CN217677770U

CN217677770U - PVD (physical vapor deposition) film coating device capable of automatically feeding and discharging

Info

Publication number: CN217677770U
Application number: CN202222084710.XU
Authority: CN
Inventors: 黄伟东
Original assignee: Shaoxing Gaozhuo New Material Technology Co ltd
Current assignee: Shaoxing Gaozhuo New Material Technology Co ltd
Priority date: 2022-08-09
Filing date: 2022-08-09
Publication date: 2022-10-28
Anticipated expiration: 2032-08-09

Abstract

The utility model discloses an automatic go up PVD coating device of unloading, including coating machine main part and centre gripping subassembly, real empty room has been seted up at the middle part of coating machine main part, and real empty room top inner wall fixed mounting has limit baffle for the centre gripping unit mount that transports about to the material is in limit baffle's front end, the centre gripping subassembly includes connecting block, electric telescopic handle, connecting sleeve, hydraulic stem, servo motor, supplementary electric control pole and flexible electronic two finger grip, the front end of connecting block is rotated and is installed electric telescopic handle, and electric telescopic handle's end-to-end connection has the connecting sleeve, connecting sleeve's inner wall fixed mounting has the hydraulic stem, and the left side top fixed mounting of hydraulic stem has servo motor. This automatic go up PVD coating device of unloading adopts the setting of mutually supporting between a plurality of subassemblies, not only can shift the material automatically, and the position that simultaneously can also the switch board carries out free control, but also can observe the operating condition of real empty room inside.

Description

PVD (physical vapor deposition) film coating device capable of automatically feeding and discharging

Technical Field

The utility model relates to a PVD coating device technical field specifically is an automatic go up PVD coating device of unloading.

Background

The PVD vacuum coating machine is used for coating a workpiece in a vacuum cavity. PVD (physical vapor deposition) coating techniques are mainly classified into three types, vacuum evaporation coating, vacuum sputtering coating, and vacuum ion coating. Corresponding to the three categories of PVD technology, the corresponding vacuum coater includes vacuum evaporation coater, vacuum sputtering coater and vacuum ion coater

As in application No.: CN202021984877.6 the utility model discloses a PVD coating device relates to PVD coating film technical field, including the coating film equipment body, one side of coating film equipment body is provided with the base, and the inside of base rotates and is connected with the roller bearing, the terminal fixedly connected with gear of roller bearing, one of them is a set of the end-to-end connection of gyro wheel has the handle, the outside of gyro wheel is provided with the conveyer belt. The utility model discloses a place the work piece after the coating film in the standing groove at the inboard top of conveyer belt, the handle rotates, make the roller bearing drive gear revolve, make intermeshing's rubber lug drive the conveyer belt and rotate, make the coating film work piece downstream, the work piece forward motion of coating film is treated at the conveyer belt top, thereby it is more convenient to make the unloading of going up, and the mutual correspondence through picture peg and slot, make multiunit bottom plate superpose each other and place, make and form certain height between the bottom plate, place the coating film work piece in the clearance, remove the bottom plate, make its gyro wheel remove, be convenient for depositing of coating film work piece.

A PVD coating device similar to the above application has the following disadvantages:

the existing PVD coating device can not pick up materials in the PVD coating device when in use, so that the loading is more complicated, and the coating efficiency is influenced.

Therefore, in view of the above, research and improvement are made on the existing structure and defects, and a PVD coating apparatus with automatic feeding and discharging is provided to achieve the purpose of more practical value.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an automatic PVD coating device of unloading of going up to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an automatic go up PVD coating device of unloading, includes coating machine main part and centre gripping subassembly, real empty room has been seted up at the middle part of coating machine main part, and real empty room's top inner wall fixed mounting has limit baffle for the centre gripping subassembly of transporting about the material is installed in limit baffle's front end, the centre gripping subassembly includes connecting block, electric telescopic handle, connecting sleeve, hydraulic stem, servo motor, supplementary automatically controlled pole and flexible electronic two finger clamping jaw, the front end of connecting block is rotated and is installed electric telescopic handle, and electric telescopic handle's end-to-end connection has the connecting sleeve, connecting sleeve's inner wall fixed mounting has the hydraulic stem, and the left side top fixed mounting of hydraulic stem has servo motor, servo motor's top is fixed with the coating machine main part, supplementary automatically controlled pole is installed perpendicularly to the right-hand member of hydraulic stem, and the bottom of supplementary automatically controlled pole is provided with flexible electronic two finger clamping jaws.

Furthermore, the top of the left side of the coating machine main body is connected with an air exhaust pipeline which is communicated with the vacuum chamber.

Furthermore, the right side of the coating machine main body is provided with a rotating rod, and the right end of the rotating rod is connected with a limiting connecting piece in a laminating manner.

Furthermore, a control cabinet is fixedly mounted at the right end of the limiting connecting piece, and the top of the left side of the control cabinet is communicated with an air exhaust pipeline.

Furthermore, the left side of the coating machine main body is provided with a hinge, and the coating machine main body is rotatably provided with a cabinet plate through the hinge.

Furthermore, the front end of the cabinet plate is provided with a metal frame, and a fixing screw is fixedly arranged inside the metal frame.

Furthermore, the tail end of the fixing screw is fixedly provided with transparent glass, and the metal frame fixes the transparent glass and the cabinet plate through the fixing screw

Compared with the prior art, the beneficial effects of the utility model are that: this automatic go up PVD coating device of unloading adopts the setting of mutually supporting between a plurality of subassemblies, not only can shift the material automatically, and the position that simultaneously can also the switch board carries out free control, but also can observe the operating condition of real empty room inside.

1. The utility model discloses a setting of centre gripping subassembly for the extension of supplementary electric control lever cooperates two finger clamping jaw of flexible electronic with the material of coating machine main part outside to carry out the centre gripping, the two finger clamping jaw of flexible electronic that rethread electric control lever pulling clamp held the material rises, rethread electric control lever left side vertically installed hydraulic stem rotates to vacuum chamber inside under servo motor's drive, make two finger clamping jaw of flexible electronic retract in the vacuum chamber, and the cabinet board that the electric telescopic handle of pulling front end rotation installation and electric telescopic handle rear end rotation are connected reverses to the right side when the hydraulic stem rotates to reset, make the hydraulic stem reset and cooperate the cabinet board that the electric telescopic handle retracts to retract simultaneously to pull the cabinet board around the hinge rotation and close with the coating machine main part front end, seal the vacuum chamber of seting up in the coating machine main part, thereby reach the purpose of automatic feeding;

2. the utility model makes the rotating rod rotatably connected with the right side of the film plating machine main body rotate by taking the joint of the left side and the film plating machine main body as the center of a circle through the cooperation of the rotating rod and the limiting connecting piece, so that the rotating rod drives the control cabinet fixed on one side of the limiting connecting piece to adjust the position, and the inside of the limiting connecting piece arranged by laminating the two ends of the rotating rod is provided with the toothed ring, so that the stability among the film plating machine main body, the rotating rod and the control cabinet can be improved, and the aim of freely controlling the position of the control cabinet is fulfilled;

3. the utility model discloses a transparent glass's setting for the metal frame cooperation fixed screw that cabinet board front end set up fixes transparent glass and cabinet board, and the fixed transparent glass of coating machine main part during operation accessible cabinet board front end observes the operating condition of real indoor portion, improves and uses convenient degree.

Drawings

FIG. 1 is a schematic view of the overall structure of a coating machine main body of a PVD coating device with automatic feeding and discharging functions;

FIG. 2 is a schematic view of the internal structure of a coating machine body of the PVD coating device with automatic feeding and discharging functions;

FIG. 3 is a schematic structural view of a clamping assembly of the PVD coating device with automatic feeding and discharging functions;

fig. 4 is a schematic view of the three-dimensional structure of the PVD coating device for automatic feeding and discharging of the present invention, which is connected to a metal frame and transparent glass.

In the figure: 1. a film plating machine main body; 2. a vacuum chamber; 3. a limit baffle; 4. a clamping assembly; 401. connecting blocks; 402. an electric telescopic rod; 403. a connecting sleeve; 404. a hydraulic lever; 405. a servo motor; 406. an auxiliary electric control lever; 407. a flexible electric two-finger clamping jaw; 5. an air extraction pipeline; 6. rotating the rod; 7. a limiting connecting piece; 8. a control cabinet; 9. a hinge; 10. a cabinet panel; 11. a metal frame; 12. fixing screws; 13. and (4) transparent glass.

Detailed Description

As shown in fig. 1-3, a PVD coating device with automatic feeding and discharging function comprises a coating machine main body 1 and a clamping assembly 4, wherein a vacuum chamber 2 is arranged in the middle of the coating machine main body 1, a limit baffle 3 is fixedly mounted on the inner wall of the top of the vacuum chamber 2, the clamping assembly 4 for transporting materials up and down is mounted at the front end of the limit baffle 3, the clamping assembly 4 comprises a connecting block 401, an electric telescopic rod 402, a connecting sleeve 403, a hydraulic rod 404, a servo motor 405, an auxiliary electric control rod 406 and a flexible electric two-finger clamping jaw 407, the electric telescopic rod 402 is rotatably mounted at the front end of the connecting block 401, the connecting sleeve 403 is connected to the tail end of the electric telescopic rod 402, the hydraulic rod 404 is fixedly mounted on the inner wall of the connecting sleeve 403, and the servo motor 405 is fixedly mounted at the top of the left side of the hydraulic rod 404, the top of servo motor 405 is fixed with coating machine main part 1, supplementary electric control lever 406 is installed perpendicularly to the right-hand member of hydraulic stem 404, and the bottom of supplementary electric control lever 406 is provided with flexible electronic two finger clamping jaw 407, coating machine main part 1 left side top is connected with bleed-off conduit 5, and bleed-off conduit 5 and real empty room 2 through connection, the flexible electronic two finger clamping jaw 407 of extension cooperation of supplementary electric control lever 406 carries out the centre gripping with coating machine main part 1 outside material, the flexible electronic two finger clamping jaw 407 of the material of rethread auxiliary electric control lever 406 pulling centre gripping rises, the hydraulic stem 404 of perpendicular installation in the left side of rethread auxiliary electric control lever 406 is inside to real empty room 2 under servo motor 405's drive, make flexible electronic two finger clamping jaw 407 retract in real empty room 2, thereby reach automatic feeding's purpose.

As shown in fig. 2, the right side of coating machine main part 1 is provided with dwang 6, and the right-hand member laminating of dwang 6 is connected with spacing connecting piece 7, the right-hand member fixed mounting of spacing connecting piece 7 has switch board 8, and the left side top of switch board 8 link up with exhaust duct 5, dwang 6 that coating machine main part 1 right side rotation is connected uses left side and coating machine main part 1 junction to rotate as the centre of a circle, make dwang 6 drive the switch board 8 of spacing connecting piece 7 one side fixed and carry out the adjusting position, and spacing connecting piece 7 that the laminating of dwang 6 both ends set up is inside to be installed for the ring gear and set up and can increase coating machine main part 1, dwang 6 and the stability between the 8 three of switch board, thereby reach and carry out the free control purpose to the position of switch board 8.

As shown in fig. 4, a hinge 9 is arranged on the left side of the coating machine main body 1, a cabinet plate 10 is rotatably installed on the coating machine main body 1 through the hinge 9, a metal frame 11 is arranged at the front end of the cabinet plate 10, fixing screws 12 are fixedly installed inside the metal frame 11, transparent glass 13 is fixedly installed at the tail ends of the fixing screws 12, the transparent glass 13 is fixed to the cabinet plate 10 through the fixing screws 12 by the metal frame 11, the transparent glass 13 is fixed to the cabinet plate 10 through the metal frame 11 matched with the fixing screws 12, the transparent glass 13 is fixed to the cabinet plate 10 through the cabinet plate 10, the inside working condition of the vacuum chamber 2 can be observed through the transparent glass 13 fixed to the front end of the cabinet plate 10 when the coating machine main body 1 works, and the convenience in use is improved.

The working principle is as follows: when the PVD coating device with automatic feeding and discharging is used, firstly, the rotating rod 6 which is rotatably connected with the right side of the coating machine main body 1 rotates by taking the joint of the left side and the coating machine main body 1 as the center of a circle, so that the rotating rod 6 drives the control cabinet 8 fixed on one side of the limit connecting piece 7 to adjust the position, the limit connecting piece 7 which is arranged at two ends of the rotating rod 6 in a fitting manner is internally provided with a toothed ring to increase the stability among the coating machine main body 1, the rotating rod 6 and the control cabinet 8, thereby achieving the purpose of freely controlling the position of the control cabinet 8, clamping materials outside the coating machine main body 1 by the extension of the auxiliary electric control rod 406 and the flexible electric two-finger clamping jaw 407, pulling the flexible electric two-finger clamping jaw 407 which clamps the materials to ascend by the auxiliary electric control rod 406, and then rotating the hydraulic rod 404 which is vertically arranged at the left side of the auxiliary electric control rod 406 towards the inside of the vacuum chamber 2 under the driving of the servo motor 405, make flexible electronic two finger grip 407 retract in real empty room 2, and the cabinet board 10 that the electric telescopic handle 402 that the pulling front end rotated the installation and electric telescopic handle 402 rear end rotated and is connected reverses to the right side when hydraulic stem 404 rotated to reset, make hydraulic stem 404 reset and cooperate electric telescopic handle 402 to retract simultaneously pulling cabinet board 10 around hinge 9 rotation and carry out the closure with coating machine main part 1 front end, vacuum room 2 to the inside setting of coating machine main part 1 seals, thereby reach automatic feeding's mesh, and metal frame 11 cooperation fixed screw 12 of cabinet board 10 front end setting fixes clear glass 13 and cabinet board 10, and the clear glass 13 that coating machine main part 1 during operation accessible cabinet board 10 front end was fixed observes the operating condition in vacuum room 2 inside, improve the convenient degree of use.

The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to practitioners skilled in this art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.

Claims

1. The utility model provides an automatic go up PVD coating device of unloading, includes coating machine main part (1) and centre gripping subassembly (4), its characterized in that: vacuum chamber (2) have been seted up at the middle part of coating machine main part (1), and the top inner wall fixed mounting of vacuum chamber (2) has limit baffle (3) for install in the front end of limit baffle (3) centre gripping subassembly (4) of transporting from top to bottom the material, centre gripping subassembly (4) include connecting block (401), electric telescopic handle (402), connecting sleeve (403), hydraulic stem (404), servo motor (405), supplementary electric control pole (406) and flexible electronic two-finger clamping jaw (407), the front end of connecting block (401) is rotated and is installed electric telescopic handle (402), and the end-to-end connection of electric telescopic handle (402) has connecting sleeve (403), the inner wall fixed mounting of connecting sleeve (403) has hydraulic stem (404), and the left side top fixed mounting of hydraulic stem (404) has servo motor (405), the top of servo motor (405) is fixed with electric control machine main part (1), automatically controlled pole (406) are installed perpendicularly to the right-hand member of coating hydraulic stem (404), and the bottom of supplementary pole (406) is provided with flexible electronic two-finger clamping jaw (407).

2. The PVD coating device with automatic feeding and discharging as recited in claim 1, wherein an air exhaust pipeline (5) is connected to the top of the left side of the coating machine main body (1), and the air exhaust pipeline (5) is connected with the vacuum chamber (2) in a penetrating manner.

3. The PVD coating device with automatic loading and unloading function as claimed in claim 1, wherein a rotating rod (6) is arranged on the right side of the coating machine main body (1), and a limiting connecting piece (7) is attached to the right end of the rotating rod (6).

4. The PVD coating device with automatic loading and unloading as recited in claim 3, wherein a control cabinet (8) is fixedly mounted at the right end of the limiting connecting piece (7), and the top of the left side of the control cabinet (8) is communicated with the air exhaust pipeline (5).

5. The PVD coating device with automatic feeding and discharging as recited in claim 1, wherein a hinge (9) is arranged on the left side of the coating machine main body (1), and a cabinet plate (10) is rotatably mounted on the coating machine main body (1) through the hinge (9).

6. The PVD coating device capable of feeding and discharging automatically as recited in claim 5, wherein a metal frame (11) is disposed at the front end of the cabinet plate (10), and a fixing screw (12) is fixedly mounted inside the metal frame (11).

7. The PVD coating device with automatic loading and unloading as recited in claim 6, wherein a transparent glass (13) is fixedly mounted at the end of the fixing screw (12), and the transparent glass (13) is fixed to the cabinet plate (10) by the metal frame (11) through the fixing screw (12).