CN220520600U - Vacuum coating device - Google Patents

Vacuum coating device Download PDF

Info

Publication number
CN220520600U
CN220520600U CN202322138427.5U CN202322138427U CN220520600U CN 220520600 U CN220520600 U CN 220520600U CN 202322138427 U CN202322138427 U CN 202322138427U CN 220520600 U CN220520600 U CN 220520600U
Authority
CN
China
Prior art keywords
driving
rotating
plating
vacuum coating
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202322138427.5U
Other languages
Chinese (zh)
Inventor
金海燕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ningbo Zhenhai Junhe Electronics Co ltd
Original Assignee
Ningbo Zhenhai Junhe Electronics Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ningbo Zhenhai Junhe Electronics Co ltd filed Critical Ningbo Zhenhai Junhe Electronics Co ltd
Priority to CN202322138427.5U priority Critical patent/CN220520600U/en
Application granted granted Critical
Publication of CN220520600U publication Critical patent/CN220520600U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

The application relates to the technical field of film processing equipment, especially, relate to a vacuum coating device, including plating the case, install evacuation tube on plating the case, install the coating device on plating the case and set up a plurality of racks in plating the incasement, be provided with rotating device on the plating case, rotating device is including running fit on plating the case and being used for driving a plurality of rack pivoted rotating frame and installing on plating the case and be used for driving rotating frame pivoted driving piece. The vacuum coating device has the effect of improving the processing quality of the workpiece.

Description

Vacuum coating device
Technical Field
The application relates to the technical field of water boilers, in particular to a vacuum coating device.
Background
Vacuum coating is a technology for producing film materials by a physical method, atoms of the materials in a vacuum chamber are isolated from a heating source and are beaten on the surface of an object to be coated, and the technology is firstly used for producing optical lenses such as navigation telescope lenses and the like; and then the film is extended to other functional films, such as aluminizing of record, decorative coating, material surface modification and the like, for example, gold-like coating of watch shell, mechanical cutter coating, and change of processing red hardness. The film layer is prepared in vacuum and comprises plating crystalline metal, semiconductor, insulator and other simple substance or compound films, and although chemical vapor deposition adopts vacuum means such as decompression, low pressure or plasma, the general vacuum plating refers to the deposition of a film by a physical method, wherein the vacuum plating has three forms, namely evaporation plating, sputtering plating and ion plating.
The prior vacuum coating device is the most important equipment for vacuum coating, and comprises a coating box, a vacuumizing pipe arranged on the coating box, a coating device arranged on the coating box and a plurality of placing frames arranged in the coating box, wherein the vacuumizing pipe is connected with a vacuum pump, when a workpiece is required to be subjected to vacuum coating processing, the plurality of workpieces are placed on the placing frames of the coating box, then the coating box is vacuumized through the vacuumizing pipe, then a metal vapor flow is sprayed out through the coating device and sprayed onto the surface of the workpiece, and a solid film is formed after the metal film is condensed.
The inventors consider that: the prior art has the defect that when a workpiece on a placing rack is subjected to film coating processing, the film coating on the surface of the workpiece is uneven, so that the processing quality of the workpiece is poor.
Disclosure of Invention
Aiming at the defects existing in the prior art, the utility model provides a vacuum coating device. The vacuum coating device has the effect of improving the processing quality of the workpiece.
The application provides a vacuum coating device adopts following technical scheme:
the utility model provides a vacuum coating device, includes plating the case, installs evacuation tube on plating the case, installs the coating film device on plating the case and sets up a plurality of racks in plating the incasement, be provided with rotating device on the plating case, rotating device is including the rotating fit on plating the case and be used for driving a plurality of rack pivoted rotating frame and install on plating the case and be used for driving rotating frame pivoted driving piece.
Through adopting above-mentioned technical scheme, place the rack with the work piece on, start the driving piece then, can drive the rotating turret and rotate, and then drive the rack and rotate, drive the work piece and rotate with the central axis of the output shaft of driving piece for when carrying out the coating film processing to the work piece, the coating film on work piece surface is more even, can promote the processingquality to the work piece.
Optionally, be provided with rotary device on the plating tank, rotary device is including installing bull gear on plating tank inner wall, running fit on the rotating turret and be used for driving rack pivoted dwang and install on the rotating turret and be used for driving dwang pivoted rotating assembly, the rack rotates with the central axis of dwang.
Through adopting above-mentioned technical scheme, when the rotating turret rotated, drive the rotation subassembly and rotate, drive the dwang and rotate, can realize that the work piece rotates with the central axis of dwang, further promote the homogeneity when work piece coating film processing.
Optionally, the rotating assembly includes driving gear and the driven gear of installing on the dwang on the rotating turret, driven gear is located between driving gear and the bull gear, and driven gear and driving gear and bull gear all mesh.
Through adopting above-mentioned technical scheme, when the rotating turret rotates, can drive the driving gear and rotate, and then drive a plurality of driven gears and rotate, realize the rotation of dwang.
Optionally, a placing plate is arranged on the placing frame, and a clamping device for clamping the workpiece is arranged on the placing plate.
Through adopting above-mentioned technical scheme, place the work piece on placing the board, can press from both sides tightly the work piece through clamping device afterwards, and then make the work piece place more stably on placing the board.
Optionally, the clamping device comprises a clamping frame which is matched on the placing plate in a rotating way and used for clamping the workpiece, and an adjusting component used for driving the clamping frame to rotate.
Through adopting above-mentioned technical scheme, through adjusting part, drive the clamping frame and rotate for the clamping frame presss from both sides tightly the work piece, realizes the convenient clamp to the work piece.
Optionally, the adjusting part is including being used for driving clamping frame pivoted bracing piece, sliding fit's slider on the rack and being used for driving the gliding screw rod of slider, slider and screw rod screw thread cooperation, and the slider is used for driving the bracing piece and rotates.
Through adopting above-mentioned technical scheme, rotate the screw rod, can drive the slider and slide, and then drive the bracing piece and rotate, realize the rotation regulation to the clamping frame.
Optionally, a T-shaped groove for sliding the sliding block is formed in the placing frame.
Through adopting above-mentioned technical scheme, through the setting in T type groove for the slider is in the slip in-process, can reduce the emergence of the phenomenon of sliding out from T type groove.
Optionally, a guiding inclined plane is arranged on the clamping frame, and the guiding inclined plane is obliquely arranged towards a place close to the placing plate along a direction deviating from the placing frame.
Through adopting above-mentioned technical scheme, through the setting of direction inclined plane for the clamping frame embolias on the work piece more easily, and press from both sides the work piece tightly.
In summary, the present application includes at least one of the following beneficial technical effects:
the workpiece is placed on the placing frame, then the driving piece is started, the rotating frame can be driven to rotate, the placing frame is driven to rotate, the workpiece is driven to rotate, the film coating on the surface of the workpiece is more uniform when the workpiece is subjected to film coating processing, and the processing quality of the workpiece can be improved.
Drawings
FIG. 1 is a partial cross-sectional view of the present application;
fig. 2 is a partial enlarged view at a in fig. 1.
Reference numerals illustrate: 1. plating box; 2. vacuumizing the tube; 3. a placing rack; 4. a rotating device; 41. a rotating frame; 42. a driving member; 5. a rotating device; 51. a large gear ring; 52. a rotating lever; 53. a rotating assembly; 531. a drive gear; 532. a driven gear; 6. placing a plate; 7. a clamping device; 71. a clamping frame; 711. a guide slope; 72. an adjustment assembly; 721. a support rod; 722. a slide block; 723. and (3) a screw.
Detailed Description
The present application is described in further detail below in conjunction with figures 1-2.
The embodiment of the application discloses a vacuum coating device. Referring to fig. 1 and 2, the vacuum pump comprises a plating tank 1, a vacuum pump tube 2 fixedly installed on the plating tank 1, a coating device (not shown in the figure) installed on the plating tank 1 and a plurality of placing frames 3 arranged in the plating tank 1, wherein the plating tank 1 is of a hollow cylindrical structure, the vacuum pump tube 2 is communicated with the inner space of the plating tank 1, the plating tank 1 is provided with a placing door which can be opened in a rotating fit manner, and the placing frames 3 are totally provided with four placing doors. When the workpiece is required to be subjected to film coating processing, the placing door is opened firstly, then the workpiece is placed on the placing frame 3, then the placing door is closed, the vacuum pumping pipe 2 is used for vacuumizing the plating box 1, and then the film coating device is used for carrying out film coating processing on the workpiece.
Referring to fig. 1 and 2, a rotating device 4 is disposed on the plating tank 1, the rotating device 4 includes a rotating frame 41 which is rotationally matched with the plating tank 1 and is used for driving the plurality of placing frames 3 to rotate, and a driving piece 42 which is fixedly installed on the plating tank 1 and is used for driving the rotating frame 41 to rotate, the driving piece 42 can directly adopt a motor, a shell of the driving piece 42 is fixedly installed on the plating tank 1, an output shaft of the driving piece 42 is fixedly connected with the rotating frame 41, and the rotating frame 41 is in a cross-shaped structure.
Referring to fig. 1 and 2, a rotating device 5 for driving the placement frame 3 to rotate is provided on the plating tank 1, the rotating device 5 comprises a large gear ring 51 fixedly installed on the inner wall of the plating tank 1, a rotating rod 52 which is in rotating fit on the rotating frame 41 and is used for driving the placement frame 3 to rotate, and a rotating assembly 53 which is installed on the rotating frame 41 and is used for driving the rotating rod 52 to rotate, the rotating rod 52 is arranged along the height direction of the plating tank 1, and four rotating rods 52 are provided.
Referring to fig. 1 and 2, the rotating assembly 53 includes a driving gear 531 fixedly mounted on the rotating frame 41 and a driven gear 532 fixedly mounted on the rotating lever 52, the driven gear 532 is located between the driving gear 531 and the ring gear 51, and the driven gear 532 is engaged with both the driving gear 531 and the ring gear 51. When a workpiece needs to be processed, the driving piece 42 is started to drive the rotating frame 41 to rotate, the placing frame 3 is driven to rotate by the central axis of the output shaft of the driving piece 42, meanwhile, when the rotating frame 41 rotates, the driving gear 531 is driven to rotate, the driven gear 532 is driven to rotate, the placing frame 3 is driven to rotate by the central axis of the rotating rod 52, and the workpiece is driven to revolve by the central axis of the output shaft of the driving piece 42 and rotate by the central axis of the rotating rod 52.
Referring to fig. 1 and 2, a placing plate 6 is disposed on the placing frame 3, a clamping device 7 for clamping a workpiece is disposed on the placing plate 6, the clamping device 7 comprises a clamping frame 71 which is rotationally matched with the placing plate 6 and used for clamping the workpiece, and an adjusting component 72 used for driving the clamping frame 71 to rotate, one end of the clamping frame 71 is rotationally matched with the placing plate 6 through a rotating shaft, the upper surface of the clamping frame 71 is higher than the upper surface of the placing plate 6, a guide inclined surface 711 is disposed on the clamping frame 71, and the guide inclined surface 711 is obliquely disposed along a direction deviating from the placing frame 3 and close to the placing plate 6.
Referring to fig. 1 and 2, the adjusting component 72 includes a supporting rod 721 for driving the clamping frame 71 to rotate, a sliding block 722 slidingly engaged with the placing frame 3, and a screw 723 for driving the sliding block 722 to slide, both ends of the supporting rod 721 are fixedly provided with a rotating seat, one end of the supporting rod 721 is rotationally engaged with the clamping frame 71 through the rotating seat, the other end is rotationally engaged with the sliding block 722 through the rotating seat, a T-shaped groove for the sliding block 722 to slide is formed in the placing frame 3, three sliding blocks 722 along the height direction of the plating box 1 are in threaded engagement with the screw 723, and the sliding block 722 is used for driving the supporting rod 721 to rotate, and the placing frame 3 rotationally supports the screw 723.
Referring to fig. 1 and 2, when a workpiece needs to be clamped, the workpiece is firstly placed on the placing plate 6, then the screw 723 is rotated to drive the slide block 722 to lift and further drive the support rod 721 to rotate, and when the slide block 722 is lifted, the support rod 721 is driven to rotate and the clamping frame 71 is driven to rotate towards a horizontal position to clamp the bottom of the workpiece on the placing plate 6, so that the workpiece is clamped, and then the workpiece is coated.
The foregoing are all preferred embodiments of the present application, and are not intended to limit the scope of the present application in any way, therefore: all equivalent changes in structure, shape and principle of this application should be covered in the protection scope of this application.

Claims (8)

1. The utility model provides a vacuum coating device, includes plating box (1), installs evacuation tube (2) on plating box (1), installs the coating film device on plating box (1) and sets up a plurality of racks (3) in plating box (1), its characterized in that: be provided with rotating device (4) on plating box (1), rotating device (4) are including rotating fit on plating box (1) and be used for driving rotating turret (41) of a plurality of racks (3) pivoted and install on plating box (1) and be used for driving rotating turret (41) pivoted driving piece (42).
2. A vacuum coating apparatus according to claim 1, wherein: be provided with rotary device (5) on plating box (1), rotary device (5) are including installing bull gear (51) on plating box (1) inner wall, pivoted on rotating turret (41) and be used for driving rack (3) pivoted dwang (52) and install on rotating turret (41) and be used for driving dwang (52) pivoted rotating assembly (53), rack (3) are rotated with the central axis of dwang (52).
3. A vacuum coating apparatus according to claim 2, wherein: the rotating assembly (53) comprises a driving gear (531) arranged on the rotating frame (41) and a driven gear (532) arranged on the rotating rod (52), the driven gear (532) is arranged between the driving gear (531) and the bull gear (51), and the driven gear (532) is meshed with both the driving gear (531) and the bull gear (51).
4. A vacuum coating apparatus according to claim 3, wherein: the placing rack (3) is provided with a placing plate (6), and the placing plate (6) is provided with a clamping device (7) for clamping a workpiece.
5. The vacuum coating apparatus according to claim 4, wherein: the clamping device (7) comprises a clamping frame (71) which is matched on the placing plate (6) in a rotating mode and is used for clamping a workpiece, and an adjusting assembly (72) which is used for driving the clamping frame (71) to rotate.
6. The vacuum coating apparatus according to claim 5, wherein: the adjusting component (72) comprises a supporting rod (721) for driving the clamping frame (71) to rotate, a sliding block (722) in sliding fit with the placing frame (3) and a screw (723) for driving the sliding block (722) to slide, the sliding block (722) is in threaded fit with the screw (723), and the sliding block (722) is used for driving the supporting rod (721) to rotate.
7. The vacuum coating apparatus according to claim 6, wherein: a T-shaped groove for sliding the sliding block (722) is formed in the placing frame (3).
8. The vacuum coating apparatus according to claim 7, wherein: the clamping frame (71) is provided with a guide inclined plane (711), and the guide inclined plane (711) is obliquely arranged near the placing plate (6) along the direction deviating from the placing frame (3).
CN202322138427.5U 2023-08-09 2023-08-09 Vacuum coating device Active CN220520600U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202322138427.5U CN220520600U (en) 2023-08-09 2023-08-09 Vacuum coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202322138427.5U CN220520600U (en) 2023-08-09 2023-08-09 Vacuum coating device

Publications (1)

Publication Number Publication Date
CN220520600U true CN220520600U (en) 2024-02-23

Family

ID=89926688

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202322138427.5U Active CN220520600U (en) 2023-08-09 2023-08-09 Vacuum coating device

Country Status (1)

Country Link
CN (1) CN220520600U (en)

Similar Documents

Publication Publication Date Title
US4022939A (en) Synchronous shielding in vacuum deposition system
CN1718847A (en) Pair target twin magnetic controlled sputtering ion plating deposition device
CN1890399A (en) Mechanism for varying the spacing between sputter magnetron and target
CN104294232B (en) Ion sputtering film coating machine
WO2011135810A1 (en) Film deposition system
CN220520600U (en) Vacuum coating device
CN101634012B (en) Ion beam assisting magnetic control sputtering deposition method for surface protection
CN209816265U (en) Sputtering target base with adjustable target position
CN217809637U (en) Efficient physical vapor deposition equipment
CN110527966B (en) Horizontal magnetron sputtering equipment for long pipe coating
CN116459973A (en) PVD film processing equipment
CN101988187B (en) Vacuum magnetron sputtering color plating equipment
CN207987324U (en) A kind of substrate frame of achievable automatic turning
CN111235531A (en) Double-vacuum-chamber high-power electron beam evaporation continuous coating device
CN210560724U (en) Film coating machine for producing lens coating of optical lens
US20060278523A1 (en) Real-time adjustable mechanism of shielding plate in sputtering vacuum chamber design
CN210636062U (en) Horizontal coating equipment with pretreatment process
CN112626478B (en) Electronic material surface coating treatment equipment and coating treatment method thereof
CN201442976U (en) Vacuum magnetron sputtering coating machine with inclined compensating targets
CN221028647U (en) Workpiece fixing device for uniformly coating outer wall of pipe
CN214782104U (en) Multi-arc ion vacuum coating machine
US4245823A (en) Apparatus for producing mechanically-worked vapor-deposited bulk alloys
CN220767142U (en) Vacuum coating device with uniform heating
CN219526780U (en) Vacuum coating machine convenient to adjust
CN214142525U (en) Permanent magnet device for physical vapor deposition plasma distribution regulation

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant