CN218089779U

CN218089779U - Reciprocating translation workpiece rack of vacuum coating machine

Info

Publication number: CN218089779U
Application number: CN202222127844.5U
Authority: CN
Inventors: 吕明; 吴子敬; 刘旭; 金晨
Original assignee: Beijng Naura Vacuum Technology Co Ltd
Current assignee: Beijng Naura Vacuum Technology Co Ltd
Priority date: 2022-08-13
Filing date: 2022-08-13
Publication date: 2022-12-20
Anticipated expiration: 2032-08-13

Abstract

The utility model belongs to the technical field of coating film auxiliary frame and specifically relates to a reciprocal translation work rest of vacuum coating machine is related to, include: the mounting frame is used for being mounted in a vacuum chamber of the vacuum coating machine; the planetary gear train is mounted on the mounting frame; the driving mechanism is used for driving the planetary gear of the planetary gear train to rotate or revolve; and the translation mechanism is arranged on the mounting rack and comprises a follow-up plate for driving the plated workpiece to reciprocate and a transmission assembly connected between the follow-up plate and any planetary gear on the planetary gear train, and the transmission assembly drives the follow-up plate to reciprocate through the self-transmission of the planetary gear. The method and the device have the advantages that the detection cost during detection of the plated workpiece can be reduced, and the effect of complexity during detection is reduced.

Description

Reciprocating translation workpiece rack of vacuum coating machine

Technical Field

The application relates to the field of coating auxiliary frames, in particular to a reciprocating translation workpiece frame of a vacuum coating machine.

Background

At present, when a workpiece is coated, a single coating machine (also called a vacuum coating machine) is mainly adopted for coating, the single coating machine mainly comprises a circular vacuum chamber, during coating, a target is directly installed on the inner wall of the circular vacuum chamber, then a workpiece frame is installed in the vacuum chamber, the workpiece is placed on the workpiece frame, and therefore the workpiece is coated through the target.

In order to ensure the uniformity of coating, the conventional workpiece carrier mainly comprises a fixed disk arranged at the bottom of a vacuum chamber and a planetary gear train arranged on the fixed disk, wherein the fixed disk is arranged at the center of the bottom of the vacuum chamber, a workpiece to be coated is arranged on a planetary gear of the planetary gear train, and the planetary gear train drives the coated workpiece to revolve or rotate so as to realize uniform coating on the workpiece.

However, this method is mainly suitable for the small-sized workpiece with double-sided coating, and for the large-sized plate workpiece with single-sided coating, the coating operation is often required under the condition of constant target base distance. Therefore, for large-size plate workpieces with single-side film coating, the film coating mode of a continuous film coating line is mainly adopted at present, the film coating quality is ensured, and the film coating efficiency is improved. The continuous coating line comprises a plurality of chambers which are connected together in sequence, and different targets are arranged in each chamber to coat different films on the coated workpiece. The plurality of cavities are communicated through the transmission line, the plated workpiece sequentially passes through each cavity through the transmission line, and multilayer film plating is realized on the plated workpiece through the plurality of cavities.

Before coating or when replacing target, the static deposition rate and the dynamic deposition rate of the workpiece to be coated, the temperature accumulation of the coating and the bonding force of the formed film are counted, so as to obtain the coating time of the workpiece to be coated at each target, and control the coating quality. Because the length of the continuous coating line generally reaches dozens of meters or dozens of meters, when the coating parameters of the coated workpiece need to be detected on the continuous coating line, the whole production line needs to be shut down, then the coated workpiece is taken out to detect the parameters of the coated workpiece, the whole production line is started and stopped circularly, and the detection cost is higher; and the plated workpieces are required to be taken out at different positions along with the sequential film plating of the plated workpieces in different chambers, so the operation is very inconvenient.

SUMMERY OF THE UTILITY MODEL

In order to reduce the detection cost when detecting the plated workpiece and reduce the complexity during detection, the application provides a reciprocating translation workpiece rest of a vacuum coating machine.

The application provides a reciprocating translation work rest of vacuum coating machine adopts following technical scheme:

a reciprocating translation workpiece rack of a vacuum coating machine comprises:

the mounting frame is used for being mounted in a vacuum chamber of the single film plating machine;

the planetary gear train is mounted on the mounting frame;

the driving mechanism is used for driving the planetary gear of the planetary gear train to rotate or revolve;

and the translation mechanism is arranged on the mounting rack and comprises a follow-up plate for driving the plated workpiece to reciprocate and a transmission assembly connected between the follow-up plate and any planetary gear on the planetary gear train, and the transmission assembly drives the follow-up plate to reciprocate through the rotation of the planetary gear.

By adopting the technical scheme, when the parameters of the plated workpiece are required to be detected, the translation mechanism is directly installed in the single film plating machine, then the plated workpiece is installed on the follow-up plate, and the planetary gear is driven to rotate through the driving mechanism. When the planetary gear rotates, the planetary gear drives the follow-up plate to reciprocate through the transmission assembly, and the follow-up plate drives the plated workpiece to move linearly so as to simulate the film plating working condition of the workpiece on a continuous film plating line. In the coating process, the working personnel can stop the single coating machine at any time according to the needs, and the coated workpiece can be directly taken out from the single coating machine, so that the influence on other coated workpieces is avoided. Different types of target materials can be arranged on the peripheral inner walls of the single film plating machine, so that after a film is plated on a plated workpiece, the planetary gear can be driven to revolve through the driving mechanism to change the position of the plated workpiece, and the plated workpiece is transferred to another target material. Then the driving mechanism drives the planetary gear to rotate so as to coat the plated workpiece through another target. The translation mechanism is arranged in the existing single film plating machine, so that the film plating of the plated workpiece can be realized, the film plating requirement of a continuous film plating line can be simulated, and the target base distance between the plated workpiece and the target is kept constant. The detection cost of the plated workpiece during detection is greatly reduced, and the detection complexity is reduced.

Optionally, the transmission assembly includes a mounting base mounted on the mounting bracket, an incomplete gear rotatably connected to the mounting base, and two racks slidably connected to the mounting base, the follower plate is simultaneously and fixedly connected to the two racks, teeth of the two racks are oppositely disposed, the incomplete gear is coaxially and fixedly connected to any planetary gear on the planetary gear train and is located between the two racks, and when the incomplete gear rotates, the incomplete gear is sequentially engaged with the two racks to drive the racks to reciprocate.

By adopting the technical scheme, when the driving mechanism drives the planetary gear to rotate, the planetary gear connected with the incomplete gear also drives the incomplete gear to rotate, and when the incomplete gear is meshed with one of the racks, the incomplete gear drives the rack to move towards one end along the length direction of the rack; when the incomplete gear is meshed with the other rack, the teeth of the two racks are oppositely arranged to drive the other rack to move in the opposite direction, so that the rack is driven to reciprocate.

Optionally, two support rails are fixedly connected to the mounting seat, and the two racks are respectively slidably connected in the two support rails.

Through adopting above-mentioned technical scheme, the support track can play the effect of direction to the rack.

Optionally, the mounting bracket is connected including being used for fixing fixed disk, rotation in the vacuum chamber main shaft and rotation on the fixed disk are connected epaxial frock dish, translation mechanism installs on the frock dish, planetary gear train's sun gear rigid coupling is in on the main shaft, planetary gear train's planetary gear rotates and connects on the frock dish.

By adopting the technical scheme, when the automatic film coating machine is used, the fixed disc is directly arranged at the bottom of the single film coating machine, and when the driving device drives the main shaft to rotate, the central gear is driven to rotate so as to drive the planetary gear meshed with the central gear to rotate, so that the autorotation of the planetary gear is realized; when the driving mechanism drives the central shaft and the tool disc to rotate simultaneously, the revolution of the planetary gear is realized. When the device is used, the driving mechanism can be operated to drive appropriate components to rotate according to requirements.

Optionally, the driving mechanism includes a servo motor and a reversing transmission assembly connected between the servo motor and the main shaft, and the reversing transmission assembly is configured to transmit power of the servo motor to the mounting frame to drive the planetary gear to rotate or revolve.

By adopting the technical scheme, the servo motor can provide rotating power for the planetary gear train, and the force transmitted to the planetary gear train by the servo motor can be changed through the reversing transmission assembly so as to realize the rotation or revolution of the planetary gear.

Optionally, the reversing transmission assembly includes a telescopic rod which rotates synchronously with an output shaft of the servo motor, a first driving gear and a second driving gear are fixedly connected to the telescopic rod at intervals along the axis direction of the telescopic rod, a first driven gear is fixedly connected to the spindle, and a second driven gear which rotates synchronously with the tooling plate is sleeved on the spindle; the telescopic rod is provided with at least two telescopic states to correspond to the rotation and the revolution of the planetary gear, when the telescopic rod is in a first state, the first driven gear is meshed with the first driving gear, and the second driven gear is meshed with the second driving gear; when the telescopic rod is in a second state, the second driven gear is disengaged from the second driving gear, and the first driven gear is changed from being engaged with the first driving gear to being engaged with the second driving gear.

By adopting the technical scheme, when the operation telescopic link is in the first state, the servo motor drives the first driving gear and the second driving gear to rotate simultaneously through the telescopic link, and the first driving gear and the second driving gear drive the central shaft and the tooling plate to rotate simultaneously through the first driven gear and the second driven gear so as to drive the central gear and the planetary gear to rotate simultaneously, thereby realizing the revolution of the planetary gear. When the telescopic link was in the second state, servo motor would drive first driving gear and second driving gear simultaneously and rotate, and first driving gear would drive first driven gear and rotate to drive planetary gear through the frock dish and rotate, realize planetary gear's rotation.

Optionally, the telescopic rod includes a sliding sleeve rotating synchronously with the output shaft of the servo motor and a sliding shaft connected in the sliding sleeve in a sliding manner, a positioning pin penetrates through the side wall of the sliding sleeve, at least two positioning holes for the positioning pin to pass through are formed in the sliding shaft, and at least two telescopic states of the telescopic rod are states when the positioning pin is respectively matched with at least two positioning holes.

By adopting the technical scheme, the state of the telescopic rod can be changed by matching the operation positioning pin with the at least two positioning holes, so that the planetary gear is driven to rotate or revolve.

Optionally, a driving belt wheel is fixedly connected to the output shaft of the servo motor, a driven belt wheel is fixedly connected to the sliding sleeve, and a transmission belt is sleeved between the driving belt wheel and the driven belt wheel.

Through adopting above-mentioned technical scheme, servo motor passes through the transmission belt and drives driven pulleys and rotate to drive the sliding sleeve and rotate, realize the transmission of power.

Optionally, a connecting cylinder is sleeved on the main shaft, and the tool disc and the second driven gear are fixedly connected with the connecting cylinder.

Through adopting above-mentioned technical scheme, the frock dish links together through the connecting cylinder with the second driven gear, realizes the synchronous rotation of second driven gear and frock dish.

Optionally, the fixed disc is detachably connected with a positioning bolt, and the positioning bolt is in threaded connection with the tool disc.

By adopting the technical scheme, when the planetary gear rotates, the fixing disc and the tool disc can be fixedly connected through the positioning bolt, so that the tool disc can synchronously rotate along with the central gear in the process that the central gear drives the planetary gear to rotate.

In summary, the present application includes at least one of the following beneficial technical effects:

1. according to the method, the planetary gear train and the translation mechanism are installed in the single film plating machine, so that the planetary gear of the planetary gear train can be driven to rotate through the driving mechanism, the plated workpiece is driven to slide in a reciprocating manner through the translation mechanism, the target installed in the single film plating machine is used for plating the film on the plated workpiece, in the reciprocating sliding process of the plated workpiece, the target base distances of all parts of the plated workpiece from the target are the same, the working condition of the plated workpiece on a continuous film plating line is simulated, a worker directly stops the single film plating machine at a specific time according to needs, the plated workpiece is taken out to detect and record the film plating parameters of the plated workpiece, the whole continuous film plating line is not required to be stopped, the detection cost of the plated workpiece during detection is greatly reduced, and the complexity of the detection is reduced;

2. the translation mechanism can be arranged in any single film plating machine, when the planetary gear of the planetary gear train in the single film plating machine rotates, the transmission assembly drives the follow-up plate to reciprocate, and the rotation of the planetary gear is converted into the linear motion of a plated workpiece;

3. this application has two at least flexible states through setting up the telescopic link for can be in different states in order to change planetary gear and be rotation or revolution through adjusting the telescopic link.

Drawings

FIG. 1 is a schematic view of a structure of a workpiece to be plated installed in a single plating machine.

FIG. 2 is a schematic view showing the change of the target base distances at various positions on the plated workpiece when the plated workpiece rotates with the planetary gear.

FIG. 3 is a schematic view of a vacuum coater mounted in a single coater for reciprocating translation of a workpiece holder embodying the present invention.

FIG. 4 is a schematic view of the whole structure of the workpiece holder for reciprocating translation of the vacuum coater of the present application.

FIG. 5 is a schematic diagram of the follower plate hidden to show the installation relationship between the translation mechanism and the planetary gear train.

Fig. 6 is a front view, partly in section, showing the connection of the drive mechanism, the mount, and the planetary gears.

Description of reference numerals: 1. a mounting frame; 11. fixing the disc; 12. a main shaft; 121. a first driven gear; 13. a tooling plate; 131. a second driven gear; 132. a connecting cylinder; 14. positioning the bolt; 2. a planetary gear train; 21. a planetary gear; 22. a sun gear; 3. a drive mechanism; 31. a servo motor; 32. a reversing transmission assembly; 321. a sliding sleeve; 322. a sliding shaft; 323. A first drive gear; 324. a second driving gear; 325. positioning pins; 326. positioning holes; 3261. a first positioning hole; 3262. A second positioning hole; 3263. a third positioning hole; 33. a driving pulley; 34. a driven pulley; 35. a transfer belt; 4. a translation mechanism; 41. a follower plate; 42. a transmission assembly; 421. a mounting seat; 4211. mounting a plate; 4212. a support leg; 422. an incomplete gear; 423. a rack; 424. a support rail; 5. a support; 51. a strut; 52. connecting the disc; 53. a guide wheel.

Detailed Description

The present application is described in further detail below with reference to figures 1-6.

Referring to fig. 1 and 2, a schematic top view of the workpiece to be plated installed in the single body coater is shown, and when the workpiece to be plated is installed on the planet gear 21 of the planet gear train 2 in the single body coater, the distance between the workpiece to be plated and the target is called the base distance D. When the workpiece is mounted on the planetary gear 21, the center point of the workpiece coincides with the axis of the planetary gear 21; when the planetary gear 21 drives the plated workpiece to rotate, the plated workpiece rotates around the axis of the rotation of the planetary gear 21, at the moment, the target base distance D of the central point of the plated workpiece is unchanged, and the target base distances D of the other points are changed continuously. The change of the target base distance D causes the poor uniformity of the film thickness of different points of the plated workpiece, and the bonding force between the film plated on the plated workpiece and the substrate is also poor during subsequent use. When the workpiece to be plated is a large-size plate part, the uniformity of the film thickness on a single workpiece to be plated is worse.

The embodiment of the application discloses a reciprocating translation workpiece rack of a vacuum coating machine, which can be arranged in the existing single coating machine. Referring to fig. 3, the reciprocating translation workpiece holder of the vacuum coater comprises a mounting frame 1 installed in a vacuum chamber of the single coater, a planetary gear train 2 installed on the mounting frame 1, a driving mechanism 3 for driving a planetary gear 21 of the planetary gear train 2 to rotate or revolve, and a translation mechanism 4 installed on the mounting frame 1.

Referring to fig. 3 and 4, the translation mechanism 4 includes a follower plate 41 for driving the plated workpiece to reciprocate and a transmission assembly 42 connected between the follower plate 41 and any one of the planetary gears 21 on the planetary gear train 2, and the transmission assembly 42 can drive the follower plate 41 to reciprocate by the rotation of the planetary gears 21 so as to simulate the linear motion of the plated workpiece on the continuous plating line.

Referring to fig. 4 and 5, the driving assembly 42 includes a mounting seat 421 mounted on the mounting frame 1, a partial gear 422 rotatably coupled to the mounting seat 421, and two racks 423 slidably coupled to the mounting seat 421, and the follower plate 41 is simultaneously fixed to the two racks 423. The mounting seat 421 is mounted on one of the planetary gears 21, and includes a mounting plate 4211 and a leg 4212 fixedly connected to one side of the mounting plate 4211, and one end of the leg 4212 away from the mounting plate 4211 can be detachably connected to the mounting frame 1 by a bolt or the like. The rotational shaft of the planetary gear 21 is fixed to the partial gear 422 through the mounting plate 4211, so that the partial gear 422 is coaxially fixed to the planetary gear 21. When the planetary gear 21 rotates, the incomplete gear 422 is also rotated. The two racks 423 are respectively located on two opposite sides of the incomplete gear 422, and the teeth are arranged oppositely, so that when the incomplete gear 422 is driven by the planet gear 21 to rotate, the incomplete gear 422 is respectively meshed with the two racks 423. Wherein the length of the teeth on the incomplete gear 422 is 1/4 of the circumferential length of the incomplete gear 422, so that the incomplete gear 422 does not mesh with the two racks 423 simultaneously during the rotation. Because the teeth of the two racks 423 are arranged oppositely, when the incomplete gear 422 rotates until the teeth are meshed with one rack 423, the rack 423 drives the follow-up plate 41 to move in one direction; when the incomplete gear 422 rotates to the state that the teeth are meshed with the other rack 423, the other rack 423 drives the follow-up plate 41 to move in the opposite direction, and the incomplete gear 422 continuously rotates to drive the follow-up plate 41 to reciprocate so as to drive the plated workpiece arranged on the follow-up plate 41 to reciprocate.

Two parallel supporting rails 424 are fixedly connected to the mounting plate 4211, the two racks 423 are respectively connected to the two supporting rails 424 in a sliding manner, and the two supporting rails 424 can guide the sliding of the two racks 423.

When the device is used, the mounting seat 421 is directly mounted on the mounting frame 1, and only one side surface of the supporting track 424 is parallel to the surface of the target, and at the moment, the plated workpiece can be driven to slide along the plane parallel to the target by the rotation of the planetary gear 21, so that the target base distances of all the plated workpieces are the same in the reciprocating movement process of the plated workpiece.

Of course, in another example of the present application, the incomplete gear 422 and the rack 423 may be replaced by a cam fixed coaxially with the planetary gear and a spring fixed between the mounting seat 421 and the follower plate 41, the cam being located on a side of the follower plate away from the spring. When the cam rotates to the long diameter and is abutted with the follow-up plate 41, the cam can abut against the follow-up plate 41 and slide towards the direction of the spring; when the cam rotates to the short diameter and abuts against the follower plate 41, the follower plate 41 can be pushed to move towards the direction of the cam under the action of the spring, and the follower plate 41 is driven to reciprocate.

It can be understood that one or more translation mechanisms 4 may be provided, and the plurality of translation mechanisms 4 correspond to the plurality of planetary gears 21 one to one, so that the plurality of plated workpieces can be simultaneously subjected to film coating detection, and the detection effect is better.

Referring to fig. 5 and 6, the mounting block 1 includes a horizontally disposed fixed plate 11 for being fixed in the vacuum chamber, a spindle 12 rotatably coupled to the center of the fixed plate 11, and a tool plate 13 rotatably coupled to the spindle 12. The main shaft 12 is vertically arranged, and the tool disc 13 is positioned on the upper side of the mounting disc. The sun gear 22 of the planetary gear train 2 is fixedly connected to the upper end of the main shaft 12, the planetary gears 21 of the planetary gear train 2 are rotatably connected to the tool plate 13, and a plurality of planetary gears 21 are arranged around the axis of the main shaft 12 at intervals, which is described in the present application by taking four planetary gears 21 as an example.

The driving mechanism 3 comprises a servo motor 31 and a reversing transmission assembly 32 connected between the servo motor 31 and the main shaft 12, wherein the reversing transmission assembly 32 is used for transmitting the power of the servo motor 31 to the mounting frame 1 to drive the planetary gear 21 to rotate or revolve.

Referring to fig. 6, the reversing transmission assembly 32 includes an expansion link coaxially fixed to the servo motor 31, the expansion link includes a sliding sleeve 321 rotating synchronously with the output shaft of the servo motor 31 and a sliding shaft 322 slidably connected in the sliding sleeve 321, a first driving gear 323 and a second driving gear 324 are fixedly connected to the sliding shaft 322 along the axial direction thereof at intervals, and the first driving gear 323 is located on one side of the second driving gear 324 close to the servo motor 31. Meanwhile, a first driven gear 121 is fixedly connected to the lower end of the main shaft 12, a second driven gear 131 which rotates synchronously with the tool disc 13 is sleeved on the main shaft 12, and the second driven gear 131 is located above the first driven gear 121. The telescopic rod has at least two telescopic states to correspond to the rotation and revolution of the planetary gear 21.

Specifically, positioning pins 325 are inserted through two opposite sides of the sliding sleeve 321, at least two positioning holes 326 are formed in the side wall of the sliding shaft 322 for the positioning pins 325 to pass through, and when the positioning pins 325 are respectively matched with the at least two positioning holes 326, at least two telescopic states of the telescopic rod are formed.

When two positioning holes 326 are formed, one positioning hole 326 away from the first driving gear 323 is called a first positioning hole 3261, and one positioning hole 326 close to the first driving gear 323 is called a second positioning hole 3262.

When the positioning pin 325 is inserted into the first positioning hole 3261 to fix the position of the sliding shaft 322 in the sliding sleeve 321, the state of the telescopic rod is referred to as a first state, and at this time, the first driven gear 121 is engaged with the first driving gear 323, and the second driven gear 131 is engaged with the second driving gear 324. When the servo motor 31 is started, the output shaft of the servo motor 31 drives the telescopic rod to rotate, so as to drive the main shaft 12 and the tooling plate 13 to rotate simultaneously through the engagement of the first driving gear 323 and the first driven gear 121 and the engagement of the second driving gear 324 and the second driven gear 131, and at this time, the revolution of the planetary gear 21 is realized.

When the positioning pin 325 is inserted into the second positioning hole 3262 to fix the position of the sliding shaft 322 in the sliding sleeve 321, the state of the telescopic rod is called as a second state, at this time, the second driven gear 131 is not engaged with the first driving gear 323 nor the second driving gear 324, the first driven gear 121 is engaged with the second driving gear 324, and the telescopic rod drives the main shaft 12 to rotate, so as to drive the central gear 22 to rotate, thereby realizing the rotation of the planetary gear 21. At this time, the tool plate 13 is fixed and does not rotate, and in order to avoid synchronous rotation of the tool plate 13 along with the main shaft 12, a positioning bolt 14 is detachably connected to the fixed plate 11, and the positioning bolt 14 can be screwed on the tool plate 13 to fix the relative position of the tool plate 13 and the fixed plate 11. When the operating tool disk 13 is required to rotate, the positioning bolt 14 is directly taken down.

Of course, it is understood that there may be three positioning holes 326 formed on the sliding shaft 322, in which case the third positioning hole 326 is referred to as a third positioning hole 3263, and the third positioning hole 3263 is located on the side of the first positioning hole 3261 away from the second positioning hole 3262. When the positioning pin 325 is inserted into the third positioning hole 3263, the first driven gear 121 is not engaged with the first driving gear 323 nor the second driving gear 324, the second driven gear 131 is engaged with the first driving gear 323, and the tool tray 13 is driven to rotate by the telescopic rod, so that the revolution and the rotation of the planetary gear 21 are realized.

It can be understood that the positions of the first driving gear 323 and the second driving gear 324 can be interchanged, and the positions of the first driven gear 121 and the second driven gear 131 can be interchanged, in this application, the second driven gear 131 is located on one side of the first driven gear 121 facing the tooling plate 13 as an example, and the main shaft 12 is sleeved with a connecting cylinder 132 for connecting the tooling plate 13 and the second driven gear 131, one end of the connecting cylinder 132 is fixedly connected with the tooling plate 13, the other end of the connecting cylinder is fixedly connected with the second driven gear 131, the inner wall of the connecting cylinder 132 is rotatably connected with the main shaft 12 through a bearing, the outer wall is rotatably connected with the fixed plate 11, and a thrust bearing can be arranged between the tooling plate 13 and the fixed plate 11, so as to ensure smooth rotation between the tooling plate 13 and the fixed plate 11.

Referring to fig. 4 and 6, wherein the output shaft of the servo motor 31 rotates synchronously with the sliding sleeve 321, specifically, the output shaft of the servo motor 31 may be directly fixedly connected to the sliding sleeve 321, certainly, the output shaft of the servo motor 31 may be connected to the sliding sleeve 321 through an intermediate transmission member, the intermediate transmission member may be a belt, a chain, or the like, and the application takes the example that the output shaft of the servo motor 31 drives the sliding sleeve 321 to rotate through the belt as an example.

A driving pulley 33 is fixedly connected to an output shaft of the servo motor 31, a driven pulley 34 is fixedly connected to the sliding sleeve 321, and a transmission belt 35 is sleeved between the driving pulley 33 and the driven pulley 34 to realize synchronous rotation of the sliding sleeve 321 and the output shaft of the servo motor 31.

Referring to fig. 4, in order to fix the position of the plated workpiece on the translation mechanism 4, a support 5 for supporting the plated workpiece is further provided on the tooling plate 13.

The support 5 includes that many spinal branchs pole 51 of rigid coupling on tool disc 13 and rigid coupling keep away from the connection pad 52 of tool disc 13 one end at pole 51, rotates in connection pad 52 towards one side of pole 51 and is connected with a plurality of leading wheels 53, and the equal vertical setting of axis of every leading wheel 53, two leading wheels 53 are for a set of being used for carrying out the centre gripping to same plated work piece, and multiunit leading wheel 53 sets up with a plurality of planetary gear 21 one-to-one. During installation, the lower end of the workpiece to be plated is directly fixed with the follow-up plate 41, and the upper end of the workpiece to be plated is embedded between the two guide wheels 53 in the same group, so that the workpiece to be plated can be clamped through the two guide wheels 53 in the same group, and the position of the workpiece to be plated can be fixed. When the planetary gear 21 rotates to reciprocate the plated workpiece by the follower plate 41, the plated workpiece also slides reciprocally between the two guide wheels 53. When the planetary gear 21 revolves to the next target, the tool disc 13 also drives the support 5 to rotate together.

The implementation principle of the reciprocating translation workpiece rack of the vacuum coating machine in the embodiment of the application is as follows: when the plated workpiece needs to be subjected to film plating detection, the target materials of the types to be plated are arranged on the inner wall of the vacuum chamber of the single film plating machine in advance, and the target materials are arranged at intervals around the center line of the hollow chamber. Then, the translation mechanism 4 is mounted on the tool tray 13 so that the axis of the incomplete gear 422 coincides with the axis of the planetary gear 21, and then the plated workpiece is mounted on the follower plate 41, with the position of the plated workpiece on the follower plate 41 being fixed by the holder 5. Through the state that changes the telescopic link for servo motor 31 drives planetary gear 21 rotation, so that make translation mechanism 4 drive plated work piece reciprocating motion, simulate the operating mode of plated work piece on continuous coating line, improve the precision when detecting plated work piece parameter. And after the coating is carried out for a certain time, operating the servo motor 31 to stop, taking out the coated workpiece, and detecting the coating parameters of the coated workpiece. After the detection is finished, the plated workpiece can be arranged in the single film plating machine for continuous film plating. When the material of the plated film needs to be changed, the state of the telescopic rod is directly changed, so that the planetary gear 21 revolves or rotates and revolves, the position of the plated workpiece can be changed, the plated workpiece rotates to the next target, and the plated workpiece is plated through the next target.

The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereto, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. The utility model provides a reciprocating translation work rest of vacuum coating machine which characterized in that includes:

the mounting rack (1) is used for being mounted in a vacuum chamber of a vacuum coating machine;

the planetary gear train (2) is mounted on the mounting frame (1);

the driving mechanism (3) is used for driving the planetary gear (21) of the planetary gear train (2) to rotate or revolve;

the translation mechanism (4) is arranged on the mounting rack (1) and comprises a follow-up plate (41) for driving the plated workpiece to reciprocate and a transmission assembly (42) connected between the follow-up plate (41) and any planetary gear (21) on the planetary gear train (2), and the transmission assembly (42) drives the follow-up plate (41) to reciprocate through the rotation of the planetary gear (21).

2. The vacuum coater reciprocating translation workpiece holder of claim 1 wherein: the transmission assembly (42) comprises a mounting seat (421) mounted on the mounting frame (1), an incomplete gear (422) rotatably connected to the mounting seat (421) and two racks (423) slidably connected to the mounting seat (421), a follow-up plate (41) is fixedly connected to the two racks (423) at the same time, teeth of the two racks (423) are arranged oppositely, the incomplete gear (422) is coaxially and fixedly connected to any planetary gear (21) on the planetary gear train (2) and is located between the two racks (423), and when the incomplete gear (422) rotates, the incomplete gear (422) is sequentially meshed with the two racks (423) to drive the racks (423) to reciprocate.

3. The vacuum coater of claim 2 wherein the workpiece holder is adapted to translate back and forth: two supporting rails (424) are fixedly connected to the mounting seat (421), and the two racks (423) are respectively connected to the two supporting rails (424) in a sliding mode.

4. The vacuum coater of claim 1 wherein the workpiece holder is adapted to translate back and forth: mounting bracket (1) is connected including being used for fixing fixed disk (11), the rotation in the vacuum chamber main shaft (12) on fixed disk (11) and rotate and connect frock dish (13) on main shaft (12), translation mechanism (4) are installed on frock dish (13), sun gear (22) rigid coupling of planetary gear train (2) is in on main shaft (12), planetary gear (21) of planetary gear train (2) rotate and connect on frock dish (13).

5. The vacuum coater reciprocating translation workpiece holder of claim 4 wherein: the driving mechanism (3) comprises a servo motor (31) and a reversing transmission assembly (32) connected between the servo motor (31) and the main shaft (12), and the reversing transmission assembly (32) is used for transmitting the power of the servo motor (31) to the mounting frame (1) to drive the planetary gear (21) to rotate or revolve.

6. The vacuum coating machine reciprocating translation work rest of claim 5, characterized in that: the reversing transmission assembly (32) comprises a telescopic rod which synchronously rotates with an output shaft of the servo motor (31), a first driving gear (323) and a second driving gear (324) are fixedly connected to the telescopic rod at intervals along the axis direction of the telescopic rod, a first driven gear (121) is fixedly connected to the main shaft (12), and a second driven gear (131) which synchronously rotates with the tooling plate (13) is sleeved on the main shaft (12); the telescopic rod has at least two telescopic states to correspond to the rotation and revolution of the planetary gear (21), when the telescopic rod is in a first state, the first driven gear (121) is meshed with the first driving gear (323), and the second driven gear (131) is meshed with the second driving gear (324); when the telescopic rod is in a second state, the second driven gear (131) is separated from the meshing relation with the second driving gear (324), and the first driven gear (121) is changed from being meshed with the first driving gear (323) to being meshed with the second driving gear (324).

7. The vacuum coater reciprocating translation workpiece holder of claim 6 wherein: the telescopic link include with synchronous pivoted sliding sleeve (321) of servo motor (31) output shaft and sliding connection are in sliding shaft (322) in sliding sleeve (321), wear to be equipped with locating pin (325) on sliding sleeve (321) lateral wall, the confession has been seted up on sliding shaft (322) two at least locating holes (326) that locating pin (325) passed, two at least flexible states of telescopic link do locating pin (325) respectively with at least two state when locating hole (326) cooperate.

8. The vacuum coater reciprocating translation workpiece holder of claim 7 wherein: the rigid coupling has driving pulley (33) on servo motor (31) output shaft, the rigid coupling has driven pulley (34) on sliding sleeve (321), driving pulley (33) with the cover is equipped with transmission belt (35) between driven pulley (34).

9. The vacuum coater reciprocating translation workpiece holder of claim 6 wherein: the main shaft (12) is sleeved with a connecting cylinder (132), and the tool disc (13) and the second driven gear (131) are fixedly connected with the connecting cylinder (132).

10. The vacuum coater reciprocating translation workpiece holder of claim 6 wherein: the fixed disc (11) is detachably connected with a positioning bolt (14), and the positioning bolt (14) is in threaded connection with the tool disc (13).