CN111349893A - Vacuum coating equipment capable of being dried quickly - Google Patents
Vacuum coating equipment capable of being dried quickly Download PDFInfo
- Publication number
- CN111349893A CN111349893A CN202010312984.2A CN202010312984A CN111349893A CN 111349893 A CN111349893 A CN 111349893A CN 202010312984 A CN202010312984 A CN 202010312984A CN 111349893 A CN111349893 A CN 111349893A
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- target
- plate
- vertical plate
- driving
- vacuum coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention provides vacuum coating equipment capable of quickly drying, which belongs to the technical field of vacuum coating and comprises a coating chamber, wherein an evaporation chamber is arranged at the bottom in the coating chamber, a heating plate is arranged in the evaporation chamber, a target material containing plate is rotatably arranged above the evaporation chamber, and heating components and driving components for driving the heating components to horizontally reciprocate along the length direction of the target material containing plate are arranged on the upper side and the lower side of the target material containing plate; the heating assembly comprises an infrared heating pipe and a bracket for fixing the infrared heating pipe. The embodiment of the invention has the advantage of good cleaning effect, and the heating assembly is driven by the driving assembly to horizontally reciprocate along the length direction of the target containing plate, so that the surface of the target is heated, and impurities such as dust, water stains and the like attached to the surface of the target are heated and volatilized, thereby realizing the cleaning and drying of the surface of the target, creating good conditions for the subsequent coating of the target, and improving the coating effect and the coating quality.
Description
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to vacuum coating equipment capable of quickly drying.
Background
Vacuum deposition is a method of forming a thin film by heating a metal or non-metal material under high vacuum to evaporate and condense the material on the surface of a workpiece (metal, semiconductor or insulator).
The target need carry out cleaning to its surface when carrying out vacuum coating, be used for preventing that the dust water stain on target surface from influencing subsequent coating quality and coating film effect, at present, the cleaning means to the target relies on the manual work to clean the target in advance, the target of will wiping clean again is put into the vacuum coating indoor and is carried out coating film treatment, however there is the defect of inefficiency in this kind of cleaning method, can't satisfy the batched coating film demand of target, the target is wiping clean the back that finishes simultaneously, be infected with the dust steam in the air again easily, lead to cleaning effect to reduce.
Disclosure of Invention
In view of the above-mentioned deficiencies of the prior art, an embodiment of the present invention provides a vacuum coating apparatus capable of fast drying.
In order to solve the technical problems, the invention provides the following technical scheme:
a vacuum coating device capable of achieving rapid drying comprises a coating chamber, wherein an evaporation chamber is arranged at the bottom in the coating chamber, a heating plate is arranged in the evaporation chamber, a target containing plate is rotatably arranged above the evaporation chamber, heating assemblies and driving assemblies are arranged on the upper side and the lower side of the target containing plate respectively, and the driving assemblies drive the heating assemblies to horizontally reciprocate along the length direction of the target containing plate; the heating assembly comprises an infrared heating pipe and a bracket for fixing the infrared heating pipe, and the upper part of the bracket is connected with a threaded sleeve through a support rod; the driving assembly comprises a driving rod which penetrates through the threaded sleeve and is in threaded fit with the threaded sleeve and a driving motor which is used for driving the driving rod to rotate, a first vertical plate and a second vertical plate which are used for bearing the driving rod are arranged on the upper side and the lower side of the target containing plate, the driving motor is fixedly arranged on one side, away from the second vertical plate, of the first vertical plate, and a guiding assembly which provides a guiding effect for the movement of the heating assembly is further arranged between the first vertical plate and the second vertical plate.
As a further improvement of the invention: and bearings which are in running fit with the driving rod are arranged on the first vertical plate and the second vertical plate.
As a further improvement of the invention: the length of the infrared heating pipe is larger than or equal to the width of the clamping groove.
As a further improvement of the invention: the guide assembly comprises a guide plate fixedly connected between the first vertical plate and the second vertical plate, a sliding groove is formed in the middle of the guide plate, the infrared heating pipe and the support are located at the bottom of the guide plate, and the supporting rod extends to the upper portion of the guide plate and is in threaded fit with the driving rod through a threaded sleeve.
As a still further improvement of the invention: the support is of a U-shaped structure, and the end part of the infrared heating pipe is fixedly arranged on the inner side of the support through a connecting rod.
As a still further improvement of the invention: the middle part of the target material containing plate is provided with a clamping groove for mounting the target material.
As a still further improvement of the invention: the side wall of the clamping groove is provided with an elastic soft layer.
As a still further improvement of the invention: the elastic soft layer is made of a silica gel material.
As a still further improvement of the invention: the target material containing plate is rotatably arranged inside the coating chamber, a ring is arranged on the inner wall of one side, far away from the driving motor, of the coating chamber, a plurality of tooth sheets are circumferentially distributed on the inner side of the ring, one end, far away from the driving motor, of the driving rod penetrates through the first vertical plate and the second vertical plate in sequence and is fixedly connected with a gear, and the gear is located on the inner side of the ring and is meshed with the tooth sheets.
As a still further improvement of the invention: the left side wall and the right side wall of the coating chamber are fixedly provided with supporting shafts, and one ends, far away from the inner wall of the coating chamber, of the supporting shafts extend to the inner side of the side face of the target containing plate and are in running fit with the target containing plate.
Compared with the prior art, the invention has the beneficial effects that:
the embodiment of the invention has the advantage of good cleaning effect, and the heating assembly is driven by the driving assembly to horizontally reciprocate along the length direction of the target containing plate, so that the surface of the target is heated, and impurities such as dust, water stains and the like attached to the surface of the target are heated and volatilized, thereby realizing the cleaning and drying of the surface of the target, creating good conditions for the subsequent coating of the target, and improving the coating effect and the coating quality.
Drawings
FIG. 1 is a schematic structural view of a vacuum coating apparatus capable of rapid drying;
FIG. 2 is a schematic structural diagram of a heating assembly in a vacuum coating apparatus capable of rapid drying;
FIG. 3 is a schematic structural diagram of a guide assembly in a vacuum coating apparatus capable of rapid drying;
FIG. 4 is an enlarged view of area A of FIG. 1;
in the figure: the device comprises a film coating chamber 1, a film evaporation chamber 2, a heating plate 3, a ring 4, a target material containing plate 5, a support shaft 6, an elastic soft layer 7, a second vertical plate 8, a guide plate 9, a drive rod 10, a clamping groove 11, a heating assembly 12, a first vertical plate 13, a drive motor 14, a threaded sleeve 15, a support rod 16, a support 17, an infrared heating pipe 18, a connecting rod 19, a sliding groove 20, a gear 21 and a toothed sheet 22.
Detailed Description
The technical solution of the present patent will be described in further detail with reference to the following embodiments.
Reference will now be made in detail to embodiments of the present patent, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present patent and are not to be construed as limiting the present patent.
In the description of this patent, it is to be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for the convenience of describing the patent and for the simplicity of description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the patent.
In the description of this patent, it is noted that unless otherwise specifically stated or limited, the terms "mounted," "connected," and "disposed" are to be construed broadly and can include, for example, fixedly connected, disposed, detachably connected, disposed, or integrally connected and disposed. The specific meaning of the above terms in this patent may be understood by those of ordinary skill in the art as appropriate.
Example 1
Referring to fig. 1-4, the embodiment provides a vacuum coating apparatus capable of fast drying, which includes a coating chamber 1, an evaporation chamber 2 is disposed at the bottom inside the coating chamber 1, a heating plate 3 is disposed inside the evaporation chamber 2, a target material containing plate 5 is rotatably mounted above the evaporation chamber 2, heating assemblies 12 and driving assemblies for driving the heating assemblies 12 to horizontally reciprocate along the length direction of the target material containing plate 5 are disposed on both upper and lower sides of the target material containing plate 5, specifically, the heating assemblies 12 include infrared heating pipes 18 and brackets 17 for fixing the infrared heating pipes 18, and the upper portions of the brackets 17 are connected with threaded sleeves 15 through support rods 16; the driving assembly comprises a driving rod 10 which penetrates through the threaded sleeve 15 and is in threaded fit with the threaded sleeve 15 and a driving motor 14 which is used for driving the driving rod 10 to rotate, a first vertical plate 13 and a second vertical plate 8 which are used for bearing the driving rod 10 are arranged on the upper side and the lower side of the target containing plate 5, the driving motor 14 is fixedly arranged on one side, away from the second vertical plate 8, of the first vertical plate 13, and a guiding assembly which provides a guiding effect for the movement of the heating assembly 12 is further arranged between the first vertical plate 13 and the second vertical plate 8.
The target to be coated is arranged on the target containing plate 5, the driving rod 10 is driven to rotate by the driving motor 14, the driving rod 10 is in threaded fit with the threaded sleeve 15, the driving rod 10 rotates under the action of the guide assembly to drive the threaded sleeve 15 to move along the length direction of the driving rod 10, so that the infrared heating tube 18 is driven to horizontally move along the length direction of the target containing plate 5, and impurities such as dust, water stains and the like attached to the surface of the target are heated and volatilized by the infrared heating tube 18, so that the surface of the target is cleaned and dried, good conditions are created for subsequent coating of the target, and the coating effect and the coating quality are improved; when the infrared heating pipe 18 moves from one end of the target material to the other end, the driving motor 14 is controlled to rotate reversely, and then the driving rod 10 is driven to rotate reversely, so that the infrared heating pipe 18 moves reversely, repeated cleaning of the target material is realized, and the cleaning effect is improved.
Specifically, the first vertical plate 13 and the second vertical plate 8 are both provided with bearings rotatably matched with the driving rod 10.
Specifically, the length of the infrared heating pipe 18 is greater than or equal to the width of the clamping groove 11, and the infrared heating pipe 18 can comprehensively heat the target along with the horizontal movement of the infrared heating pipe 18, so that the existence of a heating dead angle is avoided.
Specifically, the guide assembly includes a guide plate 9 fixedly connected between the first vertical plate 13 and the second vertical plate 8, a sliding groove 20 is formed in the middle of the guide plate 9, the infrared heating pipe 18 and the support 17 are both located at the bottom of the guide plate 9, and the support rod 16 extends from the sliding groove 20 to the position above the guide plate 9 and is in threaded fit with the driving rod 10 through a threaded sleeve 15.
By using the limiting function between the support rod 16 and the chute 20, when the drive rod 10 rotates, the threaded sleeve 15 can be driven to horizontally move along the length direction of the drive rod 10, and the infrared heating tube 18 is driven to horizontally move, so that the surface of the target material is cleaned and dried.
Specifically, the bracket 17 may be a U-shaped structure, and an end of the infrared heating pipe 18 is fixedly disposed inside the bracket 17 through a connecting rod 19.
Specifically, the middle part of the target material containing plate 5 is provided with a clamping groove 11 for mounting the target material, and the side wall of the clamping groove 11 is provided with an elastic soft layer 7.
Through the setting of the elastic soft layer 7, when the target material is clamped into the clamping groove 11, a certain protection effect on the target material can be achieved, and hard contact between the target material and the side wall of the clamping groove 11 is avoided, so that the target material is damaged.
Specifically, the material of the elastic soft layer 7 is not limited, and may be rubber, sponge, or silica gel, and in this embodiment, the elastic soft layer 7 is preferably made of a silica gel material.
The working principle of the embodiment of the invention is as follows: the target to be coated is arranged on the target containing plate 5, the driving rod 10 is driven to rotate by the driving motor 14, the driving rod 10 is in threaded fit with the threaded sleeve 15, the driving rod 10 rotates under the action of the guide assembly to drive the threaded sleeve 15 to move along the length direction of the driving rod 10, so that the infrared heating tube 18 is driven to horizontally move along the length direction of the target containing plate 5, and impurities such as dust, water stains and the like attached to the surface of the target are heated and volatilized by the infrared heating tube 18, so that the surface of the target is cleaned and dried, good conditions are created for subsequent coating of the target, and the coating effect and the coating quality are improved; when the infrared heating pipe 18 moves from one end of the target material to the other end, the driving motor 14 is controlled to rotate reversely, and then the driving rod 10 is driven to rotate reversely, so that the infrared heating pipe 18 moves reversely, repeated cleaning of the target material is realized, and the cleaning effect is improved.
By using the limiting function between the support rod 16 and the chute 20, when the drive rod 10 rotates, the threaded sleeve 15 can be driven to horizontally move along the length direction of the drive rod 10, and the infrared heating tube 18 is driven to horizontally move, so that the surface of the target material is cleaned and dried.
Example 2
Referring to fig. 1 and 4, in a vacuum coating apparatus capable of fast drying, in this embodiment, compared with embodiment 1, the target material holding plate 5 is rotatably disposed inside the coating chamber 1, an inner wall of one side of the inside of the coating chamber 1, which is away from the driving motor 14, is provided with a ring 4, a plurality of teeth 22 are circumferentially distributed on an inner side of the ring 4, one end of the driving rod 10, which is away from the driving motor 14, sequentially penetrates through the first vertical plate 13 and the second vertical plate 8 and is fixedly connected with a gear 21, and the gear 21 is located on an inner side of the ring 4 and is engaged with the teeth 22.
When driving motor 14 drives actuating lever 10 and rotates, actuating lever 10 drives gear 21 and rotates, because gear 21 and tooth 22 mesh, and ring 4 fixes on coating chamber 1 inner wall, thereby when making infrared heating pipe 18 along target horizontal migration, driving motor 14, actuating lever 10, first riser 13, second riser 8, threaded sleeve 15, bracing piece 16, support 17, infrared heating pipe 18, gear 21 and target hold board 5 wholly around ring 4 and rotate, thereby make the upper and lower surface of target can evenly contact with the evaporation state coating of coating chamber 1 inner chamber, improve the coating film quality and the coating film efficiency of target.
Specifically, a supporting shaft 6 is fixedly arranged on the left side wall and the right side wall inside the coating chamber 1, and one end, far away from the inner wall of the coating chamber 1, of the supporting shaft 6 extends to the inside of the side face of the target material containing plate 5 and is in running fit with the target material containing plate 5.
When the driving motor 14 drives the driving rod 10 to rotate, the gear 21 performs circular motion around the ring 4 under the effect of meshing with the toothed sheet 22, and then drives the target material containing plate 5 to rotate around the supporting shaft 6, so as to drive the target material to turn over inside the coating chamber 1, and enhance the coating effect of the target material.
The embodiment of the invention has the advantage of good cleaning effect, the heating assembly 12 is driven by the driving assembly to horizontally reciprocate along the length direction of the target material containing plate 5, so that the surface of the target material is heated, impurities such as dust, water stains and the like attached to the surface of the target material are heated and volatilized, the surface of the target material is cleaned and dried, good conditions are created for subsequent coating of the target material, and the coating effect and the coating quality are improved.
Although the preferred embodiments of the present patent have been described in detail, the present patent is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present patent within the knowledge of those skilled in the art.
Claims (10)
1. A vacuum coating device capable of achieving rapid drying comprises a coating chamber (1), wherein an evaporation chamber (2) is arranged at the bottom in the coating chamber (1), and a heating plate (3) is arranged inside the evaporation chamber (2), and is characterized in that a target material containing plate (5) is rotatably arranged above the evaporation chamber (2), and heating assemblies (12) and driving assemblies for driving the heating assemblies (12) to horizontally reciprocate along the length direction of the target material containing plate (5) are arranged on the upper side and the lower side of the target material containing plate (5);
the heating assembly (12) comprises an infrared heating pipe (18) and a bracket (17) for fixing the infrared heating pipe (18), and the upper part of the bracket (17) is connected with a threaded sleeve (15) through a support rod (16);
the driving assembly comprises a driving rod (10) which penetrates through the threaded sleeve (15) and is in threaded fit with the threaded sleeve (15) and a driving motor (14) which is used for driving the driving rod (10) to rotate, a first vertical plate (13) and a second vertical plate (8) which are used for bearing the driving rod (10) are arranged on the upper side and the lower side of the target material containing plate (5), the driving motor (14) is fixedly arranged on one side, away from the second vertical plate (8), of the first vertical plate (13), and a guiding assembly which provides a guiding effect for the movement of the heating assembly (12) is further arranged between the first vertical plate (13) and the second vertical plate (8).
2. The vacuum coating equipment capable of being rapidly dried according to claim 1, wherein the first vertical plate (13) and the second vertical plate (8) are provided with bearings rotatably matched with the driving rod (10).
3. The vacuum coating apparatus capable of fast drying according to claim 1, wherein the length of the infrared heating tube (18) is greater than or equal to the width of the clamping groove (11).
4. The vacuum coating equipment capable of achieving rapid drying according to claim 1 or 2, wherein the guide assembly comprises a guide plate (9) fixedly connected between the first vertical plate (13) and the second vertical plate (8), a sliding groove (20) is formed in the middle of the guide plate (9), the infrared heating pipe (18) and the bracket (17) are both located at the bottom of the guide plate (9), and the support rod (16) extends from the sliding groove (20) to the position above the guide plate (9) and is in threaded fit with the driving rod (10) through a threaded sleeve (15).
5. The vacuum coating equipment capable of fast drying according to claim 1, wherein the bracket (17) is of a U-shaped structure, and the end of the infrared heating tube (18) is fixedly arranged inside the bracket (17) through a connecting rod (19).
6. The vacuum coating equipment capable of being rapidly dried according to claim 1, wherein a clamping groove (11) for mounting the target is formed in the middle of the target holding plate (5).
7. The vacuum coating equipment capable of being rapidly dried according to claim 6, wherein the side wall of the clamping groove (11) is provided with an elastic soft layer (7).
8. The vacuum coating equipment capable of being dried rapidly according to claim 7, wherein the flexible soft layer (7) is made of silicone material.
9. The vacuum coating equipment capable of achieving rapid drying according to claim 1, wherein the target material containing plate (5) is rotatably disposed inside the coating chamber (1), a ring (4) is disposed on an inner wall of one side of the coating chamber (1) far away from the driving motor (14), a plurality of teeth (22) are circumferentially distributed on an inner side of the ring (4), one end of the driving rod (10) far away from the driving motor (14) sequentially penetrates through the first vertical plate (13) and the second vertical plate (8) and is fixedly connected with a gear (21), and the gear (21) is located on an inner side of the ring (4) and is meshed with the teeth (22).
10. The vacuum coating equipment capable of achieving rapid drying according to claim 9, wherein a supporting shaft (6) is fixedly arranged on the left and right side walls inside the coating chamber (1), and one end of the supporting shaft (6) far away from the inner wall of the coating chamber (1) extends to the inside of the side surface of the target containing plate (5) and is in running fit with the target containing plate (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010312984.2A CN111349893A (en) | 2020-04-20 | 2020-04-20 | Vacuum coating equipment capable of being dried quickly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010312984.2A CN111349893A (en) | 2020-04-20 | 2020-04-20 | Vacuum coating equipment capable of being dried quickly |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111349893A true CN111349893A (en) | 2020-06-30 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010312984.2A Withdrawn CN111349893A (en) | 2020-04-20 | 2020-04-20 | Vacuum coating equipment capable of being dried quickly |
Country Status (1)
| Country | Link |
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| CN (1) | CN111349893A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114369797A (en) * | 2022-01-14 | 2022-04-19 | 江苏宇狮薄膜科技有限公司 | Film coating machine |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1189714A (en) * | 1966-07-29 | 1970-04-29 | Libbey Owens Ford Co | A Continuous Process of Coating by Vapour Deposition. |
| CN201295743Y (en) * | 2008-11-26 | 2009-08-26 | 济南圣泉集团股份有限公司 | Infrared drier |
| CN202181344U (en) * | 2011-07-26 | 2012-04-04 | 御林汽配(昆山)有限公司 | Vacuum film coating device |
| CN202187056U (en) * | 2011-07-26 | 2012-04-11 | 御林汽配(昆山)有限公司 | Improved structure of vacuum coater |
| CN105021005A (en) * | 2015-06-23 | 2015-11-04 | 彩虹集团电子股份有限公司 | Removing and drying device for water spots on glass surface |
| CN105220115A (en) * | 2015-10-31 | 2016-01-06 | 东莞市华星镀膜科技有限公司 | A kind of ion cleaning system clean to coated product secondary and purifying method thereof |
| CN207512256U (en) * | 2017-11-16 | 2018-06-19 | 温州大学 | A kind of vacuum coating equipment |
| CN208791736U (en) * | 2018-03-27 | 2019-04-26 | 苏州市唯嘉光学有限公司 | A kind of vacuum evaporator for plated film |
-
2020
- 2020-04-20 CN CN202010312984.2A patent/CN111349893A/en not_active Withdrawn
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1189714A (en) * | 1966-07-29 | 1970-04-29 | Libbey Owens Ford Co | A Continuous Process of Coating by Vapour Deposition. |
| CN201295743Y (en) * | 2008-11-26 | 2009-08-26 | 济南圣泉集团股份有限公司 | Infrared drier |
| CN202181344U (en) * | 2011-07-26 | 2012-04-04 | 御林汽配(昆山)有限公司 | Vacuum film coating device |
| CN202187056U (en) * | 2011-07-26 | 2012-04-11 | 御林汽配(昆山)有限公司 | Improved structure of vacuum coater |
| CN105021005A (en) * | 2015-06-23 | 2015-11-04 | 彩虹集团电子股份有限公司 | Removing and drying device for water spots on glass surface |
| CN105220115A (en) * | 2015-10-31 | 2016-01-06 | 东莞市华星镀膜科技有限公司 | A kind of ion cleaning system clean to coated product secondary and purifying method thereof |
| CN207512256U (en) * | 2017-11-16 | 2018-06-19 | 温州大学 | A kind of vacuum coating equipment |
| CN208791736U (en) * | 2018-03-27 | 2019-04-26 | 苏州市唯嘉光学有限公司 | A kind of vacuum evaporator for plated film |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114369797A (en) * | 2022-01-14 | 2022-04-19 | 江苏宇狮薄膜科技有限公司 | Film coating machine |
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Application publication date: 20200630 |