CN206359611U - A kind of nano-coating equipment planet gyration frame equipments for goods - Google Patents
A kind of nano-coating equipment planet gyration frame equipments for goods Download PDFInfo
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- CN206359611U CN206359611U CN201621296750.9U CN201621296750U CN206359611U CN 206359611 U CN206359611 U CN 206359611U CN 201621296750 U CN201621296750 U CN 201621296750U CN 206359611 U CN206359611 U CN 206359611U
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- chamber
- shelf
- planet
- rotary shaft
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Abstract
A kind of nano-coating equipment planet gyration frame equipments for goods, belongs to technical field of vacuum plating.In the device, chamber roof connection bleeding point, chamber cental axial position is provided with hollow tube, and hollow tube upper end is connected to bleeding point, and cavity bottom, which is provided with electric rotating machine, electric rotating machine, is provided with planet gyration shelf；In planet gyration shelf, rotary shaft is connected with electric rotating machine, and rotary shaft is coaxial with hollow tube, rotary shelf for placing articles is fixedly installed in rotary shaft, it is symmetrically arranged with least two planetary rotation axles on rotary shelf for placing articles, planet walks around to set on axle places pending workpiece at least one layer of articles holding table, articles holding table.The utility model has the advantage that：The lasting dual rotation of the revolution of planet gyration shelf and rotation in coating process, it is to avoid the workpiece coating layer thickness non-uniform phenomenon of the FX caused by each regional chemistry monomer gas Density inhomogeneity occur.Meanwhile, planet gyration shelf, which are rotated, to be also beneficial to the chemical monomer gas entered in chamber being sufficiently mixed uniformly.
Description
Technical field
The utility model belongs to technical field of vacuum plating, more particularly to a kind of nano-coating equipment planet gyration shelf dress
Put.
Background technology
Plasma film coating as lifting material surface performance effective ways be widely used in Aero-Space, automobile making,
The fields such as mechanical heavy industry and hardware ＆ tools manufacture., it is necessary to which filming equipment chamber air is extracted out during plasma film coating
Low-pressure state is maintained, while needing to be passed through process gas and chemical monomer gas for reacting generation polymer coating.Due to
Need lasting pumping during whole plasma film coating, and bleeding point, air inlet, charge door position are fixed, therefore chemistry
The trend of monomer gas oriented bleeding point direction diffusion, causes chemical monomer gas in charge door region and dispersal direction region
Density is relatively large.This occurred as soon as the placement of these regions by plated film workpiece surface polymer coating thickness is thicker and other areas
The relatively thin phenomenon of domain coating layer thickness, causes the quality of batch production inconsistent.
Utility model content
The purpose of this utility model is to overcome that above-mentioned not enough there is provided a kind of nano-coating equipment planet gyration frame equipments for goods.
The technical scheme that the utility model is used to achieve the above object is：A kind of nano-coating equipment planet gyration goods
Rack device, it is characterised in that：Including chamber, the chamber roof connects bleeding point, and bleeding point connection vavuum pump, intake valve passes through
Air inlet pipeline is connected with chamber, and charging valve is connected by Feed lines with chamber, and radio-frequency power supply passes through electrode in wire and chamber
Connection, chamber cental axial position, which is provided with hollow tube, hollow tube, is provided with through hole, and the hollow tube upper end is connected to bleeding point,
The cavity bottom, which is provided with electric rotating machine, electric rotating machine, is provided with planet gyration shelf；
The planet gyration shelf include rotary shaft, rotary shelf for placing articles, and the rotary shaft is connected with electric rotating machine, rotary shaft
It is coaxial with hollow tube, it is fixedly installed in rotary shaft on rotary shelf for placing articles, rotary shelf for placing articles and is symmetrically arranged with least two planet rotations
Rotating shaft, the planet is walked around and at least one layer of articles holding table is set on axle, the planetary rotation axle perpendicular to rotary shelf for placing articles and can from
Turn, pending workpiece is placed on articles holding table.
The planetary rotation axle is 2-8 roots, and the articles holding table is 1-10 layers.
The volume of the chamber is 50~3000L, and material is aluminium alloy or stainless steel.
The power of the vavuum pump is 3-50KW, pumping speed 600-1200m3/h.
The power of the electric rotating machine is 30-3000W, and radio-frequency power supply power is 50-1500W.
The utility model has the advantage that：
(1) workpiece revolves round the sun not only about the rotary shaft at center in coating process, but also around planet rotary shaft rotation, this is held
Continuous dual rotation, it is to avoid the workpiece coating layer thickness of the FX caused by each regional chemistry monomer gas Density inhomogeneity occur
Non-uniform phenomenon.Meanwhile, the rotation of rotary shelf for placing articles is also beneficial to the chemical monomer gas entered in chamber being sufficiently mixed
It is even.
(2) through hole on the hollow tube of cental axial position, can be such that the chemical monomer gas entered in chamber is formed along every
Yearn for the trend of lead to the hole site diffusion in layer commodity platform footpath so that more uniform from cavity wall to hollow tube regional chemistry monomer density.
Brief description of the drawings
Fig. 1 is a kind of structural representation of nano-coating equipment planet gyration frame equipments for goods.
In figure：1st, vavuum pump, 2, bleeding point, 3, chamber, 4, intake valve, 5, charging valve, 6, planetary rotation axle, 7, workpiece,
8th, articles holding table, 9, electric rotating machine, 10 hollow tubes, 11, rotary shelf for placing articles, 12, radio-frequency power supply.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and detailed description.
Embodiment 1
As shown in figure 1, a kind of nano-coating equipment planet gyration frame equipments for goods, including chamber, the top of chamber 3 connects
Bleeding point 2 is connect, bleeding point connection vavuum pump 1, intake valve 4 is connected by air inlet pipeline with chamber 3, and charging valve 5 passes through charge pipe
Road is connected with chamber 3, and radio-frequency power supply 12 is connected by wire with electrode in chamber 3, and chamber cental axial position is provided with hollow tube
10, through hole is provided with hollow tube, the hollow tube upper end is connected to bleeding point, and the cavity bottom is provided with electric rotating machine 9, rotation
Planet gyration shelf are installed on rotating motor；
The planet gyration shelf include rotary shaft, rotary shelf for placing articles 11, and the rotary shaft is connected with electric rotating machine, rotate
Axle is coaxial with hollow tube, is fixedly installed in rotary shaft on rotary shelf for placing articles 11, rotary shelf for placing articles and is symmetrically arranged with planetary rotation axle
6, the planet is walked around and articles holding table 8 is set on axle, the planetary rotation axle perpendicular to rotary shelf for placing articles and can rotation, on articles holding table
Place pending workpiece 7.
Planetary rotation axle is 2, and articles holding table is 1 layer.
The chamber volume of chamber 3 is 50L, and material is aluminium alloy.
The power of vavuum pump 1 is 3KW, pumping speed 600m3/h。
The power of electric rotating machine 9 is 30W, and radio-frequency power supply power is 50W.
The course of work of the present utility model is as follows：Workpiece 7 to be coated is positioned over putting in filming equipment chamber 3 first
On thing platform 8, vavuum pump 1, which extracts air in chamber 3 out from bleeding point, reduces pressure in chamber 3, and pressure is less than 1Pa, Ran Houtong
Cross intake valve 4 and process gas is passed through into chamber from air inlet, then chemical list is added from charge door into chamber by charging valve 5
Body gas, electric rotating machine 9 drives rotary shaft rotation, while planetary rotation axle 6 drives articles holding table rotation, is put by radio-frequency power supply 12
Electricity, triggers chemical monomer gas to occur to polymerize and be deposited on the surface of workpiece 7 formation polymer coating.
Embodiment 2
The Each part of nano-coating equipment planet gyration frame equipments for goods of the present embodiment a kind of and annexation with
Identical in embodiment 1, different technical parameters are：
Planetary rotation axle is 4, and articles holding table is 3 layers.
The volume of chamber 3 is 600L, and material is aluminium alloy.
The power of vavuum pump 1 is 10KW, pumping speed 700m3/h。
The power of electric rotating machine 9 is 400W, and radio-frequency power supply power is 600W.
Embodiment 3
A kind of Each part of nano-coating equipment planet gyration frame equipments for goods described in the present embodiment is with being connected pass
System is in the same manner as in Example 1, and different technical parameters are：
Planetary rotation axle is 4, and articles holding table is 5 layers.
The chamber volume of chamber 3 is 1200L, and material is stainless steel.
The power of vavuum pump 1 is 20KW, pumping speed 900m3/h。
The power of electric rotating machine 9 is 800W, and radio-frequency power supply power is 900W.
Embodiment 4
A kind of Each part of nano-coating equipment planet gyration frame equipments for goods described in the present embodiment is with being connected pass
System is in the same manner as in Example 1, and different technical parameters are：
Planetary rotation axle is 6, and articles holding table is 8 layers.
The chamber volume of chamber 3 is 2200L, and material is stainless steel.
The power of vavuum pump 1 is 40KW, pumping speed 1100m3/h。
The power of electric rotating machine 9 is 1800W, and radio-frequency power supply power is 1200W.
Embodiment 5
A kind of Each part of nano-coating equipment planet gyration frame equipments for goods described in the present embodiment is with being connected pass
System is in the same manner as in Example 1, and different technical parameters are：
Planetary rotation axle is 8, and articles holding table is 10 layers.
The chamber volume of chamber 3 is 3000L, and material is stainless steel.
The power of vavuum pump 1 is 50KW, pumping speed 1200m3/h。
The power of electric rotating machine 9 is 3000W, and radio-frequency power supply power is 1500W.
Claims (5)
1. a kind of nano-coating equipment planet gyration frame equipments for goods, it is characterised in that：Including chamber, connect at the top of the chamber (3)
Bleeding point (2) is connect, bleeding point connection vavuum pump (1), intake valve (4) is connected by air inlet pipeline with chamber (3), charging valve (5)
It is connected by Feed lines with chamber (3), radio-frequency power supply (12) is connected by wire with chamber (3) interior electrode, chamber central shaft
Position, which is provided with hollow tube (10), hollow tube, is provided with through hole, and the hollow tube upper end is connected to bleeding point, the cavity bottom
It is provided with electric rotating machine (9), electric rotating machine and planet gyration shelf is installed；
The planet gyration shelf include rotary shaft, rotary shelf for placing articles (11), and the rotary shaft is connected with electric rotating machine, rotary shaft
It is coaxial with hollow tube, it is fixedly installed in rotary shaft on rotary shelf for placing articles (11), rotary shelf for placing articles and is symmetrically arranged with least two rows
Star rotary shaft (6), the planet, which is walked around, sets at least one layer of articles holding table (8) on axle, and the planetary rotation axle is put perpendicular to rotation
Rack and can rotation, place pending workpiece (7) on articles holding table.
2. a kind of nano-coating equipment planet gyration frame equipments for goods according to claim 1, it is characterised in that：The planet
Rotary shaft is 2-8 roots, and the articles holding table is 1-10 layers.
3. a kind of nano-coating equipment planet gyration frame equipments for goods according to claim 1, it is characterised in that：The chamber
(3) volume is 50~3000L, and material is aluminium alloy or stainless steel.
4. a kind of nano-coating equipment planet gyration frame equipments for goods according to claim 1, it is characterised in that：The vacuum
The power of pump (1) is 3-50KW, pumping speed 600-1200m3/h。
5. a kind of nano-coating equipment planet gyration frame equipments for goods according to claim 1, it is characterised in that：The rotation
The power of motor (9) is 30-3000W, and radio-frequency power supply power is 50-1500W.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621296750.9U CN206359611U (en) | 2016-11-30 | 2016-11-30 | A kind of nano-coating equipment planet gyration frame equipments for goods |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621296750.9U CN206359611U (en) | 2016-11-30 | 2016-11-30 | A kind of nano-coating equipment planet gyration frame equipments for goods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206359611U true CN206359611U (en) | 2017-07-28 |
Family
ID=59372811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621296750.9U Withdrawn - After Issue CN206359611U (en) | 2016-11-30 | 2016-11-30 | A kind of nano-coating equipment planet gyration frame equipments for goods |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206359611U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106637140A (en) * | 2016-11-30 | 2017-05-10 | 无锡荣坚五金工具有限公司 | Planetary rotary goods shelf device of nanometer coating equipment |
| US11332829B2 (en) | 2016-11-30 | 2022-05-17 | Jiangsu Favored Nanotechnology Co., LTD | Plasma polymerization coating with uniformity control |
| US11339477B2 (en) | 2016-11-30 | 2022-05-24 | Jiangsu Favored Nanotechnology Co., LTD | Plasma polymerization coating apparatus and process |
-
2016
- 2016-11-30 CN CN201621296750.9U patent/CN206359611U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106637140A (en) * | 2016-11-30 | 2017-05-10 | 无锡荣坚五金工具有限公司 | Planetary rotary goods shelf device of nanometer coating equipment |
| WO2018099332A1 (en) * | 2016-11-30 | 2018-06-07 | 江苏菲沃泰纳米科技有限公司 | Planetary rotary shelf device for nano-coating apparatus |
| CN106637140B (en) * | 2016-11-30 | 2018-08-10 | 江苏菲沃泰纳米科技有限公司 | A kind of nano-coating equipment planet gyration frame equipments for goods |
| US11332829B2 (en) | 2016-11-30 | 2022-05-17 | Jiangsu Favored Nanotechnology Co., LTD | Plasma polymerization coating with uniformity control |
| US11339477B2 (en) | 2016-11-30 | 2022-05-24 | Jiangsu Favored Nanotechnology Co., LTD | Plasma polymerization coating apparatus and process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180112 Address after: Yuqi Industrial Park East Ring Road 214183 Jiangsu city of Wuxi Province Patentee after: Jiangsu Feiwotai Nano Technology Co. Ltd. Address before: Jiangsu province Wuxi city Huishan District Qi Zhen Yu Yuqi Industrial Park East Ring Road Patentee before: Wuxi RJ Industries Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170728 Effective date of abandoning: 20180810 |
|
| AV01 | Patent right actively abandoned |