CN101988187B - Vacuum magnetron sputtering color plating equipment - Google Patents
Vacuum magnetron sputtering color plating equipment Download PDFInfo
- Publication number
- CN101988187B CN101988187B CN2009100129967A CN200910012996A CN101988187B CN 101988187 B CN101988187 B CN 101988187B CN 2009100129967 A CN2009100129967 A CN 2009100129967A CN 200910012996 A CN200910012996 A CN 200910012996A CN 101988187 B CN101988187 B CN 101988187B
- Authority
- CN
- China
- Prior art keywords
- hanger bracket
- sample
- film coating
- coating chamber
- sample hanger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses vacuum magnetron sputtering color plating equipment. In order to remove a shadow region of a complex-shaped product during film formation and improve the surface film forming uniformity of the product, on one hand, the revolution and rotation of a workpiece are finished by a suspension rod with a planetary gear structure; and on the other hand, symmetrical compensating inclined targets are arranged between columnar magnetron targets on upper and lower sides of a sample suspending rack (8). Because the sample rack loads bias pressure, a magnetron target filming material can be deposited on a product substrate in multiple directions. By combining the multifunctional sample suspending rack and the compensating inclined targets, a film-coating dead angle can be effectively removed, the film forming quality is improved, and the complex-shaped product substrate can be plated.
Description
Technical field
The invention belongs to art of physical vapor deposition, relate to a kind of vacuum magnetic-control sputtering filming equipment.
Background technology
In the middle of optoelectronic film, the production of semiconductor electronics with fields such as industry such as film, surface decorations; Utilize the vacuum magnetic-control sputtering technology to be coated with metal, alloy semiconductor or metal compound film at plastic material, product of metal material exemplar or optical glass surface; To satisfy certain special requirement, like purposes such as decoration, conduction, raising hardness intensity.Wherein to decorating the big batch plated film, the rotary columa type magnetron sputtering target structure that No. 5096562 patents of the U.S. in 1992 propose is widely used.But in actual production process, for the product substrate of non-regular shape, like phone housing, watch case, makeup lid, automobile component etc.; Especially along with the fast development of electronic product; Product type constantly upgrades, and there are the shadow zone in increasingly sophisticatedization of product appearance, variation when often causing film forming; Its corresponding position there is not plating or few plating after the product film forming, influences requirements such as product appearance or electroconductibility.
Summary of the invention
For solving above-mentioned plated film problem of non-uniform, the purpose of this invention is to provide a kind of little color coating apparatus of large-scale vacuum magnetron sputtering of high-level efficiency, high agile property, batch process, floor space of using the principle of oblique target compensation and multifunctional sample hanger bracket.Concrete scheme is:
The color coating apparatus of a kind of vacuum magnetic-control sputtering; Comprise that the baking vessel 3, the workpiece that are arranged in successively in the working space hang platform 7, vacuum film coating chamber 17 and sample hanger bracket transfer car(buggy) 4 in advance, said sample hanger bracket transfer car(buggy) 4 tops are sample hanger bracket holder car 5 and holder Car Track 6 thereof; Above workpiece hangs platform 7 in advance, the corresponding position, indoor bottom of baking vessel 3, vacuum film coating chamber 17 is equipped with holder Car Track 6 equally, said workpiece hangs platform 7, baking vessel 3 and the holder Car Track 6 of vacuum film coating chamber 17 3 stations in advance and is connected; Said workpiece hangs in advance on the holder Car Track of platform 7 sample hanger bracket 8 is set; Many group column rotary magnetron targets 16 are equipped with in said vacuum film coating chamber 17 inside; There is the bearing assembly 21 that docks with sample hanger bracket 8 at the center about in the vacuum film coating chamber 17; Vacuum film coating chamber 17 external pumped vacuum systems; On 17 of the vacuum film coating chambers a plurality of viewing windows 18 are housed, it is characterized in that:, the oblique target 15 of symmetric compensation is installed between the column magnetic controlling target 16 in the both sides up and down of sample hanger bracket 8;
Said sample hanger bracket 8 is a rotation type, i.e. when sample suspension was in the revolution of sample hanger bar and rotation, sample suspension place of bar can self be rotated;
The said pumped vacuum systems of joining comprises water condense trap 9, molecular pump 14, slide valve 13, lobe pump+dried pump 10 and holding pump 11;
Said sample hanger bracket 8 adopts planetary gear construction.
The shadow zone of the present invention's complex configuration product when eliminating film forming is improved product surface and is become film uniformity, on the one hand; Adopt the planetary gear construction hanger bar to accomplish the revolution and the rotation of workpiece; On the other hand, in the both sides up and down of sample hanger bracket 8, the oblique target 15 of symmetric compensation is installed between the column magnetic controlling target 16; Because specimen holder loads bias voltage, so magnetic controlling target target film forming material can deposit on the product substrate from multi-direction.Through combined utilization multifunctional sample hanger bracket and the oblique target of compensation, can effectively eliminate the plated film dead angle, improve quality of forming film, can be coated with the product substrate of complex configuration.
Be coated with product category in order to increase, this filming equipment can be according to product design, and the detachable sample hanger bar part of corresponding conversion sample hanger bracket satisfies the suspension demand of different sorts product design.In addition, the peculiar structure of column rotary magnetron target can be to the plated film scope, the plated film distance, and plated film satisfies and produces the change product requirement towards regulating.
Be coated with product colour in order to increase; Filming equipment of the present invention adopts the mode of operation of single target or the sputter of many targets, adopts and is coated with the multilayer optical membrane method, uses 2～3 kinds of targets; Just can obtain multiple different colours; Can obtain the film of all colors in theory, change the fairly simple situation of product colour of existing decoration film coating equipment, increase substantially the state of the art and the state of the art of decoration film coating.
Whole color coating apparatus is furnished with the electric control operation system, realizes the full-automatic and semiautomatic controls in the plated film whole process, and is convenient and swift, safe.
In addition, the ion source that vacuum film coating chamber is equipped with is used for the cleaning of product surface on the one hand, on the other hand, but the ionization working gas.Improve quality of forming film.
The color coating apparatus structural entity of vacuum of the present invention is rationally distributed; The plated film requirement of different sorts, shape product is satisfied in shadow zone in the time of can eliminating complex configuration product film forming, has certain agile property; Can be coated with multiple color film; Production efficiency is high, and floor space is little, is applicable to the high quality film forming and the batch process of electronic product, multilayer optical film, automobile component, makeup and clean bath product casings such as mobile phone.
Description of drawings
Fig. 1 is a spatial arrangement vertical view of the present invention;
Fig. 2 is the A-A sectional view of vacuum film coating chamber of the present invention.
Fig. 3 is the multistage rotation transmission of a present invention sample hanger bracket work synoptic diagram.
Fig. 4 is sample hanger bracket of the present invention revolution+rotation+sample rotation transmission synoptic diagram.
1. cooling water channel casees among the figure, 2. gas circuit cabinet, 3. baking vessel, 4. sample hanger bracket transfer car(buggy), 5. sample hanger bracket holder car; 6. holder Car Track, 7. workpiece hangs platform in advance, 8. sample hanger bracket, 9. condense trap, 10. lobe pump+dried pump of water; 11. holding pump, 12. cathode ion sources, 13. slide valves, 14. molecular pumps, the oblique target of 15. compensation; 16. column rotary magnetron target, 17. vacuum film coating chambers, 18. viewing windows, 19. power supplys and electrical control cubicles, 20. drive-motor; 21. bearing assembly, 22. sample jigs, 23. cone gears, 24. pinion(gear)s, 25. master wheels.
Embodiment
Below in conjunction with accompanying drawing and embodiment the invention is further specified.
As shown in Figure 1; Baking vessel 3, workpiece hang platform 7 in advance, vacuum film coating chamber 17 is arranged in the working space successively; Workpiece hangs platform 7 tops in advance and is provided with sample hanger bracket 8; Transfer car(buggy) 4 tops are sample hanger bracket holder car 5 and holder Car Track 6 thereof, and above workpiece hangs platform 7 in advance, the corresponding position, indoor bottom of baking vessel 3, vacuum film coating chamber 17 is equipped with holder Car Track 6 equally, many group column rotary magnetron target 16, the oblique target 15 of compensation and cathode ion sources 12 are equipped with in vacuum film coating chamber 17 inside; There is the bearing assembly 21 that docks with sample hanger bracket 8 at indoor center up and down; Outdoor connecing joined pumped vacuum systems, mainly comprises water condense trap 9, molecular pump 14, slide valve 13, lobe pump+dried pump 10 and holding pump 11, and a plurality of viewing windows 18 are housed on the door of chamber.Whole in addition vacuum coating film equipment connects is furnished with cooling water channel system, air-channel system and power supply and system.
As shown in Figure 2; Vacuum film coating chamber 17 indoor sample hanger brackets 8 dock with bearing assembly 21 and are positioned at the center; Column rotary magnetron target 16 is organized in installation in parallel on every side more, in the both sides up and down of sample hanger bracket 8, the oblique target 15 of symmetric compensation is installed between the column magnetic controlling target 16.
Like Fig. 3 and shown in Figure 4, this equipment has planetary train sample hanger bracket 8, can select dissimilar sample hanger bar assemblies is installed according to needs of production, wherein can be divided into fixed and rotation type.Be the sample hanger bracket of rotation type type among the figure, in the time of except that the revolution that can accomplish the sample hanger bar and rotation, sample suspension place of bar can self be rotated.This function of fixed nothing is only accomplished the revolution and the rotation of sample hanger bar.Fixed and rotation type carries out the conversion between the two through the method that changes detachable sample hanger bar, can select to install according to the actual condition and the production requirement of product.
As shown in Figure 4, drive-motor 20 makes sample hanger bracket 8 revolution of rotation type type, and master wheel 25 drive pinions 24 rotate in the time of revolution; Make 8 rotations of sample hanger bracket; Drive cone gear 23 in the time of rotation and rotate, thereby the sample jig 22 that is engaged with is rotated, i.e. sample suspension place is rotated.
Production Flow Chart of the present invention is: sample hanger bracket 8 at first hangs platform 7 hung samples at workpiece in advance, transfer car(buggy) 4 is rested in workpiece hang in advance between platform 7 and the baking vessel 3, by 5 tractions of sample hanger bracket holder car; Sample hanger bracket 8 moves along holder Car Track 6, gets into baking vessel's 3 baking pre-treatment, after baking is heated and finished; Sample hanger bracket 8 is moved back on the sample hanger bracket transfer car(buggy) 4, is transported to the vacuum film coating chamber 17 indoor plated films that vacuumize of the other end, the vacuum system water receiving trap 9 that condenses by transfer car(buggy) 4; Accelerate vacuum pumping rate, during plated film, cathode ion source 12 can be cleaned sample surfaces; And the ionization working gas, improve quality of forming film.At this moment; If need the uninterrupted plated film of producing; With the second cover sample hanger bracket with identical flow process suspension product substrate and put into baking vessel 3 pre-treatment of heating, treat that the first cover sample hanger bracket sample plated film finishes after, transport back workpiece and hang platform 7 in advance and pluck and unload and hang the next batch sample substrate; Can the second cover sample hanger bracket be transported into simultaneously and vacuumize plated film in the vacuum film coating chamber 17, realize semicontinuous production.
Filming equipment of the present invention, column magnetic controlling target 16 promptly can use separately with the oblique target 15 of compensation, also can unite compound use, is coated with the film that a kind of material or multiple material target obtain different sorts, different colours.
Claims (2)
1. the color coating apparatus of a vacuum magnetic-control sputtering; Comprise that the baking vessel (3), the workpiece that are arranged in successively in the working space hang platform (7), vacuum film coating chamber (17) and sample hanger bracket transfer car(buggy) (4) in advance, said sample hanger bracket transfer car(buggy) (4) top is sample hanger bracket holder car (5) and holder Car Track (6) thereof; The corresponding position, indoor bottom that hangs platform (7) top, baking vessel (3), vacuum film coating chamber (17) at workpiece in advance is equipped with holder Car Track (6) equally, and said workpiece hangs platform (7), baking vessel (3) and the holder Car Track (6) of vacuum film coating chamber (17) three stations in advance and is connected; Said workpiece hangs in advance on the holder Car Track of platform (7) sample hanger bracket (8) is set; Many group column rotary magnetron targets (16) are equipped with in said vacuum film coating chamber (17) inside; There is the bearing assembly (21) that docks with sample hanger bracket (8) at the center about in the vacuum film coating chamber (17); The external pumped vacuum systems of vacuum film coating chamber (17); Vacuum film coating chamber (17) Men Shangyou is equipped with a plurality of viewing windows (18), it is characterized in that: in the both sides up and down of sample hanger bracket (8), the oblique target of symmetric compensation (15) is installed between the column magnetic controlling target (16).
2. color coating apparatus according to claim 1 is characterized in that: said sample hanger bracket (8) adopts planetary gear construction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100129967A CN101988187B (en) | 2009-08-07 | 2009-08-07 | Vacuum magnetron sputtering color plating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100129967A CN101988187B (en) | 2009-08-07 | 2009-08-07 | Vacuum magnetron sputtering color plating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101988187A CN101988187A (en) | 2011-03-23 |
| CN101988187B true CN101988187B (en) | 2012-11-07 |
Family
ID=43744974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009100129967A Active CN101988187B (en) | 2009-08-07 | 2009-08-07 | Vacuum magnetron sputtering color plating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101988187B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102234778B (en) * | 2011-04-27 | 2013-06-12 | 东莞市汇成真空科技有限公司 | Method and device for vacuum magnetron sputtering of aluminized film on hub of automobile |
| CN113061870A (en) * | 2021-04-02 | 2021-07-02 | 泸州韶光智造科技有限公司 | Continuous vacuum coating production line and method for optical thin film component |
| CN116334568A (en) * | 2021-12-23 | 2023-06-27 | 江苏菲沃泰纳米科技股份有限公司 | Unidirectional rotation device, feeding device and vacuum coating equipment |
| TWI823612B (en) * | 2022-10-13 | 2023-11-21 | 財團法人金屬工業研究發展中心 | Spin coating jig and coating device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5096562A (en) * | 1989-11-08 | 1992-03-17 | The Boc Group, Inc. | Rotating cylindrical magnetron structure for large area coating |
| CN101343724A (en) * | 2008-08-15 | 2009-01-14 | 厦门建霖工业有限公司 | Method for functional decoration film coating on engineering plastic rubber surface |
| CN201442976U (en) * | 2009-08-07 | 2010-04-28 | 沈阳科友真空技术有限公司 | Vacuum magnetron sputtering coating machine with inclined compensating targets |
-
2009
- 2009-08-07 CN CN2009100129967A patent/CN101988187B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5096562A (en) * | 1989-11-08 | 1992-03-17 | The Boc Group, Inc. | Rotating cylindrical magnetron structure for large area coating |
| CN101343724A (en) * | 2008-08-15 | 2009-01-14 | 厦门建霖工业有限公司 | Method for functional decoration film coating on engineering plastic rubber surface |
| CN201442976U (en) * | 2009-08-07 | 2010-04-28 | 沈阳科友真空技术有限公司 | Vacuum magnetron sputtering coating machine with inclined compensating targets |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101988187A (en) | 2011-03-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101988187B (en) | Vacuum magnetron sputtering color plating equipment | |
| CN101337831B (en) | Method for metalizing surface of ceramic | |
| CN102157708B (en) | Apparatus and method for manufacturing organic el device, and apparatus and method for forming film | |
| CN201442976U (en) | Vacuum magnetron sputtering coating machine with inclined compensating targets | |
| EP2961861B1 (en) | Method of manufacturing multi-layer thin film, member including the same and electronic product including the same | |
| CN109182991B (en) | Relative movement mechanism of magnetron sputtering coating device suitable for coating film on conformal substrate surface and coating method thereof | |
| CN101876062A (en) | Hollow cathode sputtering ion plating device | |
| RU2437964C2 (en) | Substrate holder and installation for application of coating by method of magnetron sputtering on its base | |
| CN104342624B (en) | Method for manufacturing high-temperature-resisting black borosilicate glass | |
| CN106319467A (en) | Vacuum coating equipment suitable for surface coating | |
| CN205062179U (en) | Large tracts of land diamond -like chemical vapor deposition coating film production line | |
| CN206089792U (en) | Plastics coating film production facility | |
| CN116497339A (en) | Automatic continuous vacuum coating production line with revolution and rotation of 3D special-shaped workpiece | |
| CN103103481A (en) | Multi-arc magnetic control ion plating equipment | |
| CN214572209U (en) | Vacuum coating equipment | |
| CN112267101A (en) | Continuous automatic conveying sputtering film forming device with revolution and rotation structure | |
| CN109912233A (en) | The three glass evacuated coating film production lines of silver medal LOW-E | |
| CN107779835A (en) | A kind of method of continous way magnetic control sputtering device and continous way magnetron sputtering | |
| CN202482421U (en) | Glass magnetic control multi-arc ion plating machine | |
| CN219689836U (en) | Vacuum magnetron sputtering double-sided film plating machine | |
| KR101245324B1 (en) | Aluminum coated steel sheet and method for manufacturing the same | |
| CN206127395U (en) | Acrylic acid cathode electrophoresis lacquer vacuum coating composite biocoating device | |
| CN219689835U (en) | Vacuum magnetron sputtering double-sided coating system | |
| CN214422739U (en) | Continuous automatic conveying sputtering film forming device with revolution and rotation structure | |
| CN109722639A (en) | A kind of horizontal magnetic control film coating production line |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |