CN112680701A - Cathode target device and vacuum multi-arc ion coating machine - Google Patents
Cathode target device and vacuum multi-arc ion coating machine Download PDFInfo
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- CN112680701A CN112680701A CN202011428533.1A CN202011428533A CN112680701A CN 112680701 A CN112680701 A CN 112680701A CN 202011428533 A CN202011428533 A CN 202011428533A CN 112680701 A CN112680701 A CN 112680701A
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Abstract
The invention discloses a cathode arc target device and a vacuum multi-arc ion plating machine, relates to the technical field of ion plating, and aims to solve the problem that the conventional ion plating machine is complicated in film plating at different points of an object because an object is placed on a workpiece and is a fixing mechanism with a cathode arc target. The inside of ion coating machine main part steelframe is provided with the fixed plate, the lower terminal surface of fixed plate is provided with the threaded rod, and the threaded rod is provided with six, six the threaded rod all with the lower terminal surface threaded connection of coating machine main part steelframe, six the lower terminal surface of threaded rod all is provided with the column base, the top of ion coating machine main part steelframe is provided with the coating machine main part.
Description
Technical Field
The invention relates to the technical field of ion coating, in particular to a cathode arc target device and a vacuum multi-arc ion coating machine.
Background
The coating methods used in the modern aerospace industry are very diverse, such as electroplating, spraying, electroless plating, diffusion, and rolling. Many of the coating processes are mastered and play a significant role in production. However, the existing coating process cannot keep up with the development of the product, thereby promoting people to explore new coating technology. "ion plating" is a recent vacuum plating technique developed in the last decade. The ion plating process includes connecting evaporation source to anode, connecting workpiece to cathode, and applying high voltage DC of three-five kV to generate arc discharge between the evaporation source and the workpiece. Because the vacuum cover is filled with inert argon, part of the argon is ionized under the action of the discharge electric field, and a plasma dark space is formed around the cathode workpiece. The argon ions with positive charges are attracted by negative high voltage of the cathode to violently bombard the surface of the workpiece, so that particles and dirt on the surface of the workpiece are splashed and thrown out, and the surface to be plated of the workpiece is sufficiently cleaned by ion bombardment.
However, the existing ion plating machine places the object on the workpiece, and is a fixing mechanism with the cathode arc target, so that the problem of complexity in coating different points of the object is solved; therefore, the prior requirements are not met, and a cathode arc target device and a vacuum multi-arc ion coating machine are provided for the cathode arc target device.
Disclosure of Invention
The invention aims to provide a cathode arc target device and a vacuum multi-arc ion plating machine, which solve the problem that the existing ion plating machine provided in the background technology places an object on a workpiece, is a fixing mechanism with the cathode arc target, and is complicated when the object is plated at different points.
In order to achieve the purpose, the invention provides the following technical scheme: cathode arc target device and many arcs of vacuum ion plating machine, including ion plating machine main part steelframe, the inside of ion plating machine main part steelframe is provided with the fixed plate, the lower terminal surface of fixed plate is provided with the threaded rod, and the threaded rod is provided with six, six the threaded rod all with the lower terminal surface threaded connection of ion plating machine main part steelframe, six the lower terminal surface of threaded rod all is provided with the column base, the top of ion plating machine main part steelframe is provided with the coating machine main part.
Preferably, a servo motor is arranged on the upper end face of the coating machine main body, a fixing piece is arranged on one side of the servo motor, and a first conveying pipeline is arranged on one side of the fixing piece.
Preferably, one side of the coating machine main body is provided with two second conveying pipelines, a third conveying pipeline is arranged below each second conveying pipeline, a connecting pipeline is arranged between each second conveying pipeline and the corresponding third conveying pipeline, and the number of the connecting pipelines is two.
Preferably, the front end face of the coating machine main body is provided with two operation ports, the front end face of each operation port is provided with an overhaul baffle, and the overhaul baffles are rotatably connected with the coating machine main body through first rotating shafts.
Preferably, maintenance baffle one side is provided with the installation piece, and the installation piece is provided with two, two the inside of installation piece is provided with hexagonal rivet, and hexagonal rivet is provided with two, the inside of maintenance baffle is provided with the installation port.
Preferably, an inner cavity is arranged inside the coating machine main body, a central rotating shaft is arranged above the inner cavity, connecting rod bodies are arranged on two sides of the central rotating shaft, two connecting rod bodies are arranged and are rotationally connected with the central rotating shaft through a second rotating shaft, two second rotating shafts are arranged, one end of each of the two connecting rod bodies is provided with an electroplating port, the electroplating ports are rotatably connected with the connecting rod bodies through third rotating shafts, and the number of the third rotating shafts is two, a fixed base is arranged below the inner part of the inner cavity, a clamping mechanism is arranged above the fixed base, the inside of fixture is provided with the installation cavity, fixture inner wall all is provided with spring mechanism all around, and spring mechanism is provided with four, the inside of installation cavity is provided with anti-skidding paster.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, through the servo motor arranged on the coating machine main body and the central rotating shaft, the second rotating shaft and the third rotating shaft arranged in the coating machine main body, when an object is placed on a workpiece, the operation rod body can carry out electroplating operation on any angle of the object, and the convenience of the operation is improved.
2. Through the spring mechanism who sets up in fixture's inside, let the article place behind fixture's inside installation cavity, can carry out effectual clamp through spring mechanism all around, reduce the probability that drops, and the anti-skidding paster that sets up in the installation cavity has increaseed the frictional force between cavity and article to it is more firm to make fixed.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is an enlarged view of a portion of the clamping mechanism of the present invention;
in the figure: 1. a main steel frame of the ion plating machine; 2. a fixing plate; 3. a threaded rod; 4. a column shoe; 5. a film plating machine main body; 6. a servo motor; 7. a fixing member; 8. a first delivery conduit; 9. an operation port; 10. a maintenance baffle; 11. mounting a sheet; 12. a hexagonal rivet; 13. a first rotating shaft; 14. installing a port; 15. a second delivery conduit; 16. connecting a pipeline; 17. a third delivery conduit; 18. an inner cavity; 19. a central rotating shaft; 20. a second rotation shaft; 21. connecting the rod body; 22. a third rotation axis; 23. electroplating the port; 24. a fixed base; 25. a clamping mechanism; 26. installing a cavity; 27. a spring mechanism; 28. an anti-slip patch.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-3, an embodiment of the present invention is shown: cathode arc target device and many arcs of vacuum ion plating machine, including ion plating machine main part steelframe 1, the inside of ion plating machine main part steelframe 1 is provided with fixed plate 2, the lower terminal surface of fixed plate 2 is provided with threaded rod 3, and threaded rod 3 is provided with six, the setting of threaded rod 3, can effectually carry out the adjustment on the height, six threaded rods 3 all with the lower terminal surface threaded connection of ion plating machine main part steelframe 1, the lower terminal surface of six threaded rods 3 all is provided with column base 4, the top of ion plating machine main part steelframe 1 is provided with coating machine main part 5.
Further, the upper end face of the coating machine main body 5 is provided with a servo motor 6, one side of the servo motor 6 is provided with a fixing part 7, one side of the fixing part 7 is provided with a first conveying pipeline 8, and the servo motor 6 is arranged to provide rotating power.
Further, one side of coating machine main part 5 is provided with second pipeline 15, and second pipeline 15 is provided with two, and two second pipeline 15's below all is provided with third pipeline 17, is provided with connecting tube 16 between two second pipeline 15 and the third pipeline 17, and connecting tube 16 is provided with two, and connecting tube 16's setting lets the pipeline connect.
Further, the preceding terminal surface of coating machine main part 5 is provided with operation port 9, and the preceding terminal surface of operation port 9 is provided with overhauls baffle 10, overhauls baffle 10 and rotates with coating machine main part 5 through first rotation axis 13 and is connected, and first rotation axis 13 is provided with two, and the setting of first rotation axis 13 lets to rotate comparatively conveniently.
Further, maintenance baffle 10 one side is provided with installation piece 11, and installation piece 11 is provided with two, and the inside of two installation pieces 11 is provided with hexagonal rivet 12, and hexagonal rivet 12 is provided with two, and the inside of maintaining baffle 10 is provided with installation port 14, and the setting of hexagonal rivet 12 makes the installation more firm.
Further, an inner cavity 18 is arranged inside the coating machine main body 5, a central rotating shaft 19 is arranged above the inner cavity 18, two connecting rod bodies 21 are arranged on two sides of the central rotating shaft 19, two connecting rod bodies 21 are arranged, the two connecting rod bodies 21 are rotatably connected with the central rotating shaft 19 through a second rotating shaft 20, two second rotating shafts 20 are arranged, one ends of the two connecting rod bodies 21 are respectively provided with an electroplating port 23, the electroplating ports 23 are rotatably connected with the connecting rod bodies 21 through a third rotating shaft 22, two third rotating shafts 22 are arranged, a fixed base 24 is arranged below the inner cavity 18, a clamping mechanism 25 is arranged above the fixed base 24, an installation cavity 26 is arranged inside the clamping mechanism 25, four spring mechanisms 27 are arranged on the periphery of the inner wall of the clamping mechanism 25, four spring mechanisms 27 are arranged, an anti-skid patch 28 is arranged inside the installation cavity 26, the arrangement of the anti-slip patches 28 can effectively increase the friction force between the article and the labor price.
The working principle is as follows: during the use, will overhaul baffle 10 and rotate through first rotation axis 13 and open, place the article inside fixture 25 work piece, go on firm fixed to the article through the flexible of spring mechanism 27, and the anti-skidding paster 28 that sets up in the installation cavity 26 in fixture 25 can effectually increase the frictional force of being connected between article and the labour price, and servo motor 6 that sets up on coating machine main part 5 can rely on central axis of rotation 19 to carry out the adjustment of horizontal angle, and second rotation axis 20 and the third rotation axis 22 that sets up can effectively adjust electroplating article coating film angle.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (6)
1. Cathode arc target device and vacuum multi-arc ion plating machine, including ion plating machine main part steelframe (1), its characterized in that: the inside of ion coating machine main part steelframe (1) is provided with fixed plate (2), the lower terminal surface of fixed plate (1) is provided with threaded rod (3), and threaded rod (3) are provided with six, six threaded rod (3) all with the lower terminal surface threaded connection of coating machine main part steelframe (1), six the lower terminal surface of threaded rod (3) all is provided with column base (4), the top of ion coating machine main part steelframe (1) is provided with coating machine main part (5).
2. The cathode arc target device and the vacuum multi-arc ion plating machine of claim 1 are characterized in that: the coating machine is characterized in that a servo motor (6) is arranged on the upper end face of the coating machine main body (5), a fixing piece (7) is arranged on one side of the servo motor (6), and a first conveying pipeline (8) is arranged on one side of the fixing piece (7).
3. The cathode arc target device and the vacuum multi-arc ion plating machine of claim 1 are characterized in that: one side of coating machine main part (5) is provided with second pipeline (15), and second pipeline (15) are provided with two, two the below of second pipeline (15) all is provided with third pipeline (17), two be provided with connecting tube (16) between second pipeline (15) and third pipeline (17), and connecting tube (16) are provided with two.
4. The cathode arc target device and the vacuum multi-arc ion plating machine of claim 1 are characterized in that: the coating machine is characterized in that a running port (9) is formed in the front end face of the coating machine main body (5), an overhauling baffle (10) is arranged on the front end face of the running port (9), the overhauling baffle (10) is rotatably connected with the coating machine main body (5) through a first rotating shaft (13), and the number of the first rotating shafts (13) is two.
5. The cathode arc target device and the vacuum multi-arc ion plating machine of claim 4, wherein: overhaul baffle (10) one side and be provided with installation piece (11), and installation piece (11) are provided with two, two the inside of installation piece (11) is provided with hexagonal rivet (12), and hexagonal rivet (12) is provided with two, the inside of overhauing baffle (10) is provided with installation port (14).
6. The cathode arc target device and the vacuum multi-arc ion plating machine of claim 1 are characterized in that: the interior of the film plating machine main body (5) is provided with an inner cavity (18), the top of the interior of the inner cavity (18) is provided with a central rotating shaft (19), the two sides of the central rotating shaft (19) are provided with two connecting rod bodies (21), the two connecting rod bodies (21) are rotatably connected with the central rotating shaft (19) through second rotating shafts (20), the two second rotating shafts (20) are provided with two connecting rod bodies, one end of each connecting rod body (21) is provided with an electroplating port (23), the electroplating ports (23) are rotatably connected with the connecting rod bodies (21) through third rotating shafts (22), the number of the third rotating shafts (22) is two, a fixed base (24) is arranged below the interior of the inner cavity (18), a clamping mechanism (25) is arranged above the fixed base (24), the inside of fixture (25) is provided with installation cavity (26), fixture (25) inner wall all is provided with spring mechanism (27) all around, and spring mechanism (27) are provided with four, the inside of installation cavity (26) is provided with anti-skidding paster (28).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011428533.1A CN112680701A (en) | 2020-12-07 | 2020-12-07 | Cathode target device and vacuum multi-arc ion coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011428533.1A CN112680701A (en) | 2020-12-07 | 2020-12-07 | Cathode target device and vacuum multi-arc ion coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112680701A true CN112680701A (en) | 2021-04-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011428533.1A Withdrawn CN112680701A (en) | 2020-12-07 | 2020-12-07 | Cathode target device and vacuum multi-arc ion coating machine |
Country Status (1)
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| CN (1) | CN112680701A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113789500A (en) * | 2021-08-04 | 2021-12-14 | 湖北三峡职业技术学院 | Ion plating device and method for automatically adjusting ion beam sputtering angle and incidence angle |
-
2020
- 2020-12-07 CN CN202011428533.1A patent/CN112680701A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113789500A (en) * | 2021-08-04 | 2021-12-14 | 湖北三峡职业技术学院 | Ion plating device and method for automatically adjusting ion beam sputtering angle and incidence angle |
| CN113789500B (en) * | 2021-08-04 | 2023-07-25 | 湖北三峡职业技术学院 | Ion plating device and method capable of automatically adjusting sputtering angle and incidence angle of ion beam |
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Application publication date: 20210420 |