CN114369797A - Film coating machine - Google Patents
Film coating machine Download PDFInfo
- Publication number
- CN114369797A CN114369797A CN202210042681.2A CN202210042681A CN114369797A CN 114369797 A CN114369797 A CN 114369797A CN 202210042681 A CN202210042681 A CN 202210042681A CN 114369797 A CN114369797 A CN 114369797A
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- China
- Prior art keywords
- cylinder
- face
- placing table
- workpiece placing
- fixedly connected
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Abstract
The invention discloses a film coating machine which comprises heating equipment, wherein the heating equipment comprises a vacuum film coating box, a housing is arranged in the vacuum film coating box, and a plurality of heating devices are arranged in the housing; a workpiece placing table is arranged right below the housing, a far infrared heater is fixedly arranged at the bottom of the workpiece placing table, a first positioning support, a second positioning support and a third positioning support are sequentially sleeved on the far infrared heater from left to right, the second positioning support is positioned in the middle of the workpiece placing table, a first air cylinder is arranged right below the second positioning support, a connecting disc is fixedly arranged at the upper end of a piston rod of the first air cylinder, and the connecting disc is detachably connected with the bottom of the second positioning support; the bottom of the first cylinder is fixedly provided with a rectangular base, and the lower end face of the rectangular base is fixedly connected with the inner bottom face of the vacuum coating box. Above-mentioned technical scheme, structural design is reasonable, convenient operation, heating are effectual, work efficiency is high and the practicality is good.
Description
Technical Field
The invention relates to the technical field of coating equipment, in particular to a coating machine.
Background
Vacuum coating machines mainly refer to a type of coating that needs to be performed under a higher vacuum degree, and include vacuum resistance heating evaporation, electron gun heating evaporation and the like. The evaporation coating is generally to heat a target material to evaporate surface components in the form of atomic groups or ions, and deposit the surface components on a substrate to form a thin film through a film forming process (scattering-island structure-labyrinth structure-layer growth). Therefore, the heating equipment is an indispensable component of the vacuum coating machine.
Traditional vacuum coating machine firing equipment's heating pipe generally sets up at the top of organism, and it can only heat the top surface of target when heating, and when needs heat top surface and bottom surface two sides, can only shut down and open the organism chamber door, overturns the target, makes the target bottom surface heat up again, and this kind of structure setting has reduced work efficiency at to a great extent, and the practicality is poor, is unfavorable for the rapid development of enterprise.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide the film coating machine which is reasonable in structural design, convenient to operate, good in heating effect, high in working efficiency and good in practicability.
In order to achieve the purpose, the invention provides the following technical scheme: a coating machine comprises heating equipment, wherein the heating equipment comprises a vacuum coating box, a housing is arranged in the vacuum coating box, and a plurality of heating devices are arranged in the housing; a rotating shaft is fixedly arranged at the upper end of the housing, a vertical through hole is formed in the position, right above the rotating shaft, of the vacuum coating box, the upper end of the rotating shaft penetrates through the vertical through hole, and a first bevel gear is fixedly arranged at the upper port section, exposed out of the vertical through hole, of the rotating shaft; a motor is fixedly arranged at the top of the vacuum coating box, a main shaft of the motor is fixedly provided with a second bevel gear, and the second bevel gear is in meshing transmission connection with the first bevel gear; a workpiece placing table is arranged right below the housing, a far infrared heater is fixedly arranged at the bottom of the workpiece placing table, a first positioning support, a second positioning support and a third positioning support are sequentially sleeved on the far infrared heater from left to right, the upper ends of the first positioning support, the second positioning support and the third positioning support are fixedly connected with the workpiece placing table, the second positioning support is positioned in the middle of the workpiece placing table, a first air cylinder is arranged right below the second positioning support, a piston rod of the first air cylinder is arranged upwards, a connecting disc is fixedly arranged at the upper end of the piston rod of the first air cylinder, and the connecting disc is detachably connected with the bottom of the second positioning support; the bottom of the first cylinder is fixedly provided with a rectangular base, and the lower end face of the rectangular base is fixedly connected with the inner bottom face of the vacuum coating box.
The invention is further configured to: the bottom of first locating support is fixed and is provided with first stainless steel locating lever, the lower pot head of first stainless steel locating lever is equipped with first stainless steel stand pipe, the lower extreme of first stainless steel stand pipe and rectangular base's up end fixed connection.
The invention is further configured to: the bottom of the third positioning bracket is fixedly provided with a second stainless steel positioning rod, the lower end of the second stainless steel positioning rod is sleeved with a second stainless steel guide pipe, and the lower end of the second stainless steel guide pipe is fixedly connected with the upper end face of the rectangular base.
The invention is further configured to: the side of the workpiece placing table is provided with a plurality of pneumatic clamping devices.
The invention is further configured to: pneumatic clamping device includes second cylinder, crossbeam, bracing piece, pressure strip and elastic cushion, the piston rod of second cylinder sets up, crossbeam one end and the piston rod upper end fixed connection of second cylinder, the platform setting is placed towards the work piece to the crossbeam other end, and the crossbeam deviates from the tailpiece of the piston rod of second cylinder and the upper end fixed connection of bracing piece, the lower extreme of bracing piece and the up end fixed connection of pressure strip, the lower terminal surface of pressure strip and the up end fixed connection of elastic cushion, when the piston rod shrink of second cylinder, the piston rod of second cylinder drives crossbeam, bracing piece, pressure strip and elastic cushion and moves down simultaneously, and the lower terminal surface of elastic cushion compresses tightly the up end edge that the platform was placed to the work piece.
The invention is further configured to: the elastic buffer cushion is made of rubber materials, the thickness of the elastic buffer cushion is 0.5-1.5 mm, and the upper end face of the elastic buffer cushion is fixedly connected with the lower end face of the pressing plate through the nail-free glue.
The invention is further configured to: and a sealing ring is arranged in the vertical through hole, and the joint of the rotating shaft and the vertical through hole is sealed through the sealing ring.
The invention is further configured to: the housing is of an arc-shaped structure, the opening of the housing is arranged downwards, the heating devices are electric heaters, the number of the heating devices is more than 3, and the heating devices are fixedly connected with the housing through bolts.
The invention is further configured to: the vacuum coating box is characterized in that a pipe penetrating through hole is formed in the lower end of the rear end face of the vacuum coating box, gas pipes are arranged on the first cylinder and the second cylinder, one end of each gas pipe penetrates through the pipe penetrating through hole, and a sealing piece is arranged between each gas pipe and the corresponding pipe penetrating through hole.
The invention is further configured to: the workpiece placing table is of a circular structure or a rectangular structure, when the workpiece placing table is of a rectangular structure, at least one pneumatic clamping device is arranged on the front side, the rear side, the left side and the right side of the workpiece placing table, and the second cylinder of each pneumatic clamping device is fixedly connected with the aligned side face through a bolt.
The invention has the advantages that: compared with the prior art, the heating device has the advantages that the structural arrangement is more reasonable, the spindle of the motor drives the second bevel gear to rotate, the second bevel gear drives the first bevel gear to rotate, and the rotating shaft, the housing and the heating device are linked with the first bevel gear, so that the target material is uniformly heated, and the heating effect is good; in addition, the far infrared heater is fixedly arranged at the bottom of the workpiece placing table, so that the bottom surface of the target can be heated uniformly, the heating efficiency is improved, the target does not need to be turned over, and the workload is reduced; the workpiece placing table realizes the up-and-down position adjustment through the extension and retraction of a piston rod of the first air cylinder; the pneumatic clamping device can quickly clamp or loosen the target material, is convenient to operate, saves time and labor and has good practicability.
The invention is further described with reference to the drawings and the specific embodiments in the following description.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
fig. 2 is an enlarged schematic view of a portion I in fig. 1.
Detailed Description
In the description of the present embodiment, it should be noted that, as the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. appear, their indicated orientations or positional relationships are based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" as appearing herein are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Referring to fig. 1 and 2, the film coating machine disclosed by the invention comprises heating equipment, wherein the heating equipment comprises a vacuum film coating box 1, a housing 2 is arranged in the vacuum film coating box 1, and a plurality of heating devices 3 are arranged in the housing 2; a rotating shaft 4 is fixedly arranged at the upper end of the housing 2, a vertical through hole is arranged at the position, right above the rotating shaft 4, of the vacuum coating box 1, the upper end of the rotating shaft 4 penetrates through the vertical through hole, and a first bevel gear 5 is fixedly arranged at the upper port section, exposed out of the vertical through hole, of the rotating shaft 4; a motor 6 is fixedly arranged at the top of the vacuum coating box 1, a second bevel gear 7 is fixedly arranged on a main shaft of the motor 6, and the second bevel gear 7 is in meshing transmission connection with the first bevel gear 5; a workpiece placing table 8 is arranged right below the housing 2, a far infrared heater 9 is fixedly arranged at the bottom of the workpiece placing table 8, a first positioning support 10, a second positioning support 11 and a third positioning support 12 are sequentially sleeved on the far infrared heater 9 from left to right, the upper ends of the first positioning support 10, the second positioning support 11 and the third positioning support 12 are fixedly connected with the workpiece placing table 8, the second positioning support 11 is positioned in the middle of the workpiece placing table 8, a first air cylinder 13 is arranged right below the second positioning support 11, a piston rod of the first air cylinder 13 is arranged upward, a connecting disc 14 is fixedly arranged at the upper end of the piston rod of the first air cylinder 13, and the connecting disc 14 is detachably connected with the bottom of the second positioning support 11; the bottom of the first cylinder 13 is fixedly provided with a rectangular base 15, and the lower end face of the rectangular base 15 is fixedly connected with the inner bottom face of the vacuum coating box 1.
Preferably, the workpiece placing table 8, the first positioning bracket 10, the second positioning bracket 11, the third positioning bracket 12 and the rectangular base 15 are all made of stainless steel materials, the first positioning bracket 10, the second positioning bracket 11 and the third positioning bracket 12 are all in a U-shaped structure, and the upper ends of the first positioning bracket 10, the second positioning bracket 11 and the third positioning bracket 12 and the upper end of the workpiece placing table 8 are fixed to the front end face and the rear end face of the workpiece placing table 8 through bolts or through welding. The lower end face of the rectangular base 15 is fixedly connected with the inner bottom face of the vacuum coating box 1 through bolts or fixedly welded; the connecting disc 14 is made of stainless steel materials, the upper end of a piston rod of the first cylinder 13 is fixedly connected with the connecting disc 14 through bolts or welded, and the bottom of the first cylinder 13 is fixedly connected with the upper end face of the rectangular base 15 through bolts or welded.
The motor 6 is fixedly connected with the upper end face of the vacuum coating box 1 through the existing motor bracket and bolts.
In order to make the structure of the present invention more reasonable, preferably, in this embodiment, a first stainless steel positioning rod 16 is fixedly disposed at the bottom of the first positioning bracket 10, a first stainless steel guide tube 17 is sleeved at a lower end of the first stainless steel positioning rod 16, and a lower end of the first stainless steel guide tube 17 is fixedly connected to an upper end surface of the rectangular base 15.
Preferably, the middle-lower section of the first stainless steel positioning rod 16 extends into the first stainless steel guide tube 17, the lower end of the first stainless steel guide tube 17 is welded and fixed with the upper end face of the rectangular base 15, and the first stainless steel guide tube 17 is perpendicular to the upper end face of the rectangular base 15.
A second stainless steel positioning rod 18 is fixedly arranged at the bottom of the third positioning bracket 12, a second stainless steel guide tube 19 is sleeved at the lower end of the second stainless steel positioning rod 18, and the lower end of the second stainless steel guide tube 19 is fixedly connected with the upper end face of the rectangular base 15.
Preferably, the middle-lower section of the second stainless steel positioning rod 18 extends into the second stainless steel guide tube 19, the lower end of the second stainless steel guide tube 19 is welded and fixed with the upper end face of the rectangular base 15, and the second stainless steel guide tube 19 is perpendicular to the upper end face of the rectangular base 15.
The side of the workpiece placing table 8 is provided with a plurality of pneumatic clamping devices 20.
Preferably, the pneumatic clamping device 20 includes a second cylinder 201, a cross beam 202, a support rod 203, a pressing plate 204 and an elastic cushion pad 205, a piston rod of the second cylinder 201 is disposed upward, one end of the cross beam 202 is fixedly connected to the upper end of the piston rod of the second cylinder 201, the other end of the cross beam 202 is disposed toward the workpiece placing table 8, a rod end of the cross beam 202 away from the second cylinder 201 is fixedly connected to an upper end of the support rod 203, a lower end of the support rod 203 is fixedly connected to an upper end surface of the pressing plate 204, a lower end surface of the pressing plate 204 is fixedly connected to an upper end surface of the elastic cushion pad 205, when the piston rod of the second cylinder 201 contracts, the piston rod of the second cylinder 201 drives the cross beam 202, the support rod 203, the pressing plate 204 and the elastic cushion pad 205 to move downward at the same time, and the lower end surface of the elastic cushion pad 205 presses an edge of the upper end surface of the workpiece placing table 8. Here, it should be noted that: the upper end surface of the workpiece placing table 8 is used for placing an existing target, and when a target is placed on the upper end surface of the workpiece placing table 8, the pressing plate 204 and the elastic cushion pad 205 press the edge of the target.
The elastic buffer pad 205 is made of rubber materials, the thickness of the elastic buffer pad 205 is 0.5-1.5 mm, and the upper end face of the elastic buffer pad 205 and the lower end face of the pressing plate 204 are fixedly connected through nail-free glue.
And a sealing ring 21 is arranged in the vertical through hole, and the joint of the rotating shaft 4 and the vertical through hole is sealed through the sealing ring 21.
The housing 2 is of an arc-shaped structure, the opening of the housing 2 is arranged downwards, the heating devices 3 are electric heaters, the number of the heating devices 3 is more than 3, and the heating devices 3 are fixedly connected with the housing 2 through bolts.
The rear end face lower extreme of vacuum coating case 1 is provided with the poling through-hole, all be provided with the gas-supply pipe on first cylinder 13 and the second cylinder 201, gas-supply pipe one end passes the poling through-hole setting, and is provided with sealing member 22 between gas-supply pipe and the poling through-hole. Preferably, the sealing member 22 is a rubber sealing strip or a rubber sealing ring, and the sealing member 22 seals the connection between the gas pipe and the pipe through hole.
The workpiece placing table 8 is of a circular structure or a rectangular structure, when the workpiece placing table 8 is of a rectangular structure, at least one pneumatic clamping device 20 is arranged on each of the front side, the rear side, the left side and the right side of the workpiece placing table 8, and the second cylinder 201 of each pneumatic clamping device 20 is fixedly connected with the aligned side through a bolt.
In practical application, a spindle of the motor drives the second bevel gear to rotate, the second bevel gear drives the first bevel gear to rotate, and the rotating shaft, the housing and the heating device are linked with the first bevel gear, so that the target material is uniformly heated, and the heating effect is good; in addition, the far infrared heater is fixedly arranged at the bottom of the workpiece placing table, so that the bottom surface of the target can be heated uniformly, the heating efficiency is improved, the target does not need to be turned over, and the workload is reduced; the workpiece placing table realizes the up-and-down position adjustment through the extension and retraction of a piston rod of the first air cylinder; the pneumatic clamping device can quickly clamp or loosen the target material, is convenient to operate, saves time and labor and has good practicability.
The above embodiments are described in detail for the purpose of further illustrating the present invention and should not be construed as limiting the scope of the present invention, and the skilled engineer can make insubstantial modifications and variations of the present invention based on the above disclosure.
Claims (10)
1. A coating machine comprises heating equipment, wherein the heating equipment comprises a vacuum coating box (1), a housing (2) is arranged in the vacuum coating box (1), and a plurality of heating devices (3) are arranged in the housing (2); the method is characterized in that: a rotating shaft (4) is fixedly arranged at the upper end of the housing (2), a vertical through hole is formed in the position, located right above the rotating shaft (4), of the vacuum coating box (1), the upper end of the rotating shaft (4) penetrates through the vertical through hole, and a first bevel gear (5) is fixedly arranged at the upper port section, exposed out of the vertical through hole, of the rotating shaft (4); a motor (6) is fixedly arranged at the top of the vacuum coating box (1), a second bevel gear (7) is fixedly arranged on a main shaft of the motor (6), and the second bevel gear (7) is in meshing transmission connection with the first bevel gear (5); a workpiece placing table (8) is arranged right below the encloser (2), a far infrared heater (9) is fixedly arranged at the bottom of the workpiece placing table (8), a first positioning bracket (10), a second positioning bracket (11) and a third positioning bracket (12) are sequentially sleeved on the far infrared heater (9) from left to right, the upper ends of the first positioning bracket (10), the second positioning bracket (11) and the third positioning bracket (12) are fixedly connected with the workpiece placing table (8), the second positioning bracket (11) is positioned at the middle position of the workpiece placing table (8), a first air cylinder (13) is arranged right below the second positioning bracket (11), a piston rod of the first air cylinder (13) is arranged upwards, and the upper end of the piston rod of the first cylinder (13) is fixedly provided with a connecting disc (14), the connecting disc (14) is detachably connected with the bottom of the second positioning bracket (11); the bottom of the first cylinder (13) is fixedly provided with a rectangular base (15), and the lower end face of the rectangular base (15) is fixedly connected with the inner bottom face of the vacuum coating box (1).
2. A coater as defined in claim 1 wherein: the bottom of first locating support (10) is fixed and is provided with first stainless steel locating lever (16), the lower pot head of first stainless steel locating lever (16) is equipped with first stainless steel stand pipe (17), the lower extreme of first stainless steel stand pipe (17) and the up end fixed connection of rectangle base (15).
3. A coater as defined in claim 2 wherein: the bottom of the third positioning bracket (12) is fixedly provided with a second stainless steel positioning rod (18), the lower end of the second stainless steel positioning rod (18) is sleeved with a second stainless steel guide pipe (19), and the lower end of the second stainless steel guide pipe (19) is fixedly connected with the upper end face of the rectangular base (15).
4. A coater as set forth in claim 1 or 3 wherein: the side surface of the workpiece placing table (8) is provided with a plurality of pneumatic clamping devices (20).
5. A coater as defined in claim 4 wherein: the pneumatic clamping device (20) comprises a second cylinder (201), a cross beam (202), a supporting rod (203), a pressing plate (204) and an elastic cushion pad (205), a piston rod of the second cylinder (201) is arranged upwards, one end of the cross beam (202) is fixedly connected with the upper end of the piston rod of the second cylinder (201), the other end of the cross beam (202) is arranged towards a workpiece placing table (8), the end of the cross beam (202) departing from the piston rod of the second cylinder (201) is fixedly connected with the upper end of the supporting rod (203), the lower end of the supporting rod (203) is fixedly connected with the upper end face of the pressing plate (204), the lower end face of the pressing plate (204) is fixedly connected with the upper end face of the elastic cushion pad (205), when the piston rod of the second cylinder (201) contracts, the piston rod of the second cylinder (201) drives the cross beam (202), the supporting rod (203), the pressing plate (204) and the elastic cushion pad (205) to move downwards simultaneously, the lower end face of the elastic buffer cushion (205) presses the edge of the upper end face of the workpiece placing table (8).
6. A coater as defined in claim 5 wherein: the elastic buffer cushion (205) is made of rubber materials, the thickness of the elastic buffer cushion (205) is 0.5-1.5 mm, and the upper end face of the elastic buffer cushion (205) is fixedly connected with the lower end face of the pressing plate (204) through nail-free glue.
7. A coater as defined in claim 1 wherein: and a sealing ring (21) is arranged in the vertical through hole, and the joint of the rotating shaft (4) and the vertical through hole is sealed through the sealing ring (21).
8. A coater as defined in claim 1 wherein: the heating device is characterized in that the housing (2) is of an arc-shaped structure, the opening of the housing (2) is arranged downwards, the heating devices (3) are electric heaters, the number of the heating devices (3) is more than 3, and the heating devices (3) are fixedly connected with the housing (2) through bolts.
9. A coater as defined in claim 5 wherein: the rear end face lower extreme of vacuum coating case (1) is provided with the poling through-hole, all be provided with the gas-supply pipe on first cylinder (13) and second cylinder (201), gas-supply pipe one end passes the poling through-hole setting, and is provided with sealing member (22) between gas-supply pipe and the poling through-hole.
10. A coater as defined in claim 4 wherein: the workpiece placing table (8) is of a circular structure or a rectangular structure, when the workpiece placing table (8) is of the rectangular structure, at least one pneumatic clamping device (20) is arranged on the front side, the rear side, the left side and the right side of the workpiece placing table (8), and the second cylinder (201) of each pneumatic clamping device (20) is fixedly connected with the aligned side face through bolts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210042681.2A CN114369797A (en) | 2022-01-14 | 2022-01-14 | Film coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210042681.2A CN114369797A (en) | 2022-01-14 | 2022-01-14 | Film coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114369797A true CN114369797A (en) | 2022-04-19 |
Family
ID=81143383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210042681.2A Pending CN114369797A (en) | 2022-01-14 | 2022-01-14 | Film coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114369797A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019114237A1 (en) * | 2017-12-15 | 2019-06-20 | 北京创昱科技有限公司 | Cooling member and vacuum coating device |
| CN210856320U (en) * | 2019-11-18 | 2020-06-26 | 昆山英利悦电子有限公司 | Vacuum coating machine heating equipment and vacuum coating machine |
| CN111349893A (en) * | 2020-04-20 | 2020-06-30 | 胡均松 | Vacuum coating equipment capable of being dried quickly |
| CN213113494U (en) * | 2020-09-21 | 2021-05-04 | 青岛松辉光电有限公司 | Large-size lens machining tool clamp for optical coating machine |
| CN112813402A (en) * | 2021-03-29 | 2021-05-18 | 永益集团股份有限公司 | Improved generation vacuum coating machine |
-
2022
- 2022-01-14 CN CN202210042681.2A patent/CN114369797A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019114237A1 (en) * | 2017-12-15 | 2019-06-20 | 北京创昱科技有限公司 | Cooling member and vacuum coating device |
| CN210856320U (en) * | 2019-11-18 | 2020-06-26 | 昆山英利悦电子有限公司 | Vacuum coating machine heating equipment and vacuum coating machine |
| CN111349893A (en) * | 2020-04-20 | 2020-06-30 | 胡均松 | Vacuum coating equipment capable of being dried quickly |
| CN213113494U (en) * | 2020-09-21 | 2021-05-04 | 青岛松辉光电有限公司 | Large-size lens machining tool clamp for optical coating machine |
| CN112813402A (en) * | 2021-03-29 | 2021-05-18 | 永益集团股份有限公司 | Improved generation vacuum coating machine |
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