CN111646182A - Impurity removing device for ceramic target production and processing - Google Patents
Impurity removing device for ceramic target production and processing Download PDFInfo
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- CN111646182A CN111646182A CN202010429130.2A CN202010429130A CN111646182A CN 111646182 A CN111646182 A CN 111646182A CN 202010429130 A CN202010429130 A CN 202010429130A CN 111646182 A CN111646182 A CN 111646182A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 47
- 239000012535 impurity Substances 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000463 material Substances 0.000 claims abstract description 21
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000001934 delay Effects 0.000 claims 1
- 239000013077 target material Substances 0.000 abstract description 14
- 238000004140 cleaning Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000003139 buffering effect Effects 0.000 description 5
- 238000007599 discharging Methods 0.000 description 5
- 238000007790 scraping Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses an impurity removing device for producing and processing ceramic target materials, which comprises a bottom plate, wherein two groups of first vertical plates are arranged at the top part of the bottom plate close to the left side, and the number of each group of the first vertical plates is two, the parts, close to the top, of the sides, close to the two first vertical plates in the same group are respectively provided with a first bearing, and the inner rings of the two first bearings in each group are fixedly connected with a rotating shaft, a first rotating roller is arranged between the two first vertical plates in the same group, and the front and back ends of the two first rotating rollers are respectively fixedly connected with one end of each group of the two rotating shafts close to each other, the ceramic target can be conveyed by the mutual matching of the first driving motor, the first rotating roller and the first conveyor belt, and the setting of disc, slow material pole and cylinder can guarantee that ceramic target carries out orderly interval transport, the subsequent edulcoration of being convenient for to can reach the efficient and good characteristics of result of use of edulcoration.
Description
Technical Field
The invention relates to the technical field of target production, in particular to an impurity removing device for ceramic target production and processing.
Background
The coating target is a sputtering source which forms various functional films on a substrate by sputtering through magnetron sputtering, multi-arc ion plating or other types of coating systems under proper process conditions. According to the difference of material, the target can be divided into metal target and ceramic target etc. in ceramic target production process, its surface produces impurity and dust, in order to guarantee the target quality, needs carry out the edulcoration, but prior art's edulcoration device edulcoration is not thorough, takes place easily to remain, greatly reduced edulcoration efficiency, the result of use is poor, for this reason, we propose an edulcoration device for ceramic target production and processing.
Disclosure of Invention
The invention aims to overcome the defects of low impurity removal efficiency, poor use effect and the like in the prior art, and provides an impurity removal device for producing and processing ceramic targets. The impurity removing device for ceramic target production and processing has the characteristics of high impurity removing efficiency, good using effect and the like.
In order to achieve the purpose, the invention provides the following technical scheme: an impurity removing device for producing and processing ceramic target materials comprises a bottom plate, wherein two groups of first vertical plates are arranged at the position, close to the left side, of the top of the bottom plate, the number of the first vertical plates in each group is two, first bearings are respectively arranged at the positions, close to the top, of the sides, close to the two first vertical plates in the same group, of the two first vertical plates, the inner rings of the two first bearings in each group are fixedly connected with rotating shafts, first rotating rollers are respectively arranged between the two first vertical plates in the same group, the front ends and the rear ends of the two first rotating rollers are respectively fixedly connected with the ends, close to the two rotating shafts in each group, the rear wall of the first vertical plate at the rear side of the first rotating roller at the right side is fixedly connected with a first driving motor through two thin rods, the output shaft of the first driving motor is fixedly connected with the rear end of the rotating shaft at the rear side, and the outer, the bottom plate top is close to middle department and installs two curb plates, and sets up around two curb plates are, first conveyer belt right side is equipped with the guide rail, and the antetheca and the back wall of guide rail are close to right side department and are close to left side department fixed connection with one side that two curb plates are close to, two fixedly connected with washs the rail between the curb plate, and washs the right side fixed connection of rail left side and guide rail, wash rail right side fixedly connected with ejection of compact rail, and the antetheca and the back wall of ejection of compact rail are close to left side department and are close to right side department fixed connection with one side that two curb plates are close to, the ejection of compact rail bottom is close to right side department and is equipped with the.
Preferably, the bottom plate top is close to right side department and installs two sets of risers, and the quantity of every group riser is two settings, is located same two a set of one side that the second riser is close to mutually installs the second bearing near top department respectively, and two second bearing inner circles equal fixedly connected with pivots in every group, is located same two a set of all be equipped with the second live-rollers between the second riser, and the front and back both ends of two second live-rollers respectively with the one end fixed connection that two pivots in every group are close to, two the outer wall and the second conveyer belt swing joint of second live-rollers are located left the transmission is connected with the belt between the pivot on the second bearing of second live-rollers rear side and the pivot on the first live-rollers rear side on being located the right side.
Preferably, the rear side of first conveyer belt is equipped with the U-shaped board, and two straight-bars of fixedly connected with between U-shaped board bottom and the bottom plate top, a plurality of evenly distributed's third bearing is all installed to U-shaped board inner chamber top and inner chamber bottom, and the equal fixedly connected with pivot of a plurality of third bearing inner circle, be equipped with a plurality of evenly distributed's cylinder in the U-shaped board, and the top and the bottom of a plurality of cylinder respectively with be located the top and the one end fixed connection that a plurality of pivot of below is close to mutually.
Preferably, the front side of first conveyer belt is equipped with the L shaped plate, and L shaped plate bottom and bottom plate top fixed connection, the fourth bearing is installed at L shaped plate top, and fourth bearing inner circle fixedly connected with pivot, pivot top fixedly connected with disc, and four sides all have seted up the arc recess all around the disc.
Preferably, a fifth bearing is installed at the position, close to the left side, of the top of the disc, a rotating shaft is fixedly connected to the inner ring of the fifth bearing, and a material buffering rod is fixedly connected to the top end of the rotating shaft.
Preferably, two be equipped with the dwang between the curb plate, two the sixth bearing is installed respectively to the one side that the curb plate is close to mutually, and both ends respectively with two sixth bearing inner circle fixed connection around the dwang, a plurality of evenly distributed's helical blade is fixedly connected with on the dwang outer wall.
Preferably, two diaphragms of fixedly connected with between the curb plate, and two diaphragms are setting up from top to bottom, two the diaphragm is close to one side and is close to two mounting panels of two fixedly connected with of left side punishment difference fixedly connected with scraper blades, and two diaphragms are close to one side mutually and are close to two mounting panels of two right side punishments difference, two one side that the mounting panel is close to is equipped with the brush respectively.
Compared with the prior art, the invention has the beneficial effects that:
1. in the technical scheme, the first driving motor, the first rotating roller and the first conveying belt are matched with each other, so that the ceramic target can be conveyed, and the arrangement of the disc, the material buffering rod and the roller can ensure that the ceramic target is conveyed at regular intervals, so that subsequent impurity removal is facilitated, and the impurity removal efficiency and the use effect are effectively improved;
2. in the technical scheme, through the mutual matching of the second driving motor, the rotating rod, the helical blade, the material guide rail, the cleaning rail, the scraping plate and the brush, the impurity removal of the ceramic target can be realized, and the impurities and dust on the surface of the ceramic target can be thoroughly removed, so that the impurity removal effect is better;
3. in this technical scheme, through mutually supporting of first driving motor, play material rail, second live-rollers and second conveyer belt, can realize the quick ejection of compact of the ceramic target after the edulcoration, improve discharging efficiency to can reach the efficient and excellent characteristics of result of use of edulcoration.
Drawings
FIG. 1 is a diagram of the original structure of the present invention.
Fig. 2 is a top view of the disk of fig. 1.
Fig. 3 is a plan view of the first driving motor of fig. 1.
Fig. 4 is a top view of the guide rail of fig. 1.
Reference numbers in the figures: 1. a base plate; 2. a first vertical plate; 3. a first rotating roller; 4. a first conveyor belt; 5. an L-shaped plate; 6. a disc; 7. a material buffering rod; 8. a U-shaped plate; 9. a drum; 10. a material guide rail; 11. a squeegee; 12. a brush; 13. cleaning the rail; 14. discharging the material rail; 15. a side plate; 16. a helical blade; 17. a first drive motor; 18. a second vertical plate; 19. a second rotating roller; 20. a second conveyor belt; 21. a second drive motor.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: an impurity removing device for producing and processing ceramic target materials comprises a base plate 1, wherein two groups of first vertical plates 2 are arranged at the position, close to the left side, of the top of the base plate 1, the number of the first vertical plates 2 in each group is two, first bearings are respectively arranged at the positions, close to the top, of the sides, close to the two first vertical plates 2 in the same group, of the two first vertical plates 2 in each group, inner rings of the two first bearings in each group are fixedly connected with rotating shafts, a first rotating roller 3 is arranged between the two first vertical plates 2 in the same group, the front end and the rear end of each first rotating roller 3 are respectively fixedly connected with one end, close to the two rotating shafts in each group, the rear wall of the first vertical plate 2 at the rear side of the first rotating roller 3 at the right side is fixedly connected with a first driving motor 17 through two thin rods, the output shaft of the first driving motor 17 is fixedly connected with the rear end of the rotating shaft at the rear, the rear side of the first conveyor belt 4 is provided with a U-shaped plate 8, two straight rods are fixedly connected between the bottom of the U-shaped plate 8 and the top of the bottom plate 1, a plurality of uniformly distributed third bearings are respectively arranged at the top and the bottom of the inner cavity of the U-shaped plate 8, a plurality of rotating shafts are fixedly connected with inner rings of the third bearings, a plurality of uniformly distributed rollers 9 are arranged in the U-shaped plate 8, the top ends and the bottom ends of the rollers 9 are respectively fixedly connected with one ends, close to the rotating shafts, above and below the rollers, the front side of the first conveyor belt 4 is provided with an L-shaped plate 5, the bottom of the L-shaped plate 5 is fixedly connected with the top of the bottom plate 1, the top of the L-shaped plate 5 is provided with a fourth bearing, the inner ring of the fourth bearing is fixedly connected with a rotating shaft, the top end of the rotating shaft is fixedly connected with, the rotating shaft is fixedly connected to the inner ring of the fifth bearing, the material buffering rod 7 is fixedly connected to the top end of the rotating shaft, ceramic target materials can be conveyed through the mutual matching of the first driving motor 17, the first rotating roller 3 and the first conveying belt 4, the arrangement of the disc 6, the material buffering rod 7 and the roller 9 can ensure that the ceramic target materials are conveyed at regular intervals, subsequent impurity removal is facilitated, and the impurity removal efficiency and the use effect are effectively improved, two side plates 15 are installed at the top of the bottom plate 1 near the middle, the two side plates 15 are arranged in the front and back direction, the material guiding rail 10 is arranged at the right side of the first conveying belt 4, the front wall and the rear wall of the material guiding rail 10 near the right side are fixedly connected with the left side near the two side plates 15, the cleaning rail 13 is fixedly connected between the two side plates 15, the left side of the cleaning rail 13 is fixedly connected with the right side of the material guiding, the six bearings are respectively arranged on the adjacent sides of the two side plates 15, the front end and the rear end of the rotating rod are respectively fixedly connected with the inner rings of the two sixth bearings, the outer wall of the rotating rod is fixedly connected with a plurality of uniformly distributed helical blades 16, the two transverse plates are fixedly connected between the two side plates 15 and arranged up and down, the scraping plates 11 are respectively fixedly connected at the positions, adjacent to the left sides, of the two transverse plates, the two mounting plates are respectively fixedly connected at the positions, adjacent to the right sides, of the two transverse plates, the hairbrushes 12 are respectively arranged at the adjacent sides of the two mounting plates, and through the mutual matching of the second driving motor 21, the rotating rod, the helical blades 16, the guide rail 10, the cleaning rail 13, the scraping plates 11 and the hairbrushes 12, the impurity removal of the ceramic target can be realized, the impurities and dust on the surface of the ceramic target can be thoroughly removed, the impurity removal effect of, and the front wall and the rear wall of the discharging rail 14 are close to the left side and are fixedly connected with one side, close to the right side, of the two side plates 15, the second conveyor belt 20 is arranged at the bottom of the discharging rail 14, two groups of second vertical plates 18 are arranged at the top of the bottom plate 1 close to the right side, the number of the second vertical plates 18 in each group is two, the second bearings are respectively arranged at the positions, close to the tops, of the two second vertical plates 18 in the same group, the inner rings of the two second bearings in each group are fixedly connected with rotating shafts, second rotating rollers 19 are arranged between the two second vertical plates 18 in the same group, the front ends and the rear ends of the two second rotating rollers 19 are respectively and fixedly connected with one ends, close to the two rotating shafts in each group, the outer walls of the two second rotating rollers 19 are movably connected with the second conveyor belt 20, and a leather is in transmission connection between the rotating shaft on the second bearing at the rear side of the left second rotating roller 19 and the rotating shaft on the first The area, through mutually supporting of first driving motor 17, ejection of compact rail 14, second live-rollers 19 and second conveyer belt 20, can realize the quick ejection of compact of the ceramic target after the edulcoration, improved discharging efficiency to can reach the efficient and good characteristics of result of use of edulcoration, wherein first driving motor 17 and second driving motor 21 have control switch through external power cord electric connection respectively.
The working principle is as follows: in the technical scheme, the first driving motor 17 is firstly started, the two first rotating rollers 3 are driven to rotate by the first driving motor 17, the first rotating rollers 3 drive the first conveyor belt 4 to rotate, so that the ceramic target is conveyed, when the ceramic target moves into the left arc-shaped groove on the disc 6 in the conveying process, the disc 6 rotates along with the ceramic target by the driving of the first conveyor belt 4, the material slowing rod 7 can slow down the conveying speed of the rear ceramic target, when the disc 6 rotates a quarter circle, the rear ceramic target moves into the front arc-shaped groove, the ceramic target in the left arc-shaped groove moves to the right for a distance by the rotation of the disc 6 and the conveying of the first conveyor belt 4, so that the distance between two adjacent ceramic targets is increased, and the ceramic target is prevented from being excessively densely conveyed, the subsequent impurity removal is not facilitated, the roller 9 on the U-shaped plate 8 can ensure that the ceramic target material does not deviate when moving along with the disc 6 in the arc-shaped groove, so that the ceramic target material can be conveyed orderly and stably, then the second driving motor 21 is started, the helical blade 16 is driven to rotate by the second driving motor 21, the helical blade 16 drives the ceramic target material on the material guide rail 10 to enter the cleaning rail 13 by rotating, one side, close to the scraping plates 11 above and below the cleaning rail 13, is contacted with the top and the bottom of the ceramic target material in the conveying process of the ceramic target material to scrape the ceramic target material for impurity removal, the brush 12 on the right sides of the two scraping plates 11 further cleans the top and the bottom of the ceramic target material, so that the impurity removal is more thorough, the impurity removal efficiency is effectively improved, the ceramic target material after impurity removal is stirred by the helical blade 16 and moves to the second conveyor belt 20 by the assistance of the material discharge rail 14, and the first driving motor 17 drives, and the second rotating roller 19 drives the second conveyor belt 20 to rotate, and drives the ceramic target material after impurity removal to discharge rapidly, so that the characteristics of high impurity removal efficiency and good use effect can be achieved.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a ceramic target is edulcoration device for production and processing, includes bottom plate (1), its characterized in that: two groups of first vertical plates (2) are arranged at the position, close to the left side, of the top of the bottom plate (1), the number of the first vertical plates (2) in each group is two, first bearings are respectively arranged at the positions, close to the top, of the sides, close to the two first vertical plates (2) in the same group, of the two first bearings, rotating shafts are fixedly connected to the inner rings of the two first bearings in each group, a first rotating roller (3) is arranged between the two first vertical plates (2) in the same group, the front end and the rear end of each first rotating roller (3) are respectively fixedly connected with the end, close to the two rotating shafts in each group, the rear wall of the first vertical plate (2) at the rear side of the first rotating roller (3) at the right side is fixedly connected with a first driving motor (17) through two thin rods, the output shaft of the first driving motor (17) is fixedly connected with the rear end of the rotating shaft at the rear side, and the outer walls of the two first rotating rollers (3, bottom plate (1) top is close to middle department and installs two curb plates (15), and sets up around two curb plates (15), first conveyer belt (4) right side is equipped with guide rail (10), and the antetheca and the back wall of guide rail (10) are close to right side department and one side that two curb plates (15) are close to mutually and are close to left side department fixed connection, two fixedly connected with washs rail (13) between curb plate (15), and washs the right side fixed connection of rail (13) left side and guide rail (10), wash rail (13) right side fixedly connected with material discharge rail (14), and the antetheca and the back wall of material discharge rail (14) are close to left side department and one side that two curb plates (15) are close to mutually and are close to right side department fixed connection, material discharge rail (14) bottom is close to right side department and is equipped with second conveyer belt (20).
2. The impurity removing device for producing and processing the ceramic target according to claim 1, wherein: two groups of second vertical plates (18) are arranged at the top of the bottom plate (1) close to the right side, and the number of each group of the second vertical plates (18) is two, a second bearing is respectively arranged at the position close to the top of one side close to the two second vertical plates (18) of the same group, and the inner rings of the two second bearings in each group are fixedly connected with a rotating shaft, a second rotating roller (19) is arranged between the two second vertical plates (18) in the same group, and the front end and the rear end of the two second rotating rollers (19) are fixedly connected with one end, close to the two rotating shafts in each group, of the two second rotating rollers (19), the outer wall of each second rotating roller (19) is movably connected with the corresponding second conveying belt (20), and a belt is in transmission connection between the rotating shaft on the second bearing at the rear side of the second rotating roller (19) on the left side and the rotating shaft on the first bearing at the rear side of the first rotating roller (3) on the right side.
3. The impurity removing device for producing and processing the ceramic target according to claim 1, wherein: the rear side of first conveyer belt (4) is equipped with U-shaped plate (8), and two straight-bars of fixedly connected with between U-shaped plate (8) bottom and bottom plate (1) top, a plurality of evenly distributed's third bearing is all installed to U-shaped plate (8) inner chamber top and inner chamber bottom, and the equal fixedly connected with pivot of a plurality of third bearing inner circle, be equipped with a plurality of evenly distributed's cylinder (9) in U-shaped plate (8), and the one end fixed connection that the top and the bottom of a plurality of cylinder (9) are close to mutually with a plurality of pivot that is located top and below respectively.
4. The impurity removing device for producing and processing the ceramic target according to claim 1, wherein: the front side of first conveyer belt (4) is equipped with L shaped plate (5), and L shaped plate (5) bottom and bottom plate (1) top fixed connection, the fourth bearing is installed at L shaped plate (5) top, and fourth bearing inner circle fixedly connected with pivot, pivot top fixedly connected with disc (6), and four sides all around of disc (6) have all seted up the arc recess.
5. The impurity removing device for producing and processing the ceramic target according to claim 4, wherein: the disc (6) top is close to left side department and installs the fifth bearing, and fifth bearing inner circle fixedly connected with pivot, pivot top fixedly connected with delays material pole (7).
6. The impurity removing device for producing and processing the ceramic target according to claim 1, wherein: two be equipped with the dwang between curb plate (15), two the sixth bearing is installed respectively to curb plate (15) one side that is close to mutually, and both ends respectively with two sixth bearing inner circle fixed connection around the dwang, fixedly connected with a plurality of evenly distributed's helical blade (16) on the dwang outer wall.
7. The impurity removing device for producing and processing the ceramic target according to claim 6, wherein: two diaphragms of fixedly connected with between curb plate (15), and two diaphragms are setting up from top to bottom, two the diaphragm is close to one side and is close to two mounting panels of fixedly connected with respectively of left side punishment that do not, and two diaphragms are close to one side mutually and are close to two mounting panels of two respectively of right side punishment, two one side that the mounting panel is close to mutually is equipped with brush (12) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010429130.2A CN111646182A (en) | 2020-05-20 | 2020-05-20 | Impurity removing device for ceramic target production and processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010429130.2A CN111646182A (en) | 2020-05-20 | 2020-05-20 | Impurity removing device for ceramic target production and processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111646182A true CN111646182A (en) | 2020-09-11 |
Family
ID=72342128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010429130.2A Withdrawn CN111646182A (en) | 2020-05-20 | 2020-05-20 | Impurity removing device for ceramic target production and processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111646182A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112536249A (en) * | 2020-11-11 | 2021-03-23 | 朱龙勇 | Automatic processing production line for engineering plastic surface |
-
2020
- 2020-05-20 CN CN202010429130.2A patent/CN111646182A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112536249A (en) * | 2020-11-11 | 2021-03-23 | 朱龙勇 | Automatic processing production line for engineering plastic surface |
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Application publication date: 20200911 |