CN216192681U - Rotary slide glass device of vacuum coating machine - Google Patents
Rotary slide glass device of vacuum coating machine Download PDFInfo
- Publication number
- CN216192681U CN216192681U CN202122444669.8U CN202122444669U CN216192681U CN 216192681 U CN216192681 U CN 216192681U CN 202122444669 U CN202122444669 U CN 202122444669U CN 216192681 U CN216192681 U CN 216192681U
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- shielding
- flange
- fixing groove
- hook
- slide glass
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- 239000011521 glass Substances 0.000 title claims abstract description 20
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 230000001681 protective effect Effects 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000005566 electron beam evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
The utility model discloses a rotary slide glass device of a vacuum coating machine, which comprises an upper cavity and a self-rotating frame, wherein a fixing groove is arranged on the self-rotating frame, a rotary power device is arranged on the upper cavity, the fixing groove comprises an inner ring fixing groove and an outer ring fixing groove, the self-rotating frame comprises a frame body, a connecting flange is arranged at the center of the top of the frame body, the power end of the rotary power device is detachably connected with the connecting flange, a shielding device for shielding part of the inner ring fixing groove and part of the outer ring fixing groove is arranged on the upper cavity, and the area of the outer ring fixing groove shielded by the shielding device is larger than the area of the inner ring fixing groove shielded by the shielding device. The rotary slide glass device can be conveniently taken out from the whole rotating frame, and meanwhile, the integral uniformity of the inner ring substrate and the outer ring substrate can be improved.
Description
Technical Field
The utility model relates to a rotary slide glass device which is used on a vacuum coating machine.
Background
The vacuum coating machine is one kind of common equipment for semiconductor material making process, and has electron beam evaporation process as main principle, which is that the electron beam is used to heat the evaporated material directly in vacuum condition to gasify the evaporated material and move the evaporated material to the substrate for condensation to form film on the substrate. The electron beam evaporation deposition method can prepare high-purity films, and a plurality of crucibles can be arranged in the same evaporation deposition device to realize simultaneous or separate evaporation and deposit a plurality of different substances. Any material can be evaporated by electron beam evaporation. The electron beam evaporation can evaporate high-melting-point materials, the evaporation heat efficiency is high, the beam density is high, the evaporation speed is high, the purity of the prepared film is high, the quality is good, the thickness can be accurately controlled, and the method can be widely applied to the preparation of various optical material films such as high-purity films, conductive glass and the like. The existing vacuum coating machine mainly comprises a coating cavity, wherein the top of the coating cavity is an upper cavity and is provided with a self-rotating frame, a substrate is placed on the self-rotating frame to rotate, an electron gun and a crucible are placed at the bottom of the coating cavity, and metal is evaporated and then deposited on the substrate of the self-rotating frame. However, since the substrates on the rotating frame are arranged around the circumference of the rotating center, the substrates form an inner ring substrate and an outer ring substrate according to different arrangement diameters, and the path lengths of the inner ring substrate and the outer ring substrate are different in unit time, which causes uneven coating thickness. In addition, the replacement of the self-rotating frame of the conventional rotary slide device is relatively complex, so that the time for replacing the slide is long each time, and the vacuum coating efficiency is influenced.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the utility model is as follows: the rotary slide glass device of the vacuum coating machine can be conveniently taken out from the whole rotating frame, and meanwhile, the integral uniformity of an inner ring substrate and an outer ring substrate can be improved.
In order to solve the technical problems, the technical scheme of the utility model is as follows: a rotary slide glass device of a vacuum coating machine comprises an upper cavity and a self-rotating frame rotatably arranged in the upper cavity, wherein at least two circles of fixing grooves for fixing substrates are arranged on the self-rotating frame, a rotary power device for driving the self-rotating frame to rotate is arranged on the upper cavity, the fixing grooves comprise a plurality of inner circle fixing grooves and a plurality of outer circle fixing grooves which are concentrically arranged, the self-rotating frame comprises a spherical frame body, the sphere center of the frame body is superposed with the target position of the vacuum coating machine, a connecting flange is arranged at the center of the top of the frame body, the power end of the rotary power device is detachably connected with the connecting flange, a slide changing opening with the size larger than the diameter of the self-rotating frame is arranged on the upper cavity, a slide changing door is detachably fixed on the slide changing opening, and a shielding device for shielding part of the inner circle and part of the outer circle fixing grooves is arranged on the upper cavity, the area of the outer ring fixing groove sheltered by the sheltering device is larger than the area of the inner ring fixing groove sheltered by the sheltering device.
As a preferred scheme, flange includes the barrel and sets up lower flange portion and last flange portion on the barrel, the rotation center department of support body is provided with the patchhole, the barrel from top to bottom inserts just flange and support body bolt fastening down in the patchhole, be provided with the peg on rotary power device's the power end, go up flange with the connection can be dismantled to the peg.
As an optimal scheme, the peg includes tie rod portion and sets up in first hook pole portion and second hook pole portion of tie rod portion lower part, and the interval between first hook pole portion and the second hook pole portion is greater than flange's interval, the lower part of first hook pole portion and second hook pole portion is provided with first hook portion and second hook portion respectively, go up flange and place on first hook portion and second hook portion and through clamp plate bolt fastening.
As a preferable scheme, the upper surfaces of the first hook portion and the second hook portion are provided with positioning grooves for conveniently placing the upper connecting flange.
As a preferred scheme, the shielding device comprises a plurality of supports fixed on the upper cavity, a swing rod is installed on each support in a swinging mode, a shielding piece is fixed on each swing rod and extends in the radial direction, an outer shielding portion used for shielding an outer ring fixing groove and an inner shielding portion used for an inner ring fixing groove are arranged on each shielding piece, the area of the outer shielding portion is larger than that of the inner shielding portion, and the swing rods are driven by a deflection power device to deflect.
As a preferable scheme, the deflection power device comprises a linear power device vertically installed on the upper cavity, a driving rack is fixed at the output end of the linear power device, a gear meshed with the driving rack is arranged at one end of the oscillating bar, and a limiting structure for limiting the oscillating angle of the oscillating bar is arranged on the support.
As a preferred scheme, the limiting structure comprises an upper limiting block and a lower limiting block which are arranged on the support, and a limiting protrusion which extends into a position between the upper limiting block and the lower limiting block is arranged on the driving rack.
As a preferred scheme, the linear power device is an air cylinder, the air cylinder is fixed at the top of an upper cavity of the coating cavity, a protective sleeve is fixed inside the upper cavity, the support is connected to the lower end of the protective sleeve, and a piston rod of the air cylinder extends into the protective sleeve.
After the technical scheme is adopted, the utility model has the effects that: the rotary slide glass device comprises an upper cavity and a self-rotating frame rotatably arranged in the upper cavity, wherein at least two circles of fixing grooves for fixing substrates are arranged on the self-rotating frame, a rotary power device for driving the self-rotating frame to rotate is arranged on the upper cavity, the fixing grooves comprise a plurality of inner ring fixing grooves and a plurality of outer ring fixing grooves which are concentrically arranged, the self-rotating frame comprises a spherical frame body, the sphere center of the frame body is superposed with the target position of a vacuum coating machine, a connecting flange is arranged at the center of the top of the frame body, the power end of the rotary power device is detachably connected with the connecting flange, a sheet changing opening with the size larger than the diameter of the self-rotating frame is arranged on the upper cavity, a sheet changing door is detachably fixed on the sheet changing opening, a shielding device for shielding part of the inner ring fixing grooves and part of the outer ring fixing grooves is arranged on the upper cavity, and the area of the outer ring fixing grooves shielded by the shielding device is larger than the area of the inner ring fixing grooves shielded by the shielding device, therefore, the center of the top of the self-rotating frame of the device is provided with the connecting flange and can be detachably connected with the power end, so that the self-rotating frame with a coated film can be integrally taken down and then taken out from the film changing port, and the film changing door can be detached, so that the film changing port can be directly closed in the normal film coating process, in addition, the rotary slide glass device utilizes the shielding device to shield the inner ring fixing groove and the outer ring fixing groove, the self-rotating frame rotates for one circle, a single substrate of the inner ring and a single substrate of the outer ring are also driven to rotate for one circle, but the area of the rotation of the two substrates is obviously larger than the running area of the substrate of the outer ring than the running area of the inner ring, as the metal steam is relatively uniform when escaping in the film coating cavity and the amount of the metal steam is enough, taking the single substrate of the inner ring and the single substrate of the outer ring as an example, the substrate of the outer ring can be contacted with more areas of the metal steam, at the moment, the area of the outer shielding part is larger than that of the inner shielding part, the problem of uneven coating thickness of the inner and outer ring substrates can be effectively solved, and the coating consistency of the inner and outer ring substrates can be improved as much as possible.
Because flange includes the barrel and sets up lower flange portion and the last flange portion on the barrel, the rotation center department of support body is provided with the patchhole, the barrel from top to bottom inserts just flange and support body bolt fastening down in the patchhole, be provided with the peg on the power end of rotary power device, go up flange with the peg can be dismantled and be connected, the connection between this flange and the support body is very simple, simultaneously, goes up flange and can also conveniently be connected with the peg, dismantles and installs all very simply.
And because the hanging rod comprises a connecting rod part and a first hanging rod part and a second hanging rod part which are arranged at the lower part of the connecting rod part, the distance between the first hanging rod part and the second hanging rod part is larger than the distance between the upper connecting flange, the lower parts of the first hanging rod part and the second hanging rod part are respectively provided with a first hanging hook part and a second hanging hook part, the upper connecting flange is placed on the first hanging hook part and the second hanging hook part and is fixed through a pressing plate bolt, when the mounting is carried out, only the connecting flange of the self-rotating frame needs to be placed between the first hanging rod and the second hanging rod, the upper connecting flange is placed on the first hanging hook part and the second hanging hook part and then is fixed through the pressing plate bolt, the mounting and the dismounting are very convenient, and in addition, the upper surfaces of the first hanging hook part and the second hanging hook part are provided with positioning grooves which are convenient for the upper connecting flange to place. The positioning groove can facilitate the accurate placement of the upper connecting flange.
And because the shielding device comprises a plurality of supports fixed on the upper cavity body, each support is provided with a swing rod in a swinging manner, the swing rods are fixedly provided with shielding pieces, the shielding pieces radially extend, the shielding pieces are provided with outer shielding parts used for shielding outer ring fixing grooves and inner shielding parts used for inner ring fixing grooves, the area of the outer shielding parts is larger than that of the inner shielding parts, and the swing rods are driven by a yaw power device to swing. The swing rod can be driven to swing by an angle by utilizing the deflection power device, and the sheltered area can be changed by changing the angle, so that the process is conveniently optimized.
And the limiting structure comprises an upper limiting block and a lower limiting block which are arranged on the support, the driving rack is provided with a limiting bulge extending between the upper limiting block and the lower limiting block, and the upper limiting block and the lower limiting block can limit the swinging angle to avoid the phenomenon that the swinging angle is too large and the swinging angle collides with other parts.
And the linear power device is an air cylinder which is fixed at the top of an upper cavity of the coating cavity, a protective sleeve is fixed inside the upper cavity, the support is connected to the lower end of the protective sleeve, and a piston rod of the air cylinder extends into the protective sleeve. The protective sleeve can protect a piston rod of the air cylinder and reduce metal vapor deposition on the piston rod.
Drawings
The utility model is further illustrated with reference to the following figures and examples.
FIG. 1 is a perspective view structural diagram of an embodiment of the present invention;
FIG. 2 is a perspective view of another angle of an embodiment of the present invention;
FIG. 3 is a perspective view of the spin stand when mounted to the hanger bar;
FIG. 4 is a cross-sectional view of the spin stand when mounted to a hanger bar;
FIG. 5 is a perspective view of the self-rotating stand;
FIG. 6 is a cross-sectional view of the shielding device;
in the drawings: 1. an upper cavity; 2. a self-rotating frame; 21. a frame body; 22. an inner ring fixing groove; 23. an outer ring fixing groove; 24. a connecting flange; 241. a barrel; 242. a lower connecting flange portion; 243. an upper connecting flange portion; 3. a rotary power device; 4. a shielding device; 41. a linear power device; 42. a swing rod; 43. a shielding sheet; 431. an inner shielding portion; 432. an outer shielding portion; 44. a protective sleeve; 45. a drive rack; 46. a gear; 47. a limiting bulge; 48. an upper limit block; 49. a lower limiting block; 410. a support; 5. a film changing door; 6. a sight glass, 7, a pipe interface; 8. a hanging rod; 81. a first hook lever portion; 82. a second hook rod part; 83. a first hook portion; 84. a second hook portion; 85. the connecting rod part.
Detailed Description
The present invention is described in further detail below with reference to specific examples.
As shown in fig. 1 to 6, a rotary slide device of a vacuum coating machine comprises an upper cavity 1 and a self-rotating frame 2 rotatably mounted on the upper cavity 1, wherein the upper cavity 1 is positioned at the upper part of a coating cavity of the vacuum coating machine as a part of the coating cavity, the upper cavity 1 is provided with a sight glass 6 and a pipe interface 7, and the pipe interface 7 is used for connecting nitrogen so as to be convenient for breaking. The self-rotating frame 2 is provided with at least two circles of fixing grooves for fixing substrates, the upper cavity 1 is provided with a rotary power device 3 for driving the self-rotating frame 2 to rotate, the fixing grooves include a plurality of inner ring fixing grooves 22 and a plurality of outer ring fixing grooves 23 which are concentrically arranged, the self-rotating frame 2 comprises a spherical frame body 21, the sphere center of the frame body 21 is superposed with the position of a target material of the vacuum coating machine, a connecting flange 24 is arranged at the center of the top of the frame body 21, the power end of the rotary power device 3 is detachably connected with the connecting flange 24, the upper cavity 1 is provided with a sheet changing opening with the size larger than the diameter of the self-rotating frame 2, a sheet changing door 5 is detachably fixed on the sheet changing opening, the upper cavity 1 is provided with a shielding device 4 for shielding part of the inner ring fixing groove 22 and part of the outer ring fixing groove 23, the shielding means 4 has a larger area for shielding the outer ring fixing groove 23 than the inner ring fixing groove 22.
The rotary power device 3 in this embodiment employs a servo motor, and the rotation speed of the self-rotating frame 2 can be accurately controlled by the servo motor.
The shielding device 4 comprises a plurality of supports 410 fixed on the upper cavity 1, a swing rod 42 is installed on each support 410 in a swinging mode, a shielding piece 43 is fixed on each swing rod 42, each shielding piece 43 is fixed on each swing rod 42 through a bolt, the dismounting and cleaning are convenient, each shielding piece 43 extends in the radial direction, an outer shielding portion 432 used for shielding the outer ring fixing groove 23 and an inner shielding portion 431 used for the inner ring fixing groove 22 are arranged on each shielding piece 43, the area of each outer shielding portion 432 is larger than that of each inner shielding portion 431, and the swing rods 42 are driven to swing by a swing power device.
In this embodiment, the yaw power device includes a linear power device 41 vertically installed on the upper cavity 1, a driving rack 45 is fixed at an output end of the linear power device 41, a gear 46 engaged with the driving rack 45 is arranged at one end of the swing rod 42, and a limit structure for limiting a swing angle of the swing rod 42 is arranged on the support 410. The linear power device 41 is an air cylinder, the air cylinder is fixed at the top of the upper cavity 1 of the coating cavity, the inner part of the upper cavity 1 is fixed with a protective sleeve 44, the support 410 is connected at the lower end of the protective sleeve 44, the piston rod of the air cylinder extends into the protective sleeve 44, the protective sleeve 44 can effectively protect the piston rod, and metal vapor is prevented from being attached to the piston rod.
As shown in fig. 6, the limiting structure includes an upper limiting block 48 and a lower limiting block 49 disposed on the support 410, a limiting protrusion 47 extending between the upper limiting block 48 and the lower limiting block 49 is disposed on the driving rack 45, and the limiting protrusion 47 can limit the operation of the driving rack 45, so as to control the swing angle of the swing link 42.
The above-mentioned embodiments are merely descriptions of the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and various modifications and alterations made to the technical solution of the present invention without departing from the spirit of the present invention are intended to fall within the scope of the present invention defined by the claims.
Claims (8)
1. The utility model provides a vacuum coating machine's rotatory slide glass device, includes the cavity and rotates the rotation frame of installing in last cavity, be provided with two at least rings of fixed slots that are used for fixed substrate on the rotation frame, it is provided with the rotatory rotary power device of drive rotation frame on the cavity to go up, the fixed slot is including a plurality of inner circle fixed slot and a plurality of outer lane fixed slot that set up with one heart, its characterized in that: the rotation frame comprises a spherical frame body, the center of the frame body coincides with the target position of the vacuum coating machine, a connecting flange is arranged at the top center of the frame body, the power end of the rotary power device is detachably connected with the connecting flange, a piece replacing opening with the size larger than the diameter of the rotation frame is formed in the upper cavity, a piece replacing door is detachably fixed on the piece replacing opening, a shielding device for shielding a part of inner ring fixing groove and a part of outer ring fixing groove is arranged on the upper cavity, and the area of the outer ring fixing groove shielded by the shielding device is larger than the area of the inner ring fixing groove.
2. The rotary slide glass device of vacuum coater according to claim 1, wherein: the utility model discloses a support body, including support body, flange, last flange, the flange includes the barrel and sets up lower flange portion and last flange portion on the barrel, the rotation center department of support body is provided with the patchhole, the barrel from top to bottom inserts flange and support body bolt fastening down in the patchhole, be provided with the peg on rotary power device's the power end, go up flange with the connection can be dismantled to the peg.
3. The rotary slide glass device of vacuum coater according to claim 2, wherein: the peg includes tie rod portion and sets up in first hook pole portion and second hook pole portion of tie rod portion lower part, and the interval between first hook pole portion and the second hook pole portion is greater than flange's interval, the lower part of first hook pole portion and second hook pole portion is provided with first hook portion and second hook portion respectively, it places on first hook portion and second hook portion and through clamp plate bolt fastening to go up flange.
4. The rotary slide glass device of vacuum coater as claimed in claim 3, wherein: and the upper surfaces of the first hook part and the second hook part are provided with positioning grooves for placing the upper connecting flange conveniently.
5. The rotary slide glass device of vacuum coater according to claim 1, wherein: the shielding device comprises a plurality of supports fixed on the upper cavity, a swinging rod is installed on each support in a swinging mode, a shielding piece is fixed on each swinging rod and extends in the radial direction, an outer shielding portion used for shielding an outer ring fixing groove and an inner shielding portion used for an inner ring fixing groove are arranged on each shielding piece, the area of the outer shielding portion is larger than that of the inner shielding portion, and the swinging rods are driven to swing by a swing power device.
6. The rotary slide glass device of vacuum coater as claimed in claim 5, wherein: the deflection power device comprises a linear power device vertically arranged on the upper cavity, a driving rack is fixed at the output end of the linear power device, a gear meshed with the driving rack is arranged at one end of the oscillating bar, and a limiting structure for limiting the oscillating angle of the oscillating bar is arranged on the support.
7. The rotary slide glass device of vacuum coater as claimed in claim 6, wherein: the limiting structure comprises an upper limiting block and a lower limiting block which are arranged on the support, and a limiting bulge extending into the space between the upper limiting block and the lower limiting block is arranged on the driving rack.
8. The rotary slide glass device of vacuum coater as claimed in claim 7, wherein: the linear power device is an air cylinder, the air cylinder is fixed at the top of an upper cavity of the coating cavity, a protective sleeve is fixed inside the upper cavity, the support is connected to the lower end of the protective sleeve, and a piston rod of the air cylinder extends into the protective sleeve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122444669.8U CN216192681U (en) | 2021-10-12 | 2021-10-12 | Rotary slide glass device of vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122444669.8U CN216192681U (en) | 2021-10-12 | 2021-10-12 | Rotary slide glass device of vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216192681U true CN216192681U (en) | 2022-04-05 |
Family
ID=80863544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122444669.8U Withdrawn - After Issue CN216192681U (en) | 2021-10-12 | 2021-10-12 | Rotary slide glass device of vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216192681U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113943931A (en) * | 2021-10-12 | 2022-01-18 | 江苏晋誉达半导体股份有限公司 | Rotary slide glass device of vacuum coating machine |
-
2021
- 2021-10-12 CN CN202122444669.8U patent/CN216192681U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113943931A (en) * | 2021-10-12 | 2022-01-18 | 江苏晋誉达半导体股份有限公司 | Rotary slide glass device of vacuum coating machine |
| CN113943931B (en) * | 2021-10-12 | 2024-04-30 | 江苏晋誉达半导体股份有限公司 | Rotary slide glass device of vacuum coating machine |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20220405 Effective date of abandoning: 20240430 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20220405 Effective date of abandoning: 20240430 |