| CN215365972U (en) | Window fixing structure of vacuum evaporation machine | |
| JP5002532B2 (en) | Sputtering method and sputtering apparatus | |
| CN209039579U (en) | Prepare the magnetron sputtering film production line of back electrode of solar cell | |
| CN113930735A (en) | Vapor deposition equipment for improving thickness uniformity of vanadium oxide film and vapor deposition method thereof | |
| CN215163067U (en) | Split type plating pot of vacuum coating machine | |
| CN216951671U (en) | Heavy-load type magnetic fluid seal driving structure of vacuum evaporation machine | |
| CN220812606U (en) | Turnover mechanism of vacuum coating machine | |
| CN216947166U (en) | Vacuum evaporation machine with double-crucible structure | |
| CN214193431U (en) | Novel vacuum evaporation plating machine's umbrella stand planet changes structure | |
| CN215404497U (en) | Light-variable and low-cost window | |
| CN215163068U (en) | Planetary plate limiting structure of vacuum evaporation machine | |
| CN113943931B (en) | Rotary slide glass device of vacuum coating machine | |
| TW202307240A (en) | Multiple sputtering target | |
| CN217459570U (en) | Heating device of electron beam evaporation source |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |