CN217265994U

CN217265994U - Planet film coating system

Info

Publication number: CN217265994U
Application number: CN202221223032.4U
Authority: CN
Inventors: 杨伟; 刘沧浪; 万敏; 罗铫; 李越
Original assignee: Chengdu Zhongkezhuoer Intelligent Technology Group Co ltd
Current assignee: Chengdu Zhongkezhuoer Intelligent Technology Group Co ltd
Priority date: 2022-05-20
Filing date: 2022-05-20
Publication date: 2022-08-23
Anticipated expiration: 2032-05-20

Abstract

The utility model relates to a planetary film coating system, which comprises a vacuum chamber and a rotating tool arranged in the vacuum chamber, wherein the rotating tool comprises a rotary part which can be rotatably arranged, a first driving module, a second driving module and a plurality of film coating rotary tables; the coating rotary tables are respectively rotatably connected with the rotary supports, are respectively matched with the rotary parts and are in transmission connection with the rotary parts; the rotating bracket is rotatably connected with the frame; the first driving module is in transmission connection with the rotating support and is used for driving each coating rotary table to synchronously revolve around the rotation center of the revolving part and synchronously driving each coating rotary table to rotate; the second driving module is in transmission connection with the rotary part and is used for driving each coating rotary table to rotate; the coating system has multiple working modes, can realize the rotation of the coating rotary table at a specific position, obviously improves the coating efficiency of elements, can coat films in batches, and can realize the coating of different films on different coating elements.

Description

Planet film coating system

Technical Field

The utility model relates to a coating film technical field, concretely relates to planet coating film system.

Background

Magnetron sputtering is a widely used physical vapor deposition coating technique. Compared with the common thermal evaporation coating, the coating rate of magnetron sputtering is stable, and the thickness of the film which can be coated once is larger than that of the thermal evaporation coating; compared with the ion beam sputtering coating technology, the magnetron sputtering cathode has the advantages of relatively simple structure and low maintenance cost, so the coating cost is lower than that of the ion beam sputtering coating technology. Due to the technical characteristics of magnetron sputtering, the method is widely applied to the preparation of various metal films, semiconductor films, dielectric films, magnetron films, optical films, superconducting films, sensing films and various functional films with special requirements.

The coating on the surface of the spherical element (or called as a workpiece) can be realized by utilizing a magnetron sputtering coating method. In order to obtain high film thickness uniformity on the surface of the spherical element, it is usually necessary to use a rotating tool to obtain a film thickness distribution with a centrosymmetric distribution, so that the rotating tool is widely applied to coating equipment (or called coating systems and coating machines). At present, the rotation of a spherical sample can be realized by two rotation modes, and magnetron sputtering coating is completed. In the first sample rotation mode, the spherical element is positioned in the magnetron sputtering coating area and rotates at a high speed around the symmetry center of the spherical element. When the coating of the surface of the spherical sample is realized by utilizing the rotating mode, only one spherical sample can be coated each time; in the second rotation mode, the spherical element is mounted on a planetary rotation jig, and the element does not rotate at high speed around the center of symmetry while revolving along one center. The coating of a plurality of samples can be realized by utilizing the mode, and the maximum coating number is consistent with the number of planetary rotation. However, in the coating process, because the coating lenses revolve around the rotating wheel under the driving of the rotating tool, and a large gap is usually formed between two adjacent coating lenses, many targets are sputtered into the gap, so that the material pollution and waste are caused, the material utilization rate is low, the cost is high, and meanwhile, more time is consumed for coating films with the same thickness, so that the coating efficiency is greatly reduced. In addition, a plurality of coating film lenses can be installed on the existing planet rotating tool at the same time, only one target can be matched with the rotating tool for coating in the coating process, and other targets can not be coated, so that in the rotating process of the rotating tool, all the coating film lenses installed on the rotating tool can only be coated with the same film, and different films can not be coated for different coating film lenses at the same time, and the problem of low coating efficiency of the existing coating equipment is caused.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve present magnetron sputtering filming equipment and have the problem that material utilization is low, with high costs, coating film inefficiency in spherical element surface coating film process, provide a coating film system, can show improvement material utilization and coating film efficiency, not only can the batch coating film, can plate different membranes for different coated lenses moreover, the main conception is:

a planetary coating system comprises a vacuum chamber and a rotating tool arranged in the vacuum chamber, wherein the rotating tool comprises a rack, a rotating support, a rotating part rotatably arranged on the rack, a first driving module, a second driving module and a plurality of coating rotary tables for supporting jigs and/or elements, wherein each coating rotary table is respectively rotatably connected with the rotating support and distributed along the circumferential direction of the rotating center of the rotating part, and each coating rotary table is respectively matched with the rotating part and is respectively in transmission connection with the rotating part; the rotating bracket is rotatably connected to the rack, and the rotating center of the rotating bracket is superposed with the rotating center of the rotating part; the first driving module is in transmission connection with the rotating support and is used for driving each film coating rotary table to synchronously revolve around the rotation center of the rotating part and synchronously driving each film coating rotary table to rotate; and the second driving module is in transmission connection with the rotary part and is used for driving each coating rotary table to rotate. In the coating system, the problem of supporting a jig and/or elements in the coating process is solved by arranging the coating rotary tables, and the coating system can simultaneously coat a plurality of elements by constructing the plurality of coating rotary tables, so that the efficiency is improved; each coating rotary table is arranged on a rotary support, the rotary support is rotatably connected to the rack, and the first driving module is in transmission connection with the rotary support, so that in the coating process, the first driving module can drive the rotary support to rotate to achieve the purpose of driving each coating rotary table to synchronously revolve around the rotation center of the rotation part and rotate, and elements on each coating rotary table can be circularly rotated to the position adaptive to a sputtering cathode, so that the coating system can simultaneously coat films on the elements on a plurality of coating rotary tables, the efficiency is improved, batch coating is realized, and the uniformity of coating is improved; through setting up the revolving part, and carry out rotatable installation with the revolving part, make each coating film revolving stage distribute along the circumferencial direction at revolving part centre of rotation respectively, be connected each coating film revolving stage with the revolving part transmission respectively simultaneously, second drive module is connected with the revolving part transmission, make at the coating film in-process, second drive module can rotate through drive revolving part and reach each coating film revolving stage rotation of drive, and then drive the purpose of the high-speed rotation of tool and/or component on each coating film revolving stage, cooperation through first drive module and second drive module, can realize two kinds of mode, wherein, a kind of mode: in the process of coating, only the first driving module is started, so that each coating rotary table can be in revolution and rotation states at the same time, and a plurality of elements can be coated at the same time; the second working mode is as follows: in the coating process, the coating rotary table can be rotated to the position matched with the sputtering cathode through the first driving module, then the first driving module is closed, and the second driving module is started, so that the coating rotary table can rotate at a high speed at a preset position and is matched with the sputtering cathode for coating, by adopting the working mode, not only can the elements on each coating rotary table be continuously coated, and the coating efficiency of the elements can be obviously improved, but also the sputtering cathode is matched with the position of the coating rotary table, sputtered target materials can directly act on the elements on the coating rotary table, and the gap between the coating rotary tables is avoided, so that the pollution and waste of materials can be effectively avoided, and the utilization rate of the materials can be obviously improved; in addition, each coating rotary table is respectively matched with the sputtering cathode independently, so that in the same coating process, the coating system can coat films with different film layers for each element on each coating rotary table respectively, the coating efficiency of difference coating can be obviously improved, and the problems in the prior art can be effectively solved.

In order to solve the problem that each coating rotary table can be in transmission connection with a rotary part, the rotary part and the coating rotary table are respectively provided with a plurality of teeth which are matched with each other, and each coating rotary table is in transmission connection with the rotary part through the meshing of the teeth and the teeth. That is, in this solution, by constructing a plurality of teeth on the revolving member, respectively constructing a plurality of teeth adapted to each coating turntable, and arranging each coating turntable in the circumferential direction of the revolving center of the revolving member, through the engagement of the teeth and the teeth, the coating turntable and the revolving member can constitute a rotation transmission mechanism, so that each coating turntable can be driven to synchronously revolve by the rotation of the revolving member.

Preferably, the rotary part adopts an internal gear or an external gear, and the coating rotary table is configured with the external gear matched with the rotary part.

In order to solve the problem that the rotation center of the rotating bracket coincides with the rotation center of the rotating part, the rotating bracket further comprises an inner shaft which can be rotatably installed and an outer shaft which can be rotatably installed on the rack, wherein the outer shaft is provided with a center hole, the outer shaft is sleeved on the outer side of the inner shaft through the center hole, and the rotation center of the inner shaft coincides with the rotation center of the outer shaft;

the rotating bracket is connected to the inner shaft, the inner shaft is in transmission connection with the first driving module, the rotary part is connected to the outer shaft, and the outer shaft is in transmission connection with the second driving module; or, the rotating bracket is connected with the outer shaft, the outer shaft is in transmission connection with the first driving module, the rotary part is connected with the inner shaft, and the inner shaft is in transmission connection with the second driving module. By adopting the structure, the coincidence of the rotation center of the rotating bracket and the rotation center of the rotating part can be ensured only by making the rotation center of the inner shaft coincide with the rotation center of the outer shaft, so that the structure is easy to realize, the structure is simplified, the structure is more compact, and the assembly is convenient.

For the rotatable mounting, it is preferred that the inner shaft is connected to the outer shaft and/or the machine frame by a bearing set, the outer shaft is connected to the machine frame by a bearing set, and the bearing set comprises at least two bearings.

In order to solve the problem of installation and positioning of the bearing, the inner shaft is a stepped shaft, the central hole of the outer shaft is configured to be matched with the stepped hole of the inner shaft, and the inner shaft is connected to the stepped hole of the outer shaft through a bearing set. By configuring the inner shaft as a stepped shaft and the central hole as a stepped hole, the step at the step is conveniently utilized to realize the installation and positioning of the bearing, so that the inner shaft is conveniently installed on the outer shaft by utilizing the bearing set.

In order to solve the problems of installation and positioning of the bearing, the outer shaft is further configured as a stepped shaft, the frame is configured with an adaptation to the stepped hole of the outer shaft, and the outer shaft is connected to the stepped hole of the frame through a bearing set. So that the mounting and positioning of the bearing is realized by the step at the step, thereby facilitating the mounting of the outer shaft to the frame by the bearing set.

To solve the problem of stably supporting the inner and outer shafts, further, the bearing set includes at least one thrust bearing. The thrust bearing is used to receive axial force, such as the weight of the inner shaft, the weight of the outer shaft, etc., so that the inner shaft and the outer shaft can be supported more stably by the thrust bearing.

Preferably, the frame includes a support cylinder and a flange coupled to the support cylinder, the flange being configured with a plurality of mounting holes. So that the rotary tool in the film coating system can be installed and fixed.

In order to solve the transmission problem, preferably, the first driving module includes a first transmission mechanism and a first motor, the first motor is in transmission connection with the first transmission mechanism, and the first transmission mechanism is in transmission connection with the inner shaft or the outer shaft;

and/or the second driving module comprises a second transmission mechanism and a second motor, the second motor is in transmission connection with the second transmission mechanism, and the second transmission mechanism is in transmission connection with the outer shaft or the inner shaft.

Further, the first transmission mechanism is one or a combination of a plurality of gear transmission mechanisms, belt transmission mechanisms, chain transmission mechanisms or worm and gear transmission mechanisms;

and/or the second transmission mechanism is one or more of a gear transmission mechanism, a belt transmission mechanism, a chain transmission mechanism or a worm and gear transmission mechanism.

In order to solve the problems of reduced gear meshing precision and reduced gear service life caused by a film coating process during sputtering film coating, the rotary bracket further comprises a horizontally arranged rotary turntable, and the rotary turntable is connected to an inner shaft or an outer shaft and is positioned above or below the rotary part;

the coating rotary table is further provided with installation parts for arranging jigs and/or elements, each coating rotary table is rotatably arranged on the rotary turntable, and the installation parts constructed on the coating rotary table and the teeth constructed on the coating rotary table are respectively positioned on different sides of the rotary turntable. Namely, when the coating turntable is installed behind the rotating turntable, the coating turntable is constructed below the rotating turntable in the manner that the coating turntable teeth are located, the coating turntable installation part is located above the rotating turntable, or the coating turntable teeth is located above the rotating turntable in the manner that the coating turntable installation part is located below the rotating turntable, and the sputtering cathode is installed at the position of the adaptive installation part and is located at the upper side or the lower side of the rotating turntable, so that in the coating process, the rotating turntable can play a role in isolating and protecting the gear, the target is not easy to sputter onto the teeth on the other side of the rotating turntable, the problem of reduction of gear meshing precision caused by the coating process can be effectively avoided, and the service life of the gear is prolonged.

In order to solve the problem of rotatable installation of the coating rotary table, preferably, the coating rotary table is respectively connected with the rotating rotary table through bearings. So that the separation of the movements is achieved with bearings.

Preferably, the rotating turntable is provided with a plurality of assembling holes, the assembling holes are respectively provided with a bearing seat, and each film coating turntable is respectively connected with the bearing seats through bearings.

Preferably, the mounting portion is a restriction hole formed in the coating turntable. So as to install the jig.

Preferably, the film coating rotary table and the teeth are of an integral structure.

In order to solve the problem of coating, the vacuum coating device further comprises a sputtering cathode, wherein the sputtering cathode is arranged in the vacuum chamber and is positioned at the position matched with the coating rotary table, and the effective coating area of the sputtering cathode covers a partial area of the revolution track of the coating rotary table. So as to be matched with the film coating rotary table, thereby facilitating film coating.

In order to solve the problem of accurate control, the system further comprises a controller, wherein the controller is electrically connected with the first driving module and the second driving module respectively. So that the first driving module and the second driving module are precisely controlled by the controller.

Compared with the prior art, use the utility model provides a pair of planet coating system, compact structure, reasonable in design have multiple mode, can realize the rotation of coating film revolving stage in the particular position to can show the coating film efficiency who improves material utilization and component, not only can be the coating film in batches, can realize the system of plating on different retes to the coating film component of difference moreover.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on these drawings without inventive efforts.

Fig. 1 is one of schematic three-dimensional structural diagrams of a rotating tool in a planetary coating system provided in embodiment 1 of the present invention.

Fig. 2 is a schematic diagram of a three-dimensional structure of a rotating tool in a planetary coating system provided in embodiment 1 of the present invention.

Fig. 3 is a front view of fig. 1.

Fig. 4 is a schematic structural diagram of a rotary component in a planetary coating system provided in embodiment 1 of the present invention.

Fig. 5 is a schematic structural diagram of a rotating bracket in a planetary coating system provided in embodiment 1 of the present invention.

Fig. 6 is a partial cross-sectional view of fig. 3.

Fig. 7 is a partial cross-sectional view of a plating turntable in a planetary plating system provided in embodiment 1 of the present invention.

Fig. 8 is a schematic three-dimensional structure diagram of a planetary coating system provided in embodiment 2 of the present invention.

Fig. 9 is a second schematic three-dimensional structure diagram of a planetary coating system according to embodiment 2 of the present invention.

Fig. 10 is a partial cross-sectional view of fig. 9.

Description of the drawings

Frame 100, support cylinder 101, stepped hole 102, flange 103, mounting hole 104

Rotary member 200, teeth 201, outer shaft 202, central hole 203, second motor 204, driving gear 206, driven gear 207

Rotating bracket 300, rotating turntable 301, assembly hole 302, inner shaft 303 and first motor 304

Coating rotary table 400, constraint hole 401, nut 402 and thrust washer 403

Bearing 500, thrust roller bearing 501, rolling bearing 502, bearing housing 503

Sputtering cathode 600

Jig 701 and element 702

Vacuum chamber 800, first installation channel 801, second installation channel 802

The sealing structure comprises a first magnetic fluid sealing structure 901, a second magnetic fluid sealing structure 902, a magnetic fluid sealing member 903, a magnetic fluid flange 904, an expansion sleeve 905, a sealing component 906, a coupler 907 and a connecting frame 908.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.

Example 1

The embodiment provides a planetary film coating system, which comprises a vacuum chamber 800, a sputtering cathode 600, a sputtering power supply connected with the sputtering cathode 600, a vacuum pump connected with the vacuum chamber 800, a rotating tool and the like, wherein,

in this embodiment, the vacuum chamber 800 is mainly used to form a vacuum environment required for vacuum coating, and a vacuum pump may be connected to the vacuum chamber 800 through a pipe so as to adjust and maintain the degree of vacuum in the vacuum chamber 800.

In this embodiment, the rotating tool comprises a frame, a rotating part 200 rotatably mounted on the frame, a first driving module, a second driving module, and a plurality of coating turntables 400 for supporting the jigs 701 and/or the components 702 (i.e. the components 702 to be coated), wherein,

the frame 100 may be fixedly mounted to the vacuum chamber 800, as shown in fig. 8 and 9, and mainly serves as a load bearing and supporting member.

The coating turntables 400 are mainly used for supporting and restraining the jigs 701 and/or the components 702, as shown in fig. 1 and 7, each coating turntable 400 is respectively rotatably connected to the rotating support 300 and distributed along the circumferential direction of the rotation center of the rotating part 200, and each coating turntable 400 is respectively adapted to the rotating part 200 and is respectively in transmission connection with the rotating part 200, so that the relative rotation of the rotating part 200 and the rotating support 300 can drive the coating turntables 400 to rotate; in this embodiment, by configuring a plurality of coating turntables 400, the coating system can coat a plurality of components 702 at the same time, which is beneficial to improving efficiency;

in practice, the rotating bracket 300 may be rotatably connected to the frame 100 such that the center of rotation of the rotating bracket 300 coincides with the center of rotation of the revolving unit 200, so as to achieve concentric rotation; by way of example, the rotating bracket 300 may be coupled to the frame 100 by a bearing.

In this embodiment, the first driving module is in transmission connection with the rotating bracket 300, as shown in fig. 3 and fig. 6, during the coating process, the first driving module can drive each coating turntable 400 to synchronously revolve around the rotation center of the rotating part 200, and synchronously drive each coating turntable 400 to rotate. That is, when the first driving module drives the rotating bracket 300 to rotate, not only the revolution of each coating turntable 400 can be driven, but also the rotation of each coating turntable 400 can be driven, so as to circularly rotate the elements 702 on each coating turntable 400 to the position of the adaptive sputtering cathode 600, so that the coating system can simultaneously coat films on the elements 702 on a plurality of coating turntables 400, thereby being beneficial to improving the efficiency, realizing batch coating, improving the uniformity of coating, and improving the coating quality.

In this embodiment, the second driving module is in transmission connection with the rotating part 200, and as shown in fig. 3 and 6, the second driving module can drive each coating turntable 400 to rotate during the coating process. That is to say, in the film coating process, the second driving module can drive the coating rotating tables 400 to rotate by driving the rotating parts 200 to rotate, so as to drive the jigs 701 and/or the elements 702 on the coating rotating tables 400 to rotate at a high speed.

In this embodiment, after the frame 100 is fixedly installed in the vacuum chamber 800, at least the rotating frame 300 and the coating turntable 400 are required to be located in the vacuum chamber 800 so as to coat in a vacuum environment.

In this embodiment, the sputtering cathode is disposed in the vacuum chamber and located at a position adapted to the coating turntable 400, so that the effective coating area of the sputtering cathode can cover a partial area of the revolution orbit of the coating turntable, i.e. at least a partial movement track of the revolution of the coating turntable 400, so as to correspond to the coating turntable 400, and cooperate with the coating turntable to coat the film. In practice, the number of the sputtering cathodes 600 may be determined according to practical requirements, each sputtering cathode 600 may be respectively disposed at different positions in the vacuum chamber, and different targets may be disposed at each sputtering cathode 600, or the same target may be disposed, and each sputtering cathode 600 may work independently or simultaneously, so as to coat different workpieces at the same time. In addition, in the present embodiment, the sputtering power source is electrically connected to the sputtering cathode 600, and is mainly used to supply power to the sputtering cathode 600.

When the coating system works, at least two main working modes can be realized through the matching of the first driving module and the second driving module, wherein the first working mode is as follows: in the process of coating, only the first driving module may be started, so that each coating turntable 400 may be in revolution and rotation states at the same time, and thus, the elements 702 on each coating turntable 400 may be coated at the same time, thereby significantly improving the coating efficiency.

The second working mode is as follows: in the coating process, a certain coating turntable 400 can be rotated to a position (or a predetermined position) adapted to the sputtering cathode 600 by the first driving module, and then the first driving module is turned off and the second driving module is turned on, so that the coating turntable 400 can be rotated at a high speed at the predetermined position and matched with the sputtering cathode 600 at the position, so as to perform efficient coating. By adopting the working mode, the elements 702 on each coating rotary table 400 can be continuously coated, which is beneficial to improving the efficiency, the position of the coating rotary table 400 is adapted to the sputtering cathode 600, the sputtered target material can directly act on the elements 702 on the coating rotary table 400, and the gap between the coating rotary tables 400 is avoided, so that the pollution and waste of materials can be effectively avoided, and the utilization rate of the materials can be obviously improved; in addition, because each coating turntable 400 can be respectively and independently matched with the sputtering cathode 600, the coating system can realize the coating of different coating layers on different coating elements in the same coating process, and the coating efficiency of difference coating can be obviously improved.

In order to allow the coating turntable 400 to be in driving connection with the rotating member 200, there are various embodiments, for example, the coating turntable 400 and the rotating member 200 may be in driving connection through a synchronous belt so as to rotate synchronously. For another example, the coating turntable 400 and the rotating member 200 may be connected by a chain transmission, and may also rotate synchronously. In a more preferred embodiment, the rotating member 200 and the coating turntable 400 are respectively configured with a plurality of teeth 201 which are matched with each other, as shown in fig. 2-6, and each coating turntable 400 can be respectively transmitted with the rotating member 200 through the meshing of the teeth 201 and the teeth 201 so as to form a planetary rotating structure. In practice, the teeth 201 may be straight teeth or oblique teeth. That is, in this embodiment, a plurality of teeth 201 are formed on the rotary member 200, a plurality of matching teeth 201 are formed on each coating turntable 400, and each coating turntable 400 is arranged in the circumferential direction of the rotation center of the rotary member 200, so that the coating turntable 400 and the rotary member 200 can form gear engagement transmission by the engagement of the teeth 201 and the teeth 201, and each coating turntable 400 can be driven to rotate synchronously by the rotation of the rotary member 200.

In practice, the teeth 201 should be formed to surround one circle along the circumferential direction of the rotating part 200 and the coating turntable 400, respectively, as shown in fig. 2 to 6, so that the rotating part 200 and the coating turntable 400 can rotate at any angle. For the sake of simplifying the structure, the rotary part 200 may employ an internal gear or an external gear, and the internal gear or the external gear may be mounted to the frame 100 through a bearing, and the coating turntable 400 is configured with an external gear fitted to the rotary part 200; for example, in the present embodiment, the rotation member 200 is an external gear and may be engaged with the coating turntable 400, and the external gear provided to the coating turntable 400 may be mounted on the coating turntable 400 or may be integrally formed with the coating turntable 400, as shown in fig. 2 and 3, that is, the teeth 201 may be directly formed on the coating turntable 400 and may be formed into one circle. In such embodiments, the second driving module has various embodiments, for example, the second driving module may include a gear fitted with the external gear and engaged with the rotary member 200 to drive the rotary member 200 to rotate; for another example, the second driving module may include a first pulley and a transmission belt, the upper end or the lower end of the revolving unit 200 is configured with a second pulley fitted to the first pulley, and the transmission belt is tensioned to the first pulley and the second pulley so as to drive the whole revolving unit 200 to rotate through the transmission belt; as another example, the second drive module may include a first sprocket and a chain, the upper or lower end of the revolving unit 200 is configured with a second sprocket that fits the first sprocket, and the chain is tensioned between the first and second sprockets so that the entire revolving unit 200 is driven to rotate by the chain.

In order to make the rotation center of the rotating bracket 300 and the rotation center of the rotating part 200 coincide with each other, in a preferred embodiment, the rotating tool further comprises an inner shaft 303 rotatably mounted and an outer shaft 202 rotatably mounted on the rack 100, as shown in fig. 1-6, the outer shaft 202 is configured with a central hole 203 penetrating through two ends, so that the outer shaft 202 is sleeved outside the inner shaft 303 through the central hole 203, and the rotation center of the inner shaft 303 coincides with the rotation center of the outer shaft 202; accordingly, as an example, the rotating bracket 300 may be connected to the inner shaft 303, the inner shaft 303 is in transmission connection with the first driving module, in this case, the rotating component 200 is connected to the outer shaft 202, and the outer shaft 202 is in transmission connection with the second driving module, as shown in fig. 2 and 3, in this case, the rotating component 200 is located below the rotating bracket 300, and the inner shaft 303 and the outer shaft 202 may respectively rotate relatively without mutual influence;

as another example, the rotating bracket 300 may be connected to the outer shaft 202, the outer shaft 202 is in transmission connection with the first driving module, in this case, the rotating component 200 is connected to the inner shaft 303, and the inner shaft 303 is in transmission connection with the second driving module, in this case, the rotating component 200 is located above the rotating bracket 300, and the inner shaft 303 and the outer shaft 202 may rotate relatively without mutual interference; specifically, in the present embodiment, by configuring the inner shaft 303 and the outer shaft 202, it is only necessary to make the rotation center of the inner shaft 303 coincide with the rotation center of the outer shaft 202, and it is ensured that the rotation center of the rotating bracket 300 coincides with the rotation center of the rotating member 200, which is not only easy to implement, but also advantageous for simplifying the structure, making the structure more compact, and facilitating assembly.

In practice, the inner shaft 303 may have a hollow structure for weight reduction, and as shown in fig. 5 and 6, the inner shaft 303 may have a cylindrical structure.

More preferably, to achieve a rotatable mounting, the inner shaft 303 may be connected to the outer shaft 202 and/or the housing 100 by a bearing set, as shown in fig. 6, and the bearing set includes at least one bearing; to facilitate the installation and positioning of the bearing between the inner shaft 303 and the outer shaft 202, in a further aspect, the inner shaft 303 may be a stepped shaft, as shown in fig. 6, and accordingly, the central hole 203 may be configured to fit the stepped hole 102 of the stepped shaft, as shown in fig. 6, the inner shaft 303 may be connected to the stepped hole 102 through a bearing set, and the installation and positioning of the bearing may be achieved by using the steps at the steps, as shown in fig. 6, to facilitate the installation of the inner shaft 303 to the outer shaft 202 through the bearing set; for stably supporting the inner shaft 303, in a more optimized scheme, the bearing set includes at least one thrust bearing, so that the thrust bearing can bear axial force, such as gravity of the inner shaft 303, and the like, so that the thrust bearing can be used for more stably supporting the inner shaft 303; by way of example, the bearing set between the inner shaft 303 and the outer shaft 202 comprises a thrust roller bearing 501 and a rolling bearing 502, as shown in fig. 6, the thrust roller bearing 501 and the rolling bearing 502 are respectively installed at a step, which is beneficial to bearing force axially and also beneficial to keeping the inner shaft 303 in a stable vertical state.

Similarly, the outer shaft 202 may also be connected to the frame 100 by a bearing set, and the bearing set includes at least one bearing, as shown in fig. 6; to facilitate the mounting and positioning of the bearings between the outer axle 202 and the housing 100, in a further aspect, the outer axle 202 may be configured as a stepped shaft, as shown in fig. 6, and accordingly, the housing 100 may be configured with a stepped bore 102 that fits the stepped shaft, as shown in fig. 6, and the outer axle 202 may be coupled to the stepped bore 102 via a bearing set to facilitate the mounting and positioning of the bearings using the steps at the steps to facilitate the mounting of the outer axle 202 to the housing 100 using the bearing set. Similarly, for stably supporting the outer shaft 202, in a more optimized scheme, the bearing set includes at least one thrust bearing, so that the thrust bearing can be used to bear axial force, such as the gravity of the inner shaft 303 and the outer shaft 202, and thus the thrust bearing can be used to more stably perform the supporting and movement separation functions; by way of example, the bearing set between the outer shaft 202 and the rack 100 includes a thrust roller bearing 501 and a rolling bearing 502, as shown in fig. 6, the thrust roller bearing 501 and the rolling bearing 502 are respectively installed at the step, which is beneficial to bearing force in the axial direction and also beneficial to stably keeping the inner shaft 303 and the outer shaft 202 in the vertical state.

The machine frame 100 has various embodiments, and preferably, the machine frame 100 comprises a supporting cylinder 101 and a flange 103 connected to the supporting cylinder 101, as shown in fig. 1-3, the flange 103 is configured with a plurality of mounting holes 104, so as to realize detachable mounting and fixing of the rotating tool by using fasteners such as bolt pairs.

In this embodiment, the first driving module includes a first transmission mechanism and a first motor 304, the first motor 304 is in transmission connection with the first transmission mechanism, and the first transmission mechanism is in transmission connection with the inner shaft 303 or the outer shaft 202 so as to drive the rotating bracket 300 to rotate through the inner shaft 303 or the outer shaft 202; the first motor 304 may preferably adopt a stepping motor or a servo motor, the first transmission mechanism has various embodiments, and preferably, the first transmission mechanism may adopt one or a combination of a gear transmission mechanism, a belt transmission mechanism, a chain transmission mechanism or a worm and gear transmission mechanism, and the gear transmission mechanism, the belt transmission mechanism, the chain transmission mechanism and the worm and gear transmission mechanism are all commonly used transmission mechanisms, so that the cost is low, the principle is simple, the assembly is convenient, and the later-stage disassembly and maintenance are very convenient. For example, in this embodiment, the first transmission mechanism is a gear transmission mechanism, as shown in fig. 1 to fig. 3, the gear transmission mechanism includes a transmission shaft, a driving gear 206 disposed on the transmission shaft, and a driven gear 207 disposed on the inner shaft 303, an output shaft of the first motor 304 is connected to the transmission shaft, the driving gear 206 is engaged with the driven gear 207, so that the first motor 304 can be used to drive the inner shaft 303 to rotate, thereby driving the rotating bracket 300 to rotate.

Similarly, the second driving module comprises a second transmission mechanism and a second motor 204, the second motor 204 is in transmission connection with the second transmission mechanism, and the second transmission mechanism is in transmission connection with the outer shaft 202 or the inner shaft 303 so as to drive the revolving component 200 to rotate through the outer shaft 202 or the inner shaft 303, it can be understood that when the first driving mechanism is in transmission connection with the inner shaft 303, the second driving mechanism is in transmission connection with the outer shaft 202; when the first drive mechanism is drivingly connected to the outer shaft 202, the second drive mechanism is drivingly connected to the inner shaft 303.

Similarly, the second motor 204 may preferably be a stepper motor or a servo motor, and the second transmission may be one or more of a gear transmission, a belt transmission, a chain transmission, or a worm and gear transmission. For example, in this embodiment, the second transmission mechanism is a gear transmission mechanism, as shown in fig. 1 to fig. 3, the gear transmission mechanism includes a transmission shaft, a driving gear 206 disposed on the transmission shaft, and a driven gear 207 disposed on the inner shaft 303, an output shaft of the second motor 204 is connected to the transmission shaft, and the driving gear 206 is engaged with the driven gear 207, so that the second motor 204 can be used to drive the outer shaft 202 to rotate, thereby driving the rotary member 200 to rotate.

In order to solve the problems of reduced gear meshing precision and reduced gear service life caused by the film plating process during sputter film plating, in a further aspect, the rotating bracket 300 includes a horizontally disposed rotating turntable 301, as shown in fig. 1-6, the rotating turntable 301 may preferably be a plate-shaped structure, the rotating turntable 301 may be connected to an inner shaft 303 and located above the rotating component 200, as shown in fig. 1-3, the rotating turntable 301 may also be connected to an outer shaft 202 and located below the rotating component 200;

in this embodiment, the coating turntable 400 is further configured with a mounting portion for arranging the jig 701 and/or the component 702, so that the jig 701 and/or the component 702 to be coated are constrained by the mounting portion; each coating turntable 400 is rotatably mounted on the rotary turntable 301, and the mounting portion of the coating turntable 400 and the teeth of the coating turntable 400 are located on different sides of the rotary turntable 301, as shown in fig. 1-3 and 6, that is, when the coating turntable 400 is mounted on the rotary turntable 301 and the teeth of the coating turntable 400 are located below the rotary turntable 301, the mounting portion of the coating turntable 400 is located above the rotary turntable 301, or the mounting portion of the coating turntable 400 is located below the rotary turntable 301 and the sputtering cathode 600 is generally mounted at a position adapted to the mounting portion and located on the upper side or the lower side of the rotary turntable 301, so that the rotary turntable 301 can function as an isolation protection gear during coating, so that targets are not easily sputtered onto the teeth on the other side of the rotary turntable 301, the problem of reduction of the meshing precision of the gear caused by a film coating process can be effectively avoided, and the service life of the gear can be prolonged.

In implementation, the coating turntable 400 can be connected with the rotating turntable 301 through a bearing, so that the coating turntable 400 can rotate more smoothly; in order to facilitate the installation of the bearing, the rotating turntable 301 is configured with a plurality of assembling holes 302, as shown in fig. 5 and 7, each assembling hole may be uniformly distributed along the circumferential direction of the rotation center of the rotating turntable 301, bearing seats 503 are respectively arranged in the assembling holes 302, each coating turntable 400 may be respectively connected with the bearing seats 503 through the bearing, and may be locked by nuts 402 and thrust washers 403, as shown in fig. 5 and 7.

The structure of the coating turntable 400 may be determined according to actual requirements, for example, as shown in fig. 5-7, in this embodiment, the coating turntable 400 is a revolving body structure, the mounting portion may be a restriction hole 401 configured at the upper end or the lower end of the coating turntable 400, as shown in fig. 5-7, so as to mount a jig 701 or an element 702 by using the restriction hole 401, in implementation, the restriction hole 401 may penetrate through the upper and lower ends of the coating turntable 400, or may not penetrate through the coating turntable 400, and only a groove is formed on the coating turntable 400; of course, the mounting portion may be in other embodiments, for example, a snap structure, a locking mechanism, an external thread, an internal thread, etc. configured on the coating turntable 400 may be further used, and the fixture 701 and/or the workpiece 702 may be required to be restrained or fixed. The teeth of the filming rotary table 400 may be integrated with the filming rotary table 400 as shown in fig. 2, 3 and 7.

To facilitate sealing to maintain the vacuum degree of the vacuum chamber, in a more sophisticated scheme, the first motor 304 and the second motor 204 in the rotary tool may be disposed outside the vacuum chamber 800 as shown in fig. 8 and 9, while other components in the rotary tool may be disposed inside the vacuum chamber 800, for example, as shown in fig. 8 and 9, a bottom of the vacuum chamber 800 may be configured with a mounting passage, the first motor 304 and the second motor 204 may be respectively mounted outside the vacuum chamber 800, and the transmission shaft may extend into the vacuum chamber 800 through the mounting passage, and a flange and a sealing structure may be provided at the mounting passage to close the mounting passage. The flange may preferably be a magnetic fluid flange 904 for better vacuum sealing effect, and the sealing structure includes, but is not limited to, a sealing ring, a sealing gasket, a dynamic sealing structure, etc., which are not illustrated herein.

In a more complete scheme, the coating system further comprises a controller, wherein the controller can be electrically connected with the sputtering power supply so as to control the starting/closing of the sputtering power supply and achieve the purpose of controlling whether power is supplied to the sputtering cathode 600; meanwhile, the controller can also be electrically connected with the vacuum pump so as to achieve the purpose of controlling the vacuum degree of the vacuum chamber 800 by controlling the vacuum pump; in addition, the controller is electrically connected to the first driving module and the second driving module respectively (for example, the controller may be electrically connected to the first motor 304 and the second motor 204 respectively) for controlling the rotation speeds of the rotating bracket 300 and the rotating member 200 respectively, so that the coating system can accurately operate under the control of the controller: for example, in a first mode of operation: the second driving module can be turned off and the first driving module can be turned on by the controller, and the first driving module is utilized to drive the rotating bracket 300 to rotate relative to the rotating part 200, so that the coating turntable 400 rotates at a high speed while revolving around the rotating center of the rotating part 200, and coating can be performed by matching with the sputtering cathode 600.

In a second mode of operation: the controller can start the first driving module first to rotate the required coating turntable 400 from the initial position to the target position adapted to the sputtering cathode 600 by using the first driving module, and then the controller can close the first driving module and start the second driving module to drive the coating turntable 400 to rotate at a high speed at the target position by using the second driving module so as to cooperate with the sputtering cathode 600 at the position to perform independent coating.

In implementation, the controller may preferably adopt a PC, a PLC, a single chip, an embedded chip, or the like.

In a more sophisticated version, the vacuum chamber is also configured with sputtering gas inlets or the like, which are not illustrated here.

Example 2

In order to better achieve the sealing effect of the vacuum chamber and maintain the vacuum degree of the vacuum chamber, the main difference between this embodiment 2 and the above embodiment 1 is that, in the planetary coating system provided in this embodiment, the first driving module further includes a first magnetic fluid sealing structure 901, the vacuum chamber 800 is configured with a first installation channel 801, the first installation channel 801 is communicated with the inside of the vacuum chamber 800, the first magnetic fluid sealing structure 901 is fixed to the vacuum chamber 800 and seals the first installation channel 801, so as to achieve the purpose of sealing the vacuum chamber 800 by using the first magnetic fluid sealing structure 901, and one end of the first magnetic fluid sealing structure 901 extends out of the vacuum chamber 800 and is in transmission connection with a first motor; the other end extends into the vacuum chamber 800 and is connected with the first transmission mechanism in a transmission way, so that the transmission is convenient, the better sealing effect can be realized, and the vacuum degree of the vacuum chamber can be maintained.

As an example, as shown in fig. 1, fig. 2 and fig. 10, the first magnetic fluid sealing structure 901 includes a magnetic fluid sealing member 903 and a magnetic fluid flange 904, where the magnetic fluid flange 904 may be connected to the vacuum chamber 800 by a fastener such as a bolt, and closes the first installation channel 801, and a sealing member 906 such as a sealing ring is disposed between the magnetic fluid flange 904 and a side wall of the vacuum chamber 800 for sealing. The magnetic fluid sealing element 903 is rotatably connected to the magnetic fluid flange 904, and a sealing component 906 such as a sealing ring is arranged between the magnetic fluid sealing element 903 and the magnetic fluid flange 904, so that a better sealing effect is achieved. One end (e.g., the upper end) of the magnetic fluid seal 903 extends into the vacuum chamber 800 through the magnetic fluid flange 904 and is in transmission connection with a first transmission mechanism, for example, the first transmission mechanism includes a driving gear 206 and a driven gear 207, the driving gear 206 is connected to the upper end of the magnetic fluid seal 903 through an expansion sleeve 905, and the driving gear 206 may be connected to the rack 100, the vacuum chamber 800 or a bearing seat (the bearing seat may be fixed to the rack 100, the vacuum chamber 800 or the magnetic fluid flange 904, as shown in fig. 10) through a bearing, so that the driving gear 206 may be driven to rotate by the rotation of the magnetic fluid seal 903. The other end (e.g., lower end) of the magnetic fluid sealing element 903 is located outside the vacuum chamber 800, as shown in fig. 1, 2 and 10, the first motor 304 is fixed to the vacuum chamber 800, for example, as shown in fig. 10, the first motor 304 may be fixed to the magnetic fluid flange 904 through a connecting frame 908, and an output shaft of the first motor 304 is in transmission connection with the magnetic fluid sealing element 903, for example, as shown in fig. 10, the output shaft of the first motor 304 may be connected to the lower end of the magnetic fluid sealing element 903 through a coupling 907, so that the magnetic fluid sealing element 903 is driven to rotate by the first motor 304.

Similarly, the second driving module further includes a second magnetic fluid sealing structure 902, as shown in fig. 1, fig. 2 and fig. 10, the vacuum chamber 800 is configured with a second installation channel 802, the second installation channel 802 is communicated with the inside of the vacuum chamber 800, the second magnetic fluid sealing structure 902 is fixed to the vacuum chamber 800 and seals the second installation channel 802, so as to achieve the purpose of sealing the vacuum chamber 800 by using the second magnetic fluid sealing structure 902, and one end of the second magnetic fluid sealing structure 902 extends out of the vacuum chamber 800 and is in transmission connection with the second motor; the other end extends into the vacuum chamber 800 and is connected with the second transmission mechanism in a transmission way, so that the transmission is convenient, the better sealing effect can be realized, and the vacuum degree of the vacuum chamber can be maintained. As an example, as shown in fig. 10, the second magnetic fluid sealing structure 902 includes a magnetic fluid sealing member 903 and a magnetic fluid flange 904, wherein the magnetic fluid flange 904 may be connected to the vacuum chamber 800 by a fastener such as a bolt, and seals the second mounting channel 802, and a sealing member 906 such as a sealing ring is disposed between the magnetic fluid flange 904 and a side wall of the vacuum chamber 800 so as to seal. The magnetic fluid sealing element 903 is rotatably connected to the magnetic fluid flange 904, and a sealing component 906 such as a sealing ring is arranged between the magnetic fluid sealing element 903 and the magnetic fluid flange 904, so that a better sealing effect is realized. One end (e.g., the upper end) of the magnetic fluid seal 903 extends into the vacuum chamber 800 through the magnetic fluid flange 904 and is in transmission connection with a second transmission mechanism, for example, the second transmission mechanism includes a driving gear 206 and a driven gear 207, the driving gear 206 is connected to the upper end of the magnetic fluid seal 903 through an expansion sleeve 905, the driving gear 206 may be connected to the rack 100, the vacuum chamber 800 or a bearing seat (the bearing seat may be fixed to the rack 100, the vacuum chamber 800 or the magnetic fluid flange 904, as shown in fig. 10) through a bearing, so that the driving gear 206 may be driven to rotate by the rotation of the magnetic fluid seal 903. The other end (e.g., lower end) of the magnetic fluid sealing element 903 is located outside the vacuum chamber 800, as shown in fig. 10, a second motor is fixed to the vacuum chamber 800, for example, as shown in fig. 10, the second motor may be fixed to the magnetic fluid flange 904 through a connecting frame 908, and an output shaft of the second motor is in transmission connection with the magnetic fluid sealing element 903, for example, as shown in fig. 10, the output shaft of the second motor may be connected with the lower end of the magnetic fluid sealing element 903 through a coupling 907, so that the magnetic fluid sealing element 903 is driven to rotate by the second motor.

The sealing structure is convenient for transmission and accurate control, can realize better sealing effect and is more beneficial to maintaining the vacuum degree of the vacuum chamber.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention.

Claims

1. A planetary film coating system comprises a vacuum chamber and a rotating tool arranged in the vacuum chamber, and is characterized in that the rotating tool comprises a frame fixed on the vacuum chamber, a rotating bracket, a rotating part rotatably arranged on the frame, a first driving module, a plurality of film coating turntables used for supporting jigs and/or elements, and a second driving module, wherein,

each coating rotary table is respectively rotatably connected to the rotary support and distributed along the circumferential direction of the rotation center of the rotary part, and each coating rotary table is respectively matched with the rotary part and is respectively in transmission connection with the rotary part;

the rotating bracket is rotatably connected to the rack, and the rotating center of the rotating bracket is superposed with the rotating center of the rotating part;

the first driving module is in transmission connection with the rotating support and is used for driving each film coating rotary table to synchronously revolve around the rotation center of the rotating part and synchronously driving each film coating rotary table to rotate;

and the second driving module is in transmission connection with the rotary part and is used for driving each coating rotary table to rotate.

2. The planetary coating system of claim 1, wherein the rotary member and the coating turret are configured with a plurality of teeth adapted to each other, and each coating turret is driven by the rotary member through engagement of the teeth with the teeth.

3. The planetary coating system according to claim 2, wherein the rotary part adopts an internal gear or an external gear, and the coating turntable is configured with an external gear adapted to the rotary part;

and/or the frame comprises a support cylinder and a flange connected to the support cylinder, and the flange is provided with a plurality of mounting holes.

4. The planetary plating system of claim 2, further comprising an inner shaft rotatably mounted and an outer shaft rotatably mounted on the frame, wherein the outer shaft is configured with a central hole penetrating through two ends, the outer shaft is sleeved outside the inner shaft through the central hole, and the rotation center of the inner shaft is coincident with the rotation center of the outer shaft;

the rotating bracket is connected with the inner shaft, the inner shaft is in transmission connection with the first driving module, the rotating part is connected with the outer shaft, and the outer shaft is in transmission connection with the second driving module; or, the rotating bracket is connected with the outer shaft, the outer shaft is in transmission connection with the first driving module, the revolving part is connected with the inner shaft, and the inner shaft is in transmission connection with the second driving module.

5. The planetary coating system of claim 4, wherein the inner shaft is connected to the outer shaft by a bearing set, the outer shaft is connected to the frame by a bearing set, and the bearing set comprises at least two bearings.

6. The planetary plating system of claim 5, wherein the inner shaft is a stepped shaft, the central bore of the outer shaft is configured to fit into the stepped bore of the inner shaft, and the inner shaft is connected to the stepped bore of the outer shaft by a bearing set;

and/or the outer shaft is configured as a stepped shaft, the frame is configured with a stepped hole matched with the outer shaft, and the outer shaft is connected to the stepped hole of the frame through a bearing set;

and/or, the bearing set includes at least one thrust bearing.

7. The planetary coating system of any one of claims 4 to 6, wherein the first driving module comprises a first transmission mechanism and a first motor, the first motor is in transmission connection with the first transmission mechanism, and the first transmission mechanism is in transmission connection with the inner shaft or the outer shaft;

8. The planetary coating system of claim 7, wherein the first transmission mechanism is one or more of a gear transmission mechanism, a belt transmission mechanism, a chain transmission mechanism, or a worm and gear transmission mechanism;

9. The planetary coating system of any one of claims 4 to 6, wherein the rotating holder comprises a horizontally disposed rotating turntable, the rotating turntable being connected to the inner shaft or the outer shaft and located above or below the rotating member;

the coating rotary table is further provided with installation parts for arranging jigs and/or elements, each coating rotary table is rotatably arranged on the rotary turntable, and the installation parts constructed on the coating rotary table and the teeth constructed on the coating rotary table are respectively positioned on different sides of the rotary turntable.

10. The planetary coating system according to any one of claims 1 to 6, further comprising a sputtering cathode disposed in the vacuum chamber at a position adapted to the coating turntable, and having an effective coating area covering a partial area of the revolving orbit of the coating turntable;

and/or the controller is electrically connected with the first driving module and the second driving module respectively.