CN215560617U

CN215560617U - Vacuum coating structure

Info

Publication number: CN215560617U
Application number: CN202122389158.0U
Authority: CN
Inventors: 康宗海
Original assignee: Shenzhen Rongkai Photoelectric Technology Co ltd
Current assignee: Shenzhen Rongkai Photoelectric Technology Co ltd
Priority date: 2021-09-28
Filing date: 2021-09-28
Publication date: 2022-01-18
Anticipated expiration: 2031-09-28

Abstract

The utility model discloses a vacuum coating structure, which relates to the technical field of vacuum coating and comprises coating equipment, wherein a bearing platform is arranged in the coating equipment, a plurality of groups of hanging frames are arranged on the end surface of the bearing platform, the bottom end of the bearing platform is connected with a driving gear connected with the bottom wall of the coating equipment, one side of the driving gear is connected with a half gear, the bottom end of the half gear is connected with a power motor, a driven gear is arranged below one side of the hanging frame, the outer side of the driven gear is positioned on the inner wall of the coating equipment and is provided with a tooth wall, and a belt connected with the driven gear is arranged above the driven gear. According to the utility model, by arranging the power motor, the driving gear, the half gear and the bearing table, the technical problem of poor coating quality while uneven coating exists in vacuum coating is solved; through setting up tooth wall, driven gear, belt, driven carousel and rolling disc, further promoted the homogeneity of coating film and the quality of coating film.

Description

Vacuum coating structure

Technical Field

The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating structure.

Background

Vacuum coating equipment mainly refers to a type of coating needing to be carried out under higher vacuum degree, and specifically comprises various types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like; the main idea is to divide into evaporation and sputtering. Most of the current domestic plants use evaporation coating, which is generally to heat a target material to evaporate surface components in the form of atomic groups or ions and deposit the components on the surface of a substrate to form a film through a film forming process.

However, in the prior art, due to the uneven distribution of evaporated ions in the air, the film plated on one surface of the part close to the target is thicker, and the film plated on the part away from the target is thinner, so that the film is unevenly plated, the product quality is affected, and improvement is needed.

SUMMERY OF THE UTILITY MODEL

Based on this, the utility model aims to provide a vacuum coating structure to solve the technical problem of uneven coating of the existing vacuum coating.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a vacuum coating structure, includes coating equipment, coating equipment's inside is provided with the plummer, and the terminal surface of plummer installs the multiunit stores pylon, the bottom of plummer is connected with the drive gear who is connected with coating equipment diapire, and one side of drive gear is connected with the half gear, the bottom of half gear is connected with motor power, driven gear is installed to one side below of stores pylon, and driven gear's the outside is located the inner wall of coating equipment and is provided with the tooth wall, driven gear's top is provided with the belt that links to each other with driven gear, and the inboard of belt is located the internally mounted of plummer has driven turntable, driven turntable's top is connected with the rolling disc.

By adopting the technical scheme, the placing frame for placing the workpiece to be coated can rotate while revolving, and the revolving and rotating of each time can keep the current position for a short time, so that the coating area of the workpiece has the time to be completely coated, the coating uniformity is improved, and the coating quality is enhanced.

The utility model is further provided that the output end of the power motor is fixedly connected with the half gear through a coupler, and the half gear is meshed with the driving gear through a gear.

Through adopting above-mentioned technical scheme, play the effect of power transmission.

The utility model is further provided that the hanging frame is rotatably connected with the bearing platform through a bearing.

Through adopting above-mentioned technical scheme, the stores pylon of being convenient for realizes rotating.

The utility model is further provided that the driven turntable is fixedly connected with the rotating disc through a coupler, and the gear teeth on the outer wall of the driven gear are meshed with the gear wall through a gear.

Through adopting above-mentioned technical scheme for the rolling disc can rotate.

The utility model is further arranged in that the driven gear is in transmission connection with the driven turntable through the transmission turntable and the belt.

Through adopting above-mentioned technical scheme for driven turntable can drive the rolling disc and rotate, realizes the rotation of stores pylon.

In summary, the utility model mainly has the following beneficial effects:

1. according to the utility model, the power motor, the driving gear, the half gear and the bearing platform are arranged, the power motor is started, the output end of the power motor drives the half gear to rotate, when the half gear rotates to be contacted with the driving gear, the half gear drives the driving gear to rotate through the gear meshing effect, the driving gear can drive the bearing platform to rotate after rotating, and the bearing platform can drive a plurality of groups of hangers to rotate after rotating, so that the objects on the hangers can be uniformly coated, when the half gear rotates to be not contacted with the driving gear, the half gear cannot drive the driving gear to rotate, and the bearing platform can be stopped for a period of time, so that the workpieces on the hangers can be coated better, and the technical problem that the coating quality is poor when the vacuum coating is not uniform is solved;

2. according to the utility model, by arranging the tooth wall, the driven gear, the belt, the driven turntable and the rotating disc, when the bearing table rotates, the driven gear which is positioned in the bearing table and extends to the outer side can rotate along with the bearing table, so that the driven gear can rotate under the action of the tooth wall, the driven gear can drive the driven turntable to rotate under the transmission action of the transmission turntable and the belt after rotating, the driven turntable drives the rotating disc to rotate in a direction opposite to the rotation direction of the bearing table, so that the rotating disc can drive the hanging frame to rotate reversely, the hanging frame can rotate while revolving, the uniformity of a coating film is further improved, the rotation of the hanging frame can also be stopped along with the stop of the rotation of the bearing table, and the quality of the coating film is further improved.

Drawings

FIG. 1 is an internal structural view of the present invention;

FIG. 2 is a gear drive configuration of the present invention;

FIG. 3 is a top view of the present invention;

FIG. 4 is an enlarged view of a portion of FIG. 3 according to the present invention;

fig. 5 is a partial enlarged view of the utility model at B in fig. 1.

In the figure: 1. coating equipment; 2. a bearing table; 3. a hanger; 4. a drive gear; 5. a half gear; 6. a power motor; 7. a tooth wall; 8. a belt; 9. a driven turntable; 10. rotating the disc; 11. a driven gear.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

The following describes an embodiment of the present invention based on its overall structure.

A vacuum coating structure is shown in figures 1-5 and comprises a coating device 1, a bearing platform 2 is arranged inside the coating device 1, a plurality of groups of hangers 3 are arranged on the end face of the bearing platform 2, a driving gear 4 connected with the bottom wall of the coating device 1 is connected with the bottom end of the bearing platform 2, a half gear 5 is connected with one side of the driving gear 4, a power motor 6 is connected with the bottom end of the half gear 5, the output end of the power motor 6 is fixedly connected with the half gear 5 through a coupler, the half gear 5 is connected with the driving gear 4 through gear meshing, the output end of the power motor 6 drives the half gear 5 to rotate, the driving gear 4 is driven to rotate through gear meshing after the half gear 5 rotates, a driven gear 11 is arranged below one side of the hanger 3, a tooth wall 7 is arranged on the inner wall of the coating device 1 and outside the driven gear 11, a belt 8 connected with the driven gear 11 is arranged above the driven gear 11, a driven turntable 9 is arranged on the inner side of the belt 8 and positioned in the bearing platform 2, the top end of the driven turntable 9 is connected with a rotating disc 10, the driven turntable 9 is fixedly connected with the rotating disc 10 through a coupler, gear teeth on the outer wall of a driven gear 11 are meshed with the tooth wall 7 through gears, and the driven gear 11 can rotate under the action of the tooth wall 7; the driven turntable 9 rotates to drive the rotary disk 10 to rotate.

Referring to fig. 3, the hanging rack 3 is rotatably connected to the bearing platform 2 through a bearing, so that the hanging rack 3 can rotate conveniently.

Referring to fig. 5, the driven gear 11 is in transmission connection with the driven turntable 9 through the transmission turntable and the belt 8, and the driven gear 11 drives the driven turntable 9 to rotate through the transmission turntable and the belt 8 after rotating, so as to realize power transmission.

The working principle of the utility model is as follows: firstly, a workpiece to be coated is placed on a hanger 3, then a power motor 6 is started, the output end of the power motor 6 drives a half gear 5 to rotate, when the half gear 5 rotates to be in contact with a driving gear 4, the half gear 5 drives the driving gear 4 to rotate through the gear meshing effect, the driving gear 4 drives a bearing platform 2 to rotate after rotating, the bearing platform 2 drives a plurality of groups of hangers 3 to rotate after rotating, so that the uniform coating of the object on the hanger 3 is realized, when the half gear 5 rotates to be not in contact with the driving gear 4, the half gear 5 cannot drive the driving gear 4 to rotate, and at the moment, the bearing platform 2 can be stopped for a period of time, so that the workpiece on the hanger 3 can be coated better, and the coating quality is improved;

when plummer 2 rotates, the driven gear 11 that is located plummer 2 inside and extends to the outside can follow plummer 2 and rotate, consequently driven gear 11 can rotate under the effect of tooth wall 7, driven gear 11 can drive driven turntable 9 through the transmission of transmission carousel and belt 8 after rotating and rotate, driven turntable 9 drives rolling disc 10 and is done the rotation opposite with plummer 2 rotation reversal, thereby make rolling disc 10 can drive the reverse rotation of stores pylon 3, stores pylon 3 carries out the rotation in the revolution, further homogeneity of coating film has been promoted, and the rotation of stores pylon 3 also can follow plummer 2 pivoted stagnation and the stagnation, further promotion the quality of coating film.

Although embodiments of the present invention have been shown and described, the present embodiments are merely illustrative of the present invention and are not intended to limit the present invention, and the described specific features, structures, materials or characteristics may be combined in any suitable manner in any one or more embodiments or examples, and those skilled in the art can make modifications, substitutions, variations, etc. of the embodiments as required without departing from the principle and spirit of the present invention, but within the scope of the claims of the present invention.

Claims

1. A vacuum coating structure comprises a coating device (1), and is characterized in that: a bearing table (2) is arranged inside the coating equipment (1), a plurality of groups of hanging frames (3) are arranged on the end surface of the bearing table (2), the bottom end of the bearing platform (2) is connected with a driving gear (4) connected with the bottom wall of the coating equipment (1), and one side of the driving gear (4) is connected with a half gear (5), the bottom end of the half gear (5) is connected with a power motor (6), a driven gear (11) is arranged below one side of the hanging rack (3), and the outer side of the driven gear (11) is provided with a tooth wall (7) on the inner wall of the film coating equipment (1), a belt (8) connected with the driven gear (11) is arranged above the driven gear (11), and the inboard of belt (8) is located internally mounted of plummer (2) and has driven turntable (9), the top of driven turntable (9) is connected with rolling disc (10).

2. The vacuum plating structure according to claim 1, wherein: the output end of the power motor (6) is fixedly connected with the half gear (5) through a coupler, and the half gear (5) is connected with the driving gear (4) through gear engagement.

3. The vacuum plating structure according to claim 1, wherein: the hanging rack (3) is rotatably connected with the bearing platform (2) through a bearing.

4. The vacuum plating structure according to claim 1, wherein: driven turntable (9) and rolling disc (10) pass through shaft coupling fixed connection, the teeth of a cogwheel of driven gear (11) outer wall is connected through gear engagement with tooth wall (7).

5. The vacuum plating structure according to claim 1, wherein: the driven gear (11) is in transmission connection with the driven turntable (9) through a transmission turntable and a belt (8).