CN216337917U - Plasma rotary dust removing equipment - Google Patents
Plasma rotary dust removing equipment Download PDFInfo
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- CN216337917U CN216337917U CN202122930006.7U CN202122930006U CN216337917U CN 216337917 U CN216337917 U CN 216337917U CN 202122930006 U CN202122930006 U CN 202122930006U CN 216337917 U CN216337917 U CN 216337917U
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- dust removing
- equipment body
- supporting shaft
- dust
- collecting equipment
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Abstract
The utility model discloses plasma rotary dust removing equipment, which comprises a dust removing equipment body, wherein one side of the top end of the dust removing equipment body is inserted and connected with a dust removing pipeline, one side of the dust removing equipment body is fixedly provided with a motor, the top end inside the dust removing equipment body is provided with a groove, the inside of the groove is rotatably connected with a screw rod, one end part of the screw rod is sleeved with an auxiliary block in a threaded manner, one side of the auxiliary block is inserted and connected with a first supporting shaft, one end part of the first supporting shaft is fixedly sleeved with an auxiliary plate, and the auxiliary block, a third supporting shaft, a movable frame, an extension plate, a cleaning sleeve and the motor are arranged in the plasma rotary dust removing equipment, the quality of dust cleaning of the dust removing equipment body is improved.
Description
Technical Field
The utility model relates to the technical field of vacuum coating equipment, in particular to plasma rotary dust removal equipment.
Background
The vacuum coating machine mainly refers to a coating film needing to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and the like.
However, the existing rotary dust removing equipment still has some defects:
the environment when needing to guarantee the coating film is enough clean, and when the coating film, but current dust collecting equipment adopts dust absorption pipeline to absorb the dust of inside usually and reaches the effect of dust removal, and the surface of coating film board still has more dust adhesion on its surface, and it is relatively poor to lead to the film quality after the processing, and the dust that the coating film board cleared up simultaneously falls the inside of equipment easily.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide plasma rotary dust removal equipment to solve the problems that more dust still adheres to the surface of a coated plate in the background technology, the quality of a processed film is poor, and the dust cleaned by the coated plate easily falls into the equipment.
In order to achieve the purpose, the utility model provides the following technical scheme: plasma rotating dust removing equipment, including the dust collecting equipment body, one side interlude on dust collecting equipment body top is connected with dust removal pipeline, one side fixed mounting of dust collecting equipment body has the motor, the recess has been seted up on the inside top of dust collecting equipment body, the inside rotation of recess is connected with the lead screw, a tip thread bush of lead screw is equipped with the auxiliary block, one side interlude of auxiliary block is connected with first supporting shaft, a tip fixed cover of first supporting shaft is equipped with the accessory plate, another tip of first supporting shaft is equipped with two first connecting plates, the inside rotation of dust collecting equipment body is connected with the coating film board.
As a preferred technical scheme of the present invention, the other end of the first support shaft is movably sleeved with the two first connection plates, one side of each of the two first connection plates is connected with a second support shaft in a penetrating manner, and one end of each of the two second support shafts is movably sleeved with an extension plate.
As a preferable technical solution of the present invention, a third support shaft is inserted and connected to a front surface of the auxiliary plate, and a support sleeve is movably sleeved at one end of the third support shaft.
As a preferable technical scheme of the utility model, both sides of the support sleeve are movably hinged with movable frames, and the opening diameter of the third support shaft is smaller than that of the support sleeve.
As a preferable technical scheme of the utility model, the bottom ends of the two extension plates are movably hinged with cleaning sleeves, and the surfaces of the two cleaning sleeves are provided with sponges.
According to a preferable technical scheme, clamping grooves are formed in two sides of the inner wall of the dust removing device body, clamping blocks are clamped and connected inside the two clamping grooves, and a placing box is fixedly installed between the inner walls of the two clamping blocks.
As a preferable technical scheme of the present invention, the opening diameters of the two clamping blocks are smaller than the opening diameters of the two clamping grooves, and the two clamping blocks are arranged at corresponding positions.
Compared with the prior art, the utility model has the beneficial effects that:
1. according to the plasma rotary dust removing equipment, the auxiliary block, the third supporting shaft, the movable frame, the extension plate, the cleaning sleeve and the motor are arranged, when the motor is started, the screw rod rotates in the groove to drive the auxiliary block sleeved with the screw thread at one end of the screw rod to move, when the auxiliary block moves, the auxiliary plate can drive the first connecting plates which are connected in an inserting mode to move, the two sponges are tightly attached to the surface of the coated plate, and the two cleaning sleeves are connected through the two extension plates, so that stains or dust attached to the surface of the coated plate can be cleaned in the moving process of the auxiliary block, the used sponges can be detached, and the dust cleaning quality of the dust removing equipment body is improved.
2. According to the plasma rotary dust removal equipment, the clamping grooves, the clamping blocks, the placing box and the film plating plate are arranged, the placing box is located at the bottom of the film plating plate, when the two cleaning sleeves and the surface of the film plating plate slide in a friction mode, impurities such as dust and the like attached to the surface of the film plating plate can be quickly cleaned, the surface cleanliness of the film plating plate is improved, the cleaned impurities fall into the placing box along with gravity to be collected, the two clamping blocks are used for supporting the placing box, the placing box can be detached to clean the interior of the placing box, time and labor are saved, and the working efficiency of the dust removal equipment is improved.
Drawings
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is an enlarged view of the utility model at A in FIG. 1;
FIG. 3 is a partial bottom view of the present invention;
FIG. 4 is a partial side view of the present invention.
In the figure: 1. a dust removal device body; 2. a dust removal pipeline; 3. a motor; 4. a screw rod; 5. an auxiliary block; 6. a first support shaft; 7. an auxiliary plate; 8. a first connecting plate; 9. a second support shaft; 10. a third support shaft; 11. a support sleeve; 12. a movable frame; 13. a stretching plate; 14. cleaning the sleeve; 15. a clamping block; 16. a shelving box; 17. and (5) coating a film plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution of a plasma rotating dust removing apparatus:
the first embodiment is as follows:
as shown in fig. 1-3, the plasma rotating dust removing device comprises a dust removing device body 1, a dust removing pipeline 2 is inserted and connected to one side of the top end of the dust removing device body 1, a motor 3 is fixedly installed on one side of the dust removing device body 1, a groove is formed in the top end of the interior of the dust removing device body 1, a screw rod 4 is rotatably connected to the interior of the groove, an auxiliary block 5 is sleeved on one end of the screw rod 4 in a threaded manner, a first supporting shaft 6 is inserted and connected to one side of the auxiliary block 5, an auxiliary plate 7 is fixedly sleeved on one end of the first supporting shaft 6, two first connecting plates 8 are arranged on the other end of the first supporting shaft 6, a coated plate 17 is rotatably connected to the interior of the dust removing device body 1, the auxiliary plate 7 can also drive the two first connecting plates 8 which are inserted and connected to move, a second supporting shaft 9 is inserted and connected to one side of each of the two first connecting plates 8, and the two sponges are tightly attached to the surface of the coated plate 17, and the two cleaning sleeves 14 are connected by means of the two extension plates 13, so that dirt or dust attached to the surface of the film coating plate 17 can be cleaned in the process of moving the auxiliary block 5.
Example two:
on the basis of the first embodiment, as shown in fig. 1 and 4, the two sides of the support sleeve 11 are movably hinged with the movable frame 12, the opening diameter of the third support shaft 10 is smaller than that of the support sleeve 11, the two sides of the inner wall of the dust removing device body 1 are respectively provided with the clamping grooves, the clamping blocks 15 are respectively clamped and connected inside the two clamping grooves, and the placing box 16 is fixedly installed between the inner walls of the two clamping blocks 15.
The working principle is as follows: the dust removal pipeline 2 collects dust generated during vacuum coating intensively into the dust removal equipment body 1, the coating is generally to heat a target material to enable surface components to be evaporated out in a radical or ion form and to be settled on the surface of a substrate, namely, the surface of the coating plate 17 is wrapped, so that the surface of the coating plate 17 needs to be clean enough, a motor 3 is started, a screw rod 4 rotates in the same direction, then an auxiliary block 5 which is sheathed at one end part of the screw rod 4 by a thread is continuously moved, so that the two first connecting plates 8 are driven to move, one sides of two movable frames 12 are respectively connected with the back surfaces of two extension plates 13, when the two extension plates 13 swing, the amplitude is not too large, the two extension plates 13 drive two cleaning sleeves 14 to move, sponges installed on the two cleaning sleeves 14 are attached to the surface of the coating plate 17, so that when the two cleaning sleeves 14 slide, just can strike off the adnexed dust or spot on coating plate 17 surface, the inside of shelving case 16 will be dropped to the spot after scraping off, and two fixture blocks 15 are the block state, consequently can outwards pull fixture block 15, with its and dust collecting equipment body 1 alternate segregation to can be with shelving the inside dust secondary clearance of collecting of case 16, saved the time and the energy of later stage clearance.
In the description of the present invention, it is to be understood that the indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings and are only for convenience in describing the present invention and simplifying the description, but are not intended to indicate or imply that the indicated devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the present invention.
In the present invention, unless otherwise explicitly specified or limited, for example, it may be fixedly attached, detachably attached, or integrated; can be mechanically or electrically connected; the terms may be directly connected or indirectly connected through an intermediate, and may be communication between two elements or interaction relationship between two elements, unless otherwise specifically limited, and the specific meaning of the terms in the present invention will be understood by those skilled in the art according to specific situations.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. Rotatory dust collecting equipment of plasma, including dust collecting equipment body (1), its characterized in that: one side interlude on dust collecting equipment body (1) top is connected with dust removal pipeline (2), one side fixed mounting of dust collecting equipment body (1) has motor (3), the inside top of dust collecting equipment body (1) is seted up flutedly, the inside rotation of recess is connected with lead screw (4), a tip thread bush of lead screw (4) is equipped with auxiliary block (5), one side interlude of auxiliary block (5) is connected with first supporting shaft (6), a tip fixed cover of first supporting shaft (6) is equipped with accessory plate (7), another tip of first supporting shaft (6) is equipped with two first connecting plates (8), the inside rotation of dust collecting equipment body (1) is connected with coated sheet (17).
2. The plasma rotary dust removing apparatus according to claim 1, wherein: another tip of first supporting shaft (6) is established with two first connecting plate (8) movable sleeve respectively, two one side of first connecting plate (8) all alternates and is connected with second back shaft (9), two the equal movable sleeve of a tip of second back shaft (9) is equipped with extension board (13).
3. The plasma rotary dust removing apparatus according to claim 1, wherein: the front surface of the auxiliary plate (7) is connected with a third supporting shaft (10) in a penetrating mode, and a supporting sleeve (11) is movably sleeved at one end of the third supporting shaft (10).
4. The plasma rotary dust removing apparatus according to claim 3, wherein: the two sides of the supporting sleeve (11) are movably hinged with movable frames (12), and the opening diameter of the third supporting shaft (10) is smaller than that of the supporting sleeve (11).
5. The plasma rotary dust removing apparatus according to claim 2, wherein: the bottom of two extension board (13) all activity hinge joint has clean cover (14), two the surface of clean cover (14) all is equipped with the sponge.
6. The plasma rotary dust removing apparatus according to claim 1, wherein: the dust removing equipment is characterized in that clamping grooves are formed in two sides of the inner wall of the dust removing equipment body (1), clamping blocks (15) are clamped and connected inside the two clamping grooves, and a placing box (16) is fixedly installed between the inner walls of the two clamping blocks (15).
7. The plasma rotary dust removing apparatus according to claim 6, wherein: the opening diameters of the two clamping blocks (15) are smaller than those of the two clamping grooves, and the positions of the two clamping blocks (15) are corresponding to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122930006.7U CN216337917U (en) | 2021-11-26 | 2021-11-26 | Plasma rotary dust removing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122930006.7U CN216337917U (en) | 2021-11-26 | 2021-11-26 | Plasma rotary dust removing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216337917U true CN216337917U (en) | 2022-04-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122930006.7U Active CN216337917U (en) | 2021-11-26 | 2021-11-26 | Plasma rotary dust removing equipment |
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| CN (1) | CN216337917U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115890522A (en) * | 2022-11-29 | 2023-04-04 | 江苏迪丞光电材料有限公司 | Clamp for alloy target surface machining |
-
2021
- 2021-11-26 CN CN202122930006.7U patent/CN216337917U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115890522A (en) * | 2022-11-29 | 2023-04-04 | 江苏迪丞光电材料有限公司 | Clamp for alloy target surface machining |
| CN115890522B (en) * | 2022-11-29 | 2023-10-17 | 江苏迪丞光电材料有限公司 | Clamp for alloy target surface machining |
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