CN208980791U - It is a kind of can various dimensions rotation physical vapor deposition technique fitting device - Google Patents
It is a kind of can various dimensions rotation physical vapor deposition technique fitting device Download PDFInfo
- Publication number
- CN208980791U CN208980791U CN201821831574.3U CN201821831574U CN208980791U CN 208980791 U CN208980791 U CN 208980791U CN 201821831574 U CN201821831574 U CN 201821831574U CN 208980791 U CN208980791 U CN 208980791U
- Authority
- CN
- China
- Prior art keywords
- axis
- sub
- main shaft
- vapor deposition
- drive module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model discloses it is a kind of can various dimensions rotation physical vapor deposition technique fitting device, including main shaft (1), more than one sub- axis (2), drive module one (3), drive module two (4) and motor, the main shaft (1) is connect by drive module one (3) with motor drive, and the main shaft (1) rotates around the axis of main shaft, the sub- axis (2) is sequentially connected by drive module two (4) and main shaft (1), and the sub- axis (2) rotates around the axis of sub- axis, the axis of the sub- axis (2) and the axis of main shaft (1) are forming angle, more than one branch is provided on the sub- axis (2), the axis of the branch and the axis of sub- axis (2) are forming angle.The utility model can greatly improve production efficiency, the performance of coating and presentation quality to solve the problems, such as that the PVD thickness of coating in many types of face of product is partially thin by the rotation for carrying out 360 degree around 2 different axis.
Description
Technical field
The invention belongs to the tooling of physical vapor deposition (PVD) technique, which provides for workpiece is supported and fixed, so as to
PVD coating is realized on workpiece.
Background technique
Existing technology is the tooling of fixed tooling or single-shaft-rotation.
The technology can have any problem to the product in many types of face, portioned product surface PVD coating, thickness of coating partially it is thin be not achieved want
It asks, often all crosses increase workpiece and discharge distance in tooling to solve the problems, such as many types of face PVD coating, discharge the increase of distance, anticipate
Taste the unit time production piece count reduce, production efficiency reduce.
Utility model content
Purpose of utility model: in order to overcome the deficiencies in the prior art, the utility model provides one kind can various dimensions
The fitting device of the physical vapor deposition technique of rotation, the rotation which carries out 360 degree by surrounding 2 different axis,
To solve the problems, such as that the PVD thickness of coating in many types of face of product is partially thin, production efficiency, the performance of coating and appearance can be greatly improved
Quality.
Technical solution: to achieve the above object, the technical solution adopted in the utility model are as follows:
It is a kind of can various dimensions rotation physical vapor deposition technique fitting device, including main shaft (1), more than one son
Axis (2), drive module one (3), drive module two (4) and motor, the main shaft (1) pass through drive module one (3) and motor
Transmission connection, and the main shaft (1) is rotated around the axis of main shaft, the sub- axis (2) passes through drive module two (4) and main shaft (1)
Transmission connection, and the sub- axis (2) is rotated around the axis of sub- axis, the axis of the axis and main shaft (1) of the sub- axis (2) is being formed
Angle, is provided with more than one branch on the sub- axis (2), and the axis of the axis of the branch and sub- axis (2) is pressed from both sides being formed
Angle.
Further: further including fixture, the fixture is arranged in branch for fixing workpiece, the fixture.
Further: further including workbench, the main shaft (1) is installed on the workbench by bearing.
Preferred: the drive module one (3), drive module two (4) are gear assembly.
Preferred: the sub- axis (2) is 6.
Preferred: the sub- axis (2) is arranged in pairs, and mutually sub- axis in a pair is symmetrically set on main shaft (1).
It is preferred: described to branch into 4.
Preferred: the branch is arranged in pairs, and mutually branch in a pair is symmetrically set on sub- axis (2).
The utility model compared with prior art, has the advantages that
Workpiece is placed on sub- axis, and as main shaft, sub- axis carry out 2 axis 360 degree rotations, product needs the type face of PVD
Without dead angle, increases workpiece and discharge quantity.
Many types of face workpiece, surface PVD coating is uniform, and the PVD coating performance of workpiece is promoted.
Many types of face workpiece, surface PVD coating is uniform, and the presentation quality of the PVD coating of workpiece gets a promotion.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of drive module one；
Fig. 3 is the structural schematic diagram of drive module two.
Specific embodiment
In the following with reference to the drawings and specific embodiments, the utility model is furtherd elucidate, it should be understood that these examples are only used for
Bright the utility model rather than limitation the scope of the utility model, after having read the utility model, those skilled in the art
Member falls within the application range as defined in the appended claims to the modification of the various equivalent forms of the utility model.
It is a kind of can various dimensions rotation physical vapor deposition technique fitting device, as shown in Figure 1-3, include main shaft 1, one
A above sub- axis 2, drive module 1, drive module 24 and motor, the main shaft 1 pass through drive module 1 and motor
Transmission connection, and the main shaft 1 is rotated around the axis of main shaft, drive module 1 is gear assembly, each tooth in gear assembly
Wheel is connected by meshing transmission together, servo motor starting, drive gear assemblies (drive module 1), so that main shaft 1 is with certain
Speed is rotated around main-shaft axis 360.The sub- axis 2 is sequentially connected by drive module 24 and main shaft 1, and drive module 24 is
Gear assembly, each gear in gear assembly are connected by meshing transmission together, the rotation of main shaft 1, drive gear assemblies (driving
Module 2 4) so that sub- axis 2 is rotated with certain speed around sub- 2 axis 360 of axis, the axis of the axis of the sub- axis 2 and main shaft 1
Line is forming angle, is provided with more than one branch on the sub- axis 2, and in the present embodiment, the sub- axis 2 is 6, described
Sub- axis 2 is arranged in pairs, and mutually sub- axis in a pair is symmetrically set on main shaft 1, described to branch into 4, in the utility model
Another embodiment in, the sub- axis 2 be 1, described to branch into 1, the branch is arranged in pairs, mutually branch's phase in a pair
It is mutually symmetricly set on sub- axis 2, the axis of the axis of the branch and sub- axis 2 is forming angle.Workpiece is placed on sub- axis, with
Main shaft, sub- axis, carry out 2 axis, 360 degree of composite rotatings, product needs PVD type face without dead angle, while can increase workpiece row
Put quantity.
It further include fixture, the fixture is arranged in branch for fixing workpiece, the fixture.
It further include workbench, the main shaft 1 is installed on the workbench by bearing.
Specific implementation process:
1) according to the workpiece size and shape of PVD plated film, gather the working size of pvd chamber body, carry out sunykatuib analysis, determine
The quantity of sub- axis and sub- axis put piece count, guarantee not interfere mutually in main shaft, sub- axis rotary course.
2) workpiece is placed on the fixture on sub- axis, fixes workpiece, is placed and is fallen off in rotary course.
3) tooling for overworking workpiece drives electric motor starting after detecting workpiece, main shaft, sub- axis are revolved into pvd chamber body
Turn, PVD process starts to produce plated film.With main shaft, sub- axis, 2 axis, 360 degree of composite rotatings are carried out, product needs PVD type face
Without dead angle, while workpiece discharge quantity can be increased.
4) after PVD process, tooling is stopped rotating, and workpiece lower part is examined, into subsequent technique.
The above is only the preferred embodiment of the utility model, it should be pointed out that: for the common skill of the art
For art personnel, without departing from the principle of this utility model, several improvements and modifications can also be made, these improve and
Retouching also should be regarded as the protection scope of the utility model.
Claims (8)
1. one kind can various dimensions rotation physical vapor deposition technique fitting device, it is characterised in that: including main shaft (1), one
A above sub- axis (2), drive module one (3), drive module two (4) and motor, the main shaft (1) pass through drive module one
(3) it is connect with motor drive, and the main shaft (1) is rotated around the axis of main shaft, the sub- axis (2) passes through drive module two (4)
It is sequentially connected with main shaft (1), and the sub- axis (2) is rotated around the axis of sub- axis, axis and main shaft (1) of the sub- axis (2)
Axis is forming angle, is provided with more than one branch, the axis of the axis of the branch and sub- axis (2) on the sub- axis (2)
Line is forming angle.
2. according to claim 1 can various dimensions rotation physical vapor deposition technique fitting device, it is characterised in that: also
Including fixture, the fixture is arranged in branch for fixing workpiece, the fixture.
3. according to claim 1 can various dimensions rotation physical vapor deposition technique fitting device, it is characterised in that: also
Including workbench, the main shaft (1) is installed on the workbench by bearing.
4. according to claim 1 can various dimensions rotation physical vapor deposition technique fitting device, it is characterised in that: institute
State drive module one (3), drive module two (4) is gear assembly.
5. according to claim 1 can various dimensions rotation physical vapor deposition technique fitting device, it is characterised in that: institute
Stating sub- axis (2) is 6.
6. according to claim 1 can various dimensions rotation physical vapor deposition technique fitting device, it is characterised in that: institute
It states sub- axis (2) to be arranged in pairs, mutually sub- axis in a pair is symmetrically set on main shaft (1).
7. according to claim 1 can various dimensions rotation physical vapor deposition technique fitting device, it is characterised in that: institute
It states and branches into 4.
8. according to claim 1 can various dimensions rotation physical vapor deposition technique fitting device, it is characterised in that: institute
It states branch to be arranged in pairs, mutually branch in a pair is symmetrically set on sub- axis (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821831574.3U CN208980791U (en) | 2018-11-08 | 2018-11-08 | It is a kind of can various dimensions rotation physical vapor deposition technique fitting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821831574.3U CN208980791U (en) | 2018-11-08 | 2018-11-08 | It is a kind of can various dimensions rotation physical vapor deposition technique fitting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208980791U true CN208980791U (en) | 2019-06-14 |
Family
ID=66790523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821831574.3U Expired - Fee Related CN208980791U (en) | 2018-11-08 | 2018-11-08 | It is a kind of can various dimensions rotation physical vapor deposition technique fitting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208980791U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111041445A (en) * | 2019-12-26 | 2020-04-21 | 北京大学深圳研究院 | Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts |
-
2018
- 2018-11-08 CN CN201821831574.3U patent/CN208980791U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111041445A (en) * | 2019-12-26 | 2020-04-21 | 北京大学深圳研究院 | Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208008886U (en) | A kind of concentric double-shaft control three-dimensional rotation and the variable rotating mechanism of position rotating | |
| CN208980791U (en) | It is a kind of can various dimensions rotation physical vapor deposition technique fitting device | |
| CN205686717U (en) | A kind of continuous automatic indexing mechanism | |
| CN110000682B (en) | Single-transmission planetary polishing device | |
| CN207593508U (en) | Intelligent multiplexing section curved surface polishing machine | |
| CN210704293U (en) | Transmission mechanism of fluid polishing machine | |
| CN105118701B (en) | Automatically dipping machine is contained | |
| CN205290938U (en) | High efficiency robot | |
| CN209036174U (en) | A kind of deburring machine hairbrush rotary installing mechanism | |
| CN208175950U (en) | A kind of oyster peptide pressed candy production process high-efficiency enclosed formula seed-coating machine | |
| CN201826009U (en) | Planetary rotating mechanism used for coating film for curved surface reflector | |
| CN205111598U (en) | Multistation workpiece motion device | |
| CN208632638U (en) | A kind of planetary three-stage cylindrical gear insert clamp device | |
| CN209081976U (en) | A kind of tool section surface deposition plating apparatus | |
| CN110013817A (en) | A kind of atomic level powder modification equipment | |
| CN206925183U (en) | One kind intersects combined type U-tube solar heat exchanger bending machine | |
| CN207276704U (en) | A kind of process tool face coat nano-spray hanger device | |
| CN209081967U (en) | A kind of more revolving speed bidirectional rotation rack surface deposition plating apparatus | |
| CN112251730A (en) | Non-contact revolution and rotation rotating frame system for vacuum coating | |
| CN211339671U (en) | Target platform for pulse laser deposition device with high target utilization rate | |
| CN209998944U (en) | single-transmission planetary polishing device | |
| CN207872962U (en) | A kind of gap spring spring coiling machine | |
| CN205478309U (en) | Low noise vacuum pump | |
| CN206738502U (en) | A kind of transmission mechanism | |
| CN204697817U (en) | A kind of labyrinth type fish scale processor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190614 Termination date: 20201108 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |