CN218666269U - Planetary gear structure sample platform for vacuum coating - Google Patents
Planetary gear structure sample platform for vacuum coating Download PDFInfo
- Publication number
- CN218666269U CN218666269U CN202222916369.XU CN202222916369U CN218666269U CN 218666269 U CN218666269 U CN 218666269U CN 202222916369 U CN202222916369 U CN 202222916369U CN 218666269 U CN218666269 U CN 218666269U
- Authority
- CN
- China
- Prior art keywords
- gear
- drive
- drive assembly
- vacuum coating
- driving motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a planetary gear structure sample platform for vacuum coating belongs to the sample and places technical field, and it is including supporting the disc, a plurality of vertical boards that are the ring and arrange of top fixedly connected with of support disc, and a plurality of vertical board fixed connection are in the periphery of drive ring gear, the drive ring gear is connected with a plurality of drive assembly meshing. This planetary gear structure sample platform for vacuum coating, through setting up driving motor, first gear, drive assembly and drive ring gear, add man-hour at the coating film, then control driving motor and drive the backup pad rotation, make the backup pad can drive assembly and carry out the revolution motion, make sample dish revolution motion, drive the first gear of driving motor drive assembly rotation simultaneously, and make drive assembly carry out the rotation motion around the drive ring gear, thick homogeneity of membrane can be ensured to the mode that then this device adopted the star gear structure, make the uniformity that keeps the membrane thickness improve, and then make vacuum coating quality obtain the guarantee.
Description
Technical Field
The utility model belongs to the technical field of the sample is placed, specifically be a planetary gear structure sample platform for vacuum coating.
Background
Vacuum coating is taken as an environment-friendly green surface protection technology, is more and more favored by enterprises, and has the key advantages of zero emission and zero pollution in the coating process compared with the traditional technologies such as electroplating and chemical plating.
In the process of vacuum coating, generally, a coating sample is fixed on a static sample table, and is sputtered and deposited on the surface of the sample through a target, the thickness of the sample film is difficult to ensure consistency for a plurality of samples at different positions, and particularly, the uniformity is worse when a plurality of films are deposited by different targets, so that the quality of vacuum coating is difficult to guarantee.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects, the utility model provides a planetary gear structure sample platform for vacuum coating has solved a plurality of samples to different positions, and the film thickness of sample is hardly guaranteed unanimously, and during the multilayer film of especially different target deposits, the homogeneity is worse for vacuum coating's quality is difficult to the problem of guarantee.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a planetary gear structure sample platform for vacuum coating, is including supporting the disc, a plurality of vertical boards that are the ring range of top fixedly connected with that support the disc, and a plurality of vertical board fixed connection are in the periphery of drive ring gear, drive ring gear is connected with a plurality of drive assembly meshing, and a plurality of drive assembly install in same backup pad, and a plurality of drive assembly are connected with same first gear engagement, the bottom and the driving motor output shaft fixed connection of first gear, driving motor's output shaft runs through and installs in the backup pad, driving motor fixed mounting is at the middle part of supporting the disc, and driving motor's output shaft and the equal fixedly connected with sample dish in every drive assembly's top.
As a further aspect of the present invention: four extending ends of the supporting disc are correspondingly provided with assembling holes.
As a further aspect of the present invention: the transmission assembly comprises a connecting shaft, the connecting shaft is fixedly connected to the bottom of the sample plate, the connecting shaft is rotatably connected to the bearing, and the connecting shaft is embedded in the supporting plate.
As a further aspect of the present invention: and a second gear is fixedly connected to the outside of the connecting shaft, and the second gear is in meshed connection with the first gear and the driving gear ring.
Compared with the prior art, the beneficial effects of the utility model reside in that:
1. this planetary gear structure sample platform for vacuum coating, through setting up driving motor, first gear, drive assembly and drive ring gear, add man-hour in the coating film, then control driving motor drives the backup pad rotation, make the backup pad can drive assembly and carry out the revolution motion, make sample dish revolution motion, drive motor drives first gear drive assembly rotation simultaneously, and make drive assembly carry out the rotation motion around the drive ring gear, thick homogeneity of membrane can be ensured to the mode that then this device adopted the star gear structure, make the uniformity that keeps the membrane thickness improve, and then make the vacuum coating quality ensured.
2. This planetary gear structure sample platform for vacuum coating is through setting up the sample dish for the sample dish can place the sample, can enclose the sample simultaneously, avoids the sample to diffuse outward and spills the problem that leads to the waste.
Drawings
Fig. 1 is a schematic three-dimensional structure of the present invention;
fig. 2 is a three-dimensional structural schematic diagram of the driving gear ring of the present invention;
fig. 3 is a schematic structural view of a first gear of the present invention;
fig. 4 is a three-dimensional structural schematic diagram of the transmission assembly of the present invention;
fig. 5 is a three-dimensional structural schematic diagram of the support plate of the present invention;
in the figure: the device comprises a support disc 1, a vertical plate 2, a drive gear ring 3, a sample disc 4, a drive motor 5, a support plate 6, a transmission assembly 7, a connecting shaft 71, a bearing 72, a second gear 73 and a first gear 8.
Detailed Description
The technical solution of the present patent will be described in further detail with reference to the following embodiments.
As shown in fig. 1-5, the utility model provides a technical solution: a planetary gear structure sample table for vacuum coating comprises a supporting disc 1, wherein assembly holes are correspondingly formed in four extending ends of the supporting disc 1, and the assembly holes can be used for penetrating fixing pieces, so that the position of the supporting disc 1 can be locked, and the stable operation of the device is ensured;
the top of the supporting disc 1 is fixedly connected with a plurality of vertical plates 2 which are arranged in a circular ring shape, the vertical plates 2 are fixedly connected to the periphery of the driving gear ring 3, and the vertical plates 2 can fix the driving gear ring 3 at multiple points, so that the driving gear ring 3 can be stably placed;
the driving gear ring 3 is meshed with the plurality of transmission assemblies 7, each transmission assembly 7 comprises a connecting shaft 71, the connecting shafts 71 are fixedly connected to the bottoms of the sample trays 4, the connecting shafts 71 are rotatably connected in bearings 72, the connecting shafts 71 are embedded and mounted on the supporting plates 6, the bearings 72 can ensure the rotating motion of the connecting shafts 71, meanwhile, the connecting shafts 71 can move smoothly, and meanwhile, the supporting plates 6 can support and fix the bearings 72;
the second gear 73 is fixedly connected to the outer part of the connecting shaft 71, the second gear 73 is meshed with the first gear 8 and the driving gear ring 3 for transmission, so that the power transmission can be realized, and a planetary gear structure can be formed to complete the uniform film coating operation on a sample;
a plurality of drive assembly 7 install in same backup pad 6, and a plurality of drive assembly 7 are connected with the meshing of same first gear 8, the bottom and the 5 output shaft fixed connection of driving motor of first gear 8, driving motor 5's output shaft runs through to be installed in backup pad 6, 5 fixed mounting of driving motor are at the middle part of support disc 1, and the equal fixedly connected with sample dish 4 in the output shaft of driving motor 5 and the top of every drive assembly 7, sample dish 4 can be placed the sample, can enclose the sample simultaneously, avoid the sample to spill outward and lead to extravagant problem.
The utility model discloses a theory of operation does:
when coating film is processed, the driving motor 5 is controlled to drive the supporting plate 6 to rotate, the supporting plate 6 drives the connecting shaft 71 to rotate through the bearing 72, then the connecting shaft 71 drives the sample plate 4 to perform revolution motion, meanwhile, the driving motor 5 controls the first gear 8 to rotate, so that the first gear 8 and the second gear 73 are in meshing transmission, the connecting shaft 71 rotates in the bearing 72, meanwhile, the second gear 73 performs rotating motion around the driving gear ring 3, samples in the sample plate 4 can be uniformly distributed through rotating action, and the consistency of film thickness is realized.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
Although the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art.
Claims (4)
1. The utility model provides a planetary gear structure sample platform for vacuum coating, includes support disc (1), its characterized in that: support a plurality of vertical boards (2) that are the ring and arrange of top fixedly connected with of disc (1), and a plurality of vertical boards (2) fixed connection is in the periphery of drive ring gear (3), drive ring gear (3) are connected with a plurality of drive assembly (7) meshing, and a plurality of drive assembly (7) are installed on same backup pad (6), and a plurality of drive assembly (7) are connected with same first gear (8) meshing, the bottom and the driving motor (5) output shaft fixed connection of first gear (8), the output shaft of driving motor (5) runs through and installs on backup pad (6), driving motor (5) fixed mounting is in the middle part that supports disc (1), and the equal fixedly connected with sample dish (4) in top of the output shaft of driving motor (5) and every drive assembly (7).
2. The planetary gear structure sample stage for vacuum coating according to claim 1, characterized in that: four extending ends of the supporting disc (1) are correspondingly provided with assembling holes.
3. The planetary gear structure sample stage for vacuum coating according to claim 1, characterized in that: drive assembly (7) include connecting axle (71), connecting axle (71) fixed connection is in the bottom of sample dish (4), connecting axle (71) rotate to be connected in bearing (72), connecting axle (71) are inlayed and are established and install on backup pad (6).
4. The planetary gear structure sample stage for vacuum coating according to claim 3, wherein: and a second gear (73) is fixedly connected to the outer part of the connecting shaft (71), and the second gear (73) is meshed with the first gear (8) and the driving gear ring (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222916369.XU CN218666269U (en) | 2022-10-31 | 2022-10-31 | Planetary gear structure sample platform for vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222916369.XU CN218666269U (en) | 2022-10-31 | 2022-10-31 | Planetary gear structure sample platform for vacuum coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218666269U true CN218666269U (en) | 2023-03-21 |
Family
ID=85568706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222916369.XU Active CN218666269U (en) | 2022-10-31 | 2022-10-31 | Planetary gear structure sample platform for vacuum coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218666269U (en) |
-
2022
- 2022-10-31 CN CN202222916369.XU patent/CN218666269U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110846634B (en) | Planet rotating device and coating equipment capable of realizing mass production | |
| CN107604328A (en) | A kind of fuel battery metal double polar plate highly effective ring vacuum coater | |
| CN218666269U (en) | Planetary gear structure sample platform for vacuum coating | |
| CN201587977U (en) | Film coating fixture for film coating machine | |
| CN110760808B (en) | Curved surface screen magnetron sputtering assembly | |
| CN102796990A (en) | Film coating bearing frame | |
| CN215103524U (en) | Three-dimensional turntable structure applied to vacuum tool coating equipment | |
| CN101376964B (en) | Sputtering type film coating apparatus and film coating method | |
| CN213447288U (en) | Intelligent vacuum coating machine | |
| CN210215536U (en) | Hanger revolution mechanism of film plating machine | |
| CN211734462U (en) | Curved surface screen magnetron sputtering subassembly | |
| CN106868465B (en) | A kind of application method of the device for vacuum chamber magnetron sputtering | |
| CN217265994U (en) | Planet film coating system | |
| CN211972435U (en) | Article placing rack of vacuum coating machine | |
| CN110592550A (en) | Magnetron sputtering and electron beam evaporation double-cavity coating device and using method thereof | |
| CN211311574U (en) | Rotating device for coating film on outer surface of hollow cylindrical plated part | |
| CN211079318U (en) | Magnetron sputtering and electron beam evaporation double-cavity coating device | |
| CN101353778B (en) | Sputtering type film coating apparatus and film coating method | |
| CN215103522U (en) | Dual-drive turntable system applied to vacuum coating equipment | |
| CN212610875U (en) | Magnetron sputtering reaction equipment | |
| CN220229906U (en) | Baking device for preparing proton exchange membrane | |
| CN115110038B (en) | Evaporation coating device and coating method | |
| CN110863186B (en) | Laser Gaussian lens coating tool and coating method | |
| CN215560617U (en) | Vacuum coating structure | |
| CN211170870U (en) | Vacuum coating structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |