CN215799864U - Vacuum coating monomer machine work piece frame - Google Patents
Vacuum coating monomer machine work piece frame Download PDFInfo
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- CN215799864U CN215799864U CN202121960014.XU CN202121960014U CN215799864U CN 215799864 U CN215799864 U CN 215799864U CN 202121960014 U CN202121960014 U CN 202121960014U CN 215799864 U CN215799864 U CN 215799864U
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Abstract
The application relates to the technical field of film plating machines, in particular to a workpiece rack of a vacuum film plating single machine, which has the technical scheme that: the central shaft gear is meshed with a plurality of planet shaft gears, and the planet shafts which are rotatably connected to the main turntable are coaxially fixed on the planet shaft gears; the aim of improving the coating precision of the plate-shaped workpiece is fulfilled.
Description
Technical Field
The application relates to the technical field of film plating machines, in particular to a workpiece frame of a vacuum film plating single machine.
Background
Vacuum coating is a common coating technique in the photovoltaic industry of touch panels, solar cells, etc. and in the semiconductor industry, and a vacuum coating platform is a common device used for vacuum coating on workpieces.
A vacuum coating platform recorded in the related art comprises a coating chamber, a workpiece frame and a coating assembly 12, wherein the workpiece frame and the coating assembly are arranged in the coating chamber; referring to fig. 1, the workpiece carrier includes a base and a planetary gear train disposed on the base, wherein a plurality of planetary shaft gears 5 in the planetary gear train are disposed and uniformly distributed around the axial direction of a central shaft gear 3; a plurality of coating assemblies 12 are arranged on the inner wall of the coating chamber, and each coating assembly 12 comprises a cathode 121 and a target 122 which are connected with each other.
When the workpieces need to be coated, a disc-shaped workpiece support is coaxially arranged on each planetary shaft gear 5, a plurality of workpieces are arranged on each workpiece support along the circumferential direction, and the plurality of workpieces on each planetary shaft gear 5 rotate around the central shaft gear 3 and the axis of the planetary shaft gear 5 at the same time until each workpiece is coated.
When the plate-shaped workpieces need to be coated, each workpiece is vertically installed and fixed on the corresponding planet shaft gear 5 through a plate-shaped part clamp, and the corresponding workpiece is driven to rotate around the axis of the central shaft gear 3 in the process that the planet shaft gear 5 revolves around the central shaft gear 3; in the process that the planet shaft gear 5 rotates around the axis of the planet shaft gear, the corresponding workpiece is driven to rotate around the axis of the planet shaft gear 5; until the two surfaces of each plate-shaped workpiece are coated.
In view of the above-mentioned related art solutions, the inventors found that: when a plate-shaped workpiece is coated by using the vacuum coating platform, the workpiece is thin and wide, so that the central shaft is far away from the target 122 in the rotation process of the workpiece, and the distance between the positions at two sides of the workpiece and the target 122 is changed greatly and continuously, so that the coating precision of the surface of the workpiece is relatively low.
SUMMERY OF THE UTILITY MODEL
In order to improve the coating precision of a plate-shaped workpiece, the application provides a workpiece frame of a vacuum coating single machine.
The application provides a vacuum coating monomer machine work piece frame adopts following technical scheme:
a vacuum coating single machine workpiece holder comprises a main rotary table, a main disc driving mechanism, a central shaft gear and a central driving mechanism, wherein the main rotary table is horizontally arranged, the main disc driving mechanism is used for driving the main rotary table to rotate around a self axis fixed shaft, the central shaft gear is coaxially arranged above the main rotary table, the central driving mechanism is used for driving the central shaft gear to rotate around the self axis fixed shaft, a plurality of planet shaft gears are meshed on the central shaft gear, and planet shafts which are rotatably connected to the main rotary table are coaxially fixed on the planet shaft gears.
By adopting the technical scheme, the plate-shaped workpiece can rotate only around the axis of the main turntable without rotating around the axis of the planetary shaft gear; in the process of coating the single surface of the plate-shaped workpiece, because the plate-shaped workpiece does not have the autorotation phenomenon, the central shaft of the plate-shaped workpiece is closer to the target, and the distance between the positions at two sides of the plate-shaped workpiece and the target is less in change, namely the plate-shaped workpiece has a relatively fixed target base distance, so that the coating precision of the surface of the workpiece is improved; in addition, compared with the assembly line type plate-shaped workpiece coating process, the method and the device do not need workers to turn the plate-shaped workpiece for half a cycle to realize double-sided coating, so that the automation of the double-sided coating process is realized, the efficiency is improved, and the workload is reduced.
Optionally, the main disc driving mechanism comprises a main disc gear ring coaxially fixed on the lower surface of the main rotary disc, a main disc gear is engaged on the main disc gear ring, and a main disc driving shaft is coaxially fixed on the main disc gear; the main disk driving mechanism also comprises a main disk power assembly for driving the main disk driving shaft to rotate around the axis of the main disk driving shaft.
Through adopting above-mentioned technical scheme, main dish power pack provides gyration power for the main dish drive shaft, and the main dish drive shaft and then drives the main dish gear and revolve around self axis dead axle, and the main dish ring gear revolves around main carousel axis dead axle, and the main carousel rotates thereupon.
Optionally, the main disc power assembly comprises a main disc driving wheel, a main disc driven wheel coaxially fixed on the main disc driving shaft, and a main disc driving motor for driving the main disc driving wheel to rotate around the axis of the main disc driving wheel, and a main disc driving belt is tensioned between the main disc driving wheel and the main disc driven wheel.
Through adopting above-mentioned technical scheme, the main drive motor drive main dish action wheel is around self axis dead axle rotation, and the main dish action wheel passes through main dish drive belt drive main dish driven wheel rotation, and the main dish drive shaft and then around self axis dead axle rotation.
Optionally, the central driving mechanism includes a central driving shaft coaxially penetrating the main turntable and a central power assembly for driving the central driving shaft to rotate around its own axis, the central shaft gear is fixed on the central driving shaft, and the main turntable is rotatably connected with the central driving shaft.
Through adopting above-mentioned technical scheme, central power component provides gyration power for central drive shaft, and central drive shaft and then can drive main carousel and rotate around self axis dead axle.
Optionally, the central power assembly includes a central driving wheel, a central driven wheel coaxially fixed on the central driving shaft, and a central driving motor for driving the central driving wheel to rotate around its own axis in a fixed axis manner, and a central transmission belt is tensioned between the central driving wheel and the central driven wheel.
Through adopting above-mentioned technical scheme, center driving motor drive center action wheel rotates around self axis dead axle, and center action wheel passes through central drive belt drive center from the driving wheel rotation, and the center drive axle then rotates around self axis dead axle.
Optionally, the planetary shaft gear is detachably and fixedly connected with a workpiece supporting shaft, and the workpiece supporting shaft and the planetary shaft gear are coaxially arranged.
By adopting the technical scheme, when a large-sized hole-containing workpiece such as a gear or a wheel disc is required to be coated, the workpiece can be arranged on the workpiece supporting shaft in a penetrating way so as to realize coating of the workpiece.
Optionally, a support plate is arranged above the main turntable, and the workpiece support shaft is positioned between the support plate and the main turntable and is rotatably connected with the support plate; the lower surface of backup pad is fixed with a plurality of bracing pieces, bracing piece and main carousel fixed connection.
By adopting the technical scheme, the supporting of the workpiece supporting shaft can be realized, and the possibility of toppling of the workpiece supporting shaft in the workpiece coating process is reduced.
Optionally, the workpiece support shaft is coaxially detachably and fixedly connected with one or more satellite discs distributed along the axial direction of the support shaft, and the satellite discs are used for placing a plurality of small workpieces distributed along the circumferential direction of the satellite discs.
Through adopting above-mentioned technical scheme, when needs carry out the coating film to a plurality of small-size work pieces like drill bit, milling cutter or artificial joint etc. can install the satellite wheel dish on the back shaft, place a plurality of small-size work pieces after that and realize the coating film when to a plurality of small-size work pieces on the satellite wheel dish, improved coating film efficiency.
Optionally, the planetary shaft gear is detachably connected with the main turntable in a rotating manner.
By adopting the technical scheme, when a workpiece with a complex shape and a large volume needs to be coated, the corresponding part of the planetary shaft gear can be detached from the main turntable, and the position interference of the planetary shaft gear to the coating process is reduced.
In summary, the present application has the following technical effects:
1. through the arrangement of the main turntable, the main turntable driving mechanism, the central shaft gear, the central driving shaft, the secondary wheel of the planetary shaft, the planetary shaft and the central power assembly, the plate-shaped workpiece can rotate only around the axis of the main turntable but not around the axis of the planetary shaft gear; in the process of coating the single surface of the plate-shaped workpiece, the central shaft of the plate-shaped workpiece is closer to the target, and the distance between the positions at the two sides of the plate-shaped workpiece and the target changes slightly, so that the plate-shaped workpiece has a relatively fixed target base distance, and the coating precision of the surface of the workpiece is improved;
2. through further setting up work piece back shaft and satellite wheel dish, can make the vacuum coating monomer quick-witted work piece frame of this application be applicable to five kinds of even more different operating modes, the two-sided coating film of platelike class work piece, single complicated structure or the great work piece coating film of volume, batch complicated structure or the great work piece coating film of volume, small-size work piece coating film of small batch and the small-size work piece coating film of large batch promptly, satisfy the user demand of different kind of operating modes promptly.
Drawings
Fig. 1 is a schematic view of an overall structure of a work rest of a vacuum coating platform in the related art;
FIG. 2 is a schematic view of the overall structure of a workpiece holder of a vacuum coating single machine according to an embodiment of the present application, and this time corresponds to a first working condition, i.e. the double-sided coating of a plate-like workpiece, and the main disk driving mechanism, the central power assembly and the coating assembly are not shown;
FIG. 3 is a schematic view of the vacuum coating monomer machine frame of the present embodiment from another perspective;
FIG. 4 is a top view of a vacuum coating single machine workpiece holder according to an embodiment of the present application, and corresponds to a first working condition, i.e., double-sided coating of a plate-like workpiece;
FIG. 5 is a schematic view showing the overall structure of a work rest of a vacuum coating single machine in an embodiment of the present application, in which a main disk drive mechanism, a central power unit, and a coating unit are not shown;
FIG. 6 is a schematic diagram of the overall structure of the workpiece holder of the vacuum coating single machine in the embodiment of the present application, and this time corresponds to a second working condition, i.e. coating of a single complex structure or a large-volume workpiece, and the main disk driving mechanism, the central power assembly and the coating assembly are not shown;
fig. 7 is a schematic view of the overall structure of the workpiece holder of the vacuum coating single machine in the embodiment of the present application, and at this time, corresponding to a third working condition, i.e., coating of a batch complex structure or a large-sized workpiece, the main disk driving mechanism, the central power assembly and the coating assembly are not shown;
FIG. 8 is a schematic diagram of the overall structure of a work rest of the vacuum coating single machine in the embodiment of the present application, and this time corresponds to a fourth working condition, i.e. a small batch of small-sized work pieces are coated, and the main disk driving mechanism, the central power assembly and the coating assembly are not shown;
fig. 9 is a schematic diagram of the overall structure of the workpiece holder of the vacuum coating single machine in the embodiment of the present application, and at this time, the main disk driving mechanism, the central power assembly and the coating assembly are not shown, corresponding to a fifth working condition, i.e., large batch of small workpieces are coated.
In the figure, 1, a main turntable; 2. a main disk drive mechanism; 21. a main disk gear ring; 22. a main disc gear; 23. a main disc drive shaft; 24. a main disc power assembly; 241. a main disc driving wheel; 242. a main disc driven wheel; 243. a main disk drive motor; 244. a main disc drive belt; 3. a central shaft gear; 5. a planetary shaft gear; 6. a planet shaft; 7. a central drive mechanism; 711. a central power assembly; 7111. a central driving wheel; 7112. a central driven wheel; 7113. a central drive motor; 7114. a central drive belt; 712. a central drive shaft; 8. supporting a shaft by a workpiece; 9. a support plate; 10. a support bar; 11. a satellite wheel disc; 12. a film coating component; 121. a cathode; 122. a target material.
Detailed Description
The present application is described in further detail below with reference to the attached drawings.
Referring to fig. 2 and 3, the present application provides a vacuum coating single machine work rest, which is arranged inside a cylindrical chamber and comprises a horizontally arranged circular main turntable 1, a central shaft gear 3 is coaxially arranged above the main turntable 1, and the main turntable 1 and the central shaft gear 3 can rotate independently; a plurality of planet shaft gears 5 are meshed on the central shaft gear 3, the planet shaft gears 5 are coaxially and fixedly connected with planet shafts 6, and the planet shafts 6 extend towards the lower part of the planet shaft gears 5 and are rotationally connected with the main turntable 1; further, the vacuum coating single machine workpiece frame also comprises a main disc driving mechanism 2 for driving the main rotary disc 1 to rotate around the axis of the main rotary disc and a central driving mechanism 7 for driving the central shaft gear 3 to rotate around the axis of the central shaft; referring to fig. 4 again, four coating modules 12 are fixed inside the cylindrical chamber and are uniformly distributed along the circumferential direction of the cylindrical chamber, and each coating module 12 includes a cathode 121 and a target 122 connected to each other.
In addition, the planet shaft gears 5 are detachably and rotatably connected with the main turntable 1, and in this embodiment, the number of the planet shaft gears 5 is eight and is uniformly distributed along the circumferential direction of the main turntable 1, and certainly, the number of the planet shaft gears 5 can be more or less, and the corresponding number of the planet shaft gears 5 can be selected according to the actual size of the main turntable 1 and the actually required film coating efficiency.
Referring to fig. 3, the central driving mechanism 7 includes a central driving shaft 72 coaxially inserted and fixed on the central shaft gear 3 and a central power assembly 71 for driving the central driving shaft 72 to rotate around its axis, the central driving shaft 72 extends below the central shaft gear 3 and penetrates through the main turntable 1, the main turntable 1 and the central driving shaft 72 are rotatably connected, and further, the main turntable 1 and the central shaft gear 3 can rotate independently. In the present embodiment, the central power assembly 71 includes a central driving wheel 711, a central driven wheel 712 coaxially fixed on the central driving shaft 72, and a central driving motor 713 for driving the central driving wheel 711 to rotate around its axis, and a central driving belt 714 is tensioned between the central driving wheel 711 and the central driven wheel 712.
Specifically, referring to fig. 3, the main disc driving mechanism 2 may adopt one or a combination of a belt transmission mechanism, a gear transmission mechanism or a chain transmission mechanism, etc., so as to precisely drive the main disc 1 to rotate, in this embodiment, the main disc driving mechanism 2 includes a main disc power assembly 24 and a main disc gear ring 21 coaxially bolted or welded on the lower surface of the main disc 1, the main disc gear ring 21 is an outer gear ring and is engaged with a main disc gear 22, a main disc driving shaft 23 is coaxially connected to the main disc gear 22, and the main disc power assembly 24 is used for driving the main disc driving shaft 23 to rotate around its axis.
The central power assembly 71 and the main disc power assembly 24 may be one or a combination of a belt transmission mechanism, a gear transmission mechanism, a chain transmission mechanism or a motor direct drive mechanism, so as to precisely drive the rotation of the central shaft gear 3.
Referring to fig. 3, in the present embodiment, the main disc power assembly 24 includes a main disc driving wheel 241 disposed at one side of the central driving wheel 711, a main disc driven wheel 242 coaxially connected to the main disc driving shaft 23, and a main disc driving motor 243 for providing rotation power to the main disc driving wheel 241, a main disc driving belt 244 is tensioned between the main disc driven wheel 242 and the main disc driving wheel 241, and an output shaft of the main disc driving motor 243 is coaxially connected to the main disc driving wheel 241; the main drive motor 243 drives the main drive wheel 241 to rotate around its axis, the main drive wheel 241 drives the main driven wheel 242 to rotate around its axis through the main drive belt 244, and the main driven wheel 242 further drives the main drive shaft 23 to rotate around its axis, so as to provide the main gear 22 with rotation power.
Specifically, the central driving motor 713 and the main disk driving motor 243 may adopt stepping motors or servo motors, etc. to realize accurate control of the rotation speed and speed regulation and braking, in this embodiment, the central driving motor 713 and the main disk driving motor 243 both adopt servo motors with a braking function and absolute value encoders.
Referring to fig. 2 and 4, for the first working condition, that is, when a plate-like workpiece needs to be coated, the plate-like workpiece is vertically mounted on the corresponding planetary shaft gear 5 through the plate-like part fixture, and is tangential to the circumferential direction of the main turntable 1 at the same time, that is, one surface of the plate-like workpiece faces the target 122; under the driving action of the servo motor, the rotating speed of the main turntable 1 and the rotating speed of the central shaft gear 3 are kept the same, namely the rotating speed difference between the main turntable 1 and the central shaft gear 3 is zero, so that the planet shaft gear 5 and the plate-shaped workpiece can only revolve around the central shaft gear 3 along with the rotation of the main turntable 1, and the rotation phenomenon does not exist.
After one surface of the plate-shaped workpiece is completely coated, the rotation speeds of the main turntable 1 and the central shaft gear 3 are coordinated through the mutual matching of the two servo motors so that the planetary shaft gear 5 drives the plate-shaped workpiece to rotate 180 degrees, and the other surface of the plate-shaped workpiece faces the target 122; and then, under the driving action of the servo motor, keeping the rotating speed of the main turntable 1 the same as that of the central shaft gear 3 until the other surface of the plate-shaped workpiece is completely coated.
In the process of coating the single surface of the plate-shaped workpiece, because the plate-shaped workpiece does not have the autorotation phenomenon, the central shaft position of the plate-shaped workpiece is closer to the target 122, and the distance between the positions at two sides of the plate-shaped workpiece and the target 122 has relatively fixed target base distance when the change of the distance is small, so that the coating precision of the surface of the workpiece is improved; in addition, compared with the assembly line type plate-shaped workpiece coating process, the method and the device do not need workers to turn the plate-shaped workpiece for half a cycle to realize double-sided coating, so that the automation of the double-sided coating process is realized, the efficiency is improved, and the workload is reduced.
In addition, referring to fig. 5, the planetary shaft gear 5 is coaxially detachably and fixedly connected with a workpiece support shaft 8, a horizontal support plate 9 is arranged above the main turntable 1, the support plate 9 is positioned above each workpiece support shaft 8, and the workpiece support shafts 8 are rotatably connected with the support plates 9; a plurality of support rods 10 are fixed on the lower surface of the support plate 9, and the support rods 10 are fixedly connected with the main turntable 1; when the supporting rod 10 needs to be installed, the eight planet shaft gears 5 and the planet shafts 6 are detached from the main turntable 1 at intervals, and the supporting rod 10 is installed and fixed at the positions of the four detached planet shaft gears 5.
Thus, referring to fig. 3 and 6, for the second condition, that is, when a single workpiece with a complicated structure or a large volume, such as a long cylindrical workpiece, is coated, it is still necessary to coat each surface of the workpiece, and therefore, the workpiece only needs to rotate on one side of the single coating assembly 12, i.e., the target 122 (not shown in the figure); the specific operation steps are that a workpiece is arranged on a station where a single support rod 10, namely a single planet shaft 6, is located, a main disc driving motor 243 drives the main rotary disc 1 to rotate until the workpiece rotates to the position where the target 122 closest to the workpiece is located, and then the main disc driving motor 243 is braked to fix the main rotary disc 1; the corresponding single cathode 121 is activated, and then the center driving motor 713 is activated to rotate the center shaft gear 3, and the planetary shaft gear 5 rotates therewith and drives the workpiece to rotate on one side of the target 122, so that the coating of each surface of the workpiece is completed.
However, for the conventional work rest, the utilization rates of the ion source and the coating target 122 are very low, that is, the work piece can only be installed on one planetary station, when the work rest is driven as a whole, the work piece can only idle for one circle and rotate to the vicinity of the corresponding target 122 again to perform one coating, while other stations on the work rest are idle, the cathode 121 is in a state of being incapable of coating film most of the time, the target 122 is always in a consumed state, and the utilization rate of the target 122 is low and the coating efficiency is low.
For the third working condition, referring to fig. 3 and 7, that is, when a large number of workpieces with complex structures or large volumes are subjected to film coating, the workpieces are respectively installed on the corresponding workpiece supporting shafts 8, and at this time, the workpieces are installed on the four workpiece supporting shafts 8; the four cathodes 121 are started simultaneously, then the center driving motor 713 is braked to enable the center shaft gear 3 to be in a fixed state, and the main disc driving motor 243 is started simultaneously to enable the main rotary disc 1 to rotate around the axis of the main rotary disc 1 in a fixed axis manner, the main rotary disc 1 further drives each planet shaft gear 5, namely the workpiece supporting shaft 8, to perform revolution motion around the axis of the main rotary disc 1, and due to the action of the center shaft gear 3, the planet shaft gears 5 and the workpiece supporting shafts 8 can rotate around the axis of the main rotary disc 1 in a fixed axis manner, so that the multiple workpieces can simultaneously perform rotation and revolution motion, the simultaneous surface coating of the surfaces of the multiple workpieces is realized, and the coating efficiency is improved.
Further, referring to fig. 8, one or more satellite dishes 11 for placing small workpieces distributed along the circumferential direction of the satellite dishes 11 in batches are coaxially, detachably and fixedly connected to the workpiece support shaft 8, and the plurality of satellite dishes 11 are distributed along the axial direction of the workpiece support shaft 8.
Referring to fig. 8, in a fourth working condition, when small workpieces such as drills, milling cutters or artificial joints are subjected to small-batch coating, one or more satellite discs 11 are fixedly installed on a single workpiece supporting shaft 8, and each workpiece is placed on the satellite disc 11; the main disc driving motor 243 drives the main rotary disc 1 to rotate until the workpiece rotates to the position where the target 122 is located closest to the workpiece, and then the main disc driving motor 243 is braked to fix the main rotary disc 1; the corresponding single cathode 121 is started, and then the center driving motor 713 is started to rotate the center shaft gear 3, and the planet shaft gear 5 rotates along with it and drives the satellite dish 11 to rotate on one side of the target 122, so that each surface of each workpiece is coated.
Referring to fig. 9, in the fifth working condition, when a large amount of film coating is performed on small-sized workpieces such as drills, milling cutters, artificial joints, and the like, a plurality of satellite discs 11 are fixedly installed on each workpiece support shaft 8, and each workpiece is placed on the satellite discs 11; the four cathodes 121 are started simultaneously, then the center driving motor 713 is braked to enable the center shaft gear 3 to be in a fixed state, and the main disc driving motor 243 is started simultaneously to enable the main rotary disc 1 to rotate around the axis of the main rotary disc 1 in a fixed axis manner, the main rotary disc 1 further drives each planet shaft gear 5, namely the workpiece supporting shaft 8, to perform revolution motion around the axis of the main rotary disc 1, and due to the action of the center shaft gear 3, the planet shaft gears 5 and the workpiece supporting shafts 8 can rotate around the axis of the main rotary disc 1 in a fixed axis manner, so that the multiple workpieces can simultaneously perform rotation and revolution motion, the simultaneous surface coating of the surfaces of the multiple workpieces is realized, and the coating efficiency is improved.
In summary, the vacuum coating single machine workpiece holder of the present application is applicable to five or even more different working conditions, that is, the double-sided coating of the plate-shaped workpiece, the coating of a single complex structure or a large-volume workpiece, the coating of a batch complex structure or a large-volume workpiece, the coating of a small-scale workpiece and the coating of a large-scale small-scale workpiece, and the use requirements of different working conditions can be satisfied only by coordinating the rotation speeds of the central driving motor 713 and the main disc driving motor 243 and the rotation speed difference between the two.
The present embodiment is only for explaining the present application, and it is not limited to the present application, and those skilled in the art can make modifications of the present embodiment without inventive contribution as needed after reading the present specification, but all of them are protected by patent law within the scope of the claims of the present application.
Claims (9)
1. A vacuum coating monomer machine work rest which characterized in that: the central driving mechanism comprises a main turntable (1) which is horizontally arranged, a main disk driving mechanism (2) which is used for driving the main turntable (1) to rotate around a self axis fixed shaft, a central shaft gear (3) which is coaxially arranged above the main turntable (1) and a central driving mechanism (7) which is used for driving the central shaft gear (3) to rotate around the self axis fixed shaft, wherein a plurality of planet shaft gears (5) are meshed on the central shaft gear (3), and planet shafts (6) which are rotatably connected onto the main turntable (1) are coaxially fixed on the planet shaft gears (5).
2. The vacuum coating monoblock machine workpiece holder of claim 1, wherein: the main disc driving mechanism (2) comprises a main disc gear ring (21) coaxially fixed on the lower surface of the main rotary disc (1), a main disc gear (22) is meshed on the main disc gear ring (21), and a main disc driving shaft (23) is coaxially fixed on the main disc gear (22); the main disk driving mechanism (2) also comprises a main disk power assembly (24) for driving the main disk driving shaft (23) to rotate around the axis thereof in a fixed shaft mode.
3. The vacuum coating monoblock machine workpiece holder of claim 2, wherein: the main disc power assembly (24) comprises a main disc driving wheel (241), a main disc driven wheel (242) coaxially fixed on the main disc driving shaft (23) and a main disc driving motor (243) for driving the main disc driving wheel (241) to rotate around the axis of the main disc driving wheel (241) in a fixed-axis mode, and a main disc driving belt (244) is tensioned between the main disc driving wheel (241) and the main disc driven wheel (242).
4. The vacuum coating monoblock machine workpiece holder of claim 1, wherein: the central driving mechanism (7) comprises a central driving shaft (72) coaxially arranged on the main turntable (1) in a penetrating mode and a central power assembly (71) used for driving the central driving shaft (72) to rotate around the axis of the central driving shaft in a fixed-shaft mode, a central shaft gear (3) is fixed on the central driving shaft (72), and the main turntable (1) is rotatably connected with the central driving shaft (72).
5. The vacuum coating monoblock machine workpiece holder of claim 4, wherein: the central power assembly (71) comprises a central driving wheel (711), a central driven wheel (712) coaxially fixed on the central driving shaft (72) and a central driving motor (713) for driving the central driving wheel (711) to rotate around the axis of the central driving wheel in a fixed shaft mode, and a central transmission belt (714) is tensioned between the central driving wheel (711) and the central driven wheel (712).
6. The vacuum coating monoblock machine workpiece holder of claim 1, wherein: the planetary shaft gear (5) is detachably and fixedly connected with a workpiece supporting shaft (8), and the workpiece supporting shaft (8) and the planetary shaft gear (5) are coaxially arranged.
7. The vacuum coating monoblock machine workpiece holder of claim 6, wherein: a supporting plate (9) is arranged above the main turntable (1), and a workpiece supporting shaft (8) is positioned between the supporting plate (9) and the main turntable (1) and is rotationally connected with the supporting plate (9); a plurality of supporting rods (10) are fixed on the lower surface of the supporting plate (9), and the supporting rods (10) are fixedly connected with the main turntable (1).
8. The vacuum coating monoblock machine workpiece holder of claim 6, wherein: one or more satellite wheel discs (11) distributed along the axial direction of the supporting shaft are coaxially, detachably and fixedly connected to the workpiece supporting shaft (8), and the satellite wheel discs (11) are used for placing a plurality of small workpieces distributed along the circumferential direction of the satellite wheel discs.
9. The vacuum coating monoblock machine workpiece holder according to claim 7 or 8, characterized in that: the planet shaft gear (5) is detachably and rotatably connected with the main turntable (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121960014.XU CN215799864U (en) | 2021-08-19 | 2021-08-19 | Vacuum coating monomer machine work piece frame |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121960014.XU CN215799864U (en) | 2021-08-19 | 2021-08-19 | Vacuum coating monomer machine work piece frame |
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| CN215799864U true CN215799864U (en) | 2022-02-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113699500A (en) * | 2021-08-19 | 2021-11-26 | 北京北方华创真空技术有限公司 | Vacuum coating monomer machine work piece frame |
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- 2021-08-19 CN CN202121960014.XU patent/CN215799864U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113699500A (en) * | 2021-08-19 | 2021-11-26 | 北京北方华创真空技术有限公司 | Vacuum coating monomer machine work piece frame |
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