CN102899619A - Improved structure of vacuum coating device - Google Patents
Improved structure of vacuum coating device Download PDFInfo
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- CN102899619A CN102899619A CN2011102100481A CN201110210048A CN102899619A CN 102899619 A CN102899619 A CN 102899619A CN 2011102100481 A CN2011102100481 A CN 2011102100481A CN 201110210048 A CN201110210048 A CN 201110210048A CN 102899619 A CN102899619 A CN 102899619A
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- carriage
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- heating
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Abstract
An improved structure of a vacuum coating device comprises a vacuum deposition chamber, a carriage positioned in the vacuum deposition chamber and a target, wherein the carriage has a dome-shaped structure; the inner side of the carriage is downwardly provided with a plurality of hooks for fixing workpieces; the top center of the carriage is rotatingly fixed on the top of the vacuum deposition chamber through a rotary shaft; the rotary shaft is driven by a control motor to rotate; at least one resistor heater capable of heating the workpieces on the carriage is arranged between the carriage and the top of the vacuum deposition chamber; the target is positioned under the carriage; the heating volatilization of the target is controlled by a heating mechanism to coat the workpieces on the carriage; the heating mechanism is a groove-shaped electric heater arranged in the vacuum deposition chamber and used for disposing the target; two sides of the groove-shaped electric heater are provided with a counter electrode; and the other end of the counter electrode is leaded out of the vacuum deposition chamber and is connected with the secondary winding leading-out terminal of a power transformer. The improved structure of the vacuum coating device enables a workpiece arranged carriage driving mechanism to be simple and practical.
Description
Technical field
The invention belongs to filming equipment, particularly a kind of improved structure at the indoor processing unit (plant) to the workpiece plated film of vacuum deposit chamber.
Background technology
Vacuum coating technology is in economic society every field extensive application, particularly science and technology develop rapidly, improving constantly of people's life and continuing to bring out of high-tech coated product, give the development of vacuum coating technology and apply and brought new opportunity.
Vacuum plating mainly refers to the plated film that a class need to be carried out under higher vacuum, specifically comprise many types, comprises the vacuum ionic evaporation, magnetron sputtering, and the MBE molecular beam epitaxy, PLD pulsed laser depositions etc. are a variety of.Need the substrate that is called as of plated film, the material of plating is called as target.Substrate and target coexist in the vacuum chamber.Heat exactly target such as evaporation coating, make surface component be evaporated out with atomic group or ionic species, and be deposited in substrate surface, form film by film process.Common evaporation coating is exactly that the carriage of placing film-coating workpiece places vacuum deposit chamber indoor, this carriage rotates by annular ball bearing and is fixed in the ring-type bracing frame, and be provided with the ring-type tooth bar this ring-type bracing frame ring week, and the driving gear that is engaged with and CD-ROM drive motor control rotation, realize that the related workpiece of this carriage rotates, and target is placed in this carriage below, and this target is by the heating arrangements heated volatile, thus realization workpiece high temperature coating operation in vacuum chamber.Yet the carriage turns mechanism that drives place work piece is very loaded down with trivial details, is unfavorable for placing the workpiece of various size.
Summary of the invention
In order to overcome defects, the invention provides a kind of improved structure of the vacuum coater based on the vacuum sputtering deposition technique, so that the carriage drive mechanism of place work piece is simple and practical.
The present invention for the technical scheme that solves its technical problem and adopt is: a kind of improved structure of vacuum coater, comprise the vacuum moulding machine chamber and be positioned at the indoor carriage of this vacuum deposit chamber and target, this carriage rotates by the first rotating shaft and bearing and is fixed in this vacuum moulding machine chamber top, and this first rotating shaft is by related this carriage turns of CD-ROM drive motor control, this target is positioned at this carriage below, controls this target heating evaporation by heating arrangements.
As a further improvement on the present invention, this carriage is dome-like structure, and this carriage inboard is to having a plurality of hooks for fixation workpiece, and this carriage top center is rotated by this first rotating shaft and bearing and is fixed in this vacuum moulding machine chamber top.
As a further improvement on the present invention, be provided with at least an energy between this carriage and this vacuum moulding machine chamber top to the mechanism that preheats of the heating of the workpiece on this carriage.
As a further improvement on the present invention, this to preheat mechanism be electric-heating-wire-heating body or infrared heating body.
As a further improvement on the present invention, this heating arrangements is that to be installed on this vacuum deposit chamber indoor and can place the groove shape METAL HEATING PROCESS body of this target, these groove shape METAL HEATING PROCESS body both sides are provided with pair of electrodes, this is drawn behind this vacuum moulding machine chamber the electrode the other end, is connected with the secondary winding leading-out end of supply transformer respectively.
As a further improvement on the present invention, this target is also controlled relatively this carriage turns by rotating mechanism, this rotating mechanism is for being fixed in the second rotating shaft of this bottom, vacuum deposit chamber indoor by bearing, this the second rotating shaft upper end is fixed with insulated connecting rod one end, and this insulated connecting rod at right angles is connected with this second rotating shaft, this insulated connecting rod the other end is fixed this groove shape electric heating element, this to the electrode the other end along this insulated connecting rod, and draw by the two through hole in this second rotating shaft, the outdoor rear fixed idler whell of this vacuum deposit chamber is stretched out in this second rotating shaft lower end, and rotates by travelling belt and motor control.
As a further improvement on the present invention, this vacuum moulding machine chamber sidepiece is provided with the actuating doors that can load and unload film-coating workpiece.
Useful technique effect of the present invention is: described carriage top center is rotated to be fixed in by the first rotating shaft and is dome structure, this first rotating shaft can be driven by the control motor again and rotate, like this this carriage drive rotating mechanism is designed behind this top, vacuum deposit chamber indoor, film-coating workpiece is positioned over the more convenient to operate of this carriage.
Described target is also by relative this carriage turns of rotating mechanism control, this rotating mechanism is for being fixed in the second rotating shaft of this bottom, vacuum deposit chamber indoor by bearing, this the second rotating shaft upper end is fixed with insulated connecting rod one end, and this insulated connecting rod at right angles is connected with this second rotating shaft, this insulated connecting rod the other end is fixed this groove shape electric heating element, this to the electrode the other end along this insulated connecting rod, and draw by the two through hole in this second rotating shaft, the outdoor rear fixed idler whell of this vacuum deposit chamber is stretched out in this second rotating shaft lower end, and rotates by travelling belt and motor control.Carriage and target can be controlled respectively rotation like this, when target by behind the heating arrangements heated volatile, be deposited on this carriage workpiece coatings thick consistency more reasonable.
Description of drawings
Fig. 1 is half section structural representation of the present invention.
Contrast above accompanying drawing, be supplemented as follows:
1---vacuum moulding machine chamber 60---the second rotating shaft
2---carriage 61---bearing
3---target 63---roller
4---first rotating shaft 64---travelling belt
5---electric-heating-wire-heating body 66---motor
50---groove shape METAL HEATING PROCESS body 73---supply transformer
51---through hole 100---workpiece
52---insulated connecting rod
Embodiment
In conjunction with Fig. 1, further describe below the work:
A kind of improved structure of vacuum coater, comprise vacuum moulding machine chamber 1 and be positioned at this vacuum deposit chamber indoor carriage 2 and target 3, but these carriage 2 place work pieces 100, this carriage 2 is dome-like structure, this carriage inboard is to having a plurality of hooks for fixation workpiece, this carriage top center is rotated by this first rotating shaft 4 and bearing and is fixed in this vacuum moulding machine chamber 1 top, and this first rotating shaft 4 is rotated by related this carriage 2 of CD-ROM drive motor control, at least be provided with an energy between this carriage 2 and this vacuum moulding machine chamber 1 top to the mechanism that preheats of the heating of the workpiece on this carriage, this preheats mechanism is electric-heating-wire-heating body 5 (also can adopt infrared heating body), so that film-coating workpiece is in suitable coating temperature always, this target 3 is positioned at this carriage below, control this target heating evaporation by heating arrangements, realization is to workpiece plated film on this carriage, described like this target is after the heating arrangements heating, its component is evaporated to the workpiece on the dome structure, reach the vacuum plating purpose, this heating arrangements is that to be installed on this vacuum deposit chamber indoor and can place the groove shape METAL HEATING PROCESS body of this target 3, these groove shape METAL HEATING PROCESS body both sides are provided with pair of electrodes, this is drawn behind this vacuum moulding machine chamber 1 the electrode the other end, be connected with the secondary winding leading-out end of supply transformer 73 respectively, this vacuum moulding machine chamber sidepiece is provided with actuating doors, is convenient to load and unload film-coating workpiece on this carriage.
For target evaporation composition more uniform coated in each surface of workpiece, this target 3 also can rotate relative to this carriage 2 by rotating mechanism control, second rotating shaft 60 of this rotating mechanism for being fixed in this vacuum moulding machine chamber 1 inside bottom by bearing 61, these the second rotating shaft 60 upper ends and insulated connecting rod 52 1 ends are fixed, and this insulated connecting rod 52 at right angles is connected with this second rotating shaft 60, these insulated connecting rod 52 the other ends are fixed this groove shape METAL HEATING PROCESS body 50, this to the electrode the other end along this insulated connecting rod 52, and draw by the two through hole 51 in this second rotating shaft 60, this vacuum moulding machine chamber 1 outer rear fixed idler whell 63 is stretched out in these the second rotating shaft 60 lower ends, and rotates by travelling belt 64 and motor 66 controls.
Described vacuum moulding machine chamber realizes that vacuum tightness belongs to prior art, is not innovation point of the present invention, does not state at this, and above-mentioned electric-heating-wire-heating mode also can adopt infrared heating body.
So-called METAL HEATING PROCESS body utilizes the metallic object two ends to connect alternating-current exactly, so that the metallic object heating produces heat, and Infrared Heating and metallic object heating are not innovative points of the present invention, belong to prior art, and no further details to be given herein.
Claims (7)
1. the improved structure of a vacuum coater, comprise vacuum moulding machine chamber (1) and be positioned at the indoor carriage of this vacuum deposit chamber (2) and target (3), it is characterized in that: this carriage (2) rotates by the first rotating shaft (4) and bearing and is fixed in this vacuum moulding machine chamber top, and this first rotating shaft (4) is rotated by CD-ROM drive motor related this carriage of control (2), this target (3) is positioned at this carriage below, controls this target heating evaporation by heating arrangements.
2. the improved structure of vacuum coater according to claim 1, it is characterized in that: this carriage (2) is dome-like structure, this carriage inboard is to having a plurality of hooks for fixation workpiece (100), and this carriage top center is rotated by this first rotating shaft (4) and bearing and is fixed in this vacuum moulding machine chamber (1) top.
3. the improved structure of vacuum coater according to claim 1 and 2 is characterized in that: be provided with at least an energy between this carriage (2) and this vacuum moulding machine chamber (1) top to the mechanism that preheats of the heating of the workpiece on this carriage.
4. the improved structure of vacuum coater according to claim 3, it is characterized in that: this preheats mechanism is electric-heating-wire-heating body (5) or infrared heating body.
5. the improved structure of vacuum coater according to claim 1 and 2, it is characterized in that: this heating arrangements is indoor and can place the groove shape METAL HEATING PROCESS body of this target (3) for being installed on this vacuum deposit chamber, these groove shape METAL HEATING PROCESS body both sides are provided with pair of electrodes, this is drawn behind this vacuum moulding machine chamber (1) the electrode the other end, and the secondary winding leading-out end with supply transformer (73) is connected respectively.
6. the improved structure of vacuum coater according to claim 5, it is characterized in that: this target (3) also can rotate relative to this carriage (2) by rotating mechanism control, second rotating shaft (60) of this rotating mechanism for being fixed in this vacuum moulding machine chamber (1) inside bottom by bearing (61), this the second rotating shaft (60) upper end is fixed with insulated connecting rod (52) one ends, and this insulated connecting rod (52) at right angles is connected with this second rotating shaft (60), this insulated connecting rod (52) the other end is fixed this groove shape METAL HEATING PROCESS body (50), this to the electrode the other end along this insulated connecting rod (52), and draw by the two through hole (51) in this second rotating shaft (60), the outer rear fixed idler whell (63) of this vacuum moulding machine chamber (1) is stretched out in this second rotating shaft (60) lower end, and rotates by travelling belt (64) and motor (66) control.
7. the improved structure of described vacuum coater according to claim 1, it is characterized in that: this vacuum moulding machine chamber sidepiece is provided with the actuating doors that can load and unload film-coating workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110210048.1A CN102899619B (en) | 2011-07-26 | 2011-07-26 | Improved structure of vacuum coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110210048.1A CN102899619B (en) | 2011-07-26 | 2011-07-26 | Improved structure of vacuum coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102899619A true CN102899619A (en) | 2013-01-30 |
| CN102899619B CN102899619B (en) | 2014-02-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110210048.1A Expired - Fee Related CN102899619B (en) | 2011-07-26 | 2011-07-26 | Improved structure of vacuum coating device |
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| Country | Link |
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| CN (1) | CN102899619B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103266301A (en) * | 2013-05-17 | 2013-08-28 | 合肥科晶材料技术有限公司 | Evaporation furnace capable of shortening distance and rapidly increasing and reducing temperature, and manufacturing method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2422291Y (en) * | 2000-06-07 | 2001-03-07 | 中国科学院沈阳科学仪器研制中心 | Vacuum coating film device |
| JP2009079276A (en) * | 2007-09-27 | 2009-04-16 | Showa Shinku:Kk | Vacuum vapor deposition apparatus |
| JP2009299129A (en) * | 2008-06-13 | 2009-12-24 | Toshiba Corp | Vacuum vapor deposition apparatus, and electronic beam irradiation method of the apparatus |
| CN202187056U (en) * | 2011-07-26 | 2012-04-11 | 御林汽配(昆山)有限公司 | Improved structure of vacuum coater |
-
2011
- 2011-07-26 CN CN201110210048.1A patent/CN102899619B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2422291Y (en) * | 2000-06-07 | 2001-03-07 | 中国科学院沈阳科学仪器研制中心 | Vacuum coating film device |
| JP2009079276A (en) * | 2007-09-27 | 2009-04-16 | Showa Shinku:Kk | Vacuum vapor deposition apparatus |
| JP2009299129A (en) * | 2008-06-13 | 2009-12-24 | Toshiba Corp | Vacuum vapor deposition apparatus, and electronic beam irradiation method of the apparatus |
| CN202187056U (en) * | 2011-07-26 | 2012-04-11 | 御林汽配(昆山)有限公司 | Improved structure of vacuum coater |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103266301A (en) * | 2013-05-17 | 2013-08-28 | 合肥科晶材料技术有限公司 | Evaporation furnace capable of shortening distance and rapidly increasing and reducing temperature, and manufacturing method thereof |
| CN103266301B (en) * | 2013-05-17 | 2016-02-24 | 合肥科晶材料技术有限公司 | Adjustable short range rapid temperature rise and drop evaporation stove and manufacture method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102899619B (en) | 2014-02-19 |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: HUAIAN YULIN METAL TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: YULIN VEHICLE FITTINGS (KUNSHAN) CO., LTD. Effective date: 20140820 |
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| C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 215325 SUZHOU, JIANGSU PROVINCE TO: 223300 HUAIAN, JIANGSU PROVINCE |
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| TR01 | Transfer of patent right |
Effective date of registration: 20140820 Address after: 223300 No. 267 Qianjiang Road, Huaiyin District, Jiangsu, Huaian Patentee after: Huaian Yulin Metal Technology Co., Ltd. Address before: Suzhou City, Jiangsu province 215325 town Kunshan City Zhaofeng Road No. 8 Patentee before: Yulin Auto Accessories (Kunshan) Co., Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140219 Termination date: 20160726 |