CN211921682U - Substrate bearing and shielding device applied in vacuum coating machine - Google Patents
Substrate bearing and shielding device applied in vacuum coating machine Download PDFInfo
- Publication number
- CN211921682U CN211921682U CN202020336314.XU CN202020336314U CN211921682U CN 211921682 U CN211921682 U CN 211921682U CN 202020336314 U CN202020336314 U CN 202020336314U CN 211921682 U CN211921682 U CN 211921682U
- Authority
- CN
- China
- Prior art keywords
- substrate
- coating machine
- substrate table
- shielding cover
- shielding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a substrate coating film technical field, and a be applied to substrate bearing shielding device in vacuum coating machine is disclosed, including fixing the backup pad on the outside top of coating machine cavity, be located the substrate platform in the coating machine cavity, cover the cover outside the substrate platform, be used for driving the rotatory first drive arrangement of cover and be used for driving the rotatory second drive arrangement of substrate platform, first drive arrangement's top is connected with the backup pad, first drive arrangement's bottom is connected with the cover, the second drive arrangement is connected in the below of substrate platform, the substrate can all be placed on every lateral wall of substrate platform, be provided with the opening on the lateral wall of cover, the opening size is greater than the size of substrate and is less than or equal to the size of substrate platform lateral wall. By the arrangement, the problems that when any substrate on the substrate table provided with a plurality of substrates is coated, the thickness and color of the film layer of the substrate are uneven and the quality of the film layer is seriously influenced due to the fact that gas in the cavity is uneven caused by opening of the target shielding cover are solved.
Description
Technical Field
The application relates to the technical field of substrate coating, in particular to a substrate bearing and shielding device applied to a vacuum coating machine.
Background
Magnetron sputtering coating technology is widely applied to a plurality of fields, such as the fields of energy-saving glass, display screens, solar photovoltaic, semiconductors and the like, and especially plays an important role in magnetron sputtering coating in the electronic field, and the technology is used for preparing films such as protective films, insulating films, conductive films and the like. In the application of a medium and small-sized vacuum coating machine, a target material and a coating substrate are simultaneously placed in the same vacuum chamber, and the preparation links comprise vacuumizing, substrate heating, reaction gas introduction, target burning and sputtering coating. In the target burning process, the argon ions continuously bombard the surface of the target material to sputter the target material, and in order to prevent sputtering particles from depositing on the substrate in the target burning link, a shielding cover device is usually arranged in front of the target material. Only one substrate can be loaded in each coating operation, at the moment when the target shielding cover is opened, the substrate is positioned on the back of the substrate table and is far away from the effective glow area, and the substrate is rotated to the effective coating area for sputtering coating after the gas in the field is stable, so that the production efficiency is low. In order to improve the manufacturing efficiency, the substrate stage may be generally provided with a plurality of substrates, and the substrates are placed in an effective glow orientation for coating by changing the direction of the substrates by rotation of the substrate stage. When a plurality of substrates are simultaneously arranged on the substrate table and positioned sputtering is adopted, the substrate needing to be coated is rotated to an effective coating range in advance, and the gas in the cavity is not uniform due to the opening of the target shielding cover, so that the gas is diffused to the positions of other substrates, the problem of non-uniform film thickness and color of the substrate and other substrates is caused, and the film quality is seriously influenced.
Therefore, how to solve the problems that when any substrate on a substrate table provided with a plurality of substrates is coated, the thickness and color of the film layer of the substrate are not uniform and the quality of the film layer is seriously influenced due to the nonuniform gas in the cavity caused by the opening of the target shielding cover is a key technical problem to be solved by technical personnel in the field.
SUMMERY OF THE UTILITY MODEL
In order to overcome the problems in the related art at least to a certain extent, the present application aims to provide a substrate bearing shielding device applied in a vacuum coating machine, which can solve the problems that when any substrate on a substrate table provided with a plurality of substrates is coated, the thickness and color of the film layer of the substrate are not uniform and the quality of the film layer is seriously affected due to the non-uniform gas in the cavity caused by the opening of a target shielding cover.
The application provides a substrate bears shielding device for in vacuum coating machine, including fixing backup pad on the outside top of coating machine cavity, being located substrate platform, cover in the coating machine cavity cover outside the substrate platform, be used for the drive the rotatory first drive arrangement of cover and be used for the drive the rotatory second drive arrangement of substrate platform, first drive arrangement's top with the backup pad is connected, first drive arrangement's bottom with the cover is connected, the second drive arrangement is connected the below of substrate platform, just the substrate can all be placed on every lateral wall of substrate platform, be provided with the opening on the lateral wall of cover, the opening size is greater than the size of substrate just is less than or equal to the size of substrate platform lateral wall.
Preferably, the first driving device comprises a first motor fixedly mounted on the lower end face of the supporting plate and a transmission device connected with the shielding cover, and the transmission device is in transmission connection with the first motor.
Preferably, the transmission device comprises a transmission gear fixedly connected with the first motor, a connecting shaft fixedly connected with the lower end face of the supporting plate, and a first transmission shaft rotatably sleeved outside the connecting shaft, the bottom end of the first transmission shaft is connected with the shielding cover, and the first transmission shaft is provided with sawteeth meshed with the transmission gear.
Preferably, the first transmission shaft and the shielding cover are detachably connected through a plug-in module.
Preferably, the drawing and inserting module comprises a T-shaped joint connected with the first transmission shaft and a connecting block connected with the shielding cover, a U-shaped groove for the horizontal part of the T-shaped joint to extend into and a through groove for the vertical part of the T-shaped joint to pass through are formed in the connecting block, the through groove is located in the upper side wall of the U-shaped groove and communicated with the U-shaped groove, a groove matched with the horizontal part of the T-shaped joint is formed in the inner side of the upper side wall of the U-shaped groove, so that the horizontal part of the T-shaped joint can be tightly embedded in the groove, and the opening width of the side wall of the groove is smaller than the maximum width of the horizontal part of the T-shaped joint.
Preferably, the vertical part of the T-shaped joint is of a cuboid structure, and the horizontal part of the T-shaped joint is of a cylindrical structure.
Preferably, the second driving device comprises a second motor located at the bottom outside the chamber of the coating machine and a second transmission shaft connected with a driving shaft of the second motor, and the second transmission shaft is connected with the bottom end of the substrate table.
Preferably, the shielding cover is of a cylindrical structure, a bottom opening for the substrate table to pass through is formed in the bottom end of the shielding cover, and the bottom opening is communicated with the opening.
Preferably, the substrate table comprises a substrate table main body, a substrate clamping groove arranged on the side wall of the substrate table main body and used for placing a substrate, and a rotary supporting table used for supporting the substrate table main body, wherein the rotary supporting table is connected with the second transmission shaft.
Preferably, the substrate table main body is of a rectangular parallelepiped structure.
The technical scheme provided by the application can comprise the following beneficial effects:
when the positioning sputtering operation is carried out, the first driving device can drive the shielding cover to rotate, so that the opening of the shielding cover is positioned in the range of effective brightness, the second driving device drives the substrate table to rotate, one side wall is rotated to the position corresponding to the opening, the substrate on the side wall is positioned in the range of effective brightness, and the substrate is coated; when the rotary sputtering coating operation is carried out, the first driving device drives the shielding cover to rotate, the opening of the shielding cover corresponds to one side wall of the substrate table, the first driving device and the second driving device respectively control the shielding cover and the substrate table to rotate, the shielding cover and the substrate table synchronously rotate, and therefore the substrate coating is completed. Therefore, only the substrate at the position corresponding to the opening can be coated, and the gas (sputtering particles) in the cavity is shielded by the shielding cover, so that the gas cannot be deposited on the substrate at other positions, thereby ensuring the uniformity of the thickness and the color of the film layer of the substrate and improving the quality of the film layer. By the arrangement, the problems that when any substrate on the substrate table provided with a plurality of substrates is coated, the thickness and color of the film layer of the substrate are uneven and the quality of the film layer is seriously influenced due to the fact that gas in the cavity is uneven caused by opening of the target shielding cover are solved.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and together with the description, serve to explain the principles of the application.
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic diagram of a substrate-bearing masking apparatus for use in a vacuum coater according to some exemplary embodiments;
FIG. 2 is a block diagram illustrating a connection block according to some example embodiments;
FIG. 3 is a block diagram illustrating a T-joint according to some exemplary embodiments;
FIG. 4 is a block diagram illustrating a substrate table according to some example embodiments.
In the figure:
1. a support plate; 2. a first motor; 3. a transmission gear; 4. a first drive shaft; 5. a plug-in module; 6. a shield cover; 7. a substrate stage; 8. a U-shaped groove; 9. a through groove; 10. a groove; 11. a vertical portion; 12. a horizontal portion; 13. a substrate table main body; 14. a substrate card slot; 15. and rotating the support table.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus or methods consistent with aspects of the present application.
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be described in detail below. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Hereinafter, embodiments will be described with reference to the drawings. The embodiments described below do not limit the scope of the invention described in the claims. Further, the entire contents of the configurations shown in the following embodiments are not limited to those necessary as a solution of the invention described in the claims.
Referring to fig. 1-4, the present embodiment provides a substrate bearing and shielding device for use in a vacuum coater, comprising a supporting plate 1 fixed outside a chamber of the coater, a substrate table 7, a shielding cover 6, a first driving device for driving the shielding cover 6 to rotate, and a second driving device for driving the substrate table 7 to rotate, wherein the top end of the first driving device is connected to the supporting plate 1, so that the supporting plate 1 supports and fixes the second driving device, the second driving device is arranged below the substrate table 7 and outside the chamber of the coater, so as to support the substrate table 7 and control the substrate table 7 to rotate, the shielding cover 6 is connected to the bottom end of the first driving device, and the shielding cover 6 covers the substrate table 7, an opening is arranged on the side wall of the shielding cover 6, so that the side wall of the substrate table 7 corresponding to the opening can be within an effective light brightness range, thereby enabling coating of the substrate on the side wall of the substrate table 7. Therefore, only the substrate at the position corresponding to the opening can be coated, and the gas (sputtering particles) in the cavity is shielded by the shielding cover 6, so that the gas cannot be deposited on the substrate at other positions, thereby ensuring the uniformity of the thickness and the color of the film layer of the substrate and improving the quality of the film layer.
It should be noted that the size of the opening on the sidewall of the shielding cover 6 is larger than the size of the substrate and smaller than or equal to the size of the sidewall of the substrate stage 7, so that the whole substrate can be exposed in an effective bright range, the substrate can be coated, and the substrate is prevented from leaving a part which can not be coated.
Here, a substrate can be placed on each sidewall of the substrate stage 7, one substrate may be disposed on each sidewall of the substrate stage 7, or a plurality of substrates disposed side by side, for example, two substrates, may be disposed on each sidewall of the substrate stage 7, and the plurality of substrates may be in an effective glow.
When the positioning sputtering operation is carried out, the first driving device can drive the shielding cover 6 to rotate, so that the opening of the shielding cover 6 is in the effective brightness range, the second driving device drives the substrate table 7 to rotate, one side wall is rotated to the position corresponding to the opening, so that the substrate on the side wall is in the effective brightness range, the substrate is coated, after the coating of the substrate on the side wall is completed, the second driving device drives the substrate table 7 to rotate, so that the lower side wall is rotated in the effective brightness range, the next substrate is coated, and thus, the second driving device drives the substrate table 7 to rotate, and the coating of the substrate on the side wall of the substrate table 7 is sequentially realized. When the rotary sputtering coating operation is carried out, the first driving device drives the shielding cover 6 to rotate, the opening of the shielding cover 6 corresponds to one side wall of the substrate table 7, the first driving device and the second driving device respectively control the shielding cover 6 and the substrate table 7 to rotate, the shielding cover 6 and the substrate table 7 synchronously rotate, and therefore the substrate coating is completed.
By the arrangement, the problems that when any substrate on the substrate table 7 provided with a plurality of substrates is coated, the thickness and color of the film layer of the substrate are uneven and the quality of the film layer is seriously influenced due to uneven gas in the cavity caused by opening of the target shielding cover are solved.
In this embodiment, the first driving device includes a first motor 2 and a transmission device, the first motor 2 is fixedly mounted on the lower end surface of the supporting plate 1, the transmission device is in transmission connection with the first motor 2, and the transmission device is connected with the shielding cover 6 to drive the shielding cover 6 to rotate.
As shown in fig. 1, the transmission device includes a transmission gear 3, a connecting shaft and a first transmission shaft 4, the transmission gear 3 is fixedly connected to the driving shaft of the first motor 2, the connecting shaft is fixedly connected to the lower end surface of the supporting plate 1 and is arranged in parallel to the driving shaft of the first motor 2, the first transmission shaft 4 is rotatably sleeved outside the connecting shaft, and the bottom end of the first transmission shaft 4 is connected to the shielding cover 6, so that the first transmission shaft 4 can drive the shielding cover 6 to rotate; the first transmission shaft 4 is in transmission connection with the transmission gear 3, and specifically, the first transmission shaft 4 is provided with sawteeth meshed with the transmission gear 3, so that the first transmission shaft 4 and the transmission gear 3 synchronously rotate, and the shielding cover 6 can be driven to rotate.
Here, a bearing is provided between the first transmission shaft 4 and the connecting shaft so that the first transmission shaft 4 can rotate about the connecting shaft.
In this embodiment, the first transmission shaft 4 is detachably connected with the shielding cover 6 through the plugging module 5, so that the shielding cover 6 is conveniently detached from the first driving device, the substrate is conveniently installed or cleaned and maintained on the substrate table 7, and the shielding cover 6 is conveniently replaced.
Wherein, take out and insert module 5 including T type joint and connecting block, T type joint and 4 fixed connection of first transmission shaft, connecting block and 6 fixed connection of sheltering from cover, preferably, the connecting block is connected in the intermediate position at 6 tops of sheltering from cover to make 6 can be around its axle rotations of sheltering from cover, connecting block and T type connect detachably and connect, so that dismantle the sheltering from cover 6.
Specifically, as shown in fig. 3, a U-shaped groove 8 into which a horizontal portion 12 of the T-shaped joint extends and a through groove 9 through which a vertical portion of the T-shaped joint passes are provided on the connecting block, the through groove 9 is located on an upper side wall of the U-shaped groove 8 and is communicated with the U-shaped groove 8, and an opening of the through groove 9 and an opening of the U-shaped groove 8 are located on the same plane, so that the horizontal portion 12 of the T-shaped joint is conveniently inserted into the U-shaped groove 8.
As shown in fig. 2, a groove 10 is provided on the inner side of the upper side wall of the U-shaped groove 8, the groove 10 matches with the horizontal portion 12 of the T-shaped joint, and the horizontal portion 12 of the T-shaped joint is the same size and shape as the groove 10, so that the horizontal portion 12 of the T-shaped joint can be tightly fitted in the groove 10. The side wall of the groove 10 is provided with an opening for the vertical part 11 of the T-joint to pass through, and the width of the opening on the side wall of the groove 10 is smaller than the maximum width of the horizontal part 12 of the T-joint, so as to avoid the horizontal part 12 of the T-joint from sliding out of the opening on the side wall of the groove 10. Like this, when the T type connects and inserts in U type groove 8, can make the horizontal part 12 of T type joint imbed in the recess 10 through the gravity of shield cover 6 to make T type joint and connecting block looks joint, can prevent that shield cover 6 from the position skew problem appearing in rotatory in-process, thereby avoid shield cover 6 and substrate platform 7 to have the collision hidden danger.
It should be noted that the vertical portion 11 of the T-shaped joint may have a rectangular parallelepiped structure, the horizontal portion 12 of the T-shaped joint may have a cylindrical structure, and the height and the diameter of the horizontal portion 12 of the T-shaped joint are smaller than those of the U-shaped groove 8.
In this embodiment, the second driving device includes a second motor and a second transmission shaft, the second motor is fixedly disposed at the bottom end outside the chamber of the coating machine, the second transmission shaft is connected to the driving shaft of the second motor, and the second transmission shaft is connected to the bottom end of the substrate table 7 to support and drive the substrate table 7 to rotate.
As shown in fig. 4, the substrate stage 7 includes a substrate stage main body 13, a substrate slot 14 disposed on a sidewall of the substrate stage main body 13 for placing a substrate, and a rotary support table 15 supporting the substrate stage main body 13, wherein the rotary support table 15 is connected to a bottom end of the substrate stage main body 13 and connected to the second transmission shaft to drive the substrate stage main body 13 to rotate.
The substrate table main body 13 can be a cuboid structure, and 4 substrate clamping grooves 14 can be arranged on the substrate table main body 13 and are respectively positioned on 4 side walls of the substrate table main body 13, so that sputtering coating operation can be carried out on 4 substrates simultaneously or sequentially.
The shielding cover 6 can be a cylindrical structure, and the bottom end of the shielding cover 6 is provided with a bottom opening, the size of the bottom opening is larger than that of the substrate table main body 13, so that the shielding cover 6 covers the substrate table main body 13, and further, the bottom opening is communicated with the opening, and thus, the processing is facilitated.
When coating operation is carried out, the shielding cover 6 is matched with the substrate table 7, so that 4 substrates can be subjected to rotary sputtering coating and positioning sputtering coating after primary vacuum pumping. The reset position of the mask 6, i.e., the 0 ° position is the same as the position of the substrate stage 7 by default. When the rotary sputtering coating operation is carried out, the substrate to be coated is firstly adjusted to the position of 0 degree through the second motor, the shielding cover 6 is adjusted to the position of 0 degree through the first motor 2, and then the rotating speeds of the first motor 2 and the second motor are adjusted to the same value, so that the shielding cover 6 and the substrate table 7 synchronously rotate. When the positioning sputtering operation is carried out, firstly, the pre-sputtering substrate is adjusted to the 0-degree position, then the shielding cover 6 is reset to the 0-degree position, the rotation angles of the shielding cover 6 and the substrate table 7 are adjusted according to the effective glow range of the target, the angles of the shielding cover 6 and the substrate table 7 keep the same value, and after the sputtering operation is finished, the shielding cover 6 and the substrate table 7 are reset to the 0-degree position.
Compared with the prior art and the configuration, the substrate bearing and shielding device applied to the vacuum coating machine has the following advantages:
compared with the traditional film coating machine, the special structure design is adopted, the shielding cover 6 which can rotate and has an accurately adjustable angle is additionally arranged outside the substrate table 7, the problems of substrate pollution and uneven film layer in the sputtering process are thoroughly solved, the process of coating multiple substrates by one-time vacuum pumping is realized, the working procedure time is greatly reduced, the working efficiency is improved, and the quality of the film layer of the product is improved;
the shielding cover rotates semi-automatically, the braking parts (the first motor and the second motor) of the shielding cover are positioned outside the vacuum chamber, when the vacuum chamber is baked at high temperature, the rotation and the functional system of the shielding cover are not influenced, the accuracy of the rotation angle of the shielding cover is not interfered, the process failure caused by angle errors is avoided, and the reliability of the substrate coating is ensured;
the shielding cover adopts a detachable plug structure design, and when the substrate is installed and disassembled or the substrate platform is cleaned and maintained, the shielding cover can be manually disassembled to reserve a space for other operations.
The shielding cover is designed by automatic angle adjustment and full-automatic 360-degree rotation, can realize stronger matching with a substrate table in a magnetron sputtering coating machine, and has stronger practicability in the field of magnetron sputtering coating.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
It is understood that the same or similar parts in the above embodiments may be mutually referred to, and the same or similar parts in other embodiments may be referred to for the content which is not described in detail in some embodiments.
Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations may be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.
Claims (10)
1. A substrate bearing and shielding device applied to a vacuum coating machine is characterized by comprising a supporting plate (1) fixed at the top end outside a coating machine cavity, a substrate table (7) positioned in the coating machine cavity, a shielding cover (6) covered outside the substrate table (7), a first driving device used for driving the shielding cover (6) to rotate and a second driving device used for driving the substrate table (7) to rotate, the top end of the first driving device is connected with the supporting plate (1), the bottom end of the first driving device is connected with the shielding cover (6), the second driving device is connected below the substrate table (7), and each side wall of the substrate table (7) can be provided with a substrate, the side wall of the shielding cover (6) is provided with an opening, the opening size is larger than the size of the substrate and smaller than or equal to the size of the side wall of the substrate table (7).
2. The substrate bearing shielding device applied to the vacuum coating machine as claimed in claim 1, wherein the first driving device comprises a first motor (2) fixedly arranged on the lower end face of the supporting plate (1), and a transmission device connected with the shielding cover (6), wherein the transmission device is in transmission connection with the first motor (2).
3. The substrate bearing and shielding device applied to the vacuum coating machine is characterized in that the transmission device comprises a transmission gear (3) fixedly connected with the first motor (2), a connecting shaft fixedly connected with the lower end surface of the supporting plate (1) and a first transmission shaft (4) rotatably sleeved outside the connecting shaft, the bottom end of the first transmission shaft (4) is connected with the shielding cover (6), and the first transmission shaft (4) is provided with sawteeth meshed with the transmission gear (3).
4. A substrate-carrying shutter arrangement for use in a vacuum coating machine according to claim 3, characterized in that the first drive shaft (4) and the shutter (6) are detachably connected by a draw-and-plug module (5).
5. The substrate bearing shielding device applied to the vacuum coating machine as claimed in claim 4, wherein the inserting and extracting module (5) comprises a T-shaped joint connected with the first transmission shaft (4) and a connecting block connected with the shielding cover (6), the connecting block is provided with a U-shaped groove (8) for the horizontal part (12) of the T-shaped joint to extend into and a through groove (9) for the vertical part (11) of the T-shaped joint to pass through, the through groove (9) is positioned on the upper side wall of the U-shaped groove (8) and communicated with the U-shaped groove (8), the inner side of the upper side wall of the U-shaped groove (8) is provided with a groove (10) matched with the horizontal part (12) of the T-shaped joint so that the horizontal part (12) of the T-shaped joint can be tightly embedded in the groove (10), and the opening width of the side wall of the groove (10) is smaller than the maximum width of the horizontal part (12) of the T-shaped joint .
6. The substrate bearing shielding device applied to the vacuum coating machine is characterized in that the vertical part (11) of the T-shaped joint is of a cuboid structure, and the horizontal part (12) of the T-shaped joint is of a cylindrical structure.
7. The substrate bearing and shielding device applied to the vacuum coating machine as claimed in claim 1, wherein the second driving device comprises a second motor located at the bottom outside the coating machine chamber and a second transmission shaft connected with a driving shaft of the second motor, and the second transmission shaft is connected with the bottom end of the substrate table (7).
8. The substrate bearing shield device for use in a vacuum coater according to claim 1, wherein the shield cover is cylindrical in configuration and has a bottom end provided with a bottom opening through which the substrate table (7) passes, the bottom opening communicating with the opening.
9. The substrate bearing and shielding device applied to the vacuum coating machine according to claim 7, wherein the substrate table (7) comprises a substrate table main body (13), a substrate slot (14) for placing the substrate arranged on the side wall of the substrate table main body (13), and a rotary supporting table (15) for supporting the substrate table main body (13), wherein the rotary supporting table (15) is connected with the second transmission shaft.
10. The substrate carrying shielding device for use in a vacuum coating machine according to claim 9, wherein said substrate table main body (13) has a rectangular parallelepiped structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020336314.XU CN211921682U (en) | 2020-03-17 | 2020-03-17 | Substrate bearing and shielding device applied in vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020336314.XU CN211921682U (en) | 2020-03-17 | 2020-03-17 | Substrate bearing and shielding device applied in vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211921682U true CN211921682U (en) | 2020-11-13 |
Family
ID=73354555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020336314.XU Active CN211921682U (en) | 2020-03-17 | 2020-03-17 | Substrate bearing and shielding device applied in vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211921682U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113943931A (en) * | 2021-10-12 | 2022-01-18 | 江苏晋誉达半导体股份有限公司 | Rotary slide glass device of vacuum coating machine |
-
2020
- 2020-03-17 CN CN202020336314.XU patent/CN211921682U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113943931A (en) * | 2021-10-12 | 2022-01-18 | 江苏晋誉达半导体股份有限公司 | Rotary slide glass device of vacuum coating machine |
| CN113943931B (en) * | 2021-10-12 | 2024-04-30 | 江苏晋誉达半导体股份有限公司 | Rotary slide glass device of vacuum coating machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211921682U (en) | Substrate bearing and shielding device applied in vacuum coating machine | |
| EP0144229A2 (en) | Improvements in or relating to coating apparatus | |
| CN101240411B (en) | Sputtering type coating device and method | |
| CN106959566A (en) | A kind of preparation method of quasi- solid-state electrochromic device | |
| CN112481595A (en) | Ion beam sputtering coating equipment | |
| KR20090020638A (en) | Film forming apparatus and film forming method | |
| US8221551B2 (en) | Apparatus for producing a reflector | |
| CN110592550A (en) | Magnetron sputtering and electron beam evaporation double-cavity coating device and using method thereof | |
| JPH10317135A (en) | Coating thickness correcting mechanism for sputtering coating formation | |
| CN215494465U (en) | LCD sealing device | |
| CN103526171A (en) | Preparation method of aluminum-doped zinc oxide film with tunable preferred orientations | |
| CN109957766B (en) | Coating device of double-sided coating production line | |
| CN101225503B (en) | Sputtering film plating device | |
| CN210711735U (en) | Multi-piece type rotating plasma enhanced atomic layer deposition film forming device | |
| CN213172553U (en) | Transmission system of vacuum coating machine | |
| CN102534512A (en) | Correction plate structure for film coating machine | |
| CN211170847U (en) | Novel vacuum coating equipment | |
| CN101736298A (en) | Film coating device | |
| CN219689836U (en) | Vacuum magnetron sputtering double-sided film plating machine | |
| CN218262711U (en) | Crucible and evaporation equipment | |
| CN209468322U (en) | A kind of coating apparatus of the two-sided shadow ito glass production that disappears | |
| CN218435936U (en) | Multi-component product coating switching device | |
| CN109023254B (en) | Vacuum coating machine for preparing large-caliber optical film element | |
| CN217954871U (en) | Liquid crystal display screen detection device | |
| KR102517747B1 (en) | Rotating Thermal Evaporation Diffusion Deposition System for PCB |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |