CN208791737U - A kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipment - Google Patents
A kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipment Download PDFInfo
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- CN208791737U CN208791737U CN201820933454.8U CN201820933454U CN208791737U CN 208791737 U CN208791737 U CN 208791737U CN 201820933454 U CN201820933454 U CN 201820933454U CN 208791737 U CN208791737 U CN 208791737U
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Abstract
The utility model relates to filming equipment technical field more particularly to a kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipments, comprising: distribution box, door, sealing joint strip；The door is located at the two sides of warehouse, and door is connected with warehouse by hinge；The top of door is arranged in the distribution box, and distribution box is connected with door by fixing bolt；The sealing joint strip is arranged on the inner wall of door, and sealing joint strip is connected with door by fixing bolt；The observation window is arranged on the outer wall of door, and observation window is connected with door by mosaic mode；The utility model through the above structure on improvement, it is carried out simultaneously with workpiece and plating material handling with plated film, high production efficiency, heating evaporation coating technique and magnetron sputtering technology effectively combine, coating quality is good, installed capacity is big, high production efficiency, advantage applied widely, thus the problem of effective solution existing apparatus and deficiency.
Description
Technical field
The utility model relates to filming equipment technical field more particularly to a kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum
Filming equipment.
Background technique
Vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, specifically includes many types, wraps
Include vacuum ionic evaporation, magnetron sputtering, MBE molecular beam epitaxy, many kinds such as PLD pulsed laser deposition.Main thought is divided into
Two kinds of evaporation and sputtering, evaporation coating are usually to heat target surface component is made to be evaporated out with atomic group or ionic species.
And it is deposited in substrate surface, film is formed by film forming procedure (scatterplot-island structure-fan walks structure-layer growth).
For sputtering class plated film, can simply be interpreted as using electronics or superlaser bombardment target, and make surface component with atomic group
Or ionic species is sputtered out, and is eventually deposited at substrate surface, undergoes film forming procedure, ultimately forms film.
But generally existing workpiece and plating material load and unload inconvenient ask to existing vacuum coating equipment in actual use
Topic, influences working efficiency, and only have heating evaporation plated film or magnetron sputtering membrane process, coating process is single, and film layer is secured
Property is poor.
Such as the problem of proposing among the above, this programme provides a kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipment,
And vacuum coating equipment reaches the solution problem and deficiency among the above with being vapor-deposited magnetic control evaporation by the novel physical,
Make it with more practical purpose.
Utility model content
The purpose of this utility model is to provide a kind of physical vapour deposition (PVD) magnetic controls to evaporate ground vacuum coating equipment, to solve
Existing vacuum coating equipment mentioned above in the background art generally existing workpiece and plating material handling in actual use
Inconvenient problem, influences working efficiency, and only have heating evaporation plated film or magnetron sputtering membrane process, and coating process is single,
Film layer fastness poor problem and deficiency.
The purpose of this utility model and effect are reached by technical solution in detail below:
A kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipment, comprising: distribution box, door, sealing joint strip, installation
Frame, connection jaws, observation window, handle, evaporating chamber, warehouse, blow vent, magnetic control sputtering device, vaporising device, is set at magnetron sputtering storehouse
Rack, transmission shaft, driving motor, gear reducer, gear, driving gear, driven gear, connector, upper mounted plate, fixation
Bar, bottom plate, pole plate, magnet, copper backboard, target, crucible, conducting bracket, partition, evaporation power supply；The door is located at storehouse
The two sides of body, and door is connected with warehouse by hinge；The top of door, and distribution box and door is arranged in the distribution box
It is connected by fixing bolt；The sealing joint strip is arranged on the inner wall of door, and sealing joint strip and door pass through fixed spiral shell
Bolt is connected；The observation window is arranged on the outer wall of door, and observation window is connected with door by mosaic mode；Described
The side of door is arranged in hand, and handle is connected with door by welding manner；The mounting rack is located at the inside of door, and
Mounting rack is connected with door by embedded mode；The connector is arranged in the top of upper mounted plate, and connector with it is upper solid
Fixed board is connected by welding manner；The top of the connector is connected with door by embedded mode；The bottom plate
Positioned at the lower section of upper mounted plate, and bottom plate is connected with upper mounted plate by fixed link；The top of the supporter with it is upper
Fixed plate by being connected through mode, and the lower part of supporter with bottom plate by being connected through mode；It is described driven
Gear is located at the bottom end of supporter, and driven gear is connected with supporter by snap fit；The driving gear setting exists
The lower section of bottom plate, and gear is driven to be connected with driven gear by engagement system；The gear is arranged in storehouse
The bottom end of door, and gear is connected with door by fixing bolt；The gear and driving gear pass through biography
Moving axis is connected；The speed reducer is located at the side of gear, and speed reducer passes through fixing bolt phase with gear
Connection；The driving motor is located at the side of speed reducer, and driving motor is connected with speed reducer by fixing bolt；The magnetic
The top of warehouse is arranged in control sputtering storehouse, and magnetron sputtering storehouse is an integral structure with warehouse；The magnetic control sputtering device is located at
The inside in magnetron sputtering storehouse；The magnet is located at the lower section of pole plate, and the lower section of magnet is connected with copper backboard；The target position
In the lower section of copper backboard；The top in magnetron sputtering storehouse is arranged in the connection jaws perforation；The blow vent perforation is arranged in warehouse
Back；The bottom end of warehouse is arranged in the evaporating chamber, and evaporating chamber is connected with warehouse by fixing bolt；The evaporation dress
It installs in the inside of evaporating chamber；The partition is located at the inside of evaporating chamber, and partition is connected with evaporating chamber by snap fit
It connects；The top of partition is arranged in the crucible, and crucible is connected with partition by conducting bracket；The evaporation power supply be located at every
The lower section of plate, and power supply is evaporated with conducting bracket by being electrically connected.
As advanced optimizing for the technical program, a kind of physical vapour deposition (PVD) magnetic control evaporation of the utility model ground Vacuum Deposition
Door described in film device is provided at two in the device, and door is distributed in the two sides of warehouse in symmetry shape.
As advanced optimizing for the technical program, a kind of physical vapour deposition (PVD) magnetic control evaporation of the utility model ground Vacuum Deposition
The inside of each door described in film device is provided with six roots of sensation supporter, and welding is provided with N root glove on the outer wall of supporter
Bar.
As advanced optimizing for the technical program, a kind of physical vapour deposition (PVD) magnetic control evaporation of the utility model ground Vacuum Deposition
The circular array shape between upper mounted plate and bottom plate of supporter described in film device is distributed, and supporter and upper mounted plate and
The junction of bottom plate is provided with bearing.
As advanced optimizing for the technical program, a kind of physical vapour deposition (PVD) magnetic control evaporation of the utility model ground Vacuum Deposition
Sealing joint strip described in film device is specially magnetic door seal, and sealing joint strip is connected with warehouse by magnetism.
As advanced optimizing for the technical program, a kind of physical vapour deposition (PVD) magnetic control evaporation of the utility model ground Vacuum Deposition
Resistance wire is provided on the inner wall of crucible described in film device, and resistance wire is spirally distributed on the inner wall of crucible, resistance wire
With conducting bracket by being electrically connected.
Due to the application of the above technical scheme, the utility model has the advantage that compared with prior art
1, the utility model door is provided at two in the device, and door being set in the two sides of warehouse in what symmetry shape was distributed
It sets, realizes workpiece and plating material handling carry out simultaneously with plated film, greatly improve work efficiency.
2, the inside of each door of the utility model is provided with six roots of sensation supporter, and setting is welded on the outer wall of supporter
There is the setting of N root storage rod, convenient for placing substrate, and increase the capacity of device, improves production efficiency.
3, the utility model sealing joint strip is specially magnetic door seal, and sealing joint strip passes through what magnetism was connected with warehouse
Setting, is fitted closely warehouse and door using the magnetic force of magnetic door seal, has operation side compared with traditional sealing means
Just, the good advantage of sealing effect.
4, resistance wire is provided on the inner wall of the utility model crucible, and resistance wire divides in the shape of a spiral on the inner wall of crucible
Cloth, resistance wire and conducting bracket pass through the setting being electrically connected, and heating speed is fast, improve the evaporation speed of target in crucible
Degree, and then improve the plating membrane efficiency of device.
5, the utility model through the above structure on improvement, have workpiece and plating material handling carried out simultaneously with plated film, life
It produces high-efficient, heating evaporation coating technique and magnetron sputtering technology effectively combines, coating quality is good, installed capacity is big, raw
Advantage high-efficient, applied widely is produced, thus the problem of effective solution existing apparatus and deficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the bin gate structure schematic diagram of the utility model；
Fig. 3 is the warehouse structural schematic diagram of the utility model；
Fig. 4 is the door overlooking structure diagram of the utility model；
Fig. 5 is the magnetic control sputtering device structural schematic diagram of the utility model；
Fig. 6 is the vaporising device structural schematic diagram of the utility model.
In figure: distribution box 1, door 2, sealing joint strip 3, mounting rack 4, magnetron sputtering storehouse 5, connection jaws 6, observation window 7, handle
8, evaporating chamber 9, warehouse 10, blow vent 11, magnetic control sputtering device 12, vaporising device 13, supporter 14, transmission shaft 15, driving electricity
Machine 16, speed reducer 17, gear 18, driving gear 19, driven gear 20, connector 401, upper mounted plate 402, fixed link
403, bottom plate 404, pole plate 1201, magnet 1202, copper backboard 1203, target 1204, crucible 1301, conducting bracket 1302,
Partition 1303, evaporation power supply 1304.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1 to Fig. 6 is please referred to, the utility model provides a kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipment skill
Art scheme:
A kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipment, comprising: distribution box 1, door 2, sealing joint strip 3,
Mounting rack 4, magnetron sputtering storehouse 5, connection jaws 6, observation window 7, handle 8, evaporating chamber 9, warehouse 10, blow vent 11, magnetron sputtering dress
Set 12, vaporising device 13, supporter 14, transmission shaft 15, driving motor 16, speed reducer 17, gear 18, driving gear
19, driven gear 20, connector 401, upper mounted plate 402, fixed link 403, bottom plate 404, pole plate 1201, magnet 1202,
Copper backboard 1203, target 1204, crucible 1301, conducting bracket 1302, partition 1303, evaporation power supply 1304；Door 2 is located at warehouse
10 two sides, and door 2 is connected with warehouse 10 by hinge；The top of door 2, and distribution box 1 and storehouse is arranged in distribution box 1
Door 2 is connected by fixing bolt；Sealing joint strip 3 is arranged on the inner wall of door 2, and sealing joint strip 3 and door 2 pass through fixation
Bolt is connected；Observation window 7 is arranged on the outer wall of door 2, and observation window 7 is connected with door 2 by mosaic mode；Handle
8 are arranged in the side of door 2, and handle 8 is connected with door 2 by welding manner；Mounting rack 4 is located at the inside of door 2, and
Mounting rack 4 is connected with door 2 by embedded mode；The top of upper mounted plate 402, and connector 401 is arranged in connector 401
It is connected with upper mounted plate 402 by welding manner；The top of connector 401 is connected with door 2 by embedded mode；It is lower solid
Fixed board 404 is located at the lower section of upper mounted plate 402, and bottom plate 404 is connected with upper mounted plate 402 by fixed link 403；It sets
The top of rack 14 through mode with upper mounted plate 402 by being connected, and the lower part of supporter 14 passes through with bottom plate 404
It is connected through mode；Driven gear 20 is located at the bottom end of supporter 14, and driven gear 20 passes through the side of engaging with supporter 14
Formula is connected；The lower section of bottom plate 404 is arranged in driving gear 19, and gear 19 is driven to pass through the side of engagement with driven gear 20
Formula is connected；The bottom end of door 2 is arranged in gear 18, and gear 18 is connected with door 2 by fixing bolt
It connects；Gear 18 is connected with driving gear 19 by transmission shaft 15；Speed reducer 17 is located at the side of gear 18,
And speed reducer 17 is connected with gear 18 by fixing bolt；Driving motor 16 is located at the side of speed reducer 17, and drives
Dynamic motor 16 is connected with speed reducer 17 by fixing bolt；The top of warehouse 10, and magnetron sputtering is arranged in magnetron sputtering storehouse 5
Storehouse 5 is an integral structure with warehouse 10；Magnetic control sputtering device 12 is located at the inside in magnetron sputtering storehouse 5；Magnet 1202 is located at pole plate
1201 lower section, and the lower section of magnet 1202 is connected with copper backboard 1203；Target 1204 is located at the lower section of copper backboard 1203；It connects
Line mouth 6 penetrates through the top that magnetron sputtering storehouse 5 is arranged in；Blow vent 11 penetrates through the back that warehouse 10 is arranged in；The setting of evaporating chamber 9 exists
The bottom end of warehouse 10, and evaporating chamber 9 is connected with warehouse 10 by fixing bolt；Vaporising device 13 is arranged in evaporating chamber 9
Portion；Partition 1303 is located at the inside of evaporating chamber 9, and partition 1303 is connected with evaporating chamber 9 by snap fit；Crucible 1301 is set
It sets on the top of partition 1303, and crucible 1301 is connected with partition 1303 by conducting bracket 1302；Evaporation power supply 1304
In the lower section of partition 1303, and power supply 1304 is evaporated with conducting bracket 1302 by being electrically connected.
Specifically, door 2 is provided at two in the device, and door 2 is distributed in the two sides of warehouse 10 in symmetry shape, is realized
Workpiece and plating material handling are carried out with plated film simultaneously, are greatly improved work efficiency.
Specifically, the inside of each door 2 is provided with six roots of sensation supporter 14, and setting is welded on the outer wall of supporter 14
There is N root storage rod, convenient for placing substrate, and increase the capacity of device, improves production efficiency.
Specifically, the circular array shape between upper mounted plate 402 and bottom plate 404 of supporter 14 is distributed, and glove
The junction of frame 14 and upper mounted plate 402 and bottom plate 404 is provided with bearing.
Specifically, sealing joint strip 3 is specially magnetic door seal, and sealing joint strip 3 is connected with warehouse 10 by magnetism, benefit
Warehouse 10 and door 2 are fitted closely with the magnetic force of magnetic door seal, had compared with traditional sealing means easy to operate, close
Seal the good advantage of effect.
Specifically, be provided with resistance wire on the inner wall of crucible 1301, and resistance wire on the inner wall of crucible 1301 helically
Shape distribution, for resistance wire with conducting bracket 1302 by being electrically connected, heating speed is fast, improves the steaming of target in crucible 1301
Speed is sent out, and then improves the plating membrane efficiency of device.
Specifically used method and effect:
When using the device, door 2 is opened by handle 8, substrate is placed on supporter 14, opens magnetron sputtering storehouse
5 with evaporating chamber 9, target 1204 is installed in magnetic control sputtering device 12 and vaporising device 13, door 2 and starting device are closed,
First with vacuum plant (not marking in figure) vacuum state will be evacuated to by blow vent 11 in warehouse 10, driving motor 16 passes through
Gear 18 and transmission shaft 15 drive driving gear 19 to rotate, and driving gear 19 is engaged with driven gear 20, to drive
Supporter 14 rotates, and vaporising device 13 makes 1204 surface component of target by the target 1204 in Resistant heating crucible 1301
Be evaporated out with atomic group or ionic species, into warehouse 10 in and be deposited in substrate surface formed film, DC power supply
Anode be electrically connected by distribution box 1 and supporter 14, cathode is electrically connected by connection jaws 6 and pole plate 1201, and magnetic control splashes
Injection device 12 utilizes electron bombardment target 1204, and makes surface component be sputtered out with atomic group or ionic species, and most
It is deposited on substrate surface eventually and forms film, by the operation conditions in 7 observable warehouse 10 of observation window, which is steamed by heating
Hair coating technique and the effective of magnetron sputtering technology combine the scope of application for substantially increasing equipment, and work efficiency is high,
Coating quality is good, has stronger practicability.
In summary: a kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipment is set in the device by door
It is equipped at two, and door realizes workpiece and plating material is loaded and unloaded with plated film simultaneously in the setting that the two sides of warehouse are in symmetry shape distribution
It carries out, greatly improves work efficiency；It is provided with six roots of sensation supporter by the inside of each door, and on the outer wall of supporter
Welding is provided with the setting of N root storage rod, convenient for placing substrate, and increases the capacity of device, improves production efficiency；By close
Seal strip is specially magnetic door seal, and sealing joint strip passes through the magnetic setting being connected with warehouse, utilizes magnetic door seal
Magnetic force fits closely warehouse and door, has the advantages that easy to operate, sealing effect is good compared with traditional sealing means；It is logical
It crosses and is provided with resistance wire on the inner wall of crucible, and resistance wire is spirally distributed on the inner wall of crucible, resistance wire and conductive branch
Frame passes through the setting being electrically connected, and heating speed is fast, improves the evaporation rate of target in crucible, and then improve device
Plate membrane efficiency；There is workpiece and plating material handling to carry out simultaneously with plated film for improvement on through the above structure, and high production efficiency adds
Thermal evaporation coating technique and magnetron sputtering technology effectively combine, and coating quality is good, installed capacity is big, high production efficiency, fits
With the wide advantage of range, thus the problem of effective solution existing apparatus and deficiency.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipment, comprising: distribution box (1), door (2), sealing joint strip
(3), mounting rack (4), magnetron sputtering storehouse (5), connection jaws (6), observation window (7), handle (8), evaporating chamber (9), warehouse (10), logical
Port (11), vaporising device (13), supporter (14), transmission shaft (15), driving motor (16), subtracts magnetic control sputtering device (12)
Fast machine (17), gear (18), driving gear (19), driven gear (20), connector (401), upper mounted plate (402),
Fixed link (403), bottom plate (404), pole plate (1201), magnet (1202), copper backboard (1203), target (1204), crucible
(1301), conducting bracket (1302), partition (1303), evaporation power supply (1304)；It is characterized by: the door (2) is located at storehouse
The two sides of body (10), and door (2) is connected with warehouse (10) by hinge；Top of distribution box (1) setting in door (2)
End, and distribution box (1) is connected with door (2) by fixing bolt；Inner wall of sealing joint strip (3) setting in door (2)
On, and sealing joint strip (3) is connected with door (2) by fixing bolt；Outer wall of observation window (7) setting in door (2)
On, and observation window (7) is connected with door (2) by mosaic mode；The handle (8) is arranged in the side of door (2), and handle
Hand (8) is connected with door (2) by welding manner；The mounting rack (4) is located at the inside of door (2), and mounting rack (4) with
Door (2) is connected by embedded mode；The connector (401) is arranged on the top of upper mounted plate (402), and connector
(401) it is connected with upper mounted plate (402) by welding manner；The top and door (2) of the connector (401) pass through insertion
Mode is connected；The bottom plate (404) is located at the lower section of upper mounted plate (402), and bottom plate (404) and upper mounted plate
(402) it is connected by fixed link (403)；The top of the supporter (14) is with upper mounted plate (402) by running through mode phase
Connection, and the lower part of supporter (14) with bottom plate (404) by being connected through mode；The driven gear (20) is located at
The bottom end of supporter (14), and driven gear (20) is connected with supporter (14) by snap fit；The driving gear
(19) setting is in the lower section of bottom plate (404), and gear (19) is driven to be connected with driven gear (20) by engagement system；
Gear (18) setting is in the bottom end of door (2), and gear (18) passes through fixing bolt phase with door (2)
Connection；The gear (18) is connected with driving gear (19) by transmission shaft (15)；The speed reducer (17) is located at
The side of gear (18), and speed reducer (17) is connected with gear (18) by fixing bolt；The driving
Motor (16) is located at the side of speed reducer (17), and driving motor (16) is connected with speed reducer (17) by fixing bolt；Institute
It states magnetron sputtering storehouse (5) to be arranged on the top of warehouse (10), and magnetron sputtering storehouse (5) are an integral structure with warehouse (10)；Institute
State the inside that magnetic control sputtering device (12) is located at magnetron sputtering storehouse (5)；The magnet (1202) is located at the lower section of pole plate (1201),
And the lower section of magnet (1202) is connected with copper backboard (1203)；The target (1204) is located at the lower section of copper backboard (1203)；
Top of connection jaws (6) the perforation setting in magnetron sputtering storehouse (5)；Blow vent (11) perforation is arranged in warehouse (10)
Back；The evaporating chamber (9) is arranged in the bottom end of warehouse (10), and evaporating chamber (9) is connected with warehouse (10) by fixing bolt
It connects；Inside of vaporising device (13) setting in evaporating chamber (9)；The partition (1303) is located at the inside of evaporating chamber (9), and
Partition (1303) is connected with evaporating chamber (9) by snap fit；The crucible (1301) is arranged on the top of partition (1303),
And crucible (1301) is connected with partition (1303) by conducting bracket (1302)；The evaporation power supply (1304) is located at partition
(1303) lower section, and power supply (1304) are evaporated with conducting bracket (1302) by being electrically connected.
2. a kind of physical vapour deposition (PVD) magnetic control evaporation ground according to claim 1 vacuum coating equipment, it is characterised in that: institute
It states door (2) to be provided at two in the device, and door (2) is distributed in the two sides of warehouse (10) in symmetry shape.
3. a kind of physical vapour deposition (PVD) magnetic control evaporation ground according to claim 1 vacuum coating equipment, it is characterised in that: institute
The inside for stating each door (2) is provided with six roots of sensation supporter (14), and welding is provided with N root and sets on the outer wall of supporter (14)
Object bar.
4. a kind of physical vapour deposition (PVD) magnetic control evaporation ground according to claim 1 vacuum coating equipment, it is characterised in that: institute
State supporter (14) between upper mounted plate (402) and bottom plate (404) circular array shape be distributed, and supporter (14) with
The junction of upper mounted plate (402) and bottom plate (404) is provided with bearing.
5. a kind of physical vapour deposition (PVD) magnetic control evaporation ground according to claim 1 vacuum coating equipment, it is characterised in that: institute
Stating sealing joint strip (3) is specially magnetic door seal, and sealing joint strip (3) is connected with warehouse (10) by magnetism.
6. a kind of physical vapour deposition (PVD) magnetic control evaporation ground according to claim 1 vacuum coating equipment, it is characterised in that: institute
It states and is provided with resistance wire on the inner wall of crucible (1301), and resistance wire is spirally distributed on the inner wall of crucible (1301), electricity
Resistance silk is with conducting bracket (1302) by being electrically connected.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820933454.8U CN208791737U (en) | 2018-06-15 | 2018-06-15 | A kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820933454.8U CN208791737U (en) | 2018-06-15 | 2018-06-15 | A kind of physical vapour deposition (PVD) magnetic control evaporation ground vacuum coating equipment |
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| CN208791737U true CN208791737U (en) | 2019-04-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102059638B1 (en) | 2019-08-28 | 2019-12-26 | 주식회사 탑테크이십일 | Ion plating apparatus with multiple target |
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2018
- 2018-06-15 CN CN201820933454.8U patent/CN208791737U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102059638B1 (en) | 2019-08-28 | 2019-12-26 | 주식회사 탑테크이십일 | Ion plating apparatus with multiple target |
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