CN2675685Y - Evaporation coating machine with radio frequency plasma polymerization - Google Patents
Evaporation coating machine with radio frequency plasma polymerization Download PDFInfo
- Publication number
- CN2675685Y CN2675685Y CN 200420032576 CN200420032576U CN2675685Y CN 2675685 Y CN2675685 Y CN 2675685Y CN 200420032576 CN200420032576 CN 200420032576 CN 200420032576 U CN200420032576 U CN 200420032576U CN 2675685 Y CN2675685 Y CN 2675685Y
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- China
- Prior art keywords
- chamber
- chamber body
- radio
- radio frequency
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 35
- 238000000576 coating method Methods 0.000 title claims abstract description 35
- 238000001704 evaporation Methods 0.000 title claims abstract description 31
- 230000008020 evaporation Effects 0.000 title claims abstract description 29
- 238000006116 polymerization reaction Methods 0.000 title abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 10
- 230000000630 rising effect Effects 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 abstract description 19
- 230000001681 protective effect Effects 0.000 abstract description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 11
- 229910052782 aluminium Inorganic materials 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 6
- 239000002253 acid Substances 0.000 abstract 1
- 239000003513 alkali Substances 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 230000002349 favourable effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000003595 mist Substances 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- 230000000740 bleeding effect Effects 0.000 description 4
- 239000007888 film coating Substances 0.000 description 4
- 238000009501 film coating Methods 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005269 aluminizing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
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Abstract
An evaporation coating machine with radio-frequency plasma polymerization is composed of vacuum chamber (coating chamber) and air pumping system. The vacuum chamber (coating chamber) comprises a chamber body, a chamber door, an evaporation source which is positioned in the chamber body and fixed on an upper cover of the chamber body, a power supply connected with two electrodes of the evaporation source, a working frame which is positioned in the chamber body and connected with a rotating mechanism, and two Radio Frequency (RF) targets which are symmetrically arranged in the chamber body, wherein the RF targets are fixed through a water outlet pipe and a water inlet pipe which are matched with the RF targets and are arranged on the wall of the chamber body for cooling, and the water outlet pipe is also used as an electrode of the RF targets and is connected with the. The film plating machine can plate an aluminum film on the lamps of automobiles and motorcycles and also plate a plasma polymerization protective film on the lamps of the automobiles and motorcycles, is favorable for simplifying a film plating process, enables the production scale to be large, stabilizes the product quality, and ensures that the products plated with the protective film have the performances of acid and alkali resistance, salt mist resistance and moisture resistance.
Description
Technical field
The utility model belongs to vacuum plating unit, particularly a kind of vacuum plating unit that is used for automobile, motorcycle light fixture plated film.
Background technology
The existing vacuum plating unit that is used for automobile, motorcycle light fixture plated film is made of vacuum chamber and air-bleed system, and vacuum chamber comprises the chamber door that is provided with on chamber body, the chamber body, is positioned at the chamber body and is fixed on the evaporation source of chamber body loam cake, the evaporation power supply that is connected with evaporation source two electrodes, the falsework that is positioned at the chamber body and is connected with rotating mechanism.Therefore, can only be opposite to automobile, motorcycle light fixture vacuum evaporation coating aluminium on the falsework.And automobile, motorcycle light fixture only cover the aluminium film is undesirable; also must plate layer protecting film at aluminize back spraying layer protecting film or employing bias method; so not only cause the coating technique flow process complexity of light fixture, and be difficult to guarantee the quality of light fixture.
Summary of the invention
The novel purpose of this use is to overcome the deficiencies in the prior art, provide a kind of can aluminium plating film, vacuum plating unit that again can protective film coating.
The novel technical scheme of this use is: according to vacuum vapor plating principle and vacuum radio frequency plasma discharge principle, existing vacuum plating unit is improved, in the chamber body of its vacuum chamber (coating chamber), set up two radio frequencies (RF) target, two radio frequencies (RF) target is installed in the chamber body of vacuum chamber symmetrically, by supporting with it be installed on the body wall of chamber be used for the refrigerative rising pipe and water inlet pipe is fixed, the electrode of rising pipe or water inlet pipe double as radio frequency (RF) target is connected with radio frequency (RF) power supply; Owing to set up radio frequency (RF) target, air-bleed system is designed to two covers, a cover and evaporation coating coupling, a cover and radio-frequency plasma plated film coupling.
Radio frequency (RF) target both can be the cambered surface tabular body, can be again the plane tabular body, was composited by stainless steel and red copper.The size of radio frequency (RF) target, according to vacuum chamber (coating chamber) or by the decision of plating matrix size, radio frequency (RF) power is determined by the firmness of vacuum chamber (coating chamber) diameter and quilt plating base film.
The utlity model has following beneficial effect:
1, because the evaporation source of evaporation coating both had been installed in the vacuum chamber; radio frequency (RF) target of radio-frequency plasma polymerization plated film is installed again; thereby this kind vacuum plating unit can plate the plasma polymerization protective membrane to automobile, motorcycle light fixture again to automobile, motorcycle light fixture aluminium plating film.
2, owing to can in vacuum plating unit, finish in the lump to automobile, motorcycle light fixture aluminium plating film and protective membrane, thus the coating technique of automobile, motorcycle light fixture is simplified, good reproducibility, constant product quality, industrial scaleization, cost reduces.
3, radio frequency (RF) plasma polymerization film also can be used as the protective membrane of optical protection layer, moistureproof antireflecting film, antirust and magnetic recording media.
Description of drawings
Fig. 1 is a kind of structure iron of the vacuum chamber (coating chamber) of coating equipment provided by the utility model;
Fig. 2 is the A-A sectional view of Fig. 1;
Fig. 3 is a kind of shape structural map of radio frequency (RF) target;
Fig. 4 is the B-B sectional view of Fig. 3;
Fig. 5 is a kind of structural representation of coating equipment provided by the utility model.
Among the figure, 1-radio frequency (RF) power supply, 2-evaporation power supply, 3-radio frequency (RF) target, 4-gas-filled valve, 5-evaporation source, 6-rising pipe, 7-water inlet pipe, 8-work rest, 9-rotating mechanism, 10-chamber door, 11-chamber body, 12-vacuumometer, 13-intake valve, 14-purging valve, 15-mechanical pump, 16-P600 mechanical pump, 17-lobe pump, 18-300 diffusion pump, 19-900 diffusion pump, 20-high vacuum valve, the little high vacuum valve of 21-, 22-keep valve, 23-and keep valve, 24-by-pass valve, 25-for a short time and take out valve in advance.
Embodiment
The structure that is added with the evaporation coating machine of radio frequency (RF) plasma polymerization provided by the utility model is described further by embodiment below in conjunction with accompanying drawing.
Coating equipment in the present embodiment is the vertical single chamber coating equipment of Φ 850mm, high 1000mm, highest attainable vacuum 3 * 10
-4Pa, structure is made of vacuum chamber (coating chamber) and air-bleed system as shown in Figure 5.The structure of vacuum chamber (coating chamber) as shown in Figure 1 and Figure 2, comprise the chamber door 10 that is provided with on chamber body 11, the chamber body, be positioned at the chamber body and be fixed on chamber body loam cake evaporation source 5, the evaporation power supply 2 that is connected with evaporation source two electrodes, be positioned at the chamber body and the falsework 8, the end that are connected with rotating mechanism 9 are positioned at chamber body one end and are positioned at two radio frequencies (RF) target 3 that the external gas-filled valve in chamber 4, chamber body are provided with symmetrically, the radio frequency target is fixing by the rising pipe 6 and the water inlet pipe 7 that are installed in chamber body wall on supporting with it, the electrode of rising pipe 6 double as radio frequency targets is connected with radio-frequency power supply 1.Radio frequency (RF) target 3 is cambered surface or the plane tabular body that stainless steel and red copper are composited, and the red copper part is connected with water inlet pipe 7 with rising pipe 6; If cambered surface tabular body, the radius R of circular arc are 400mm, chord length 230mm, the long 700mm of plate, as shown in Figure 1 and Figure 2; If the plane tabular body is of a size of 700mm * 230mm, as shown in Figure 3, Figure 4.The power of radio frequency (RF) power supply is 1～5KW.Air-bleed system has two covers, and a cover is the evaporation plating aluminium air-bleed system, and a cover is radio frequency (RF) plasma body protective film coating air-bleed system; The evaporation plating aluminium air-bleed system comprises intake valve 13, the purging valve 14 that is connected with vacuum chamber (coating chamber) by pipe fitting, the P600 mechanical pump 16 that is connected in series by pipe fitting, lobe pump 17, take out valve 25 (taking out valve 25 in advance is connected with the bleeding point of vacuum chamber by pipe fitting) in advance, high vacuum valve 20,900 diffusion pump 19 that are connected in series by pipe fitting, keep valve 22, P600 mechanical pump 16 (high vacuum valve 20 is connected with the bleeding point of vacuum chamber by pipe fitting) and be connected two by-pass valve 24 between the P600 mechanical pump 16, as shown in Figure 5; Radio frequency (RF) plasma body protective film coating air-bleed system by mechanical pump 15, keep valve 23,300 diffusion pump 18 and little high vacuum valve 21 for a short time and be in series by pipe fitting, little high vacuum valve 21 is connected with the bleeding point of vacuum chamber by pipe fitting.
The coating operation of coating equipment is as follows:
Shut vacuum chamber (coating chamber) chamber door 10; purging valve 14 cuts out; keeping valve 22 closes; take out valve 25 in advance and by-pass valve 24 is opened; two 16 pairs of vacuum chambers of mechanical pump (coating chamber) are taken out in advance; close to certain vacuum degree by-pass valve 24; keeping valve 22 opens; mechanical pump 16 and lobe pump 17 continue vacuum chamber (coating chamber) is taken out in advance; taking out valve 25 during to 5Pa in advance closes; high vacuum valve 20 is opened simultaneously; mechanical pump 16 and 19 pairs of vacuum chambers of 900 diffusion pump (coating chamber) carry out height and take out; vacuumometer 12 is when aluminizing vacuum tightness required; rotating mechanism 9 work; work rest 8 is rotated; evaporation power supply 2 is to evaporation source 5 power supplies; evaporation source 5 is to aluminium flake process preheating and evaporation above it; evaporation al deposition matrix surface on work rest; evaporation plating aluminium finishes; high vacuum valve 20 cuts out; little high vacuum valve 21 is opened; mechanical pump 15 and 18 pairs of vacuum chambers of 300 diffusion pump (coating chamber) carry out bleeding the second time, and intake valve 13 is opened simultaneously, advances to form the gas of protective membrane to vacuum chamber (coating chamber); vacuumometer is during to desired vacuum tightness; radio frequency (RF) power supply 1 is given radio frequency (RF) target 3 by rising pipe 6 coupling energies, and vacuum chamber (coating chamber) produces plasma glow discharge, and the filmogen in the gas of formation protective membrane forms protective membrane through plasma polymerization deposition on the surface of matrix institute aluminium plating film; the plasma polymerization protective film coating finishes; little high vacuum valve 21 cuts out, and work rest 8 rotates and stops, and purging valve 14 is opened; make atmosphere enter vacuum chamber (coating chamber), plated film finishes.
Claims (2)
1, a kind of radio-frequency plasma polymeric evaporation coating machine that is added with, constitute by vacuum chamber and air-bleed system, vacuum chamber comprises the chamber door (10) that is provided with on chamber body (11), the chamber body, be positioned at the chamber body and be fixed on chamber body loam cake evaporation source (5), the evaporation power supply (2) that is connected with evaporation source two electrodes, be positioned at the chamber body and the falsework (8), the end that are connected with rotating mechanism (9) are positioned at chamber body one end and are positioned at the external gas-filled valve in chamber (4), it is characterized in that:
Vacuum chamber also comprises two the radio frequency targets (3) that are provided with symmetrically in the body of chamber, the radio frequency target is fixing by the rising pipe (6) and the water inlet pipe (7) that are installed in chamber body wall on supporting with it, the electrode of rising pipe (6) or water inlet pipe (7) double as radio frequency target is connected with radio-frequency power supply (1)
Air-bleed system is two covers, a cover and evaporation coating coupling, a cover and radio-frequency plasma plated film coupling.
2, the radio-frequency plasma polymeric evaporation coating machine that is added with according to claim 1 is characterized in that radio frequency target (3) is cambered surface or the plane tabular body that stainless steel and red copper are composited.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420032576 CN2675685Y (en) | 2004-01-16 | 2004-01-16 | Evaporation coating machine with radio frequency plasma polymerization |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420032576 CN2675685Y (en) | 2004-01-16 | 2004-01-16 | Evaporation coating machine with radio frequency plasma polymerization |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2675685Y true CN2675685Y (en) | 2005-02-02 |
Family
ID=34483764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420032576 Expired - Fee Related CN2675685Y (en) | 2004-01-16 | 2004-01-16 | Evaporation coating machine with radio frequency plasma polymerization |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2675685Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102816998A (en) * | 2012-07-17 | 2012-12-12 | 杭州彭公玻璃灯具有限公司 | Aluminizing machine for lampshade |
| CN104313545A (en) * | 2014-09-26 | 2015-01-28 | 马瑞利汽车零部件(芜湖)有限公司 | Storage rack of aluminizing machine |
| CN111254397A (en) * | 2020-03-06 | 2020-06-09 | 上海良勤实业有限公司 | Sputtering aluminum plating system and process for car lamp decorative ring |
-
2004
- 2004-01-16 CN CN 200420032576 patent/CN2675685Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102816998A (en) * | 2012-07-17 | 2012-12-12 | 杭州彭公玻璃灯具有限公司 | Aluminizing machine for lampshade |
| CN102816998B (en) * | 2012-07-17 | 2014-11-19 | 杭州彭公玻璃灯具有限公司 | Aluminizing machine for lampshade |
| CN104313545A (en) * | 2014-09-26 | 2015-01-28 | 马瑞利汽车零部件(芜湖)有限公司 | Storage rack of aluminizing machine |
| CN111254397A (en) * | 2020-03-06 | 2020-06-09 | 上海良勤实业有限公司 | Sputtering aluminum plating system and process for car lamp decorative ring |
| CN111254397B (en) * | 2020-03-06 | 2022-02-11 | 上海良勤实业有限公司 | Sputtering aluminum plating system and process for car lamp decorative ring |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |