CN112011772A

CN112011772A - Large-scale vacuum glow power generation nano-film coating equipment and working mode thereof

Info

Publication number: CN112011772A
Application number: CN202010778647.2A
Authority: CN
Inventors: 周树法
Original assignee: Kunshan Lite Nano Electronic Science & Technology Co ltd
Current assignee: Kunshan Lite Nano Electronic Science & Technology Co ltd
Priority date: 2020-08-05
Filing date: 2020-08-05
Publication date: 2020-12-01

Abstract

A large-scale vacuum glow power generation nanometer film coating device and a working method thereof comprise a slide valve pump, a pre-pumping valve, a front valve, a diffusion valve, a high valve and a vacuum coating chamber, wherein the vacuum coating chamber comprises a coating chamber main body, a rotary hanger structure and a coating chamber door structure, the rotary hanger structure is arranged in the middle of the coating chamber main body, and the coating chamber door structure is arranged on the side edge of the coating chamber main body; the coating chamber door structure is of a double-layer structure, and a pulse electromagnetic generator is arranged in the interlayer. The pulse electromagnetic generator is arranged in the middle layer of the coating chamber door structure with the double-layer structure, so that the plasma energy in the chamber is enhanced in a multiple manner, the deposition speed of coating is greatly improved, and the uniformity of the coated workpieces in the vacuum coating chamber from top to bottom is improved.

Description

Large-scale vacuum glow power generation nano-film coating equipment and working mode thereof

Technical Field

The invention relates to the field of nano coating, in particular to large-scale vacuum glow power generation nano film coating equipment and a working method thereof.

Background

In order to improve the surface properties of some mechanical parts and achieve the purposes of reducing vibration, reducing noise, reducing friction, prolonging service life and the like, the surface of the part is mostly subjected to nano film coating process treatment, and a wear-resistant and corrosion-resistant coating film material is formed by embedding components with the size of nano magnitude in a matrix.

Because the nano-film coating process is relatively complex, the currently used equipment has great defects: 1) the existing equipment has the defects that the height of the equipment in the market at present is not more than 1500mm because the installation of a hanger structure is troublesome, which means that the whole coating cavity is smaller, the loading capacity of a workpiece is less, and the coating efficiency is not high; 2) the coating quality of workpieces on the pendant is inconsistent at different positions, so that the defects of coating uniformity, slow deposition speed and the like exist in the whole coating, and the overall wear resistance, the service life and the like of the product are greatly influenced.

Disclosure of Invention

The purpose of the invention is as follows: the invention aims to provide large vacuum glow power generation nano film coating equipment and a working method thereof, and solves the problems existing in the use of the nano film coating equipment.

The technical scheme is as follows: the invention provides large-scale vacuum glow power generation nano-film coating equipment, which comprises a slide valve pump: a slide valve is arranged in the pump body, an eccentric wheel is arranged in the slide valve, the eccentric wheel is driven to rotate by a shaft which is communicated with the outside of the pump cylinder, the outer circle of the slide valve slides on the surface of the pump cylinder, and the upper part of the slide valve freely slides up and down and swings left and right in a semicircular slide valve guide rail; the upper part of the slide valve is hollow, gas passes through the hollow part of the slide valve, and the compressed gas jacks up an exhaust valve to be discharged out of the pump, so that the slide valve works circularly;

pre-pumping valve: after the sliding valve pump is started, the pre-pumping valve is mainly used for opening during rough pumping, namely, is used during low vacuum pumping, and is closed during high vacuum pumping;

a front-stage valve: after the pre-pumping valve is closed after the rough pumping is finished, the pre-pumping valve is opened for use during high vacuum pumping;

a diffusion valve: the diffusion pump oil in the pump body is heated and evaporated into steam, a high-speed steam jet flow is formed through a guide pipe and a nozzle and serves as a working medium, the pumped body is carried to the wall of the pump by the steam jet flow under the action of diffusion and carrying, the oil steam is condensed and then returns to the bottom of the pump, the gas is compressed step by step, and finally the gas is carried to a preceding stage by an injection-stage steam flow and is pumped away by a preceding-stage pump;

high valve: after the rough pumping is finished, closing the pre-pumping valve, opening the front-stage valve and then opening the pre-pumping valve, and using the pre-pumping valve when high vacuum is pumped;

a vacuum coating chamber: suspending a product to be coated on a suspension in a vacuum chamber according to process requirements, accelerating positive ions to bombard the surface of a target material by utilizing vacuum glow discharge to cause a sputtering phenomenon, and depositing atoms and molecules released from the surface of the target material on the product to form a film;

the vacuum coating chamber comprises a coating chamber main body, a rotary hanger structure, a coating chamber door structure and a glow discharge structure, wherein the rotary hanger structure is arranged in the middle of the coating chamber main body, and the coating chamber door structure is arranged on the side edge of the coating chamber main body; the glow discharge structure is arranged inside the coating chamber main body and close to the inner wall side; the coating chamber door structure is of a double-layer structure, and a pulse electromagnetic generator is arranged in the interlayer. The pulse electromagnetic generator is arranged in the middle layer of the coating chamber door structure with the double-layer structure, so that the plasma energy in the chamber is enhanced in a multiple manner, the deposition speed of coating is greatly improved, and the uniformity of the coated workpieces in the vacuum coating chamber from top to bottom is improved.

Further, rotatory stores pylon structure includes rotating electrical machines, shaft coupling, primary shaft bearing, first connecting axle structure, hanger structure, second connecting axle structure and secondary shaft bearing, rotating electrical machines passes through the shaft coupling and is connected with the first connecting axle structure one end that sets up in primary shaft bearing, the one end that the shaft coupling was kept away from to first connecting axle structure one end and first connecting axle structure is connected, and the other end is connected with the second connecting axle structure one end that sets up in the secondary shaft bearing. The rotary motor drives the first connecting shaft structure arranged on the first bearing seat to rotate through the coupler, so that the rack structure fixed through the first connecting shaft structure and the second connecting shaft structure is driven to rotate at a constant speed, the integral uniformity of workpieces on the rack structure in vacuum coating is improved, and the yield of products is greatly improved.

Furthermore, a positioning hole is formed in the end part, far away from one end of the fixed coupler, of the first connecting shaft structure. When the hanger assembly is installed, the upper end of the hanger assembly is inserted into the positioning hole of the first connecting shaft structure, and then the hanger assembly is fixed through the second connecting shaft structure.

Furthermore, the hanger structure comprises a hanger rotating shaft and hanger components, wherein the hanger components are arranged in a plurality of groups and are sequentially arranged on the hanger rotating shaft. The workpieces are sequentially arranged on the hanger assembly and rotate along with the hanger rotating shaft, so that uniform vacuum coating work is performed.

Furthermore, the fixing section of the hanger rotating shaft hanger assembly is a dodecahedron, and a plurality of fixing threaded holes which are arranged at equal intervals are formed in the plane of the dodecahedron. According to the size of the workpiece to be vacuum-coated, the hanger assembly is fixed at certain intervals, so that the coating work of workpieces of different types is met.

Further, the hanger subassembly is including solid fixed ring and peg, gu fixed ring is interior outside for parallel arrangement's dodecahedron, the peg is total six groups to gu fixed ring axle center is the circumference array setting in solid fixed ring outside as the center.

Further, gu be equipped with the counter sink on the fixed ring, six total groups use fixed ring axle center to be the circumference array setting in fixed ring outside and with the setting of staggering of peg as the center. The fixing ring is arranged on the hanger rotating shaft through the inner dodecahedron, and the countersunk holes on the fixing ring correspond to the fixing threaded holes on the hanger rotating shaft one by one so as to be fixed through bolts. The distance between the hanger components can be adjusted according to the size of the plated workpiece.

Further, the second connecting shaft structure comprises a connecting shaft body, a rotating shaft and a fixing block, and the fixing block is connected with the connecting shaft body through the rotating shaft. When the hanger structure is disassembled, the bolts for fixing the fixing block and the connecting shaft body are loosened, the fixing block rotates around the rotating shaft in the direction far away from the connecting surface of the connecting shaft body, so that the lower end of the hanger structure is taken out of the second connecting shaft structure, and then the upper end of the hanger structure is pulled out of the positioning hole of the first connecting shaft structure, so that the hanger structure is taken down; when the hanger structure is installed, the upper end of the hanger structure is firstly inserted into the positioning hole of the first connecting shaft structure, then the lower end of the hanger structure is pushed into the semicircular hole of the connecting shaft body of the second connecting shaft structure, the fixing block rotates around the rotating shaft to be close to the connecting shaft body connecting surface until the fixing block is attached, and then the fixing block and the connecting shaft body are locked by the bolt, so that the hanger structure is fixed.

Further, the working method of the large-scale vacuum glow power generation nano-film coating equipment is characterized by comprising the following steps: the method comprises the following specific steps

1) Opening a coating chamber door structure of the vacuum coating chamber, and taking down a hanger structure arranged on a rotary hanger structure in a coating chamber main body;

2) adjusting the number and the position of the hanger assembly on the hanger rotating shaft according to the size of the product, and sequentially placing the products to be subjected to vacuum coating on hanging rods of the hanger assembly;

3) mounting the hanger structure with the product on a rotary hanger structure, and closing a coating chamber door structure;

4) starting a slide valve pump, performing rough pumping work by a pre-pumping valve, and pumping the vacuum coating chamber to a low vacuum state of less than about.Pa;

5) after rough pumping is finished, closing the pre-pumping valve, sequentially opening the front valve, the diffusion valve and the high valve, maintaining the rice flour effect by using diffusion pump oil in a diffusion valve pump body, and continuously changing the volume of a suction cavity in the pump to continuously expand the volume of gas in a vacuum coating chamber so as to form vacuum;

6) the glow discharge structure in the vacuum coating chamber starts to work, and the evaporated gas forms ions in the reaction of collision and electron impact in the glow discharge, is accelerated in an electric field, and is condensed into a film on the surface of a product;

7) meanwhile, a pulse electromagnetic generator in the coating chamber door structure forms a pulse high-strength electromagnetic field, so that the plasma energy in the coating chamber main body is enhanced in a multiplied manner, and the deposition speed of coating is improved;

8) a rotary motor in the rotary hanging rack structure drives a hanging rack structure filled with products to rotate at a constant speed through a coupler;

9) and performing the operation until the vacuum coating work of the product is finished.

The technical scheme shows that the invention has the following beneficial effects: 1) the pulse high-strength electromagnetic generator is arranged outside the vacuum coating equipment, so that the plasma energy in the cavity is enhanced in a multiple manner, the deposition speed of coating is improved, and the coating efficiency and quality are greatly improved; 2) the rotatable hanger structure is arranged, so that the workpiece can rotate at a constant speed in the coating process, the coating uniformity of the workpiece is improved, and the yield of products is greatly improved; 3) the hanger structure is convenient to disassemble and assemble, the vacuum coating equipment in the invention has the height of 2800mm, the workpiece loading capacity is greatly improved, the cost of the coated workpiece is reduced by 50%, and the social and economic efficiency is remarkably improved; 4) the position of the hanger component on the hanger structure is adjustable, the hanger is suitable for processing workpieces with different sizes, and the hanger has wide applicability.

Drawings

FIG. 1 is a front view of the present invention;

FIG. 2 is a perspective view of a vacuum coating chamber;

FIG. 3 is a front view of the rotary hanger structure;

FIG. 4 is a perspective view of a first connecting shaft arrangement;

FIG. 5 is a front view of the hanger shaft;

FIG. 6 is a perspective view of the hanger assembly;

fig. 7 is a perspective view of a second connecting shaft structure.

In the figure: the vacuum coating device comprises a slide valve pump 1, a pre-pumping valve 2, a pre-stage valve 3, a diffusion valve 4, a high valve 5, a vacuum coating chamber 6, a coating chamber body 61, a rotary hanger structure 62, a rotary motor 621, a coupler 622, a first bearing block 623, a first connecting shaft structure 624, a positioning hole 6241, a hanger structure 625, a hanger rotating shaft 6251, a fixing threaded hole 62511, a hanger assembly 6252, a fixing ring 62521, a counter bore 625211, a hanging rod 62522, a second connecting shaft structure 626, a connecting shaft body 6261, a rotating shaft 5242, a fixing block 6263, a second bearing block 627, a coating chamber door structure 63 and a glow discharge structure 64.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be considered as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise specified, "a plurality" means two or more unless explicitly defined otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

Example one

Fig. 1 shows a front view of the present invention, including a slide valve pump 1: a slide valve is arranged in the pump body, an eccentric wheel is arranged in the slide valve, the eccentric wheel is driven to rotate by a shaft which is communicated with the outside of the pump cylinder, the outer circle of the slide valve slides on the surface of the pump cylinder, and the upper part of the slide valve freely slides up and down and swings left and right in a semicircular slide valve guide rail; the upper part of the slide valve is hollow, gas passes through the hollow part of the slide valve, and the compressed gas jacks up an exhaust valve to be discharged out of the pump, so that the slide valve works circularly;

pre-pumping valve 2: after the sliding valve pump is started, the pre-pumping valve is mainly used for opening during rough pumping, namely, is used during low vacuum pumping, and is closed during high vacuum pumping;

the front-stage valve 3: after the pre-pumping valve is closed after the rough pumping is finished, the pre-pumping valve is opened for use during high vacuum pumping;

the diffusion valve 4: the diffusion pump oil in the pump body is heated and evaporated into steam, a high-speed steam jet flow is formed through a guide pipe and a nozzle and serves as a working medium, the pumped body is carried to the wall of the pump by the steam jet flow under the action of diffusion and carrying, the oil steam is condensed and then returns to the bottom of the pump, the gas is compressed step by step, and finally the gas is carried to a preceding stage by an injection-stage steam flow and is pumped away by a preceding-stage pump;

a high valve 5: after the rough pumping is finished, closing the pre-pumping valve, opening the front-stage valve and then opening the pre-pumping valve, and using the pre-pumping valve when high vacuum is pumped;

vacuum coating chamber 6: suspending a product to be coated on a suspension in a vacuum chamber according to process requirements, accelerating positive ions to bombard the surface of a target material by utilizing vacuum glow discharge to cause a sputtering phenomenon, and depositing atoms and molecules released from the surface of the target material on the product to form a film;

as shown in fig. 3, the vacuum coating chamber 6 is a perspective view, and includes a coating chamber main body 61, a rotary hanger structure 62, a coating chamber door structure 63, and a glow discharge structure 64, wherein the rotary hanger structure 62 is disposed at the middle position of the coating chamber main body 61, and the coating chamber door structure 63 is disposed at the side of the coating chamber main body 61; the glow discharge structure 64 is arranged inside the coating chamber main body 61 and close to the inner wall side; the coating chamber door structure 63 is of a double-layer structure, and a pulse electromagnetic generator is arranged in the interlayer.

Fig. 3 is a front view of the rotating hanger structure 62, which includes a rotating motor 621, a coupler 622, a first bearing seat 623, a first connecting shaft structure 624, a hanger structure 625, a second connecting shaft structure 626 and a second bearing seat 627, wherein the rotating motor 621 is connected to one end of the first connecting shaft structure 624 disposed in the first bearing seat 623 through the coupler 622, one end of the first connecting shaft structure 624 is connected to one end of the first connecting shaft structure 624 away from the coupler 622, and the other end of the first connecting shaft structure 624 is connected to one end of the second connecting shaft structure 626 disposed in the second bearing seat 627.

Fig. 4 is a perspective view of the first connecting shaft structure 624, which has a positioning hole 6241 at the end away from the end of the fixed coupling 622.

The hanger structure 625 comprises a hanger rotating shaft 6251 and hanger assemblies 6252, wherein the hanger assemblies 6252 are arranged in groups in sequence on the hanger rotating shaft 6251.

As shown in fig. 5, which is a front view of the hanger rotating shaft 6251, the fixing section of the hanger assembly 6252 is a dodecahedron, and a plurality of fixing threaded holes 62511 are formed in the plane of the dodecahedron and are arranged at equal intervals.

Fig. 6 is a perspective view of the hanger assembly 6252, which includes a fixing ring 62521 and hanging rods 62522, wherein the fixing ring 62521 is a dodecahedron with inner and outer surfaces arranged in parallel, the hanging rods 62522 have six groups, and the fixing ring 62521 is arranged outside the fixing ring 62521 in a circumferential array with the axis of the fixing ring 62521 as the center.

The fixing ring 62521 is provided with countersunk holes 625211, and the six groups are arranged outside the fixing ring 62521 in a circumferential array with the axis of the fixing ring 62521 as the center and staggered with the hanging rod 62522.

As shown in fig. 7, the second connecting shaft structure 626 includes a connecting shaft body 6261, a rotating shaft 5242 and a fixing block 6263, and the fixing block 6263 and the connecting shaft body 6261 are connected by the rotating shaft 5242.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that modifications can be made by those skilled in the art without departing from the principle of the present invention, and these modifications should also be construed as the protection scope of the present invention.

Claims

1. A large-scale vacuum glow power generation nanometer film coating equipment is characterized in that: comprises that

Slide valve pump (1): a slide valve is arranged in the pump body, an eccentric wheel is arranged in the slide valve, the eccentric wheel is driven to rotate by a shaft which is communicated with the outside of the pump cylinder, the outer circle of the slide valve slides on the surface of the pump cylinder, and the upper part of the slide valve freely slides up and down and swings left and right in a semicircular slide valve guide rail; the upper part of the slide valve is hollow, gas passes through the hollow part of the slide valve, and the compressed gas jacks up an exhaust valve to be discharged out of the pump, so that the slide valve works circularly;

pre-pumping valve (2): after the sliding valve pump is started, the pre-pumping valve is mainly used for opening during rough pumping, namely, is used during low vacuum pumping, and is closed during high vacuum pumping;

front-stage valve (3): after the pre-pumping valve is closed after the rough pumping is finished, the pre-pumping valve is opened for use during high vacuum pumping;

diffusion valve (4): the diffusion pump oil in the pump body is heated and evaporated into steam, a high-speed steam jet flow is formed through a guide pipe and a nozzle and serves as a working medium, the pumped body is carried to the wall of the pump by the steam jet flow under the action of diffusion and carrying, the oil steam is condensed and then returns to the bottom of the pump, the gas is compressed step by step, and finally the gas is carried to a preceding stage by an injection-stage steam flow and is pumped away by a preceding-stage pump;

high valve (5): after the rough pumping is finished, closing the pre-pumping valve, opening the front-stage valve and then opening the pre-pumping valve, and using the pre-pumping valve when high vacuum is pumped;

vacuum coating chamber (6): suspending a product to be coated on a suspension in a vacuum chamber according to process requirements, accelerating positive ions to bombard the surface of a target material by utilizing vacuum glow discharge to cause a sputtering phenomenon, and depositing atoms and molecules released from the surface of the target material on the product to form a film;

the vacuum coating chamber (6) comprises a coating chamber main body (61), a rotary hanger structure (62), a coating chamber door structure (63) and a glow discharge structure (64), wherein the rotary hanger structure (62) is arranged in the middle of the coating chamber main body (61), the coating chamber door structure (63) is arranged on the side of the coating chamber main body (61), and the glow discharge structure (64) is arranged inside the coating chamber main body (61) and close to the inner wall side; the coating chamber door structure (63) is of a double-layer structure, and a pulse electromagnetic generator is arranged in the interlayer.

2. The large-scale vacuum glow discharge nano-thin film coating apparatus according to claim 1, wherein: rotatory stores pylon structure (62) includes rotating electrical machines (621), shaft coupling (622), first bearing frame (623), first connecting axle structure (624), hanger structure (625), second connecting axle structure (626) and second bearing frame (627), rotating electrical machines (621) pass through shaft coupling (622) and are connected with first connecting axle structure (624) one end of setting in first bearing frame (623), the one end that shaft coupling (622) were kept away from to first connecting axle structure (624) one end and first connecting axle structure (624) is connected, and the other end is connected with second connecting axle structure (626) one end of setting in second bearing frame (627).

3. The large-scale vacuum glow discharge nano-thin film coating apparatus according to claim 2, wherein: the end part of one end, far away from the fixed coupling (622), of the first connecting shaft structure (624) is provided with a positioning hole (6241).

4. The large-scale vacuum glow discharge nano-thin film coating apparatus according to claim 2, wherein: the hanger structure (625) comprises a hanger rotating shaft (6251) and hanger assemblies (6252), wherein the hanger assemblies (6252) are arranged in a plurality of groups and are sequentially arranged on the hanger rotating shaft (6251).

5. The large-scale vacuum glow discharge nano-thin film coating apparatus according to claim 4, wherein: the hanger rotating shaft (6251) and the fixing section of the hanger assembly (6252) are arranged in a dodecahedron shape, and a plurality of fixing threaded holes (62511) arranged at equal intervals are formed in the plane of the dodecahedron shape.

6. The large-scale vacuum glow discharge nano-thin film coating apparatus according to claim 4, wherein: the hanger assembly (6252) comprises fixing rings (62521) and hanging rods (62522), wherein the fixing rings (62521) are dodecahedrons with inner and outer surfaces arranged in parallel, the hanging rods (62522) are six groups in total, and the fixing rings (62521) are arranged outside the fixing rings (62521) in a circumferential array by taking the axis of the fixing rings (62521) as the center.

7. The large-scale vacuum glow discharge nano-thin film coating apparatus according to claim 6, wherein: the fixing ring (62521) is provided with countersunk holes (625211), and the six groups are arranged outside the fixing ring (62521) in a circumferential array by taking the axis of the fixing ring (62521) as the center and staggered with the hanging rod (62522).

8. The large-scale vacuum glow discharge nano-thin film coating apparatus according to claim 2, wherein: the second connecting shaft structure (626) comprises a connecting shaft body (6261), a rotating shaft (5242) and a fixing block (6263), and the fixing block (6263) is connected with the connecting shaft body (6261) through the rotating shaft (5242).

9. The working method of the large-scale vacuum glow power generation nano thin film coating equipment as claimed in any one of claims 1 to 8, is characterized in that: the method comprises the following specific steps

Opening a coating chamber door structure (63) of the vacuum coating chamber (6), and taking down a hanger structure (625) arranged on a rotary hanger structure (62) in a coating chamber main body (61);

the number and the positions of the hanger assemblies (6252) on the hanger rotating shaft (6251) are adjusted according to the sizes of the products, and the products needing vacuum coating are sequentially placed on a hanging rod (62522) of the hanger assembly (6252);

mounting the rack structure (625) with the product on the rotary rack structure (62), and closing the coating chamber door structure (63);

starting a slide valve pump (1), carrying out rough pumping work on a pre-pumping valve (2), and pumping a vacuum coating chamber (6) to a low vacuum state of less than about 0.02 Pa;

after rough pumping is finished, the pre-pumping valve (2) is closed, the front-stage valve (3), the diffusion valve (4) and the high valve (5) are opened in sequence, rice flour effect is kept through diffusion pump oil in a pump body of the diffusion valve (4), the volume of a suction cavity in the pump is changed continuously, and the volume of gas in the vacuum coating chamber (6) is expanded continuously, so that vacuum is formed;

a glow discharge structure (64) in the vacuum coating chamber (6) starts to work, and evaporated gas forms ions in the reaction of collision and electron impact in glow discharge, is accelerated in an electric field and is condensed to form a film on the surface of a product;

meanwhile, a pulse electromagnetic generator in the coating chamber door structure (63) forms a pulse high-strength electromagnetic field, so that the plasma energy in the coating chamber main body (61) is enhanced in a multiplied manner, and the deposition speed of coating is improved;

a rotating motor (621) in the rotating hanger structure (62) drives a hanger structure 625 filled with a product to rotate at a constant speed through a coupling (622);

and performing the operation until the vacuum coating work of the product is finished.