CN220520600U - Vacuum coating device - Google Patents
Vacuum coating device Download PDFInfo
- Publication number
- CN220520600U CN220520600U CN202322138427.5U CN202322138427U CN220520600U CN 220520600 U CN220520600 U CN 220520600U CN 202322138427 U CN202322138427 U CN 202322138427U CN 220520600 U CN220520600 U CN 220520600U
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- driving
- rotating
- plating
- vacuum coating
- frame
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 22
- 238000007747 plating Methods 0.000 claims abstract description 47
- 239000011248 coating agent Substances 0.000 claims abstract description 18
- 238000000576 coating method Methods 0.000 claims abstract description 18
- 244000309464 bull Species 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 239000007888 film coating Substances 0.000 description 7
- 238000009501 film coating Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000053 physical method Methods 0.000 description 2
- 238000005269 aluminizing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The application relates to the technical field of film processing equipment, especially, relate to a vacuum coating device, including plating the case, install evacuation tube on plating the case, install the coating device on plating the case and set up a plurality of racks in plating the incasement, be provided with rotating device on the plating case, rotating device is including running fit on plating the case and being used for driving a plurality of rack pivoted rotating frame and installing on plating the case and be used for driving rotating frame pivoted driving piece. The vacuum coating device has the effect of improving the processing quality of the workpiece.
Description
Technical Field
The application relates to the technical field of water boilers, in particular to a vacuum coating device.
Background
Vacuum coating is a technology for producing film materials by a physical method, atoms of the materials in a vacuum chamber are isolated from a heating source and are beaten on the surface of an object to be coated, and the technology is firstly used for producing optical lenses such as navigation telescope lenses and the like; and then the film is extended to other functional films, such as aluminizing of record, decorative coating, material surface modification and the like, for example, gold-like coating of watch shell, mechanical cutter coating, and change of processing red hardness. The film layer is prepared in vacuum and comprises plating crystalline metal, semiconductor, insulator and other simple substance or compound films, and although chemical vapor deposition adopts vacuum means such as decompression, low pressure or plasma, the general vacuum plating refers to the deposition of a film by a physical method, wherein the vacuum plating has three forms, namely evaporation plating, sputtering plating and ion plating.
The prior vacuum coating device is the most important equipment for vacuum coating, and comprises a coating box, a vacuumizing pipe arranged on the coating box, a coating device arranged on the coating box and a plurality of placing frames arranged in the coating box, wherein the vacuumizing pipe is connected with a vacuum pump, when a workpiece is required to be subjected to vacuum coating processing, the plurality of workpieces are placed on the placing frames of the coating box, then the coating box is vacuumized through the vacuumizing pipe, then a metal vapor flow is sprayed out through the coating device and sprayed onto the surface of the workpiece, and a solid film is formed after the metal film is condensed.
The inventors consider that: the prior art has the defect that when a workpiece on a placing rack is subjected to film coating processing, the film coating on the surface of the workpiece is uneven, so that the processing quality of the workpiece is poor.
Disclosure of Invention
Aiming at the defects existing in the prior art, the utility model provides a vacuum coating device. The vacuum coating device has the effect of improving the processing quality of the workpiece.
The application provides a vacuum coating device adopts following technical scheme:
the utility model provides a vacuum coating device, includes plating the case, installs evacuation tube on plating the case, installs the coating film device on plating the case and sets up a plurality of racks in plating the incasement, be provided with rotating device on the plating case, rotating device is including the rotating fit on plating the case and be used for driving a plurality of rack pivoted rotating frame and install on plating the case and be used for driving rotating frame pivoted driving piece.
Through adopting above-mentioned technical scheme, place the rack with the work piece on, start the driving piece then, can drive the rotating turret and rotate, and then drive the rack and rotate, drive the work piece and rotate with the central axis of the output shaft of driving piece for when carrying out the coating film processing to the work piece, the coating film on work piece surface is more even, can promote the processingquality to the work piece.
Optionally, be provided with rotary device on the plating tank, rotary device is including installing bull gear on plating tank inner wall, running fit on the rotating turret and be used for driving rack pivoted dwang and install on the rotating turret and be used for driving dwang pivoted rotating assembly, the rack rotates with the central axis of dwang.
Through adopting above-mentioned technical scheme, when the rotating turret rotated, drive the rotation subassembly and rotate, drive the dwang and rotate, can realize that the work piece rotates with the central axis of dwang, further promote the homogeneity when work piece coating film processing.
Optionally, the rotating assembly includes driving gear and the driven gear of installing on the dwang on the rotating turret, driven gear is located between driving gear and the bull gear, and driven gear and driving gear and bull gear all mesh.
Through adopting above-mentioned technical scheme, when the rotating turret rotates, can drive the driving gear and rotate, and then drive a plurality of driven gears and rotate, realize the rotation of dwang.
Optionally, a placing plate is arranged on the placing frame, and a clamping device for clamping the workpiece is arranged on the placing plate.
Through adopting above-mentioned technical scheme, place the work piece on placing the board, can press from both sides tightly the work piece through clamping device afterwards, and then make the work piece place more stably on placing the board.
Optionally, the clamping device comprises a clamping frame which is matched on the placing plate in a rotating way and used for clamping the workpiece, and an adjusting component used for driving the clamping frame to rotate.
Through adopting above-mentioned technical scheme, through adjusting part, drive the clamping frame and rotate for the clamping frame presss from both sides tightly the work piece, realizes the convenient clamp to the work piece.
Optionally, the adjusting part is including being used for driving clamping frame pivoted bracing piece, sliding fit's slider on the rack and being used for driving the gliding screw rod of slider, slider and screw rod screw thread cooperation, and the slider is used for driving the bracing piece and rotates.
Through adopting above-mentioned technical scheme, rotate the screw rod, can drive the slider and slide, and then drive the bracing piece and rotate, realize the rotation regulation to the clamping frame.
Optionally, a T-shaped groove for sliding the sliding block is formed in the placing frame.
Through adopting above-mentioned technical scheme, through the setting in T type groove for the slider is in the slip in-process, can reduce the emergence of the phenomenon of sliding out from T type groove.
Optionally, a guiding inclined plane is arranged on the clamping frame, and the guiding inclined plane is obliquely arranged towards a place close to the placing plate along a direction deviating from the placing frame.
Through adopting above-mentioned technical scheme, through the setting of direction inclined plane for the clamping frame embolias on the work piece more easily, and press from both sides the work piece tightly.
In summary, the present application includes at least one of the following beneficial technical effects:
the workpiece is placed on the placing frame, then the driving piece is started, the rotating frame can be driven to rotate, the placing frame is driven to rotate, the workpiece is driven to rotate, the film coating on the surface of the workpiece is more uniform when the workpiece is subjected to film coating processing, and the processing quality of the workpiece can be improved.
Drawings
FIG. 1 is a partial cross-sectional view of the present application;
fig. 2 is a partial enlarged view at a in fig. 1.
Reference numerals illustrate: 1. plating box; 2. vacuumizing the tube; 3. a placing rack; 4. a rotating device; 41. a rotating frame; 42. a driving member; 5. a rotating device; 51. a large gear ring; 52. a rotating lever; 53. a rotating assembly; 531. a drive gear; 532. a driven gear; 6. placing a plate; 7. a clamping device; 71. a clamping frame; 711. a guide slope; 72. an adjustment assembly; 721. a support rod; 722. a slide block; 723. and (3) a screw.
Detailed Description
The present application is described in further detail below in conjunction with figures 1-2.
The embodiment of the application discloses a vacuum coating device. Referring to fig. 1 and 2, the vacuum pump comprises a plating tank 1, a vacuum pump tube 2 fixedly installed on the plating tank 1, a coating device (not shown in the figure) installed on the plating tank 1 and a plurality of placing frames 3 arranged in the plating tank 1, wherein the plating tank 1 is of a hollow cylindrical structure, the vacuum pump tube 2 is communicated with the inner space of the plating tank 1, the plating tank 1 is provided with a placing door which can be opened in a rotating fit manner, and the placing frames 3 are totally provided with four placing doors. When the workpiece is required to be subjected to film coating processing, the placing door is opened firstly, then the workpiece is placed on the placing frame 3, then the placing door is closed, the vacuum pumping pipe 2 is used for vacuumizing the plating box 1, and then the film coating device is used for carrying out film coating processing on the workpiece.
Referring to fig. 1 and 2, a rotating device 4 is disposed on the plating tank 1, the rotating device 4 includes a rotating frame 41 which is rotationally matched with the plating tank 1 and is used for driving the plurality of placing frames 3 to rotate, and a driving piece 42 which is fixedly installed on the plating tank 1 and is used for driving the rotating frame 41 to rotate, the driving piece 42 can directly adopt a motor, a shell of the driving piece 42 is fixedly installed on the plating tank 1, an output shaft of the driving piece 42 is fixedly connected with the rotating frame 41, and the rotating frame 41 is in a cross-shaped structure.
Referring to fig. 1 and 2, a rotating device 5 for driving the placement frame 3 to rotate is provided on the plating tank 1, the rotating device 5 comprises a large gear ring 51 fixedly installed on the inner wall of the plating tank 1, a rotating rod 52 which is in rotating fit on the rotating frame 41 and is used for driving the placement frame 3 to rotate, and a rotating assembly 53 which is installed on the rotating frame 41 and is used for driving the rotating rod 52 to rotate, the rotating rod 52 is arranged along the height direction of the plating tank 1, and four rotating rods 52 are provided.
Referring to fig. 1 and 2, the rotating assembly 53 includes a driving gear 531 fixedly mounted on the rotating frame 41 and a driven gear 532 fixedly mounted on the rotating lever 52, the driven gear 532 is located between the driving gear 531 and the ring gear 51, and the driven gear 532 is engaged with both the driving gear 531 and the ring gear 51. When a workpiece needs to be processed, the driving piece 42 is started to drive the rotating frame 41 to rotate, the placing frame 3 is driven to rotate by the central axis of the output shaft of the driving piece 42, meanwhile, when the rotating frame 41 rotates, the driving gear 531 is driven to rotate, the driven gear 532 is driven to rotate, the placing frame 3 is driven to rotate by the central axis of the rotating rod 52, and the workpiece is driven to revolve by the central axis of the output shaft of the driving piece 42 and rotate by the central axis of the rotating rod 52.
Referring to fig. 1 and 2, a placing plate 6 is disposed on the placing frame 3, a clamping device 7 for clamping a workpiece is disposed on the placing plate 6, the clamping device 7 comprises a clamping frame 71 which is rotationally matched with the placing plate 6 and used for clamping the workpiece, and an adjusting component 72 used for driving the clamping frame 71 to rotate, one end of the clamping frame 71 is rotationally matched with the placing plate 6 through a rotating shaft, the upper surface of the clamping frame 71 is higher than the upper surface of the placing plate 6, a guide inclined surface 711 is disposed on the clamping frame 71, and the guide inclined surface 711 is obliquely disposed along a direction deviating from the placing frame 3 and close to the placing plate 6.
Referring to fig. 1 and 2, the adjusting component 72 includes a supporting rod 721 for driving the clamping frame 71 to rotate, a sliding block 722 slidingly engaged with the placing frame 3, and a screw 723 for driving the sliding block 722 to slide, both ends of the supporting rod 721 are fixedly provided with a rotating seat, one end of the supporting rod 721 is rotationally engaged with the clamping frame 71 through the rotating seat, the other end is rotationally engaged with the sliding block 722 through the rotating seat, a T-shaped groove for the sliding block 722 to slide is formed in the placing frame 3, three sliding blocks 722 along the height direction of the plating box 1 are in threaded engagement with the screw 723, and the sliding block 722 is used for driving the supporting rod 721 to rotate, and the placing frame 3 rotationally supports the screw 723.
Referring to fig. 1 and 2, when a workpiece needs to be clamped, the workpiece is firstly placed on the placing plate 6, then the screw 723 is rotated to drive the slide block 722 to lift and further drive the support rod 721 to rotate, and when the slide block 722 is lifted, the support rod 721 is driven to rotate and the clamping frame 71 is driven to rotate towards a horizontal position to clamp the bottom of the workpiece on the placing plate 6, so that the workpiece is clamped, and then the workpiece is coated.
The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.
Claims (8)
1. The utility model provides a vacuum coating device, includes plating box (1), installs evacuation tube (2) on plating box (1), installs the coating film device on plating box (1) and sets up a plurality of racks (3) in plating box (1), its characterized in that: be provided with rotating device (4) on plating box (1), rotating device (4) are including rotating fit on plating box (1) and be used for driving rotating turret (41) of a plurality of racks (3) pivoted and install on plating box (1) and be used for driving rotating turret (41) pivoted driving piece (42).
2. A vacuum coating apparatus according to claim 1, wherein: be provided with rotary device (5) on plating box (1), rotary device (5) are including installing bull gear (51) on plating box (1) inner wall, pivoted on rotating turret (41) and be used for driving rack (3) pivoted dwang (52) and install on rotating turret (41) and be used for driving dwang (52) pivoted rotating assembly (53), rack (3) are rotated with the central axis of dwang (52).
3. A vacuum coating apparatus according to claim 2, wherein: the rotating assembly (53) comprises a driving gear (531) arranged on the rotating frame (41) and a driven gear (532) arranged on the rotating rod (52), the driven gear (532) is arranged between the driving gear (531) and the bull gear (51), and the driven gear (532) is meshed with both the driving gear (531) and the bull gear (51).
4. A vacuum coating apparatus according to claim 3, wherein: the placing rack (3) is provided with a placing plate (6), and the placing plate (6) is provided with a clamping device (7) for clamping a workpiece.
5. The vacuum coating apparatus according to claim 4, wherein: the clamping device (7) comprises a clamping frame (71) which is matched on the placing plate (6) in a rotating mode and is used for clamping a workpiece, and an adjusting assembly (72) which is used for driving the clamping frame (71) to rotate.
6. The vacuum coating apparatus according to claim 5, wherein: the adjusting component (72) comprises a supporting rod (721) for driving the clamping frame (71) to rotate, a sliding block (722) in sliding fit with the placing frame (3) and a screw (723) for driving the sliding block (722) to slide, the sliding block (722) is in threaded fit with the screw (723), and the sliding block (722) is used for driving the supporting rod (721) to rotate.
7. The vacuum coating apparatus according to claim 6, wherein: a T-shaped groove for sliding the sliding block (722) is formed in the placing frame (3).
8. The vacuum coating apparatus according to claim 7, wherein: the clamping frame (71) is provided with a guide inclined plane (711), and the guide inclined plane (711) is obliquely arranged near the placing plate (6) along the direction deviating from the placing frame (3).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202322138427.5U CN220520600U (en) | 2023-08-09 | 2023-08-09 | Vacuum coating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202322138427.5U CN220520600U (en) | 2023-08-09 | 2023-08-09 | Vacuum coating device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN220520600U true CN220520600U (en) | 2024-02-23 |
Family
ID=89926688
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202322138427.5U Active CN220520600U (en) | 2023-08-09 | 2023-08-09 | Vacuum coating device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN220520600U (en) |
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2023
- 2023-08-09 CN CN202322138427.5U patent/CN220520600U/en active Active
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