CN214782104U - Multi-arc ion vacuum coating machine - Google Patents

Abstract

The utility model relates to a multi-arc ion vacuum coating machine, it includes the coating film storehouse, the coating film storehouse internal rotation is connected with the main shaft, the coating film storehouse is run through to the one end of main shaft, one side outside the coating film storehouse is equipped with the motor, the motor is connected with spindle drive, coaxial coupling has first carousel and second carousel on the main shaft, be equipped with the installation component between first carousel and the second carousel, the installation component includes the pivot, mounting bracket and installation pole, the one end and the first carousel rotation of pivot are connected, the other end and the second carousel rotation of pivot are connected, the mounting bracket is connected in the pivot, the installation pole is located the mounting bracket, the installation pole is equipped with many along main shaft length direction, the decurrent mounting groove of opening has been seted up to the one end that the installation pole is close to the mounting bracket, the ascending mounting groove of opening has been seted up to the one end that the installation pole deviates from the mounting bracket. The application has the effect of improving the defect that the multi-arc ion vacuum coating machine is small in application range.

Description

Multi-arc ion vacuum coating machine

Technical Field

The application relates to the field of vacuum coating, in particular to a multi-arc ion vacuum coating machine.

Background

Vacuum deposition is a method of forming a thin film by heating a metal or non-metal material under vacuum conditions to evaporate and condense the material on the surface of a workpiece. Multi-arc ion plating is one of vacuum coating, and metal is evaporated on a solid cathode target by adopting an arc discharge method, so that a film is deposited on the surface of a substrate. Because the film is prepared by multi-arc ion plating in a vacuum environment, the film is not easy to be polluted, the film with uniform coating and high purity can be obtained, and no waste gas or waste liquid is generated in the film plating process, so that the method is an environment-friendly film plating mode.

Chinese patent with publication number CN210945761U discloses a high temperature resistant multi-arc ion vacuum coating machine, which comprises a workbench, one side of the upper surface of the workbench is fixedly connected with a coating bin, two sides of the coating bin are symmetrically and fixedly provided with a U-shaped block, the inner wall of the U-shaped block is connected and provided with a rotating block through a rotating shaft, one side of the two rotating blocks is fixedly provided with a cabin cover, two sides of the upper surface of the workbench are symmetrically provided with a sliding rail, and one side of the lower surface of the two cabin covers is provided with a sliding block corresponding to the sliding rail. The middle of the bottom of the inner wall of the hatch cover is fixedly provided with a support column, the upper surface of the support column is rotatably connected with a turntable, the middle of the upper surface of the turntable is fixedly provided with a threaded column, and the surfaces of the threaded columns are provided with a plurality of rotary hanging rods in equidistant threaded connection. One side that the turning block was kept away from to the cabin cover is all fixed and is equipped with locking device, and the upper surface symmetry of workstation is equipped with square groove, and the bottom of square inslot wall is all fixed and is equipped with the spring, and the one end of spring is all fixed and is equipped with the stopper, and one side of square inslot wall all is equipped with T shape and runs through the groove, and one side of stopper is all fixed and is equipped with the connecting rod, and the one end that the stopper was kept away from to the connecting rod runs through T shape and runs through the groove and extend to workstation one side. And heat-resistant layers are fixedly arranged on the surfaces of the coating bin and the inner wall of the hatch cover.

In view of the above-mentioned related technologies, the inventor believes that, in one of the above-mentioned technologies, a high-temperature resistant multi-arc ion vacuum coater mounts a plating object by a plurality of rotary hanging rods arranged on the surface of a threaded column, before performing a coating operation, an operator needs to hang the plating object on the rotary hanging rods, and for a workpiece which is inconvenient to hang, especially a plate-shaped workpiece, the rotary hanging rods are difficult to fix. Therefore, the high-temperature-resistant multi-arc ion vacuum coating machine in the technology has the defect of small application range.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defect that the application range of a multi-arc ion vacuum coating machine is small, the application provides the multi-arc ion vacuum coating machine.

The application provides a multi-arc ion vacuum coating machine adopts following technical scheme:

a multi-arc ion vacuum coating machine comprises a coating chamber, a main shaft is rotationally connected in the coating chamber, one end of the main shaft penetrates through the film coating bin, one side outside the film coating bin is provided with a motor, the motor is in transmission connection with the main shaft, a first turntable and a second turntable are coaxially connected on the main shaft, a mounting assembly is arranged between the first turntable and the second turntable, the mounting assembly comprises a rotating shaft, a mounting rack and a mounting rod, one end of the rotating shaft is rotatably connected with the first rotating disc, the other end of the rotating shaft is rotationally connected with the second rotating disc, the mounting frame is connected on the rotating shaft, the mounting rod is positioned on the mounting frame, the installation pole is equipped with many along main shaft length direction, the installation pole is close to the one end of mounting bracket and has seted up the decurrent mounting groove of opening, the ascending mounting groove of opening has been seted up to the one end that the installation pole deviates from the mounting bracket.

By adopting the technical scheme, when a plated part is installed, if the plated part is convenient to hang, the plated part can be hung in the mounting groove on the mounting rod, if the plated part is a plate-shaped workpiece inconvenient to hang, the plated part can be clamped between the two mounting rods, the top of the plated part is inserted in the mounting groove with the opening of the upper mounting rod facing downwards, the bottom of the plated part is inserted in the mounting groove with the opening of the lower mounting rod facing upwards, the possibility of the plated part being separated from the mounting rod in the film coating process is reduced by the arrangement of the mounting groove, after the installation, the film coating work is started, in the film coating process, the motor drives the main shaft to rotate, drives the first turntable and the second turntable to rotate, thereby driving the mounting assembly to rotate, the mounting assembly drives the workpiece to rotate around the axis of the main shaft, so that the surface of the workpiece is provided with an even plating layer, the plate-shaped workpiece is convenient to install by the arrangement of the mounting rod and the mounting groove, and the application range of the film coating machine is expanded, the defect of small application range of the multi-arc ion vacuum coating machine is overcome.

Optionally, the mounting assemblies are provided in a plurality of groups, and the plurality of groups of mounting assemblies are arranged in an annular array around the axis of the main shaft.

By adopting the technical scheme, the film coating machine can simultaneously perform film coating work on a plurality of groups of workpieces due to the arrangement of the plurality of groups of mounting assemblies, so that the working efficiency of the film coating machine is improved.

Optionally, the mounting rod is in threaded connection with the mounting frame.

By adopting the technical scheme, the mounting rod is connected with the mounting frame through threads, so that the mounting rod can be detached from the mounting frame, the number of the mounting rods is adjusted according to the size of a plated part, and the application range of the film plating machine is further expanded.

Optionally, three mounting grooves are formed in the mounting rod, openings of the two mounting grooves face upwards, and the mounting grooves with downward openings are closest to the mounting frame in the three mounting grooves in the mounting rod.

By adopting the technical scheme, the installation rod is provided with the two installation grooves with the upward openings, so that when the size of a workpiece changes, the bottom of the workpiece can be inserted into different installation grooves according to the size of the workpiece, and the application range of the coating machine is further expanded.

Optionally, the coating bin includes a bin body and a bin gate, one side of the bin body is hinged to the bin gate, the other side of the bin body is detachably connected to the bin gate, the interior of the bin body is communicated with the interior of the bin gate, a first connecting plate is arranged at the top of the bin body, a first connecting groove is formed in the bin gate, the first connecting plate is located in the first connecting groove, the edge of the first connecting plate coincides with the edge of the first connecting groove, a second connecting plate is arranged at the bottom of the bin body, a second connecting groove is formed in the bin gate, the second connecting plate is located in the second connecting groove, the edge of the second connecting plate coincides with the edge of the second connecting groove, one end of the main shaft is rotatably connected to the joint of the bin body and the second connecting plate, and the other end of the main shaft penetrates through the joint of the bin body and the first connecting plate.

Through adopting above-mentioned technical scheme, the setting of first connecting plate and second connecting plate for the main shaft is connected on the storehouse body, and when opening the door, main shaft, first carousel and second carousel can be connected with the storehouse body is firm, has improved the stability of main shaft.

Optionally, a gear ring is arranged in the film coating bin, the outer wall of the gear ring is connected with the side wall of the bin body, a rotating gear is coaxially arranged on the rotating shaft, and the rotating gear is meshed with the gear ring.

By adopting the technical scheme, when the motor is started, the rotating shaft revolves around the axis of the main shaft to drive the rotating gear to rotate, and the rotating gear rotates along the gear ring while moving to drive the rotating shaft to rotate, so that the whole mounting assembly is driven to rotate, and the surface of the workpiece is subjected to uniform film coating treatment.

Optionally, the mounting bracket includes two horizontal plates and two vertical plates, the vertical plates are located on two sides of the horizontal plates in the length direction, the horizontal plates and the vertical plates form a frame with a rectangular longitudinal section, the rotating shaft penetrates through the two horizontal plates, the mounting rods are arranged along the length direction of the vertical plates, and the mounting rods are arranged on the same sides of the vertical plates in the width direction.

Through adopting above-mentioned technical scheme, all set up the installation pole at the homonymy of two risers, make the installation component can install more work pieces on the one hand, on the other hand when the plate-like work piece size is great, can with the work piece joint between the installation pole on two risers, improved the stability of work piece, further enlarged coating machine's application scope.

Optionally, mounting rods are arranged on two sides of the vertical plate in the width direction.

By adopting the technical scheme, the installation rods are arranged on the two sides of the vertical plate in the width direction, so that workpieces can be installed on the two sides of the vertical plate in the width direction, and the working efficiency of the film coating machine is improved.

In summary, the present application includes at least one of the following beneficial technical effects:

1. when the plating piece is installed, if the plating piece is convenient to hang, the plating piece can be hung in the installation groove on the installation rod, if the plating piece is a plate-shaped workpiece which is inconvenient to hang, the plating piece can be clamped between the two mounting rods, the top of the plating piece is inserted into the mounting groove with the downward opening of the upper mounting rod, the bottom of the plating piece is inserted into the mounting groove with the upward opening of the lower mounting rod, the arrangement of the mounting groove reduces the possibility of the plating piece being separated from the mounting rod in the process of plating, after the mounting is completed, starting film coating work, wherein in the film coating process, the motor drives the main shaft to rotate to drive the first turntable and the second turntable to rotate, the installation rod and the installation groove are arranged to facilitate the installation of the plate-shaped workpiece, so that the application range of the film plating machine is expanded, and the defect of small application range of the multi-arc ion vacuum film plating machine is overcome;

2. the mounting rods are connected with the mounting rack in a threaded manner, so that the mounting rods and the mounting rack can be detached, the number of the mounting rods is adjusted according to the size of a plated part, and the application range of the film plating machine is further expanded;

3. two mounting grooves with upward openings are formed in the mounting rod, so that when the size of a workpiece changes, the bottom of the workpiece can be inserted into different mounting grooves according to the size of the workpiece, and the application range of the film plating machine is further expanded.

Drawings

Fig. 1 is a schematic structural diagram of a multi-arc ion vacuum coater according to an embodiment of the present application.

Fig. 2 is a schematic structural diagram for embodying the opening of the bin door in the embodiment of the present application.

Fig. 3 is an enlarged view at a in fig. 2.

FIG. 4 is a schematic structural diagram for showing a connection relationship between a spindle and a coating chamber in the embodiment of the present application.

Fig. 5 is a schematic structural diagram for showing a connection relationship between the mounting assembly and the toothed ring in the embodiment of the present application.

Fig. 6 is a schematic structural view of a mounting assembly in an embodiment of the present application.

Fig. 7 is a schematic structural view of a mounting rod in the embodiment of the present application.

Description of reference numerals: 1. a film coating bin; 11. a bin body; 111. a fixed block; 112. a first connecting plate; 113. a second connecting plate; 12. a bin gate; 121. a fixing box; 122. an electromagnet; 123. a handle; 124. a first connecting groove; 125. a second connecting groove; 2. a main shaft; 21. a first bevel gear; 22. a first turntable; 23. a second turntable; 3. mounting a plate; 31. a motor; 32. a second bevel gear; 4. mounting the component; 41. a rotating shaft; 411. a rotating gear; 42. a mounting frame; 421. a transverse plate; 422. a vertical plate; 43. mounting a rod; 431. mounting grooves; 5. a toothed ring.

Detailed Description

The present application is described in further detail below with reference to figures 1-7.

The embodiment of the application discloses a multi-arc ion vacuum coating machine. Referring to fig. 1 and 2, the multi-arc ion vacuum coating machine comprises a coating bin 1, wherein the coating bin 1 is a hollow cylinder. The film coating bin 1 comprises a bin body 11 and a bin door 12, wherein the bin body 11 and the bin door 12 are both semi-cylinders with one sides opened, and the bin body 11 and the bin door 12 are vertically arranged.

Referring to fig. 2 and 3, one side of the bin body 11 is hinged to the bin door 12 through a hinge, the other side of the bin body 11 is fixedly connected with a fixing block 111, the fixing block 111 is made of a ferromagnetic substance, and in this embodiment, the fixing block 111 is an iron block. One side of the bin gate 12 is fixedly connected with a fixing box 121, an electromagnet 122 is embedded in the fixing box 121, and the position of the fixing box 121 corresponds to the position of the fixing block 111. A handle 123 is arranged above the fixed box 121, and the handle 123 is fixedly connected to the side wall of the bin gate 12.

Referring to fig. 2, a first connecting plate 112 is arranged on one side of the top of the bin body 11, the cross section of the first connecting plate 112 is semicircular, the circle center of the first connecting plate 112 is located on the axis of the film coating bin 1, and the first connecting plate 112 and the bin body 11 are integrally formed. First connecting groove 124 is formed in one side of the top of bin gate 12, first connecting groove 124 is a through groove in the vertical direction, the position of first connecting groove 124 corresponds to first connecting plate 112, and the shape of first connecting groove 124 is the same as the shape of first connecting plate 112.

Referring to fig. 2, one side of the bottom of the bin body 11 is provided with a second connecting plate 113, the cross section of the second connecting plate 113 is semicircular, the center of circle of the second connecting plate 113 is located on the axis of the film coating bin 1, the second connecting plate 113 and the bin body 11 are integrally formed, and the size of the second connecting plate 113 is equal to that of the first connecting plate 112. Second connecting groove 125 is opened at one side of the bottom of bin gate 12, second connecting groove 125 is a through groove in the vertical direction, the position of second connecting groove 125 corresponds to second connecting plate 113, and the shape of second connecting groove 125 is the same as that of first connecting plate 112.

Referring to fig. 1 and 2, when both sides of the bin body 11 are coupled to the bin gate 12, the electromagnets 122 are magnetically coupled to the fixing blocks 111. The first connection plate 112 is located in the first connection groove 124, and an edge of the first connection plate 112 coincides with an edge of the first connection groove 124. The second connecting plate 113 is located in the second connecting groove 125, and the edge of the second connecting plate 113 coincides with the edge of the second connecting groove 125. The bin body 11 and the bin gate 12 form a complete cylinder, and the interior of the bin body 11 is communicated with the interior of the bin gate 12 to form a cylinder inner cavity.

Referring to fig. 4, a main shaft 2 is coaxially arranged in the coating chamber 1, one end of the main shaft 2 is rotatably connected to the connection position of the chamber body 11 and the second connecting plate 113, the other end of the main shaft 2 penetrates through the connection position of the chamber body 11 and the first connecting plate 112, and the main shaft 2 is rotatably connected with the first connecting plate 112. The main shaft 2 runs through the first bevel gear 21 of the coaxial fixedly connected with in one end of the storehouse body 11, the top fixedly connected with mounting panel 3 of the storehouse body 11, fixedly connected with motor 31 on the mounting panel 3, coaxial fixedly connected with second bevel gear 32 on the output shaft of motor 31, second bevel gear 32 meshes with first bevel gear 21.

Referring to fig. 4, a first rotating disk 22 is coaxially and fixedly connected to the main shaft 2, and the first rotating disk 22 is rotatably connected to the top of the inner cavity of the coating chamber 1. The main shaft 2 is coaxially and fixedly connected with a second rotating disc 23, the second rotating disc 23 is rotatably connected in the film coating bin 1, the second rotating disc 23 is positioned below the first rotating disc 22, and the size of the second rotating disc 23 is equal to that of the first rotating disc 22.

Referring to fig. 4 and 5, four sets of mounting assemblies 4 are provided between the first turntable 22 and the second turntable 23, the four sets of mounting assemblies 4 being in an annular array about the axis of the second turntable 23. The mounting assembly 4 includes a rotating shaft 41, a mounting bracket 42, and a mounting rod 43. The rotating shaft 41 is vertically arranged, one end of the rotating shaft 41 is rotatably connected with the first rotating disc 22, the other end of the rotating shaft 41 penetrates through the second rotating disc 23, and the rotating shaft 41 is rotatably connected with the second rotating disc 23.

Referring to fig. 4 and 5, a toothed ring 5 is arranged in the film coating bin 1, the toothed ring 5 is positioned below the second turntable 23, teeth of the toothed ring 5 are arranged on the inner side of the toothed ring 5, and the outer wall of the toothed ring 5 is fixedly connected with the inner wall of the bin body 11. One end of the rotating shaft 41 penetrating through the second rotating disc 23 is coaxially and fixedly connected with a rotating gear 411, and the rotating gear 411 is meshed with the gear ring 5.

Referring to fig. 6, the mounting frame 42 includes two horizontal plates 421 and two vertical plates 422, the two horizontal plates 421 are disposed along the length direction of the rotating shaft 41, the rotating shaft 41 penetrates through the horizontal plates 421, and the rotating shaft 41 is fixedly connected to the horizontal plates 421. The vertical plates 422 are located on two sides of the horizontal plate 421 in the length direction, and the width direction of the vertical plates 422 is consistent with the width direction of the horizontal plate 421. The two horizontal plates 421 are connected by the vertical plate 422, the vertical plate 422 and the horizontal plates 421 are integrally formed, and the two vertical plates 422 and the two horizontal plates 421 form a frame with a rectangular longitudinal section.

Referring to fig. 6, the mounting rods 43 are provided with a plurality of sets, each set is provided with four mounting rods 43, the plurality of sets of mounting rods 43 are arranged along the length direction of the vertical plate 422, and the distance between two adjacent sets of mounting rods 43 is equal. Of the four mounting rods 43 in the same group, two mounting rods 43 are disposed on both sides of the vertical plate 422 in the width direction, and the other two mounting rods 43 are disposed on both sides of the other vertical plate 422 in the width direction. The same set of four mounting bars 43 are flush.

Referring to fig. 6 and 7, the mounting rod 43 is screw-coupled with the vertical plate 422. Three mounting grooves 431 are formed in the mounting rod 43, and the mounting grooves 431 are through grooves perpendicular to the axial direction of the mounting rod 43. Of the three mounting grooves 431 on the same mounting rod 43, two mounting grooves 431 are opened upwards, one mounting groove 431 is opened downwards, and the mounting groove 431 with the downward opening is closest to the vertical plate 422. Two mounting grooves 431 with upward openings are arranged at intervals along the length direction of the mounting rod 43, wherein one mounting groove 431 with upward openings is positioned at one end of the mounting rod 43, which is far away from the vertical plate 422. The mounting groove 431 with a downward opening is positioned at one end of the mounting rod 43 close to the vertical plate 422. In order to reduce the possibility that the side walls of the mounting groove 431 may affect the edge coating of the workpiece, the height of the mounting groove 431 should be as small as possible.

The implementation principle of the multi-arc ion vacuum coating machine in the embodiment of the application is as follows: before coating the workpiece, the workpiece needs to be mounted on the mounting assembly 4. For the workpieces convenient to hang, the workpieces can be hung in the installation groove 431 with the upward opening, and the possibility that the workpieces fall off in the film coating process is reduced. The number of the mounting bars 43 on the mounting frame 42 and the distance between the mounting bars 43 may be adjusted according to the size of the workpieces so that the workpieces do not interfere with each other.

For plate-shaped workpieces which are inconvenient to hang, the workpieces can be clamped between two adjacent mounting rods 43 in the vertical direction, and the two sides of the workpieces are inserted into the mounting grooves 431, so that the possibility that the workpieces fall off in the film coating process is reduced. For a plate-shaped workpiece with a larger size, one side of the plate-shaped workpiece can be clamped between the two mounting rods 43 of one vertical plate 422, and the other side of the plate-shaped workpiece can be clamped between the two mounting rods 43 of the other vertical plate 422. Both sides of the vertical plate 422 in the width direction can be provided with a workpiece.

After the workpiece is mounted, the bin gate 12 is closed, and the electromagnet 122 is energized, so that the electromagnet 122 is magnetically connected with the fixing block 111, and the bin gate 12 and the bin body 11 are fixed. And simultaneously starting the film coating machine and the motor 31, wherein an output shaft of the motor 31 drives the second bevel gear 32 to rotate to drive the first bevel gear 21 to rotate, and the main shaft 2 rotates along with the first bevel gear 21 to drive the first rotary table 22 and the second rotary table 23 to rotate. The installation component 4 displaces around the axis of the spindle 2 along with the rotation of the first turntable 22 and the second turntable 23, the rotating gear 411 displaces around the axis of the spindle 2 along with the installation component 4, because the rotating gear 411 is meshed with the toothed ring 5, the rotating gear 411 rotates along the toothed ring 5 while moving, the rotating shaft 41 is driven to rotate, the mounting frame 42 rotates along with the rotating shaft 41, the mounting rod 43 is driven to rotate, the workpiece is driven to rotate, and one side of the workpiece, which deviates from the rotating shaft 41, is subjected to uniform film coating treatment.

After the film coating operation is completed, the film coating machine, the motor 31 and the electromagnet 122 are closed, the bin door 12 is opened, the workpiece can be taken down for the workpiece needing only one-side film coating, and the workpiece can be turned over for the workpiece needing two-side film coating, and film coating treatment is performed again.

Because the installation component 4 can revolve around the main shaft 2 and rotate around the rotating shaft 41, the surface of a workpiece on the installation component 4 can be uniformly coated, and the installation rod 43 is in threaded connection with the vertical plate 422 and the installation groove 431 is formed, the application range of the coating machine is expanded, and the defect of small application range of the multi-arc ion vacuum coating machine is overcome.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (8)

1. The utility model provides a multi-arc ion vacuum coating machine, includes coating film storehouse (1), its characterized in that: the coating machine is characterized in that a spindle (2) is rotationally connected in the coating bin (1), one end of the spindle (2) penetrates through the coating bin (1), a motor (31) is arranged on one side outside the coating bin (1), the motor (31) is in transmission connection with the spindle (2), a first rotary table (22) and a second rotary table (23) are coaxially connected on the spindle (2), a mounting assembly (4) is arranged between the first rotary table (22) and the second rotary table (23), the mounting assembly (4) comprises a rotary shaft (41), a mounting rack (42) and a mounting rod (43), one end of the rotary shaft (41) is rotationally connected with the first rotary table (22), the other end of the rotary shaft (41) is rotationally connected with the second rotary table (23), the mounting rack (42) is connected on the rotary shaft (41), the mounting rod (43) is located on the mounting rack (42), and a plurality of mounting rods (43) are arranged along the length direction of the spindle (2), the mounting rod (43) is provided with a mounting groove (431) with a downward opening at one end close to the mounting rack (42), and the mounting rod (43) is provided with a mounting groove (431) with an upward opening at one end departing from the mounting rack (42).

2. The multi-arc ion vacuum coating machine of claim 1, wherein: the mounting assemblies (4) are provided with a plurality of groups, and the plurality of groups of mounting assemblies (4) surround the axis of the main shaft (2) to form an annular array.

3. The multi-arc ion vacuum coating machine of claim 1, wherein: the mounting rod (43) is in threaded connection with the mounting frame (42).

4. The multi-arc ion vacuum coating machine of claim 1, wherein: the mounting rod (43) is provided with three mounting grooves (431), wherein the openings of the two mounting grooves (431) are upward, and in the three mounting grooves (431) on the same mounting rod (43), the mounting groove (431) with the downward opening is closest to the mounting rack (42).

5. The multi-arc ion vacuum coating machine of claim 1, wherein: the film coating bin (1) comprises a bin body (11) and a bin door (12), one side of the bin body (11) is hinged to the bin door (12), the other side of the bin body (11) is detachably connected with the bin door (12), the interior of the bin body (11) is communicated with the interior of the bin door (12), a first connecting plate (112) is arranged at the top of the bin body (11), a first connecting groove (124) is formed in the bin door (12), the first connecting plate (112) is located in the first connecting groove (124), the edge of the first connecting plate (112) is coincided with the edge of the first connecting groove (124), a second connecting plate (113) is arranged at the bottom of the bin body (11), a second connecting groove (125) is formed in the bin door (12), the second connecting plate (113) is located in the second connecting groove (125), and the edge of the second connecting plate (113) is coincided with the edge of the second connecting groove (125), one end of the main shaft (2) is rotatably connected to the joint of the bin body (11) and the second connecting plate (113), and the other end of the main shaft (2) penetrates through the joint of the bin body (11) and the first connecting plate (112).

6. The multi-arc ion vacuum coater of claim 5, wherein: a gear ring (5) is arranged in the film coating bin (1), the outer wall of the gear ring (5) is connected with the side wall of the bin body (11), a rotating gear (411) is coaxially arranged on the rotating shaft (41), and the rotating gear (411) is meshed with the gear ring (5).

7. The multi-arc ion vacuum coater of claim 6, wherein: mounting bracket (42) include diaphragm (421) that two levels set up and riser (422) of two vertical settings, riser (422) are located diaphragm (421) length direction's both sides, diaphragm (421) and riser (422) are constituteed the longitudinal section and are rectangular frame, pivot (41) run through two diaphragm (421), riser (422) length direction setting is followed in installation pole (43), two riser (422) width direction's homonymy all is equipped with installation pole (43).

8. The multi-arc ion vacuum coater of claim 7, wherein: and mounting rods (43) are arranged on two sides of the vertical plate (422) in the width direction.

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