CN111254397A - Sputtering aluminum plating system and process for car lamp decorative ring - Google Patents
Sputtering aluminum plating system and process for car lamp decorative ring Download PDFInfo
- Publication number
- CN111254397A CN111254397A CN202010152561.9A CN202010152561A CN111254397A CN 111254397 A CN111254397 A CN 111254397A CN 202010152561 A CN202010152561 A CN 202010152561A CN 111254397 A CN111254397 A CN 111254397A
- Authority
- CN
- China
- Prior art keywords
- vacuum chamber
- aluminum
- driving
- side wall
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a car lamp decorative ring sputter aluminizing system and a car lamp decorative ring sputter aluminizing process, wherein the car lamp decorative ring sputter aluminizing system comprises a vacuum chamber and a vacuum pump, an aluminum bar is vertically arranged in the vacuum chamber, an aluminum target material is arranged in the side wall of the vacuum chamber, and a shielding device is arranged on the side wall of the vacuum chamber; one side of the vacuum chamber is communicated with a feeding pipe, a silicone oil electric valve is arranged on the feeding pipe, and one side of the feeding pipe is communicated with a heating device; one side of the vacuum chamber is communicated with an argon inlet pipe, an argon electric valve is arranged on the argon inlet pipe, and one end of the argon inlet pipe is communicated with an argon source; a mounting device is arranged in the vacuum chamber, and comprises a turntable and a first driving motor; the turntable is sleeved and fixed on an output shaft of the first driving motor; be provided with a plurality of installation axles along the circumference array on the carousel, every installation axle vertical rotation is connected in the carousel, installs in the vacuum chamber to be used for driving a plurality of installation axle pivoted drive mechanism, installs the epaxial anchor clamps that are used for fixed work piece of installing. The invention is convenient for plating the anti-oxidation film on the outer surface of the aluminum die.
Description
Technical Field
The invention relates to the technical field of sputtering coating, in particular to a car lamp decorative ring sputtering aluminum plating system and a car lamp decorative ring sputtering aluminum plating process.
Background
The sputtering technique is a technique in which ions are used to bombard the surface of a target material, and the phenomenon in which atoms of the target material are knocked out is called sputtering. The atoms generated by sputtering deposit on the surface of the substrate to form a film called sputtering coating. Usually, gas ionization is generated by gas discharge, and positive ions bombard a cathode target body at a high speed under the action of an electric field to knock out atoms or molecules of the cathode target body, and fly to the surface of a plated substrate to be deposited into a thin film.
The prior art can refer to the chinese utility model patent that the grant bulletin number is CN208577776U, it discloses a vacuum coating machine of high pressure ion bombardment, including the real empty room of coating machine, the real empty room's of coating machine one end is provided with the vacuum pump, the real empty room's of coating machine other end is provided with the heating chamber, be provided with temperature-sensing ware on the real empty room's of coating machine inner wall, be provided with first connecting tube between the real empty room of coating machine and the heating chamber, be provided with the second connecting tube between the real empty room of coating machine and the vacuum pump, be provided with the small-size motor on the first connecting tube, the one end of small-size motor is provided with the pivot, the pivot extends to the inside of first connecting tube, the. The utility model discloses a temperature-sensing ware detects the real empty room's of coating machine inside temperature to through the real empty room's of micro motor control heat preservation thermal baffle automatic control coating machine inside temperature, thereby improve the cohesion of rete, can not make the crystalline grain too big again, very big improvement vacuum coating machine's efficiency.
The above prior art solutions have the following drawbacks: in order to ensure driving safety, an aluminum film is generally required to be plated on the outer surface of the decorative ring of the car lamp (the aluminum film has a light reflecting effect), and the aluminum film can be oxidized, so that an anti-oxidation film is required to be plated on the outer surface of the aluminum film, and the equipment is inconvenient to plate the anti-oxidation film on the outer surface of the aluminum film.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a car lamp decorative ring sputtering aluminum plating system which is convenient for plating an anti-oxidation film on the outer surface of an aluminum die.
The above object of the present invention is achieved by the following technical solutions:
a car lamp decorative ring sputtering aluminizing system comprises a vacuum chamber and a vacuum pump, wherein an aluminum bar is vertically arranged in the vacuum chamber, an aluminum target material is arranged in the side wall of the vacuum chamber, and a shielding device for shielding the aluminum target material is arranged on the side wall of the vacuum chamber; one side of the vacuum chamber is communicated with a feeding pipe used for conveying silicon oil, a silicon oil electric valve is installed on the feeding pipe, and one side of the feeding pipe, which is far away from the vacuum chamber, is communicated with a heating device used for heating the silicon oil; one side of the vacuum chamber is communicated with an argon inlet pipe, an argon electric valve is arranged on the argon inlet pipe, and one end of the argon inlet pipe, which is far away from the vacuum chamber, is communicated with an argon source; the vacuum chamber is internally provided with a mounting device for mounting a workpiece, and the mounting device comprises a turntable which is horizontally and rotatably connected to the side wall of the vacuum chamber and a first driving motor which is arranged below the vacuum chamber and is used for driving the turntable to rotate; the turntable is sleeved and fixed on an output shaft of the first driving motor; the rotary table is provided with a plurality of installation shafts along the circumferential array, each installation shaft is vertically rotated and connected to the rotary table, a first driving mechanism used for driving the installation shafts to rotate is installed in the vacuum chamber, and a clamp used for fixing a workpiece is installed on the installation shaft.
By adopting the technical scheme, the workpiece is arranged on the mounting shaft through the clamp, the first driving motor drives the rotary table to rotate, the rotary table rotates to drive the workpiece to revolve, the first driving mechanism drives the mounting shaft to rotate, and the mounting shaft rotates to drive the workpiece to rotate, so that the surface of the workpiece can be cleaned and coated conveniently; introducing negative high voltage into an aluminum bar, cleaning the surface of a workpiece through glow discharge, cutting off the power of the aluminum bar after the surface of the workpiece is cleaned, and introducing the negative high voltage into an aluminum target material, so that the surface of the workpiece can be coated; after the sputtering coating is finished, introducing negative high pressure into the aluminum bar, then starting the silicone oil electric valve, introducing silicone oil steam into the vacuum chamber, and plating a silicone oil protective film on the surface of the aluminum film by utilizing glow discharge, thereby reducing the possibility of oxidation of the aluminum film.
The present invention in a preferred example may be further configured to: the first driving mechanism comprises an inner gear fixedly connected to the inner wall of the vacuum chamber and a first gear fixedly sleeved on an output shaft of the first driving motor; every the lateral wall cover of installation axle is established and is fixed with the second gear, the second gear all meshes with first gear and internal gear.
By adopting the technical scheme, the output shaft of the first driving motor drives the first gear to rotate, at the moment, the mounting shaft rotates under the action of the first gear and the internal gear, and the mounting shaft rotates to drive the workpiece to rotate; through setting up first actuating mechanism, be convenient for drive work piece rotation.
The present invention in a preferred example may be further configured to: the side wall of the vacuum chamber is provided with a mounting groove for placing an aluminum target, and the shielding device comprises an arc-shaped groove arranged on one side of the mounting groove close to the turntable, a connecting block connected to the arc-shaped groove in a sliding manner along the circumferential direction of the turntable, and two groups of second driving mechanisms arranged on the side wall of the vacuum chamber and used for respectively driving two ends of the connecting block to move; one side of the connecting block, which is far away from the aluminum target, is fixedly connected with an arc plate, one side of the arc plate, which is close to the aluminum target, is abutted against the side wall of the vacuum chamber, one side of the connecting block is fixedly connected with waterproof geotextile, and a winding mechanism for winding the waterproof geotextile is installed in the vacuum chamber.
By adopting the technical scheme, the second driving mechanism drives the connecting block to move, the connecting block moves to drive the arc plate and the waterproof geotextile to move, and the arc plate and the waterproof geotextile can shield the mounting groove by moving, so that the possibility that silicone oil is attached to the surface of the aluminum target material can be reduced; through setting up winding mechanism, be convenient for twine waterproof geotechnological cloth.
The present invention in a preferred example may be further configured to: each group of second driving mechanisms comprises a first inner cavity which is arranged on the side wall of the vacuum chamber and communicated with the arc-shaped groove, a connecting rod which is arranged in the first inner cavity and a cylinder which is arranged on the outer side wall of the vacuum chamber; and a piston rod of the air cylinder penetrates through the first inner cavity and is hinged with one end of the connecting rod, and the other end of the connecting rod is hinged with the end part of one side of the connecting block.
By adopting the technical scheme, the piston rod of the air cylinder drives the connecting rod to move, and the connecting rod moves to drive the connecting block to move; through setting up second actuating mechanism, be convenient for drive connection piece removes.
The present invention in a preferred example may be further configured to: the winding mechanism comprises a second inner cavity and a winding shaft, wherein the second inner cavity is formed in one end, far away from the first inner cavity, of the arc-shaped groove, and the winding shaft is vertically and rotatably connected to the side wall of the second inner cavity; the one end rigid coupling that the connecting block was kept away from to waterproof geotechnological cloth is in the winding axle, just waterproof geotechnological cloth twines in the lateral wall of winding axle, the torsional spring has been cup jointed respectively, two at the both ends of winding axle the looks remote site rigid coupling respectively in the winding axle of torsional spring, two keep away from each other the end of torsional spring respectively the inside wall at second inner chamber both ends.
By adopting the technical scheme, the waterproof geotextile moves to drive the winding shaft to rotate, the winding shaft rotates to compress the torsion spring, and the torsion spring is in a compressed state; when the connecting block does not apply force to the waterproof geotextile, the winding shaft is reset under the action of the torsion spring, and the winding shaft resets to drive the waterproof geotextile to reset; through setting up winding mechanism, be convenient for twine waterproof geotechnological cloth.
The present invention in a preferred example may be further configured to: the heating device comprises a heating box, a feeding hole is formed in the top of the heating box, a sinking groove is formed in the feeding hole, a sealing cover is arranged on the sinking groove, the top of the sealing cover is communicated with a material supplementing pipe, a manual valve is installed on the material supplementing pipe, a plurality of electric heating wires are installed at the bottom of the sealing cover, a safety valve is installed at the top of the sealing cover, and a third driving mechanism used for driving the sealing cover to move is installed on the side wall of the heating box.
By adopting the technical scheme, the silicone oil is conveniently heated by arranging the heating wire; through setting up third actuating mechanism, the sealed motion of lid of drive of being convenient for to be convenient for clear up the heating cabinet, can reduce the impurity in the silicon oil protective film like this, therefore can improve the quality of silicon oil protective film.
The present invention in a preferred example may be further configured to: the third driving mechanism comprises two connecting plates which are respectively connected with the two sides of the heating box in a rotating way and a driving component which is arranged on the side wall of the heating box and is used for driving the two connecting plates to rotate; every the bottom of connecting plate is vertical installs the second driving motor, the top of connecting plate is vertical to be rotated and is connected with the lead screw, the output shaft of second driving motor is vertical upwards with the bottom fixed connection of lead screw, sealed lid threaded connection is in the lead screw.
Through adopting above-mentioned technical scheme, rotate through second driving motor drive lead screw, the sealed lid rebound of lead screw rotation drive, after sealed lid moves its upper limit position, rotate through drive assembly drive connecting plate, the connecting plate rotates and drives sealed lid rotation to alright open the feed inlet, therefore be convenient for clear up in the heating cabinet.
The present invention in a preferred example may be further configured to: the driving assembly comprises two connecting pipes which are fixedly connected to the bottoms of the two connecting plates respectively; the bottom horizontal installation of heating cabinet has the pneumatic cylinder, the piston rod rigid coupling of pneumatic cylinder has the horizon bar, the lateral wall rigid coupling of horizon bar has a plurality of helicla flutes, a plurality of helicla flutes have been seted up to the inner wall of connecting pipe, the helicla flute piece with the helicla flute one-to-one cooperation.
By adopting the technical scheme, the piston rod of the hydraulic cylinder drives the horizontal rod to move, at the moment, the horizontal rod drives the connecting pipe to rotate under the action of the spiral block and the spiral groove, and the connecting pipe rotates to drive the connecting plate to rotate; through setting up drive assembly, be convenient for drive connecting plate rotates.
In view of the defects in the prior art, another object of the present invention is to provide a sputtering aluminum plating process for a vehicular lamp trim ring.
The above object of the present invention is achieved by the following technical solutions:
a sputtering aluminum plating process for a car lamp decorative ring comprises the following steps:
step one, product dust removal: removing dust on the surface of the product by compressed air; step two, product installation: mounting the product on the mounting shaft by a clamp; step three, starting the equipment; step four, vacuumizing: vacuumizing the vacuum chamber through a vacuum pump; step five, filling argon gas when reaching a vacuum point: opening an argon electric valve, and filling argon into the vacuum chamber; step six, starting ion bombardment to clean the surface of the product: introducing negative high voltage into the aluminum bar, and cleaning the surface of the workpiece by glow discharge at the cleaning voltage of 2000 +/-200V for 250 +/-50S; step seven, turning on a sputtering power supply to start sputtering coating: introducing negative high pressure into the aluminum target, sputtering with the current of 45 +/-5A for 150 +/-30S, and coating the surface of the workpiece; step eight, plating a silicon oil protective film: introducing negative high pressure into the aluminum rod, starting a silicone oil electric valve, introducing silicone oil steam into the vacuum chamber, and plating a silicone oil protective film on the surface of the aluminum film by glow discharge, so that the possibility of oxidation of the aluminum film can be reduced, the film plating time is 400 +/-50S, and the film plating voltage is 2500 +/-200V; step nine, closing a valve of the silicone oil electric valve after film coating is finished; step ten, opening a door to take a product; step eleven, product inspection; and step twelve, warehousing finished products.
By adopting the technical scheme, the silicon oil protective film is convenient to plate on the outer surface of the aluminum die, so that the possibility of oxidation of the aluminum film can be reduced.
In summary, the invention includes at least one of the following beneficial technical effects:
1. the workpiece is mounted on the mounting shaft through the clamp, the first driving motor drives the rotary table to rotate, the rotary table rotates to drive the workpiece to revolve, the first driving mechanism drives the mounting shaft to rotate, and the mounting shaft rotates to drive the workpiece to rotate, so that the surface of the workpiece can be cleaned and coated conveniently; introducing negative high voltage into an aluminum bar, cleaning the surface of a workpiece through glow discharge, cutting off the power of the aluminum bar after the surface of the workpiece is cleaned, and introducing the negative high voltage into an aluminum target material, so that the surface of the workpiece can be coated; after the sputtering coating is finished, introducing negative high pressure into the aluminum bar, then starting the silicone oil electric valve, introducing silicone oil steam into the vacuum chamber, and plating a silicone oil protective film on the surface of the aluminum film by utilizing glow discharge, so that the possibility of oxidation of the aluminum film can be reduced;
2. the output shaft of the first driving motor drives the first gear to rotate, the mounting shaft rotates under the action of the first gear and the internal gear, and the mounting shaft rotates to drive the workpiece to rotate; the first driving mechanism is arranged, so that the workpiece can be driven to rotate;
3. the waterproof geotextile moves to drive the winding shaft to rotate, the winding shaft rotates to compress the torsion spring, and the torsion spring is in a compressed state at the moment; when the connecting block does not apply force to the waterproof geotextile, the winding shaft is reset under the action of the torsion spring, and the winding shaft resets to drive the waterproof geotextile to reset; through setting up winding mechanism, be convenient for twine waterproof geotechnological cloth.
Drawings
FIG. 1 is a schematic view of the overall structure of the embodiment;
FIG. 2 is a schematic view showing a first driving mechanism in an embodiment;
FIG. 3 is a partial cross-sectional view of an embodiment highlighting a first lumen;
FIG. 4 is a partial cross-sectional view of an embodiment highlighting the heating wire;
fig. 5 is a partial enlarged view of a portion a in fig. 4.
In the figure, 1, a vacuum chamber; 11. a vacuum pump; 12. an aluminum bar; 13. an aluminum target material; 14. a feed pipe; 141. a silicone oil electric valve; 15. argon gas is fed into the tube; 151. an argon electrically operated valve; 16. mounting grooves; 2. a mounting device; 21. a turntable; 22. a first drive motor; 23. installing a shaft; 24. a first drive mechanism; 241. an internal gear; 242. a first gear; 243. a second gear; 3. a shielding device; 31. an arc-shaped slot; 32. connecting blocks; 33. an arc-shaped plate; 34. waterproof geotextile; 4. a second drive mechanism; 41. a first lumen; 42. a connecting rod; 43. a cylinder; 5. a winding mechanism; 51. a second lumen; 52. a winding shaft; 53. a torsion spring; 6. a heating device; 61. a heating box; 62. a feed inlet; 621. sinking a groove; 63. a sealing cover; 64. a material supplementing pipe; 641. a manual valve; 65. an electric heating wire; 66. a safety valve; 7. a third drive mechanism; 71. a connecting plate; 72. a second drive motor; 73. a lead screw; 74. a drive assembly; 741. a connecting pipe; 742. a hydraulic cylinder; 743. a horizontal bar; 744. a screw block; 745. a helical groove.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
A car light decorative ring sputter aluminizing system is shown in figures 1 and 2 and comprises a vacuum chamber 1 and a vacuum pump 11, wherein an aluminum bar 12 is vertically arranged in the vacuum chamber 1, an aluminum target 13 is arranged in the side wall of the vacuum chamber 1, the aluminum bar 12 and the aluminum target 13 are connected with electricity as required, so that the connection parts of the aluminum bar 12 and the aluminum target 13 and the side wall of the vacuum chamber 1 are subjected to insulation treatment, and referring to figure 3, a shielding device 3 for shielding the aluminum target 13 is arranged on the side wall of the vacuum chamber 1; one side of the vacuum chamber 1 is communicated with a feeding pipe 14 for conveying silicon oil, the feeding pipe 14 can be subjected to heat preservation treatment through heat preservation cotton, a silicon oil electric valve 141 is installed on the feeding pipe 14, and one side of the feeding pipe 14, which is far away from the vacuum chamber 1, is communicated with a heating device 6 for heating the silicon oil; one side of the vacuum chamber 1 is communicated with an argon inlet pipe 15, an argon electric valve 151 is arranged on the argon inlet pipe 15, and one end of the argon inlet pipe 15, which is far away from the vacuum chamber 1, is communicated with an argon source; the vacuum chamber 1 is internally provided with a mounting device 2 for mounting a workpiece, and the mounting device 2 comprises a turntable 21 horizontally and rotatably connected to the side wall of the vacuum chamber 1 and a first driving motor 22 arranged below the vacuum chamber 1 and used for driving the turntable 21 to rotate; the turntable 21 is sleeved and fixed on an output shaft of the first driving motor 22; a plurality of mounting shafts 23 are arranged on the turntable 21 along the circumferential array, each mounting shaft 23 is vertically rotatably connected to the turntable 21 through a bearing, a first driving mechanism 24 for driving the plurality of mounting shafts 23 to rotate is installed in the vacuum chamber 1, a clamp for fixing a workpiece is installed on the mounting shaft 23, and the clamp is the prior art in vacuum coating and is not repeated here. The workpiece is mounted on the mounting shaft 23 through a clamp, then the first driving motor 22 drives the rotary table 21 to rotate, the rotary table 21 rotates to drive the workpiece to revolve, then the first driving mechanism 24 drives the mounting shaft 23 to rotate, and the mounting shaft 23 rotates to drive the workpiece to rotate, so that the surface of the workpiece can be cleaned and coated conveniently; introducing negative high voltage into the aluminum bar 12, cleaning the surface of the workpiece through glow discharge, cutting off the power of the aluminum bar 12 after the surface of the workpiece is cleaned, and introducing the negative high voltage into the aluminum target material 13, so that the surface of the workpiece can be coated; after the sputtering coating is finished, the negative high pressure is introduced into the aluminum rod 12, then the silicone oil electric valve 141 is started, silicone oil steam is introduced into the vacuum chamber 1, and a silicone oil protective film is plated on the surface of the aluminum film by glow discharge, so that the possibility of oxidation of the aluminum film can be reduced.
As shown in fig. 2, the first driving mechanism 24 includes an internal gear 241 fixed on the inner wall of the vacuum chamber 1 and a first gear 242 fixed on the output shaft of the first driving motor 22; the outer side wall of each mounting shaft 23 is fixedly sleeved with a second gear 243, and the second gear 243 is engaged with both the first gear 242 and the internal gear 241. The output shaft of the first driving motor 22 drives the first gear 242 to rotate, at this time, the mounting shaft 23 rotates under the action of the first gear 242 and the internal gear 241, and the mounting shaft 23 rotates to drive the workpiece to rotate; the first driving mechanism 24 is arranged, so that the workpiece can be driven to rotate.
As shown in fig. 2 and 3, a mounting groove 16 for placing an aluminum target 13 is formed in a side wall of the vacuum chamber 1, and the shielding device 3 includes an arc-shaped groove 31 formed in the mounting groove 16 on a side close to the turntable 21, a connecting block 32 connected to the arc-shaped groove 31 in a sliding manner along a circumferential direction of the turntable 21, and two sets of second driving mechanisms 4 mounted on the side wall of the vacuum chamber 1 and used for respectively driving two ends of the connecting block 32 to move; one side of the connecting block 32 far away from the aluminum target 13 is fixedly connected with an arc-shaped plate 33 through a vertical rod (not shown in the figure), the vertical rod is connected to the side wall of the mounting groove 16 in a sliding manner, one side of the arc-shaped plate 33 close to the aluminum target 13 abuts against the side wall of the vacuum chamber 1, one side of the connecting block 32 is fixedly connected with a waterproof geotextile 34, and a winding mechanism 5 for winding the waterproof geotextile 34 is installed in the vacuum chamber 1. The second driving mechanism 4 drives the connecting block 32 to move, the connecting block 32 moves to drive the arc plate 33 and the waterproof geotextile 34 to move, and the arc plate 33 and the waterproof geotextile 34 can shield the mounting groove 16 when moving, so that the possibility that silicon oil is attached to the surface of the aluminum target material 13 can be reduced; by arranging the winding mechanism 5, the waterproof geotextile 34 can be conveniently wound.
Each group of second driving mechanisms 4 comprises a first inner cavity 41 which is arranged on the side wall of the vacuum chamber 1 and communicated with the arc-shaped groove 31, a connecting rod 42 which is arranged in the first inner cavity 41 and a cylinder 43 which is arranged on the outer side wall of the vacuum chamber 1; the piston rod of the cylinder 43 penetrates through the first inner cavity 41 and is hinged with one end of the connecting rod 42, the other end of the connecting rod 42 is hinged with the end part of one side of the connecting block 32, and the piston rod of the cylinder 43 is sealed with the vacuum chamber 1. The piston rod of the air cylinder 43 drives the connecting rod 42 to move, and the connecting rod 42 moves to drive the connecting block 32 to move; the second driving mechanism 4 is arranged to drive the connecting block 32 to move conveniently.
The winding mechanism 5 comprises a second inner cavity 51 arranged at one end of the arc-shaped groove 31 far away from the first inner cavity 41 and a winding shaft 52 vertically and rotatably connected to the side wall of the second inner cavity 51 through a bearing; one end of the waterproof geotextile 34 far away from the connecting block 32 is fixedly connected to the winding shaft 52, the waterproof geotextile 34 is wound on the outer side wall of the winding shaft 52, the two ends of the winding shaft 52 are respectively sleeved with the torsion springs 53, the opposite ends of the two torsion springs 53 are respectively fixedly connected to the winding shaft 52, and the ends far away from each other of the two torsion springs 53 are respectively fixedly connected to the inner side walls at the two ends of the second inner cavity 51. The waterproof geotextile 34 moves to drive the winding shaft 52 to rotate, the winding shaft 52 rotates to compress the torsion spring 53, and the torsion spring 53 is in a compressed state; when the connecting block 32 does not apply force to the waterproof geotextile 34, the winding shaft 52 is reset under the action of the torsion spring 53, and the winding shaft 52 is reset to drive the waterproof geotextile 34 to reset; by arranging the winding mechanism 5, the waterproof geotextile 34 can be conveniently wound.
As shown in fig. 4 and 5, the heating device 6 includes a heating box 61, a feeding port 62 is opened at the top of the heating box 61, a sinking groove 621 is opened on the feeding port 62, a sealing cover 63 is disposed on the sinking groove 621, a sealing ring (not shown in the figure) is installed between the sealing cover 63 and the sinking groove 621, the top of the sealing cover 63 is communicated with a feeding pipe 64, a manual valve 641 is installed on the feeding pipe 64, a plurality of heating wires 65 are installed at the bottom of the sealing cover 63, a safety valve 66 is installed at the top of the sealing cover 63, and a third driving mechanism 7 for driving the sealing cover 63 to move is installed on the side wall of. The heating wire 65 is arranged, so that the silicone oil can be conveniently heated; through setting up third actuating mechanism 7, be convenient for drive sealed lid 63 motion to be convenient for clear up heating cabinet 61, can reduce the impurity in the silicon oil protective film like this, therefore can improve the quality of silicon oil protective film.
The third driving mechanism 7 comprises two connecting plates 71 respectively rotatably connected to two sides of the heating box 61 and a driving assembly 74 mounted on the side wall of the heating box 61 for driving the two connecting plates 71 to rotate; a second driving motor 72 is vertically installed at the bottom of each connecting plate 71, a lead screw 73 is vertically and rotatably connected to the top of each connecting plate 71 through a bearing, an output shaft of each second driving motor 72 is vertically and upwardly fixedly connected with the bottom of the corresponding lead screw 73, and each sealing cover 63 is in threaded connection with the corresponding lead screw 73. The screw 73 is driven to rotate by the second driving motor 72, the screw 73 drives the sealing cover 63 to move upwards in a rotating mode, after the sealing cover 63 moves to the upper limit position of the sealing cover, the connecting plate 71 is driven to rotate by the driving assembly 74, the connecting plate 71 rotates to drive the sealing cover 63 to rotate, and therefore the feeding hole 62 can be opened, and therefore the heating box 61 can be cleaned conveniently.
The driving assembly 74 includes two connecting pipes 741 fixed to the bottoms of the two connecting plates 71; the connecting pipe 741 is rotatably connected to the bottom of the heating tank 61 through a bearing, a hydraulic cylinder 742 is horizontally installed at the bottom of the heating tank 61, a horizontal rod 743 is fixedly connected to a piston rod of the hydraulic cylinder 742, a plurality of spiral blocks 744 are fixedly connected to the outer side wall of the horizontal rod 743, a plurality of spiral grooves 745 are formed in the inner wall of the connecting pipe 741, and the spiral blocks 744 and the spiral grooves 745 are matched in a one-to-one correspondence manner. The piston rod of the hydraulic cylinder 742 drives the horizontal rod 743 to move, at this time, the horizontal rod 743 drives the connecting pipe 741 to rotate under the action of the spiral block 744 and the spiral groove 745, and the connecting pipe 741 rotates to drive the connecting plate 71 to rotate; the driving assembly 74 is arranged to facilitate the rotation of the driving connecting plate 71.
A sputtering aluminum plating process for a car lamp decorative ring comprises the following steps:
step one, product dust removal: removing dust on the surface of the product by compressed air;
step two, product installation: mounting the product on the mounting shaft 23 by a jig;
step three, starting the equipment;
step four, vacuumizing: the vacuum chamber 1 is vacuumized by a vacuum pump 11;
step five, filling argon gas when reaching a vacuum point: opening the argon electric valve 151, and filling argon into the vacuum chamber 1;
step six, starting ion bombardment to clean the surface of the product: introducing negative high voltage into the aluminum bar 12, and cleaning the surface of the workpiece by glow discharge at the cleaning voltage of 2000 +/-200V for 250 +/-50S;
step seven, turning on a sputtering power supply to start sputtering coating: introducing negative high voltage into the aluminum target material 13, and performing film coating on the surface of the workpiece at the sputtering current of 45 +/-5A and the sputtering time of 150 +/-30S;
step eight, plating a silicon oil protective film: introducing negative high pressure into the aluminum rod 12, starting the silicone oil electric valve 141, introducing silicone oil steam into the vacuum chamber 1, and plating a silicone oil protective film on the surface of the aluminum film by glow discharge, so that the possibility of oxidation of the aluminum film can be reduced, the plating time is 400 +/-50S, and the plating voltage is 2500 +/-200V;
step nine, closing the valve of the silicone oil electric valve 141 after the film coating is finished;
step ten, opening a door to take a product;
step eleven, product inspection;
and step twelve, warehousing finished products.
The embodiments of the present invention are preferred embodiments of the present invention, and the scope of the present invention is not limited by these embodiments, so: all equivalent changes made according to the structure, shape and principle of the invention are covered by the protection scope of the invention.
Claims (9)
1. The utility model provides a car light decorative ring sputter system of aluminizing, includes real empty room (1) and vacuum pump (11), its characterized in that: an aluminum bar (12) is vertically arranged in the vacuum chamber (1), an aluminum target (13) is arranged in the side wall of the vacuum chamber (1), and a shielding device (3) for shielding the aluminum target (13) is arranged on the side wall of the vacuum chamber (1); a feeding pipe (14) used for conveying silicon oil is communicated with one side of the vacuum chamber (1), a silicon oil electric valve (141) is installed on the feeding pipe (14), and a heating device (6) used for heating the silicon oil is communicated with one side, far away from the vacuum chamber (1), of the feeding pipe (14); one side of the vacuum chamber (1) is communicated with an argon inlet pipe (15), an argon electric valve (151) is installed on the argon inlet pipe (15), and one end, far away from the vacuum chamber (1), of the argon inlet pipe (15) is communicated with an argon source;
the vacuum chamber (1) is internally provided with a mounting device (2) for mounting a workpiece, and the mounting device (2) comprises a turntable (21) which is horizontally and rotatably connected to the side wall of the vacuum chamber (1) and a first driving motor (22) which is arranged below the vacuum chamber (1) and is used for driving the turntable (21) to rotate; the turntable (21) is sleeved and fixed on an output shaft of the first driving motor (22); the device is characterized in that a plurality of installation shafts (23) are arranged on the turntable (21) along the circumferential array, each installation shaft (23) is vertically rotatably connected to the turntable (21), a first driving mechanism (24) used for driving the installation shafts (23) to rotate is installed in the vacuum chamber (1), and a clamp used for fixing a workpiece is installed on the installation shafts (23).
2. The sputtering aluminum plating system for the decorative ring of the car lamp according to claim 1, characterized in that: the first driving mechanism (24) comprises an internal gear (241) fixedly connected to the inner wall of the vacuum chamber (1) and a first gear (242) sleeved and fixed on an output shaft of the first driving motor (22); and a second gear (243) is fixedly sleeved on the outer side wall of each mounting shaft (23), and the second gear (243) is meshed with the first gear (242) and the internal gear (241).
3. The sputtering aluminum plating system for the decorative ring of the car lamp according to claim 1, characterized in that: the side wall of the vacuum chamber (1) is provided with a mounting groove (16) for placing an aluminum target (13), and the shielding device (3) comprises an arc-shaped groove (31) formed in one side of the mounting groove (16) close to the turntable (21), a connecting block (32) connected to the arc-shaped groove (31) in a sliding manner along the circumferential direction of the turntable (21), and two groups of second driving mechanisms (4) arranged on the side wall of the vacuum chamber (1) and used for respectively driving two ends of the connecting block (32) to move; one side rigid coupling that aluminium target (13) was kept away from in connecting block (32) has arc (33), one side butt in the lateral wall of vacuum chamber (1) that arc (33) are close to aluminium target (13), one side rigid coupling of connecting block (32) has waterproof geotechnological cloth (34), install winding mechanism (5) that are used for twining waterproof geotechnological cloth (34) in vacuum chamber (1).
4. A sputter aluminizing system for vehicle lamp ferrules according to claim 3, characterized in that: each group of second driving mechanisms (4) comprises a first inner cavity (41) which is arranged on the side wall of the vacuum chamber (1) and communicated with the arc-shaped groove (31), a connecting rod (42) which is arranged in the first inner cavity (41) and a cylinder (43) which is arranged on the outer side wall of the vacuum chamber (1); the piston rod of the air cylinder (43) penetrates through the first inner cavity (41) and is hinged to one end of the connecting rod (42), and the other end of the connecting rod (42) is hinged to the end portion of one side of the connecting block (32).
5. The sputtering aluminum plating system for the decorative ring of the car lamp according to claim 4, characterized in that: the winding mechanism (5) comprises a second inner cavity (51) arranged at one end of the arc-shaped groove (31) far away from the first inner cavity (41) and a winding shaft (52) vertically and rotatably connected to the side wall of the second inner cavity (51); waterproof geotechnological cloth (34) keep away from the one end rigid coupling in winding shaft (52) of connecting block (32), just waterproof geotechnological cloth (34) twines in the lateral wall of winding shaft (52), torsional spring (53), two have been cup jointed respectively at the both ends of winding shaft (52) the looks remote site of torsional spring (53) rigid coupling respectively in winding shaft (52), two the end of keeping away from each other of torsional spring (53) is the inside wall of rigid coupling respectively in second inner chamber (51) both ends.
6. The sputtering aluminum plating system for the decorative ring of the car lamp according to claim 1, characterized in that: heating device (6) are including heating cabinet (61), feed inlet (62) have been seted up at the top of heating cabinet (61), heavy groove (621) have been seted up on feed inlet (62), be provided with sealed lid (63) on heavy groove (621), the top intercommunication of sealed lid (63) has material supplementing pipe (64), install manual valve (641) on material supplementing pipe (64), a plurality of heating wires (65) are installed to the bottom of sealed lid (63), and relief valve (66) are installed at the top of sealed lid (63), third actuating mechanism (7) that are used for driving sealed lid (63) motion are installed to the lateral wall of heating cabinet (61).
7. The sputtering aluminum plating system for the decorative ring of the car lamp according to claim 6, characterized in that: the third driving mechanism (7) comprises two connecting plates (71) which are respectively connected to two sides of the heating box (61) in a rotating mode and a driving assembly (74) which is arranged on the side wall of the heating box (61) and used for driving the two connecting plates (71) to rotate; a second driving motor (72) is vertically installed at the bottom of each connecting plate (71), a lead screw (73) is vertically and rotatably connected to the top of each connecting plate (71), an output shaft of each second driving motor (72) is vertically and upwardly fixedly connected with the bottom of each lead screw (73), and each sealing cover (63) is in threaded connection with each lead screw (73).
8. The sputtering aluminum plating system for the decorative ring of the car lamp according to claim 7, characterized in that: the driving assembly (74) comprises two connecting pipes (741) which are fixedly connected to the bottoms of the two connecting plates (71) respectively; the bottom horizontal installation of heating cabinet (61) has pneumatic cylinder (742), the piston rod rigid coupling of pneumatic cylinder (742) has horizontal pole (743), the lateral wall rigid coupling of horizontal pole (743) has a plurality of spiral piece (744), a plurality of helicla flute (745) have been seted up to the inner wall of connecting pipe (741), spiral piece (744) with helicla flute (745) one-to-one cooperates.
9. A car lamp decorative ring sputtering aluminum plating process is characterized in that: the method comprises the following steps:
step one, product dust removal: removing dust on the surface of the product by compressed air;
step two, product installation: mounting the product on the mounting shaft (23) by means of a clamp;
step three, starting the equipment;
step four, vacuumizing: vacuumizing the vacuum chamber (1) through a vacuum pump (11);
step five, filling argon gas when reaching a vacuum point: opening the argon electric valve (151) and filling argon into the vacuum chamber (1);
step six, starting ion bombardment to clean the surface of the product: introducing negative high voltage into the aluminum bar (12), and cleaning the surface of the workpiece by glow discharge at the cleaning voltage of 2000 +/-200V for 250 +/-50S;
step seven, turning on a sputtering power supply to start sputtering coating: introducing negative high voltage into the aluminum target (13), sputtering current is 45 +/-5A, sputtering time is 150 +/-30S, and coating is carried out on the surface of the workpiece;
step eight, plating a silicon oil protective film: introducing negative high pressure into the aluminum rod (12), starting the silicone oil electric valve (141), introducing silicone oil steam into the vacuum chamber (1), and plating a silicone oil protective film on the surface of the aluminum film by glow discharge, so that the possibility of oxidation of the aluminum film can be reduced, the plating time is 400 +/-50S, and the plating voltage is 2500 +/-200V;
step nine, closing a valve of the silicone oil electric valve (141) after the film coating is finished;
step ten, opening a door to take a product;
step eleven, product inspection;
and step twelve, warehousing finished products.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010152561.9A CN111254397B (en) | 2020-03-06 | 2020-03-06 | Sputtering aluminum plating system and process for car lamp decorative ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010152561.9A CN111254397B (en) | 2020-03-06 | 2020-03-06 | Sputtering aluminum plating system and process for car lamp decorative ring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111254397A true CN111254397A (en) | 2020-06-09 |
| CN111254397B CN111254397B (en) | 2022-02-11 |
Family
ID=70951390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010152561.9A Active CN111254397B (en) | 2020-03-06 | 2020-03-06 | Sputtering aluminum plating system and process for car lamp decorative ring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111254397B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113445013A (en) * | 2021-06-28 | 2021-09-28 | 哈尔滨工业大学 | High-power magnetron sputtering film deposition device and method for inner wall of rotor bearing inner ring |
| CN113789501A (en) * | 2021-09-09 | 2021-12-14 | 比尔安达(上海)润滑材料有限公司 | Method and system for forming multi-nano coating on surface of shaver cap |
| CN115116857A (en) * | 2022-07-01 | 2022-09-27 | 江西蓝微电子科技有限公司 | Insulating alloy-coated bonding wire and preparation method thereof |
| CN115265139A (en) * | 2022-08-03 | 2022-11-01 | 浙江林达包装科技股份有限公司 | Constant-temperature steam-injection heating system with wood pallet deformation prevention function |
| CN115466933A (en) * | 2022-08-30 | 2022-12-13 | 厦门金鹭特种合金有限公司 | Tool base, tool and application thereof |
| CN115537757A (en) * | 2022-10-28 | 2022-12-30 | 帝宝交通器材（南昌）有限公司 | Multi-station placing rack for coating film on automobile lamp shell |
| US20230287558A1 (en) * | 2020-07-24 | 2023-09-14 | Fox Biosystems Nv | Sputter desposition system |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040103845A1 (en) * | 2000-04-10 | 2004-06-03 | Gorokhovsky Vladimir I. | Filtered cathodic arc deposition method and apparatus |
| CN2675685Y (en) * | 2004-01-16 | 2005-02-02 | 常鸿 | Evaporation coating machine with radio frequency plasma polymerization |
| CN201144276Y (en) * | 2007-12-28 | 2008-11-05 | 沈阳市北宇真空设备厂 | Plasma evaporation coating machine |
| CN103276354A (en) * | 2013-04-22 | 2013-09-04 | 东莞市汇成真空科技有限公司 | Method for vacuum evaporating aluminium film on plastic workpiece |
| CN104313545A (en) * | 2014-09-26 | 2015-01-28 | 马瑞利汽车零部件(芜湖)有限公司 | Storage rack of aluminizing machine |
| CN104789932A (en) * | 2015-05-07 | 2015-07-22 | 科益精密模塑（太仓）有限公司 | Automobile lamp decorative ring aluminizing technology |
| CN105088148A (en) * | 2015-09-18 | 2015-11-25 | 南通联恒新材料有限公司 | Method of depositing aluminum film on plastic part by evaporation in vacuum |
| CN208308945U (en) * | 2018-03-29 | 2019-01-01 | 青岛华磊真空镀膜有限公司 | Sputtering coating equipment |
| CN110396672A (en) * | 2019-09-06 | 2019-11-01 | 深圳市长兴荣五金制品有限公司 | A kind of ion sputtering film coating method and device for realizing gradient color |
-
2020
- 2020-03-06 CN CN202010152561.9A patent/CN111254397B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040103845A1 (en) * | 2000-04-10 | 2004-06-03 | Gorokhovsky Vladimir I. | Filtered cathodic arc deposition method and apparatus |
| CN2675685Y (en) * | 2004-01-16 | 2005-02-02 | 常鸿 | Evaporation coating machine with radio frequency plasma polymerization |
| CN201144276Y (en) * | 2007-12-28 | 2008-11-05 | 沈阳市北宇真空设备厂 | Plasma evaporation coating machine |
| CN103276354A (en) * | 2013-04-22 | 2013-09-04 | 东莞市汇成真空科技有限公司 | Method for vacuum evaporating aluminium film on plastic workpiece |
| CN104313545A (en) * | 2014-09-26 | 2015-01-28 | 马瑞利汽车零部件(芜湖)有限公司 | Storage rack of aluminizing machine |
| CN104789932A (en) * | 2015-05-07 | 2015-07-22 | 科益精密模塑（太仓）有限公司 | Automobile lamp decorative ring aluminizing technology |
| CN105088148A (en) * | 2015-09-18 | 2015-11-25 | 南通联恒新材料有限公司 | Method of depositing aluminum film on plastic part by evaporation in vacuum |
| CN208308945U (en) * | 2018-03-29 | 2019-01-01 | 青岛华磊真空镀膜有限公司 | Sputtering coating equipment |
| CN110396672A (en) * | 2019-09-06 | 2019-11-01 | 深圳市长兴荣五金制品有限公司 | A kind of ion sputtering film coating method and device for realizing gradient color |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230287558A1 (en) * | 2020-07-24 | 2023-09-14 | Fox Biosystems Nv | Sputter desposition system |
| CN113445013A (en) * | 2021-06-28 | 2021-09-28 | 哈尔滨工业大学 | High-power magnetron sputtering film deposition device and method for inner wall of rotor bearing inner ring |
| CN113789501A (en) * | 2021-09-09 | 2021-12-14 | 比尔安达(上海)润滑材料有限公司 | Method and system for forming multi-nano coating on surface of shaver cap |
| CN113789501B (en) * | 2021-09-09 | 2023-07-25 | 比尔安达(上海)润滑材料有限公司 | Method and system for forming multi-nano coating on surface of shaver cap |
| CN115116857A (en) * | 2022-07-01 | 2022-09-27 | 江西蓝微电子科技有限公司 | Insulating alloy-coated bonding wire and preparation method thereof |
| CN115265139A (en) * | 2022-08-03 | 2022-11-01 | 浙江林达包装科技股份有限公司 | Constant-temperature steam-injection heating system with wood pallet deformation prevention function |
| CN115466933A (en) * | 2022-08-30 | 2022-12-13 | 厦门金鹭特种合金有限公司 | Tool base, tool and application thereof |
| CN115537757A (en) * | 2022-10-28 | 2022-12-30 | 帝宝交通器材（南昌）有限公司 | Multi-station placing rack for coating film on automobile lamp shell |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111254397B (en) | 2022-02-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111254397B (en) | Sputtering aluminum plating system and process for car lamp decorative ring | |
| CN107604328B (en) | high-efficiency annular vacuum coating device for metal bipolar plate of fuel cell | |
| CN1718847A (en) | Pair target twin magnetic controlled sputtering ion plating deposition device | |
| CN2813637Y (en) | Horizontal electronic beam evaporation type vacuum film coating machine | |
| CN101634012A (en) | Ion beam assisting magnetic control sputtering deposition device and method for surface protection | |
| CN108970901A (en) | Mounting machine | |
| CN210085568U (en) | Novel vacuum magnetron sputtering coating machine | |
| CN219244247U (en) | Production device of large-diameter diamond grinding tool | |
| CN112453672A (en) | Automatic wire feeding mechanism for additive manufacturing | |
| CN110527966A (en) | A kind of horizontal magnetron sputtering apparatus for long tube plated film | |
| CN113929311B (en) | Conductive glass coating device with self-repairing function | |
| CN213560117U (en) | A casing cutting device for filling production of electric pile film capacitor | |
| CN213266687U (en) | Multi-station vacuum coating equipment | |
| CN209836296U (en) | Coating machine of electric capacity screen | |
| CN114535536A (en) | Multi-output-port quick feeding robot for die casting machine | |
| CN217809634U (en) | Coating machine capable of magnetically controlling coating of protective film | |
| CN214300316U (en) | Double-door single-motor-driven film coating equipment | |
| CN101418430B (en) | Omnidirectional ion injection and deposition batch composite handling arrangement and method | |
| CN219059049U (en) | Steel part heat treatment device | |
| CN217677770U (en) | PVD (physical vapor deposition) film coating device capable of automatically feeding and discharging | |
| CN220788413U (en) | Glass vacuum coating machine | |
| CN217265980U (en) | Cavity structure of vacuum coating machine | |
| CN213025603U (en) | Clamping repair device for insulator umbrella skirt | |
| CN215031896U (en) | Online plasma cleaning machine | |
| CN217330584U (en) | Multi-angle drying device is used in waterproof material production |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |