CN109536897B - 24 source continuous organic material evaporation equipment - Google Patents
24 source continuous organic material evaporation equipment Download PDFInfo
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- CN109536897B CN109536897B CN201910040797.0A CN201910040797A CN109536897B CN 109536897 B CN109536897 B CN 109536897B CN 201910040797 A CN201910040797 A CN 201910040797A CN 109536897 B CN109536897 B CN 109536897B
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- 238000001704 evaporation Methods 0.000 title claims abstract description 69
- 230000008020 evaporation Effects 0.000 title claims abstract description 68
- 239000011368 organic material Substances 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 238000010438 heat treatment Methods 0.000 claims abstract description 50
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 23
- 239000011733 molybdenum Substances 0.000 claims abstract description 23
- 239000011248 coating agent Substances 0.000 claims abstract description 10
- 238000000576 coating method Methods 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 27
- 239000000523 sample Substances 0.000 claims description 16
- 238000007740 vapor deposition Methods 0.000 claims description 13
- 238000007747 plating Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 239000011553 magnetic fluid Substances 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 230000008016 vaporization Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 description 41
- 239000000956 alloy Substances 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 9
- 239000002994 raw material Substances 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 238000005194 fractionation Methods 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000003384 small molecules Chemical class 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses 24-source continuous organic material evaporation equipment, which comprises an equipment frame, wherein a vacuum cabin and a touch computer are arranged at the upper end of the equipment frame, the touch computer is positioned at the edge position of one side of the vacuum cabin, a molecular pump controller is arranged at the front end of the equipment frame, molecular pumps are symmetrically arranged at the two sides of the vacuum cabin, a baffle plate and an electrode are arranged at the bottom end of the vacuum cabin, the electrode is positioned at the two sides of the bottom end of the baffle plate, evaporation source selection holes are formed in the baffle plate, a first motor is connected at the middle position of the bottom end of the baffle plate, the first motor is positioned in the equipment frame, and an upper substrate is arranged right above the baffle plate; the 24-source continuous organic material evaporation equipment can uniformly receive molecules or atoms evaporated from different evaporation molybdenum boats, and adjusts the heating temperature and heating time of the evaporation molybdenum boats through the thickness variation trend and uniformity of the organic film, so that the organic coating film with target components and thickness is obtained.
Description
Technical Field
The invention belongs to the technical field of multi-source organic material evaporation equipment, and particularly relates to 24-source continuous organic material evaporation equipment.
Background
When current universities, scientific research institutions and enterprises carry out scientific research and small-batch preparation of new film materials, a vacuum coating system is adopted to realize the growth of various film materials, and the vacuum coating system mainly comprises metal vapor deposition equipment and organic vapor deposition equipment. The organic vapor deposition equipment is mainly used for the optimal equipment for organic electroluminescence, lighting devices, solar cells and semiconductor process research, has high working efficiency and has the effect of twice the result with little effort; however, the existing organic material evaporation equipment has the following defects in the using process: (1) At the same evaporation temperature, the vapor pressures of the elements in the alloy are different, so that the evaporation rates are also different, a fractionation phenomenon occurs, and an alloy or a compound film with a desired proportion of components is often not obtained; (2) When an alloy or compound raw material composed of two or more elements is vapor-deposited, a thin film having the same composition as the raw material is not necessarily obtained; (3) When preparing alloy or compound film with preset components by vapor deposition, the evaporation source needs to be improved, such as instant vapor deposition and double evaporation sources, and organic small molecules are easy to accumulate on the top substrate of the vacuum cabin after evaporation to generate local non-uniformity.
Disclosure of Invention
In order to overcome the technical problems, the invention aims to provide a 24-source continuous organic material evaporation equipment, which is used for realizing alloy coating of an upper substrate material by adopting 24 organic evaporation sources, can uniformly receive molecules or atoms evaporated from different evaporation molybdenum boats, and is used for adjusting the heating temperature and heating time of the evaporation molybdenum boats through the thickness variation trend and uniformity of an organic film so as to obtain an organic coating film with target components and thickness.
The aim of the invention can be achieved by the following technical scheme:
the utility model provides a 24 continuous organic material evaporation equipment of source, includes the equipment frame, vacuum cabin and touch computer are installed to the upper end of equipment frame, and the touch computer is located vacuum cabin one side border position, molecular pump controller is installed to the front end of equipment frame, molecular pump is installed to vacuum cabin both sides symmetry, baffle and electrode are installed to the inside bottom of vacuum cabin, the electrode is located the bottom both sides of baffle, the evaporation source selection hole has been seted up on the baffle, the bottom intermediate position of baffle is connected with the motor No. one, and the motor No. one is located the equipment frame, install the upper substrate directly over the baffle, run through vacuum cabin top left side position and be connected with the film thickness appearance probe, and the film thickness appearance probe stretches into upper substrate surface, run through vacuum cabin top right side position installs the vacuum gauge, install the push-pull valve on the molecular pump, two sets of push-pull valve are about the vacuum cabin symmetry setting;
the back end of the vacuum cabin is provided with a movable back cabin door, the front end of the vacuum cabin is provided with a front cabin door in a movable mode, evaporation sources are distributed in the middle of the inner portion of the vacuum cabin, and one side of the vacuum cabin is provided with a standby interface.
As a further scheme of the invention: and a second motor is arranged right above the vacuum chamber, the second motor is sequentially connected with a coupler and magnetic fluid from top to bottom, an upper heating plate penetrates through the middle position of the top of the vacuum chamber and is connected with the upper heating plate, and the upper base plate is matched with the upper heating plate to rotate through the second motor.
As a further scheme of the invention: an O-shaped ring and a clamp are arranged on the inner wall of the upper end of the vacuum chamber, and the electrode and the vacuum gauge are connected with the top of the vacuum chamber in a sealing way through the O-shaped ring and the clamp.
As a further scheme of the invention: the back of the equipment frame is provided with a film thickness instrument controller, the film thickness instrument probe is electrically connected with the film thickness instrument controller, and the output end of the touch computer is electrically connected with the film thickness instrument controller, the vacuum gauge, the molecular pump controller and the vacuum cabin.
As a further scheme of the invention: the lower base plate is arranged right below the baffle, 24 groups of evaporation molybdenum boats are arranged on the lower base plate, materials to be evaporated are placed on the 24 groups of evaporation molybdenum boats, a lower heating plate is arranged at the bottom end of the baffle, and the baffle and the lower heating plate are connected with the bottom of the vacuum cabin through electrodes.
As a further scheme of the invention: the high vacuum unit is installed in the vacuum cabin, and an upper heating plate is installed at the upper end of the upper base plate.
As a further scheme of the invention: and a vacuum pipeline penetrates through the molecular pump and is arranged on one side close to the vacuum cabin, and the gate valve is matched with the vacuum pipeline.
As a further scheme of the invention: the specific operation steps of the evaporation equipment are as follows:
step one: respectively placing an upper substrate and a lower substrate on an upper heating plate and a lower heating plate in a vacuum cabin, and respectively placing materials to be evaporated on 24 groups of evaporation molybdenum boats of the lower substrate;
step two: closing and fastening the front cabin door and the rear cabin door, starting a high vacuum unit to vacuumize the vacuum cabin, heating the upper substrate by the upper heating plate when the vacuum is below a target value, performing program heating on the evaporation molybdenum boat by the lower heating plate, enabling the evaporation material to be evaporated of the lower substrate to escape from an evaporation source selection Kong Qihua arranged on the baffle plate in a molecular or atomic mode after being heated, forming a vapor flow of the plating material, making the vapor flow incident on the surface of the upper substrate, and simultaneously driving the upper substrate to rotate at a constant speed by the combination of the upper heating plate and the second motor;
step three: the film thickness meter probe is arranged on the surface of the upper substrate and detects the film thickness change and uniformity of the coating film of the upper substrate in real time.
The invention has the beneficial effects that:
1. through adopting 24 continuous organic material evaporation sources to realize the alloy coating film to base plate material, can effectually avoid organic micromolecule to gather at vacuum cabin top upper substrate easily after evaporating and produce local inhomogeneous phenomenon, and the upper substrate cooperates the target head to rotate at the uniform velocity under the effect of No. two motors, runs through vacuum cabin top left side simultaneously and installs the film thickness appearance probe and stretch into upper substrate surface, can detect upper substrate film thickness variation and homogeneity in real time, ensures coating film quality.
2. The baffle plate is provided with the vapor deposition source selection holes, molecules or atoms generated after the material to be vapor deposited is heated can be well selected, and thus, the film with the same components as the raw materials is obtained.
3. The vacuum cabin is vacuumized through the high vacuum unit and the molecular pump, the vacuum gauge can detect the vacuum degree in the vacuum cabin, and the vacuum state of the vacuum cabin is ensured, so that the vapor pressures of all alloy elements in the vacuum cabin are kept consistent at the same evaporation temperature, and the phenomenon of fractionation is avoided due to different evaporation rates.
Drawings
The invention is further described below with reference to the accompanying drawings.
Fig. 1 is a schematic diagram of the overall structure of a 24-source continuous organic material vapor deposition device according to the present invention.
Fig. 2 is a schematic diagram of the internal structure of a vacuum chamber in a 24-source continuous organic material evaporation device according to the present invention.
In the figure, a motor I; 2. an electrode; 3. a baffle; 4. a vapor deposition source selection hole; 5. an upper substrate; 6. a film thickness gauge probe; 7. a motor II; 8. a vacuum gauge; 9. a gate valve; 10. a molecular pump; 11. a touch control computer; 12. a molecular pump controller; 13. a rear hatch; 14. a standby interface; 15. a vapor deposition source; 16. a vacuum chamber; 17. a front hatch; 18. an upper heating plate; 19. a lower substrate; 20. a lower heating plate; 21. and a device frame.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1-2, a 24-source continuous organic material evaporation device comprises an equipment frame 21, wherein a vacuum cabin 16 and a touch computer 11 are installed at the upper end of the equipment frame 21, the touch computer 11 is located at the edge position of one side of the vacuum cabin 16, a molecular pump controller 12 is installed at the front end of the equipment frame 21, molecular pumps 10 are symmetrically installed at the two sides of the vacuum cabin 16, a baffle 3 and an electrode 2 are installed at the inner bottom end of the vacuum cabin 16, the electrode 2 is located at the two sides of the bottom end of the baffle 3, evaporation source selection holes 4 are formed in the baffle 3, a first motor 1 is connected to the middle position of the bottom end of the baffle 3, the first motor 1 is located in the equipment frame 21, an upper substrate 5 is installed right above the baffle 3, a film thickness gauge probe 6 is connected to the left side position penetrating through the top of the vacuum cabin 16, the film thickness gauge probe 6 stretches into the surface of the upper substrate 5, a vacuum gauge 8 is installed at the right side position penetrating the top of the vacuum cabin 16, a gate valve 9 is installed on the molecular pump 10, two groups of gate valves 9 are symmetrically arranged about the vacuum cabin 16;
the rear end of the vacuum cabin 16 is provided with a movable rear cabin door 13, the front end of the vacuum cabin 16 is provided with a front cabin door 17, evaporation sources 15 are distributed in the middle position inside the vacuum cabin 16, and one side of the vacuum cabin 16 is provided with a standby interface 14.
The motor No. two 7 is installed directly over the vacuum chamber 16, the motor No. two 7 is connected with a coupler and magnetic fluid from top to bottom in sequence, and an upper heating plate 18 penetrates through the middle position of the top of the vacuum chamber 16, and the upper base plate 5 is matched with the upper heating plate 18 to rotate through the motor No. two 7.
An O-shaped ring and a clamp are arranged on the inner wall of the upper end of the vacuum chamber 16, and the electrode 2 and the vacuum gauge 8 are connected with the top of the vacuum chamber 16 in a sealing way through the O-shaped ring and the clamp.
The back of the equipment frame 21 is provided with a film thickness gauge controller, the film thickness gauge probe 6 is electrically connected with the film thickness gauge controller, and the output end of the touch control computer 11 is electrically connected with the film thickness gauge controller, the vacuum gauge 8, the molecular pump controller 12 and the vacuum cabin 16.
A lower base plate 19 is arranged right below the baffle plate 3, 24 groups of evaporation molybdenum boats are arranged on the lower base plate 19, materials to be evaporated are placed on the 24 groups of evaporation molybdenum boats, a lower heating plate 20 is arranged at the bottom end of the baffle plate 3, and the baffle plate 3 and the lower heating plate 20 are connected with the bottom of the vacuum cabin 16 through electrodes 2.
A high vacuum unit is installed in the vacuum chamber 16, and an upper heating plate 18 is installed at the upper end of the upper substrate 5.
A vacuum pipeline is arranged through the interior of the molecular pump 10 and near one side of the vacuum cabin 16, and the gate valve 9 is matched with the vacuum pipeline.
The specific operation steps of the evaporation equipment are as follows:
step one: the upper base plate 5 and the lower base plate 19 are respectively placed on an upper heating plate 18 and a lower heating plate 20 in a vacuum chamber 16, and materials to be evaporated are respectively placed on 24 groups of evaporation molybdenum boats of the lower base plate 19;
step two: closing and fastening the front cabin door 17 and the rear cabin door 13, starting a high vacuum unit to vacuumize the vacuum cabin 16, heating the upper substrate 5 by the upper heating plate 18 when the vacuum is below a target value, heating the evaporation molybdenum boat by the lower heating plate 20 in a program, vaporizing and escaping the material to be evaporated of the lower substrate 19 in a molecular or atomic mode from the evaporation source selection holes 4 arranged on the baffle plate 3 after being heated, forming a vapor flow of the plating material, and making the vapor flow incident on the surface of the upper substrate 5, and simultaneously driving the upper substrate 5 to rotate at a constant speed by the cooperation of the second motor 7 and the upper heating plate 18;
step three: the film thickness gauge probe 6 is mounted on the surface of the upper substrate 5 and detects the film thickness variation and uniformity of the coating film of the upper substrate 5 in real time.
A24-source continuous organic material evaporation equipment is characterized in that when in operation, an upper substrate and a lower substrate are respectively arranged on an upper heating plate and a lower heating plate in a vacuum cabin, materials to be evaporated are respectively arranged on 24 groups of evaporation molybdenum boats of the lower substrate, a front cabin door and a rear cabin door are closed and fastened, the equipment is operated by a touch computer, a power supply is connected under the action of a molecular pump controller, a high vacuum unit is started to vacuumize the vacuum cabin, when the vacuum reaches below a target value of 10-2Pa, the upper heating plate heats the upper substrate, the lower heating plate heats the evaporation molybdenum boats in a program, the materials to be evaporated of the lower substrate are selected Kong Qihua in a molecular or atomic mode after being heated, vapor of the formed plating materials flows into the surface of the upper substrate, the vapor is continuously shaped, the vapor is diffused and sublimated to form a solid film in the film forming process, the second motor drives the upper substrate to rotate at a certain speed for uniformly receiving molecules or atoms evaporated from different evaporation molybdenum boats, wherein the arrangement of the front cabin door and the rear cabin door is convenient for the sampling, the laying and the dismounting and the mounting of organic sources in the evaporation molybdenum boats, the vacuum cabin can well provide a vacuum environment required by experiments, the electrodes and the vacuum gauges are all in sealed connection with the top of the vacuum cabin through O-shaped rings and hoops, so that the sealing performance of the vacuum cabin is improved, finally, a film thickness meter probe penetrates through the left side of the top of the vacuum cabin and is arranged on the surface of the upper substrate, the film thickness variation and the uniformity of an upper substrate film are detected in real time through the film thickness meter controller, the heating temperature and the heating time of the evaporation molybdenum boat are adjusted through the thickness parameters detected by the film thickness meter probe, so that the organic film with target components and thickness can be obtained, a standby interface is arranged on one side of the vacuum cabin, interfaces can be reserved for extending other functions.
According to the invention, the alloy coating of the substrate material is realized by adopting 24 continuous organic material evaporation sources, so that the phenomenon that organic small molecules are easy to gather on the top of the vacuum chamber to generate local non-uniformity after evaporation can be effectively avoided, the upper substrate is matched with the target head to rotate at a uniform speed under the action of the second motor, meanwhile, a film thickness meter probe is installed on the left side penetrating through the top of the vacuum chamber and stretches into the surface of the upper substrate, the film thickness variation and uniformity of the upper substrate can be detected in real time, and the coating quality is ensured; the baffle is provided with the vapor deposition source selection holes, so that molecules or atoms generated after the material to be vapor deposited is heated can be well selected, and a film with the same components as the raw materials is obtained; the vacuum cabin is vacuumized through the high vacuum unit and the molecular pump, the vacuum gauge can detect the vacuum degree in the vacuum cabin, and the vacuum state of the vacuum cabin is ensured, so that the vapor pressures of all alloy elements in the vacuum cabin are kept consistent at the same evaporation temperature, and the phenomenon of fractionation is avoided due to different evaporation rates.
In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is merely illustrative of the structures of this invention and various modifications, additions and substitutions for those skilled in the art can be made to the described embodiments without departing from the scope of the invention or from the scope of the invention as defined in the accompanying claims.
Claims (6)
1. A24 source continuous organic material evaporation equipment is characterized by comprising an equipment frame (21), wherein a vacuum cabin (16) and a touch computer (11) are arranged at the upper end of the equipment frame (21), the touch computer (11) is positioned at one side edge position of the vacuum cabin (16), a molecular pump controller (12) is arranged at the front end of the equipment frame (21), a molecular pump (10) is symmetrically arranged at two sides of the vacuum cabin (16), a baffle plate (3) and an electrode (2) are arranged at the inner bottom end of the vacuum cabin (16), the electrode (2) is positioned at two sides of the bottom end of the baffle plate (3), evaporation source selection holes (4) are formed in the baffle plate (3), a first motor (1) is connected at the middle position of the bottom end of the baffle plate (3), the first motor (1) is positioned in the equipment frame (21), an upper substrate (5) is arranged right above the baffle plate (3), a film thickness gauge probe (6) is connected at the left side position of the top of the vacuum cabin (16), the film thickness gauge (6) extends into the upper substrate (5), the vacuum cabin (8) is arranged at the top of the vacuum cabin (9), the two groups of gate valves (9) are symmetrically arranged about the vacuum cabin (16);
the rear end of the vacuum cabin (16) is provided with a movable rear cabin door (13), the front end of the vacuum cabin (16) is movably provided with a front cabin door (17), evaporation sources (15) are distributed in the middle position inside the vacuum cabin (16), and one side of the vacuum cabin (16) is provided with a standby interface (14);
a second motor (7) is arranged right above the vacuum chamber (16), the second motor (7) is sequentially connected with a coupler and magnetic fluid from top to bottom, an upper heating plate (18) penetrates through the middle position of the top of the vacuum chamber (16), and the upper substrate (5) is matched with the upper heating plate (18) to rotate through the second motor (7);
a lower base plate (19) is arranged right below the baffle plate (3), 24 groups of evaporation molybdenum boats are arranged on the lower base plate (19), evaporation materials to be evaporated are placed on the 24 groups of evaporation molybdenum boats, a lower heating plate (20) is arranged at the bottom end of the baffle plate (3), and the baffle plate (3) and the lower heating plate (20) are connected with the bottom of the vacuum cabin (16) through electrodes (2);
the upper heating plate heats the upper substrate, the lower heating plate heats the evaporation molybdenum boat in a program, the material to be evaporated of the lower substrate escapes from the evaporation source selection Kong Qihua arranged on the baffle plate in a molecular or atomic mode after being heated, the vapor forming the plating material flows into the surface of the upper substrate, the vapor is continuously nucleated, diffused and sublimated to form a solid film, and the second motor drives the upper substrate to rotate at a certain speed in the film forming process, so that the molecules or atoms evaporated from different evaporation molybdenum boats are uniformly received.
2. The 24-source continuous organic material evaporation equipment according to claim 1, wherein an O-shaped ring and a clamp are arranged on the inner wall of the upper end of the vacuum chamber (16), and the electrode (2) and the vacuum gauge (8) are connected with the top of the vacuum chamber (16) in a sealing manner through the O-shaped ring and the clamp.
3. The 24-source continuous organic material evaporation equipment according to claim 1, wherein a film thickness gauge controller is installed on the back of the equipment frame (21), the film thickness gauge probe (6) is electrically connected with the film thickness gauge controller, and the output end of the touch control computer (11) is electrically connected with the film thickness gauge controller, the vacuum gauge (8), the molecular pump controller (12) and the vacuum chamber (16).
4. The 24-source continuous organic material evaporation equipment according to claim 1, wherein a high vacuum unit is installed in the vacuum chamber (16), and an upper heating plate (18) is installed at the upper end of the upper substrate (5).
5. A 24-source continuous organic material evaporation equipment according to claim 1, wherein a vacuum pipeline is arranged through the interior of the molecular pump (10) and near one side of the vacuum chamber (16), and the gate valve (9) is matched with the vacuum pipeline.
6. The 24-source continuous organic material evaporation equipment according to claim 1, wherein the specific operation steps of the evaporation equipment are as follows:
step one: an upper heating plate (18) and a lower heating plate (19) which are respectively arranged in the vacuum chamber (16) are respectively arranged on the upper substrate (5) and the lower substrate (19)
On the hot plate (20), the materials to be evaporated are respectively placed on 24 groups of evaporation molybdenum boats of the lower substrate (19);
step two: closing and fastening the front cabin door (17) and the rear cabin door (13), starting a high-vacuum unit to vacuumize the vacuum cabin (16), heating the upper substrate (5) by the upper heating plate (18) when the vacuum is below a target value, heating the vapor deposition molybdenum boat by the lower heating plate (20), vaporizing and escaping the vapor deposition material to be vapor deposited of the lower substrate (19) in a molecular or atomic mode from the vapor deposition source selection holes (4) arranged on the baffle plate (3) after being heated, forming vapor flow of the plating material, making the vapor flow of the plating material incident on the surface of the upper substrate (5), and simultaneously driving the upper substrate (5) to rotate at a uniform speed by the cooperation of the upper heating plate (18) by the second motor (7);
step three: the film thickness meter probe (6) is arranged on the surface of the upper substrate (5) and detects the film thickness change and uniformity of the coating film of the upper substrate (5) in real time.
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