CN211311574U - Rotating device for coating film on outer surface of hollow cylindrical plated part - Google Patents
Rotating device for coating film on outer surface of hollow cylindrical plated part Download PDFInfo
- Publication number
- CN211311574U CN211311574U CN201921502550.8U CN201921502550U CN211311574U CN 211311574 U CN211311574 U CN 211311574U CN 201921502550 U CN201921502550 U CN 201921502550U CN 211311574 U CN211311574 U CN 211311574U
- Authority
- CN
- China
- Prior art keywords
- bevel gear
- disc
- shaft
- hollow cylindrical
- plated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a rotating device for coating the outer surface of a hollow cylindrical coated piece, which is arranged in a vacuum chamber of a magnetron sputtering coating machine, wherein an outer disc and a rotating disc are arranged in the vacuum chamber of the magnetron sputtering coating machine; the outer disc is provided with an outer disc bracket, and the rotating disc is provided with a shaft disc connecting piece; the rotating device comprises a first bevel gear and a second bevel gear which are meshed with each other; the first bevel gear and the second bevel gear are respectively provided with a step, one end of a connecting shaft of the first bevel gear and one end of a connecting shaft of the second bevel gear are mutually and vertically connected to form an L-shaped shaft, the other end of the connecting shaft of the first bevel gear is connected with the shaft disc connecting piece, and the step of the first bevel gear is connected with the outer disc support; the step of the second bevel gear is connected with an accessory to be plated through a stud, and a first elastic retainer ring, a hollow cylindrical accessory to be plated and a second elastic retainer ring are sequentially sleeved on the accessory to be plated.
Description
Technical Field
The utility model belongs to the technical field of special film preparation, in particular to a method for magnetron sputtering film on the outer cylindrical surface of a hollow cylindrical plated piece and a device for ensuring the uniformity of the film.
Background
When the film is prepared on the surface of the planar optical element by magnetron sputtering, the element to be plated is generally placed on a high-vacuum carrying disc. The carrying disc in the magnetron sputtering equipment can only rotate around a vertical shaft, and when a film is prepared on the outer surface of a hollow round piece to be plated, the uniformity of the film layer is difficult to ensure by the method.
The main problem related to the rotating device for coating the outer surface of the hollow cylindrical plated piece is changing the rotating direction of the hollow cylindrical plated piece. Referring to fig. 1, the shenyang instruments and meters research institute has designed a tilt friction type rotating bracket. The method is to place the hollow cylindrical plated piece in a high vacuum chamber in an inclined way and drive the hollow cylindrical plated piece to rotate by utilizing the friction between the rubber ring and the inner cylindrical surface of the rotating disc in a close contact way, but the inclined bracket has the following defects.
The use of the bracket requires two times of sputtering to ensure that the outer surface of the hollow cylindrical workpiece is uniformly coated with the required film.
The rubber ring can be abraded when the rubber ring is in close contact with and rubs against the inner cylindrical surface of the rotating disc, if the film coating time is long, the rubber ring can be separated from the inner cylindrical surface of the rotating disc, and therefore the hollow cylindrical plated part cannot be driven to rotate.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the not enough among the prior art, provide a hollow cylindrical is plated a surface coating film's rotary device, the device simple structure, convenient operation, assurance hollow cylindrical that can be fine is plated a surface coating film's homogeneity, and is applicable to the simultaneous sputtering of many targets.
The utility model aims at realizing through the following technical scheme:
a rotating device for coating on the outer surface of a hollow cylindrical coated piece comprises a magnetron sputtering coating machine and the hollow cylindrical coated piece, wherein an outer circular disc and a rotating circular disc are arranged in a vacuum chamber of the magnetron sputtering coating machine; the rotating device is arranged in a vacuum chamber of the magnetron sputtering coating machine, an outer disc support is arranged on the outer disc, and a shaft disc connecting piece is arranged on the rotating disc; the rotating device comprises a first bevel gear and a second bevel gear which are meshed with each other and used for changing the rotating direction and the rotating speed of the hollow cylindrical plated part;
the first bevel gear and the second bevel gear are respectively provided with a step, a threaded hole for fixing is formed in each step, one end of a connecting shaft of the first bevel gear and one end of a connecting shaft of the second bevel gear are mutually and vertically connected to form an L-shaped shaft, the other end of the connecting shaft of the first bevel gear is connected with the shaft disc connecting piece, and the step of the first bevel gear is connected with the outer disc support through a stud;
a shaft shoulder is arranged on a connecting shaft of the second bevel gear; the axial displacement of miniature bearing and through the shaft shoulder restriction miniature bearing is cup jointed in the shaft hole of second bevel gear, the step of second bevel gear has through the double-screw bolt connection and is plated an auxiliary, it has cup jointed first circlip, hollow cylindrical and is plated piece and second circlip in proper order to be plated on the auxiliary, through first circlip and second circlip restriction hollow cylindrical by the axial displacement who plates the piece.
Compared with the prior art, the utility model discloses a beneficial effect that technical scheme brought is:
1. the device mainly comprises a pair of meshed bevel gears, an outer disk bracket, an L-shaped shaft, a shaft disk connecting piece and a plated part accessory, and has the advantages of simple structure process and lower cost. The parts are connected by bolts, studs and the like, so that the bevel gear is easy to install, and the bevel gear has good transmission reliability and long service life.
2. The device makes full use of the characteristics of the bevel gear, not only can realize the revolution of the hollow cylindrical plated piece around a vertical shaft, but also can realize the rotation of the plated piece around a horizontal shaft. When multiple targets are sputtered simultaneously, a uniform film can be prepared on the outer surface of the hollow cylindrical plated piece only by one-time magnetron sputtering, and the working efficiency is greatly improved.
3. Because the rotating speed of the rotating disk in the vacuum chamber of the magnetron sputtering coating machine can be controlled by software of an upper computer, the rotating speed of the rotating disk in the vacuum chamber of the coating machine can be set to adjust the rotating speed of the hollow cylinder to be coated around the vertical shaft. And the rotating speed of the plated part around the horizontal shaft can be adjusted by changing the transmission ratio by replacing different bevel gears. The rotating speed of the plated piece is one of factors influencing the quality of the film, and the controllability of the rotating speed is convenient for preparing the high-quality film.
4. The device can be suitable for sputtering of hollow cylindrical plated parts with different sizes only by changing the size of the plated part accessory, and has strong applicability.
Drawings
FIG. 1 is a diagram of a tilted friction type rotating stand designed by Shenyang instruments and meters research institute.
Fig. 2 is a schematic view of the rotating device of the present invention.
Fig. 3 is a schematic front view of the rotating device of the present invention.
Fig. 4a and 4B are schematic cross-sectional views in the directions of a-a and B-B in fig. 3, respectively.
Fig. 5 is a schematic top view of the rotating device of the present invention.
Reference numerals: 1-1-rubber ring; 1-2-hollow cylindrical plated piece; 1-3-target material; 1-bevel gear I, 2-L-shaped shaft, 3-bevel gear II, 4-stud, 5-elastic retainer ring I, 6-hollow cylindrical plated piece, 7-elastic retainer ring II, 8-plated piece accessory, 9-sputtering target material, 10-shaft shoulder, 11-outer disc support and 12-step; 13-step threaded hole; 14-NKS bearings; 15-outer disc; 16-a rotating disk; 17-a bolt; 18-a hub connection; 19-nut
Detailed Description
The present invention will be described in further detail with reference to the following drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 2 to 5, the utility model provides a rotary device for coating the outer surface of a hollow cylindrical coated member, which comprises a magnetron sputtering coating machine and a hollow cylindrical coated member, wherein an outer circular disc and a rotary circular disc are arranged in a vacuum chamber of the magnetron sputtering coating machine; the rotating device is arranged in a vacuum chamber of the magnetron sputtering coating machine, an outer disc support is arranged on the outer disc, and a shaft disc connecting piece is arranged on the rotating disc; the rotating device comprises a first bevel gear and a second bevel gear which are meshed with each other and used for changing the rotating direction and the rotating speed of the hollow cylindrical plated part;
before installation, the outer circular disc 15 and the rotating circular disc 16 in the magnetron sputtering vacuum chamber are detached, and holes are drilled at corresponding positions where bolts 17 need to be installed. Use the utility model discloses a rotary device replaces original device.
A shaft disc connecting piece 18 and a rotating disc 16 of the magnetron sputtering vacuum chamber are fixed by four bolts 17, and the bevel gear step 12 and the outer disc support 11 are fixed on an outer disc 15 of the magnetron sputtering vacuum chamber by three bolts 17 after being connected by the studs 4. The threaded end of the L-shaped shaft is connected to the hub connection 18 by a nut 19. The NKS bearing 14 is embedded into a gear hole of the bevel gear II 3 and sleeved at one end of the L-shaped shaft with a shaft shoulder 10, and the axial displacement of the NKS bearing 13 is limited by the shaft shoulder 10. An auxiliary part 8 of the plated part is in clearance fit with one end of the L-shaped shaft with a shaft shoulder 10 and is connected with the step of the bevel gear II 3 through a stud 4. The elastic check ring I5, the hollow cylindrical plated part 6 and the elastic check ring II 7 are sleeved on the plated part accessory 8 in sequence, and the axial displacement of the hollow cylindrical plated part 6 is limited by the two elastic check rings.
After the installation is finished, the magnetron sputtering coating machine is started, and the sputtering target 9 is under negative high pressure. The electrons are flown to the workpiece 6 at the anode position by the electric field E, and collide with argon atoms in the middle to ionize the argon atoms to generate Ar+And a new electron, Ar+The sputtering target material 9 is sputtered under the action of an electric field, the sputtering target material 9 is accelerated to fly to the sputtering target 9 under negative high pressure, when the sputtered target atoms fly to the plated piece 6, a motor in the film plating machine device drives the rotating disc 16 to rotate around the Z axis, and therefore the L-shaped shaft 2 is driven to rotate. By a pair of meshing bevel gears on the L-shaped shaft 2 to change hollownessThe rotation direction of the cylindrical plated piece 6 realizes the functions of the plated piece 6 of revolving around the Z axis and rotating around the X axis, thereby ensuring that the film is uniformly deposited on the hollow cylindrical plated piece 6.
The present invention is not limited to the above-described embodiments. The above description of the embodiments is intended to describe and illustrate the technical solutions of the present invention, and the above embodiments are merely illustrative and not restrictive. Without departing from the spirit of the invention and the scope of the appended claims, the person skilled in the art can make many changes in form and detail within the teaching of the invention.
Claims (1)
1. A rotating device for coating on the outer surface of a hollow cylindrical coated piece comprises a magnetron sputtering coating machine and the hollow cylindrical coated piece, wherein an outer circular disc and a rotating circular disc are arranged in a vacuum chamber of the magnetron sputtering coating machine; the device is characterized in that the rotating device is arranged in a vacuum chamber of a magnetron sputtering coating machine, an outer disc support is arranged on the outer disc, and a shaft disc connecting piece is arranged on the rotating disc; the rotating device comprises a first bevel gear and a second bevel gear which are meshed with each other and used for changing the rotating direction and the rotating speed of the hollow cylindrical plated part;
the first bevel gear and the second bevel gear are respectively provided with a step, a threaded hole for fixing is formed in each step, one end of a connecting shaft of the first bevel gear and one end of a connecting shaft of the second bevel gear are mutually and vertically connected to form an L-shaped shaft, the other end of the connecting shaft of the first bevel gear is connected with the shaft disc connecting piece, and the step of the first bevel gear is connected with the outer disc support through a stud;
a shaft shoulder is arranged on a connecting shaft of the second bevel gear; the axial displacement of miniature bearing and through the shaft shoulder restriction miniature bearing is cup jointed in the shaft hole of second bevel gear, the step of second bevel gear has through the double-screw bolt connection and is plated an auxiliary, it has cup jointed first circlip, hollow cylindrical and is plated piece and second circlip in proper order to be plated on the auxiliary, through first circlip and second circlip restriction hollow cylindrical by the axial displacement who plates the piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921502550.8U CN211311574U (en) | 2019-09-10 | 2019-09-10 | Rotating device for coating film on outer surface of hollow cylindrical plated part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921502550.8U CN211311574U (en) | 2019-09-10 | 2019-09-10 | Rotating device for coating film on outer surface of hollow cylindrical plated part |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211311574U true CN211311574U (en) | 2020-08-21 |
Family
ID=72053301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921502550.8U Active CN211311574U (en) | 2019-09-10 | 2019-09-10 | Rotating device for coating film on outer surface of hollow cylindrical plated part |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211311574U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110747442A (en) * | 2019-09-10 | 2020-02-04 | 天津大学 | Rotating device for coating film on outer surface of hollow cylindrical plated part |
-
2019
- 2019-09-10 CN CN201921502550.8U patent/CN211311574U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110747442A (en) * | 2019-09-10 | 2020-02-04 | 天津大学 | Rotating device for coating film on outer surface of hollow cylindrical plated part |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100392147C (en) | Pair target twin magnetic controlled sputtering ion plating deposition device | |
| CN107805786A (en) | Multi sphere ion vacuum coating machine | |
| CN110760808B (en) | Curved surface screen magnetron sputtering assembly | |
| CN214458296U (en) | Self-revolution umbrella stand for vacuum coating machine | |
| CN211311574U (en) | Rotating device for coating film on outer surface of hollow cylindrical plated part | |
| CN104328380A (en) | Bearing roller unbalanced magnetron sputtering ion plating device and bearing roller unbalanced magnetron sputtering ion plating method | |
| CN206359609U (en) | A kind of work rest of vacuum coating equipment | |
| CN215103524U (en) | Three-dimensional turntable structure applied to vacuum tool coating equipment | |
| CN101638774B (en) | Rotatable sample position of magnetron sputtering device | |
| CN211734462U (en) | Curved surface screen magnetron sputtering subassembly | |
| CN112626479A (en) | Double-rotation equipment for improving coating uniformity of multi-arc ion plating equipment | |
| CN208038548U (en) | A kind of high temperature resistant load-bearing workpiece rotating turret and nano material making apparatus | |
| CN110747442A (en) | Rotating device for coating film on outer surface of hollow cylindrical plated part | |
| CN210945770U (en) | Vacuum magnetron sputtering film plating equipment | |
| CN208632638U (en) | A kind of planetary three-stage cylindrical gear insert clamp device | |
| CN110724924A (en) | Steel ball plasma coating clamp | |
| CN110527966B (en) | Horizontal magnetron sputtering equipment for long pipe coating | |
| CN2796861Y (en) | Coating clamping apparatus for sleeve type parts | |
| CN207552435U (en) | A kind of gap control device, cleaning equipment for work-piece and vacuum coating equipment | |
| CN211227319U (en) | Steel ball plasma coating clamp | |
| CN210215522U (en) | Equipment for evaporating and plating terbium or dysprosium on surface of magnetic material | |
| JPH0794711B2 (en) | Rotary table for ion plating device | |
| CN212834006U (en) | Rotary tool for evaporation coating | |
| CN112680701A (en) | Cathode target device and vacuum multi-arc ion coating machine | |
| CN209619445U (en) | A kind of valve pocket plated film special fixture |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |