CN220393886U - Tool device with sample roller capable of rotating, walking and flexible stopping - Google Patents
Tool device with sample roller capable of rotating, walking and flexible stopping Download PDFInfo
- Publication number
- CN220393886U CN220393886U CN202320511591.3U CN202320511591U CN220393886U CN 220393886 U CN220393886 U CN 220393886U CN 202320511591 U CN202320511591 U CN 202320511591U CN 220393886 U CN220393886 U CN 220393886U
- Authority
- CN
- China
- Prior art keywords
- roller
- walking
- driving gear
- sample
- tool device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000429 assembly Methods 0.000 claims abstract description 19
- 230000000712 assembly Effects 0.000 claims abstract description 19
- 230000007704 transition Effects 0.000 claims abstract description 19
- 239000011248 coating agent Substances 0.000 abstract description 8
- 238000000576 coating method Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000006247 magnetic powder Substances 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a tool device capable of rotating, walking and flexibly stopping a sample roller, which comprises a track assembly, 2 groups of walking roller assemblies, 2 walking brackets, 2 insulating pieces, a handle, a front roller bracket, 2 front rollers, 4 roller positioning seat insulating pieces, 4 groups of roller positioning seat assemblies, a rear roller and driving gear bracket, 2 rear rollers, 2 front and rear roller connecting sleeves, 2 roller driving insulating transition sleeves, 2 groups of roller driving gear assemblies, 2 groups of transition gear assemblies, a driving gear assembly and 2 stopping pieces. The sample roller is driven synchronously in the same direction by adopting the coaxial axial front roller and the axial rear roller and the radial double rollers, so that the working efficiency and the production efficiency are greatly improved; the sample roller and the main shell are insulated by the double layers of insulating pieces, so that the quality of the coating film is greatly improved; the rotation parts are all high-resistant Wen Manzhu bearings, so that the production efficiency is greatly improved; and a flexible stop piece is adopted, so that the working efficiency is greatly improved.
Description
Technical Field
The utility model relates to the field of vacuum surface coating, in particular to a tool device with a sample roller capable of rotating, walking and flexibly stopping.
Background
Vacuum surface coating, also known as thin film deposition, is a vacuum chamber process that applies a very thin and stable coating layer to the substrate surface to protect it from forces that may wear or reduce its efficiency. The vacuum coating is very thin, with a thickness of between 0.25 and 10 microns (0.01 to 0.4 inches). Types include PVD coating, sputtering, cathodic arc, atomic layer deposition. The method is mainly used for injection molds, semiconductors, additive manufacturing, medical tools, manufacturing tools, aerospace and automobiles. The primary function is not only to make the substrate or part durable, but also to maintain a high level of performance of the part throughout its life.
Based on Chinese patent grant public number CN 110885966A, a drum-type magnetron sputtering coating machine is provided, a roller with a gear is placed on a charged conductive roller, the conductive roller arranged on a roller seat is in contact with the outer side wall surface of the sputtering roller, and the roller is driven to rotate by meshing a gear on a driving device arranged on a vacuum shell with the gear on the roller. The Chinese patent grant publication No. CN 211142147U provides a roller for a sputtering film plating integrated machine, which comprises a roller body, two rollers, two annular gears, a plurality of supporting guide posts and baffle assemblies, wherein the roller rolls in the film plating process, so that a large number of objects in a containing cavity can rotate along with the rolling body, the contact area between all objects to be plated and film forming substances is increased, and the uniformity of film plating is improved. Both of the above patents describe a geared roller placed on a conductive roller in a vacuum housing, the rotation of the gear on the roller, i.e., the rotation of the roller, being driven by the rotation of the gear on a drive mounted on the vacuum housing. The rollers in both of the above patents are handled and positioned by a worker in a vacuum housing to operate, thereby considering the size of the vacuum housing in which the rollers are placed.
Based on Chinese patent grant publication No. CN 114318269B, a device and a method for sputtering and depositing metal on the surface of a magnetic powder material are disclosed, wherein the device comprises a vacuum cavity, a vacuum main group, a magnetron sputtering target, an anode ion source, a water-cooled anode and a sample containing part arranged in the vacuum cavity. The utility model also discloses an utility model device which enables the rotary roller to axially walk and flexibly position, and the utility model is suitable for the vacuum coating device.
Disclosure of Invention
The utility model aims to provide a sample roller filled with magnetic powder materials, which can run along the axial direction of the roller, can rotate positively and negatively under the vacuum state of magnetron sputtering, achieves the effect of sputtering and depositing metal on the uniform surface of magnetic powder, and improves the quality of products.
The technical aim of the utility model is realized by the following technical scheme:
the utility model discloses a device for enabling a rotary roller to axially walk and flexibly position, which comprises a track assembly, 2 groups of walking roller assemblies, 2 walking brackets, 2 insulating parts, a handle, a front roller bracket, 2 front rollers, 4 roller positioning seat insulating parts, 4 groups of roller positioning seat assemblies, a rear roller and driving gear bracket, 2 rear rollers, 2 front and rear roller connecting sleeves, 2 roller driving insulating transition sleeves, 2 groups of roller driving gear assemblies, 2 groups of transition gear assemblies, a driving gear assembly and 2 stopping parts.
Through adopting above-mentioned scheme, preceding gyro wheel with back gyro wheel pass through gyro wheel positioning seat insulator, gyro wheel positioning seat subassembly and install respectively on handle and preceding gyro wheel support and back gyro wheel and drive gear support, then with preceding back gyro wheel adapter sleeve will preceding gyro wheel with back gyro wheel connect into coaxial subassembly.
Preferably, the front roller and the rear roller 10 are connected into a coaxial rotating member by the front roller and rear roller connecting sleeve, so that the front roller and the rear roller synchronously and coaxially rotate.
Preferably, the front roller and the rear roller are insulated from the handle, the front roller support, the rear roller and the driving gear support, so that the sample roller and the main shell are good in insulation, and the coating quality is improved.
By adopting the scheme, the roller driving gear assembly is connected with the rear roller through the roller driving insulating transition sleeve, and the front roller, the rear roller and the driving gear assembly are coaxial assemblies.
Preferably, the driving gear assembly and the front roller and the rear roller 10 are coaxially and synchronously rotated in the same direction.
Preferably, the driving gear component is insulated from the rear roller, so that the sample roller is insulated from the main shell, and the coating quality is improved.
Through adopting above-mentioned scheme, the drive driving gear subassembly rotatory drive both sides simultaneously transition gear subassembly 14 rotatory, in proper order respectively synchronous drive gyro wheel drive gear subassembly rotation, promptly the drive driving gear subassembly synchronous drive both sides front gyro wheel with back gyro wheel coaxial synchronous syntropy rotation simultaneously.
Preferably, the driving gear assembly synchronously drives the front roller and the rear roller on both sides to coaxially and synchronously rotate, namely, the front roller and the rear roller on both sides synchronously rotate in the same direction, so that the double-driving roller of the sample roller rotates, and the sample roller is prevented from slipping.
By adopting the scheme, the two groups of roller assemblies are assembled by the walking bracket, and then the handle and the front roller bracket are connected with the rear roller and the driving gear bracket in an insulating way by the insulating piece.
Preferably, the handle and the front roller support and the rear roller and the driving gear support are insulated from the main shell, so that the insulation between the sample roller and the main shell is better.
Through adopting above-mentioned scheme, the stopper installation with walking support end, walking roller assembly along the track subassembly enter into in the main casing, manual stirring the stopper, make the stopper be in the middle pull rod of track subassembly, the walking roller assembly can not walk along the track in the main casing promptly, if let the walking then with the rotatory stirring of stopper break away from the middle pull rod of track subassembly, but the walking.
Preferably, the stop piece rotates flexibly, is mutually restricted with the track, and is convenient to install and detach.
By adopting the scheme, the walking roller assembly consists of a walking main shaft, a Gao Wenman bead bearing, a unilateral baffle roller and a dust cover.
Preferably, the walking roller assembly improves the service life and avoids the clamping stagnation phenomenon.
Other preferred embodiments of the utility model are:
the walking roller assembly, the roller positioning seat assembly, the roller driving gear assembly and the transition gear assembly are provided with high-resistant Wen Manzhu bearings, so that the phenomenon of bearing clamping stagnation is avoided.
The configuration is excellent, the rear roller is a double-sided clamping groove roller, the front roller is a single-sided roller, so that the flange of the sample roller is arranged in the clamping groove roller, and the axial deviation of the roller during rotation is avoided.
The angle is preferably between 60 and 70 degrees between the center of the sample roller and the center of the rear roller or the front roller, so that the phenomenon that the sample roller slips and is separated from the roller is avoided.
In summary, the utility model has the following beneficial effects:
the sample roller is driven synchronously in the same direction by adopting the coaxial and radial double rollers of the axial front roller and the axial rear roller, so that the working efficiency and the production efficiency are greatly improved.
The sample roller and the main shell are insulated by the insulating piece in a double-layer manner, so that the quality of the coating film is greatly improved.
The rotation parts are all high-resistant Wen Manzhu bearings, so that the production efficiency is greatly improved.
And a flexible stop piece is adopted, so that the working efficiency is greatly improved.
Drawings
FIG. 1 is a schematic diagram of the whole structure of a tool device with a sample drum capable of rotating, walking and flexibly stopping in an embodiment;
FIG. 2 is a schematic view of an assembled structure of a protruding running roller assembly in an embodiment;
FIG. 3 is a schematic illustration of the configuration of the protruding gear drive in an embodiment;
FIG. 4 is a schematic view of the structure of the protruding gear assembly in the embodiment;
fig. 5 is a schematic diagram showing an assembly structure of front and rear rollers protruding in the embodiment:
FIG. 6 is a schematic structural view of the sample drum and the front and rear roller arrangements on both sides;
in the figure, 1-track assembly; 2-a walking roller assembly; 21-countersunk head screws; 22-a dust cap; 23-circlips for holes; 24-bearing; 25-walking rollers; 26-a walking roller shaft; 3-a walking bracket; 4-insulating member; 5-handle and front roller support; 6-front rollers; 7-roller positioning seat insulation pieces; 8-a roller positioning seat assembly; 81-a roller positioning seat group; 9-rear idler wheels and driving gear brackets; 10-a rear roller; 11-front and rear roller connecting sleeves; 12-roller driving insulation transition sleeve; 13-a roller drive gear assembly; 131-a roller drive gear mount; 132-roller drive gear shaft; 133-a roller drive gear; 14-a transition gear assembly; 141-a transitional gear shaft; 142-transition gear; 15-a drive gear assembly; 151-driving the drive gear shaft; 152-drive gear; 16-stop.
Detailed Description
In order to more clearly illustrate the technical preferred embodiments and effects of the present utility model, preferred embodiments of the present utility model will be specifically and clearly described below with reference to the accompanying drawings.
Examples: a tool device with a sample roller capable of rotating, walking and flexibly stopping is shown in fig. 1, and comprises a track assembly 1, 2 groups of walking roller assemblies 2, 2 walking brackets 3, 2 insulators 4, a handle and front roller bracket 5, 2 front rollers 6, 4 roller positioning seat insulators 7, 4 groups of roller positioning seat assemblies 8, a rear roller and driving gear bracket 9, 2 rear rollers 10, 2 front and rear roller connecting sleeves 11, 2 roller driving insulating transition sleeves 12, 2 groups of roller driving gear assemblies 13, 2 groups of transition gear assemblies 14, a driving gear assembly 15 and a stopping piece 16.
As shown in fig. 1, the handle and the front roller bracket 5 can walk the tool device along the track, and the driving gear assembly 15 is driven to enable the front rollers 6 and the rear rollers 10 on two sides to coaxially and synchronously rotate in the same direction.
As shown in fig. 2, the walking wheel shaft 26 is fixedly positioned by the walking bracket 3, the walking roller 25 is positioned by the dust cover 25 and the hole circlip 23, and the device can walk along the track through the bearing 24, so that the sample roller can be easily taken out of and sent into the main shell.
As shown in fig. 3 and 4, the transition gear assembly 14 is a transition gear between the driving gear assembly 15 and the roller driving gear assembly 13, and then the bearing 24 and the circlip 23 for holes are installed in the transition gear 142 and the driving gear 152, that is, the transition gear assembly and the driving gear assembly 15 are fixed by a shaft, and the gears rotate; the roller driving gear mounting seat 131 is internally provided with a bearing 24, a circlip 23 for holes and a roller driving gear shaft, namely, the roller driving gear assembly 13 is fixed by a seat, and the inner shaft rotates.
As shown in fig. 5, the front roller 6 and the rear roller 10 are respectively and insulatively mounted on the handle and the front roller bracket 5 and the rear roller and the driving gear bracket 9, and are connected into a coaxial roller assembly by a front roller connecting sleeve 11 and a rear roller connecting sleeve 11, and are insulatively connected with a roller driving gear assembly 13 by a roller driving insulating transition sleeve 12.
As shown in fig. 6, the sample drum center is shown at an angle to the front roller 6 and the rear roller 10.
Claims (5)
1. The tool device is characterized by comprising a track assembly (1), 2 groups of walking roller assemblies (2), 2 walking brackets (3), 2 insulating pieces (4), a handle, a front roller bracket (5), 2 front rollers (6), 4 roller positioning seat insulating pieces (7), 4 groups of roller positioning seat assemblies (8), a rear roller and driving gear bracket (9), 2 rear rollers (10), 2 front and rear roller connecting sleeves (11), 2 roller driving insulating transition sleeves (12), 2 groups of roller driving gear assemblies (13), 2 groups of transition gear assemblies (14), a driving gear assembly (15) and 2 stopping pieces (16); the front roller (6) and the rear roller (10) are connected into a coaxial rotating piece by the front roller connecting sleeve and the rear roller connecting sleeve (11), so that the front roller (6) and the rear roller (10) synchronously and coaxially rotate; the front roller (6) and the rear roller (10) are insulated from the handle and front roller bracket (5) and the rear roller and driving gear bracket (9); the driving gear assembly (15) and the front roller (6) and the rear roller (10) coaxially and synchronously rotate in the same direction; the drive gear assembly (15) is insulated from the rear roller (10).
2. The tool device capable of rotating, walking and flexibly stopping for the sample roller according to claim 1, wherein the tool device is characterized in that: the driving gear assembly (15) synchronously drives the front roller (6) and the rear roller (10) on two sides to coaxially and synchronously rotate, namely the front roller (6) and the rear roller (10) on two sides synchronously rotate in the same direction, so that the sample roller double-driving roller rotates.
3. The tool device capable of rotating, walking and flexibly stopping for the sample roller according to claim 1, wherein the tool device is characterized in that: the handle and front roller support (5) and the drive gear support (9) are insulated from the main housing.
4. The tool device capable of rotating, walking and flexibly stopping for the sample roller according to claim 1, wherein the tool device is characterized in that: the stop (16) is flexibly rotatable and is mutually restricted with the rail.
5. The tool device capable of rotating, walking and flexibly stopping for the sample roller according to claim 1, wherein the tool device is characterized in that: the walking roller assembly (2) the roller positioning seat assembly (8) the roller driving gear assembly ((13), the transition gear assembly (14) and the driving gear assembly (15) are respectively provided with a high-resistant Wen Manzhu bearing, so that the phenomenon of bearing clamping stagnation is avoided, the rear roller (10) is a double-sided clamping groove roller, the front roller (6) is a single-sided roller, the flange of the sample roller is arranged in the clamping groove roller, the axis deviation of the roller during rotation is avoided, and the angle between the center of the sample roller and the center of the rear roller (10) or the center of the front roller (6) is 60-70 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320511591.3U CN220393886U (en) | 2023-03-16 | 2023-03-16 | Tool device with sample roller capable of rotating, walking and flexible stopping |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320511591.3U CN220393886U (en) | 2023-03-16 | 2023-03-16 | Tool device with sample roller capable of rotating, walking and flexible stopping |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220393886U true CN220393886U (en) | 2024-01-26 |
Family
ID=89602541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320511591.3U Active CN220393886U (en) | 2023-03-16 | 2023-03-16 | Tool device with sample roller capable of rotating, walking and flexible stopping |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220393886U (en) |
-
2023
- 2023-03-16 CN CN202320511591.3U patent/CN220393886U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100392147C (en) | Pair target twin magnetic controlled sputtering ion plating deposition device | |
| US9349576B2 (en) | Magnetron for cylindrical targets | |
| CN220393886U (en) | Tool device with sample roller capable of rotating, walking and flexible stopping | |
| CN102644056A (en) | Magnetron sputtering device used for thin film solar cell and control system thereof | |
| CN108950509A (en) | A kind of planetary three-stage cylindrical gear insert clamp device | |
| CN101376964B (en) | Sputtering type film coating apparatus and film coating method | |
| CN110760808A (en) | Curved surface screen magnetron sputtering subassembly | |
| CN215103524U (en) | Three-dimensional turntable structure applied to vacuum tool coating equipment | |
| CN114790565A (en) | Conductive device and horizontal electroplating equipment | |
| CN116516307A (en) | Novel tool device with rotary, walking and flexible stopping function for sample roller filled with magnetic powder material | |
| CN110527966B (en) | Horizontal magnetron sputtering equipment for long pipe coating | |
| CN101638774A (en) | Rotatable sample position of magnetron sputtering device | |
| CN213113477U (en) | Target baffle mechanism of vacuum coating machine | |
| CN101736297A (en) | Rotatable sputtering cathode device for film coating | |
| CN103510034A (en) | Method and apparatus for processing multilayer-metal-based composite material by multiple electric arc spraying | |
| CN211734462U (en) | Curved surface screen magnetron sputtering subassembly | |
| CN211689222U (en) | Drum-type magnetron sputtering film coating machine | |
| CN110983284A (en) | Axial rotation clamping mechanism for physical vapor deposition of surface coating of columnar part | |
| CN104611758A (en) | Planetary barrel plating machine | |
| CN211311574U (en) | Rotating device for coating film on outer surface of hollow cylindrical plated part | |
| CN205974653U (en) | Work piece that vacuum coating machine used is from rotary mechanism | |
| CN214572209U (en) | Vacuum coating equipment | |
| CN210215522U (en) | Equipment for evaporating and plating terbium or dysprosium on surface of magnetic material | |
| CN211595783U (en) | Clamping and rotating device for physical deposition coating on surface of thin bar | |
| CN108754593A (en) | A kind of electro-plating roller |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |