A kind of continuous organic material evaporating-plating equipment in 24 sources
Technical field
The utility model belongs to multi-source organic material evaporated device technical field, and more particularly a kind of 24 sources are continuously organic
Material evaporating-plating equipment.
Background technique
Enterprise is when prepared by the scientific research and small lot for carrying out film new material in one's power for present colleges, Research Center, using vacuum
Coating system realizes the growth of multiclass thin-film material, mainly there is metal evaporation, organic vapor deposition equipment.Organic vapor deposition equipment is main
For the best equipment of organic electroluminescent, illuminating device, solar battery and semiconductor technology research, work efficiency is high, tool
There is the effect got twice the result with half the effort;But existing organic material evaporated device has the disadvantage that (1) same during use
Under evaporating temperature, the vapour pressure of each element is different in alloy, therefore evaporation rate is also different, can generate fractionation phenomenon, often
Less than the alloy or compound film of desired proportional components;(2) when the alloy or change that two or more element composition is deposited
When closing raw material, the film with raw material identical component may not can be obtained;(3) when the alloy for preparing predetermined ingredient with vapour deposition method or
When compound film, evaporation source need to be improved, such as using moment vapour deposition method and double evaporation sources, small organic molecule is after evaporation
It is easy to gather the local non-uniform phenomenon of generation on vacuum cabin head substrate.
Utility model content
In order to overcome above-mentioned technical problem, the purpose of this utility model is to provide a kind of continuous organic materials in 24 sources to steam
Plating equipment, is realized by using 24 organic vapor deposition sources to upper substrate material alloys plated film, can uniformly be received from difference
Vapor deposition molybdenum boat evaporates the molecule or atom to come up, and vapor deposition is adjusted by the thickness changing trend of organic film and uniformity
The heating temperature of molybdenum boat and heating time, to obtain the organic film plating of target component, thickness.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of continuous organic material evaporating-plating equipment in 24 sources, including device framework, the upper end of the device framework are equipped with very
Empty cabin and touch control computer, and touch control computer is located at vacuum chamber one side edge position, the front end of the device framework is equipped with molecule
Pump controller, the vacuum chamber two sides are symmetrically installed with molecular pump, and the inner bottom of the vacuum chamber is equipped with baffle and electrode,
The electrode is located at the bottom end two sides of baffle, and evaporation source selecting hole, the bottom end interposition of the baffle are offered on the baffle
It sets and is connected with No.1 motor, and No.1 motor is located in device framework, is equipped with upper substrate right above the baffle, through true
Empty cabin top left side position is connected with film thickness gauge probe, and film thickness gauge probe stretches to upper substrate surface, runs through the vacuum chamber
Top right side position is equipped with vacuum gauge, gate valve is equipped on the molecular pump, gate valve described in two groups is about vacuum chamber pair
Claim setting;
Movable rear door is installed on the vacuum chamber rear end, is movably installed with front door on the vacuum chamber front end, institute
Stating vacuum chamber bosom position distribution has evaporation source, and the vacuum chamber side offers spare interface.
As a further solution of the present invention: No. two motors are installed right above the vacuum chamber, described No. two
Motor is connected with shaft coupling, magnetic fluid in turn from top to bottom and is connected with heating plate through vacuum chamber top center position, institute
It states upper substrate and is rotated by No. two motors with heating plate is closed.
As a further solution of the present invention: O-ring and clip are installed on the upper end inner wall of the vacuum chamber, and
Electrode and vacuum gauge pass through to be tightly connected at the top of O-ring and clip and vacuum chamber.
As a further solution of the present invention: the back of institute's device framework is equipped with film thickness gauge controller, and film thickness
Instrument probe is electrically connected with film thickness gauge controller, the output end and film thickness gauge controller, vacuum gauge, molecular pump of the touch control computer
Controller and vacuum chamber are electrically connected.
As a further solution of the present invention: being equipped with lower substrate immediately below the baffle, it is arranged on lower substrate
There are 24 groups of vapor deposition molybdenum boats, and is placed with material to be deposited on 24 groups of vapor deposition molybdenum boats, the bottom end of the baffle is equipped with lower heating plate,
And baffle and lower heating plate are connected by the bottom of electrode and vacuum chamber.
As a further solution of the present invention: high vacuum unit is installed in the vacuum chamber, the upper substrate
Upper end is equipped with heating plate.
As a further solution of the present invention: running through the inside of the molecular pump and being provided with close to vacuum chamber side
Vacuum line, the gate valve and vacuum line cooperate.
The utility model has the beneficial effects that
1, it realizes by using 24 continuous organic material evaporation sources to baseplate material alloy coating, can effectively avoid
Small organic molecule is easy the upper substrate at the top of vacuum chamber after evaporation and gathers the local non-uniform phenomenon of generation, and upper substrate is at No. two
Cooperate target head to carry out uniform rotation under the action of motor, while film thickness gauge being installed through vacuum chamber top left side and pops one's head in and protrudes into
To upper substrate surface, upper substrate Thickness Variation and uniformity can be detected in real time, it is ensured that coating quality.
2, by offering evaporation source selecting hole on baffle, can be good at treating point generated after evaporation material is heated
Son or atom are selected, to obtain the film with raw material identical component.
3, molecular pump is cooperated to vacuumize vacuum chamber by high vacuum unit, and vacuum gauge can be to true in vacuum chamber
Reciprocal of duty cycle is detected, it is ensured that the vacuum state of vacuum chamber, so that vacuum chamber each alloying element under evaporating temperature of the same race
Vapour pressure is consistent, and avoids evaporation rate different, causes to generate fractionation phenomenon.
Detailed description of the invention
The utility model will be further described below with reference to the accompanying drawings.
Fig. 1 is a kind of overall structure diagram of the continuous organic material evaporating-plating equipment in 24 sources of the utility model.
Fig. 2 is the schematic diagram of internal structure of vacuum chamber in a kind of continuous organic material evaporating-plating equipment in 24 sources of the utility model.
1 in figure, No.1 motor;2, electrode;3, baffle;4, evaporation source selecting hole;5, upper substrate;6, film thickness gauge is popped one's head in;7,
No. two motors;8, vacuum gauge;9, gate valve;10, molecular pump;11, touch control computer;12, molecule pump controller;13, rear door;
14, spare interface;15, evaporation source;16, vacuum chamber;17, front door;18, upper heating plate;19, lower substrate;20, lower heating plate;
21, device framework.
Specific embodiment
Below in conjunction with the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear, complete
Site preparation description, it is clear that the described embodiments are only a part of the embodiments of the utility model, instead of all the embodiments.
Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
All other embodiment, fall within the protection scope of the utility model.
As shown in Figs. 1-2, the continuous organic material evaporating-plating equipment in a kind of 24 sources, including device framework 21, the device framework
21 upper end is equipped with vacuum chamber 16 and touch control computer 11, and touch control computer 11 is located at 16 one side edge position of vacuum chamber, described
The front end of device framework 21 is equipped with molecule pump controller 12, and 16 two sides of vacuum chamber are symmetrically installed with molecular pump 10, described
The inner bottom of vacuum chamber 16 is equipped with baffle 3 and electrode 2, and the electrode 2 is located at the bottom end two sides of baffle 3, on the baffle 3
Offer evaporation source selecting hole 4, the bottom end middle position of the baffle 3 is connected with No.1 motor 1, and No.1 motor 1 is located at and sets
In standby frame 21, the surface of the baffle 3 is equipped with upper substrate 5, is connected with film thickness through 16 top left side position of vacuum chamber
Instrument probe 6, and film thickness gauge probe 6 stretches to 5 surface of upper substrate, is equipped with vacuum through the 16 top right side position of vacuum chamber
8 are advised, gate valve 9 is installed on the molecular pump 10, gate valve 9 described in two groups is symmetrical arranged about vacuum chamber 16;
Movable rear door 13 is installed on 16 rear end of vacuum chamber, is movably installed with front deck on 16 front end of vacuum chamber
Door 17, the 16 bosom position distribution of vacuum chamber has evaporation source 15, and 16 side of vacuum chamber offers spare interface 14.
The surface of the vacuum chamber 16 is equipped with No. two motors 7, and No. two motors 7 are connected with connection in turn from top to bottom
Axis device, magnetic fluid are simultaneously connected with heating plate 18 through 16 top center position of vacuum chamber, and the upper substrate 5 passes through No. two motors
7 rotate with heating plate 18 is closed.
O-ring and clip are installed, and electrode 2 and vacuum gauge 8 pass through O-ring on the upper end inner wall of the vacuum chamber 16
And it is tightly connected at the top of clip and vacuum chamber 16.
The back of institute's device framework 21 is equipped with film thickness gauge controller, and film thickness gauge probe 6 and film thickness gauge controller are electrical
Connection, output end and film thickness gauge controller, 16 electricity of vacuum gauge 8, molecule pump controller 12 and vacuum chamber of the touch control computer 11
Property connection.
The underface of the baffle 3 is equipped with lower substrate 19, and 24 groups of vapor deposition molybdenum boats, and 24 groups of steamings are provided on lower substrate 19
It is placed with material to be deposited on plating molybdenum boat, the bottom end of the baffle 3 is equipped with lower heating plate 20, and baffle 3 and lower heating plate 20
It is connect by electrode 2 with the bottom of vacuum chamber 16.
High vacuum unit is installed, the upper end of the upper substrate 5 is equipped with heating plate 18 in the vacuum chamber 16.
Through the molecular pump 10 inside and 16 side of vacuum chamber is provided with vacuum line, the gate valve 9 with
Vacuum line cooperation.
The continuous organic material evaporating-plating equipment in a kind of 24 sources, at work, firstly, upper substrate and lower substrate are respectively placed in
In upper heating plate and lower heating plate in vacuum chamber, material to be deposited is placed respectively on 24 groups of vapor deposition molybdenum boats of lower substrate,
It is secondary, front door and rear door are closed and fastened, equipment is operated by touch control computer, in the effect of molecule pump controller
Under, powering on, starting high vacuum unit vacuumizes vacuum chamber, when vacuum reaches target value 10-2Pa or less, upper heating
Plate heats upper substrate, and lower heating plate carries out program heating to vapor deposition molybdenum boat, and the material to be deposited of lower substrate is after heated to divide
The evaporation source selecting hole gasification evolution that the form of son or atom is equipped with from baffle, the steam for forming plating material are flowed into upper substrate table
Face, continuous forming core diffusion sublimates to form solid film, and during film forming, No. two motors drive upper substrate under certain speed
Rotation evaporates the molecules or atom that come up from different vapor deposition molybdenum boats for uniformly receiving, and wherein front door and rear door are set
It sets and is installed convenient for the pick-and-place sample of organic source and disassembly in evaporation molybdenum boat, vacuum chamber can be good at vacuum ring needed for providing experiment
Border, electrode and vacuum gauge pass through to be tightly connected at the top of O-ring and clip and vacuum chamber, to improve the leakproofness of vacuum chamber
Can, finally, passing through film thickness gauge controller by the way that film thickness gauge probe through vacuum chamber top left side and is installed on upper substrate surface
The Thickness Variation and uniformity for controlling film thickness gauge probe real-time detection upper substrate plated film, the thickness detected by film thickness gauge probe
The heating temperature of parameter adjustment vapor deposition molybdenum boat and heating time, so that the organic film plating of target component, thickness is obtained, by true
Empty cabin side offers spare interface, can be the other function spare interfaces of extension.
The utility model is realized by using 24 continuous organic material evaporation sources to baseplate material alloy coating, Neng Gouyou
Effect avoids small organic molecule from being easy the upper substrate at the top of vacuum chamber after evaporation gathering the local non-uniform phenomenon of generation, and upper base
Plate cooperates target head to carry out uniform rotation under the action of No. two motors, while being equipped with film thickness gauge spy through vacuum chamber top left side
Head simultaneously extend into upper substrate surface, can detect in real time to upper substrate Thickness Variation and uniformity, it is ensured that coating quality;It is logical
It crosses and offers evaporation source selecting hole on baffle, can be good at treating the molecule generated after evaporation material is heated or atom carries out
Selection, to obtain the film with raw material identical component;Molecular pump is cooperated to vacuumize vacuum chamber by high vacuum unit,
And vacuum gauge can detect vacuum degree in vacuum chamber, it is ensured that the vacuum state of vacuum chamber, so that vacuum chamber is same
The vapour pressure of each alloying element is consistent under kind evaporating temperature, avoids evaporation rate different, causes to generate fractionation phenomenon.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one of the utility model
In embodiment or example.In the present specification, schematic expression of the above terms be not necessarily referring to identical embodiment or
Example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more embodiment or examples
In can be combined in any suitable manner.
Above content is only to the utility model structure example and explanation, the technology people of affiliated the art
Member makes various modifications or additions to the described embodiments or is substituted in a similar manner, without departing from reality
With novel structure or beyond the scope defined by this claim, all should belong to the protection range of the utility model.