CN202187056U - Improved structure of vacuum coater - Google Patents
Improved structure of vacuum coater Download PDFInfo
- Publication number
- CN202187056U CN202187056U CN2011202660135U CN201120266013U CN202187056U CN 202187056 U CN202187056 U CN 202187056U CN 2011202660135 U CN2011202660135 U CN 2011202660135U CN 201120266013 U CN201120266013 U CN 201120266013U CN 202187056 U CN202187056 U CN 202187056U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- carriage
- target
- rotating shaft
- moulding machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses an improved structure of a vacuum coater, comprising a vacuum deposition chamber, and a bracket and a target, which are in the vacuum deposition chamber; the bracket is a dome-like structure; multiple hooks for fixing work pieces are arranged on the inner side of the bracket downwardly; the center of the top of the bracket is rotatably fixed on the top of the vacuum deposition chamber by a revolving shaft; the revolving shaft can be driven to rotate under the control of a motor; at least one resistance heating body capable of heating the work piece on the bracket is arranged between the bracket and the top of the vacuum deposition chamber; the target is arranged below the bracket; the target is controlled to heat and evaporate by the heating mechanism to achieve film coating on the work piece on the bracket. The heating mechanism is a groove-shaped electric heating body which is installed in the vacuum deposition chamber and can hold the target; the two sides of the groove-shaped electric heating body are provided with a pair of electrodes; the other ends of the pair of the electrodes are led out of the vacuum deposition chamber and are connected with the leading out end of the secondary winding of a power transformer. The utility model makes the driving mechanism for bracket which is for holding the work piece simple, convenient and practical.
Description
Technical field
The utility model belongs to filming equipment, particularly a kind of improved structure at the indoor processing unit (plant) to the workpiece plated film of vacuum deposit chamber.
Background technology
Vacuum coating technology is in economic society every field extensive application, particularly science and technology develop rapidly, improving constantly of people's life and continuing to bring out of high-tech plated film product, give the development of vacuum coating technology and apply and brought new opportunity.
Vacuum plating mainly refers to one type of plated film that need under higher vacuum, carry out, and specifically comprises many types, comprises the vacuum ionic evaporation, magnetron sputtering, and the MBE molecular beam epitaxy, PLD laser splash depositions etc. are a variety of.Need the substrate that is called as of plated film, the material of plating is called as target.Substrate and target coexist in the vacuum chamber.Heat target exactly like evaporation coating, make surface component be evaporated out, and be deposited in substrate surface, form film through film process with atomic group or ionic species.Common evaporation coating is exactly that the carriage of placing film-coating workpiece places vacuum deposit chamber indoor; This carriage passes through the annular ball bearing rotational fixation in the annular supports frame, and is provided with the ring-type tooth bar this annular supports frame ring week, and driving gear that is engaged with and CD-ROM drive motor control rotation; Realize that the related workpiece of this carriage rotates; And target is placed in this carriage below, and this target is through the heating arrangements heated volatile, thus realization workpiece high temperature coating operation in vacuum chamber.Yet the carriage turns mechanism that drives place work piece is very loaded down with trivial details, is unfavorable for placing the workpiece of various size.
The utility model content
In order to overcome above-mentioned defective, the utility model provides a kind of improved structure of the vacuum coater based on the vacuum sputtering deposition technique, makes that the carriage drive mechanism of place work piece is simple and practical.
The utility model for the technical scheme that solves its technical problem and adopt is: a kind of improved structure of vacuum coater; Comprise the vacuum moulding machine chamber and be positioned at indoor carriage of this vacuum deposit chamber and target; This carriage through first rotating shaft and bearing rotational fixation in this vacuum moulding machine chamber top; And this first rotating shaft is controlled related this carriage turns by CD-ROM drive motor, and this target is positioned at this carriage below, through this target heating evaporation of heating arrangements control.
As the further improvement of the utility model, this carriage is dome-like structure, and this carriage inboard is to having a plurality of hooks that are used for fixing workpiece, this carriage top center through this first rotating shaft and bearing rotational fixation in this vacuum moulding machine chamber top.
As the further improvement of the utility model, be provided with the preheat mechanism of an ability between this carriage and this vacuum moulding machine chamber top at least to the heating of the workpiece on this carriage.
As the further improvement of the utility model, this preheats mechanism is nichrome wire heating member or infrared heating body.
Further improvement as the utility model; This heating arrangements is that to be installed on this vacuum deposit chamber indoor and can place the groove shape METAL HEATING PROCESS body of this target; These groove shape METAL HEATING PROCESS body both sides are provided with pair of electrodes; This counter electrode the other end is drawn behind this vacuum moulding machine chamber, is connected with the secondary winding leading-out end of supply transformer respectively.
Further improvement as the utility model; This target is also controlled this carriage turns relatively through rotating mechanism, and this rotating mechanism is for passing through second rotating shaft of bearing fixing in this bottom, vacuum deposit chamber indoor, and this second rotating shaft upper end and insulated connecting rod one end are fixed; And this insulated connecting rod at right angles is connected with this second rotating shaft; This insulated connecting rod the other end is fixed this groove shape electric heating element, and this counter electrode the other end is along this insulated connecting rod, and draws through the two through hole in this second rotating shaft; The outdoor back of this vacuum deposit chamber fixed idler whell is stretched out in this second rotating shaft lower end, and rotates through travelling belt and motor control.
As the further improvement of the utility model, this vacuum moulding machine chamber sidepiece is provided with the actuating doors that can load and unload film-coating workpiece.
The useful technique effect of the utility model is: said carriage top center through the first rotating shaft rotational fixation in being dome structure; This first rotating shaft can be driven by the control motor again and rotate; Like this this carriage drive rotating mechanism is designed behind this top, vacuum deposit chamber indoor, film-coating workpiece is positioned over the more convenient to operate of this carriage.
Said target is also through relative this carriage turns of rotating mechanism control; This rotating mechanism is for passing through second rotating shaft of bearing fixing in this bottom, vacuum deposit chamber indoor; This second rotating shaft upper end is fixed with insulated connecting rod one end, and this insulated connecting rod at right angles is connected with this second rotating shaft, and this insulated connecting rod the other end is fixed this groove shape electric heating element; This counter electrode the other end is along this insulated connecting rod; And draw through the two through hole in this second rotating shaft, the outdoor back of this vacuum deposit chamber fixed idler whell is stretched out in this second rotating shaft lower end, and through travelling belt and motor control rotation.Carriage and target can be controlled rotation respectively like this, when target through behind the heating arrangements heated volatile, it is more reasonable to be deposited on this carriage workpiece coatings thick consistency.
Description of drawings
Fig. 1 is the half section structural representation of the utility model.
Contrast above accompanying drawing, do to replenish as follows:
1---vacuum moulding machine chamber 60---, second rotating shaft
2---carriage 61---bearing
3---target 63---roller
4---first rotating shaft 64---travelling belt
5---nichrome wire heating member 66---motor
50---groove shape METAL HEATING PROCESS body 73---supply transformer
51---through hole 100---workpiece
52---insulated connecting rod
Embodiment
In conjunction with Fig. 1, further describe below the work:
A kind of improved structure of vacuum coater comprises vacuum moulding machine chamber 1 and is positioned at indoor carriage of this vacuum deposit chamber 2 and target 3, but these carriage 2 place work pieces 100; This carriage 2 is dome-like structure, and this carriage inboard is to having a plurality of hooks that are used for fixing workpiece, this carriage top center through this first rotating shaft 4 and bearing rotational fixation in this vacuum moulding machine chamber 1 top; And this first rotating shaft 4 is rotated by related this carriage 2 of CD-ROM drive motor control; At least be provided with the mechanism that preheats of an ability to the heating of the workpiece on this carriage between this carriage 2 and this vacuum moulding machine chamber 1 top, this preheats mechanism is nichrome wire heating member 5 (also can adopt infrared heating body), so that film-coating workpiece is in suitable coating temperature always; This target 3 is positioned at this carriage below; Through this target heating evaporation of heating arrangements control, realize that to workpiece plated film on this carriage said like this target is after the heating arrangements heating; Its component is evaporated to the workpiece on the dome structure; Reach the vacuum plating purpose, this heating arrangements is that to be installed on this vacuum deposit chamber indoor and can place the groove shape METAL HEATING PROCESS body of this target 3, and these groove shape METAL HEATING PROCESS body both sides are provided with pair of electrodes; This counter electrode the other end is drawn behind this vacuum moulding machine chamber 1; Be connected with the secondary winding leading-out end of supply transformer 73 respectively, this vacuum moulding machine chamber sidepiece is provided with actuating doors, is convenient to load and unload film-coating workpiece on this carriage.
For target evaporates the more even plated film of composition in each surface of workpiece; This target 3 is also through rotating mechanism control these carriage 2 rotations relatively; Second rotating shaft 60 of this rotating mechanism for being fixed in this vacuum moulding machine chamber 1 inside bottom through bearing 61; These second rotating shaft, 60 upper ends and insulated connecting rod 52 1 ends are fixed, and this insulated connecting rod 52 at right angles is connected with this second rotating shaft 60, and these insulated connecting rod 52 the other ends are fixed this groove shape METAL HEATING PROCESS body 50; This counter electrode the other end is along this insulated connecting rod 52; And draw through the two through hole 51 in this second rotating shaft 60, this vacuum moulding machine chamber 1 outer back fixed idler whell 63 is stretched out in these second rotating shaft, 60 lower ends, and through travelling belt 64 with motor 66 controls rotate.
Said vacuum moulding machine chamber realizes that vacuum tightness belongs to prior art, is not the innovation point of the utility model, does not state that at this above-mentioned nichrome wire type of heating also can adopt infrared heating body.
So-called METAL HEATING PROCESS body utilizes the metallic object two ends to connect alternating-current exactly, make the metallic object heating produce heat, and Infrared Heating and metallic object heating is not the innovative point of the utility model, belong to prior art, do not describe in detail at this.
Claims (7)
1. the improved structure of a vacuum coater; Comprise vacuum moulding machine chamber (1) and be positioned at the indoor carriage of this vacuum deposit chamber (2) and target (3); It is characterized in that: this carriage (2) through first rotating shaft (4) and bearing rotational fixation in this vacuum moulding machine chamber top; And this first rotating shaft (4) is rotated by CD-ROM drive motor related this carriage of control (2), and this target (3) is positioned at this carriage below, through this target heating evaporation of heating arrangements control.
2. the improved structure of vacuum coater according to claim 1; It is characterized in that: this carriage (2) is dome-like structure; This carriage inboard is to having a plurality of hooks that are used for fixing workpiece (100), this carriage top center through this first rotating shaft (4) and bearing rotational fixation in this vacuum moulding machine chamber (1) top.
3. the improved structure of vacuum coater according to claim 1 and 2 is characterized in that: be provided with the preheat mechanism of an ability to the heating of the workpiece on this carriage between this carriage (2) and this vacuum moulding machine chamber (1) top at least.
4. the improved structure of vacuum coater according to claim 3, it is characterized in that: this preheats mechanism is nichrome wire heating member (5) or infrared heating body.
5. the improved structure of vacuum coater according to claim 1 and 2; It is characterized in that: this heating arrangements is indoor and can place the groove shape METAL HEATING PROCESS body of this target (3) for being installed on this vacuum deposit chamber; These groove shape METAL HEATING PROCESS body both sides are provided with pair of electrodes; This counter electrode the other end is drawn behind this vacuum moulding machine chamber (1), and the secondary winding leading-out end with supply transformer (73) is connected respectively.
6. the improved structure of vacuum coater according to claim 5; It is characterized in that: this target (3) is also through rotating mechanism control this carriage (2) rotation relatively; Second rotating shaft (60) of this rotating mechanism for being fixed in this vacuum moulding machine chamber (1) inside bottom through bearing (61); This second rotating shaft (60) upper end is fixed with insulated connecting rod (52) one ends, and this insulated connecting rod (52) at right angles is connected with this second rotating shaft (60), and this insulated connecting rod (52) the other end is fixed this groove shape METAL HEATING PROCESS body (50); This counter electrode the other end is along this insulated connecting rod (52); And draw through the two through hole (51) in this second rotating shaft (60), the outer back of this vacuum moulding machine chamber (1) fixed idler whell (63) is stretched out in this second rotating shaft (60) lower end, and through travelling belt (64) and motor (66) control rotation.
7. according to the improved structure of the said vacuum coater of claim 1, it is characterized in that: this vacuum moulding machine chamber sidepiece is provided with the actuating doors that can load and unload film-coating workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202660135U CN202187056U (en) | 2011-07-26 | 2011-07-26 | Improved structure of vacuum coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202660135U CN202187056U (en) | 2011-07-26 | 2011-07-26 | Improved structure of vacuum coater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202187056U true CN202187056U (en) | 2012-04-11 |
Family
ID=45918517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202660135U Withdrawn - After Issue CN202187056U (en) | 2011-07-26 | 2011-07-26 | Improved structure of vacuum coater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202187056U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102899619A (en) * | 2011-07-26 | 2013-01-30 | 御林汽配(昆山)有限公司 | Improved structure of vacuum coating device |
| CN111349893A (en) * | 2020-04-20 | 2020-06-30 | 胡均松 | Vacuum coating equipment capable of being dried quickly |
-
2011
- 2011-07-26 CN CN2011202660135U patent/CN202187056U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102899619A (en) * | 2011-07-26 | 2013-01-30 | 御林汽配(昆山)有限公司 | Improved structure of vacuum coating device |
| CN111349893A (en) * | 2020-04-20 | 2020-06-30 | 胡均松 | Vacuum coating equipment capable of being dried quickly |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120411 Effective date of abandoning: 20140219 |
|
| RGAV | Abandon patent right to avoid regrant |