JP3195492B2 - Arc ion plating apparatus and arc ion plating system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an arc ion plating apparatus (hereinafter, referred to as an AIP apparatus) and an arc ion plating system (hereinafter, referred to as an AIP system) which are coating apparatuses utilizing vacuum arc discharge.
About.

[0002]

2. Description of the Related Art In the arc ion plating method, a vacuum arc discharge is generated between an anode (anode) provided in a vacuum chamber and a cathode (cathode) as an evaporation source (target), and a solid cathode is formed. In this method, a cathode material is evaporated from an arc spot generated on the surface, and the vapor is deposited on a work arranged in a vacuum chamber to coat a film. An AIP apparatus for realizing this arc ion plating method is disclosed in Japanese Patent Publication No. 58-3033 and Japanese Patent Publication No.
There is an apparatus disclosed in Japanese Patent Application Laid-Open No. 2-14690, and various improvements have been made since then.

In recent years, the arc ion plating method has been
Parts manufactured in large quantities (eg piston rings)
As a technique for coating a hard film on a steel sheet, coating a film with high productivity has become a major issue.

A conventional AIP for realizing high productivity
As an apparatus, for example, an AIP apparatus in which a work to be coated with a film is mounted on a work table that can be freely inserted into and removed from a vacuum chamber is known.

FIG. 23 shows the basic configuration of such an AIP device.
This will be described below. FIG. 1A is a top view, and FIG. 1B is a side sectional view. An anode 2 and a flat plate-shaped evaporation source (cathode) 3 are fixedly provided in a vacuum chamber 1, and a work 5 placed on a work table 4 is further arranged. An arc power source 3a is connected to the anode 2 and the evaporation source 3, and when an arc discharge is generated between the anode 2 and the evaporation source 3 in a vacuum, the target material on the surface of the evaporation source 3 evaporates instantaneously and simultaneously the metal ion It becomes 6 and jumps into the vacuum. On the other hand, when the bias power source 7 is applied to the work 5, the metal ions 6 are accelerated and adhere to the surface of the work 5 together with the reaction gas particles 8, and a dense hard film (TiN, TiC, TiC) is formed.
N, ZrN, Cr-N, etc.). The work table 4 incorporates a gear device that meshes with the drive gear 9, whereby the work 5 rotates by itself and at the same time the work table 4 itself also rotates in the direction a to revolve the work 5. In the vacuum chamber 1, a shield plate 12 is provided with metal ions 6.
Is provided internally with a radial opening.

Further, the vacuum chamber 1 has an opening / closing door 10 and a rail 11. When the vacuum chamber 1 is opened by the door 10, the work table 4 on which the work 5 is placed
Can be pulled out in the c direction along the rail 11.

In the AIP apparatus, when loading and unloading the workpieces 5 into and from the vacuum chamber 1, the workpieces 5 are not handled one by one, but a plurality of workpieces 5 are loaded in advance while being mounted on the work table 4 in advance. -Since the work 5 can be carried out, the time required for setting the work 5 can be greatly reduced, which is very advantageous in obtaining high productivity.

[0008] Further, A which can uniformly evaporate the coating material at a high speed from the flat plate-shaped evaporation source as described above.
An IP device is disclosed in, for example, Japanese Patent Application Laid-Open No. 4-224671. This AIP apparatus supplies arc power to the evaporation source independently from a plurality of arc power supplies,
High productivity is expected by making the consumption of the evaporation source uniform and enabling high-power operation.

[0009] Further, an AI which can be applied to an application requiring high productivity such as a piston ring.
As the P device, there is a type in which the evaporation source has a rod shape. In such an AIP apparatus, since the vapor of the film substance is generated radially from the rod-shaped evaporation source, by arranging the work so as to surround the evaporation source, it is possible to simultaneously coat many works with one evaporation source. It is noted that it can be done. Therefore, if the coating material can be uniformly evaporated from the rod-shaped evaporation source at a very high speed, it is possible to realize extremely high productivity.

[0010]

However, in the AIP apparatus employing the rod-shaped evaporation source, since the work is arranged at a position surrounding the evaporation source, it is difficult to use the AIP apparatus when the evaporation source is fixed in the vacuum chamber. Since the work and the evaporation source interfere and collide when loading and unloading the work mounted on the work table, the work cannot be loaded and unloaded as shown in FIG.

Therefore, it is conceivable to mount the rod-shaped evaporation source itself on the work table. According to this, although interference and collision between the work and the evaporation source can be avoided, it is difficult to cool the evaporation source. For reasons of device configuration,
High-efficiency steam generation at high current discharge has not been able to produce high productivity film coatings.

The AIP apparatus disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 4-224671 is an apparatus corresponding to only an evaporation source having a flat plate shape, and is described as being applied to an AIP apparatus having a rod-shaped evaporation source. I didn't.

Further, in the AIP apparatus shown in FIG. 23, the loading and unloading of the work is usually performed manually, and the work of replacing and cleaning the evaporation source, anode, shield plate, etc., which is often performed simultaneously with the loading and unloading of the work. However, manual intervention was indispensable. Although loading and unloading of the work is performed in a relatively short time, it takes a lot of time to replace and clean the evaporation source, anode, and shield plate, and these operations cannot be performed at night. The entire AIP device was at rest. In other words, there is a problem in realizing high productivity from the viewpoint of the operation rate of the AIP device.

The present invention has been made in view of the above situation, and provides an AIP apparatus and an AIP system employing a rod-shaped evaporation source, which can realize extremely high productivity by efficiently handling a work. The purpose is to do.

[0015]

According to a first aspect of the present invention, there is provided a vacuum chamber, a rod-shaped evaporation source provided in the vacuum chamber, and a surface disposed so as to surround the rod-shaped evaporation source. In an AIP apparatus having a work to be coated with a film, the vacuum chamber includes a lower lid on which the work is mounted, and a main body to which an upper end of the rod-shaped evaporation source is fixed, and the lower lid is attached to the main body. On the other hand, it is characterized in that it can be moved up and down relatively.

The invention according to claim 2 is the AIP apparatus according to claim 1, it is characterized in that the lower lid is capable of lifting relative to the body.

According to a third aspect of the present invention, in the AIP apparatus according to the second aspect , after lowering the lower lid until the upper end of the work is located below the lower end of the rod-shaped evaporation source, The work is horizontally movable with respect to the lower lid.

According to a fourth aspect of the present invention, in the AIP device according to the third aspect , the work is mounted on a work table mounted on the lower cover, and the work table is provided on the work table. The rack can be horizontally moved with respect to the lower lid by a rack provided and a pinion provided on the lower lid.

According to a fifth aspect of the present invention, in the AIP device according to the third aspect , the work is mounted on a work table mounted on the lower lid, and the work table is shielded together with the work. A plate is mounted.

According to a sixth aspect of the present invention, in the AIP device according to the fifth aspect , an anode is further mounted on the work table.

According to a seventh aspect of the present invention, there is provided a vacuum chamber, a rod-shaped evaporation source provided in the vacuum chamber,
In an AIP apparatus having a work disposed so as to surround the rod-shaped evaporation source and having a surface coated with a film, the vacuum chamber holds the main body to which one end of the rod-shaped evaporation source is fixed, and the work And a lid which is movable in the axial direction of the rod-shaped evaporation source relative to the main body, and the other end of the rod-shaped evaporation source is detachably connected to the lid. And arc power is supplied from both ends of the rod-shaped evaporation source.

According to an eighth aspect of the present invention, in the AIP device according to the seventh aspect , the electric connection means is configured such that a surface member supported by the lid via an elastic means is provided with the rod-shaped evaporation source. It is characterized in that it is configured to be able to contact the other end.

According to a ninth aspect of the present invention, there is provided a vacuum chamber, a rod-shaped evaporation source provided in the vacuum chamber,
An anode for generating an arc between the rod-shaped evaporation source;
In the AIP apparatus having a work provided so as to surround the rod-shaped evaporation source and having a surface coated with a film, the anode is a ring-shaped anode provided at both ends of the rod-shaped evaporation source. It is assumed that.

According to a tenth aspect of the present invention, there is provided a vacuum chamber, a rod-shaped evaporation source provided in the vacuum chamber,
An anode for generating an arc between the rod-shaped evaporation source;
A workpiece disposed so as to surround the rod-shaped evaporation source and having a surface coated with a film, wherein the anode is positioned at an even position on a circumference centered on the axis of the rod-shaped evaporation source. And a rod-shaped anode provided at a position between the rod-shaped evaporation source and the work, and arc power is supplied from both ends of the anode.

According to an eleventh aspect of the present invention, in the AIP apparatus according to the ninth or tenth aspect , arc power is supplied from both ends of the rod-shaped evaporation source.

According to a twelfth aspect of the present invention, in the AIP device according to the tenth aspect , the rod-shaped anode is used as a heater for preheating the work before the surface of the work is coated with a film. It is characterized by the following.

According to a thirteenth aspect of the present invention, there is provided one or more traveling vehicles provided with a traveling vehicle that can travel along one or more AIP devices for taking in and out a work table on which a work is mounted, and mounting the work table on the traveling vehicle. And the worktable is automatically moved in and out between the mounting part and the AIP device while the mounting part moves to a position facing the AIP device by the traveling of the traveling vehicle. An AIP system characterized by the following.

According to a fourteenth aspect of the present invention, in the AIP system according to the thirteenth aspect , the traveling cart is provided so as to be able to travel on a rail provided along the AIP device, and a plurality of the work tables are provided. A turntable that can be mounted is provided along the rail, and the worktable can be automatically exchanged between the turntable and the traveling vehicle.

According to a fifteenth aspect of the present invention, there is provided a rotary table for inserting and removing a work table on which a work is mounted between the plurality of AIP devices and changing the direction of the work table. A two-way conveyor that connects the plurality of rotary tables and transports the work table, and the rotary table located at one end can store a plurality of the work tables on which the processed work is mounted. One stocker is connected via a carry-out conveyor, and a second stocker capable of storing a plurality of the work tables on which the unprocessed works are mounted is connected to the rotary table located at the other end via a carry-in conveyor. An AIP system characterized in that:

[0030]

According to the first aspect of the present invention, when loading / unloading a work into / from the vacuum chamber, the work can be moved up and down relatively to the rod-shaped evaporation source. Can be handled without causing interference or collision with the evaporation source. In addition, since the rod-shaped evaporation source is fixed to the main body of the vacuum chamber, even when a work table or the like on which a work is mounted is provided, a mechanism related to mounting the rod-shaped evaporation source, for example, cooling of the rod-shaped evaporation source There is no need to centrally provide devices and the like.

In the present invention according to claim 2 , in the present invention described in claim 1 , the lower lid further moves up and down with respect to the main body of the vacuum chamber. When moving the main body of the vacuum chamber, it is conceivable that the configuration of auxiliary equipment of the AIP device, for example, the exhaust nozzle or the like becomes complicated.

According to a third aspect of the present invention, in addition to the second aspect of the present invention, the workpiece moves horizontally after completely falling to the outside of the main body of the vacuum chamber. Work can be carried in and out without interference and collision. Therefore, it is possible to efficiently handle the work in the AIP device employing the rod-shaped evaporation source.

According to a fourth aspect of the present invention, in addition to the third aspect of the present invention, the work is mounted on a work table and handled, and the work table is horizontally moved using a rack and a pinion. Can be reliably moved.

According to the fifth aspect of the present invention, since the shield plate is further mounted on the work table together with the work and handled in the third aspect of the present invention, even if the shield plate needs to be replaced and cleaned. , This is AI
It can be performed externally without stopping the P device.

According to the sixth aspect of the present invention, since the anode is further mounted on the work table according to the fifth aspect of the present invention, even when the anode needs to be replaced and cleaned,
As with the shield plate, it can be performed outside without stopping the AIP device.

According to the seventh aspect of the present invention, one end of the rod-shaped evaporation source is fixed to the main body of the vacuum chamber, and the other end is connected to the lid by using a detachable electrical connection means. Although the body is movable, arc power can be supplied from both ends, and large arc power can be supplied to the rod-shaped evaporation source.

According to an eighth aspect of the present invention, since the surface member supported by the elastic means is used as the electrical connection means in the invention according to the seventh aspect , the electrical connection means is electrically connected to the rod-shaped evaporation source. Even if there is an inclination in the connection part with the means, the connection can be surely made.

According to the ninth and tenth aspects of the present invention, since the anode is provided on the anode so as not to generate a potential difference in the axial direction of the rod-shaped evaporation source, the anode is uniformly discharged in the axial direction of the evaporation source. Can be generated.

According to the eleventh aspect of the present invention, since the arc power is further supplied from both ends of the rod-shaped evaporation source in the invention according to the ninth or tenth aspect , a large arc power is supplied to the rod-shaped evaporation source. The supply can be performed, and a discharge can be generated more uniformly in the axial direction of the rod-shaped evaporation source without generating a potential difference in the axial direction of the rod-shaped evaporation source.

According to the twelfth aspect of the present invention, a tenth aspect is provided.
Further, in the present invention described in the above, since the rod-shaped anode is used as a heater for preheating the work, there is no need to separately provide a heater, and a film attached to the surface of the rod-shaped anode or a film formed on the work by water vapor in the atmosphere. It does not adversely affect the quality of the product.

According to the thirteenth to fifteenth aspects of the present invention, in an AIP system having one or more AIP devices, a work table on which a work is mounted is automatically set to an AI.
Since it is configured to be able to carry in / out from the P device, there is no need to suspend the AIP device even at night.

[0042]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a main part diagram of the AIP device of the present invention.

In FIG. 1, the main body 1a of the vacuum chamber 1
Is fixed on the second floor portion 16 of the gantry 15, has an exhaust nozzle 1c protruding from a side surface, and has an open bottom surface. A lower lid 17, which is a lid for opening and closing the opening of the main body 1a of the vacuum chamber 1, is elastically supported on a lifter 18 via a spring 18a. It is possible to move up and down between the positions indicated by the solid lines. When the lower lid 17 is in the raised position, the vacuum chamber 1 is closed by a special seal 19. When the lower lid 17 is supported via an elastic body such as a spring 18a, it is easy to obtain a completely closed state. A rod-shaped evaporation source 14 projects downward from the center of the upper lid 1b of the vacuum chamber 1 and has an upper minus terminal 14 connected to a cathode of an arc power supply (not shown) at its upper end.
a is fixed. The lower lid 17 is provided with a roller rail 20 which is a horizontal moving means of the work 5 and is formed of a row of driven rollers, a lower minus terminal 21 connected to a cathode of an arc power supply, and a driving gear 22. Work 5
Is placed on the lower cover 17 via the roller rail 20 and the roller rail 20
, And the work 5 can be rotated and revolved by the drive gear 22. When the lower lid 17 is at the position indicated by the solid line, the lower minus terminal 21 is connected to the lower end of the rod-shaped evaporation source 14, and continuous discharge from the entire surface of the rod-shaped evaporation source 14 is performed. Work table 23
Is mounted with a shield plate 24, which is transported together with the work 5. Further, an anode (not shown) for the rod-shaped evaporation source 14 may be mounted on the work table 23.
Reference numeral 25 denotes a heater, which is used for preheating the work 5.

Next, the procedure of transporting the work table 23 in the AIP device having the above-described configuration will be described with reference to FIG.

First, in FIG. 2 (a), when the lower lid 17 is lowered by the lift 18, the work table 23 on the roller rail 20 holds the work 5, the shield plate 24 and / or the anode, and the arrow c. The rod-shaped evaporation source 14 moves away from the workpiece 5. Note that reference numeral 30 denotes a traveling vehicle to which a roller rail 31 is attached.

Subsequently, in FIG. 2B, the work table 23 is pulled out onto the traveling carriage 30 as indicated by an arrow d by driving the roller rails 20, 31. The main body 1a of the vacuum chamber 1 can be raised and lowered without raising and lowering the lower lid 17 (this will be described in detail later), but it is necessary to connect a flexible hose to the exhaust nozzle 1c. , The configuration of the device becomes complicated,
It is more preferable to raise and lower the lower lid 17.

According to the AIP apparatus as described above, the workpiece 5 moves in the axial direction of the rod-shaped evaporation source 14 relative to the rod-shaped evaporation source 14 (in the embodiment of FIGS. 1 and 2,
The relative movement in the vertical direction can be performed by raising and lowering the lower lid 17 on which the work table 23 is placed). Due to this relative movement, the work 5 and the rod-shaped evaporation source 14
Can be separated from each other to a position where they do not interfere with or collide with each other when the work table 23 carrying the work table 23 is transported in the horizontal direction. Thereafter, the work table 23 on which the work 5 is placed is conveyed in the horizontal direction. Therefore, in the AIP apparatus employing the rod-shaped evaporation source 14, the work table 23 can be efficiently handled by the work table 23, thereby realizing high productivity.

Further, the rod-shaped evaporation source 14 is fixed not to the work table 23 but to the main body 1a of the vacuum chamber 1. Accordingly, the apparatus can be configured by avoiding the problem that it is difficult to provide a cooling device for the rod-shaped evaporation source and the like, which occur when the rod-shaped evaporation source 14 is fixed to the work table 23 that moves up and down. .

When the shield plate 24 and the anode are mounted on the work table 23 and transported together with the work 5, when the shield plate 24 and the anode need to be replaced and cleaned, the AIP device is used. The AIP device does not need to be stopped, and thus high productivity can be realized.

Since the metal ions evaporated from the rod-shaped evaporation source 14 are radiated to the work 5 in a radial manner, as shown in FIG.
As compared with the flat plate-shaped cathode 3 as described above, the vapor trapping rate becomes higher, and a yield of about 80% can be expected. The yield of the flat cathode 3 shown in FIG. 23 is usually 50% or less. Further, since the rod-shaped evaporation source 14 has a simple columnar or cylindrical shape, the flat plate-shaped cathode 3 in FIG. 23 weighs several kilograms at the maximum while weighing several kilograms at the maximum. Therefore, it can be expected that the manufacturing cost of the target material in the rod-shaped evaporation source 14 can be reduced to 1/4 or less. By reducing the manufacturing cost and improving the yield, the effective unit price per gram of the target can be significantly reduced.

By the way, the form of the relative movement of the work 5 with respect to the rod-shaped evaporation source 14 is not limited to the forms shown in FIGS. 1 and 2, and various changes may be made. For example, FIG.
As shown in (a), the main body 1a of the vacuum chamber 1 and the rod-shaped evaporation source 14 may move up and down with respect to the work 5 and the lower lid 17. In FIG. 4B, the upper lid 17A that hangs the workpiece 5 moves up and down with respect to the main body 1a of the vacuum chamber 1 and the rod-shaped evaporation source. 4C, the vacuum chamber 1 has an openable / closable door (indicated by a two-dot chain line) through which the work 5 is taken in and out, and the rod-shaped evaporation source 14 has a small lid (17c) at the top. Together with the vacuum chamber 1. In FIG. 4D, a rod-shaped evaporation source 14 is horizontally protruded from a main body 1a of a vacuum chamber 1 which is turned sideways.
7B moves horizontally together with the work 5.

1 and 4 (a), (b), (c),
(D) is a rod-shaped evaporation source 14 or a lid (lower lid 1).
7, when the upper lid 17A and the horizontal lid 17B) are moved relative to each other, an opening is provided in the vacuum chamber 1 on the free end side of the rod-shaped evaporation source 14, and the lid at the opening and the main body 1a of the vacuum chamber 1 move relative to each other. It is supposed to do. On the other hand, the lid-shaped evaporating source 14 and the work 5
After the relative movement of the rod-shaped evaporation source 14 and the work 5 are prevented from interfering with each other, the work 5 is taken in and out through a door provided on the side surface of the vacuum chamber 1. 1 is accompanied by the problem that it becomes large. Therefore, it is more preferable that a lid is provided on the free end side of the rod-shaped evaporation source 14 and the lid and the main body 1a of the vacuum chamber 1 perform relative movement.

As described above, one end of the rod-shaped evaporation source 14 is a fixed end, and the other end is a free end. Various examples of the configuration of the rod-shaped evaporation source 14 will be described with reference to FIGS. 5 to 8 are sectional views of the rod-shaped evaporation source applied to FIG.

In FIG. 5, the target material 71 of the rod-shaped evaporation source 14 is a hollow cylinder. A lower arc confinement ring 72 having the same outer diameter is attached to the lower end of the target material 71. A target holding portion 73 is provided at the upper end of the target material 71, and an upper arc confinement ring 74 having the same outer diameter as the evaporation source is attached to the outer peripheral side of the target holding portion 73. The upper and lower arc confinement rings 72 and 74 are fixed to the target holding portion 73 and the shaft 77 with an insulating structure in order to insulate them from the target 71, but the detailed structure is omitted here. The target material 71 and the target holding portion 73 are provided with central holes 71a, 73a.
The shaft 77 is passed through a and 73a. The target material 71 is fastened and held together by the flange 75 and the nut 79 of the shaft 77 via the target holding portion 73. With this holding configuration, it is not necessary to form a screw hole for fixing the free end of the target to the flange 75 on the target material 71. In addition, when the consumable target material 71 is replaced, it can be easily removed and attached. become able to.

FIG. 6 shows the rod-shaped evaporation source 1 illustrated in FIG.
4 shows a configuration example for efficiently cooling the temperature when the temperature rises due to the input power from the arc power supply. The inner diameters of the center holes 71a and 73a are larger than the outer diameter of the shaft 77, and an outer passage 80 is formed on the outer periphery 77a side of the shaft 77. At the center of the shaft 77, there is formed a central passage 81 one end of which is opened by an injection connection port 83 so as to be connectable to a pipe and the other end of which is closed. Further, a lateral hole 82 communicating with the outer passage 80 is opened on the closed end side of the central passage 81, and a discharge connection is formed outside the main body 1 a of the vacuum vessel 1 and reaching the target holding portion 73 of the outer passage 80. The mouth 84 is open. The cooling medium from the injection connection 83 flows from the top in the center passage 81 to the bottom, passes through the lateral hole 82, flows from the bottom to the upper in the outer passage 80, and reaches the discharge connection 84. The cooling medium flows through the inner periphery of the center hole 71a of the target material 71 at a predetermined flow rate without causing stagnation, so that efficient cooling is performed with a high heat transfer coefficient, and the power input to the rod-shaped evaporation source 14 is increased. It is possible to increase the evaporation rate.

FIG. 7 shows a structural example of the rod-shaped evaporation source 14 which can absorb the thermal stress caused by the temperature difference. Although the temperature of the shaft 77 for sending the cooling medium to the tip is low, the temperature of the target material 71 is higher. Since the target material 71 tends to extend greatly in the axial direction and the shaft 77 extends only slightly in the axial direction, there is a possibility that a large compressive stress acts on the target material 71 and the target material 71 is broken. Therefore, for example, a compression spring 78 as an elastic body is interposed between the nut 79 for co-fastening and the target holding portion 73 so that the target material 7
The difference in thermal expansion between 1 and the shaft 77 is absorbed by a compression spring 78. Since only the compressive stress determined by the preload of the compression spring 78 acts on the target material 71, there is no possibility of breakage. Note that a rubber plate or the like can be used instead of the compression spring 78.

FIG. 8 shows another configuration example of thermal stress absorption. The shaft 77 is divided in the axial direction, and for example, a bellows 85 is interposed therebetween as an elastic body. Bellows 8
Reference numeral 5 denotes a structure in which leaf springs are connected alternately, and generates a predetermined compressive force and serves as a passage for a cooling medium. When the present invention is applied to the rod-shaped evaporation source 14 as shown in FIG. 5 which does not have a cooling medium passage, a spring, a rubber plate, or the like may be used as the elastic body.

In order to realize an AIP device having high productivity, a large arc current is applied to the evaporation source,
It becomes necessary to generate a continuous discharge. In order to cause a large arc current to flow through the rod-shaped evaporation source and to generate a continuous discharge, it is very effective to supply an arc current from both ends of the rod-shaped evaporation source. Since the lower end of the rod-shaped evaporation source 14 of the present invention described above is a free end, a detachable electric connection means is provided at the lower end, and both ends of the rod-shaped evaporation source 14 (in FIG. , 21). An example of this electrical connection means will be described with reference to FIGS.

In FIG. 9, the upper end of the rod-shaped evaporation source 14 is fixed to the main body 1 a of the vacuum chamber 1 with a nut 86 via an insulating structure, but the lower end of the rod-shaped evaporation source 14 is opened and closed by the lower lid 17. Are free ends separated by The electrical connection means is configured by erecting a surface member 87 in surface contact with the flange 75 of the shaft 77 on the lower lid 17 via an elastic means (a flexible flange 88 in FIG. 9). This surface member 87 corresponds to the lower minus terminal 21 in FIG. The flexible flange 88 is capable of withstanding the internal pressure of the atmospheric pressure and is capable of expanding and contracting and has a certain degree of elasticity. The inside of the flexible flange 88 communicates with the outside air through a hole 89 formed in the lower cover 17. When the inside of the main body 1a of the vacuum chamber 1 is evacuated, the flexible flange 8
Atmospheric pressure acts on the inside of the surface member 8 so that the surface member 87 is
Press on 5. Appropriate surface pressure is secured at the surface contact portion by the pressing by the atmospheric pressure and the elasticity of the flexible flange 88 itself. Further, even when the rod-shaped evaporation source 14 is slightly inclined and the flange 75 is not horizontal, the surface member 87 supported by the flexible flange 88 follows the flange 75, so that the portion is heated by local contact. Is prevented. The disconnection of this electrical connection means
In the embodiment described with reference to FIG. When the lower lid 17 is lowered, the surface member 87 is separated from the flange 75. When the lower lid 17 is raised, the surface member 87 comes into contact with the flange 75 to form a surface contact portion, so that a large current can flow, and high productivity can be realized.

If a large surface pressure is required at the surface contact portion to allow a large current to flow, and this surface pressure cannot be obtained with the configuration shown in FIG. 9, additional elastic means as shown in FIG. Can be used. When the surface member 87 is widened and, for example, four compression springs 90 equally distributed around the circumference between the surface member 87 and the lower lid 17, the compression force of the compression spring 90 contributes to an increase in surface pressure. Further, a compression spring 90 is provided at the tip of the external lead-out portion 87a of the surface member 87 so that the external lead-out portion 87a
The surface member 87 can also be pressed against the flange 75 via. Further, these means may be combined as needed.

As described above, high productivity can be realized by applying a large arc current to the rod-shaped evaporation source by the configuration illustrated in FIGS. 9 and 10. However, if the discharge does not occur uniformly in the axial direction of the rod-shaped evaporation source, the coating of the work may be uneven,
It is effective to devise the arrangement of the anode with respect to the rod-shaped evaporation source. In addition, when the anode is arranged around the rod-shaped evaporation source, it becomes a shadow of metal ions radiated to the work, so that it is necessary to arrange the anode with little influence on the work. An example of the arrangement of anodes that can perform a substantially uniform discharge in the axial direction with a small degree of blocking the work will be described with reference to FIGS. The examples of FIGS. 11 to 14 illustrate a general example of the above-described anode arrangement by exemplifying a device for supplying an arc current to only one end of the rod-shaped evaporation source 14, and the example of FIG. This is a specific example in which this is applied to an AIP device that supplies an arc current from both ends of a rod-shaped evaporation source 14.

In FIG. 11, ring-shaped anodes 101 and 102 are disposed at vertically symmetric positions of the rod-shaped evaporation source 14 which are separated from the target material 71 in particular. Ring anode 1
Both 01 and 102 are connected in parallel to a power supply 104 by wires 105 and 106. The rod-shaped evaporation source 14 has one end connected to a power supply 104 via a wiring 107. According to this configuration, the ring-shaped anodes 101 and 102 arranged at vertically symmetric positions contribute to the uniform discharge in the axial direction of the rod-shaped evaporation source 14 and the ring-shaped anodes 101 and 102
Does not produce a shadow on the work 5 and can coat the work evenly. In addition, as shown by the broken line 108 in the figure, it is more preferable that the cathode side supplies current from both ends.

The ring-shaped anodes 101 and 10 in FIG.
2 is a simple ring-shaped plate, but as shown in FIG. 12, a dish-shaped ring-shaped anode 101A, 10A having a conical surface.
2A, the target material 71 of the rod-shaped evaporation source 14
The arc on the surface becomes easier to run to the center of the rod-shaped evaporation source 14 in the axial direction, suppresses the discharge biased near the end of the target material 71, and makes the discharge more uniform in the axial direction of the rod-shaped evaporation source 14. Become. Here, it is more preferable to supply power from both ends also on the cathode side by the wiring 108.

The anode in FIG.
The rod-shaped anode 103 is provided at a position where the circumference concentric with the rod-shaped evaporation source 14 between the workpiece 4 and the workpiece 5 is arbitrarily equally divided (in the illustrated example, four equally). Rod-shaped anode 103
Are connected in parallel to the power supply 104 by wirings 105 and 106. The rod-shaped evaporation source 14 has one end connected to a power supply 104 via a wiring 107. When the rod-shaped anode 103 is used, the rod-shaped anode 103 is disposed evenly in the circumferential direction and the axial direction of the rod-shaped evaporation source 14, so that
Discharge bias is reduced. Since the rod-shaped anode 103 is located between the rod-shaped evaporation source 14 and the work 5,
Although a shadow is produced on the work 5, the work 5 is configured to revolve around the rod-shaped evaporation source 14 and revolve, so that there is no unevenness in the coating of the work 5. Here, it is more preferable to supply power from both ends also on the cathode side by the wiring 108.

The anode in FIG. 14 is a combination of the ring-shaped anodes 101 and 102 in FIG. 11 and the rod-shaped anode 103 in FIG. By appropriately combining the configurations of the anodes as in this example, the axial uniformity of the discharge is further improved. Since the anode has a structure in which the ring and the rod are integrally formed, the wirings 105 and 106 need only be connected to the ring portion. Again, the wiring 10
According to 8, it is more preferable to supply power from both ends also on the cathode side.

FIG. 15 shows an example in which the anode illustrated in FIGS. 11 to 14 is applied to the rod-shaped evaporation source 14 of the present invention. Both ends of the rod-shaped evaporation source 14 are connected to the wiring 107 respectively.
A and 107B are connected to power supplies 104 and 104 to supply an arc current. According to this, the rod-shaped evaporation source 14
While a large arc current is supplied from both ends to contribute to high productivity, the potential difference in the axial direction of the rod-shaped evaporation source 14 is reduced, and the effect described in FIGS. 11 to 14 is added to this. The uniformity of the discharge in the direction is improved. Further, according to FIG. 15, since the current flowing through both ends of the evaporation source and the anode can be controlled with high accuracy, the uniformity of discharge can be achieved with higher accuracy. The anode may be configured by using the rod-shaped anodes 103 described above in addition to the ring-shaped anodes 101 and 102 as shown in FIG. 15 or by freely combining these. Further, when the rod-shaped anode 103 is applied to the AIP device of the present invention, the rod-shaped anode 103 is
Similarly to the above, one end may be used as a free end and an electric connection means may be used.

By the way, the rod-shaped evaporation source 14 and the work 5
When the rod-shaped anode 103 between them is used, a large amount of film will adhere to the surface of the rod-shaped anode 103. Since the temperature of the rod-shaped anode 103 is low due to water cooling, the film peels or separates, and when the vacuum chamber 1 is opened, water vapor or the like in the air adsorbed to the film is released at the time of coating. 5 may adversely affect the quality of the coating. Therefore, before the coating is started, the rod-shaped anode 103 is used as a heater for preheating the workpiece 5 with the wiring as shown in FIGS. 16 and 17, thereby releasing water vapor and the like adhering to the surface. It is preferable to make it difficult to peel off or release. This rod-shaped anode 103 also serves as a preheater.
With the configuration described above, there is no need to separately provide a preheater. Note that the anode structure also serving as a preheater can be applied to the plate-shaped anode described in the related art.

In FIG. 16, a power supply 10 for discharging
4, 108 is used as a heater power supply for the rod-shaped anode 103 for preheating. FIG. 3A shows a heating state.
FIG. 3B shows a discharge state. In addition to circuits required for discharging, switches 113, 114, and 11 for switching are provided.
5 and a bypass circuit 116 are provided. Code 10
4, 108, 113, 114, 115 and 116 constitute preheating means. When the switches 113, 114, and 115 are at the a contacts as shown in FIG. 2A, the power supplies 104 and 108 are connected in parallel and connected in parallel to the rod-shaped anode 103, and the rod-shaped anode 103 is heated as a heater. The work 5 is preheated. As a result, water vapor or the like adsorbed on the film of the rod-shaped anode 103 is released, and the quality of the film of the work 5 is not adversely affected by the release during coating. When the preheating is completed, the switches 113, 114, and 115 are switched to the b-contacts, and normal coating is performed. During this coating, the temperature of the rod-shaped anode 103 is high, and the film is hardly peeled off or released.

FIG. 17 shows a configuration in which an AC power supply 110 for using the anode as a heater is provided separately from the DC power supplies 104 and 108 for vacuum arc discharge. Switches 111 and 112 are provided between the AC power supply circuit and the DC power supply circuit.
Is provided so that the connection to the rod-shaped anode 103 can be switched. When the switches 111 and 112 are set to the a contacts, the rod-shaped anode 103 is connected to the DC power supplies 104 and 10.
8 and normal coating is performed. Prior to the coating, when the switches 111 and 112 are set to the b contact, the rod-shaped anode 103 is connected to the AC power supply 110, and the work 5 is preheated using the rod-shaped anode 103 as a heater.

As described with reference to FIGS. 1 and 2, when the work 5 is taken out, the work table 23 is moved horizontally on the lower lid 17. As this horizontal moving means,
Although the roller rail 20 is provided in the embodiment of FIGS. 1 and 2, it is more preferable that the vacuum chamber 1 is in a vacuum, so that the vacuum seal can be reliably performed and the work table 23 can be reliably driven. It must be a configuration that can be used. Further, after the work table 23 is carried into the predetermined position of the lower cover 17, it is necessary to prevent the position of the lower cover 17 from moving in the horizontal direction irrespective of the vertical movement of the lower cover 17, from the viewpoint of the stability of the above-described electrical connection means. is there.

A modification of the horizontal moving means of the work table 23 for that purpose will be described with reference to FIG. Note that FIG.
2 shows an example of a means for rotating the work 5 on the work table 23 together with a means for horizontally moving the work table 23, which will be described later.

The free rollers 120 are arranged in a row on the lower cover 17, and the work table 23 rolls thereon. A rack 123 is attached to a side surface of the work table 23, and the rack 1 is attached to a shaft 124 protruding from the lower lid 17.
A pinion 125 that meshes with 23 is fitted. Axis 1
Numeral 24 is for moving the work table 23 horizontally. The shaft 124 includes a pair of pulleys 130 and the clutch 1
It is connected to a drive motor 132 via 31. Also,
The shaft 124 is provided with a disk brake 133 and an encoder switch 134 for detecting the rotational position of the disk. The work table is carried into the vacuum chamber by a pinion, and is finally conveyed to a position where a transmission unit for bias power for applying a bias voltage to the work on the work table is fixed with a predetermined force. The drive motor 132 is controlled by a driver 135, and rotation information of the encoder switch 134 is input to the driver 135. At this position, when the shaft 124 is fixed by the disc brake 133 in a state where the pinion 125 is engaged with the rack 123 as shown in the figure, the work table 23 is fixed at a predetermined position, and transmission of bias power to the work is performed. Will be performed reliably. Note that the above-described horizontal movement means of the work table can also be applied to the one using the flat evaporation source described in the related art.

When the work table 23 is carried in, there are cases where the rack 123 and the pinion 125 run up and do not bite. Therefore, the driver 135 stores the rotation angle at the position where the pinion 125 is separated from the rack 123 when the work table 23 is carried out, via the encoder switch 134. Then, the clutch 131 is turned on at the time of carry-in, and the drive motor 132 is driven so that the stored rotation angle is attained, and the clutch 131 is turned off. Then, the rack 123 of the work table 23 pushed by another driving means smoothly meshes with the pinion 125.

Next, means for rotating the work 5 on the work table 23 will be described. Work table 2
3, a rotatable table 121 is rotatably supported,
The rotating shaft 122 protrudes below the work table 23. The gear 126 is fitted into the rotation shaft 122 and the lower cover 17
Gear 12 meshing with the gear 126 on the shaft 127 protruding from
8 is inserted. The shaft 127 is the rotary table 12
1 and is connected to a drive motor 142 via a gear train 140 and a pulley 141.
Further, a ball joint 143 is provided at the lower end of the shaft 127, and an air cylinder 144 is connected after the rotation and edge cutting. The air cylinder 144 has upper and lower limit switches 145 and 146, and can reciprocate up and down. When loading / unloading the worktable 23, the air cylinder 144 is shortened, and the gear 128 is retracted to a position below the gear 126. When the work table 23 is fixed at the predetermined position, the air cylinder 144 extends, but there is no guarantee that the gear 128 and the gear 126 are at the meshing position. Therefore, the drive motor 14 is
When the air cylinder 144 is repeatedly shortened and extended several times while the inward movement of the gear 2, the gear 128 and the gear 126 mesh with each other.

If the horizontal moving means of the work table 23 and the rotating means of the work 5 are constituted as described above, the lower cover 17
Has only two shafts 124 and 127 protruding therefrom, and only this portion needs to be vacuum-sealed, so that the vacuum sealing can be performed reliably. Further, since the rack 123 and the pinion 125 are used, the work table 23 can be reliably driven, and the work table 23 can be fixed by fixing the shaft 124 in which the pinion 125 is fitted.

Next, an AIP system for automatically exchanging the work table 23 will be described with reference to FIG. The traveling carriage 30 has roller rails 31 and 32,
A first mounting portion A and a second mounting portion B of the work table 23 are provided. It is mounted on the rail 33 so that it can reciprocate a distance P 'equal to the distance P between the first and second mounting portions A and B. At the time of automatic replacement of the work table 23, the traveling vehicle 30 is at the solid line position and waits with the first mounting portion A empty. Then, the work table 23 on which the processed work 5 is mounted is carried out in the direction, and the traveling carriage 30 is moved in the direction by the distance P 'in the two-dot chain line position, and the second mounting part B faces the vacuum chamber 1. Then, the unprocessed work table 23 mounted on the second mounting portion B is carried in the direction, and FIG.
(A) → The work table 23 is carried into the vacuum chamber 1 in the order of FIG. When the worker works to place the unprocessed work table 23 on the second mounting portion B in FIG. 3, the work table 23 is automatically replaced, and the processed work 5 is mounted on the first mounting portion A. The work table 23 rides, and the second mounting portion B is empty. The worker may exchange the work 5 of the work table 23 of the first mounting portion A and the shield plate 24 during the cycle time.
The work table 23 has the rod-shaped anode 1 described above.
03 may be mounted, in which case the rod-shaped anode 1
It is preferable that 03 is also configured to be easily exchanged. The configuration in which the shield plate 24 and the anode 103 are carried out together with the work table 23 can be applied to the configuration using the flat anode described in the related art.

FIG. 19 shows a number of AIP devices (4 in the illustrated example).
AIP when one traveling vehicle 30 is used for
It is a system diagram. Four AIP devices 35A, 35B, 35C, 35D are arranged along the rail 33, and a turntable 36 is installed at an end of the rail 33. In addition, 37 is a distribution board / control panel, 38 is a bias power supply unit, 39 is an arc power supply unit, and 40 is a rack wiring. The operator places the unprocessed work 5 and the four worktables 23 on which the clean shield plate 24 is mounted on the turntable 36. When the processing of the specific AIP device is about to end, the second mounting part B of the traveling vehicle 30 receives the unprocessed worktable 23 from the turntable 36,
Automatic replacement is performed in the same manner as in FIG. 3, and the processed worktable 23 is returned to the turntable 36. As described above, when the cycle of each AIP device makes one cycle, the processed worktable 23 is placed on the turntable 36. Therefore, the operator may collectively exchange the work 5 and the shield plate 24 and the rod-shaped anode 103 as needed toward the turntable 36. In this example, the traveling carriage 30 has two work table mounting portions, but has only one mounting portion. First, the processed work is received and transported to the turntable, and then the unprocessed work is removed from the turntable. It is also possible to carry it to the receiving AIP device.

FIG. 20 shows an AIP system using a rotary table 40 in place of the traveling vehicle 30. Each AIP
The rotary tables 40,..., 40 are installed in front of the devices 35A,.
, 40 are replaced by two-way conveyors 41,.
It is connected by. Also, on the opposite side of the bidirectional conveyor 41 of the rotary table 40 in front of the AIP device 35A,
An unloading conveyor 42 is connected, and a first stocker 45 for storing a large number of processed work tables 23 is connected to an end of the unloading conveyor 42 via a cross table 44. Further, a carry-in conveyor 43 is connected to the opposite side of the bidirectional conveyor 41 of the rotary table 40 in front of the AIP device 35X, and the end of the carry-in conveyor 43 has a large number of unprocessed work tables via a cross table 46. Is connected to the second stocker 47 for storing the. For example, when the automatic replacement of the AIP device 35X becomes necessary, the processed work table 23 is pulled out above the rotary table 40 as shown by an arrow, and the rotary table 40 turns to move both the processed work table 23 in the direction of the arrow. To the conveyor 41. The processed work table 23 passes through the rotary table 40 of the AIP device 35A, passes through the cross table 44, and is stored in the first stocker 45. On the other hand, the unprocessed worktable 23 pulled out from the second stocker 47 via the cross table 46 enters the turntable 40 as in the direction, and the turntable 40 rotates to send out the unprocessed worktable 23 in the direction. In this manner, the work tables 23 of the AIP devices 35A,..., 35X are automatically exchanged.

The AIP illustrated in FIGS. 3, 19 and 20
According to the system, the work table 23 on which the workpieces 5 before and after the processing are mounted can be automatically transported, so that the AIP device can be operated even at night, for example, when unmanned, thereby increasing the productivity. Can be realized.

The automatic exchange system shown in FIGS. 3, 19 and 20 employs an AI using the rod-shaped evaporation source 14 shown in FIG.
The present invention can be applied not only to the P device but also to an AIP device having a plate-shaped evaporation source as shown in FIG. FIG. 21 shows this example. FIG. 1A is a top view, and FIG. 1B is a side view.
A flat-plate evaporation source 51 is provided on both sides of the vacuum chamber 50, and a gate valve 53 for moving up and down a valve plate 52 is attached to the front of the vacuum chamber 50. The work table 23 on which the work 5 is mounted is mounted on the traveling carriage 30 (or the rotary table 4) with the valve plate 52 serving as an opening / closing door raised.
0) is pulled out.

Further, mounting a shield plate on a work table on which a work is mounted is not limited to the batch type AIP device as described above, but is applicable to an in-line type AIP device as shown in FIG. . This in-line type AIP apparatus includes a vacuum chamber 60, a preheating chamber 61, a coating chamber 62, and a cooling chamber 63 that are connected to a gate valve 64.
a, 64b, 64c, 64d, 64e,
A work table 66 is provided on each rail 60 to 63 on the rail 65.
Are sequentially conveyed inside. The work 5 and the shield plate 67 are mounted on the work table 66. The work table 66 having the clean shield plate 67 is carried into the vacuum chamber 60, and the dirty shield plate 67 is removed from the cooling chamber 63. The mounted work table 66 is carried out. Therefore, replacement of the shield plate 67 for each line (running)
It can be performed outside without stopping the IP device, and coating using the clean shield plate 67 can always be performed. Further, the anode is also mounted on the work table 66, and the work 5 and the shield plate 6 are mounted.
If it is configured to be transported together with the anode 7, the exchange and cleaning of the anode can be easily and efficiently performed.

[0082]

According to the first aspect of the present invention, when loading / unloading a work into / from the vacuum chamber, the work can be moved up and down relatively to the rod-shaped evaporation source. The work can be handled without causing interference or collision with the rod-shaped evaporation source. In addition, since the rod-shaped evaporation source is fixed to the main body of the vacuum chamber, even when a work table or the like on which a work is mounted is provided, a mechanism related to mounting the rod-shaped evaporation source, for example, cooling of the rod-shaped evaporation source There is no need to centrally provide devices and the like. Therefore, an AIP device having high productivity can be realized without complicating the device configuration.

According to the second aspect of the present invention, the first aspect
Further, in the present invention described in the above, the lower lid is moved up and down with respect to the main body of the vacuum chamber. When moving the main body of the vacuum chamber, it is conceivable that the configuration of auxiliary equipment of the AIP device, for example, the exhaust nozzle or the like becomes complicated. Therefore, an AIP device having high productivity can be realized with a simple device configuration.

According to the third aspect of the present invention, a second aspect is provided.
Further, in the present invention described in the above, since the work moves in the horizontal direction after completely descending to the outside of the main body of the vacuum chamber, it is possible to carry in / out the work without interference / collision between the work and the rod-shaped evaporation source. Can be. Therefore, it is possible to efficiently handle the work in the AIP device employing the rod-shaped evaporation source, thereby realizing an AIP device having high productivity.

According to the fourth aspect of the present invention, there is provided the third aspect.
Further, in the present invention described in (1), since the work is mounted on the work table and handled, and the work table is horizontally moved by using the rack and the pinion, the work can be surely moved. That is, in an AIP device having high productivity, more accurate operation of the device is performed.

According to the fifth aspect of the present invention, a third aspect is provided.
Further, in the present invention described in the above, since the shield plate is mounted on the work table together with the work and handled,
Even when the shield plate needs to be replaced or cleaned, this can be performed outside without stopping the AIP device. Therefore, the operation of the AIP device can be continued regardless of the replacement and cleaning work of the shield plate, and the A
An IP device can be realized.

According to the present invention of claim 6 , according to claim 5,
Further, in the present invention described in (1), since the anode is mounted on the work table, even when the anode needs to be exchanged and cleaned, similarly to the shield plate, it can be performed outside without stopping the AIP device. Therefore, the operation of the AIP device can be continuously performed irrespective of the anode replacement / cleaning work, and an AIP device having high productivity can be realized.

According to the seventh aspect of the present invention, one end of the rod-shaped evaporation source is fixed to the main body of the vacuum chamber, and the other end is connected to the lid using a detachable electrical connection means. Since arc power is supplied from both ends, large arc power can be supplied to the rod-shaped evaporation source. Therefore, by supplying a large arc power to the AIP device employing the rod-shaped evaporation source, an AIP device having high productivity can be realized.

According to the eighth aspect of the present invention, there is provided the seventh aspect.
Further, in the present invention described in the above, since the surface member supported by the elastic means is used for the electric connection means, even if there is an inclination at the connection portion between the rod-shaped evaporation source and the electric connection means, the connection is surely made. can do. Therefore, it is possible to reliably supply a large arc power to the rod-shaped evaporation source, and to realize an AIP device having high productivity without fail.

According to the ninth and tenth aspects of the present invention, since the anode is provided on the anode so as not to generate a potential difference in the axial direction of the rod-shaped evaporation source, the anode is uniformly formed in the axial direction of the rod-shaped evaporation source. Discharge can be generated. Therefore,
An AIP device that achieves higher quality by performing coating evenly can be realized.

According to the eleventh aspect of the present invention,
According to the present invention as set forth in claim 9 or claim 10 , since the arc power is supplied from both ends of the rod-shaped evaporation source, a large arc power can be supplied to the rod-shaped evaporation source, and the axial direction of the rod-shaped evaporation source can be increased. Therefore, a discharge can be generated more uniformly in the axial direction of the rod-shaped evaporation source without generating a potential difference. Therefore, it is possible to realize an AIP apparatus having high productivity and further improve the quality of a film of a work.

According to the twelfth aspect of the present invention,
Further, in the present invention described in 10 , since the rod-shaped anode is used as a heater for preheating the work, the film attached to the rod-shaped anode surface or the water vapor in the atmosphere does not adversely affect the quality of the film of the work. . Therefore,
The quality of the film of the work can be further improved.

According to the thirteenth to fifteenth aspects of the present invention, in an AIP system having one or more AIP devices, a work table on which a work is mounted can be automatically loaded and unloaded from the AIP device. So
There is no need to pause the AIP device even at night. Therefore, it is possible to realize an AIP device with high operation rate and high productivity that enables unmanned operation at night.

[Brief description of the drawings]

FIG. 1 is a main part diagram of an AIP device of the present invention.

FIG. 2 is a transfer diagram of a work table.

FIG. 3 is a top view of an AIP system using a traveling vehicle.

FIG. 4 is a diagram showing an example of relative movement between a workpiece and a rod-shaped evaporation source.

FIG. 5 is a sectional view of a rod-shaped evaporation source.

FIG. 6 is a sectional view of another rod-shaped evaporation source.

FIG. 7 is a sectional view of another rod-shaped evaporation source.

FIG. 8 is a sectional view of another rod-shaped evaporation source.

FIG. 9 is a view showing an electrical connection means of a rod-shaped evaporation source.

FIG. 10 is a diagram showing another electrical connection means for a rod-shaped evaporation source.

FIG. 11 is a view showing an anode for a rod-shaped evaporation source.

FIG. 12 is a view showing another anode for a rod-shaped evaporation source.

FIG. 13 is a view showing another anode for a rod-shaped evaporation source.

FIG. 14 is a diagram showing another anode for a rod-shaped evaporation source.

FIG. 15 is a connection circuit diagram of a rod-shaped evaporation source and an anode to a power supply.

FIG. 16 is a connection circuit diagram for anode preheating.

FIG. 17 is another connection circuit diagram for anode preheating.

FIG. 18 is a drive system diagram of a work table and a rotary table.

FIG. 19 is a top view of another AIP system using a traveling vehicle.

FIG. 20 is a top view of an AIP system using a rotary table.

FIG. 21: AIP according to an AIP device with a gate valve
It is a side view of a system.

FIG. 22 is a conceptual diagram showing the application of a shield plate to an in-line AIP device.

FIG. 23 is a main part diagram of a conventional AIP device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Vacuum chamber, 1a ... Main body, 5 ... Work, 14 ... Rod evaporation source, 17 ... Lower cover (lid), 23 ... Work table, 24 ... Shield plate, 30 ... Traveling trolley, A ... 1st mounting part , B: second mounting section, 33: rail, 36: turntable, 40: rotary table, 41: bidirectional conveyor, 42: unloading conveyor, 43: loading conveyor, 45 ...
First stocker 47, second stocker 71, target material 71a, 72a, 73a center hole 72, 74
... Arc confinement ring, 77 ... Shaft, 80 ... Outer passage, 81 ... Center passage, 82 ... Side hole, 79 ... Nut, 8
7: surface member, 88: flexible flange (elastic means), 101, 102: ring-shaped anode, 101A, 10
2A: dish-shaped ring anode, 103: rod-shaped anode, 12
3 ... Rack, 125 ... Pinion

Continuation of the front page (72) Inventor Hiroshi Tamagaki 2-3-1, Shinhama, Arai-machi, Takasago-shi, Hyogo Inside Kobe Steel, Ltd. Takasago Works (72) Inventor Hiroshi Kawaguchi 2-3-1, Shinama, Arai-machi, Takasago-shi, Hyogo Prefecture Kobe Steel, Ltd. Takasago Works (72) Inventor Katsuhiko Shimojima 2-3-1, Shinama, Araimachi, Takasago City, Hyogo Prefecture Kobe Steel, Ltd. Takasago Works, Ltd. (72) Inventor Hirofumi Fujii 2-chome, Araimachi, Takasago City, Hyogo Prefecture No.3-1 Kobe Steel, Ltd. Takasago Works (72) Inventor Toshiya Kido 2-3-1, Araimachi Shinhama, Takasago City, Hyogo Prefecture Kobe Steel Co., Ltd., Takasago Works (72) Inventor Grain Suzuki Takasago, Hyogo Prefecture 2-3-1, Shinhama, Araimachi, Kobe Steel Kobe Steel, Ltd. Takasago Works (72) Inventor Yoichi Inoue 2-3-1, Shinhama, Araimachi, Takasago, Hyogo Prefecture Kobe Steel, Ltd. Takasago Works (56) References Special JP-A-3-90566 (JP, A) 56788 (JP, A) JitsuHiraku Akira 55-80366 (JP, U) Tokuoyake Akira 53-28871 (JP, B2) (58 ) investigated the field (Int.Cl. ^7, DB name) C23C 14/00 - 14 / 58

Claims (15)

(57) [Claims] 1. An arc ion plating system comprising: a vacuum chamber; a rod-shaped evaporation source provided in the vacuum chamber; and a work provided to surround the rod-shaped evaporation source and having a surface coated with a film. In the apparatus, the vacuum chamber includes a lower lid on which the work is mounted, and a main body to which an upper end of the rod-shaped evaporation source is fixed, and the lower lid is movable in a vertical direction relative to the main body. An arc ion plating apparatus, characterized in that: Wherein an arc ion plating apparatus according to claim 1, wherein the lower cover is vertically movable relative to the body. 3. After lowering the lower lid until the upper end of the work is located below the lower end of the rod-shaped evaporation source, the work is horizontally movable with respect to the lower lid. The arc ion plating apparatus according to claim 2, wherein 4. The work is mounted on a work table mounted on the lower cover, and the work table is attached to the lower cover by a rack provided on the work table and a pinion provided on the lower cover. 4. The arc ion plating apparatus according to claim 3 , wherein the apparatus is horizontally movable with respect to the apparatus. 5. The arc according to claim 3 , wherein the work is mounted on a work table mounted on the lower lid, and a shield plate is mounted on the work table together with the work. Ion plating equipment. 6. The arc ion plating apparatus according to claim 5, wherein an anode is further mounted on the work table. 7. An arc ion plating system comprising: a vacuum chamber; a rod-shaped evaporation source provided in the vacuum chamber; and a work disposed to surround the rod-shaped evaporation source and having a surface coated with a film. In the apparatus, the vacuum chamber has a main body to which one end of the rod-shaped evaporation source is fixed, and a lid that holds the work and is movable in the axial direction of the rod-shaped evaporation source relative to the main body. And the other end of the rod-shaped evaporation source is connected to the lid via a detachable electrical connection means, and arc power is supplied from both ends of the rod-shaped evaporation source. Arc ion plating apparatus. 8. The electric connection means, wherein a surface member supported by the lid via elastic means is configured to be able to contact the other end of the rod-shaped evaporation source. Item 7. An arc ion plating apparatus according to Item 7 . 9. A vacuum chamber; a rod-shaped evaporation source provided in the vacuum chamber; an anode for generating an arc between the rod-shaped evaporation source; and an anode surrounding the rod-shaped evaporation source. Wherein the anode is a ring-shaped anode provided at both ends of the rod-shaped evaporation source. 10. A vacuum chamber; a rod-shaped evaporation source provided in the vacuum chamber; an anode for generating an arc between the rod-shaped evaporation source; and an anode surrounding the rod-shaped evaporation source. And a workpiece whose surface is coated with a film, wherein the anode is disposed on a circumference centered on the axis of the rod-shaped evaporation source and the rod-shaped evaporation source and the workpiece An arc ion plating apparatus comprising: a rod-shaped anode provided at a position between the anodes; and arc power supplied from both ends of the anode. 11. The arc ion plating device according to claim 9 or claim 10, wherein both ends of the arc power of said rod-shaped evaporation source is characterized in that it is supplied. 12. The arc ion plating apparatus according to claim 10 , wherein the anode is used as a heater for preheating the work before the surface of the work is coated with a film. 13. A traveling vehicle that can travel along one or more arc ion plating devices for loading and unloading a work table on which a work is mounted, and one or more mounting portions for mounting the work table on the traveling vehicle. Provided, the mounting portion is moved to a position facing the arc ion plating device by the traveling of the traveling vehicle,
An arc ion plating system, wherein the work table is automatically taken in and out between the mounting section and the arc ion plating apparatus. 14. The traveling vehicle is provided so as to be able to travel on a rail provided along the arc ion plating apparatus, and a turntable on which a plurality of the work tables can be mounted is provided along the rail. The arc ion plating system according to claim 13 , wherein the worktable is automatically exchangeable between a turntable and the traveling vehicle. 15. A rotary table for loading and unloading a work table on which a work is mounted between the plurality of arc ion plating apparatuses and changing the direction of the work table is provided in front of each of the plurality of arranged arc ion plating apparatuses. A first two-way conveyor for connecting the plurality of rotary tables and transporting the work table, wherein the rotary table located at one end is capable of storing a plurality of the work tables on which the processed work is mounted; A stocker is connected via a carry-out conveyor, and a second stocker capable of storing a plurality of the work tables on which the unprocessed work is mounted is connected to the rotary table located at the other end via a carry-in conveyor. An arc ion plating system characterized by the following.