CN206304928U - A kind of polymer coated device of big volume plasma of tubulose - Google Patents
A kind of polymer coated device of big volume plasma of tubulose Download PDFInfo
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- CN206304928U CN206304928U CN201621295989.4U CN201621295989U CN206304928U CN 206304928 U CN206304928 U CN 206304928U CN 201621295989 U CN201621295989 U CN 201621295989U CN 206304928 U CN206304928 U CN 206304928U
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- vacuum chamber
- electrode
- tubulose
- guide rail
- tool
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Abstract
A kind of polymer coated device of the big volume plasma of tubulose of the utility model, belongs to technical field of plasma, for preparing polymer coating in substrate surface.In the device, vacuum chamber is tubulose, and electrode and guide rail are provided with the inwall of vacuum chamber, and wherein electrode is cylinder shape, and on the cylinder coaxial with vacuum chamber, electrode is split up at least two parts, and guide rail is installed in the space for reserving, and electrode is not contacted with guide rail；Tool is arranged on guide rail, it is coaxial with vacuum chamber, pending base material is in tool, the top of vacuum chamber is axially spaced to set vector gas pipeline and monomer vapours pipeline, the bottom of vacuum chamber is axially spaced to set vacuum exhaust pipeline, door for vacuum chamber is installed at the two ends of vacuum chamber, is sent into for tool and taken out.The volume of the vacuum chamber of device of the present utility model is big, having good uniformity for plasma, processes big, efficiency high, low cost in batches, and batch processing uniform in quality is good.
Description
Technical field
The utility model belongs to technical field of plasma, is related to a kind of plasma polymerized coating device.
Background technology
Plasma polymerized coating is a kind of important surface treatment method.During plasma polymerized coating, will
Need base material to be processed to be placed in vacuum chamber, process gas and gaseous state organic monomer are passed through under vacuum conditions, by electric discharge
Organic gaseous monomer is plasmarized, its is produced all kinds of spikes, by between these spikes or spike and monomer
Between carry out addition reaction formed polymer.In the commercial Application of plasma polymerized coating, in order to improve treatment as far as possible
Batch and reduction processing cost are, it is necessary to the volume of increase vacuum chamber is so as to accommodate at more base material receiving simultaneously as far as possible
Reason.It is empty with the increase of vacuum chamber volume but the plasma polymerized coating device of prior art uses square vacuum chamber
Between the uniformity of plasma be deteriorated, the different substrate materials of same batch processing are gone out due to present position with electrode, monomer/vector gas
The difference increase of distance, makes batch processing uniform in quality be deteriorated, so as to can not further increase between mouth, vaccum exhaust outlet etc.
Big vacuum chamber volume is realized improving treatment effeciency and reduces processing cost.Current plasma polymerized coating process requirements and batch
It is increasingly being, the volume that the existing plasma polymerized coating device of urgent need solution and technology are present is small, the small, efficiency of batch is low,
The problem of high cost, batch processing lack of homogeneity.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of tubulose polymer coated device of big volume plasma, with
Solve the problems, such as the small volume that prior art is present, the low small, efficiency of batch, high cost, batch processing lack of homogeneity.
The technical scheme that the utility model is used is as follows：
A kind of polymer coated device of big volume plasma of tubulose, it is characterised in that：Vacuum chamber is tubulose, vacuum chamber it is interior
Electrode and guide rail are installed, wherein electrode is cylinder shape, and on the cylinder coaxial with vacuum chamber, electrode is split up at least on wall
Guide rail is installed in two parts, the space for reserving, and electrode is not contacted with guide rail；Tool is arranged on guide rail, coaxial with vacuum chamber, waits to locate
In tool, the top of vacuum chamber is axially spaced to set vector gas pipeline and monomer vapours pipeline, vacuum to the base material of reason
The bottom of room is axially spaced to set vacuum exhaust pipeline, and door for vacuum chamber is installed at the two ends of vacuum chamber.
The internal diameter of described vacuum chamber is 30-80cm, and length is 0.5-10m.
Gap between described electrode and vacuum chamber interior walls is 10-60mm.
It is covered with through hole on described electrode, aperture is 2-30mm, and at intervals of 2-30mm, the material of electrode is aluminium or stainless in hole
Steel.
Between described every two neighboring vector gas pipeline at intervals of 30-80cm, it is described per two neighboring monomer steam
Between vapor pipeline at intervals of 30-80cm, it is described per two neighboring vacuum exhaust pipeline between at intervals of 30-80cm.
Described tool is the tubular cage that metal or plastics are made.
Above-mentioned technical proposal of the present utility model has advantages below compared with prior art：
(1) the axially elongated expansion volume of the utility model vacuum installation, radial dimension is small, space plasma distribution
Uniformly, the spacing of the different substrate materials present position of same batch processing and electrode, monomer/vector gas outlet, vaccum exhaust outlet etc.
From difference it is small, batch processing uniform in quality is good.
(2) increase of vacuum chamber volume does not influence the distribution of plasma and plasma environment residing for base material, it is easy to increase
Big vacuum chamber volume, increasing process batch, improve treatment effeciency, reduce processing cost.
(3) volume of vacuum chamber is big, having good uniformity for plasma, big, efficiency high, low cost in batches is processed, at batch
Reason uniform in quality is good.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model device.
In figure：1st, vacuum chamber, 2, electrode, 3, guide rail, 4, tool, 5, base material, 6, vector gas pipeline, 7, monomer vapours pipe
Road, 8, vacuum exhaust pipeline, 9, door for vacuum chamber.
Specific embodiment
Describe the utility model in detail with specific embodiment below in conjunction with the accompanying drawings, but the utility model is not limited to specifically
Embodiment.
Embodiment 1
As shown in figure 1, a kind of polymer coated device of big volume plasma of tubulose, vacuum chamber 1 is tubulose, vacuum chamber 1
Internal diameter is 30cm, and length is 10m, electrode 2 and guide rail 3 is provided with the inwall of vacuum chamber 1, in described electrode 2 and vacuum chamber 1
Gap between wall is 10mm, and wherein electrode 2 is cylinder shape, and on the cylinder coaxial with vacuum chamber 1, electrode 2 is split up into a left side
Guide rail 3 is installed in right two parts, the space for reserving centre, and electrode 2 is not contacted with guide rail 3, and through hole, aperture are covered with described electrode
It is 2mm, at intervals of 2mm, the material of electrode is aluminium or stainless steel in hole；Tool 4 is installed on guides 3, coaxial with vacuum chamber 1, is treated
In tool 4, described tool 4 is the tubular cage that metal or plastics are made, the top edge of vacuum chamber 1 to the base material 5 for the treatment of
Axially spaced-apart sets vector gas pipeline 6 and monomer vapours pipeline 7, and vector gas pipeline is connected to vector gas source, and monomer steams
Vapor pipeline is connected to monomer vapours source, between described every two neighboring vector gas pipeline 6 at intervals of 80cm, it is described per phase
Between adjacent two monomer vapours pipelines 7 at intervals of 80cm, the bottom of vacuum chamber 1 is axially spaced to set vacuum exhaust pipeline 8,
Vacuum exhaust pipeline is connected to vavuum pump, it is described per two neighboring vacuum exhaust pipeline 8 between at intervals of 80cm, vacuum chamber 1
Two ends install door for vacuum chamber 9, for tool send into and take out.
Embodiment 2
A kind of polymer coated device of big volume plasma of tubulose, vacuum chamber 1 is tubulose, and the internal diameter of vacuum chamber 1 is 80cm,
Length is 0.5m, and electrode 2 and guide rail 3 are provided with the inwall of vacuum chamber 1, between described electrode 2 and the inwall of vacuum chamber 1 between
Gap is 60mm, and wherein electrode 2 is cylinder shape, and on the cylinder coaxial with vacuum chamber 1, electrode 2 is split up into three parts, reserves
Guide rail 3 is installed in space, and electrode 2 do not contact with guide rail 3, is covered with through hole on described electrode, and aperture is 30mm, hole at intervals of
30mm, the material of electrode is aluminium or stainless steel；Tool 4 is installed on guides 3, coaxial with vacuum chamber 1, and pending base material 5 is filled
In tool 4, the tubular cage that described tool 4 is made for metal or plastics, the axially spaced setting in the top of vacuum chamber 1 carries
Body gas piping 6 and monomer vapours pipeline 7, between described every two neighboring vector gas pipeline 6 at intervals of 30cm, it is described
Per between two neighboring monomer vapours pipeline 7 at intervals of 30cm, the axially spaced setting Vacuum exhaust tube in bottom of vacuum chamber 1
Road 8, it is described per at intervals of 30cm, the two ends of vacuum chamber 1 are installed door for vacuum chamber 9, supplied between two neighboring vacuum exhaust pipeline 8
Tool is sent into and is taken out.
Embodiment 3
A kind of polymer coated device of big volume plasma of tubulose, vacuum chamber 1 is tubulose, and the internal diameter of vacuum chamber 1 is 50cm,
Length is 5m, and electrode 2 and guide rail 3, the gap between described electrode 2 and the inwall of vacuum chamber 1 are provided with the inwall of vacuum chamber 1
It is 30mm, wherein electrode 2 is cylinder shape, and on the cylinder coaxial with vacuum chamber 1, electrode 2 is split up into six parts, reserves centre
Space guide rail 3 is installed, electrode 2 do not contact with guide rail 3, is covered with through hole on described electrode, and aperture is 15mm, hole at intervals of
15mm, the material of electrode is aluminium or stainless steel；Tool 4 is installed on guides 3, coaxial with vacuum chamber 1, and pending base material 5 is filled
In tool 4, the tubular cage that described tool 4 is made for metal or plastics, the axially spaced setting in the top of vacuum chamber 1 carries
Body gas piping 6 and monomer vapours pipeline 7, between described every two neighboring vector gas pipeline 6 at intervals of 50cm, it is described
Per between two neighboring monomer vapours pipeline 7 at intervals of 50cm, the axially spaced setting Vacuum exhaust tube in bottom of vacuum chamber 1
Road 8, it is described per at intervals of 50cm, the two ends of vacuum chamber 1 are installed door for vacuum chamber 9, supplied between two neighboring vacuum exhaust pipeline 8
Tool is sent into and is taken out.
Claims (6)
1. the polymer coated device of the big volume plasma of a kind of tubulose, it is characterised in that：Vacuum chamber (1) is tubulose, vacuum chamber (1)
Inwall on electrode (2) and guide rail (3) are installed, wherein electrode (2) is cylinder shape, positioned at the cylinder coaxial with vacuum chamber (1)
On, electrode (2) is split up at least two parts, and guide rail (3) is installed in the space for reserving, and electrode (2) is not contacted with guide rail (3)；Tool
(4) coaxial with vacuum chamber (1) on guide rail (3), pending base material (5) is interior mounted in tool (4), the top of vacuum chamber (1)
Portion is axially spaced to set vector gas pipeline (6) and monomer vapours pipeline (7), and the bottom of vacuum chamber (1) is axially spaced to be set
Vacuum exhaust pipeline (8) is put, door for vacuum chamber (9) is installed at the two ends of vacuum chamber (1).
2. the polymer coated device of the big volume plasma of a kind of tubulose according to claim 1, it is characterised in that：Described
The internal diameter of vacuum chamber (1) is 30-80cm, and length is 0.5-10m.
3. the polymer coated device of the big volume plasma of a kind of tubulose according to claim 1, it is characterised in that：Described
Gap between electrode (2) and vacuum chamber (1) inwall is 10-60mm.
4. the polymer coated device of the big volume plasma of a kind of tubulose according to claim 1, it is characterised in that：Described
It is covered with through hole on electrode, aperture is 2-30mm, and at intervals of 2-30mm, the material of electrode is aluminium or stainless steel in hole.
5. the polymer coated device of the big volume plasma of a kind of tubulose according to claim 1, it is characterised in that：Described
Per between two neighboring vector gas pipeline (6) at intervals of 30-80cm, it is described per two neighboring monomer vapours pipeline (7) it
Between at intervals of 30-80cm, it is described per two neighboring vacuum exhaust pipeline (8) between at intervals of 30-80cm.
6. the polymer coated device of the big volume plasma of a kind of tubulose according to claim 1, it is characterised in that：Described
The tubular cage that tool (4) is made for metal or plastics.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2016210235741 | 2016-08-30 | ||
| CN201621023574 | 2016-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206304928U true CN206304928U (en) | 2017-07-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621295989.4U Active CN206304928U (en) | 2016-08-30 | 2016-11-30 | A kind of polymer coated device of big volume plasma of tubulose |
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| Country | Link |
|---|---|
| CN (1) | CN206304928U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106733264A (en) * | 2016-08-30 | 2017-05-31 | 无锡荣坚五金工具有限公司 | A kind of polymer coated device of big volume plasma of tubulose |
-
2016
- 2016-11-30 CN CN201621295989.4U patent/CN206304928U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106733264A (en) * | 2016-08-30 | 2017-05-31 | 无锡荣坚五金工具有限公司 | A kind of polymer coated device of big volume plasma of tubulose |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201030 Address after: Yuqi Industrial Park East Ring Road 214183 Jiangsu city of Wuxi Province Patentee after: Jiangsu Favored Nanotechnology Co.,Ltd. Address before: Yuqi town Yuqi Industrial Park East Ring Road, Huishan District, Wuxi City, Jiangsu Province Patentee before: Wuxi Rongjian Hardware Tools Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| CP03 | Change of name, title or address |
Address after: No.182, East Ring Road, Yuqi supporting area, Huishan Economic Development Zone, Wuxi City, Jiangsu Province, 214000 Patentee after: Jiangsu feiwotai nanotechnology Co.,Ltd. Address before: 214183 East Ring Road, Yuqi Industrial Park, Wuxi City, Jiangsu Province Patentee before: Jiangsu Favored Nanotechnology Co.,Ltd. |
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| CP03 | Change of name, title or address |