CN111041445A - Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts - Google Patents
Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts Download PDFInfo
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- CN111041445A CN111041445A CN201911368633.7A CN201911368633A CN111041445A CN 111041445 A CN111041445 A CN 111041445A CN 201911368633 A CN201911368633 A CN 201911368633A CN 111041445 A CN111041445 A CN 111041445A
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- 238000000576 coating method Methods 0.000 title claims abstract description 42
- 238000005240 physical vapour deposition Methods 0.000 title claims abstract description 28
- 239000011248 coating agent Substances 0.000 claims abstract description 32
- 238000009434 installation Methods 0.000 claims description 18
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000005096 rolling process Methods 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 description 11
- 230000006872 improvement Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 8
- 238000000151 deposition Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
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- 238000000429 assembly Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Mechanical Engineering (AREA)
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- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a multidirectional rotating device for physical vapor deposition of coatings on the surfaces of threaded parts, which comprises a base and a swinging assembly arranged on the base, wherein the swinging assembly is hinged on the base, a swinging driving assembly is arranged between the swinging assembly and the base and can drive the swinging assembly to swing around the hinged position of the swinging assembly, one end of the swinging assembly is provided with a rotating part capable of radially rotating and a rotating driving motor for driving the rotating part to rotate, and the rotating part is provided with a threaded part fixing device for fixing the threaded parts. The multidirectional rotating device for physical vapor deposition of the coating on the surface of the threaded part has the advantages of simple structure, low implementation cost, small implementation difficulty, high processing quality, high coating consistency and the like, which are not possessed by the prior art.
Description
Technical Field
The invention relates to auxiliary equipment used in the field of surface modification, in particular to a multidirectional rotating device for physical vapor deposition of a coating on the surface of a threaded part.
Background
The surface modification technology is a technology for covering a specific coating material on the surface of a part by means of physical deposition, chemical deposition, mechanical spraying and the like, so that the surface of the part obtains the performance of the coating material, and further the corrosion resistance, wear resistance, high temperature resistance, oxidation resistance and the like of the part are improved. Physical vapor deposition is a technique of gasifying the surface of a material source into gaseous atoms, molecules or partially ionizing the gaseous atoms into ions under a vacuum condition by a physical method, and depositing a film with a certain special function on the surface of a substrate through a low-pressure gas (or plasma) process, wherein the main methods comprise vacuum evaporation, sputtering coating, arc plasma coating, ion coating, molecular beam epitaxy and the like. However, in the conventional physical vapor deposition processing process, the shape of the part has a remarkable influence on the effect of the surface deposition coating, and for small parts with thread structures, if the surface coating deposition is carried out in a mode that the sample table integrally rotates, the single batch processing quantity of samples is small, the processing cost is greatly increased, the consistency of the deposition conditions of the coatings at different positions cannot be ensured, particularly the thread surface, and the overall performance of the surface coating is reduced. If the design of rotating mechanism is carried out on the sample platform, the reconstruction cost of equipment is greatly increased, and the sample platform aiming at parts with different sizes needs to be designed, and especially for the deposition of the surface coating of the parts with small quantity, the great waste is brought.
In conclusion, the prior art has the defects of high processing cost, difficult equipment modification, high equipment modification cost, complex structure, low production efficiency, poor consistency of the coating on the surface of the threaded part and the like, and the defects limit further development, popularization and application in the field.
In view of the above, the present invention provides a new technical solution to solve the existing technical drawbacks.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides the multidirectional rotating device for physical vapor deposition of the coating on the surface of the threaded part, and solves the technical defects of complex structure, low working efficiency, high implementation cost, poor consistency of the coating of the threaded part and the like in the prior art.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a multidirectional rotating device for physical vapor deposition of coatings on the surfaces of threaded parts comprises a base and a swinging assembly arranged on the base, wherein the swinging assembly is hinged to the base, a swinging driving assembly is arranged between the swinging assembly and the base and can drive the swinging assembly to swing around the hinged position of the swinging assembly, one end of the swinging assembly is provided with a rotating part capable of rotating radially and a rotating driving motor used for driving the rotating part to rotate, and a threaded part fixing device used for fixing the threaded parts is arranged on the rotating part.
As an improvement of the above technical solution, the swing assembly includes a fixing portion and a power portion, and the fixing portion and the power portion are fixed to each other.
As a further improvement of the above technical solution, the rotation portion is installed on the fixed portion through a rotary bearing, the rotation driving motor is installed inside the power portion, a driving gear is provided on an output shaft of the rotation driving motor, one end of the rotation portion is provided with a driven driving gear engaged with the driving gear, the driving motor is accessible the driving gear, the driven driving gear drive the rotation portion rotates and further drives a screw member fixed on the rotation portion to rotate.
As a further improvement of the above technical solution, one end of the rotating portion has an outwardly extending rotating shaft, a fixing portion middle through hole adapted to the rotating shaft to pass through is formed in the middle of the fixing portion, the rotating shaft passes through the fixing portion middle through hole and the driven driving gear is mounted at one end of the rotating shaft passing through the fixing portion middle through hole, the fixing portion is provided with a bearing mounting position for mounting the rotating bearing, an outer ring of the rotating bearing is fixedly mounted on a side wall of the bearing mounting position, and the rotating shaft is fixedly mounted on an inner ring of the rotating bearing;
as a further improvement of the above technical solution, a motor mounting position is provided inside the power portion, the rotation driving motor is fixedly mounted in the motor mounting position, and a gear clearance concave position for accommodating the driving gear and the driven driving gear is inwardly provided at one end of the fixing portion away from the rotation portion.
As a further improvement of the above technical solution, key assemblies are disposed between the output shaft of the rotation driving motor and the driving gear and between the rotation shaft and the driven driving gear, the key assemblies include fixed keys and fixed key top pressure springs, key mounting positions are disposed on the output shaft and the rotation shaft of the rotation driving motor, the fixed keys are disposed in the key mounting positions, the fixed key top pressure springs are disposed between the bottoms of the key mounting positions and the bottoms of the fixed keys and press the upper portions of the fixed keys into corresponding locking concave positions on the driving gear or the driven driving gear, and both ends of the upper portions of the fixed keys are provided with bevel structures).
As a further improvement of the above technical scheme, the fixed part passes through coupling assembling reciprocal anchorage with power portion, coupling assembling is including articulating the connecting rod at the fixed part lateral wall and setting up the connecting rod locking bolt at the connecting rod free end, connecting rod locking bolt with power portion fixed connection, the fixed part lateral wall has the articulated seat of connection, connecting rod one end is articulated to be installed connect articulated seat on, the connecting rod free end is offered and is used for the installation connecting rod locking bolt's through-hole, connecting rod locking bolt passes threaded connection is on power portion behind the through-hole of connecting rod.
As a further improvement of the above technical solution, the swing driving assembly includes an arc-shaped swing gear fixed on the swing assembly and a swing driving motor fixedly mounted on the base, an output end of the swing driving motor is provided with a swing driving gear, and the swing driving gear is engaged with the arc-shaped swing gear;
the base has the base riser that upwards extends, swing driving motor passes through the swing motor mount pad to be installed at base riser lateral wall, and the swing motor mount pad passes through motor mount pad fixing bolt to be fixed on the base riser, the arc centre of a circle of swing arc swing gear and the swing center pin coincidence of swing subassembly.
As a further improvement of the above technical scheme, be provided with the swing supporting component between swing subassembly and the base, the swing supporting component is including fixing the articulated seat of swing and the swing articulated shaft on the base, the swing subassembly articulates in the articulated seat of swing upper end through the swing articulated shaft, the articulated seat of swing passes through articulated seat fixing bolt fixed mounting on the base.
As a further improvement of the above technical solution, the screw fixing device on the rotating portion is a screw fixing mounting hole formed inward from one end of the rotating portion, one end of the screw can be inserted into and fixed to the screw fixing mounting hole, a screw fastening screw hole communicated with the screw fixing mounting hole is formed in a side portion of the rotating portion, a screw fastening screw is provided in the screw fastening screw hole, and the screw fastening screw is a plastic screw made of PBT plastic.
As a further improvement of the technical scheme, the swing limiting device is matched with the swing assembly to be used and comprises an anticlockwise swing limiting trigger key and a clockwise swing limiting trigger key, the anticlockwise swing limiting trigger key is arranged in pairs and is respectively installed at the bottoms of one ends of the base and the swing assembly, and the clockwise swing limiting trigger key is arranged in pairs and is respectively arranged at the bottoms of the other ends of the base and the swing assembly.
The invention has the beneficial effects that: the invention provides a multidirectional rotating device for physical vapor deposition of coatings on the surface of a threaded part, which fixes the threaded part to be processed by utilizing a rotating part, utilizes a rotary driving motor to drive the rotating part and the threaded part to rotate, and utilizes a swing driving component to drive a swing component, the rotating part and the threaded part to swing in a reciprocating manner, so that the surface coatings of the threaded part are uniform and high in the physical vapor deposition processing process of the surface coatings, the processing consistency of products is greatly improved, and the processing quality of the products is better; in addition, the multidirectional rotating device for physical vapor deposition of the surface coating of the threaded part is simple in structure, the implementation difficulty and the implementation cost can be greatly reduced in the implementation process, the consumption of a large amount of manpower and material resources for equipment transformation is avoided, the production cost is reduced, and the use experience is better.
In conclusion, the multidirectional rotating device for physical vapor deposition of the surface coating of the threaded part solves the technical defects of complex structure, low working efficiency, high implementation cost, poor consistency of the coating of the threaded part and the like in the prior art.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is an assembly schematic of the present invention;
fig. 2 is a schematic view showing the construction of a key assembly provided on a rotary shaft according to the present invention.
Detailed Description
The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and those skilled in the art can obtain other embodiments without inventive effort based on the embodiments of the present invention, and all embodiments are within the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. The technical features of the invention can be interactively combined without conflicting with each other, as shown in fig. 1 and 2.
A multidirectional rotating device for physical vapor deposition of coatings on the surfaces of threaded parts comprises a base 1 and a swinging assembly arranged on the base 1, wherein the swinging assembly is hinged on the base 1, a swinging driving assembly is arranged between the swinging assembly and the base, specifically, the swinging assembly comprises a fixing part 3 and a power part 4, and the fixing part 3 and the power part 4 are mutually fixed; the swing driving assembly can drive the swing assembly to swing around the hinged position of the swing assembly, one end of the swing assembly is provided with a rotating part 2 capable of rotating in the radial direction and a rotating driving motor 5 for driving the rotating part 2 to rotate, and the rotating part 2 is provided with a threaded part fixing device for fixing a threaded part 20; still including the cooperation the swing stop device that the swing subassembly used, swing stop device includes spacing trigger key 101 of anticlockwise swing and the spacing trigger key 102 of clockwise swing, the spacing trigger key 101 of anticlockwise swing sets up in pairs and installs respectively in base 1 and swing subassembly one end bottom, the spacing trigger key 102 of clockwise swing sets up in pairs and sets up respectively in base 1 and swing subassembly other end bottom.
Preferably, the rotating part 2 is mounted on the fixing part 3 through a rotating bearing 30, the rotating driving motor 5 is mounted inside the power part 4, a driving gear 51 is arranged on an output shaft of the rotating driving motor 5, a driven driving gear 52 meshed with the driving gear 51 is arranged at one end of the rotating part 2, and the driving motor 5 can drive the rotating part 2 to rotate through the driving gear 51 and the driven driving gear 52 and further drive the screw 20 fixed on the rotating part 2 to rotate; one end of the rotating part 2 is provided with a rotating shaft 21 extending outwards, a fixing part middle through hole 31 matched with the rotating shaft 21 to penetrate is formed in the middle of the fixing part 3, the rotating shaft 21 penetrates through the fixing part middle through hole 31, the driven driving gear 52 is installed at one end, penetrating through the fixing part middle through hole 31, of the rotating shaft 21, a bearing installation position 32 used for installing the rotating bearing 30 is formed in the fixing part 3, the outer ring of the rotating bearing 30 is fixedly installed on the side wall of the bearing installation position 32, and the rotating shaft 21 is fixedly installed on the inner ring of the rotating bearing 30; a motor mounting position 41 is arranged in the power part 4, the rotary driving motor 5 is fixedly mounted in the motor mounting position 41, and a gear clearance concave position 33 for accommodating the driving gear 51 and the driven driving gear 52 is inwards arranged at one end of the fixed part 3 away from the rotary part 2; key components are arranged between the output shaft of the rotary driving motor 5 and the driving gear 51 and between the rotating shaft 21 and the driven driving gear 52, each key component comprises a fixed key 61 and a fixed key top pressing spring 62, key installation positions 63 are arranged on the output shaft of the rotary driving motor 5 and the rotating shaft 21, the fixed keys 61 are arranged in the key installation positions 63, the fixed key top pressing springs 62 are arranged between the bottoms of the key installation positions 63 and the bottoms of the fixed keys 61 and press the upper parts of the fixed keys 61 into corresponding locking concave positions on the driving gear 51 or the driven driving gear 52, and two ends of the upper part of each fixed key 61 are provided with bevel structures 611; fixed part 3 and power portion 4 pass through coupling assembling reciprocal anchorage, coupling assembling is including articulating connecting rod 71 at the 3 lateral walls of fixed part and setting up the connecting rod locking bolt 72 at connecting rod 71 free end, connecting rod locking bolt 72 with power portion 4 fixed connection, the 3 lateral walls of fixed part have and connect articulated seat 73, connecting rod 71 one end is articulated to be installed connect articulated seat 73 is last, connecting rod 71 free end is offered and is used for the installation connecting rod locking bolt 72's through-hole, connecting rod locking bolt 72 passes threaded connection is on power portion 4 behind the through-hole of connecting rod 71.
Preferably, the swing driving assembly comprises an arc-shaped swing gear 81 fixed on the swing assembly and a swing driving motor 82 fixedly installed on the base 1, a swing driving gear 83 is arranged at an output end of the swing driving motor 82, and the swing driving gear 83 is meshed with the arc-shaped swing gear 81;
the base 1 is provided with a base vertical plate 11 extending upwards, the swing driving motor 82 is installed on the side wall of the base vertical plate 11 through a swing motor installation seat 84, the swing motor installation seat 84 is fixed on the base vertical plate 11 through a motor installation seat fixing bolt 85, and the arc circle center of the swing arc-shaped swing gear 81 is overlapped with the swing central axis of the swing assembly; a swing support assembly is arranged between the swing assembly and the base 1, the swing support assembly comprises a swing hinge seat 91 and a swing hinge shaft 92, the swing hinge seat 91 is fixed on the base 1, the swing assembly is hinged to the upper end of the swing hinge seat 91 through the swing hinge shaft 92, and the swing hinge seat 91 is fixedly installed on the base 1 through a hinge seat fixing bolt 93; : the screw fixing device on the rotating part 2 is a screw fixing mounting hole 201 formed by one end of the rotating part inwards, one end of the screw 20 can be inserted into the screw fixing mounting hole 201 and fixed, a screw fastening screw hole communicated with the screw fixing mounting hole 201 is formed in the side part of the rotating part 2, a screw fastening screw 202 is arranged in the screw fastening screw hole, and the screw fastening screw 202 is a plastic screw made of PBT plastic.
In the specific implementation of the present invention, the screw 20 to be subjected to the physical vapor deposition of the surface coating is inserted into the screw fixing hole 201 of the rotating part 2, the screw 20 is fixed in the screw fixing hole 201 by using the screw fastening screw 202, and after the screw 20 is fixed, the sample is placed on the sample stage of the physical vapor deposition apparatus.
After the swing assembly starts to work, the swing driving motor 82 drives the swing assembly to rotate around the swing hinge shaft 92 through the matching structure of the swing driving gear 83 and the arc-shaped swing gear 81, and the swing assembly controls the swing driving motor 82 to rotate forward and backward through the anticlockwise swing limiting trigger key 101 and the clockwise swing limiting trigger key 102 in the swing process, so that reciprocating swing is realized. Specifically, the swing frequency and the swing amplitude of the swing assembly are both adjustable, the swing amplitude range is +/-70 degrees, and the swing frequency of the swing assembly is 0.01-1 Hz.
In the process that the swing driving assembly drives the swing assembly to swing in a reciprocating mode, the rotating driving motor 5 drives the rotating portion 2 to rotate through the driving gear 51 and the driven driving gear 52, the rotating portion 2 drives the threaded piece 20 to rotate in the rotating process, the rotating speed ranges from 0.5 r/min to 300r/min, and the rotating portion is installed at one end of the swing assembly, so that the threaded piece 20 swings simultaneously in the rotating process, the surface coating of the threaded piece has better uniformity when the threaded piece is subjected to physical vapor deposition processing of the surface coating, the whole device is simple in structure, low in implementation difficulty and low in implementation cost.
In specific implementation, the power unit 4, the driving gear 51 and the swing motor mounting seat 84 are all made of polymer insulating materials.
Example 1:
the surface of a fixing bolt (screw member 20) for a certain power component is subjected to physical vapor deposition of a WC coating by a magnetron sputtering method, and the bolt is made of stainless steel. Firstly, clamping a bolt at the front end of the rotating part 2, fixing the bolt by using a threaded part fastening screw 202, and regulating and controlling the rotating speed of the threaded part 20, the swing angle and the swing amplitude of the swing assembly to required values; then all the clamped bolts (threaded parts 20) are orderly placed on a sample table of the magnetron sputtering equipment according to requirements, and power lines and control lines are connected to an external power supply and control lines. Vacuum pumping to make background vacuum degree higher than 3 × 10–4After Pa, the power supply of the rotation driving motor 5 and the swing driving motor 82 is turned on to start the rotation and swing of the boltMoving; introducing Ar gas to maintain the pressure of the chamber gas at 3 × 10-2Pa and then the deposition of the WC coating is started. And after the deposition is finished, disconnecting the power supply of the motor, introducing gas, opening the cavity and taking out the sample.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A multidirectional rotating device for physical vapor deposition of coatings on the surfaces of threaded parts is characterized in that: including base (1) and install swing subassembly on base (1), swing subassembly is articulated to be installed on the base (1), be provided with the swing drive subassembly between swing subassembly and the base, the swing drive subassembly can drive swing subassembly is swung round its articulated position, swing subassembly one end is provided with but radial pivoted rotation portion (2) and is used for the drive rotation portion (2) pivoted rotates driving motor (5), be equipped with the screw spare fixing device who is used for fixed screw spare (20) on rotation portion (2).
2. The multidirectional rotation apparatus for physical vapor deposition of a surface coating on a screw according to claim 1, wherein: the swing assembly comprises a fixing portion (3) and a power portion (4), and the fixing portion (3) and the power portion (4) are fixed to each other.
3. The multidirectional rotation apparatus for physical vapor deposition of a surface coating on a screw according to claim 2, wherein: rotation portion (2) are installed on fixed part (3) through rolling bearing (30), it installs to rotate driving motor (5) power portion (4) are inside, be provided with drive gear (51) on the output shaft of rotation driving motor (5), the one end of rotation portion (2) be provided with drive gear (51) intermeshing's driven drive gear (52), drive driving motor (5) accessible drive gear (51), driven drive gear (52) drive rotation portion (2) are rotated and are further driven and fix screw (20) rotation on rotation portion (2) and rotate.
4. A multidirectional rotation apparatus for physical vapor deposition of a coating on a surface of a screw according to claim 3, wherein: one end of the rotating part (2) is provided with a rotating shaft (21) extending outwards, a fixing part middle through hole (31) matched with the rotating shaft (21) to penetrate is formed in the middle of the fixing part (3), the rotating shaft (21) penetrates through the fixing part middle through hole (31), the driven driving gear (52) is installed at one end, penetrating through the fixing part middle through hole (31), of the rotating shaft (21), a bearing installation position (32) used for installing the rotating bearing (30) is formed in the fixing part (3), the outer ring of the rotating bearing (30) is fixedly installed on the side wall of the bearing installation position (32), and the rotating shaft (21) is fixedly installed on the inner ring of the rotating bearing (30);
the power portion (4) is inside to be provided with motor installation position (41), rotate driving motor (5) fixed mounting in motor installation position (41), fixed part (3) are kept away from the one end of rotation portion (2) inwards offered and are used for holding drive gear (51) and driven drive gear (52) gear is kept away from empty concave position (33).
5. The multidirectional rotation apparatus for physical vapor deposition of a surface coating on a screw according to claim 4, wherein: the key components are arranged between an output shaft of the rotary driving motor (5) and the driving gear (51) and between the rotating shaft (21) and the driven driving gear (52), each key component comprises a fixed key (61) and a fixed key jacking spring (62), key installation positions (63) are arranged on the output shaft of the rotary driving motor (5) and the rotating shaft (21), the fixed keys (61) are arranged in the key installation positions (63), the fixed key jacking springs (62) are arranged between the bottoms of the key installation positions (63) and the bottoms of the fixed keys (61) and press the upper parts of the fixed keys (61) into corresponding locking concave positions on the driving gear (51) or the driven driving gear (52), and oblique structures (611) are arranged at two ends of the upper part of each fixed key (61).
6. The multidirectional rotation apparatus for physical vapor deposition of a surface coating on a screw according to claim 2, wherein: fixed part (3) and power portion (4) are fixed each other through coupling assembling, coupling assembling is including articulating connecting rod (71) at fixed part (3) lateral wall and setting up connecting rod locking bolt (72) at connecting rod (71) free end, connecting rod locking bolt (72) with power portion (4) fixed connection, fixed part (3) lateral wall has the articulated seat of connection (73), connecting rod (71) one end is articulated to be installed connect articulated seat (73) are last, connecting rod (71) free end is seted up and is used for the installation the through-hole of connecting rod locking bolt (72), connecting rod locking bolt (72) pass threaded connection is on power portion (4) behind the through-hole of connecting rod (71).
7. The multidirectional rotation apparatus for physical vapor deposition of a surface coating on a screw according to claim 1, wherein: the swing driving assembly comprises an arc-shaped swing gear (81) fixed on the swing assembly and a swing driving motor (82) fixedly installed on the base (1), a swing driving gear (83) is arranged at the output end of the swing driving motor (82), and the swing driving gear (83) is meshed with the arc-shaped swing gear (81);
base (1) has base riser (11) that upwards extends, swing driving motor (82) are installed at base riser (11) lateral wall through swing motor mount pad (84), and swing motor mount pad (84) are fixed on base riser (11) through motor mount pad fixing bolt (85), the arc centre of a circle of swing arc swing gear (81) and the coincidence of the swing center pin of swing subassembly.
8. The multidirectional rotation apparatus for physical vapor deposition of a surface coating on a screw according to claim 1, wherein: be provided with the swing supporting component between swing subassembly and base (1), the swing supporting component is including fixing articulated seat of swing (91) and swing articulated shaft (92) on base (1), the swing subassembly articulates in articulated seat of swing (91) upper end through swing articulated shaft (92), articulated seat of swing (91) is through articulated seat fixing bolt (93) fixed mounting on base (1).
9. The multidirectional rotation apparatus for physical vapor deposition of a surface coating on a screw according to claim 1, wherein: the screw fixing device on the rotating part (2) is a screw fixing mounting hole (201) formed by one end of the rotating part inwards, one end of the screw (20) can be inserted into the screw fixing mounting hole (201) and fixed, a screw fastening screw hole communicated with the screw fixing mounting hole (201) is formed in the side part of the rotating part (2), a screw fastening screw (202) is arranged in the screw fastening screw hole, and the screw fastening screw (202) is a plastic screw made of PBT plastic.
10. The multidirectional rotation apparatus for physical vapor deposition of a surface coating on a screw according to claim 1, wherein: still including the cooperation the swing stop device that the swing subassembly used, swing stop device includes spacing trigger key of anticlockwise swing (101) and the spacing trigger key of clockwise swing (102), the spacing trigger key of anticlockwise swing (101) sets up in pairs and installs respectively in base (1) and swing subassembly one end bottom, the spacing trigger key of clockwise swing (102) sets up in pairs and sets up respectively in base (1) and swing subassembly other end bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911368633.7A CN111041445A (en) | 2019-12-26 | 2019-12-26 | Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911368633.7A CN111041445A (en) | 2019-12-26 | 2019-12-26 | Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts |
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| CN111041445A true CN111041445A (en) | 2020-04-21 |
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| CN201911368633.7A Pending CN111041445A (en) | 2019-12-26 | 2019-12-26 | Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts |
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| WO2007111097A1 (en) * | 2006-03-27 | 2007-10-04 | Shinmaywa Industries, Ltd. | Substrate holding apparatus |
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| CN211595784U (en) * | 2019-12-26 | 2020-09-29 | 北京大学深圳研究院 | Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts |
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| CN110983284A (en) * | 2019-12-26 | 2020-04-10 | 北京大学深圳研究院 | Axial rotation clamping mechanism for physical vapor deposition of surface coating of columnar part |
| CN211595784U (en) * | 2019-12-26 | 2020-09-29 | 北京大学深圳研究院 | Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts |
| WO2023069190A1 (en) * | 2021-10-21 | 2023-04-27 | Applied Materials, Inc. | Tilted pvd source with rotating pedestal |
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