TWI823612B - Spin coating jig and coating device - Google Patents

Abstract

A spin coating jig is adapted for being disposed in a cavity provided with target sources and adapted for coating workpieces in the cavity. The spin coating jig includes a base, bearing platforms and partitions. The base has a first rotating shaft, and the base is adapted for being rotatably disposed in the cavity along the first rotating shaft. The bearing platforms are disposed on the base, the bearing platforms are adapted for carrying the workpieces, and the target sources are adapted for being located around the bearing platforms to carry out a coating procedure on the workpieces carried by the bearing platforms respectively. The partitions are disposed on the base and separate the bearing platforms.

Description

Rotating coating fixture and coating device

The present invention relates to a coating fixture and a coating device, and in particular to a rotating coating fixture and a coating device.

Compared with conventional single-layer coatings, multi-layer coatings have the advantages of higher hardness and better wear resistance. It is known that to coat a workpiece with multiple layers of coating, it is necessary to turn off the target source after coating one layer of coating and turn on another target source to perform the next layer of coating on the workpiece. The overall process time is quite long.

The invention provides a rotating coating fixture, which helps the coating process to have higher efficiency.

The present invention provides a coating device, which has the above-mentioned rotating coating fixture.

A rotating coating fixture of the present invention is suitable for being installed in a cavity provided with multiple target sources, and is suitable for coating multiple workpieces in the cavity, and includes a base, multiple bearing platforms and multiple partitions. . The base has a first rotating axis, and the base is adapted to be rotatably disposed in the cavity along the first rotating axis. These carrying platforms are arranged on the base, and these carrying platforms are suitable for carrying these workpieces. These target sources are suitable for being located around these carrying platforms, so as to perform coating processes on the workpieces carried by these carrying platforms respectively. These partitions are arranged on the base and separate the bearing platforms.

In an embodiment of the present invention, the above-mentioned bearing platforms are rotatably disposed on the base along a plurality of second rotation axes.

In an embodiment of the present invention, the above-mentioned rotating coating fixture further includes a first driving component and a plurality of second driving components. The first driving component drives the first rotating shaft to rotate, and the second driving components respectively drive the second driving components. The shaft rotates.

In an embodiment of the present invention, the above-mentioned rotating coating jig further includes a plurality of compartments separated by the partitions, the number of these compartments is equal to the number of the bearing platforms, and the bearing platforms are located in the compartments.

In an embodiment of the present invention, the above-mentioned rotating coating jig further includes a plurality of compartments separated by the partitions. The number of these compartments is greater than the number of the bearing platforms. The number of the bearing platforms is located in the compartments. Within.

In one embodiment of the present invention, the above-mentioned compartments include a plurality of main compartments and a plurality of auxiliary compartments. The main compartments and the auxiliary compartments are arranged alternately, and the bearing platforms are located in the main compartments.

In an embodiment of the present invention, the volume of each main compartment is larger than the volume of each auxiliary compartment.

In one embodiment of the present invention, the above-mentioned main compartments and these auxiliary compartments are centered on the first rotating shaft and are arranged around the first rotating shaft. Each of these main compartments and these auxiliary compartments It is a sector-shaped space, and an arc length of each sub-compartment corresponds to a width of each target source.

A coating device of the present invention is suitable for coating multiple workpieces, and includes a cavity, multiple target sources and the above-mentioned rotating coating fixture. These target sources are placed in the cavity. The rotating coating fixture is installed in the cavity and between the target sources.

In an embodiment of the present invention, the above-mentioned target sources include at least one first target source and at least one second target source, and the type of each first target source is different from the type of each second target source.

Based on the above, the coating device of the present invention can coat multiple workpieces in a cavity. There are multiple target sources in the cavity, and the rotating coating fixture is installed in the cavity and located between these target sources. The base of the rotating coating fixture is rotatably arranged in the cavity along the first rotating axis. These bearing platforms are arranged on the base, and these bearing platforms are suitable for bearing the workpieces. The target sources are located around these bearing platforms. These partitions are arranged on the base and separate the bearing platforms. The workpieces on each carrying platform will move to positions corresponding to different target sources with different timings for continuous multi-layer coating processes. The designer only needs to arrange the order of coating, set the target source position according to the coating order, and then move the carrier and workpiece to different target sources at different times to complete the multi-layer coating process on the workpiece. There is no need to turn off the target source during the process, and the effect of continuous coating can be achieved with high efficiency. In addition, two adjacent loading platforms are separated by a middle partition to prevent the workpiece on the loading platform from being sputtered by other target sources. Furthermore, the coating device of the present invention can operate on multiple workpieces at one time, thereby improving efficiency.

Figure 1 is a schematic top view of a coating device according to an embodiment of the present invention. Referring to FIG. 1 , the coating device 20 of this embodiment is suitable for coating multiple workpieces (not shown) at the same time. The type of workpiece is, for example, a tool, but is not limited thereto. The coating device 20 includes a cavity 21 , a plurality of target sources 22 and a rotating coating fixture 100 . These target sources 22 are provided in the cavity 21 . These target sources 22 include at least one first target source 24 and at least one second target source 26 . The type of the first target source 24 is different from the type of the second target source 26 .

Specifically, in this embodiment, the number of target sources 22 is four, including two first target sources 24 and two second target sources 26 arranged in a staggered manner. The first target source 24 is, for example, a Ti target, and the first target source 24 is, for example, a TiAl target. Of course, the number, type, and configuration of the target sources 22 are not limited thereto.

The rotating coating jig 100 is disposed in the cavity 21 and between the target sources 22 . The rotating coating jig 100 includes a base 110 , a plurality of bearing stages 120 and a plurality of partitions 130 . The base 110 has a first rotating shaft 112 . The rotating coating jig 100 further includes a first driving component 140 . The first driving component 140 drives the first rotating shaft 112 to rotate. The base 110 is adapted to be rotatably disposed in the cavity 21 along the first rotating shaft 112 .

The bearing platforms 120 are arranged on the base 110 . The bearing platforms 120 are suitable for carrying the workpieces. The target sources 22 are suitable for being located around the bearing platforms 120 . Since the bearing platform 120 is disposed on the base 110 , the bearing platform 120 will be driven by the base 110 to rotate along the first rotation axis 112 .

In this embodiment, the surface of the workpiece that needs to be coated is, for example, a three-dimensional surface. Therefore, the rotating coating jig 100 can optionally include a plurality of second driving components 142 that drive the second rotating shafts 122 to rotate respectively. . Therefore, these bearing platforms 120 are rotatably disposed on the base 110 along the plurality of second rotation axes 122 .

In addition, in this embodiment, since the supporting stages 120 rotate independently through the second driving components 142, the rotation speeds of the supporting stages 120 can also be different to meet different coating requirements. Of course, in other embodiments, if the surface of the workpiece to be coated is flat, the carrying platform 120 may not rotate.

The partitions 130 are disposed on the base 110 and separate the carrying platforms 120 . These partitions 130 separate a plurality of compartments 132 . In this embodiment, the number of the compartments 132 is equal to the number of the carrying platforms 120 , and the carrying platforms 120 are located in the compartments 132 . The partition 130 is used to minimize interference of the workpiece from other adjacent target sources 22 .

When a multi-layer coating process is to be performed on a workpiece carried on the carrying platform 120 , in one embodiment, the workpiece will be moved by the corresponding first target source 22 (for example, as shown in FIG. 110 ) during the slow revolution of the base 110 The first target source 24) above 1 is coated with a first layer of coating. During this process, the second driving assembly 142 can selectively drive the second rotating shaft 122 to rotate, so that the carrying platform 120 rotates along the second rotating shaft 122 . The rotation speed of the second rotating shaft 122 is greater than the rotation speed of the first rotating shaft 112, so that the entire outer surface of the workpiece is evenly coated with the corresponding first layer of coating.

Then, when the workpiece is transferred to the next target source 22 (for example, the second target source 26 on the left side of Figure 1), it will be plated by the corresponding second target source 22 in the area covered by the second target source 22. Second layer of coating. During this process, the second driving assembly 142 can selectively drive the second rotating shaft 122 to rotate, so that the carrying platform 120 rotates along the second rotating shaft 122 . Therefore, the entire outer surface of the workpiece can be evenly coated with the corresponding second layer of coating.

Similarly, when the workpiece is transferred to the next target source 22 (for example, the first target source 24 at the bottom of Figure 1), it will be plated by the corresponding third target source 22 in the area covered by the third target source 22. Apply the third layer of coating. During this process, the second driving assembly 142 can selectively drive the second rotating shaft 122 to rotate, so that the carrying platform 120 rotates along the second rotating shaft 122 . Therefore, the entire outer surface of the workpiece can be evenly coated with the corresponding third layer of coating.

Then, when the workpiece is transferred to the next target source 22 (for example, the second target source 26 on the right side of Figure 1), it will be plated by the corresponding fourth target source 22 in the area covered by the fourth target source 22. Apply the fourth layer of coating. During this process, the second driving assembly 142 can selectively drive the second rotating shaft 122 to rotate, so that the carrying platform 120 rotates along the second rotating shaft 122 . Therefore, the entire outer surface of the workpiece can be evenly coated with the corresponding fourth layer of coating.

Repeat the above steps to create multi-layer coatings. The rotation speed of the base 110 can control the thickness of each coating layer, and the rotation speed of the bearing table 120 can control the uniformity of the film thickness in various parts of the workpiece.

In one embodiment, the Ar gas flow rate is 20 SCCM and the nitrogen gas flow rate is 5 SCCM. A current of 2A is supplied to the first target source 24, and a current of 2A is supplied to the second target source 26. The rotation speed of the first rotation axis 112 (revolution) of the base 110 is 5 minutes/revolution, the rotation speed of the second rotation axis 122 (rotation) of the bearing platform 120 is 20 seconds/revolution, and the coating time is 120 minutes. The above process can produce 50 layers of AlTiN/TiN nano multi-layer coating, with a total thickness of about 1.7 microns (μm), a wear rate of 0.72x10 ^-6 mm ³ /Nm, and a hardness of 28GPa. Of course, the above parameters are not limited to this.

In another embodiment, the base 110 may also first stop at the positions of the workpieces on the supporting stages 120 corresponding to the target sources 22 to form the first layer of coating. After the first layer of coating is plated, the base 110 rotates to change the carrying platform 120 and the carried workpiece to a position corresponding to the next target source 22, and the base 110 stops rotating so that the workpiece can be formed at this position. Second layer of coating. Next, the positions of the carrying platform 120 and the carried workpiece are repeatedly adjusted, and then changed to the position corresponding to the next target source 22 again. The target source 22 is then allowed to continue to perform the next coating process on the workpiece after position adjustment. Repeat the above cycle until the required number of multi-layer coatings are completed on the workpiece.

It is worth mentioning that the coating device 20 of this embodiment does not need to significantly modify the existing equipment. It only needs to use a new rotating coating jig 100 and configure the required target source 22 accordingly, which is quite cost-saving. In addition, since these target sources 22 do not need to be turned off during the manufacturing process, the coating rate is faster and has high mass production.

Figure 2 is a schematic diagram of the base and bearing platform of a rotating coating fixture according to another embodiment of the present invention. The partition 130 is hidden in Figure 2 . Please refer to FIG. 2 . The main difference between the rotating coating jig 100 a of this embodiment and the rotating coating jig 100 of the previous embodiment is the number of bearing stages 120 . In this embodiment, the number of bearing platforms 120 is 10, but the number of bearing platforms 120 is not limited thereto.

Figure 3 is a schematic top view of a coating device according to another embodiment of the present invention. The first driving component 140 (FIG. 1) and the second driving component 142 (FIG. 1) are hidden in FIG. 3. Please refer to FIG. 3. The main difference between the rotating coating jig 100b of FIG. 3 and the rotating coating jig 100 of FIG. 1 lies in the form of the compartments 132 and 132b. In this embodiment, the number of the compartments 132b is greater than the number of the carrying platforms 120, and the carrying platforms 120 are located in several of the compartments 132b.

Specifically, these compartments 132b include a plurality of main compartments 134 and a plurality of auxiliary compartments 136. The main compartments 134 and the auxiliary compartments 136 are arranged alternately. The volume of each main compartment 134 is larger than that of each auxiliary compartment. 136 volume. The carrying platforms 120 are located in the main compartments 134 . Since the auxiliary compartment 136 is located between two adjacent main compartments 134, when the workpiece on the carrying platform 120 located in the main compartment 134 is sputtered by one of the target sources 22, the design of the auxiliary compartment 136 can avoid this problem. The workpiece is sputtered by another target source 22 to ensure the composition of the coating.

The main compartments 134 and the auxiliary compartments 136 are arranged around the first rotating shaft 112 with the first rotating shaft 112 as the center. In this embodiment, each of the main compartments 134 and the auxiliary compartments 136 is a sector-shaped space, and an arc length L1 of each auxiliary compartment 136 corresponds to a width L2 of each target source 22 . Such a design can further reduce the interference of different target sources 22 on the workpiece.

To sum up, the coating device of the present invention can be used to coat multiple workpieces in a cavity. There are multiple target sources in the cavity, and the rotating coating fixture is installed in the cavity and located between these target sources. The base of the rotating coating fixture is rotatably arranged in the cavity along the first rotating axis. These bearing platforms are arranged on the base, and these bearing platforms are suitable for bearing the workpieces. The target sources are located around these bearing platforms. These partitions are arranged on the base and separate the bearing platforms. The workpieces on each carrying platform will move to positions corresponding to different target sources with different timings for continuous multi-layer coating processes. The designer only needs to arrange the order of coating, set the target source position according to the coating order, and then move the carrier and workpiece to different target sources at different times to complete the multi-layer coating process on the workpiece. There is no need to turn off the target source during the process, and the effect of continuous coating can be achieved with high efficiency. In addition, two adjacent loading platforms are separated by a middle partition to prevent the workpiece on the loading platform from being sputtered by other target sources. Furthermore, the coating device of the present invention can operate on multiple workpieces at one time, thereby improving efficiency.

L1: arc length L2: Width 20: Coating device 21:Cavity 22:Target source 24:First target source 26:Second target source 100, 100a, 100b: Rotating coating fixture 110:Pedestal 112:First axis 120: Bearing platform 122:Second axis 130, 130b: Partition 132, 132b: Compartment 134: Main compartment 136: Secondary compartment 140: First drive component 142: Second drive assembly

Figure 1 is a schematic top view of a coating device according to an embodiment of the present invention. Figure 2 is a schematic diagram of the base and bearing platform of a rotating coating fixture according to another embodiment of the present invention. Figure 3 is a schematic top view of a coating device according to another embodiment of the present invention.

20: Coating device

21:Cavity

22:Target source

24:First target source

26:Second target source

100: Rotary coating fixture

110:Pedestal

112:First axis

120: Bearing platform

122:Second axis

130:Partition

132: Compartment

140: First drive component

142: Second drive assembly

Claims (8)

A rotating coating fixture, suitable for being installed in a cavity provided with multiple target sources, and suitable for coating multiple workpieces in the cavity, including: a base having a first rotating shaft, the base being suitable for is rotatably arranged in the cavity along the first rotating axis; a plurality of bearing platforms are arranged on the base, the bearing platforms are suitable for carrying the workpieces, and the target sources are suitable for being located on the bearing platforms around, to perform coating processes on the workpieces carried by the bearing platforms respectively; a plurality of partitions, arranged on the base and separating the bearing platforms; a first driving component and a plurality of second driving components, the The bearing platforms are rotatably disposed on the base along a plurality of second rotating shafts, the first driving component drives the first rotating shaft to rotate, and the second driving components respectively drive the second rotating shafts to rotate. The rotating coating fixture as described in claim 1 further includes a plurality of compartments separated by the partitions. The number of the compartments is equal to the number of the bearing platforms. The bearing platforms are located in the compartments. within. The rotating coating fixture as described in claim 1 further includes a plurality of compartments separated by the partitions. The number of the compartments is greater than the number of the bearing platforms. The bearing platforms are located in the compartments. Within the number. The rotating coating jig according to claim 3, wherein the compartments include a plurality of main compartments and a plurality of auxiliary compartments, the main compartments and the auxiliary compartments are arranged alternately, and the bearing platforms are located at The main compartments. The rotating coating fixture as claimed in claim 4, wherein the volume of each main compartment is larger than the volume of each auxiliary compartment. The rotating coating fixture according to claim 4, wherein the main compartments and the auxiliary compartments are centered on the first rotating shaft and are arranged around the first rotating shaft. The main compartments and the auxiliary compartments are arranged around the first rotating shaft. Each of the auxiliary compartments is a fan-shaped space, and an arc length of each auxiliary compartment corresponds to a width of each target source. A coating device suitable for coating multiple workpieces, including: a cavity; a plurality of target sources disposed in the cavity; and a rotating coating jig as described in any one of claims 1 to 6, disposed in the cavity and between the target sources. The coating device according to claim 7, wherein the target sources include at least one first target source and at least one second target source, and the type of each first target source is different from the type of each second target source.

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