CN209602631U - Improve the sputtering coating equipment of blanking velocity - Google Patents
Improve the sputtering coating equipment of blanking velocity Download PDFInfo
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- CN209602631U CN209602631U CN201822184311.4U CN201822184311U CN209602631U CN 209602631 U CN209602631 U CN 209602631U CN 201822184311 U CN201822184311 U CN 201822184311U CN 209602631 U CN209602631 U CN 209602631U
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- fixedly connected
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- connecting rod
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- bar
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Abstract
The utility model discloses a kind of sputtering coating equipments for improving blanking velocity, belong to sputter coating field, it includes the auxiliary shell of the main casing and the semi-cylindrical for being rotationally connected with main casing side of semi-cylindrical, auxiliary shell can fasten and form cylindrical seal casinghousing on main casing, center stand column is fixedly connected in main casing, chassis is rotatably connected in center stand column, more connecting rods are rotatably connected on chassis, every connecting rod offers multiple holding tanks, is fixedly connected to electromagnet in each holding tank；It is arranged in every connecting rod multiple with ferromagnetic lantern ring, it is changed in each set and is fixedly connected at least one pendant bar, each pendant bar is rotatably connected to lever, pendant bar is fixedly connected with torsional spring, the torsional spring other end is fixedly connected on lever, for lever towards main casing top, the utility model has facilitates staff's blanking to torsional spring under natural conditions, improves the effect of blanking efficiency.
Description
Technical field
The utility model relates to the technical fields of sputter coating, more particularly, to a kind of sputter coating for improving blanking velocity
Equipment.
Background technique
Sputter coating technology is to call splashing the phenomenon that using ion bombardment target material surface, be knocked off the atom of target at present
It penetrates.It sputters the atomic deposition generated and is known as sputter coating in matrix surface film forming.Usually gas electricity is generated using gas discharge
From cation high velocity bombardment cathode target body under electric field action hits cathode target body atom or molecule, flies to plated matrix table
Face is deposited into film.When for hollow out metal mesh plated film, since hollow out metal mesh surface texture is more complicated with respect to plate, so
Using sputter coating technology can guarantee plated film uniformly and coating speed block.
The prior art can refer to the Chinese utility model patent that Authorization Notice No. is CN201437550U, and it discloses one kind
Magnetic-controlled sputtering coating equipment, including the plated film case for vacuumizing unit, unit is vacuumized with this connecting, the magnetron sputtering plating is set
Standby further includes the right door closure for being articulated with left-hand door lid on the left of plated film case, being articulated on the right side of plated film case, the left-hand door lid and the right side
Door closure is equipped with clamping workpiece device.The door closure closing of the magnetic-controlled sputtering coating equipment is vacuumized and magnetron sputtering
While the process of plated film, the workpiece for having completed plated film dismantle on another door closure and clamping is to be coated
Workpiece has not only had the function of the plated film of plane sputtering target but also has had rotating cylindrical sputtering target so that complete machine working efficiency greatly improves
Plated film function；Wherein clamping workpiece device has the function of composite rotating, so that coating process is more uniform, is preferably plated
Film effect.
Prior art among the above, which has the following deficiencies:, carries out plated film to hollow out metal mesh using sputtering coating equipment
When, although once plated film can be carried out to a large amount of hollow out metal meshes, staff is required in blanking and is removed one by one, under
Expect that speed is slower.
Utility model content
The purpose of the utility model is to provide a kind of sputtering coating equipments for improving blanking velocity, facilitate under staff
Material, staff can carry out blanking during rotation for chassis and connecting rod, after on chassis, rotation is turned around, staff's base
Originally all hollow out metal meshes can be removed, improves blanking efficiency.
The above-mentioned technical purpose of the utility model has the technical scheme that
A kind of sputtering coating equipment improving blanking velocity, main casing including semi-cylindrical and is rotationally connected with main casing
The auxiliary shell of the semi-cylindrical of side, auxiliary shell can fasten and form cylindrical seal casinghousing on main casing, in main casing
On be fixedly connected with vaccum-pumping equipment, center stand column is fixedly connected in main casing, bottom is rotatably connected in center stand column
Disk is rotatably connected to more connecting rods on chassis, and every connecting rod is arranged each parallel to center stand column, and every connecting rod is opened
Equipped with multiple holding tanks, electromagnet is fixedly connected in each holding tank；
Be arranged in every connecting rod it is multiple have ferromagnetic lantern ring, change and be fixedly connected at least in each set
A piece pendant bar, each pendant bar are each perpendicular to connecting rod, are rotatably connected to shelves far from connecting rod one end in each pendant bar
Bar is fixedly connected with torsional spring close to lever one end in pendant bar, and the torsional spring other end is fixedly connected on lever, torsional spring nature
Lower lever is towards main casing top.
By using above scheme, when carrying out plated film to hollow out metal mesh, hollow out metal net cover is set to by staff
On pendant bar, lever prevents hollow out metal mesh from sliding from pendant bar；After the completion of plated film, when staff carries out blanking, break
The power supply of all electromagnet is opened, lantern ring falls on connecting rod by sliding into connecting rod bottom, all hollow out metal meshes in connecting rod
Bottom, staff can once smooth out with the fingers down all hollow out metal meshes of stack up from pendant bar, and hollow out metal mesh is moving
During dynamic by lever be pushed into under pendant bar parastate after, hollow out metal mesh can be removed easily from pendant, chassis and
Staff can carry out blanking to connecting rod during rotation, and under the premise of velocity of rotation is suitable, on chassis, rotation is turned around
After, staff can remove all hollow out metal meshes, and blanking velocity is fast；Before reusing, electromagnet need to be only connected
Power supply, then lantern ring is slided at corresponding electromagnet position, make electromagnet adsorb lantern ring, can reuse.
The utility model is further arranged to: lever is obliquely installed upwards to far from pendant bar direction.
By using above scheme, make hollow out metal mesh when removing from pendant bar, it is easier to which lever is pushed into and is hung
Part bar parastate.
The utility model is further arranged to: the angle of lever and pendant bar is α, and α is 100 ° to 120 °.
By using above scheme, even if α is 100 ° to 120 ° hollow out metal meshes when removing from pendant bar, it is easier to
By lever be pushed into pendant bar parastate, so that lever is more steadily stopped hollow out metal mesh.
The utility model is further arranged to: being formed between lever and pendant bar fluted.
By using above scheme, groove can make position of the hollow out metal mesh on pendant bar relatively fixed, it is not easy to
It is subjected to displacement.
The utility model is further arranged to: the length of the pendant bar in same connecting rod is from top to bottom sequentially reduced.
By using above scheme, after lantern ring slides, the hollow out metal mesh in same connecting rod can be more neat
It is stacked, staff is facilitated to remove.
The utility model is further arranged to: chassis is fixedly connected with the driven gear concentric with chassis, and main casing is corresponding
Driven gear bottom position is fixedly connected with the central gear concentric with driven gear；Every connecting rod be rotationally connected with from
On moving gear, every connecting rod is fixedly connected to rotate gear, and each rotate gear is engaged on central gear；Driven tooth
Wheel is connected with the driving assembly of driving driven gear rotation.
By using above scheme, driven gear rotation drives chassis rotation, makes all connecting rods start to revolve, while band
All rotate gear rotations are moved, all connecting rods is made to start rotation, enables workpiece by uniform coated, improves product quality.
The utility model is further arranged to: driving assembly includes the motor for being fixedly connected on main casing, the output of motor
Axis is fixedly connected with driving gear, and driving gear is engaged on driven gear.
By using above scheme, motor drives driving gear rotation, and driving gear rotation drives driven gear rotation, knot
Structure is simple, and power source is stablized.
The utility model is further arranged to: the part that auxiliary shell is contacted with main casing is fixedly connected with silica gel strip.
By using above scheme, silica gel strip can enhance leakproofness between auxiliary shell and main casing.
In conclusion the utility model has the following beneficial effects:
1. hollow out metal net cover is set on pendant bar by staff when carrying out plated film to hollow out metal mesh, lever is anti-
Only hollow out metal mesh is slided from pendant bar；After the completion of plated film, when staff carries out blanking, the electricity of all electromagnet is disconnected
Source, for lantern ring by sliding into connecting rod bottom in connecting rod, all hollow out metal meshes fall on connecting rod bottom, and staff can be with
Once all hollow out metal meshes of stack up are smoothed out with the fingers down from pendant bar, lever is pushed by hollow out metal mesh in moving process
After under pendant bar parastate, hollow out metal mesh can be removed easily from pendant, and chassis and connecting rod are during rotation
Staff can carry out blanking, and under the premise of velocity of rotation is suitable, after on chassis, rotation is turned around, staff can be incited somebody to action
All hollow out metal meshes are removed, and blanking velocity is fast；Before reusing, the power supply of electromagnet need to be only connected, it is then that lantern ring is sliding
To corresponding electromagnet position, so that electromagnet is adsorbed lantern ring, can reuse；
2. groove can make position of the hollow out metal mesh on pendant bar relatively fixed, it is not easy to be subjected to displacement；
3. the length of the pendant bar in same connecting rod, which is from top to bottom sequentially reduced, to be made after lantern ring slides, same connection
Hollow out metal mesh on bar more neat can be stacked, and staff is facilitated to remove.
Detailed description of the invention
Fig. 1 is the overall structure diagram of embodiment one；
Fig. 2 is the schematic diagram of prominent seal casinghousing in embodiment one；
Fig. 3 is the schematic diagram of prominent main casing internal structure in embodiment one；
Fig. 4 is the schematic diagram of prominent top plate in embodiment one；
Fig. 5 is the partial schematic diagram of prominent tray bottom and driving assembly in embodiment one；
Fig. 6 is the schematic diagram of prominent connecting rod in embodiment one；
Fig. 7 is the explosive view of prominent holding tank and electromagnet in embodiment one；
Fig. 8 is the cross-sectional view of prominent pendant bar and lever in embodiment one；
Fig. 9 is the circuit diagram of prominent control circuit in embodiment one.
In figure, 1, seal casinghousing；11, main casing；111, vaccum-pumping equipment；112, center stand column；113, top plate；1131,
Annular groove；12, auxiliary shell；121, silica gel strip；2, connecting rod；21, lantern ring；211, pendant bar；2111, groove；2112, it rotates
Axis；2113, torsional spring；212, lever；22, holding tank；221, electromagnet；23, chassis；231, driven gear；232, central gear；
24, rotate gear；25, driving assembly；251, driving gear；252, motor.
Specific embodiment
Embodiment one: a kind of sputtering coating equipment improving blanking velocity, as depicted in figs. 1 and 2, including semi-cylindrical
The auxiliary shell 12 of main casing 11 and the semi-cylindrical for being rotationally connected with 11 side of main casing, auxiliary shell 12 can fasten and main casing
Cylindrical seal casinghousing 1 is formed on 11.Vaccum-pumping equipment 111 is fixedly connected on main casing 11, vaccum-pumping equipment 111 exists
To being vacuumized inside seal casinghousing 1 when main casing 11 is fastened with auxiliary shell 12.The portion that auxiliary shell 12 is contacted with main casing 11
Divide and is fixedly connected with silica gel strip 121.Silica gel strip 121 can enhance leakproofness between auxiliary shell 12 and main casing 11.
As shown in Figure 3 and Figure 4, it is fixedly connected with top plate 113 in 11 inner tip of main casing, offers ring in top plate 113
Shape slot 1131, annular groove 1131 and top plate 113 are concentric.Multiple connecting rods 2, connecting rod 2 are slidably connected in annular groove 1131
It is arranged along 1131 circumference array of annular groove.Center stand column 112, center stand column 112 and connection are fixedly connected at 113 center of top plate
Bar 2 is vertically arranged.It is connected with chassis 23 jointly in all 2 other ends of connecting rod, every connecting rod 2 is rotationally connected with chassis
On 23, chassis 23 and top plate 113 are concentric.
As shown in Figure 3 and Figure 5, chassis 23 is fixedly connected with the driven gear 231 concentric with chassis 23, and main casing 11 is corresponding
231 bottom position of driven gear is fixedly connected with the central gear 232 concentric with driven gear 231, and center stand column 112 is another
End is fixedly connected on central gear 232.Every connecting rod 2 both passes through the setting of driven gear 231, every connecting rod 2 pass through from
231 one end of moving gear is fixedly connected to rotate gear 24, and each rotate gear 24 is engaged on central gear 232.It is driven
Gear 231 is connected with driving assembly 25, and driving assembly 25 includes the motor 252 for being fixedly connected on main casing 11, motor 252 it is defeated
Shaft is fixedly connected with driving gear 251, and driving gear 251 is engaged on driven gear 231.Motor 252 drives driving gear
251 rotations, the rotation of driving gear 251 drive driven gear 231 to rotate, and the rotation of driven gear 231 drives chassis 23 to rotate, and make institute
There is connecting rod 2 to start to revolve, while all rotate gears 24 being driven to rotate, so that all connecting rods 2 is started rotation, enable workpiece
By uniform coated, product quality is improved.
As shown in Figure 6 and Figure 7, it is arranged in every connecting rod 2 multiple with ferromagnetic lantern ring 21, every connecting rod
Holding tank 22 is offered at 2 corresponding 21 positions of lantern ring, is fixedly connected to electromagnet 221 in each holding tank 22.Electromagnetism
Iron 221 generates magnetic force when obtaining electric, attract lantern ring 21, the relative position of retaining collar 21.
As shown in Figure 6 and Figure 8, it is changed in each set and is fixedly connected at least one pendant bar 211, each pendant bar
211 are each perpendicular to connecting rod 2.It is respectively connected with lever 212 far from 2 one end of connecting rod in each pendant bar 211, in pendant bar 211
It is fixedly connected with rotation axis 2112 close to 212 one end of lever, pendant bar 211 is rotationally connected in rotation axis 2112.In rotation axis
Torsional spring 2113 is fixedly connected on 2112,2113 other end of torsional spring is fixedly connected on lever 212, and torsional spring 2113 is under natural conditions
The angle of lever 212 and pendant bar 211 is α, and α is 120 °.
As shown in Figure 6 and Figure 8, fluted 2111 are formed between lever 212 and pendant bar 211.Groove 2111 can make to engrave
Position of the empty metal mesh on pendant bar 211 is relatively fixed, it is not easy to be subjected to displacement.
As shown in Figure 6 and Figure 8, the length of the pendant bar 211 in same connecting rod 2 is from top to bottom sequentially reduced, and makes lantern ring
After 21 slide, the hollow out metal mesh in same connecting rod 2 more neat can be stacked, and staff is facilitated to remove.
As shown in Fig. 1 and Fig. 9, all electromagnet 221 are respectively connected with control circuit, and control circuit includes being fixedly connected on master
The one end switch SB outside shell 11, switch SB is electrically connected with power supply VCC, and all electromagnet 221 are series at the switch SB other end, electricity
Magnet 221 is also in series with resistance R, resistance R other end ground connection.Closure switch SB, all electromagnet 221 it is electric；Disconnect switch
SB, the equal power loss of all electromagnet 221.
Usage mode: when carrying out plated film to hollow out metal mesh, hollow out metal net cover is set to pendant bar 211 by staff
On, lever 212 prevents hollow out metal mesh from sliding from pendant bar 211, fastens auxiliary shell 12, and motor 252 starts, and starts to drive institute
There is connecting rod 2 to carry out rotation and revolution, starts to carry out plated film to hollow out metal mesh.After the completion of plated film, staff opens auxiliary
Shell 12, motor 252 work on, and staff disconnects switch SB, and the equal power loss of all electromagnet 221, lantern ring 21 is along connecting rod 2
It glides, all hollow out metal meshes fall on 2 bottom of connecting rod, and are stacked, and staff can once will be same
All hollow out metal meshes of perpendicular column are smoothed out with the fingers down from pendant bar 211, and lever 212 is pushed into and is hung in moving process by hollow out metal mesh
After under 211 parastate of part bar, hollow out metal mesh can be removed easily from pendant.Chassis 23 and connecting rod 2 are in rotation process
Middle staff can carry out blanking, and under the premise of velocity of rotation is suitable, after on chassis 23, rotation is turned around, staff is
All hollow out metal meshes can be removed, blanking velocity is fast.Before reusing, closure switch SB is only needed, makes all electromagnet 221
Must be electric, then lantern ring 21 is slided at corresponding 221 position of electromagnet, so that electromagnet 221 is adsorbed lantern ring 21, can reuse.
Embodiment two: a kind of sputtering coating equipment improving blanking velocity, the difference is that, α is with embodiment one
100°。
Embodiment three: a kind of sputtering coating equipment improving blanking velocity, the difference is that, α is with embodiment one
110°。
The embodiment of present embodiment is the preferred embodiment of the utility model, and not limitation is originally practical new according to this
The protection scope of type, therefore: the equivalence changes that all structures, shape, principle according to the utility model are done should all be covered by practical
Within novel protection scope.
Claims (8)
1. a kind of sputtering coating equipment for improving blanking velocity, main casing (11) including semi-cylindrical and it is rotationally connected with main casing
The auxiliary shell (12) of the semi-cylindrical of body (11) side, auxiliary shell (12) can fasten and form cylinder on main casing (11)
Seal casinghousing (1), it is characterised in that: vaccum-pumping equipment (111) are fixedly connected on main casing (11), in main casing (11)
Center stand column (112) are fixedly connected with, chassis (23) are rotatably connected on center stand column (112), are rotated on chassis (23)
More connecting rods (2) are connected with, every connecting rod (2) is arranged each parallel to center stand column (112), and every connecting rod (2) is opened
Equipped with multiple holding tanks (22), electromagnet (221) are fixedly connected in each holding tank (22)；
Be arranged on every connecting rod (2) it is multiple have ferromagnetic lantern ring (21), change and be fixedly connected in each set
At least one pendant bar (211), each pendant bar (211) are each perpendicular to connecting rod (2), in each pendant bar (211) far from even
Extension bar (2) one end is rotatably connected to lever (212), is fixedly connected with torsional spring close to lever (212) one end in pendant bar (211)
(2113), torsional spring (2113) other end is fixedly connected on lever (212), torsional spring (2113) lever (212) court under natural conditions
To main casing (11) top.
2. the sputtering coating equipment according to claim 1 for improving blanking velocity, it is characterised in that: lever (212) Xiang Yuan
It is obliquely installed upwards from pendant bar (211) direction.
3. the sputtering coating equipment according to claim 2 for improving blanking velocity, it is characterised in that: lever (212) and extension
The angle of part bar (211) is α, and α is 100 ° to 120 °.
4. the sputtering coating equipment according to claim 1 for improving blanking velocity, it is characterised in that: lever (212) and extension
Fluted (2111) are formed between part bar (211).
5. the sputtering coating equipment according to claim 1 for improving blanking velocity, it is characterised in that: same connecting rod (2)
On the length of pendant bar (211) be from top to bottom sequentially reduced.
6. the sputtering coating equipment according to claim 1 for improving blanking velocity, it is characterised in that: chassis (23) are fixed to be connected
It is connected to the driven gear (231) concentric with chassis (23), corresponding driven gear (231) bottom position of main casing (11) is fixed to be connected
It is connected to the central gear (232) concentric with driven gear (231)；Every connecting rod (2) is rotationally connected with driven gear (231)
On, every connecting rod (2) is fixedly connected to rotate gear (24), and each rotate gear (24) is engaged in central gear
(232) on；Driven gear (231) is connected with the driving assembly (25) of driving driven gear (231) rotation.
7. the sputtering coating equipment according to claim 6 for improving blanking velocity, it is characterised in that: driving assembly (25) packet
The motor (252) for being fixedly connected on main casing (11) is included, the output shaft of motor (252) is fixedly connected with driving gear (251), main
Moving gear (251) is engaged on driven gear (231).
8. the sputtering coating equipment according to claim 1 for improving blanking velocity, it is characterised in that: auxiliary shell (12) and master
The part of shell (11) contact is fixedly connected with silica gel strip (121).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822184311.4U CN209602631U (en) | 2018-12-25 | 2018-12-25 | Improve the sputtering coating equipment of blanking velocity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822184311.4U CN209602631U (en) | 2018-12-25 | 2018-12-25 | Improve the sputtering coating equipment of blanking velocity |
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| Publication Number | Publication Date |
|---|---|
| CN209602631U true CN209602631U (en) | 2019-11-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822184311.4U Active CN209602631U (en) | 2018-12-25 | 2018-12-25 | Improve the sputtering coating equipment of blanking velocity |
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| Country | Link |
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| CN (1) | CN209602631U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111926294A (en) * | 2020-06-05 | 2020-11-13 | 温州驰诚真空机械有限公司 | High-efficiency film coating machine |
-
2018
- 2018-12-25 CN CN201822184311.4U patent/CN209602631U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111926294A (en) * | 2020-06-05 | 2020-11-13 | 温州驰诚真空机械有限公司 | High-efficiency film coating machine |
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