Disclosure of Invention
In view of the above-mentioned deficiencies of the prior art, an embodiment of the present invention provides a low-temperature vacuum coating apparatus.
In order to solve the technical problems, the invention provides the following technical scheme:
a low-temperature vacuum coating device comprises a coating chamber and an evaporation chamber arranged at the bottom in the coating chamber, wherein an electric heating plate is arranged at the bottom in the evaporation chamber, the side of the coating chamber is connected with a vacuum pump, a containing assembly is arranged in the coating chamber and comprises a ring plate and a mounting plate which penetrates through the inner side of the ring plate and is fixedly connected with the ring plate, a clamping groove for mounting a target material is formed in the middle of the mounting plate, a plurality of tooth sheets which are uniformly distributed in the circumferential direction are arranged on the outer side of the ring plate, racks which are meshed with the tooth sheets are arranged on the inner wall of the coating chamber, guide assemblies are arranged on the left side wall and the right side wall in the coating chamber, the left end and the right end of the ring plate are rotatably connected with a U-shaped fixture block through a rotating rod, and the U-shaped fixture block is in sliding fit with the guide assemblies; the coating chamber is characterized in that a first driving assembly used for controlling the U-shaped fixture block to move up and down along the guide assembly is arranged on the inner wall of the coating chamber, and a second driving assembly used for driving the first driving assembly to move up and down is further arranged on the upper portion of the coating chamber.
As a further improvement of the invention: the guide assembly comprises two groups of guide strips which are oppositely arranged, and the U-shaped clamping block is clamped outside the two groups of guide strips.
As a further improvement of the invention: the diameter of the ring plate is perpendicular to the length direction of the mounting plate.
As a further improvement of the invention: the coating chamber is characterized in that an elongated slot is formed in the inner wall of the coating chamber, two groups of guide strips are respectively positioned on two sides of the elongated slot, each first driving assembly comprises a driving rod movably arranged in the elongated slot and a plurality of movable plates hinged to one side of the driving rod, which faces the coating chamber, the upper end of each driving rod extends to the outside of the coating chamber and is connected with a second driving assembly, the middle of each movable plate is rotatably matched with the inner wall of the elongated slot through a rotating pin, magnetic sheets are arranged on the upper side and the lower side of one end, far away from the driving rod, of each movable plate, and magnetic blocks corresponding to the magnetic sheets are arranged on the inner side of each U-shaped clamping block.
As a still further improvement of the invention: the magnetic blocks are in an isosceles triangle structure.
As a still further improvement of the invention: the second driving assembly comprises a pressing plate arranged above the coating chamber and a cam arranged on the upper portion of the pressing plate and tightly attached to the pressing plate, the upper end of the driving rod extends to the outside of the coating chamber and is fixedly connected with the bottom of the pressing plate, the cam is connected with an external motor through a rotating shaft, and the bottom of the pressing plate is connected with the upper portion of the coating chamber through a plurality of elastic supporting pieces.
As a still further improvement of the invention: the elastic supporting piece is a spring.
As a still further improvement of the invention: the elastic supporting piece is an elastic sheet.
As a still further improvement of the invention: the mounting panel inboard still is provided with along the soft layer of elastic support of draw-in groove circumference distribution.
As a still further improvement of the invention: the elastic supporting soft layer is made of rubber materials.
Compared with the prior art, the invention has the beneficial effects that:
in the embodiment of the invention, the second driving assembly drives the first driving assembly to move up and down, the first driving assembly drives the mounting plate and the annular plate to move up and down in the coating chamber, and simultaneously drives the mounting plate and the target to rotate under the meshing effect of the toothed sheet and the rack, so that the upper surface and the lower surface of the target can be fully contacted with evaporated coating, the coating efficiency of the target is improved, and the coating device has the advantages of good coating effect and high quality.
Detailed Description
The technical solution of the present patent will be described in further detail with reference to the following embodiments.
Reference will now be made in detail to embodiments of the present patent, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present patent and are not to be construed as limiting the present patent.
In the description of this patent, it is to be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for the convenience of describing the patent and for the simplicity of description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the patent.
In the description of this patent, it is noted that unless otherwise specifically stated or limited, the terms "mounted," "connected," and "disposed" are to be construed broadly and can include, for example, fixedly connected, disposed, detachably connected, disposed, or integrally connected and disposed. The specific meaning of the above terms in this patent may be understood by those of ordinary skill in the art as appropriate.
Example 1
Referring to fig. 1-4, the embodiment provides a low-temperature vacuum coating apparatus, which includes a coating chamber 1 and an evaporation chamber 2 disposed at the bottom of the coating chamber 1, wherein an electric heating plate 3 is disposed at the bottom of the evaporation chamber 2, a vacuum pump 4 is connected to the side of the coating chamber 1, a holding assembly is disposed inside the coating chamber 1, specifically, the holding assembly includes a ring plate 6 and a mounting plate 8 penetrating from the inner side of the ring plate 6 and fixedly connected to the ring plate 6, a slot 15 for mounting a target material is disposed in the middle of the mounting plate 8, a plurality of teeth 7 uniformly distributed in the circumferential direction are disposed on the outer side of the ring plate 6, a rack 5 engaged with the teeth 7 is disposed on the inner wall of the coating chamber 1, guide assemblies 12 are disposed on the left and right side walls of the coating chamber 1, the left and right ends of the ring plate 6 are rotatably connected to U-shaped fixture blocks 20 through rotating rods 21, the U-shaped fixture block 20 is in sliding fit with the guide assembly 12; the coating chamber 1 is characterized in that a first driving assembly used for controlling the U-shaped fixture block 20 to move up and down along the guide assembly 12 is arranged on the inner wall of the coating chamber 1, and a second driving assembly used for driving the first driving assembly to move up and down is further arranged on the upper portion of the coating chamber 1.
Embedding a target material to be coated into the clamping groove 15, vacuumizing the coating chamber 1 by using a vacuum pump 4, and heating and evaporating the coating in the evaporation chamber 2 by using an electric heating plate 3 and dispersing the coating to the inner cavity of the coating chamber 1; utilize second drive assembly to drive first drive assembly and reciprocate, first drive assembly drives U type fixture block 20 and reciprocates along guide assembly 12, U type fixture block 20 drives mounting panel 8 and crown plate 6 and reciprocates in coating film room 1 inside, because the crown plate 6 outside is through the meshing of pick 7 and rack 5, both ends are passed through bull stick 21 and are connected with U type fixture block 20 rotation about mounting panel 8, mounting panel 8 and crown plate 6 rotate when reciprocating, and then drive the target on the mounting panel 8 and rotate, make the upper and lower surface of target can carry out even and abundant contact with the inside abundant coating of coating film room 1, thereby improve the coating film effect of target.
Specifically, the guide assembly includes two sets of gibs that set up relatively, U type fixture block 20 card establish with two sets of gibs outsides.
Specifically, the diameter of the ring plate 6 is perpendicular to the length direction of the mounting plate 8.
Specifically, an elongated slot 14 is formed in the inner wall of the coating chamber 1, two groups of guide bars are respectively located on two sides of the elongated slot 14, the first driving assembly comprises a driving rod 13 movably arranged inside the elongated slot 14 and a plurality of movable plates 16 hinged to one side of the driving rod 13 facing the inside of the coating chamber 1, the upper end of the driving rod 13 extends to the outside of the coating chamber 1 and is connected with the second driving assembly, the middle of each movable plate 16 is rotatably matched with the inner wall of the elongated slot 14 through a rotating pin 17, magnetic sheets 18 are arranged on the upper side and the lower side of one end, far away from the driving rod 13, of each movable plate 16, and magnetic blocks 19 corresponding to the magnetic sheets 18 are arranged on the inner side of the U-shaped fixture block 20.
The driving rod 13 is driven to move up and down by the second driving assembly, when the driving rod 13 moves down to the maximum stroke, under the action of the rotating pin 17, one end of the movable plate 16, which is far away from the driving rod 13, rotates upwards, the magnetic sheet 18 at the bottom of the movable plate 16 acts on the magnetic block 19, the magnetic block 19 and the U-shaped fixture block 20 are pushed to move downwards by the repulsion effect of the magnetic sheet 18 and the magnetic block 19, the mounting plate 8 and the ring plate 6 are further driven to move downwards, and the mounting plate 8 is driven to rotate by the meshing effect of the toothed sheet 7 and the rack 5, so that the target is driven to rotate; when the mounting plate 8 rotates 360 degrees, the second driving assembly drives the driving rod 13 to move upwards, when the driving rod 13 moves upwards to the maximum stroke, one end of the movable plate 16, which is far away from the driving rod 13, rotates downwards, the magnetic sheet 18 on the upper portion of the movable plate 16 acts on the magnetic block 19, the magnetic block 19 and the U-shaped fixture block 20 are pushed to move upwards by the repulsion effect of the magnetic sheet 18 and the magnetic block 19, the mounting plate 8 and the ring plate 6 are further driven to move upwards, the mounting plate 8 is driven to rotate reversely by the meshing effect of the toothed sheet 7 and the rack 5, and the target is reset.
Specifically, the magnetic block 19 is in an isosceles triangle structure, and when the driving rod 13 moves down to the maximum stroke, the magnetic sheet 18 at the bottom of the movable plate 16 acts on the upper side inclined plane of the magnetic block 19; when the driving rod 13 moves up to the maximum stroke, the magnetic sheet 18 on the upper portion of the movable plate 16 acts on the lower inclined surface of the magnetic block 9, thereby providing a strong pushing force for the movement of the U-shaped latch 20.
Specifically, the second driving assembly comprises a pressing plate 9 arranged above the coating chamber 1 and a cam 10 arranged on the upper portion of the pressing plate 9 and tightly attached to the pressing plate 9, the upper end of the driving rod 13 extends to the outside of the coating chamber 1 and is fixedly connected with the bottom of the pressing plate 9, the cam 10 is connected with an external motor through a rotating shaft 11, and the bottom of the pressing plate 9 is connected with the upper portion of the coating chamber 1 through a plurality of elastic supporting pieces 23.
The external motor drives the lug 10 to rotate, the pressing plate 9 is tightly attached to the cam 10 under the action of the elastic supporting piece 23, and the pressing plate 9 moves up and down along with the change of the profile of the cam 10, so that the driving plate 13 moves up and down.
Specifically, the elastic support 23 is a spring or a spring plate.
The working principle of the embodiment is as follows: embedding a target material to be coated into the clamping groove 15, vacuumizing the coating chamber 1 by using a vacuum pump 4, and heating and evaporating the coating in the evaporation chamber 2 by using an electric heating plate 3 and dispersing the coating to the inner cavity of the coating chamber 1; utilize second drive assembly to drive first drive assembly and reciprocate, first drive assembly drives U type fixture block 20 and reciprocates along guide assembly 12, U type fixture block 20 drives mounting panel 8 and crown plate 6 and reciprocates in coating film room 1 inside, because the crown plate 6 outside is through the meshing of pick 7 and rack 5, both ends are passed through bull stick 21 and are connected with U type fixture block 20 rotation about mounting panel 8, mounting panel 8 and crown plate 6 rotate when reciprocating, and then drive the target on the mounting panel 8 and rotate, make the upper and lower surface of target can carry out even and abundant contact with the inside abundant coating of coating film room 1, thereby improve the coating film effect of target.
The driving rod 13 is driven to move up and down by the second driving assembly, when the driving rod 13 moves down to the maximum stroke, under the action of the rotating pin 17, one end of the movable plate 16, which is far away from the driving rod 13, rotates upwards, the magnetic sheet 18 at the bottom of the movable plate 16 acts on the magnetic block 19, the magnetic block 19 and the U-shaped fixture block 20 are pushed to move downwards by the repulsion effect of the magnetic sheet 18 and the magnetic block 19, the mounting plate 8 and the ring plate 6 are further driven to move downwards, and the mounting plate 8 is driven to rotate by the meshing effect of the toothed sheet 7 and the rack 5, so that the target is driven to rotate; when the mounting plate 8 rotates 360 degrees, the second driving assembly drives the driving rod 13 to move upwards, when the driving rod 13 moves upwards to the maximum stroke, one end of the movable plate 16, which is far away from the driving rod 13, rotates downwards, the magnetic sheet 18 on the upper portion of the movable plate 16 acts on the magnetic block 19, the magnetic block 19 and the U-shaped fixture block 20 are pushed to move upwards by the repulsion effect of the magnetic sheet 18 and the magnetic block 19, the mounting plate 8 and the ring plate 6 are further driven to move upwards, the mounting plate 8 is driven to rotate reversely by the meshing effect of the toothed sheet 7 and the rack 5, and the target is reset.
The external motor drives the lug 10 to rotate, the pressing plate 9 is tightly attached to the cam 10 under the action of the elastic supporting piece 23, and the pressing plate 9 moves up and down along with the change of the profile of the cam 10, so that the driving plate 13 moves up and down.
Example 2
Referring to fig. 3, in the present embodiment, compared with embodiment 1, in the installation plate 8, the inner side of the clamping groove 15 is further provided with an elastic supporting soft layer 22 distributed along the axial circumference of the clamping groove, and the edge of the target can be elastically supported by the elastic supporting soft layer 22, so as to facilitate the installation of the target.
In particular, the flexible supporting soft layer 22 is made of a rubber material.
In the embodiment of the invention, the second driving component drives the first driving component to move up and down, the first driving component drives the mounting plate 8 and the annular plate 6 to move up and down in the coating chamber 1, and simultaneously drives the mounting plate 8 and the target to rotate under the meshing effect of the toothed sheet 7 and the rack 5, so that the upper surface and the lower surface of the target can be fully contacted with evaporated coating, the coating efficiency of the target is improved, and the coating device has the advantages of good coating effect and high quality.
Although the preferred embodiments of the present patent have been described in detail, the present patent is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present patent within the knowledge of those skilled in the art.