CN113770121A

CN113770121A - Plasma cleaning machine

Info

Publication number: CN113770121A
Application number: CN202111041241.7A
Authority: CN
Inventors: 陈天元; 谢育林; 李文强; 杨建新; 朱霆; 张凯
Original assignee: Shenzhen Tete Semiconductor Equipment Co ltd
Current assignee: Shenzhen Tete Semiconductor Equipment Co ltd
Priority date: 2021-09-06
Filing date: 2021-09-06
Publication date: 2021-12-10

Abstract

The invention provides a plasma cleaning machine. The plasma cleaning machine comprises a material pushing mechanism, a transfer mechanism, a cleaning mechanism, a temporary storage mechanism and a material receiving mechanism, wherein the material pushing mechanism is used for pushing the material strips in the discharging box outwards; the transfer mechanism comprises a transfer component and a pushing component arranged on the transfer component, the transfer component is movably arranged on the rack so that the transfer component can do rotary motion among the pushing mechanism, the cleaning mechanism and the temporary storage mechanism, and the transfer component is used for transferring the pushed-out material strips to the cleaning mechanism and transferring the cleaned material strips to the temporary storage mechanism; the cleaning mechanism is used for cleaning the material strips transferred to the cleaning mechanism; the pushing assembly is used for pushing the material strips transferred to the temporary storage mechanism to the material receiving mechanism; the receiving agencies is used for receiving the material strip of propelling movement to it. The plasma cleaning machine can solve the problem that the conventional plasma cleaning machine is low in strip cleaning efficiency due to unreasonable structural arrangement.

Description

Plasma cleaning machine

Technical Field

The invention relates to the technical field of cleaning, in particular to a plasma cleaning machine.

Background

In the chip industry, the material strips such as a substrate and a lead frame are usually left with pollutants such as glue overflow and oxides during production, so that the effect of the bonding wire is influenced, and the material strips are mainly cleaned by a plasma cleaning machine at present. However, the existing plasma cleaning machine has unreasonable structural arrangement, which results in too low cleaning speed and low cleaning efficiency of the material strips, and influences the production of the material strips.

Therefore, there is a need for a new type of plasma cleaning machine to solve the above-mentioned problems.

Disclosure of Invention

The invention mainly aims to provide a plasma cleaning machine and aims to solve the problem that the conventional plasma cleaning machine is low in strip cleaning efficiency due to unreasonable structural arrangement.

In order to achieve the above purpose, the present invention provides a plasma cleaning machine, which includes a rack, and a material pushing mechanism, a transferring mechanism, a cleaning mechanism, a temporary storage mechanism and a material receiving mechanism, which are arranged on the rack, wherein:

the material pushing mechanism is suitable for placing a material discharging box and used for pushing the material strips in the material discharging box outwards;

the cleaning mechanism is arranged between the material pushing mechanism and the temporary storage mechanism, the transfer mechanism comprises a transfer component and a pushing component arranged on the transfer component, the transfer component is movably arranged on the rack so that the transfer component can perform rotary motion among the material pushing mechanism, the cleaning mechanism and the temporary storage mechanism, and the transfer component is used for transferring the pushed material strips to the cleaning mechanism and transferring the cleaned material strips to the temporary storage mechanism;

the cleaning mechanism is used for cleaning the material strips transferred to the cleaning mechanism;

the receiving mechanism is arranged on one side, back to the cleaning mechanism, of the temporary storage mechanism, and the pushing assembly is used for pushing the material strips transferred to the temporary storage mechanism to the receiving mechanism;

the receiving mechanism is used for receiving the material strips pushed to the receiving mechanism.

In an embodiment, the temporary storage mechanism includes a temporary storage table and a plurality of first conducting bars, the plurality of first conducting bars are arranged on the temporary storage table and are sequentially arranged at intervals along the length direction of the temporary storage table, the first conducting bars are movably arranged on the temporary storage table, a plurality of first guiding grooves are formed on the first conducting bars, and one of the guiding grooves is used for bearing and guiding one of the strips.

In an embodiment, the plurality of first conducting bars includes a plurality of first sub-conducting bars and a plurality of second sub-conducting bars, the plurality of first sub-conducting bars and the plurality of second sub-conducting bars are sequentially and alternately arranged at intervals along the length direction of the temporary storage table, one first sub-conducting bar and one second sub-conducting bar are oppositely arranged and form the first guiding groove, and the first sub-conducting bar and/or the second sub-conducting bar are movably arranged on the temporary storage table, so that the width of the first guiding groove is adjustable.

In an embodiment, the temporary storage mechanism further comprises a first connecting rod, a second connecting rod and a first driving piece, the first connecting rod and the second connecting rod are slidably arranged on the temporary storage table respectively, the first sub-conducting bars are sequentially arranged on the first connecting rod at intervals, the second sub-conducting bars are sequentially arranged on the second connecting rod at intervals, the first driving piece is arranged on the bearing table and connected with the first connecting rod and the second connecting rod, and the first driving piece is used for driving the first connecting rod and the second connecting rod to slide on the temporary storage table so as to adjust the distance between the first sub-conducting bars and the second sub-conducting bars.

In an embodiment, the temporary storage mechanism further comprises a push claw and a push claw driving piece, the push claw is arranged on one side, facing the material receiving mechanism, of the temporary storage table, the material receiving mechanism comprises a first placing table, the first placing table is used for placing a material receiving box, and the push claw driving piece is used for driving the push claw to lift and/or horizontally move, so that the push claw can completely push the material strips into the material receiving box.

In an embodiment, the transfer mechanism further includes a mounting bracket, a second driving member and a third driving member, the second driving member is disposed on the mounting bracket, the third driving member is disposed on the second driving member, the transfer component is disposed on the third driving member and faces the pushing mechanism, the pushing component faces the receiving mechanism, the second driving member is used for driving the third driving member to face the pushing mechanism, the temporary storage mechanism is in straight reciprocating motion in the direction, and the third driving member is used for driving the transfer component and the pushing component to move up and down along the height direction.

In an embodiment, the cleaning mechanism comprises an upper cover cavity, a lower cover cavity and a cavity driving piece, the lower cover cavity and the cavity driving piece are arranged on the rack, the upper cover cavity is arranged on the cavity driving piece, and the cavity driving piece is used for driving the upper cover cavity to be adjusted in a lifting mode, so that the upper cover cavity can be covered on the lower cover cavity to form a vacuum cavity for cleaning the material strips.

In an embodiment, the lower cover cavity comprises a negative plate and a plurality of second guide bars arranged on the negative plate, the negative plate and the temporary storage table are arranged at intervals, the second guide bars are arranged on the negative plate and are sequentially arranged along the length direction of the temporary storage table at intervals, a plurality of second guide bars are formed with a plurality of second guide grooves matched with the first guide grooves, and the second guide grooves correspond to the first guide grooves.

In an embodiment, the transfer mechanism further comprises a bearing assembly, the bearing assembly comprises a bearing table and a plurality of third guide bars arranged on the bearing table, the bearing table is arranged between the pushing mechanism and the negative plate, the plurality of third guide bars are arranged on the bearing table and are sequentially arranged at intervals along the length direction of the negative plate, a plurality of third guide bars are formed with a plurality of third guide grooves matched with the plurality of second guide grooves, and one of the third guide grooves corresponds to one of the second guide grooves.

In an embodiment, pushing equipment is including pushing away the material subassembly, it includes the push rod to push away the material subassembly, push away material driving piece, elastic component and cross roller slip table, it locates to push away the material driving piece in the frame, cross roller slip table is located push away the drive end of material driving piece, the push rod is located on the cross roller slip table, the elastic component is connected cross roller guide rail with the drive end of pushing away the material driving piece, it is used for the drive to push away the material driving piece the push rod orientation go out the direction of magazine and carry out reciprocating motion.

According to the technical scheme, the pushing mechanism, the transferring mechanism, the cleaning mechanism, the temporary storage mechanism and the receiving mechanism are arranged on the rack, wherein the pushing mechanism is suitable for placing a discharging box, and is used for pushing the material strips in the discharging box outwards so as to be convenient for the transferring assembly to transfer the pushed material strips; the transfer mechanism comprises a transfer component and a pushing component arranged on the transfer component, the transfer component is movably arranged on the rack so that the transfer component can do rotary motion among the pushing mechanism, the cleaning mechanism and the temporary storage mechanism, the transfer component is used for transferring the pushed material strips to the cleaning mechanism and transferring the cleaned material strips to the temporary storage mechanism, and the arrangement is such that the transfer component can circularly transfer the material strips; the cleaning mechanism is used for cleaning the material strips transferred to the cleaning mechanism; the material collecting mechanism is arranged at one side of the temporary storage mechanism, which is back to the cleaning mechanism, the pushing component is used for pushing the material strips transferred to the temporary storage mechanism to the material collecting mechanism, the material collecting mechanism is used for collecting the material strips pushed to the material collecting mechanism, and the arrangement is that, when the transfer component transfers the cleaned material strips to the temporary storage mechanism for the first time, the pushing component rotates along with the transfer component, in the subsequent process of the rotary motion of the transfer component, the pushing component can push the material strips which are transferred to the temporary storage mechanism at the previous time to the material receiving mechanism while the transfer component transfers the material strips to the temporary storage mechanism, namely, the pushing component can synchronously push the material strips transferred at the previous time to the material receiving mechanism along with the movement of the transferring component, the material strip transferring step of the transferring assembly is reduced by arranging the pushing assembly, the time for transferring the material strip by the transferring assembly is shortened, and the material strip transferring efficiency is improved. Therefore, the structure arrangement of the plasma cleaning machine is optimized, and the cleaning efficiency of the material strips is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

FIG. 1 is a schematic structural diagram of a plasma cleaning machine according to an embodiment of the present invention;

FIG. 2 is a schematic view of a portion of the structure of FIG. 1;

FIG. 3 is a schematic view of a portion of the structure of FIG. 2;

FIG. 4 is a schematic exploded view of the structure of FIG. 3;

FIG. 5 is a schematic structural diagram of the temporary storage mechanism shown in FIG. 4;

FIG. 6 is a schematic diagram of the structure of FIG. 5 from another perspective;

FIG. 7 is a schematic structural view of the transfer mechanism of FIG. 4;

FIG. 8 is a schematic diagram of the structure of FIG. 7 from another perspective;

FIG. 9 is a schematic view of the pusher assembly of FIG. 4;

FIG. 10 is a schematic diagram of the structure of FIG. 9 from another perspective;

fig. 11 is an enlarged view of a portion a in fig. 10.

The reference numbers illustrate:

the objects, features and advantages of the present invention will be further explained with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.

In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.

The invention provides a plasma cleaning machine which is used for carrying out plasma cleaning on strips (such as substrates, lead frames and the like).

Referring to fig. 1 to 4, in an embodiment of the plasma cleaning machine 10 of the present invention, the plasma cleaning machine 10 includes a rack 100, and a material pushing mechanism 200, a transferring mechanism 300, a cleaning mechanism 400, a temporary storage mechanism 500, and a material receiving mechanism 600 disposed on the rack 100, wherein the material pushing mechanism 200 is adapted to place a material discharging box 11, and the material pushing mechanism 200 is adapted to push out a material strip in the material discharging box 11; the cleaning mechanism 400 is disposed between the pushing mechanism 200 and the temporary storage mechanism 500, the transferring mechanism 300 includes a transferring component 310 and a pushing component 320 disposed on the transferring component 310, the transferring component 310 is movably disposed on the rack 100, so that the transferring component 310 can perform a rotary motion among the pushing mechanism 200, the cleaning mechanism 400 and the temporary storage mechanism 500, and the transferring component 310 is configured to transfer the pushed-out material strip to the cleaning mechanism 400 and transfer the cleaned material strip to the temporary storage mechanism 500; the cleaning mechanism 400 is used for cleaning the material strips transferred to the cleaning mechanism; the material receiving mechanism 600 is arranged on one side of the temporary storage mechanism 500, which faces away from the cleaning mechanism 400, and the pushing assembly 320 is used for pushing the material strips transferred to the temporary storage mechanism 500 to the material receiving mechanism 600; the receiving mechanism 600 is used for receiving the material strips pushed to the receiving mechanism.

Specifically, the frame 100 is provided with a hood 110, and the hood 110 is used for covering the material pushing mechanism 200, the transferring mechanism 300, the cleaning mechanism 400, the temporary storage mechanism 500 and the material receiving mechanism 600 on the frame 100. The discharging box 11 is used for placing the feeding strips, and the pushing mechanism 200 can push the feeding strips in the discharging box 11 outwards. The transfer assembly 310 may be movable on the rack 100 in a variety of ways, such as, but not limited to: the plurality of linear modules perform rotary motion, or the assembly of the linear modules and the air cylinder performs rotary motion, which is not limited herein.

Further, the rotating motion of the transferring assembly 310 only needs to transfer the material strips from the discharging box 11 of the material pushing mechanism 200 to the cleaning mechanism 400 by the transferring assembly 310, and after the material strips are cleaned, the material strips are transferred from the cleaning mechanism 400 to the temporary storage mechanism 500, and then the transferring assembly 310 can reset and repeat the above steps in a circulating manner, wherein the transferring assembly 310 can transfer the material strips in various ways, for example, the material strips are clamped to move, or the material strips are adsorbed to move, and the specific method is not limited herein. The structure of the pushing assembly 320 is not limited, and only the pushing assembly 320 needs to push the material strips transferred to the temporary storage mechanism 500 to the receiving mechanism 600 when the transferring assembly 310 transfers the material strips to the temporary storage mechanism 500, the pushing assembly 320 moves synchronously along with the movement of the transferring assembly 310, the pushing step of the pushing assembly 320 reduces the transferring step of the transferring assembly 310 to the material strips, so that the steps of the transferring mechanism 300 are reduced, the transferring time of the material strips is shortened, and the transferring efficiency of the material strips is improved.

In this embodiment, the pushing assembly 320 includes a plurality of pushing members, the number of the pushing members may be multiple, a plurality of pushing members can push a plurality of strips on the temporary storage mechanism 500 at the same time, and the pushing members move along with the movement of the transferring assembly 310, and it is not necessary to separately set a driving member to drive the pushing members to move. In order to ensure that the pushing members can stably push the material strips, a plurality of pushing members can be arranged in a group, and one group of pushing members is used for pushing one material strip, such as but not limited to: two pushing members are in a group, or three pushing members are in a group, or five pushing members are in a group, and the like, and the pushing device can be specifically arranged according to the width of the material strip. In this embodiment, two pushing members are a set of, and two pushing members are used for pushing both sides of one end of the material strip, and then have ensured the stability of propelling movement. Of course, the pushing assembly 320 may further include an adjusting member, the adjusting member is used for adjusting a distance between adjacent pushing members, and the distance between two pushing members is adjustable by setting the adjusting member, so that the pushing assembly 320 may be applied to material strips with different widths, and the applicability of the pushing assembly 320 is improved. For example, the pushing part is connected with the transfer assembly 310 through the adjusting part, the strip-shaped through hole is formed in the adjusting part, the pushing part is detachably connected with the strip-shaped through hole through a bolt, and the distance between the pushing part and the adjacent pushing part can be adjusted by moving the position of the pushing part in the strip-shaped through hole. The pushing component can be arranged in a strip shape or in an L shape, and is not limited specifically, and only the material strip can be pushed.

According to the technical scheme, the rack 100 is provided with the pushing mechanism 200, the transferring mechanism 300, the cleaning mechanism 400, the temporary storage mechanism 500 and the receiving mechanism 600, wherein the pushing mechanism 200 is suitable for placing the discharging box 11, and the pushing mechanism 200 is used for pushing out the strips in the discharging box 11 so as to facilitate the transferring assembly 310 to transfer the pushed strips; the transfer mechanism 300 comprises a transfer component 310 and a pushing component 320 arranged on the transfer component 310, the transfer component 310 is movably arranged on the rack 100, so that the transfer component 310 can perform rotary motion among the pushing mechanism 200, the cleaning mechanism 400 and the temporary storage mechanism 500, the transfer component 310 is used for transferring the pushed-out material strips to the cleaning mechanism 400 and transferring the cleaned material strips to the temporary storage mechanism 500, and the arrangement is such that the transfer component 310 can circularly transfer the material strips; the cleaning mechanism 400 is used for cleaning the material strips transferred to the cleaning mechanism; the receiving mechanism 600 is arranged on one side of the temporary storage mechanism 500 opposite to the cleaned mechanism 400, the pushing component 320 is used for pushing the strips transferred to the temporary storage mechanism 500 to the receiving mechanism 600, the receiving mechanism 600 is used for receiving the strips pushed to the receiving mechanism, the pushing component 320 rotates with the transferring component 310 when the transferring component 310 transfers the cleaned strips to the temporary storage mechanism 500 for the first time, in the subsequent process of the rotation motion of the transferring component 310, the pushing component 320 can push the strips transferred to the temporary storage mechanism 500 to the receiving mechanism 600 at the same time when the transferring component 310 transfers the strips to the temporary storage mechanism 500, namely, the pushing component 320 can synchronously push the strips transferred at the previous time to the receiving mechanism 600 along with the movement of the transferring component 310, the transfer step of the transferring component 310 to the strips is reduced by arranging the pushing component 320, the time for transferring the material strip by the transferring component 310 is shortened, and the efficiency for transferring the material strip is further improved. Therefore, the cleaning efficiency of the material strips is improved by optimizing the structural arrangement of the plasma cleaning machine 10.

In an embodiment, the transferring assembly 310 includes a plurality of first clamping members and a plurality of second clamping members, and the distance between the first clamping members and the second clamping members is adjustable, so that the first clamping members and the second clamping members can clamp the material strip, where one first clamping member and one second clamping member can clamp one material strip, two first clamping members and two second clamping members can clamp one material strip, and of course, a plurality of first clamping members and a plurality of second clamping members can clamp one material strip, where a plurality of specific numbers are not limited, and can be specifically set as required.

Referring to fig. 4 to 6, in an embodiment, the temporary storage mechanism 500 includes a temporary storage table 510 and a plurality of first guide bars 520, the plurality of first guide bars 520 are disposed on the temporary storage table 510 and sequentially arranged at intervals along a length direction thereof, the first guide bars 520 are movably disposed on the temporary storage table 510, a plurality of first guide grooves 530 are formed on the plurality of first guide bars 520, and one of the guide grooves is used for carrying and guiding one of the material bars.

Specifically, the first guide bar 520 may be movably disposed on the temporary storage table 510 in various ways, such as but not limited to: the first conducting bar 520 is slidably disposed on the temporary storage table 510, or the first conducting bar 520 is rotatably disposed on the temporary storage table 510. Temporary storage table 510 is located movably to first gib 520, first guide way 530 can be formed by first gib 520 self, also can be formed jointly by first gib 520 and temporary storage table 510, through removing first gib 520, make the position of first guide way 530 can remove, in order to satisfy the function that the material strip shifted at different positions, in addition, lead to the material strip through setting up first guide way 530, make the transfer of material strip on temporary storage table 510 more smooth and easy, be favorable to improving the transfer efficiency of material strip.

Referring to fig. 5 and 6, in an embodiment, the plurality of first conducting bars 520 includes a plurality of first sub-conducting bars 521 and a plurality of second sub-conducting bars 522, the plurality of first sub-conducting bars 521 and the plurality of second sub-conducting bars 522 are sequentially and alternately arranged at intervals along a length direction of the temporary storage table 510, one first sub-conducting bar 521 and one second sub-conducting bar 522 are oppositely disposed and form the first guiding groove 530, and the first sub-conducting bar 521 and/or the second sub-conducting bar 522 are movably disposed on the temporary storage table 510, so that a width of the first guiding groove 530 is adjustable.

Specifically, the first sub-bar 521 and/or the second sub-bar 522 may be slidably disposed on the temporary storage table 510, or may be rotatably disposed on the temporary storage table 510, which is not limited herein. First guide way 530 is formed by first sub-conducting bar 521 and second sub-conducting bar 522 interval, and be equipped with first guide part and first bearing part on the first sub-conducting bar 521, first bearing part is used for the confession material strip to bear, first guide part is used for leading to the side of material strip, the structure of second sub-conducting bar 522 can be similar with the structure of first sub-conducting bar 521, second sub-conducting bar 522 is equipped with second guide part and second bearing part, the second guide part is to being used for leading to the other side of material strip, the second bearing part also is used for bearing the material strip. The width of the first guide groove 530 is adjustable, so that the first sub-guide bar 521 and the second sub-guide bar 522 can bear and guide strips with different widths, and the applicability of the temporary storage mechanism 500 is improved.

Referring to fig. 5 and 6, in an embodiment, the temporary storage mechanism 500 further includes a first link 540, a second link 550, and a first driving member 560, the first link 540 and the second link 550 are respectively slidably disposed on the temporary storage table 510, a plurality of first sub-guide bars 521 are sequentially disposed on the first link 540 at intervals, a plurality of second sub-guide bars 522 are sequentially disposed on the second link 550 at intervals, the first driving member 560 is disposed on the carrying table and is connected to the first link 540 and the second link 550, and the first driving member 560 is configured to drive the first link 540 and the second link 550 to slide on the temporary storage table 510, so as to adjust a distance between the first sub-guide bars 521 and the second sub-guide bars 522.

Specifically, a sliding rail and a sliding block are arranged between the first link 540 and the temporary storage table 510, and the first link 540 realizes the function of sliding on the temporary storage table 510 by the sliding block sliding on the sliding rail; a slide rail and a slide block are also arranged between the second connecting rod 550 and the temporary storage table 510, and the second connecting rod 550 can slide on the slide rail through the slide block to realize the function of sliding on the temporary storage table 510. The first driving member 560 includes a driving motor, a bidirectional screw rod, a first connecting member and a second connecting member, the driving motor is disposed on the temporary storage table 510, an output shaft of the driving motor is connected with the bidirectional screw rod, the first connecting rod 540 is connected with the bidirectional screw rod through the first connecting member in a sliding manner, the second connecting rod 550 is connected with the bidirectional screw rod through the second connecting member in a sliding manner, the driving motor drives the first connecting member and the second connecting member to be close to or away from each other through the bidirectional screw rod, so as to drive the first connecting rod 540 and the second connecting rod 550 to slide on the temporary storage table 510, thereby realizing a function of adjusting a distance between the first sub-guide bar 521 and the second sub-guide bar 522. The first driving member 560 simultaneously drives the space between the first sub-guide bars 521 and the second sub-guide bars 522, so that the adjustment efficiency is improved, and the structure of the temporary storage mechanism 500 is optimized, so that the temporary storage mechanism 500 is easy to process and assemble.

Referring to fig. 6, in an embodiment, the temporary storage mechanism 500 further includes a pushing claw 570 and a pushing claw driving member 590, the pushing claw 570 is disposed on a side of the temporary storage table 510 facing the material receiving mechanism 600, the material receiving mechanism 600 includes a first placing table 610, the first placing table 610 is used for placing a material receiving box 12, and the pushing claw driving member 590 is used for driving the pushing claw 570 to move up and down and/or horizontally, so that the pushing claw 570 can push the material strips into the material receiving box 12 completely.

Specifically, the number of the pushing claws 570 may be multiple, the pushing claws 570 are sequentially arranged on the connecting rod 580 at intervals, and the pushing claws 570 can push a plurality of material strips outside the plurality of material receiving boxes 12 into the plurality of material receiving boxes 12 at the same time, which is beneficial to improving the material receiving efficiency. In the embodiment, the pusher dog driving member 590 comprises a first air cylinder 591 and a second air cylinder 592, the connecting rod 580 is connected with a driving end of the first air cylinder 591 and a driving end of the second air cylinder 592 respectively, the first air cylinder 591 is used for driving the connecting rod 580 to move in a horizontal direction towards the receiving box 12, and the second air cylinder 592 is used for driving the connecting rod 580 to move in a height direction in an ascending and descending manner, so that the pusher dog 570 can push the bars with different heights, and further, the pusher dog 570 can push the bars into the receiving box 12 completely. Through the arrangement of the push claw 570, the material strips can be completely pushed into the material receiving box 12, the auxiliary pushing of personnel is not needed, and the reliability of the plasma cleaning machine 10 is improved.

Referring to fig. 4, 7 and 8, in an embodiment, the transferring mechanism 300 further includes an installation frame 330, a second driving member 340 and a third driving member 350, the second driving member 340 is disposed on the installation frame 330, the third driving member 350 is disposed on the second driving member 340, the transferring member 310 is disposed on the third driving member 350 and disposed toward the pushing mechanism 200, the pushing member 320 is disposed toward the material receiving mechanism 600, the second driving member 340 is configured to drive the third driving member 350 to linearly reciprocate along the direction of the pushing mechanism 200 toward the temporary storage mechanism 500, and the third driving member 350 is configured to drive the transferring member 310 and the pushing member 320 to move up and down along the height direction. It is understood that the second driving member 340 can be a linear module, and the linear module can drive the third driving member 350 to reciprocate linearly along the horizontal direction. The third driving member 350 may also be a linear module, or may also be a combination of an air cylinder, a sliding rail and a sliding block, in this embodiment, the third driving member 350 is a combination of an air cylinder, a sliding rail and a sliding block, and the linear module may be driven by the third driving member 350 to perform lifting adjustment, so as to implement the function that the transferring assembly 310 can perform a rotary motion.

In an embodiment, the cleaning mechanism 400 includes an upper cover cavity, a lower cover cavity and a cavity driving element, the lower cover cavity and the cavity driving element are disposed on the rack 100, the upper cover cavity is disposed on the cavity driving element, and the cavity driving element is configured to drive the upper cover cavity to perform lifting adjustment, so that the upper cover cavity can cover the lower cover cavity to form a vacuum cavity for cleaning the material strips. Through setting up the cavity driving piece for the upper cover cavity can reciprocate, and the cavity driving piece includes cylinder and slip table subassembly, has realized the function that the upper cover cavity reciprocated through cylinder and slip table subassembly. And, the lower cover cavity is located and can remain motionless on frame 100 to on the stuff bar shifts the lower cover cavity, the lower cover cavity remains motionless has guaranteed the stability that the stuff bar shifted to it.

It can be understood that the plasma cleaning machine 10 uses the high-voltage alternating electric field between the cathode electrode and the anode electrode generated by the radio frequency power supply to vibrate the argon gas into ions with high reaction activity or high energy, then the ions react or collide with the organic pollutants and the microparticle pollutants on the material strip to form volatile substances, and then the volatile substances are removed by the working gas and the vacuum pump, so as to achieve the purpose of cleaning the surface of the material strip.

In an embodiment, the lower cover cavity includes a cathode plate and a plurality of second guide bars disposed on the cathode plate, the cathode plate and the temporary storage table 510 are disposed at an interval, the plurality of second guide bars are disposed on the cathode plate and sequentially arranged at intervals along the length direction of the temporary storage table 510, the plurality of second guide bars are formed with a plurality of second guide grooves adapted to the plurality of first guide grooves 530, and one of the second guide grooves corresponds to one of the first guide grooves 530. It can be understood that the width of the second guide groove is matched with the width of the first guide groove 530, and in this embodiment, the width of the second guide groove is the same as the width of the first guide groove 530, so that the strips can be smoothly transferred to the temporary storage table 510 from the cathode plate, which is beneficial to improving the transfer efficiency of the strips.

Further, the second guide groove also can be formed by two second guide strips arranged at intervals relatively, and the second guide strips can also be arranged on the negative plate in a sliding mode, so that the width of the second guide groove is adjustable, the second guide groove can be matched with the material strips with different widths, the material strips with different widths can be transferred to the second guide groove, and the applicability of the cleaning mechanism 400 is further improved.

Referring to fig. 3 and 4, in an embodiment, the transfer mechanism 300 further includes a bearing assembly 360, the bearing assembly 360 includes a bearing platform and a plurality of third guide bars disposed on the bearing platform, the bearing platform is disposed between the pushing mechanism 200 and the cathode plate, the plurality of third guide bars are disposed on the bearing platform and sequentially arranged at intervals along the length direction of the cathode plate, a plurality of third guide grooves adapted to the plurality of second guide grooves are formed on the plurality of third guide bars, and one of the third guide grooves corresponds to one of the second guide grooves.

It can be understood that, the width of third guide way and the width adaptation of second guide way, in this embodiment, the width of third guide way is the same with the width of second guide way to make the strip can follow smooth and easy transfer to the negative plate on the plummer, be favorable to improving the transfer efficiency of strip.

Further, the third guide way also can be formed by two relative interval settings of third conducting bar, and the third conducting bar also can be gliding locates on the negative plate to make the width of third guide way adjustable, so set up, make the material strip that the third guide way can the different width of adaptation, so that the material strip of different width shifts to it, and then has improved the transfer efficiency of material strip.

Referring to fig. 9 to 11, in an embodiment, the material pushing mechanism 200 includes a material pushing assembly 210, the material pushing assembly 210 includes a push rod 211, a material pushing driving element 212, an elastic element 213, and a cross roller sliding table 214, the material pushing driving element 212 is disposed on the rack 100, the cross roller sliding table 214 is disposed at a driving end of the material pushing driving element 212, the push rod 211 is disposed on the cross roller sliding table 214, the elastic element 213 is connected to the cross roller guide rail and the driving end of the material pushing driving element 212, and the material pushing driving element 212 is configured to drive the push rod 211 to reciprocate toward the direction of the material discharging box 11.

Specifically, the pushing mechanism 200 further includes a second placing table 220, the second placing table 220 is disposed between the pushing assembly 210 and the washing mechanism 400, and the second placing table 220 is used for placing the output magazine 11. The elastic member 213 may be a spring having elasticity, and the spring is disposed along the moving direction of the push rod 211. The material pushing driving part 212 comprises a driving cylinder, the crossed roller sliding table 214 is arranged at a driving end of the driving cylinder, when the driving cylinder drives the crossed roller sliding table 214 to move towards the direction of the material discharging box 11, the elastic part 213 can limit the distance of the movement of the driving end of the driving cylinder so as to drive the crossed roller sliding table 214 to move towards the direction back to the material discharging box 11, so that the push rod 211 on the crossed roller sliding table 214 is prevented from impacting the material discharging box 11, and the safety of the material pushing mechanism 200 is improved.

Further, the material pushing driving element 212 further includes a driving sliding table, the driving sliding table is disposed on the rack 100, the driving cylinder is disposed on the driving sliding table, and a moving direction of the sliding platform on the driving sliding table is disposed toward the material discharging box 11. The position of the sliding platform of the driving sliding table is adjusted to achieve the purpose of adjusting the position of the driving air cylinder, so that the driving air cylinder can push out the material strips in the discharging boxes 11 at different positions, and the applicability of the material pushing mechanism 200 is further improved.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims

1. The utility model provides a plasma cleaning machine, its characterized in that includes the frame and locates pushing equipment, transfer mechanism, wiper mechanism, temporary storage mechanism and receiving agencies in the frame, wherein:

2. The plasma cleaning machine of claim 1, wherein the temporary storage mechanism comprises a temporary storage table and a plurality of first guide bars, the plurality of first guide bars are arranged on the temporary storage table and are sequentially arranged at intervals along the length direction of the temporary storage table, the first guide bars are movably arranged on the temporary storage table, a plurality of first guide grooves are formed on the plurality of first guide bars, and one of the guide grooves is used for bearing and guiding one of the material bars.

3. The plasma cleaning machine of claim 2, wherein the plurality of first conducting bars comprises a plurality of first sub-conducting bars and a plurality of second sub-conducting bars, the plurality of first sub-conducting bars and the plurality of second sub-conducting bars are sequentially and alternately arranged along the length direction of the temporary storage table at intervals, one first sub-conducting bar and one second sub-conducting bar are oppositely arranged and form the first guiding slot, and the first sub-conducting bar and/or the second sub-conducting bar are movably arranged on the temporary storage table, so that the width of the first guiding slot is adjustable.

4. The plasma cleaning machine of claim 3, wherein the temporary storage mechanism further comprises a first connecting rod, a second connecting rod and a first driving member, the first connecting rod and the second connecting rod are slidably disposed on the temporary storage table, the first sub-guide bars are sequentially disposed on the first connecting rod at intervals, the second sub-guide bars are sequentially disposed on the second connecting rod at intervals, the first driving member is disposed on the carrier and connected to the first connecting rod and the second connecting rod, and the first driving member is configured to drive the first connecting rod and the second connecting rod to slide on the temporary storage table so as to adjust a distance between the first sub-guide bars and the second sub-guide bars.

5. The plasma cleaning machine as claimed in claim 2, wherein the temporary storage mechanism further comprises a pushing claw and a pushing claw driving member, the pushing claw is disposed on a side of the temporary storage platform facing the material receiving mechanism, the material receiving mechanism comprises a first placing platform for placing a material receiving box, and the pushing claw driving member is used for driving the pushing claw to move up and down and/or horizontally, so that the pushing claw can push the material strips into the material receiving box completely.

6. The plasma cleaning machine as claimed in claim 1, wherein the transferring mechanism further includes a mounting frame, a second driving member and a third driving member, the second driving member is disposed on the mounting frame, the third driving member is disposed on the second driving member, the transferring member is disposed on the third driving member and disposed toward the pushing mechanism, the pushing member is disposed toward the receiving mechanism, the second driving member is configured to drive the third driving member to reciprocate linearly along the direction of the pushing mechanism toward the temporary storage mechanism, and the third driving member is configured to drive the transferring member and the pushing member to move up and down along the height direction.

7. The plasma cleaning machine of claim 2, wherein the cleaning mechanism comprises an upper cover chamber, a lower cover chamber and a chamber driving member, the lower cover chamber and the chamber driving member are disposed on the frame, the upper cover chamber is disposed on the chamber driving member, and the chamber driving member is used for driving the upper cover chamber to perform lifting adjustment, so that the upper cover chamber can cover the lower cover chamber to form a vacuum chamber for cleaning the material strip.

8. The plasma cleaning machine as claimed in claim 7, wherein the lower cover chamber includes a cathode plate and a plurality of second guide bars disposed on the cathode plate, the cathode plate is disposed at an interval with the temporary storage table, the plurality of second guide bars are disposed on the cathode plate and sequentially arranged at an interval along a length direction of the temporary storage table, the plurality of second guide bars are formed with a plurality of second guide grooves adapted to the plurality of first guide grooves, and one of the second guide grooves is disposed corresponding to one of the first guide grooves.

9. The plasma cleaning machine of claim 8, wherein the transfer mechanism further comprises a bearing assembly, the bearing assembly comprises a bearing table and a plurality of third guide bars arranged on the bearing table, the bearing table is arranged between the pushing mechanism and the cathode plate, the plurality of third guide bars are arranged on the bearing table and are sequentially arranged at intervals along the length direction of the cathode plate, a plurality of third guide grooves matched with the plurality of second guide grooves are formed on the plurality of third guide bars, and one third guide groove is arranged corresponding to one second guide groove.

10. The plasma cleaning machine of claim 1, wherein the material pushing mechanism comprises a material pushing assembly, the material pushing assembly comprises a push rod, a material pushing driving member, an elastic member and a crossed roller sliding table, the material pushing driving member is arranged on the machine frame, the crossed roller sliding table is arranged at the driving end of the material pushing driving member, the push rod is arranged on the crossed roller sliding table, the elastic member is connected with the crossed roller guide rail and the driving end of the material pushing driving member, and the material pushing driving member is used for driving the push rod to move back and forth towards the direction of the material discharging box.