CN113943931B - Rotary slide glass device of vacuum coating machine - Google Patents
Rotary slide glass device of vacuum coating machine Download PDFInfo
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- CN113943931B CN113943931B CN202111184455.XA CN202111184455A CN113943931B CN 113943931 B CN113943931 B CN 113943931B CN 202111184455 A CN202111184455 A CN 202111184455A CN 113943931 B CN113943931 B CN 113943931B
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- connecting flange
- hanging rod
- fixed
- coating machine
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 23
- 239000011521 glass Substances 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 230000001681 protective effect Effects 0.000 claims description 14
- 239000007888 film coating Substances 0.000 claims description 6
- 238000009501 film coating Methods 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 5
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 238000001704 evaporation Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000005566 electron beam evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a rotary slide glass device of a vacuum coating machine, which comprises an upper cavity and a self-rotating frame, wherein a fixed groove is formed in the self-rotating frame, a rotary power device is arranged on the upper cavity, the fixed groove comprises an inner ring fixed groove and an outer ring fixed groove, the self-rotating frame comprises a frame body, a connecting flange is arranged at the center of the top of the frame body, the power end of the rotary power device is detachably connected with the connecting flange, a shielding device for shielding part of the inner ring fixed groove and part of the outer ring fixed groove is arranged on the upper cavity, and the area of the shielding device for shielding the outer ring fixed groove is larger than that of the inner ring fixed groove. The rotary slide glass device can be conveniently taken out from the whole of the rotating frame, and meanwhile, the uniformity of the whole inner ring substrate and the whole outer ring substrate can be improved.
Description
Technical Field
The invention relates to a rotary slide glass device which is used for a vacuum coating machine.
Background
The vacuum film plating machine is one common equipment for producing semiconductor material, and is mainly electron beam evaporation process, and the main principle is that the evaporating material is heated directly with electron beam in vacuum to gasify the evaporating material and move toward the substrate to form film. The electron beam evaporation deposition method can prepare a high-purity film, and simultaneously, a plurality of crucibles can be arranged in the same evaporation deposition device to realize simultaneous or separate evaporation and deposit a plurality of different substances. Any material can be vaporized by electron beam evaporation. The electron beam evaporation can evaporate high-melting-point materials, has high evaporation heat efficiency, high beam current density and high evaporation speed, and the prepared film has high purity and good quality, can accurately control the thickness, and can be widely applied to preparing high-purity films, conductive glass and other optical material films. The current vacuum coating machine mainly comprises a coating cavity, wherein the top of the coating cavity is an upper cavity and is provided with a self-rotating frame, a substrate is placed on the self-rotating frame to rotate, an electron gun and a crucible are placed at the bottom of the coating cavity, and metal is deposited on the substrate of the self-rotating frame after being evaporated. However, since the substrates on the self-rotating frame are circumferentially arranged around the rotation center thereof, the substrates form an inner ring substrate and an outer ring substrate according to different arrangement diameters, and the path lengths of the inner and outer ring substrates running in a unit time are different, which causes uneven thickness of the coating film. In addition, the replacement of the existing rotary slide glass device from the rotating frame is relatively complex, so that the time for changing the slide glass every time is long, and the vacuum coating efficiency is affected.
Disclosure of Invention
The technical problems to be solved by the invention are as follows: the rotary slide device of the vacuum coating machine can be conveniently taken out of the whole rotary frame, and meanwhile, the uniformity of the whole inner ring substrate and the whole outer ring substrate can be improved.
In order to solve the technical problems, the technical scheme of the invention is as follows: the utility model provides a rotatory slide glass device of vacuum coating machine, includes the cavity and rotates the rotation frame of installing in last cavity, be provided with two at least rings of fixed slots that are used for fixed substrate on the rotation frame, be provided with the rotatory rotary power device of drive from the rotation frame on going up the cavity, the fixed slot includes a plurality of inner circle fixed slot and a plurality of outer lane fixed slot that the concentric setting, the rotation frame includes the support body of sphere form, the sphere of support body coincides with the target position of vacuum coating machine, the top center of support body is provided with flange, rotary power device's power end is connected with flange can dismantle, be provided with the conversion chip door that the size is greater than the rotation frame diameter on the last cavity, be provided with the shielding device that shelters from partial inner circle fixed slot and partial outer lane fixed slot on the conversion chip door, this shielding device shelters from the area of outer lane fixed slot and is greater than the area that shelters from inner circle fixed slot.
As a preferable scheme, the connecting flange comprises a cylinder body, a lower connecting flange part and an upper connecting flange part, wherein the lower connecting flange part and the upper connecting flange part are arranged on the cylinder body, an inserting hole is formed in the rotating center of the frame body, the cylinder body is inserted into the inserting hole from top to bottom, the lower connecting flange is fixed with the frame body through bolts, a hanging rod is arranged at the power end of the rotating power device, and the upper connecting flange is detachably connected with the hanging rod.
As a preferable scheme, the hanging rod comprises a connecting rod part and a first hanging rod part and a second hanging rod part which are arranged at the lower part of the connecting rod part, wherein the distance between the first hanging rod part and the second hanging rod part is larger than that of an upper connecting flange, the lower parts of the first hanging rod part and the second hanging rod part are respectively provided with a first hanging hook part and a second hanging hook part, and the upper connecting flange is arranged on the first hanging hook part and the second hanging hook part and is fixed through a pressing plate bolt.
As a preferable scheme, the upper surfaces of the first hook part and the second hook part are provided with positioning grooves for facilitating placement of the upper connecting flange.
As a preferable scheme, the shielding device comprises a plurality of supports fixed on the upper cavity, each support is provided with a swinging rod in a swinging way, the swinging rods are fixedly provided with shielding sheets, the shielding sheets radially extend, the shielding sheets are provided with outer shielding parts for shielding the outer ring fixing grooves and inner shielding parts for shielding the inner ring fixing grooves, the area of the outer shielding parts is larger than that of the inner shielding parts, and the swinging rods are driven to swing by the swinging force device.
As a preferable scheme, the eccentric swinging force device comprises a linear power device vertically arranged on the upper cavity, a driving rack is fixed at the output end of the linear power device, a gear meshed with the driving rack is arranged at one end of the swinging rod, and a limiting structure for limiting the swinging angle of the swinging rod is arranged on the support.
As a preferable scheme, the limiting structure comprises an upper limiting block and a lower limiting block which are arranged on the support, and a limiting protrusion which extends into the space between the upper limiting block and the lower limiting block is arranged on the driving rack.
As a preferable scheme, the linear power device is an air cylinder, the air cylinder is fixed at the top of the upper cavity of the film coating cavity, a protective sleeve is fixed in the upper cavity, the support is connected to the lower end of the protective sleeve, and a piston rod of the air cylinder extends into the protective sleeve.
After the technical scheme is adopted, the invention has the following effects: because the rotary slide glass device comprises an upper cavity and a self-rotating frame rotatably arranged in the upper cavity, at least two circles of fixing grooves for fixing substrates are arranged on the self-rotating frame, a rotary power device for driving the self-rotating frame to rotate is arranged on the upper cavity, the fixing grooves comprise a plurality of inner ring fixing grooves and a plurality of outer ring fixing grooves which are concentrically arranged, the self-rotating frame comprises a spherical frame body, the sphere center of the frame body coincides with the target position of the vacuum coating machine, the top center of the frame body is provided with a connecting flange, the power end of the rotary power device is detachably connected with the connecting flange, a wafer switching port with the size larger than the diameter of the self-rotating frame is arranged on the upper cavity, a wafer switching door is detachably fixed on the wafer switching port, a shielding device for shielding part of the inner ring fixing grooves and part of the outer ring fixing grooves is arranged on the upper cavity, the shielding device shields the outer ring fixing groove and the inner ring fixing groove, so that the connecting flange is arranged at the center of the top of the self-rotating frame of the device and can be detachably connected with the power end, thus the whole film-coated self-rotating frame can be taken down, then the film-coated self-rotating frame is taken out from the film-converting opening, and the film-converting door can be detached, therefore, the film-converting opening can be directly closed in the normal film-coating process, in addition, the rotating slide device shields the inner ring fixing groove and the outer ring fixing groove by using the shielding device, the self-rotating frame rotates for one circle, the single substrate of the inner ring and the single substrate of the outer ring are driven to rotate for one circle, but the area passed by the two circles is obviously larger than the running area of the substrate of the outer ring, because the metal vapor is relatively uniform when being dissipated in the film-coating cavity, the amount of the metal vapor is sufficient, the single substrate of the inner ring and the outer ring is taken as an example, the substrate of outer lane can contact with the metal vapor of more areas, utilizes the area of outer shielding part to be greater than interior shielding part this moment, just can effectually improve the uneven problem of coating film thickness of inner and outer lane substrate, improves the coating film uniformity of inner and outer lane substrate as far as possible.
Because the connecting flange comprises a cylinder body, a lower connecting flange part and an upper connecting flange part, wherein the lower connecting flange part and the upper connecting flange part are arranged on the cylinder body, an inserting hole is formed in the rotating center of the frame body, the cylinder body is inserted into the inserting hole from top to bottom, the lower connecting flange is fixed with the frame body through bolts, a hanging rod is arranged at the power end of the rotating power device, the upper connecting flange is detachably connected with the hanging rod, the connection between the connecting flange and the frame body is very simple, meanwhile, the upper connecting flange can be conveniently connected with the hanging rod, and the disassembly and the assembly are very simple.
The hanging rod comprises a connecting rod part and a first hanging rod part and a second hanging rod part which are arranged at the lower part of the connecting rod part, the distance between the first hanging rod part and the second hanging rod part is larger than that of the upper connecting flange, the lower parts of the first hanging rod part and the second hanging rod part are respectively provided with the first hanging rod part and the second hanging rod part, and the upper connecting flange is arranged on the first hanging rod part and the second hanging rod part and is fixed through a pressing plate bolt, so that when the hanging rod is installed, the connecting flange of the self-rotating frame is only required to be placed between the first hanging rod and the second hanging rod part, the upper connecting flange is arranged on the first hanging rod part and the second hanging rod part and then is fixed through the pressing plate bolt, the installation and the disassembly are very convenient, and in addition, the upper surfaces of the first hanging rod part and the second hanging rod part are provided with positioning grooves which are convenient for placing the upper connecting flange. The positioning groove can facilitate accurate placement of the upper connecting flange.
And because the shielding device comprises a plurality of supports fixed on the upper cavity, each support is provided with a swinging rod in a swinging way, the swinging rods are fixedly provided with shielding sheets, the shielding sheets radially extend, the shielding sheets are provided with outer shielding parts for shielding the outer ring fixing grooves and inner shielding parts for shielding the inner ring fixing grooves, the area of the outer shielding parts is larger than that of the inner shielding parts, and the swinging rods are driven to swing by the swinging force device. The swinging rod can be driven to swing by an angle by utilizing the deflection swinging force device, and the shielding area can be changed through the change of the angle, so that the process is convenient to optimize.
And because limit structure is including setting up last stopper and the lower stopper on the support, be provided with the spacing arch that stretches into between last stopper and the lower stopper on the drive rack, utilize last stopper and lower stopper can restrict wobbling angle, avoid the too big other parts of collision of wobbling angle.
And because the linear power device is an air cylinder, the air cylinder is fixed at the top of the upper cavity of the film coating cavity, a protective sleeve is fixed in the upper cavity, the support is connected to the lower end of the protective sleeve, and a piston rod of the air cylinder extends into the protective sleeve. The protection sleeve can protect the piston rod of the cylinder and reduce metal vapor deposition on the piston rod.
Drawings
The invention will be further described with reference to the drawings and examples.
FIG. 1 is a perspective view of an embodiment of the present invention;
FIG. 2 is another perspective view of an embodiment of the present invention;
FIG. 3 is a perspective view of the hanger bracket as mounted to the hanger bar;
FIG. 4 is a cross-sectional view of the hanger bracket as mounted to the hanger bar;
FIG. 5 is a perspective view of the self-rotating stand;
FIG. 6 is a cross-sectional view of the shielding device;
In the accompanying drawings: 1. an upper cavity; 2. a self-rotating frame; 21. a frame body; 22. an inner ring fixing groove; 23. an outer ring fixing groove; 24. a connecting flange; 241. a cylinder; 242. a lower connecting flange portion; 243. an upper connection flange portion; 3. a rotary power device; 4. a shielding device; 41. a linear power device; 42. swing rod; 43. a shielding sheet; 431. an inner shielding part; 432. an outer shielding part; 44. a protective sleeve; 45. a drive rack; 46. a gear; 47. a limit protrusion; 48. an upper limiting block; 49. a lower limiting block; 410. a support; 5. a film changing door; 6. a sight glass, a 7, a pipe interface; 8. a hanging rod; 81. a first hook lever portion; 82. a second hooking lever portion; 83. a first hook portion; 84. a second hook portion; 85. and a connecting rod part.
Detailed Description
The present invention will be described in further detail with reference to the following examples.
As shown in fig. 1 to 6, a rotary slide device of a vacuum coating machine comprises an upper cavity 1 and a self-rotating frame 2 rotatably installed in the upper cavity 1, wherein the upper cavity 1 is used as a part of a coating cavity of the vacuum coating machine and is positioned at the upper part of the coating cavity, a sight glass 6 and a pipe joint 7 are arranged on the upper cavity 1, and the pipe joint 7 is used for receiving nitrogen gas, so that the vacuum coating machine is convenient to break. The automatic rotating frame comprises a rotating frame 2, wherein at least two circles of fixing grooves for fixing a substrate are formed in the rotating frame 2, a rotary power device 3 for driving the rotating frame 2 to rotate is arranged on the upper cavity 1, the fixing grooves comprise a plurality of inner ring fixing grooves 22 and a plurality of outer ring fixing grooves 23 which are concentrically arranged, the rotating frame 2 comprises a frame body 21 in a spherical shape, the spherical center of the frame body 21 coincides with the target position of a vacuum coating machine, a connecting flange 24 is arranged at the center of the top of the frame body 21, the power end of the rotary power device 3 is detachably connected with the connecting flange 24, a wafer switching port with the size larger than the diameter of the rotating frame 2 is formed in the upper cavity 1, a wafer switching door 5 is detachably fixed on the wafer switching port, and a shielding device 4 for shielding part of the inner ring fixing grooves 22 and part of the outer ring fixing grooves 23 is arranged on the upper cavity 1, and the shielding device 4 shields the area of the outer ring fixing grooves 23 by a larger than the area for shielding the inner ring fixing grooves 22.
The connecting flange 24 comprises a cylinder 241, a lower connecting flange 242 and an upper connecting flange 243, wherein the lower connecting flange 242 and the upper connecting flange 243 are arranged on the cylinder 241, an insertion hole is formed in the rotation center of the frame 21, the cylinder 241 is inserted into the insertion hole from top to bottom, the lower connecting flange 24 is fixed with the frame 21 through bolts, a hanging rod 8 is arranged on the power end of the rotating power device 3, and the upper connecting flange 24 is detachably connected with the hanging rod 8. The hanging rod 8 comprises a connecting rod portion 85 and a first hanging rod portion 81 and a second hanging rod portion 82 which are arranged at the lower portion of the connecting rod portion 85, the distance between the first hanging rod portion 81 and the second hanging rod portion 82 is larger than that of the upper connecting flange 24, the lower portions of the first hanging rod portion 81 and the second hanging rod portion 82 are respectively provided with a first hanging hook portion 83 and a second hanging hook portion 84, and the upper connecting flange 24 is placed on the first hanging hook portion 83 and the second hanging hook portion 84 and fixed through a pressing plate bolt. The upper surfaces of the first and second hooking portions 83 and 84 are provided with positioning grooves for facilitating placement of the upper coupling flange 24.
The rotary power device 3 in this embodiment adopts a servo motor, and the rotation speed of the self-rotating stand 2 can be accurately controlled by using the servo motor.
The shielding device 4 comprises a plurality of supports 410 fixed on the upper cavity 1, each support 410 is provided with a swinging rod 42 in a swinging mode, each swinging rod 42 is fixedly provided with a shielding sheet 43, each shielding sheet 43 is fixed on each swinging rod 42 through a bolt, the shielding sheets 43 are convenient to detach and clean, each shielding sheet 43 extends radially, each shielding sheet 43 is provided with an outer shielding part 432 used for shielding the outer ring fixing groove 23 and an inner shielding part 431 used for the inner ring fixing groove 22, the area of each outer shielding part 432 is larger than that of each inner shielding part 431, and each swinging rod 42 is driven to swing by the swinging force device.
In this embodiment, the eccentric swinging force device includes a linear power device 41 vertically installed on the upper cavity 1, a driving rack 45 is fixed at an output end of the linear power device 41, a gear 46 meshed with the driving rack 45 is disposed at one end of the swinging rod 42, and a limiting structure for limiting the swinging angle of the swinging rod 42 is disposed on the support 410. The linear power device 41 is an air cylinder, the air cylinder is fixed at the top of the upper cavity 1 of the film coating cavity, a protective sleeve 44 is fixed in the upper cavity 1, the support 410 is connected to the lower end of the protective sleeve 44, a piston rod of the air cylinder extends into the protective sleeve 44, and the protective sleeve 44 can effectively protect the piston rod and prevent metal vapor from adhering to the piston rod.
As shown in fig. 6, the limiting structure includes an upper limiting block 48 and a lower limiting block 49 disposed on the support 410, and the driving rack 45 is provided with a limiting protrusion 47 extending between the upper limiting block 48 and the lower limiting block 49, and the driving rack 45 can be limited to form by using the limiting protrusion 47, so as to control the swing angle of the swing rod 42.
The above examples are merely illustrative of the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and various modifications and adaptations of the technical solution of the present invention should and are intended to fall within the scope of the present invention as defined in the claims.
Claims (8)
1. The utility model provides a rotatory slide glass device of vacuum coating machine, includes the cavity and rotates the rotation frame of installing in last cavity, be provided with two at least rings of fixed slots that are used for fixed substrate from the revolving rack on, upward be provided with the rotatory rotation power device of drive from the revolving rack on the cavity, the fixed slot includes a plurality of inner circle fixed slot and a plurality of outer lane fixed slot of concentric setting, its characterized in that: the self-rotating frame comprises a spherical frame body, the spherical center of the frame body coincides with the target position of the vacuum coating machine, a connecting flange is arranged at the center of the top of the frame body, the power end of the rotating power device is detachably connected with the connecting flange, a sheet-changing opening with the size larger than the diameter of the self-rotating frame is arranged on the upper cavity, a sheet-changing door is detachably fixed on the sheet-changing opening, a shielding device for shielding part of inner ring fixing grooves and part of outer ring fixing grooves is arranged on the upper cavity, and the area of the shielding device for shielding the outer ring fixing grooves is larger than that of the inner ring fixing grooves.
2. The rotary slide assembly for a vacuum coating machine of claim 1, wherein: the connecting flange comprises a cylinder body, a lower connecting flange part and an upper connecting flange part, wherein the lower connecting flange part and the upper connecting flange part are arranged on the cylinder body, an insertion hole is formed in the rotation center of the frame body, the cylinder body is inserted into the insertion hole from top to bottom, the lower connecting flange is fixed with the frame body through bolts, a hanging rod is arranged at the power end of the rotating power device, and the upper connecting flange is detachably connected with the hanging rod.
3. The rotary slide assembly for a vacuum coating machine of claim 2, wherein: the hanging rod comprises a connecting rod part, a first hanging rod part and a second hanging rod part, wherein the first hanging rod part and the second hanging rod part are arranged at the lower part of the connecting rod part, the distance between the first hanging rod part and the second hanging rod part is larger than the distance between the upper connecting flange, the lower parts of the first hanging rod part and the second hanging rod part are respectively provided with the first hanging hook part and the second hanging hook part, and the upper connecting flange is arranged on the first hanging hook part and the second hanging hook part and is fixed through a pressing plate bolt.
4. A rotary slide assembly for a vacuum coating machine as recited in claim 3, wherein: the upper surfaces of the first hook part and the second hook part are provided with positioning grooves which are convenient for placing the upper connecting flange.
5. The rotary slide assembly for a vacuum coating machine of claim 1, wherein: the shielding device comprises a plurality of supports fixed on the upper cavity, each support is provided with a swinging rod in a swinging mode, each swinging rod is fixedly provided with a shielding sheet, each shielding sheet radially extends, each shielding sheet is provided with an outer shielding part for shielding an outer ring fixing groove and an inner shielding part for shielding an inner ring fixing groove, the area of each outer shielding part is larger than that of each inner shielding part, and each swinging rod is driven to swing by a swinging force device.
6. The rotary slide assembly for a vacuum coating machine as recited in claim 5, wherein: the eccentric swinging force device comprises a linear power device vertically arranged on the upper cavity, a driving rack is fixed at the output end of the linear power device, a gear meshed with the driving rack is arranged at one end of the swinging rod, and a limiting structure for limiting the swinging angle of the swinging rod is arranged on the support.
7. The rotary slide assembly for a vacuum coating machine as recited in claim 6, wherein: the limiting structure comprises an upper limiting block and a lower limiting block which are arranged on the support, and limiting protrusions which extend into the space between the upper limiting block and the lower limiting block are arranged on the driving rack.
8. The rotary slide assembly for a vacuum coating machine as recited in claim 7, wherein: the linear power device is an air cylinder, the air cylinder is fixed at the top of an upper cavity of the film coating cavity, a protective sleeve is fixed in the upper cavity, the support is connected to the lower end of the protective sleeve, and a piston rod of the air cylinder extends into the protective sleeve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111184455.XA CN113943931B (en) | 2021-10-12 | 2021-10-12 | Rotary slide glass device of vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111184455.XA CN113943931B (en) | 2021-10-12 | 2021-10-12 | Rotary slide glass device of vacuum coating machine |
Publications (2)
| Publication Number | Publication Date |
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| CN113943931A CN113943931A (en) | 2022-01-18 |
| CN113943931B true CN113943931B (en) | 2024-04-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111184455.XA Active CN113943931B (en) | 2021-10-12 | 2021-10-12 | Rotary slide glass device of vacuum coating machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008121103A (en) * | 2006-10-16 | 2008-05-29 | Able:Kk | Vacuum vapor-deposition apparatus |
| CN104498888A (en) * | 2014-11-06 | 2015-04-08 | 邵海平 | Automatic overturning structure of single vacuum-coating-equipment rotating-stand slide and method |
| CN205313656U (en) * | 2016-01-24 | 2016-06-15 | 昆明勋凯瑞光学仪器有限公司 | Lens vacuum coating machine |
| CN211921682U (en) * | 2020-03-17 | 2020-11-13 | 河北冠靶科技有限公司 | Substrate bearing and shielding device applied in vacuum coating machine |
| CN216192681U (en) * | 2021-10-12 | 2022-04-05 | 江苏晋誉达半导体股份有限公司 | Rotary slide glass device of vacuum coating machine |
-
2021
- 2021-10-12 CN CN202111184455.XA patent/CN113943931B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008121103A (en) * | 2006-10-16 | 2008-05-29 | Able:Kk | Vacuum vapor-deposition apparatus |
| CN104498888A (en) * | 2014-11-06 | 2015-04-08 | 邵海平 | Automatic overturning structure of single vacuum-coating-equipment rotating-stand slide and method |
| CN205313656U (en) * | 2016-01-24 | 2016-06-15 | 昆明勋凯瑞光学仪器有限公司 | Lens vacuum coating machine |
| CN211921682U (en) * | 2020-03-17 | 2020-11-13 | 河北冠靶科技有限公司 | Substrate bearing and shielding device applied in vacuum coating machine |
| CN216192681U (en) * | 2021-10-12 | 2022-04-05 | 江苏晋誉达半导体股份有限公司 | Rotary slide glass device of vacuum coating machine |
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| CN113943931A (en) | 2022-01-18 |
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