CN110983284A - Axial rotation clamping mechanism for physical vapor deposition of surface coating of columnar part - Google Patents
Axial rotation clamping mechanism for physical vapor deposition of surface coating of columnar part Download PDFInfo
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- CN110983284A CN110983284A CN201911367520.5A CN201911367520A CN110983284A CN 110983284 A CN110983284 A CN 110983284A CN 201911367520 A CN201911367520 A CN 201911367520A CN 110983284 A CN110983284 A CN 110983284A
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- 238000000576 coating method Methods 0.000 title claims abstract description 48
- 239000011248 coating agent Substances 0.000 title claims abstract description 34
- 238000005240 physical vapour deposition Methods 0.000 title claims abstract description 32
- 230000007246 mechanism Effects 0.000 title claims abstract description 20
- 238000012545 processing Methods 0.000 claims abstract description 10
- 238000009434 installation Methods 0.000 claims description 17
- 238000005096 rolling process Methods 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 6
- 229920003023 plastic Polymers 0.000 claims description 6
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 3
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 3
- 229920002530 polyetherether ketone Polymers 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 230000006978 adaptation Effects 0.000 claims description 2
- 230000006872 improvement Effects 0.000 description 10
- 238000000151 deposition Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
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- 230000000712 assembly Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
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- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
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- 239000000758 substrate Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses an axial rotating clamping mechanism for physical vapor deposition of coatings on the surfaces of columnar parts, which comprises a base and a fixing component fixedly arranged on the base, wherein one end of the fixing component is provided with a rotating part capable of rotating in the radial direction and a rotating driving motor used for driving the rotating part to rotate, the rotating part is provided with a columnar part fixing device used for fixing the columnar parts, the fixing component comprises a fixing part and a power part, and the fixing part and the power part are mutually fixed. The axial rotating clamping mechanism for physical vapor deposition of the coating on the surface of the columnar part has the advantages of simple structure, low implementation cost, small implementation difficulty, high processing quality, high coating consistency and the like which are not possessed by the prior art.
Description
Technical Field
The invention relates to auxiliary equipment used in the field of surface modification, in particular to an axial rotating clamping mechanism for physical vapor deposition of a coating on the surface of a columnar piece.
Background
The surface modification technology is a technology for covering a specific coating material on the surface of a part by means of physical deposition, chemical deposition, mechanical spraying and the like, so that the surface of the part obtains the performance of the coating material, and further the corrosion resistance, wear resistance, high temperature resistance, oxidation resistance and the like of the part are improved. Physical vapor deposition is a technique of gasifying the surface of a material source into gaseous atoms, molecules or partially ionizing the gaseous atoms into ions under a vacuum condition by a physical method, and depositing a film with a certain special function on the surface of a substrate through a low-pressure gas (or plasma) process, wherein the main methods comprise vacuum evaporation, sputtering coating, arc plasma coating, ion coating, molecular beam epitaxy and the like. However, in the conventional physical vapor deposition processing process, the shape of the part has a remarkable influence on the effect of the surface deposition coating, and for small parts with a columnar structure, if the surface coating deposition is carried out in a mode that the sample table integrally rotates, the single-batch processing quantity of samples is small, the processing cost is greatly increased, the consistency of the deposition conditions of the coatings at different positions cannot be ensured, and the overall performance of the surface coating is reduced. If the design of rotating mechanism is carried out on the sample platform, the reconstruction cost of equipment is greatly increased, and the sample platform aiming at parts with different sizes needs to be designed, and especially for the deposition of the surface coating of the parts with small quantity, the great waste is brought.
In conclusion, the prior art has the defects of high processing cost, difficult equipment modification, high equipment modification cost, complex structure, low production efficiency, poor consistency of the surface coating of the columnar piece and the like, and the defects limit further development, popularization and application in the field.
In view of the above, the present invention provides a new technical solution to solve the existing technical drawbacks.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides an axial rotating clamping mechanism for physical vapor deposition of a surface coating of a columnar piece, and solves the technical defects of complex structure, low working efficiency, high implementation cost, poor consistency of coatings of the columnar piece and the like when the surface coating physical vapor deposition is carried out on the columnar piece in the prior art.
The technical scheme adopted by the invention for solving the technical problems is as follows:
an axial rotation clamping mechanism for physical vapor deposition of coatings on surfaces of columnar pieces comprises a base and a fixing assembly fixedly mounted on the base, wherein one end of the fixing assembly is provided with a rotating part capable of rotating in the radial direction and a rotation driving motor used for driving the rotating part to rotate, and a columnar piece fixing device used for fixing the columnar pieces is arranged on the rotating part.
As an improvement of the above technical solution, the fixing component includes a fixing portion and a power portion, and the fixing portion and the power portion are fixed to each other.
As a further improvement of the above technical solution, the rotating portion is installed on the fixing portion through a rotating bearing, the rotating driving motor is installed inside the power portion, a driving gear is provided on an output shaft of the rotating driving motor, one end of the rotating portion is provided with a driven driving gear meshed with the driving gear, and the driving motor can pass through the driving gear and the driven driving gear to drive the rotating portion to rotate and further drive the columnar member fixed on the rotating portion to rotate.
As a further improvement of the above technical scheme, rotation portion one end has the axis of rotation of outside extension, the adaptation has been seted up to the fixed part intermediate position through-hole in the middle of the fixed part that the axis of rotation passed, the axis of rotation passes the through-hole in the middle of the fixed part just driven gear installs the one end that passes the through-hole in the middle of the fixed part at the axis of rotation, offer on the fixed part and be used for the installation rolling bearing's bearing installation position, rolling bearing's outer lane fixed mounting be in the lateral wall of bearing installation position, the axis of rotation fixed mounting be in rolling bearing.
As a further improvement of the above technical solution, key assemblies are disposed between the output shaft of the rotation driving motor and the driving gear and between the rotation shaft and the driven driving gear, the key assemblies include fixed keys and fixed key top pressure springs, key mounting positions are disposed on the output shaft and the rotation shaft of the rotation driving motor, the fixed keys are disposed in the key mounting positions, the fixed key top pressure springs are disposed between the bottoms of the key mounting positions and the bottoms of the fixed keys and press the upper portions of the fixed keys into corresponding locking concave positions on the driving gear or the driven driving gear, and both ends of the upper portions of the fixed keys are provided with bevel structures.
As a further improvement of the above technical solution, a motor mounting position is provided inside the power portion, the rotation driving motor is fixedly mounted in the motor mounting position, and a gear clearance concave position for accommodating the driving gear and the driven driving gear is inwardly provided at one end of the fixed portion away from the rotation portion;
as a further improvement of the above technical solution, the power unit and the driving gear are both made of polymer insulating materials.
As a further improvement of the above technical scheme, the fixed part passes through coupling assembling reciprocal anchorage with power portion, coupling assembling is including articulating the connecting rod at the fixed part lateral wall and setting up the connecting rod locking bolt at the connecting rod free end, connecting rod locking bolt with power portion fixed connection, the fixed part lateral wall has the articulated seat of connection, connecting rod one end is articulated to be installed connect articulated seat on, the connecting rod free end is offered and is used for the installation connecting rod locking bolt's through-hole, connecting rod locking bolt passes threaded connection is on power portion behind the through-hole of connecting rod.
As a further improvement of the above technical solution, the column fixing device on the rotating portion is a column fixing mounting hole formed inward by one end of the rotating portion, one end of the column can be inserted into and fixed to the column fixing mounting hole, a column fastening screw hole communicated with the column fixing mounting hole is formed in the side portion of the rotating portion, a column fastening screw is arranged in the column fastening screw hole, and the column fastening screw is a plastic screw made of PEEK plastic.
As a further improvement of the above technical solution, a spacing post is provided between the base and the fixing component, a spacing post mounting hole for inserting the spacing post is provided on both the base and the fixing component, the lower end of the spacing post is inserted into the spacing post mounting hole on the base, and the upper end of the spacing post is inserted into the corresponding spacing post mounting hole on the fixing component.
As a further improvement of the technical proposal, the rotating speed range of the rotating part and the columnar member during the physical vapor deposition processing of the surface coating is 0.1 to 200 r/min.
The invention has the beneficial effects that: the invention provides an axial rotating clamping mechanism for physical vapor deposition of a coating on the surface of a columnar piece, which drives a rotating part and the columnar piece to rotate through a rotating driving motor, a driving gear and a driven driving gear, so that the uniformity of the surface coating of the columnar piece in the process of processing the physical vapor deposition of the surface coating can be effectively improved, the consistency of the surface coating of the columnar piece is high, and the processing quality of a product is better; this kind of column spare surface coating physical vapor deposition is with axial rotation fixture's simple structure, can reduce substantially when implementing and implement the degree of difficulty and implementation cost, avoid consumeing a large amount of manpower and materials and carry out equipment transformation, reduced manufacturing cost, use and experience better.
In conclusion, the axial rotating clamping mechanism for physical vapor deposition of the surface coating of the columnar piece solves the technical defects of complex structure, low working efficiency, high implementation cost, poor consistency of the coating of the columnar piece and the like when the surface coating of the columnar piece is deposited in the prior art.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is an assembly schematic of the present invention;
fig. 2 is a schematic view showing the construction of a key assembly provided on a rotary shaft according to the present invention.
Detailed Description
The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and those skilled in the art can obtain other embodiments without inventive effort based on the embodiments of the present invention, and all embodiments are within the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. The technical features of the invention can be interactively combined without conflicting with each other, as shown in fig. 1 and 2.
An axial rotation clamping mechanism for physical vapor deposition of coatings on the surfaces of columnar parts comprises a base 1 and a fixing assembly fixedly mounted on the base 1, wherein the fixing assembly comprises a fixing part 3 and a power part 4, the fixing part 3 and the power part 4 are mutually fixed, one end of the fixing assembly is provided with a rotating part 2 capable of rotating in the radial direction and a rotation driving motor 5 for driving the rotating part 2 to rotate, specifically, the rotating part 2 is rotatably mounted on the side part of the fixing part 3, and a columnar part fixing device for fixing a columnar part 20 is arranged on the rotating part 2; the rotating speed of the rotating part 2 and the columnar member 20 during physical vapor deposition of the surface coating is 0.1 to 200 r/min.
Preferably, the rotating part 2 is mounted on the fixing part 3 through a rotating bearing 30, the rotating driving motor 5 is mounted inside the power part 4, a driving gear 51 is arranged on an output shaft of the rotating driving motor 5, a driven driving gear 52 meshed with the driving gear 51 is arranged at one end of the rotating part 2, and the driving motor 5 can drive the rotating part 2 to rotate through the driving gear 51 and the driven driving gear 52 and further drive the column-shaped member 20 fixed on the rotating part 2 to rotate; one end of the rotating part 2 is provided with a rotating shaft 21 extending outwards, a fixing part middle through hole 31 matched with the rotating shaft 21 to penetrate is formed in the middle of the fixing part 3, the rotating shaft 21 penetrates through the fixing part middle through hole 31, the driven driving gear 52 is installed at one end, penetrating through the fixing part middle through hole 31, of the rotating shaft 21, a bearing installation position 32 used for installing the rotating bearing 30 is formed in the fixing part 3, the outer ring of the rotating bearing 30 is fixedly installed on the side wall of the bearing installation position 32, and the rotating shaft 21 is fixedly installed on the inner ring of the rotating bearing 30; key components are arranged between the output shaft of the rotary driving motor 5 and the driving gear 51 and between the rotating shaft 21 and the driven driving gear 52, each key component comprises a fixed key 61 and a fixed key top pressing spring 62, key installation positions 63 are arranged on the output shaft of the rotary driving motor 5 and the rotating shaft 21, the fixed keys 61 are arranged in the key installation positions 63, the fixed key top pressing springs 62 are arranged between the bottoms of the key installation positions 63 and the bottoms of the fixed keys 61 and press the upper parts of the fixed keys 61 into corresponding locking concave positions on the driving gear 51 or the driven driving gear 52, and two ends of the upper part of each fixed key 61 are provided with bevel structures 611; a motor mounting position 41 is arranged in the power part 4, the rotary driving motor 5 is fixedly mounted in the motor mounting position 41, and a gear clearance concave position 33 for accommodating the driving gear 51 and the driven driving gear 52 is inwards arranged at one end of the fixed part 3 away from the rotary part 2; the power unit 4 and the driving gear 51 are both made of polymer insulating material.
Preferably, fixed part 3 and power portion 4 are fixed each other through coupling assembling, coupling assembling is including articulating the connecting rod 71 at the fixed part 3 lateral wall and setting up the connecting rod locking bolt 72 at connecting rod 71 free end, connecting rod locking bolt 72 with power portion 4 fixed connection, the fixed part 3 lateral wall has the articulated seat 73 of connection, connecting rod 71 one end is articulated to be installed on the articulated seat 73 of connection, connecting rod 71 free end is offered and is used for the installation the through-hole of connecting rod locking bolt 72, connecting rod locking bolt 72 passes threaded connection is on power portion 4 behind the through-hole of connecting rod 71.
Preferably, the column fixing device on the rotating part 2 is a column fixing mounting hole 201 formed by one end of the rotating part inwards, one end of the column 20 can be inserted into and fixed to the column fixing mounting hole 201, a column fastening screw hole communicated with the column fixing mounting hole 201 is formed in the side part of the rotating part 2, a column fastening screw 202 is arranged in the column fastening screw hole, and the column fastening screw 202 is a plastic screw made of PEEK plastic; be provided with spacing post 8 between base 1 and the fixed subassembly, all offer on base 1 and the fixed subassembly and be used for inserting spacing post mounting hole of spacing post 8, during the spacing post mounting hole on spacing post 8's the lower extreme inserts base 1, during the spacing post mounting hole that corresponds on the fixed subassembly was inserted to the upper end of spacing post 8.
In the specific implementation of the present invention, the column 20 to be subjected to surface coating physical vapor deposition is inserted into the column fixing mounting hole 201 of the rotating part 2, the column 20 is fixed in the column fixing mounting hole 201 by using the column fastening screw 202, and after the column 20 is fixed, the column is placed on the sample stage of the physical vapor deposition apparatus.
After the device starts to work, the rotation driving motor 5 drives the rotation part 2 to rotate through the driving gear 51 and the driven driving gear 52, the rotation part 2 drives the columnar part 20 to rotate in the rotation process, and the rotation speed range is 0.1-200 r/min, so that the surface coating of the columnar part has better uniformity when the surface coating physical vapor deposition processing is carried out on the columnar part, the structure of the whole device is simple, the implementation difficulty is low, and the implementation cost is low.
Example 1:
the surface of a columnar fastener (columnar member 20) used in a machine is subjected to physical vapor deposition by a magnetron sputtering method of a WC coating, and the material of the columnar member 20 is stainless steel. First, the columnar member 20 is held at the front end of the rotating part 2 and fixed by a columnar member fastening screw 202; then all the clamped columnar parts 20 are orderly placed on a sample table of the magnetron sputtering equipment according to requirements, and power lines and control lines are connected to an external power supply and control lines. Vacuum pumping to make background vacuum degree higher than 3 × 10– 4After Pa, the power supply of the motor is turned on, and the rotation driving motor 5 drives the rotation part 2 to rotate through the driving gear 51 and the driven driving gear 52 and synchronously enables the columnar member 20 to start to rotate; introducing Ar gas to ensure the pressure of the cavity gasHeld at 3X 10-2Pa and then the deposition of the WC coating is started. And after the deposition is finished, disconnecting the power supply of the motor, introducing gas, opening the cavity and taking out the sample.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. The utility model provides a column spare surface coating physical vapor deposition is with axial rotation fixture which characterized in that: including base (1) and fixed mounting fixed subassembly on base (1), fixed subassembly one end is provided with but radial pivoted rotation portion (2) and is used for the drive rotation portion (2) pivoted rotates driving motor (5), be equipped with the column spare fixing device who is used for fixed column spare (20) on rotation portion (2).
2. An axial rotation clamping mechanism for physical vapor deposition of coatings on surfaces of cylindrical parts according to claim 1, wherein: the fixing component comprises a fixing part (3) and a power part (4), and the fixing part (3) and the power part (4) are mutually fixed.
3. An axial rotation clamping mechanism for physical vapor deposition of coatings on surfaces of cylindrical parts according to claim 2, wherein: rotation portion (2) are installed on fixed part (3) through rolling bearing (30), it installs to rotate driving motor (5) power portion (4) are inside, be provided with drive gear (51) on the output shaft of rotation driving motor (5), the one end of rotation portion (2) be provided with drive gear (51) intermeshing's driven drive gear (52), drive driving motor (5) accessible drive gear (51), driven drive gear (52) drive rotation portion (2) rotate and further drive column spare (20) of fixing on rotation portion (2) and rotate.
4. An axial rotation clamping mechanism for physical vapor deposition of coatings on surfaces of cylindrical parts according to claim 3, wherein: rotation portion (2) one end has outside axis of rotation (21) that extends, the adaptation has been seted up to fixed part (3) intermediate position through-hole (31) in the middle of the fixed part that axis of rotation (21) passed, axis of rotation (21) pass through hole (31) in the middle of the fixed part just driven drive gear (52) are installed and are passed the one end of through-hole (31) in the middle of the fixed part in axis of rotation (21), offer on fixed part (3) and be used for the installation bearing installation position (32) of rolling bearing (30), the outer lane fixed mounting of rolling bearing (30) is in the lateral wall of bearing installation position (32), axis of rotation (21) fixed mounting be in the inner circle of rolling bearing (30).
5. An axial rotation clamping mechanism for physical vapor deposition of coatings on surfaces of cylindrical parts according to claim 4, wherein: the key components are arranged between an output shaft of the rotary driving motor (5) and the driving gear (51) and between the rotating shaft (21) and the driven driving gear (52), each key component comprises a fixed key (61) and a fixed key jacking spring (62), key installation positions (63) are arranged on the output shaft of the rotary driving motor (5) and the rotating shaft (21), the fixed keys (61) are arranged in the key installation positions (63), the fixed key jacking springs (62) are arranged between the bottoms of the key installation positions (63) and the bottoms of the fixed keys (61) and press the upper parts of the fixed keys (61) into corresponding locking concave positions on the driving gear (51) or the driven driving gear (52), and oblique structures (611) are arranged at two ends of the upper part of each fixed key (61).
6. An axial rotation clamping mechanism for physical vapor deposition of coatings on surfaces of cylindrical parts according to claim 3, wherein: a motor mounting position (41) is arranged in the power part (4), the rotary driving motor (5) is fixedly mounted in the motor mounting position (41), and a gear clearance concave position (33) used for accommodating the driving gear (51) and the driven driving gear (52) is inwards arranged at one end, far away from the rotating part (2), of the fixing part (3);
the power part (4) and the driving gear (51) are both made of polymer insulating materials.
7. An axial rotation clamping mechanism for physical vapor deposition of coatings on surfaces of cylindrical parts according to claim 2, wherein: fixed part (3) and power portion (4) are fixed each other through coupling assembling, coupling assembling is including articulating connecting rod (71) at fixed part (3) lateral wall and setting up connecting rod locking bolt (72) at connecting rod (71) free end, connecting rod locking bolt (72) with power portion (4) fixed connection, fixed part (3) lateral wall has the articulated seat of connection (73), connecting rod (71) one end is articulated to be installed connect articulated seat (73) are last, connecting rod (71) free end is seted up and is used for the installation the through-hole of connecting rod locking bolt (72), connecting rod locking bolt (72) pass threaded connection is on power portion (4) behind the through-hole of connecting rod (71).
8. An axial rotation clamping mechanism for physical vapor deposition of coatings on surfaces of cylindrical parts according to claim 1, wherein: column spare fixing device on portion of rotating (2) is column spare fixed mounting hole (201) of seting up by portion of rotating one end inwards, the one end of column spare (20) can be inserted in column spare fixed mounting hole (201) and fixed, rotate portion (2) lateral part seted up with the column spare fastening screw of column spare fixed mounting hole (201) intercommunication, be provided with column spare fastening screw (202) in the column spare fastening screw, column spare fastening screw (202) are the plastic screw who is made by the PEEK plastics.
9. An axial rotation clamping mechanism for physical vapor deposition of coatings on surfaces of cylindrical parts according to claim 1, wherein: be provided with spacing post (8) between base (1) and the fixed subassembly, all offer on base (1) and the fixed subassembly and be used for inserting spacing post mounting hole of spacing post (8), during the lower extreme of spacing post (8) inserts the spacing post mounting hole on base (1), during the upper end of spacing post (8) inserts the spacing post mounting hole that corresponds on the fixed subassembly.
10. An axial rotation clamping mechanism for physical vapor deposition of coatings on surfaces of cylindrical parts according to claim 1, wherein: the rotating speed of the rotating part (2) and the columnar member (20) during physical vapor deposition processing of the surface coating is 0.1-200 r/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911367520.5A CN110983284A (en) | 2019-12-26 | 2019-12-26 | Axial rotation clamping mechanism for physical vapor deposition of surface coating of columnar part |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911367520.5A CN110983284A (en) | 2019-12-26 | 2019-12-26 | Axial rotation clamping mechanism for physical vapor deposition of surface coating of columnar part |
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| CN110983284A true CN110983284A (en) | 2020-04-10 |
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| CN201911367520.5A Pending CN110983284A (en) | 2019-12-26 | 2019-12-26 | Axial rotation clamping mechanism for physical vapor deposition of surface coating of columnar part |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111041445A (en) * | 2019-12-26 | 2020-04-21 | 北京大学深圳研究院 | Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts |
| CN113235061A (en) * | 2021-05-18 | 2021-08-10 | 南昌大学第一附属医院 | Preparation process of tantalum metal coating of medical screw |
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| CN211595785U (en) * | 2019-12-26 | 2020-09-29 | 北京大学深圳研究院 | Axial rotation clamping mechanism for physical vapor deposition of surface coating of columnar part |
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| CN113235061A (en) * | 2021-05-18 | 2021-08-10 | 南昌大学第一附属医院 | Preparation process of tantalum metal coating of medical screw |
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