JPS57143474A - Revolving jig for vacuum vapor deposition device - Google Patents

Revolving jig for vacuum vapor deposition device

Info

Publication number
JPS57143474A
JPS57143474A JP2679981A JP2679981A JPS57143474A JP S57143474 A JPS57143474 A JP S57143474A JP 2679981 A JP2679981 A JP 2679981A JP 2679981 A JP2679981 A JP 2679981A JP S57143474 A JPS57143474 A JP S57143474A
Authority
JP
Japan
Prior art keywords
disc
vapor
revolving
objects
magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2679981A
Other languages
Japanese (ja)
Other versions
JPS6059991B2 (en
Inventor
Yojiro Takabe
Shigetomi Fukuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2679981A priority Critical patent/JPS6059991B2/en
Publication of JPS57143474A publication Critical patent/JPS57143474A/en
Publication of JPS6059991B2 publication Critical patent/JPS6059991B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To decrease the dust production in a vacuum vessel, the impact during rotation and the defects of products by performing the driving power transmission of the rotating motion of a mounting plate for objects to be vapor- deposited by means of a gear-like disc and permanent magnets in the absence of contact. CONSTITUTION:As a motor 25 is run, a revolving shaft 22, that is, a gear-like desc 28 is revolved in an arrow 40 derection by means of gears 26, 27 and a holding frame 24. When the revolving motion is accomplished continuously, the disc 28 rotates continuously in an arrow 41 direction. Hence, a mounting plate 21 for objects to be vapor-deposited are revolved and rotated by means of the shaft 22 fixed to the disc 28. In this case, permanent magnets 29 are disposed on the revolving track by maintaining a micro-clearance from the teeth parts of the disc 28,and in order to decrease pulsation, the magnets 29 are fixed to a magnet fixing ring 30 by means of a set fitting 43 at the intervals approximately equal to the tooth pitches of the disc 28. Hence, the disc 28 and the magnets 29 are not in contact with each other, thus the production of the worn powder of vapor-depositing objects is decreased and the impact during rotation is decreased as well.
JP2679981A 1981-02-27 1981-02-27 Rotation jig for vacuum evaporation equipment Expired JPS6059991B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2679981A JPS6059991B2 (en) 1981-02-27 1981-02-27 Rotation jig for vacuum evaporation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2679981A JPS6059991B2 (en) 1981-02-27 1981-02-27 Rotation jig for vacuum evaporation equipment

Publications (2)

Publication Number Publication Date
JPS57143474A true JPS57143474A (en) 1982-09-04
JPS6059991B2 JPS6059991B2 (en) 1985-12-27

Family

ID=12203354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2679981A Expired JPS6059991B2 (en) 1981-02-27 1981-02-27 Rotation jig for vacuum evaporation equipment

Country Status (1)

Country Link
JP (1) JPS6059991B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190359A (en) * 1983-01-19 1984-10-29 マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド Vacuum evaporation device frame supporting equipment
JPS6255558U (en) * 1985-09-24 1987-04-06
US5635675A (en) * 1993-10-14 1997-06-03 Maruho Sangyo Kabushiki Kaisha Bendable protective tube for buried cables
JP2014535003A (en) * 2011-10-12 2014-12-25 フェローテック（ユーエスエー）コーポレイション Non-contact magnetic drive assembly with mechanical stop element
JP2022112860A (en) * 2021-01-22 2022-08-03 株式会社シンクロン Film deposition apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190359A (en) * 1983-01-19 1984-10-29 マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド Vacuum evaporation device frame supporting equipment
JPS6255558U (en) * 1985-09-24 1987-04-06
JPH0329321Y2 (en) * 1985-09-24 1991-06-21
US5635675A (en) * 1993-10-14 1997-06-03 Maruho Sangyo Kabushiki Kaisha Bendable protective tube for buried cables
JP2014535003A (en) * 2011-10-12 2014-12-25 フェローテック（ユーエスエー）コーポレイション Non-contact magnetic drive assembly with mechanical stop element
JP2022112860A (en) * 2021-01-22 2022-08-03 株式会社シンクロン Film deposition apparatus

Also Published As

Publication number Publication date
JPS6059991B2 (en) 1985-12-27

Similar Documents

Publication Publication Date Title
BE778715A (en) MOUNTING ARRANGEMENT FOR A SHAFT DRIVEN AT HIGH SPEED, ESPECIALLY BY AN ELECTRIC MOTOR
GB1497338A (en) Rotor of an electric motor
JPS57143474A (en) Revolving jig for vacuum vapor deposition device
CA2133380A1 (en) Drive System for Automatic Washing Machine
DE3561116D1 (en) Mechanical speed reducer
JPS525566A (en) Electric clock
JPS56104079A (en) Printing-type selecting mechanism
JPS57207570A (en) Article holding jig
GB1465570A (en) Balancing of rotating bodies
DE3371400D1 (en) Orbital speed reducer with compensation coupling
GB1346071A (en) Clock second indicator
GB1115337A (en) Method and means of feeding blanks to machine tools
JPS56123771A (en) Convertor for electric machine for minute displacement
FR2367542A1 (en) Vibration generator system using eccentric mass - has permanent contact with its roller at any amplitude to provide shockless operation
US3625180A (en) Evaporation sources
CN215560617U (en) Vacuum coating structure
JPS5743049A (en) Transfer driving unit
JPS56112887A (en) Magnetoforce-rotating device
US3548669A (en) Intermittent drive
JPS5596261A (en) Grinder
GB1232140A (en)
JPS5321654A (en) Motor driven tooth brush
SU448122A1 (en) Device for finishing flat surfaces
JPS55133647A (en) Motor assembly for motor-driven camera
JPS5541911A (en) Vapor deposition apparatus