CN217265993U

CN217265993U - Rotating tool

Info

Publication number: CN217265993U
Application number: CN202221223013.1U
Authority: CN
Inventors: 杨伟; 刘沧浪; 罗铫
Original assignee: Chengdu Zhongkezhuoer Intelligent Technology Group Co ltd
Current assignee: Chengdu Zhongkezhuoer Intelligent Technology Group Co ltd
Priority date: 2022-05-20
Filing date: 2022-05-20
Publication date: 2022-08-23
Anticipated expiration: 2032-05-20

Abstract

The utility model relates to a rotating tool, which comprises a frame, a planet support, a rotating part rotatably arranged on the frame, a first driving module, a second driving module and a plurality of tool racks, wherein each tool rack is rotatably arranged on the planet support respectively and forms gear meshing transmission with the rotating part respectively; the planet support is rotatably connected with the rack, and the rotation center of the planet support is superposed with the rotation center of the rotating component; the first driving module is in transmission connection with the planet support and is used for driving each tool carrier to revolve around the revolving center of the revolving part respectively and synchronously driving each tool carrier to rotate; the second driving module is in transmission connection with the rotary component and is used for driving each tool rack to rotate; the rotary tool has two working modes, can be used in the field of film coating and the technical field of automation, realizes the functions of automatic and accurate workpiece positioning, workpiece feeding, workpiece discharging and the like, and has strong universality and high practicability.

Description

Rotating tool

Technical Field

The utility model relates to a rotate frock technical field, concretely relates to rotate frock and coating system.

Background

The rotating tool is a common tool device, is generally used for restraining and fixing a jig or a workpiece and the like, so that the position of the restrained jig or workpiece can be controlled, and is widely applied to the industry.

However, the conventional rotating tool generally has the problems of complex structure and poor versatility, for example, in the prior art, the rotating tool applied to the coating field is generally arranged in a vacuum chamber and is matched with a sputtering cathode. However, the existing rotating tool suitable for plating spherical elements is a planetary rotating tool, and the rotating tool has only one working mode, namely, when the coating is performed, a workpiece with a coating is arranged on the rotating tool and is driven to rotate circularly by the rotating tool, so that a centrosymmetric high-uniformity film is plated on the surface of the workpiece. When the rotating tool is applied to the magnetron sputtering coating spherical element, the workpieces can revolve around the rotating wheel under the driving of the rotating tool, and a large gap is usually reserved between every two adjacent workpieces, so that a lot of targets can be sputtered into the gap, the pollution and waste of materials are caused, the material utilization rate is low, the cost is high, and meanwhile, more time needs to be consumed for coating films with the same thickness, so that the coating efficiency is greatly reduced. In addition, in the coating process, only one target material can be matched with the rotating tool for coating, and the other target materials cannot be coated, so that in the rotating process of the rotating tool, all coated lenses installed on the rotating tool can only be coated with the same film, and different films cannot be coated for different coated lenses at the same time, and the problem of low coating efficiency of the existing coating equipment is caused. For another example, in the prior art, a rotating tool applied to the automation field generally needs to accurately transfer a workpiece from one position to a target position, and when the workpiece is transferred by using the existing rotating tool, the orientation of the workpiece cannot be generally adjusted at the target position, which is inconvenient for forming efficient and precise matching with other mechanisms, and thus, a solution is needed.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the problem that prior art exists, provide a simple structure, the strong rotation frock of commonality, the main design is:

a rotary tool comprises a frame, a planet support, a rotary part which can be rotatably arranged on the frame, a first driving module, a second driving module and a plurality of tool frames, wherein,

each tooling frame is rotatably arranged on the planet support and distributed along the circumferential direction of the rotation center of the rotary component, and each tooling frame and the rotary component form gear meshing transmission;

the planet support is rotatably connected with the rack, and the rotation center of the planet support is superposed with the rotation center of the rotating component;

the first driving module is in transmission connection with the planet support and is used for driving each tool carrier to revolve around the rotation center of the rotation part respectively and synchronously driving each tool carrier to rotate;

and the second driving module is in transmission connection with the rotary part and is used for driving each tool rack to rotate. In the scheme, the problem of supporting the jig and/or the workpiece is solved by arranging the tool frame; by constructing the plurality of tool frames, the rotating tool can be used for operating a plurality of workpieces at the same time, so that the efficiency is improved; each tooling frame is arranged on a planet support which is rotatably connected with the machine frame; and make every tool carrier form the gear engagement transmission with the revolving unit separately, make every tool carrier and revolving unit can form the planetary structure; simultaneously, the first driving module and the second driving module are respectively configured for the planet support and the tool rack, so that the rotating tool at least has two working modes, can be used for efficient film coating in the film coating field and can be used in the technical field of automation, functions of automatic and accurate workpiece positioning, workpiece feeding, workpiece discharging and the like are realized, the universality is strong, and the tool is very practical.

In order to solve the problem of gear meshing transmission, the rotary component is provided with a circle of first teeth, each tool rack is provided with a circle of second teeth matched with the first teeth, and each tool rack is in transmission with the rotary component through the meshing of the second teeth and the first teeth. That is, in this aspect, the second tooth engages with the first tooth, so that the tool holder and the rotary member can form a gear transmission.

In order to facilitate the formation of the first and second teeth, it is preferred that the rotary part employs an internal or external gear, and/or that the tool holder is configured with an external gear adapted to the rotary part.

In order to solve the problem of facilitating the fixing of the jig or the workpiece, the tool rack is further configured with an installation part for restraining the jig and/or the workpiece. So as to install the jig and/or the workpiece.

In order to solve the problem that the rotation center of the planet support coincides with the rotation center of the rotating part, the planet support further comprises a first rotating shaft and a second rotating shaft, wherein the first rotating shaft is rotatably arranged, the second rotating shaft is rotatably arranged, the rotation center of the first rotating shaft coincides with the rotation center of the second rotating shaft, and the first rotating shaft and the second rotating shaft are rotatably arranged,

the planet support is connected with the first rotating shaft, the rotating center of the planet support is overlapped with the rotating center of the first rotating shaft, the first rotating shaft is in transmission connection with the first driving module, and the first driving module is used for driving the first rotating shaft to rotate;

the rotating part is connected to the second rotating shaft, the rotating center of the rotating part is overlapped with the rotating center of the second rotating shaft, the second rotating shaft is in transmission connection with the second driving module, and the second driving module is used for driving the second rotating shaft to rotate. When the assembly is carried out, the rotating center of the first rotating shaft is enabled to be overlapped with the rotating center of the second rotating shaft, and the assembly is very convenient.

In the first scheme, the first rotating shaft and the second rotating shaft are respectively arranged on different sides of the planet support, and the first rotating shaft and the second rotating shaft are respectively connected to the frame through bearings.

In order to simplify the structure and reduce the volume, in the second scheme, the first rotating shaft and the second rotating shaft are respectively arranged on the same side of the planet support, and the first rotating shaft and the second rotating shaft are mutually nested and installed.

In some embodiments, the second rotating shaft is configured with a central hole, the first rotating shaft is configured to fit the central hole, and the second rotating shaft is sleeved outside the first rotating shaft through the central hole. So that the center of rotation of the second swivel shaft can coincide with the center of rotation of the first swivel shaft.

For the rotatable mounting, it is preferred that the second swivel shaft is connected to the machine frame via a bearing set, that the first swivel shaft is connected to the second swivel shaft and/or the machine frame via a bearing set, and that the bearing set comprises at least two bearings.

For convenience of assembly, the first rotating shaft is a stepped shaft, the central hole is configured to be matched with a stepped hole of the stepped shaft, and the first rotating shaft can be connected to the stepped hole through a bearing set. By configuring the first rotary shaft as a stepped shaft and the central hole as a stepped hole, it is convenient to implement the installation and positioning of the bearing using the step at the step, thereby facilitating the installation of the first rotary shaft to the second rotary shaft using the bearing set.

Preferably, the rotation member is disposed below the planet carrier.

In other embodiments, the first rotating shaft is configured with a center hole, the second rotating shaft is configured to fit the center hole, and the first rotating shaft is sleeved outside the second rotating shaft through the center hole. So that the center of rotation of the second swivel axis can coincide with the center of rotation of the first swivel axis.

For the rotatable mounting, it is preferred that the first pivot shaft is connected to the machine frame via a bearing set, that the second pivot shaft is connected to the first pivot shaft and/or the machine frame via a bearing set, and that the bearing set comprises at least two bearings.

For assembly, the second rotation shaft is a stepped shaft, and the central hole is configured to be matched with the stepped hole of the stepped shaft, and the second rotation shaft is connected to the stepped hole through a bearing set. By configuring the second rotary shaft as a stepped shaft and the central hole as a stepped hole, it is convenient to implement the mounting and positioning of the bearing using the step at the step, thereby facilitating the mounting of the second rotary shaft to the first rotary shaft using the bearing set.

Preferably, the rotation member is disposed above the planet carrier.

Preferably, the frame includes a support cylinder and a flange coupled to the support cylinder, the flange being configured with a plurality of mounting holes. So that the installation and the fixation of the rotating tool are convenient.

In order to solve the transmission problem, preferably, the first driving module includes a first transmission mechanism and a first motor, the first motor is in transmission connection with the first transmission mechanism, and the first transmission mechanism is in transmission connection with the first rotating shaft;

and/or the second driving module comprises a second transmission mechanism and a second motor, the second motor is in transmission connection with the second transmission mechanism, and the second transmission mechanism is in transmission connection with the second rotating shaft.

Further, the first transmission mechanism is one or a combination of a gear transmission mechanism, a belt transmission mechanism, a chain transmission mechanism or a worm and gear transmission mechanism;

and/or the second transmission mechanism is one or more of a gear transmission mechanism, a belt transmission mechanism, a chain transmission mechanism or a worm and gear transmission mechanism.

In order to solve the problem of rotatable installation of the tool frame, preferably, the tool frame is respectively connected with the planet carrier through bearings. So that the separation of the movements is achieved by means of bearings.

Preferably, the planet carrier is provided with a plurality of assembly holes, the assembly holes are respectively provided with a bearing seat, and each tooling frame is respectively connected with the bearing seats through bearings.

Compared with the prior art, use the utility model provides a pair of rotate frock, simple structure, commonality are strong, reasonable in design has two kinds of mode, not only can be used for the coating film field to can improve the coating film efficiency of material utilization and work piece, can be used for automatic technical field moreover, realize functions such as automatic, accurate work piece location, work piece material loading, work piece unloading, the commonality is strong, and very practical.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a front view of a rotary tool provided in embodiment 1 of the present invention.

Fig. 2 is a schematic partial view of a first rotary tool provided in embodiment 2 of the present invention.

Fig. 3 is one of schematic three-dimensional structural diagrams of a second rotary tool provided in embodiment 2 of the present invention.

Fig. 4 is a second schematic three-dimensional structure diagram of a second rotary tool according to embodiment 2 of the present invention.

Fig. 5 is a front view of fig. 3.

Fig. 6 is a schematic structural diagram of a rotary component in a second rotary tool provided in embodiment 2 of the present invention.

Fig. 7 is a schematic structural diagram of a planet carrier in a second rotary tool provided in embodiment 2 of the present invention.

Fig. 8 is a partial cross-sectional view of fig. 5.

Fig. 9 is a partial cross-sectional view of a tool rack in a second rotary tool provided in embodiment 2 of the present invention.

Fig. 10 is a partial cross-sectional view of a third rotary tool provided in embodiment 2 of the present invention.

Fig. 11 is a schematic three-dimensional structure diagram of a coating system according to embodiment 3 of the present invention.

Fig. 12 is a second schematic three-dimensional structure diagram of a coating system according to embodiment 3 of the present invention.

Description of the drawings

Frame 100, support cylinder 101, stepped hole 102, flange 103, mounting hole 104

A rotary member 200, a first tooth 201, a second rotary shaft 202, a central hole 203, a second motor 204, a transmission shaft 205, a driving gear 206, a driven gear 207, a gear 208 and a shaft 209

Planet carrier 301, assembly hole 302, first rotating shaft 303, first motor 304, first transmission mechanism 305

Tool rack 400, constraint hole 401, nut 402, thrust washer 403 and second tooth 404

Bearing 500, thrust roller bearing 501, rolling bearing 502, bearing housing 503

Sputtering cathode 600

Jig 701 and workpiece 702

Vacuum chamber 800, magnetic fluid flange 801.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.

Example 1

As shown in fig. 1 to 10, the present embodiment provides a rotary tool, which includes a rotary member 200, a first driving module, a plurality of tool racks 400, and a second driving module, wherein,

the revolving unit 200 is rotatably mounted to the frame 100 such that the revolving unit 200 can rotate relative to the frame 100. in one embodiment, the revolving unit 200 can be directly rotatably connected to the frame or can be connected to the frame through a bearing.

Each tool rack 400 is rotatably connected to the planet carrier 300 and distributed along the circumferential direction of the rotation center of the rotation member 200, and each tool rack 400 is adapted to the rotation member 200 and forms gear engagement transmission with the rotation member 200, so that the rotation of the rotation member 200 and the planet carrier 300 can drive the tool rack 400 to rotate, the tool rack 400 is mainly used for supporting and restraining the jig 701 and/or the workpiece 702, as shown in fig. 3 and 9, when in use, the jig 701, the workpiece 702 and the like which are needed can be placed on the tool rack 400 so as to rotate along with the tool rack 400. In implementation, the number of the tool racks 400 may be determined according to implementation requirements, for example, as shown in fig. 1 and fig. 3, the rotating tool is provided with six tool racks 400, and may be provided with six jigs 701 and/or workpieces 702 at the same time, which is beneficial to improving efficiency.

In practice, the planet carrier 300 may be rotatably coupled to the frame 100 such that the rotation center of the planet carrier 300 coincides with the rotation center of the revolving member 200 so as to realize concentric rotation; similarly, the planet carrier 300 is directly rotatably connected to the frame 100, or may be connected to the frame 100 through a bearing.

In this embodiment, the first driving module is in transmission connection with the planet carrier 300, as shown in fig. 5 and 8, the first driving module is mainly used for driving each tool carrier 400 to synchronously revolve around the rotation center of the rotation component 200 and synchronously drive each tool carrier 400 to rotate, that is, when the first driving module drives the planet carrier 300 to rotate, not only the tool carrier 400 can be driven to revolve, but also the tool carrier 400 can be driven to rotate.

In this embodiment, the second driving module is in transmission connection with the revolving component 200, as shown in fig. 5 and 8, when the tool magazine is in operation, the second driving module can drive each tool magazine 400 to rotate independently, that is, the second driving module can drive each tool magazine 400 to rotate by driving the revolving component 200 to drive each tool magazine 400 to rotate, so as to drive the jigs 701 and/or the workpieces 702 on each tool magazine 400 to rotate at a high speed. Therefore, in operation, through the cooperation of the first driving module and the second driving module, at least two operation modes can be realized, wherein, the first operation mode is as follows: only the first driving module is started, so that each tool rack 400 can be in revolution and rotation states at the same time, when the rotary tool is applied to the film coating field, in the working mode, a plurality of workpieces 702 can be coated at the same time, and the film coating efficiency can be obviously improved.

The second working mode is as follows: the tool rack 400 can be rotated to a preset position through the first driving module, so that the purpose of transferring a workpiece from one station to another station is achieved, after the tool rack 400 reaches the preset position, the first driving module stops, the second driving module starts, the second driving module drives the tool rack 400 to rotate, the purpose of adjusting the position of the workpiece on the tool rack 400 is achieved, the tool rack can be matched with other automatic devices or systems to use, and functions of automatic and accurate workpiece positioning, feeding, discharging and the like can be achieved if the tool rack can be matched with a mechanical gripper, a feeding machine, a discharging machine and the like.

In order to allow a geared transmission of the rotary part with the tool holders, the rotary part is designed with a ring of first teeth, and the tool holders are designed with a ring of second teeth adapted to the first teeth, as shown in fig. 4 to 8, so that the tool holders 400 can be geared with the rotary part 200 by the engagement of the second teeth 201 with the first teeth 201. The first teeth 201 and the second teeth may be straight teeth which are matched with each other, and may also be inclined teeth which are matched with each other. The tool carrier 400 and the revolving member may form a planetary transmission structure by the cooperation of the first teeth and the second teeth. To simplify the structure, in one embodiment, the rotary part 200 itself may directly employ an internal gear to form the first teeth, the rotary part 200 may be mounted to the machine frame through a bearing, and similarly, the tool frame 400 is configured with an external gear fitted to the rotary part 200 to form the second teeth, and the external gears are respectively disposed inside the internal gears so that the external gears may be respectively engaged with the internal gears to mesh the transmission. Further, the rotary member 200 itself may be directly formed of external gears as shown in fig. 1 to form the first teeth, the rotary member 200 may be mounted to the machine frame through bearings, and similarly, the tool frame 400 is configured with external gears fitted to the rotary member 200 to form the second teeth, and the external gears are respectively disposed outside the internal gears as shown in fig. 1 so that the external gears can be respectively engaged with the internal gears to be mesh-driven.

In order to drive the rotating component 200, the second driving module includes a second transmission mechanism and a second motor 204, the second motor 204 is connected to the second transmission mechanism, and the second transmission mechanism is connected to the rotating component 200, that is, the second motor 204 can be used to drive the rotating component 200 to rotate. For example, in one embodiment, the second transmission mechanism includes a gear 2008 fitted to the revolving unit 200 and a shaft 209 connected to the gear, the width of the first tooth in the revolving unit 200 may be configured to be larger than the sum of the width of the second tooth and the width of the gear, so that the revolving unit 200 can be engaged with the tool rack 400 and the gear at the same time, for example, as shown in fig. 1, the upper part of the revolving unit 200 is engaged with the tool rack 400, the lower part is engaged with the gear 208, and both ends of the shaft 209 are in transmission connection with the gear 208 and the second motor, respectively, so that the second motor can drive the gear to rotate, thereby driving the revolving unit 200 to rotate.

To facilitate driving the planet carrier 300 to rotate, in a preferred embodiment, as shown in fig. 1, the first driving module comprises a first transmission mechanism 305 and a first motor 304, the first motor 304 is in transmission connection with the first transmission mechanism, and the first transmission mechanism 305 is in transmission connection with the planet carrier 300 so as to drive the planet carrier 300 to rotate through the first transmission mechanism; the first motor 304 may preferably be a stepping motor or a servo motor. In the implementation process, the first transmission mechanism has multiple implementation modes, preferably, the first transmission mechanism can adopt one or a combination of multiple of a gear transmission mechanism, a belt transmission mechanism, a chain transmission mechanism or a worm and gear transmission mechanism, the belt transmission mechanism, the chain transmission mechanism and the worm and gear transmission mechanism are all commonly used transmission mechanisms, the cost is low, the principle is simple, the assembly is convenient, and the later-stage disassembly and maintenance are very convenient. For example, in this embodiment, the first transmission mechanism is a gear transmission mechanism, the gear transmission mechanism includes a transmission shaft 205, a driving gear 206 disposed on the transmission shaft 205, and a driven gear 207 connected to the planet carrier 300, an output shaft of the first motor 304 is connected to the transmission shaft 205, and the driving gear 206 is engaged with the driven gear 207, so that the planet carrier 300 can be driven to rotate by the first motor 304.

In the present embodiment, the planet carrier 300 mainly plays a role of bearing, and the shape thereof may be determined according to actual requirements, and preferably, the planet carrier 300 may preferably adopt a plate-shaped structure, and especially, a circular plate or an annular plate may be adopted, which is more beneficial for revolution.

In operation, the planet carrier 300 is generally in a horizontal state, and in practice, the planet carrier 300 and the rotary member 200 have various positional relationships, and it is only necessary to ensure that the tool carrier and the rotary member 200 are in gear engagement and that the rotation center of the planet carrier 300 and the rotation center of the rotary member 200 are coincident with each other. For example, the rotary member 200 may be disposed above the planet carrier 300 as shown in fig. 2, or may be disposed below the planet carrier 300 as shown in fig. 1 and 3. Of course, the rotary member 200 may be disposed inside the planet carrier 300, which is not illustrated.

The present embodiment does not limit the structure of the machine frame 100, and only needs to satisfy the installation requirements of the rotary member 200 and the planet carrier 300. The structure of the tool rack 400 may be determined according to actual requirements, and in this embodiment, the tool rack 400 is a revolving body structure, as shown in fig. 7 to 9. In a more sophisticated version, the tool rest 400 is further configured with mounting portions for restraining the tool 701 and/or the workpiece 702, so that the tool 701 and/or the workpiece 702 is restrained by the mounting portions. For example, as shown in fig. 7 to 9, the mounting portion may be a restriction hole 401 formed at an upper end or a lower end of the tool rest 400, so as to mount the jig 701 or the workpiece 702 through the restriction hole 401, and in the implementation, the restriction hole 401 may penetrate through upper and lower ends of the tool rest 400, or may not penetrate through the tool rest 400, and only a groove may be formed in the tool rest 400; of course, the mounting portion may be in other embodiments, for example, a snap structure, a locking mechanism, an external thread, an internal thread, etc. configured on the tool holder 400 may be used, and the tool 701 and/or the workpiece 702 may be bound or fixed. The second tooth on the tool rack 400 may be integrated with the tool rack 400, as shown in fig. 4, 5 and 9.

Example 2

In order to make the rotation center of the planet carrier 300 coincide with the rotation center of the rotation member 200, the main difference between the present embodiment 2 and the above embodiment 1 is that the rotation tool provided by the present embodiment further includes a first rotation shaft 303 rotatably mounted and a second rotation shaft 202 rotatably mounted, and the rotation center of the first rotation shaft coincides with the rotation center of the second rotation shaft; as shown in fig. 2, 8 and 10, the planet carrier 300 is connected to the first rotating shaft, and the rotating center of the planet carrier 300 coincides with the rotating center of the first rotating shaft, the first rotating shaft is in transmission connection with the first driving module, and the first driving module is used for driving the first rotating shaft to rotate, so that the planet carrier 300 can be driven to rotate. Meanwhile, the rotation member 200 is connected to a second rotation shaft, as shown in fig. 2, 8 and 10, and the rotation center of the rotation member 200 coincides with the rotation center of the second rotation shaft, the second rotation shaft is in transmission connection with a second driving module, and the second driving module is used for driving the second rotation shaft to rotate, so that the second rotation shaft can be driven to rotate; when the assembly is carried out, the rotating center of the first rotating shaft is enabled to be overlapped with the rotating center of the second rotating shaft, and the assembly is very convenient.

In practice, the first revolving shaft 303 and the second revolving shaft 202 have various position matching relations, in one embodiment, the first revolving shaft 303 and the second revolving shaft 202 may be respectively disposed on different sides (i.e. two sides) of the planet carrier 300, for example, as shown in fig. 2, the first revolving shaft 303 may be connected to the frame through a bearing and located below the planet carrier 300, in this case, the second revolving shaft may be connected to the frame through a bearing and located above the planet carrier 300, and the revolving component 200 is located above the planet carrier 300, so that the revolving center of the first revolving shaft and the revolving center of the second revolving shaft coincide. Similarly, for example, the first revolving shaft 303 may be connected to the frame through a bearing and located above the planet carrier 300, and at this time, the second revolving shaft may be connected to the frame through a bearing and located below the planet carrier 300, and the revolving unit 200 is located below the planet carrier 300, so that the revolving center of the first revolving shaft coincides with the revolving center of the second revolving shaft.

In order to simplify the structure, in another embodiment, the first revolving shaft 303 and the second revolving shaft 202 may be disposed on the same side of the planet carrier 300 at the same time, for example, may be disposed on the lower side or the upper side of the planet carrier 300 at the same time, as shown in fig. 3 to 10, in this case, the first revolving shaft 303 and the second revolving shaft 202 are nested with each other so that the revolving center of the first revolving shaft may coincide with the revolving center of the second revolving shaft, which is not only easy to implement, but also advantageous for simplifying the structure, making the structure more compact, and facilitating the assembly. While the first revolving shaft 303 and the second revolving shaft 202 have various installation manners of being nested with each other, for example, in the first embodiment, as shown in fig. 3 to 8, the second revolving shaft is configured with a center hole 203, the center hole 203 may penetrate both ends of the second revolving shaft, and the first revolving shaft is configured to be fitted into the center hole 203 so that the second revolving shaft may be sleeved outside the first revolving shaft through the center hole 203, thereby allowing the revolving center of the second revolving shaft 202 to coincide with the revolving center of the first revolving shaft 303. In this case, as shown in fig. 4 and 5, the rotation member 200 may be positioned below the planetary carrier 300 or inside the planetary carrier 300, and the second rotation shaft 202 and the first rotation shaft 303 may rotate relative to each other without being affected by each other. In practice, the first rotating shaft 303 may have a hollow structure for weight reduction, and as shown in fig. 7 and 8, both the first rotating shaft and the second rotating shaft have a cylindrical structure. In this embodiment, at least one of the second rotation shaft and the first rotation shaft is rotatably mounted to the frame for rotatably mounting the second rotation shaft and the first rotation shaft, specifically, for example, the second rotation shaft 202 may be connected to the frame 100 through a bearing set, as shown in fig. 8, and at this time, the first rotation shaft may be connected to the second rotation shaft 202 and/or the frame 100 through a bearing set. The bearing set should comprise at least one bearing. To facilitate the mounting and positioning of the bearing between second swivel shaft 202 and first swivel shaft 303, in a further aspect, first swivel shaft 303 may be a stepped shaft, as shown in fig. 8, and accordingly, central bore 203 may be configured to fit stepped bore 102 of the stepped shaft, as shown in fig. 8, first swivel shaft 303 may be coupled to stepped bore 102 via a bearing set, and the mounting and positioning of the bearing may be accomplished using the step at the step, as shown in fig. 8, to facilitate mounting first swivel shaft 303 to second swivel shaft 202 using the bearing set. For another example, the second rotating shaft 202 may also be connected to the first rotating shaft through a bearing set, and the first rotating shaft supports the first rotating shaft, and at this time, the first rotating shaft may be connected to the rack 100 through the bearing set, and the same technical effect may also be achieved, which is not described herein again.

Similarly, in the second embodiment, the central hole 203 may be configured on the first rotation shaft, so that the first rotation shaft can be sleeved outside the second rotation shaft through the central hole 203, so that the rotation center of the second rotation shaft 202 can coincide with the rotation center of the first rotation shaft 303. At this time, the rotation member 200 may be positioned above the planet carrier 300 or inside the planet carrier 300, as shown in fig. 10, so that the second rotation shaft 202 and the first rotation shaft 303 may rotate relatively without interfering with each other. Likewise, in practice, the second axis of rotation 202 may be hollow in configuration for weight reduction. In this embodiment, at least one of the second pivot shaft and the first pivot shaft may be rotatably mounted to the frame, and specifically, for example, the first pivot shaft 303 may be connected to the frame 100 through a bearing set, and in this case, the second pivot shaft may be connected to the first pivot shaft and/or the frame 100 through a bearing set. The bearing set should comprise at least one bearing. To facilitate the mounting and positioning of the bearing between the second swivel axis and the first swivel axis, in a further aspect, a stepped axis may be used for the second swivel axis, and correspondingly, the central hole 203 may be configured to fit the stepped hole 102 of the stepped axis; the second pivot shaft can be coupled to the stepped bore 102 via a bearing set and can be mounted and positioned using the step at the step, as shown in fig. 10, to facilitate mounting the second pivot shaft to the first pivot shaft using the bearing set. For another example, the first rotating shaft may also be connected to the second rotating shaft through a bearing set, and the second rotating shaft supports the first rotating shaft, and at this time, the second rotating shaft may be connected to the rack 100 through the bearing set, which may also achieve the same technical effect, and is not described herein again.

For stable support, in a more preferred embodiment, the bearing set includes at least one thrust bearing, so that the thrust bearing can bear the axial force, such as the gravity of the second rotating shaft 202 in the first embodiment, so that the thrust bearing can be used to support the second rotating shaft 202 more stably; by way of example, the bearing set between the second revolving shaft 202 and the first revolving shaft 303 includes a thrust roller bearing 501 and a rolling bearing 502, as shown in fig. 3 to 10, the thrust roller bearing 501 and the rolling bearing 502 are respectively installed at a step, which is beneficial to bearing force in the axial direction and also beneficial to the stable vertical state of the second revolving shaft 202.

The machine frame 100 has various embodiments, and preferably, in this embodiment, the machine frame 100 includes a supporting cylinder 101 and a flange 103 connected to the supporting cylinder 101, as shown in fig. 3-5, the flange 103 is configured with a plurality of mounting holes 104, so as to achieve detachable mounting and fixing of the rotating tool by using fasteners such as bolt pairs.

In a more perfect implementation mode, the first driving module includes a first transmission mechanism and a first motor 304, the first motor 304 is in transmission connection with the first transmission mechanism, and the first transmission mechanism is in transmission connection with the first revolving shaft 303 so as to drive the planet carrier 300 to rotate through the first revolving shaft 303; the first motor 304 may preferably be a stepper motor or a servo motor, and the first transmission may be one or more of a gear transmission, a belt transmission, a chain transmission, or a worm and gear transmission. For example, in the present embodiment, the first transmission mechanism is a gear transmission mechanism, as shown in fig. 3 to fig. 10, the gear transmission mechanism includes a transmission shaft 205, a driving gear 206 disposed on the transmission shaft 205, and a driven gear 207 disposed on the first revolving shaft, an output shaft of the first motor 304 is connected to the transmission shaft 205, and the driving gear 206 is engaged with the driven gear 207, so that the first motor 304 can be used to drive the first revolving shaft 303 to rotate, thereby achieving the purpose of driving the planet carrier 300 to rotate.

Similarly, the second driving module includes a second transmission mechanism and a second motor 204, the second motor 204 is in transmission connection with the second transmission mechanism, and the second transmission mechanism is in transmission connection with the second rotating shaft 202, so that the rotating member 200 is driven to rotate by the second rotating shaft 202. Similarly, the second motor 204 may preferably be a stepper motor or a servo motor, and the second transmission may preferably be one or more combinations of a gear transmission, a belt transmission, a chain transmission, or a worm and gear transmission. For example, in the present embodiment, the second transmission mechanism is a gear transmission mechanism, as shown in fig. 3-10, the gear transmission mechanism includes a transmission shaft 205, a driving gear 206 disposed on the transmission shaft 205, and a driven gear 207 disposed on the second rotation shaft 202, an output shaft of the second motor 204 is connected to the transmission shaft 205, the driving gear 206 is engaged with the driven gear 207, so that the second motor 204 can be used to drive the second rotation shaft to rotate, thereby driving the rotation member 200 to rotate.

In implementation, the tool holder 400 may be connected to the planet carrier 301 through a bearing, so that the tool holder 400 rotates more smoothly; in order to facilitate the installation of the bearing, the planet carrier 301 is configured with a plurality of assembly holes 302, as shown in fig. 7 and 9, each of the assembly holes may be uniformly distributed along the circumferential direction of the rotation center of the planet carrier 301, bearing seats 503 are respectively disposed in the assembly holes 302, each of the tool holders 400 may be respectively connected to the bearing seats 503 through the bearing, and may be locked by nuts 402 and thrust washers 403, as shown in fig. 7 and 9.

Example 3

The rotating tool provided in embodiment 1 or embodiment 2 may be applied to the field of film coating, for example, this embodiment provides a film coating system, which includes the rotating tool described in embodiment 1 or embodiment 2, and further includes a vacuum chamber 800, where the rotating tool is disposed in the vacuum chamber so as to cooperate with the sputtering cathode 600 to perform film coating, and at this time, the workpiece on the tool rack is an element to be coated.

In a more perfect scheme, the coating system also comprises a sputtering cathode 600 arranged in the vacuum chamber 800, a sputtering power supply connected with the sputtering cathode 600, a vacuum pump connected with the vacuum chamber 800 and the like, wherein,

the frame 100 may be fixedly installed in the vacuum chamber 800 with at least the planet carrier 300 and the tool holder 400 located in the vacuum chamber 800, and preferably, the first motor 304 and the second motor 204 in the rotating tool may be disposed outside the vacuum chamber 800, while other components of the rotary tool may be disposed within the vacuum chamber 800, for example, as shown in figures 11 and 12, in this embodiment, the bottom of the vacuum chamber 800 is configured with a mounting channel, the first motor 304 and the second motor 204 are respectively mounted outside the vacuum chamber 800, and the driving shaft 205 is extended into the vacuum chamber 800 through the installation passage, and a flange and a sealing structure are provided at the installation passage, to seal the installation channel, the flange may preferably be a magnetic fluid flange 801, so as to achieve better vacuum sealing effect, the sealing structure includes, but is not limited to, a sealing ring, a sealing gasket, a dynamic sealing structure, etc., which are not illustrated herein.

In this embodiment, the sputtering cathodes 600 are disposed at positions adapted to the tool rack 400, and the effective coating area of the sputtering cathodes 600 covers at least a partial area of the revolution orbit of the tool rack 400, that is, at least a partial motion track of the revolution orbit of the tool rack 400, so as to correspond to the tool rack 400, the number of the sputtering cathodes 600 may be determined according to the actual situation, and different targets may be disposed at each sputtering cathode 600, or the same target may be disposed.

The vacuum pump may communicate with the vacuum chamber 800 through a pipe so as to adjust the degree of vacuum within the vacuum chamber 800.

The sputtering power supply is electrically connected to the sputtering cathode 600 for supplying power.

In a more perfect scheme, the coating system also comprises a controller, wherein the controller is electrically connected with the sputtering power supply so as to control the starting/closing of the sputtering power supply and achieve the purpose of controlling whether power is supplied to the sputtering cathode 600; meanwhile, the controller is electrically connected with the vacuum pump so as to achieve the purpose of controlling the vacuum degree of the vacuum chamber 800 by controlling the vacuum pump; in addition, the controller is electrically connected to the first driving module and the second driving module (for example, the controller can be electrically connected to the first motor 304 and the second motor 204) respectively, and is used for controlling the rotation speed of the planet carrier 300 and the rotating member 200 respectively, so that the coating system has at least two operation modes, wherein,

the first working mode is as follows: the controller closes the second driving module, starts the first driving module, and drives the planet carrier 300 to rotate relative to the revolving part 200 by using the first driving module, so that the tool holder 400 rotates at a high speed while revolving around the revolving center of the revolving part 200, and is convenient to cooperate with the sputtering cathode 600 to perform film coating, and the working mode can perform batch film coating, thereby remarkably improving the film coating efficiency.

The second working mode is as follows: the controller starts the first driving module first, utilizes the first driving module to rotate one of the tool racks 400 to the position adapted to the sputtering cathode 600, then the controller closes the first driving module and starts the second driving module, and utilizes the second driving module to drive the tool rack 400 to rotate at a high speed at a preset position so as to be matched with the sputtering cathode 600 for coating.

In implementation, the controller may preferably adopt a PC, a PLC, a single chip, an embedded chip, or the like.

In this embodiment, in order to achieve better sealing effect of the vacuum chamber 800, the transmission shaft 205 may preferably adopt a magnetic fluid seal.

Example 4

The rotating tool provided in embodiment 1 or embodiment 2 may be applied to the field of automatic transfer and positioning, for example, this embodiment provides a transfer system, which includes the rotating tool described in embodiment 1 or embodiment 2, and further includes a controller, where the controller is electrically connected to the first driving module and the second driving module, respectively, so as to precisely control the rotation of the tool holder 400 and the planet carrier.

In use, a workpiece may be placed on the corresponding tool rack 400 at a first location, and the controller may rotate the tool rack 400 to a predetermined second location via the first drive module for precise transfer of the workpiece from the first location to the second location. Moreover, after the tool rack 400 reaches the second position, the controller can control the first driving module to stop and the second driving module to open, so that the second driving module is utilized to drive the tool rack 400 to rotate, the purpose of adjusting the position of the workpiece on the tool rack 400 is achieved, and the automatic positioning device can be matched with other automatic devices or systems for use, and can be widely applied to the field of automatic transfer and positioning if matched with mechanical grippers, feeding machines, blanking machines and the like, so that the automatic and accurate positioning, feeding, blanking and the like of the workpiece are realized.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention.

Claims

1. A rotary tool is characterized by comprising a machine frame, a planet support, a rotary component which is rotatably arranged on the machine frame, a first driving module, a second driving module and a plurality of tool frames, wherein,

and the second driving module is in transmission connection with the rotary part and is used for driving each tool rack to rotate.

2. The rotary tool of claim 1, wherein the rotary member is configured with a ring of first teeth, each tool holder is configured with a ring of second teeth adapted to the first teeth, and each tool holder is driven by the rotary member through engagement of the second teeth with the first teeth.

3. The rotating tool according to claim 2, wherein the rotating component adopts an internal gear or an external gear, and/or the tool frame is configured with an external gear matched with the rotating component;

and/or the frame comprises a support cylinder and a flange connected with the support cylinder, and the flange is provided with a plurality of mounting holes;

and/or the tool frame is connected with the planet carrier through a bearing;

and/or the tool frame is also provided with a mounting part for restraining the jig and/or the workpiece.

4. The rotary tool assembly according to any one of claims 1 to 3, further comprising a first rotary shaft rotatably mounted and a second rotary shaft rotatably mounted, wherein a center of rotation of the first rotary shaft coincides with a center of rotation of the second rotary shaft,

the rotating part is connected to the second rotating shaft, the rotating center of the rotating part is overlapped with the rotating center of the second rotating shaft, the second rotating shaft is in transmission connection with the second driving module, and the second driving module is used for driving the second rotating shaft to rotate.

5. The rotary tool of claim 4, wherein the first rotating shaft and the second rotating shaft are respectively disposed on different sides of the planet carrier, and the first rotating shaft and the second rotating shaft are respectively connected to the frame through bearings.

6. The rotary tool of claim 4, wherein the first rotating shaft and the second rotating shaft are respectively arranged on the same side of the planet support, and the first rotating shaft and the second rotating shaft are nested with each other.

7. The rotary tool of claim 6, wherein the second rotary shaft is configured with a central hole, the first rotary shaft is configured to fit the central hole, and the second rotary shaft is sleeved outside the first rotary shaft through the central hole.

8. The rotary tool of claim 7, wherein the second pivot shaft is connected to the frame by a bearing set, the first pivot shaft is connected to the second pivot shaft and/or the frame by a bearing set, and the bearing set comprises at least two bearings;

and/or the first rotating shaft is a stepped shaft, the central hole is configured to be matched with a stepped hole of the stepped shaft, and the first rotating shaft can be connected to the stepped hole through a bearing set;

and/or the revolving component is arranged below the planet carrier;

and/or the first driving module comprises a first transmission mechanism and a first motor, the first motor is in transmission connection with the first transmission mechanism, and the first transmission mechanism is in transmission connection with the first rotating shaft;

9. The rotary tool of claim 6, wherein the first rotary shaft is configured with a central hole, the second rotary shaft is configured to fit the central hole, and the first rotary shaft is sleeved outside the second rotary shaft through the central hole.

10. The rotary tool of claim 9, wherein the first rotary shaft is connected to the frame via a bearing set, the second rotary shaft is connected to the first rotary shaft and/or the frame via a bearing set, and the bearing set comprises at least two bearings;

and/or the second rotating shaft is a stepped shaft, the central hole is configured to be matched with a stepped hole of the stepped shaft, and the second rotating shaft is connected to the stepped hole through a bearing set;

and/or the revolving component is arranged above the planet carrier;