CN206219660U - A kind of nano-coating equipment rotates frame equipments for goods - Google Patents
A kind of nano-coating equipment rotates frame equipments for goods Download PDFInfo
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- CN206219660U CN206219660U CN201621296691.5U CN201621296691U CN206219660U CN 206219660 U CN206219660 U CN 206219660U CN 201621296691 U CN201621296691 U CN 201621296691U CN 206219660 U CN206219660 U CN 206219660U
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- reaction chamber
- shelf
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- nano
- hollow tube
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Abstract
A kind of nano-coating equipment rotation frame equipments for goods of the utility model, belongs to technical field of vacuum plating.In the device, including reaction chamber, rotation shelf are provided with the reaction chamber, to be provided with through hole in hollow tubular structure, and hollow tube, reaction chamber top is provided with bleeding point to the central shaft of the rotation shelf, bleeding point on the same axis and is positioned above with hollow tube, ring gear is installed on the rotation bottom shelf disk, gear is installed on spin motor shaft, workpiece is placed on the object-putting layer of rotation shelf.The utility model device shelf in coating process persistently rotate, it is to avoid the workpiece coating layer thickness non-uniform phenomenon of the FX caused by each regional chemistry monomer gas Density inhomogeneity occur；By the through hole on every layer of shelf correspondence hollow tube, can be formed the chemical monomer gas entered in chamber and yearn for the trend that lead to the hole site spreads along every layer of shelf footpath so that be more uniform to hollow tube regional chemistry monomer density from cavity wall.
Description
Technical field
The utility model belongs to technical field of vacuum plating, more particularly to a kind of nano-coating equipment rotation frame equipments for goods.
Background technology
Plasma film coating as lifting material surface performance effective ways be widely used in Aero-Space, automobile making,
The field such as mechanical heavy industry and hardware ＆ tools manufacture., it is necessary to filming equipment chamber air is extracted out during plasma film coating
Low-pressure state is maintained, while needing to be passed through process gas and chemical monomer gas for reacting generating copolymer coating.Due to
Need lasting pumping during whole plasma film coating, and bleeding point, air inlet, charge door position are fixed, therefore chemistry
The trend of monomer gas oriented bleeding point direction diffusion, causes chemical monomer gas in charge door region and dispersal direction region
Density is relatively large.This has occurred as soon as other areas by plated film workpiece surface polymer coating thickness is thicker of these regions placement
The relatively thin phenomenon of domain coating layer thickness, causes the quality of batch production inconsistent.
Utility model content
The purpose of this utility model is to overcome above-mentioned deficiency, there is provided a kind of nano-coating equipment rotates frame equipments for goods.
The technical scheme that the utility model is used to achieve the above object is as follows：
A kind of nano-coating equipment rotates frame equipments for goods, it is characterised in that：Including reaction chamber, set in the reaction chamber
Rotation shelf are equipped with, the central shaft of the rotation shelf is to be provided with through hole, reaction chamber ceiling in hollow tubular structure, and hollow tube
Portion is provided with bleeding point, and bleeding point on the same axis and is positioned above with hollow tube, and bleeding point is provided with fairlead, and leads
Bigger than hollow tube external diameter to set internal diameter, hollow tube can be inserted into bleeding point fairlead and be rotated relative to bleeding point.The rotation shelf
Ring gear is installed on bottom disc, gear is installed on spin motor shaft, gear is engaged with ring gear, by gear driven shelf bottom
Portion's disk gear ring rotates shelf, and workpiece is placed on the object-putting layer of rotation shelf, and vavuum pump is taken out by vacuum line with cavity
Gas port is connected, and intake valve is connected by air inlet pipeline with cavity air inlet, and charging valve is connected by Feed lines with cavity charge door
Connect, radio-frequency power supply is connected by wire with chamber internal electrode.
The chamber volume of the reaction chamber is 50L~3000L, and material is aluminium alloy or stainless steel.
The rotation shelf include 1~20 stratification nitride layer, and material is aluminium alloy or stainless steel.
The power of the vavuum pump is 3-50KW, and pumping speed is 600-1200m3/h。
The power of the electric rotating machine is 30-3000W.
The power of the radio-frequency power supply is 50-1500W.
Above-mentioned technical proposal of the present utility model has advantages below compared with prior art：
(1) shelf persistently rotate in coating process, it is to avoid occur caused by each regional chemistry monomer gas Density inhomogeneity
The workpiece coating layer thickness non-uniform phenomenon of FX.Meanwhile, shelf rotate the chemical monomer for being also beneficial to will enter in chamber
Gas is sufficiently mixed uniformly.
(2) by the through hole on every layer of shelf correspondence hollow tube, can make to be formed into the chemical monomer gas in chamber
Yearn for the trend that lead to the hole site spreads along every layer of shelf footpath so that more equal to hollow tube regional chemistry monomer density from cavity wall
It is even.
Brief description of the drawings
Fig. 1 is that a kind of nano-coating equipment rotates frame equipments for goods structural representation
In figure：1st, reaction chamber, 2, rotation shelf, 3, vavuum pump, 4, intake valve, 5, charging valve, 6, electric rotating machine, 7, penetrate
Frequency power, 8, workpiece.
Specific embodiment
Describe the utility model in detail with specific embodiment below in conjunction with the accompanying drawings, but the utility model is not limited to specifically
Embodiment.
Embodiment 1
As shown in Figure 1：A kind of nano-coating equipment rotates frame equipments for goods, it is characterised in that：Including reaction chamber, reaction chamber
The volume of room is 50L, and rotation shelf are provided with the reaction chamber, and rotation shelf include 1 stratification nitride layer, the rotation shelf
Central shaft to be provided with through hole in hollow tubular structure, and hollow tube, reaction chamber top is provided with bleeding point, and bleeding point is with
Blank pipe on the same axis and is positioned above, and bleeding point is provided with fairlead, and fairlead internal diameter is bigger than hollow tube external diameter, in
Blank pipe can be inserted into bleeding point fairlead and be rotated relative to bleeding point, and ring gear is installed on the rotation bottom shelf disk, rotate
Gear is installed, the power of electric rotating machine is 30W, and shelf are rotated by gear driven bottom shelf disk gear ring on motor shaft,
Workpiece is placed on the object-putting layer of rotation shelf, and vavuum pump is connected by vacuum line with cavity bleeding point, the power of vavuum pump
It is 3KW, pumping speed is 600m3/ h, intake valve is connected by air inlet pipeline with cavity air inlet, and charging valve passes through Feed lines and chamber
Body charge door is connected, and radio-frequency power supply is connected by wire with chamber internal electrode, and the power of radio-frequency power supply is 50W.
Embodiment 2
As shown in Figure 1：A kind of nano-coating equipment rotates frame equipments for goods, it is characterised in that：Including reaction chamber, reaction chamber
The volume of room is 500L, and rotation shelf are provided with the reaction chamber, and rotation shelf include 10 stratification nitride layer, the rotation goods
The central shaft of frame is to be provided with through hole in hollow tubular structure, and hollow tube, and reaction chamber top is provided with bleeding point, bleeding point with
Hollow tube on the same axis and is positioned above, and bleeding point is provided with fairlead, and fairlead internal diameter is bigger than hollow tube external diameter,
Hollow tube can be inserted into bleeding point fairlead and be rotated relative to bleeding point, and ring gear is installed on the rotation bottom shelf disk, revolve
Gear is installed, the power of electric rotating machine is 300W, and shelf are made by gear driven bottom shelf disk gear ring on rotating motor axle
Rotate, workpiece is placed on the object-putting layer of rotation shelf, and vavuum pump is connected by vacuum line with cavity bleeding point, vavuum pump
Power is 12KW, and pumping speed is 800m3/ h, intake valve is connected by air inlet pipeline with cavity air inlet, and charging valve passes through charge pipe
Road is connected with cavity charge door, and radio-frequency power supply is connected by wire with chamber internal electrode, and the power of radio-frequency power supply is 300W.
Embodiment 3
As shown in Figure 1：A kind of nano-coating equipment rotates frame equipments for goods, it is characterised in that：Including reaction chamber, reaction chamber
The volume of room is 1800L, and rotation shelf are provided with the reaction chamber, and rotation shelf include 15 stratification nitride layer, the rotation
The central shaft of shelf is that through hole is provided with hollow tubular structure, and hollow tube, and reaction chamber top is provided with bleeding point, bleeding point
On the same axis and it is positioned above with hollow tube, bleeding point is provided with fairlead, and fairlead internal diameter than hollow tube external diameter
Greatly, hollow tube can be inserted into bleeding point fairlead and be rotated relative to bleeding point, and ring gear is installed on the rotation bottom shelf disk,
Gear is installed, the power of electric rotating machine is 1500W, and goods is made by gear driven bottom shelf disk gear ring on spin motor shaft
Frame is rotated, and workpiece is placed on the object-putting layer of rotation shelf, and vavuum pump is connected by vacuum line with cavity bleeding point, vavuum pump
Power be 30KW, pumping speed is 1100m3/ h, intake valve is connected by air inlet pipeline with cavity air inlet, and charging valve is by charging
Pipeline is connected with cavity charge door, and radio-frequency power supply is connected by wire with chamber internal electrode, and the power of radio-frequency power supply is 1000W.
Workpiece Making programme is as follows：The object-putting layer of rotation shelf film-coating workpiece being positioned over first in filming equipment chamber
On, vavuum pump extracts chamber air out from bleeding point reduces cavity indoor pressure, then by intake valve from air inlet to chamber
Interior is passed through process gas, then by charging valve from charge door to chamber in add chemical monomer gas, electric rotating machine drives goods
Frame rotates, and is discharged by radio-frequency power supply, triggers chemical monomer gas to be polymerized and be deposited on workpiece surface and forms polymer coating.
Embodiment 4
As shown in Figure 1：A kind of nano-coating equipment rotates frame equipments for goods, it is characterised in that：Including reaction chamber, reaction chamber
The volume of room is 3000L, and rotation shelf are provided with the reaction chamber, and rotation shelf include 20 stratification nitride layer, the rotation
The central shaft of shelf is that through hole is provided with hollow tubular structure, and hollow tube, and reaction chamber top is provided with bleeding point, bleeding point
On the same axis and it is positioned above with hollow tube, bleeding point is provided with fairlead, and fairlead internal diameter than hollow tube external diameter
Greatly, hollow tube can be inserted into bleeding point fairlead and be rotated relative to bleeding point, and ring gear is installed on the rotation bottom shelf disk,
Gear is installed, the power of electric rotating machine is 3000W, and goods is made by gear driven bottom shelf disk gear ring on spin motor shaft
Frame is rotated, and workpiece is placed on the object-putting layer of rotation shelf, and vavuum pump is connected by vacuum line with cavity bleeding point, vavuum pump
Power be 50KW, pumping speed is 1200m3/ h, intake valve is connected by air inlet pipeline with cavity air inlet, and charging valve is by charging
Pipeline is connected with cavity charge door, and radio-frequency power supply is connected by wire with chamber internal electrode, and the power of radio-frequency power supply is 1500W.
Claims (6)
1. a kind of nano-coating equipment rotates frame equipments for goods, it is characterised in that：Including reaction chamber (1), the reaction chamber (1)
Rotation shelf (2) is inside provided with, the central shaft of rotation shelf (2) is to be provided with through hole in hollow tubular structure, and hollow tube,
Reaction chamber top is provided with bleeding point, and bleeding point on the same axis and is positioned above with hollow tube, and bleeding point is provided with
Fairlead, and fairlead internal diameter is bigger than hollow tube external diameter, and ring gear, electric rotating are installed on described rotation shelf (2) bottom disc
Gear is installed, workpiece (8) is placed on the object-putting layer of rotation shelf (2) on machine (6) axle, vavuum pump (3) by vacuum line with
Reaction chamber (1) cavity bleeding point is connected, and intake valve (4) is connected by air inlet pipeline with reaction chamber (1) cavity air inlet, plus
Material valve (5) is connected by Feed lines with reaction chamber (1) cavity charge door, and radio-frequency power supply (7) is by wire and reaction chamber
(1) chamber internal electrode connection.
2. a kind of nano-coating equipment according to claim 1 rotates frame equipments for goods, it is characterised in that：The reaction chamber
(1) chamber volume is 50L~3000L, and material is aluminium alloy or stainless steel.
3. a kind of nano-coating equipment according to claim 1 rotates frame equipments for goods, it is characterised in that：The rotation shelf
(2) including 1~20 stratification nitride layer, material is aluminium alloy or stainless steel.
4. a kind of nano-coating equipment according to claim 1 rotates frame equipments for goods, it is characterised in that：The vavuum pump
(3) power is 3-50KW, and pumping speed is 600-1200m3/h。
5. a kind of nano-coating equipment according to claim 1 rotates frame equipments for goods, it is characterised in that：The electric rotating machine
(6) power is 30-3000W.
6. a kind of nano-coating equipment according to claim 1 rotates frame equipments for goods, it is characterised in that：The radio-frequency power supply
(7) power is 50-1500W.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621296691.5U CN206219660U (en) | 2016-11-30 | 2016-11-30 | A kind of nano-coating equipment rotates frame equipments for goods |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621296691.5U CN206219660U (en) | 2016-11-30 | 2016-11-30 | A kind of nano-coating equipment rotates frame equipments for goods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206219660U true CN206219660U (en) | 2017-06-06 |
Family
ID=58786923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621296691.5U Withdrawn - After Issue CN206219660U (en) | 2016-11-30 | 2016-11-30 | A kind of nano-coating equipment rotates frame equipments for goods |
Country Status (1)
| Country | Link |
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| CN (1) | CN206219660U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756888A (en) * | 2016-11-30 | 2017-05-31 | 无锡荣坚五金工具有限公司 | A kind of nano-coating equipment rotates frame equipments for goods |
| WO2018214452A1 (en) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | Substrate-moving type apparatus and method for preparing nano coating by means of plasma discharge |
| US11270871B2 (en) | 2017-05-21 | 2022-03-08 | Jiangsu Favored Nanotechnology Co., LTD | Multi-layer protective coating |
| US11339477B2 (en) | 2016-11-30 | 2022-05-24 | Jiangsu Favored Nanotechnology Co., LTD | Plasma polymerization coating apparatus and process |
-
2016
- 2016-11-30 CN CN201621296691.5U patent/CN206219660U/en not_active Withdrawn - After Issue
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756888A (en) * | 2016-11-30 | 2017-05-31 | 无锡荣坚五金工具有限公司 | A kind of nano-coating equipment rotates frame equipments for goods |
| WO2018099333A1 (en) * | 2016-11-30 | 2018-06-07 | 江苏菲沃泰纳米科技有限公司 | Rotating shelf device of nano coating apparatus |
| CN106756888B (en) * | 2016-11-30 | 2018-07-13 | 江苏菲沃泰纳米科技有限公司 | A kind of nano-coating equipment rotation frame equipments for goods |
| US11332829B2 (en) | 2016-11-30 | 2022-05-17 | Jiangsu Favored Nanotechnology Co., LTD | Plasma polymerization coating with uniformity control |
| US11339477B2 (en) | 2016-11-30 | 2022-05-24 | Jiangsu Favored Nanotechnology Co., LTD | Plasma polymerization coating apparatus and process |
| WO2018214452A1 (en) * | 2017-05-21 | 2018-11-29 | 江苏菲沃泰纳米科技有限公司 | Substrate-moving type apparatus and method for preparing nano coating by means of plasma discharge |
| US11270871B2 (en) | 2017-05-21 | 2022-03-08 | Jiangsu Favored Nanotechnology Co., LTD | Multi-layer protective coating |
| US11587772B2 (en) | 2017-05-21 | 2023-02-21 | Jiangsu Favored Nanotechnology Co., LTD | Multi-layer protective coating |
| US11742186B2 (en) | 2017-05-21 | 2023-08-29 | Jiangsu Favored Nanotechnology Co., LTD | Multi-functional protective coating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180104 Address after: Yuqi Industrial Park East Ring Road 214183 Jiangsu city of Wuxi Province Patentee after: Jiangsu Feiwotai Nano Technology Co. Ltd. Address before: Jiangsu province Wuxi city Huishan District Qi Zhen Yu Yuqi Industrial Park East Ring Road Patentee before: Wuxi RJ Industries Co., Ltd. |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170606 Effective date of abandoning: 20180713 |