CN104630734A - Rotary sample stage - Google Patents
Rotary sample stage Download PDFInfo
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- CN104630734A CN104630734A CN201510077375.2A CN201510077375A CN104630734A CN 104630734 A CN104630734 A CN 104630734A CN 201510077375 A CN201510077375 A CN 201510077375A CN 104630734 A CN104630734 A CN 104630734A
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Abstract
The invention provides a rotary sample stage. The rotary sample stage comprises a revolution table and at least one sample stage, wherein the revolution table is driven by a first drive device to rotate along a revolution axis, each sample stage is arranged on a position distanced to the revolution axis, each sample stage is supported by virtue of a first supporting part which is fixed on the revolution table and driven by an autorotation transmission part which is arranged on the revolution table to rotate, and the autorotation transmission part is driven by virtue of a second drive device; the sample stage is provided with a carrying part for carrying a workpiece and a connecting part which is connected with the autorotation transmission part, the autorotation transmission part is retractable in the axial direction so as to push and pull the connecting part, and the sample stage is further pushed and pulled to rotate relative to the first supporting part, so that an oblique angle of the carrying part can be adjusted. By adopting the rotary sample stage, not only can the revolution, autorotation and planetary-type rotation of the workpiece relative to a material source be realized, but also the oblique angle of the carrying part can be adjusted according to the shape of the workpiece, and one surface or some surfaces of the workpiece can be adjusted to be right opposite to the material source, so that the workpiece with a complicated surface also can be plated with a film in uniform thickness.
Description
Technical field
The present invention relates to a kind of specimen rotating holder, be specifically related to a kind of Multifunctional rotary sample table of PVD plated film.
Background technology
PVD is English Physical Vapor Deposition(physical vapor deposition) abbreviation, physical gas phase deposition technology refers under vacuum, adopt physical method, material source (solid or liquid) surface is gasificated into gaseous atom, molecule or partial ionization and becomes ion, and by low-pressure gas or plasma process, there is in matrix surface deposition the technology of the film of certain specific function.Carrying out in the vacuum plating unit of plated film to workpiece, material source is generally fixed, is the homogeneity of lifting workpieces plated film, generally the sample table of supporting workpiece can be arranged to rotatable sample table; When using vacuum plating unit to carry out plated film to workpiece, workpiece is under the turning effort of specimen rotating holder, and its different positions in turn towards material source, thus can improve the plated film homogeneity of workpiece surface.But be no matter the PVD filming equipment of test-type or industrial production type at present, single specimen rotating holder cannot meet the plated film demand of many sizes and complex surface pattern workpiece.Therefore, how to become with the deposition plating that can meet a series of scale topography different workpiece while of a set of specimen rotating holder the bottleneck problem restricting industry fast development.
A kind of specimen rotating holder for supporting workpiece is disclosed in prior art, as shown in Figure 1, comprise and be fixed on the actionless fixed gear 01 of vacuum plating unit housing bottom, to be positioned at above fixed gear 01 and external diameter is greater than the moving gear 03 of fixed gear 01 external diameter, be positioned at the annular roof plate 06 above moving gear 03, top board 06 is fixedly connected with by some connecting rods 04 with moving gear 03, some transmission rods 05 are also provided with between top board 06 and moving gear 03, transmission rod 05 is rotationally connected respectively by bearing and top board 06 and moving gear 03, the part that transmission rod 05 is passed down through moving gear 03 is provided with transmitting gear 02, transmitting gear 02 is positioned at fixed gear 01 periphery and is connected with a joggle with fixed gear 01, the part that transmission rod 05 is upward through top board 06 is provided with the bearing part for supporting workpiece.Its working process is as follows: when drive unit drives moving gear 03 to rotate, moving gear 03 drives top board 06 to rotate by connecting rod 04 and transmission rod 05, thus the axis being located at the bearing part moving gear 03 on transmission rod 05 be positioned at above top board 06 is revolved round the sun; Moving gear 03 drives transmitting gear 02 to rotate around fixed gear 01 by transmission rod 05, because transmitting gear 02 and fixed gear 01 are connected with a joggle, transmitting gear 02, when rotating around fixed gear 01, drives transmission rod 05 rotation, thus makes the strut member rotation that is positioned on transmission rod 05; And finally make the workpiece be positioned on bearing part relatively fixedly be located at material source revolution and the rotation of vacuum plating unit inside, make the different positions of workpiece in turn towards material source, thus improve the plated film homogeneity of workpiece surface.
Although above-mentioned specimen rotating holder of the prior art can improve the plated film homogeneity of workpiece surface, but still at least there is following technological deficiency: 1. because bearing part is fixedly located at transmission rod top, after its carrying fixation workpiece, workpiece is certain relative to the angle of inclination of material source, when the surface shape of workpiece is complicated, and when to need the some of workpiece or some face just to material source, bearing part is difficult to according to the shape adjustments workpiece of the workpiece angle of inclination towards material source, cannot meet above-mentioned just to demand, cause the plated film lack of homogeneity of surperficial complex part, visible, this specimen rotating holder cannot be used as the sample table of surperficial complex part, range of application is narrower, 2. equally because bearing part is fixedly located at transmission rod top, when workpiece size larger or less time, bearing part is difficult to adjust the height distance of workpiece relative to material source according to the size of workpiece, cause the plated film lack of homogeneity of workpiece, visible, it is comparatively large or compared with the sample table of small workpiece that this specimen rotating holder cannot be used as size.
Summary of the invention
Therefore, the object of the invention is to overcome specimen rotating holder of the prior art cannot according to the shape adjustments workpiece of workpiece relative to the angle of inclination of material source so that the narrow technological deficiency of the scope of application, thus provide a kind of can according to the shape adjustments workpiece of workpiece relative to the angle of inclination of material source, specimen rotating holder thus applied widely.
For this reason, the invention provides a kind of specimen rotating holder, comprise revolution platform, described revolution platform rotates around revolution axis under the driving of the first drive unit, at least one sample table arranged in a distance with described revolution axis, described sample table by being fixed on the first supports support on described revolution platform, and drives rotation by the rotation driving member be positioned on described revolution platform, and described rotation driving member is driven by the second drive unit;
The connection section that described sample table has the supporting part for carrying workpiece and is connected with described rotation driving member, described rotation driving member can axial stretching with connection section described in push-and-pull, and and then sample table described in push-and-pull rotate relative to described first strut member, thus adjust the angle of inclination of described supporting part.
Described rotation driving member comprise can axial stretching connect the first rotation transmission segment and the second rotation transmission segment, described first rotation transmission segment is in transmission connection by the first linkage structure and described second drive unit, and described second rotation transmission segment is fixedly connected with described connection section by universal joint.
The described first rotation transmission segment part interconnection with described second rotation transmission segment is provided with the cylinder/cavity that can coordinate grafting, and described cavity sidewalls is also provided with the locating structure for described cylinder location being fixed on described cavity inside.
Described locating structure comprises the positioning threads through hole be located in described cavity sidewalls, and to be screwed onto on described positioning threads through hole and to stretch into described cavity inside and extrude described cylinder, thus described cylinder location is fixed on the tack bolt of described cavity inside.
Described cylinder is Polygons cylinder, and described cavity is the polygonal-shaped cavities that can coordinate grafting with described cylinder.
Described rotation driving member is fixed on described revolution platform by the second strut member; Described second strut member comprises the permanent sleeve be rotatably set in by bearing in described first rotation transmission segment or described second rotation transmission segment, be located at the column on the downside of described permanent sleeve, described column is plugged on described revolution platform, and is fixed on described revolution platform by the upper set screw nut that is threaded with described column above and below described revolution platform respectively and lower set screw nut.
Described second drive unit comprises the rotation transmission shaft of axis and described revolution dead in line, and the spinning motor driving described rotation transmission shaft to rotate around described revolution axis; Described first linkage structure to comprise on one end of being located at the first conical gear on described rotation transmission shaft and being located at described first rotation transmission segment and can with the second conical gear of described first conical gear engaged transmission.
Described first strut member comprises the housing being rotatably set in described sample table outside by bearing, the pillar stiffener be fixedly connected with described revolution platform, and by rotating for the described housing rotating connector be fixed on described pillar stiffener; During described rotation driving member axial stretching, sample table can rotate around described rotating connector described in push-and-pull.
Described rotating connector comprises and is located at rotating shaft on described pillar stiffener or shaft hole, and relatively with described rotating shaft or described shaft hole establishes on the housing and can coordinate the shaft hole or rotating shaft that are rotationally connected.
Described pillar stiffener is provided with U-shaped mounting block, and described rotating shaft/shaft hole is located in the two opposite side walls of described U-shaped mounting block.
Also comprise the distance length for regulating the relatively described revolution axis of described first strut member, and and then regulate the adjust structure of distance length of the relatively described revolution axis of described sample table.
Described adjust structure comprises and to be opened on described revolution platform along described revolution platform radial direction and to be suitable for the long strip shape through hole that described pillar stiffener passes, and described pillar stiffener is fixed on the adjustable mounting block in described long strip shape through hole.
Described adjustable mounting block comprises the upper nut and lower nut that are threaded with described pillar stiffener above and below described revolution platform respectively.
Described first drive unit comprises revoluting motor, the revolution driving toothed gear rotated is driven by described revoluting motor, the revolution follower gear be connected with a joggle with described revolution driving toothed gear, described revolution follower gear to be fixedly connected with described revolution platform by height adjusting part and to drive described revolution platform to rotate around described revolution axis.
Described height adjusting part comprises some fixed legs be fixed on described revolution follower gear, relatively with described fixed leg to be located on described revolution platform and the fixed via that described fixed leg inserts can be allowed, and being removably connected to the clip held by described revolution platform on described fixed leg and from described revolution platform bottom.
A kind of specimen rotating holder of the present invention has the following advantages:
1. in specimen rotating holder of the present invention, sample table is fixed on by the first strut member can on the revolution platform of revolution axis rotation, and can rotation under the driving of rotation driving member, thus specimen rotating holder of the present invention can carry out revolving round the sun relative to material source, rotation and planetary public rotation, each face making to be carried on workpiece on sample table supporting part can be balanced towards material source, thus the plated film homogeneity on each face of workpiece surface can be improved; On this basis, sample table also arranges the connection section having and be connected with rotation driving member, push-and-pull connection section after rotation driving member axial stretching, and further push-and-pull sample table of going forward side by side is rotated relative to the first strut member, thus can adjust the angle of inclination of supporting part.Also namely: specimen rotating holder of the present invention can not only make to be positioned at that workpiece on supporting part carries out revolving round the sun relative to material source, rotation and planetary public rotation, can also according to the different shapes of workpiece, the angle of inclination of supporting part is adjusted by the axial stretching amount of adjustment rotation driving member, thus adjustment is positioned at some or some face of workpiece on sample table supporting part just to material source, makes the workpiece with complex surface also can plate the uniform film of thickness; Therefore specimen rotating holder wide adaptability of the present invention, can adapt to the plated film demand of various complex surface workpiece product, and coating film thickness uniformity effects is good.Rotary sample of the present invention breaches the thinking restriction that a kind of sample table in traditional coating process is applicable to a certain or several workpiece, adopts a set of specimen rotating holder can meet the deposition plating of the different workpiece of a series of scale topography simultaneously.
2. in specimen rotating holder of the present invention, rotation driving member comprise can axial stretching connect the first rotation transmission segment and the second rotation transmission segment, by adjusting the axial stretching amount between the first rotation transmission segment and the second rotation transmission segment, by the angle that adjustment rotation driving member and then change sample table are rotated relative to the first strut member, thus the angle of inclination of supporting part can be adjusted simply and easily; Arrange the first rotation transmission segment to be in transmission connection by the first linkage structure and the second drive unit, second rotation transmission segment is fixedly connected with connection section by universal joint, enable rotation driving member by the transmission of power of the second drive unit to sample table, thus drive sample table rotation.
3. specimen rotating holder of the present invention, is provided with the cylinder/cavity that can coordinate grafting in the first rotation transmission segment and the interconnection part of the second rotation transmission segment, and cylinder is fixed on the locating structure of cavity inside; The adjustment insertion of cylinder in cavity and the length of adjustable rotation driving member axial stretching, and after using locating structure cylinder and cavity to be fixed together, first rotation transmission segment and the second rotation transmission segment become one can the entirety of transmitting torque, thus can drive sample table rotation under the drive of the second drive unit.Arranging cylinder is Polygons cylinder, and arranging cavity is polygonal-shaped cavities, the torque drive of the first rotation rotational segment and the second rotation transmission segment can be made more effective, not easily slippage occurs; Arrange locating structure and comprise the positioning threads through hole established on the cavity sidewalls, and be screwed onto the tack bolt on positioning threads through hole, the cooperation of positioning threads through hole and tack bolt is simple and convenient, cost low and be easy to realize.
4. specimen rotating holder of the present invention, rotation driving member is fixed on revolution platform by the second strut member, and the second strut member is set comprises the permanent sleeve be rotatably set in by bearing in the first rotation transmission segment or the second rotation transmission segment, and the column be located on the downside of permanent sleeve, column and revolution platform socket connection; At rotation driving member axial stretching or driving sample table time rotational, the second strut member can be fixed in a certain position, does not shake when ensureing precision and the axial stretching of rotation driving member transfer of torque.
5. specimen rotating holder of the present invention, the first strut member comprises the housing being rotatably set in sample table outside by bearing, the pillar stiffener be fixedly connected with revolution platform, and by housing rotatably fixing rotating connector on the support columns; Above-mentionedly be arranged so that sample table can not only rotation, the follower link that can also rotate rotates, thus the angle of inclination of adjustment supporting part, and then can adjust be positioned at workpiece on supporting part different positions just to material source, improve specimen rotating holder for the plated film homogeneity with complex surface workpiece, and expand the range of application of specimen rotating holder.
6. specimen rotating holder of the present invention, arranges rotating connector and comprises the rotating shaft or shaft hole of establishing on the support columns, and relatively with rotating shaft or shaft hole to be located on housing and can to coordinate the shaft hole or rotating shaft that are rotationally connected.Arranging of rotating shaft and shaft hole is effectively simple, can play the effect of turning axle, realize the adjustment at supporting part angle of inclination when rotation driving member promotes sample table.U-shaped mounting block is set on the support columns, and rotating shaft/shaft hole is located in the two opposite side walls of U-shaped mounting block, can fix from the both sides of housing by rotating for housing, when rotation driving member promotion sample table rotates follower link rotation, the rotation of housing is more stable, not easily wave and rock, rotational angle regulates more accurate.
7. specimen rotating holder of the present invention, is also provided with the adjust structure for adjusting sample table relative hollow shaft linear distance length; When the surface being positioned at workpiece on sample table supporting part is complicated and size changes greatly, adjustment sample table is relative to the distance of revolution axis, and coordinate the angle of inclination of adjustment sample table supporting part, the a certain of workpiece or some face can be made better just to material source, thus meet the workpiece plated film demand of different size size, improve the thickness evenness of workpiece plated film further.
8. in specimen rotating holder of the present invention, for regulating relatively the revolve round the sun adjust structure of distance length of axis of sample table to comprise and be opened in revolution platform along revolution platform radial direction and be suitable for the long strip shape through hole that pillar stiffener passes, and pillar stiffener is fixed on the adjustable mounting block in long strip shape through hole; Need to adjust sample table relatively revolve round the sun the distance of axis time, adjust the above-mentioned adjustable mounting block of pine, in rectangular through hole, move radially pillar stiffener along revolution platform, during to target range, again tighten above-mentioned adjustable mounting block, the adjustment of sample table relative hollow shaft linear distance length can be realized; This kind of adjust structure structure is simple, realizes easily, and on revolution platform, offers long strip shape through hole can also play the effect alleviating revolution platform weight.
9. in specimen rotating holder of the present invention, adjustable mounting block comprises the upper nut and lower nut that are threaded with pillar stiffener above and below revolution platform respectively, distance between upper nut and lower nut is adjusted far away, adjustable mounting block can be adjusted pine, now can along revolution platform radial in long strip shape through hole movable support post, during to target location, distance between upper nut and lower nut is adjusted near, jam-packed revolution platform, can tighten adjustable mounting block, be again fixed in long strip shape through hole by pillar stiffener.The setting of upper lower nut can also adjust the height of the relative revolution platform of sample table, when the size being positioned at workpiece on sample table supporting part is larger, adjustable sample table and revolution platform have lower height, when the size being positioned at workpiece on sample table supporting part is less, adjustable sample table and revolution platform have high height, make the distance of workpiece and material source moderate, be convenient on workpiece, plate the uniform film of thickness.
10. in specimen rotating holder of the present invention, first drive unit comprises revoluting motor, the revolution driving toothed gear rotated is driven by revoluting motor, the revolution follow-up pulley be connected with a joggle with revolution gear, revolution follow-up pulley to be fixedly connected with revolution platform by height adjusting part and to drive revolution platform to rotate around the axis that revolves round the sun, the object of rational height regulating part is, when be positioned at workpiece on sample table supporting part oversize or too small time, when being not enough to make that there is between workpiece and material source suitable distance relative to the height size of revolution platform by adjustment sample table merely, by the distance between height adjusting part adjustment revolution platform and material source, thus meet needs that are oversize or distance adjustment between mistake small workpiece and material source.
In 11. specimen rotating holders of the present invention, height adjusting part comprises some fixed legs be fixed on revolution follower gear, relatively with fixed leg to be located on revolution platform and the fixed via that fixed leg inserts can be allowed, and being removably connected to the clip held by revolution platform on fixed leg and from revolution platform bottom; This kind of height adjusting part is fixed on the position on fixed leg by adjustment clip, i.e. the height of adjustable revolution platform, and structure is simple, is easy to realize.
Accompanying drawing explanation
Fig. 1 is the one-piece construction schematic diagram of specimen rotating holder in prior art.
Fig. 2 is the front view of specimen rotating holder in embodiment.
Fig. 3 is the vertical view of Fig. 2.
Fig. 4 is the perspective view of Fig. 1.
Fig. 5 is the syndeton schematic diagram of revolution platform in embodiment, rotation transmission actuator and sample table.
Fig. 6 is the sectional view of Fig. 5.
In figure: 01-fixed gear, 02-transmitting gear, 03-moving gear, 04-connecting rod, 05-transmission rod, 06-top board, 1-revolution platform, 11-fixed via, 2-sample table, 21-supporting part, 22-connection section, 3-strut member, 31-housing, 32-pillar stiffener, 33-U shape mounting block, 331-rotating shaft, 332-shaft hole, 34-long strip shape through hole, 341-upper nut, 342-lower nut, 4-rotation driving member, 41-first rotation transmission segment, 411-second conical gear, 42-second rotation transmission segment, 43-universal joint, 44-tack bolt, 45-cylinder, 46-permanent sleeve, 47-column, the upper set screw nut of 48-, set screw nut under 49-, 51-rotation transmission shaft, 511-first conical gear, 52-spinning motor, 6-revoluting motor, 61-revolves round the sun driving toothed gear, 62-revolves round the sun follower gear, 63-fixed leg, 64-clip, 7-optoelectronic switch, 8-lightening hole.
Embodiment
Below in conjunction with accompanying drawing, a kind of specimen rotating holder provided by the invention is described in further detail.
Be specimen rotating holder disclosed by the invention as shown in figures 2-6, it comprises revolution platform 1, revolution platform 1 rotates around revolution axis under the driving of the first drive unit, with revolution axis respectively at a distance of 6 sample table 2 that same distance is arranged, sample table 2 is supported by the first strut member 3 be fixed on revolution platform 1, and driving rotation by the rotation driving member 4 be positioned on revolution platform 1, rotation driving member 4 is driven by the second drive unit; The connection section 22 that sample table 2 has the supporting part 21 for carrying workpiece and is connected with rotation driving member 4, rotation driving member 4 can axial stretching with push-and-pull connection section 22, and and then push-and-pull sample table 2 rotate relative to the first strut member 3, thus adjustment supporting part 21 angle of inclination.
The specimen rotating holder of the present embodiment can not only make to be positioned at workpiece on supporting part 21, and relative to material source, (material source is generally positioned at oblique upper or the oblique below of revolution platform 1, can be one also can be multiple) carry out revolving round the sun, rotation and planetary public rotation, can also according to the different shapes of workpiece, the angle of inclination of supporting part 21 is adjusted by the axial stretching amount of adjustment rotation driving member 4, thus adjustment is positioned at some or some face of workpiece on sample table 2 supporting part 21 just to material source, makes the workpiece with complex surface also can plate the uniform film of thickness; The specimen rotating holder wide adaptability that the present embodiment provides, can adapt to the plated film demand of various complex surface workpiece product, and coating film thickness uniformity effects is good.
The concrete number of above-mentioned sample table 2 can be arranged flexibly according to practical situation, can be 1,2,3,4,5,7,8,9,10 or more; Sample table 2 can be the same or different with revolution axis distance apart, can arrange flexibly as required.
As shown in Figure 3, above-mentioned rotation driving member 4 comprise can axial stretching connect the first rotation transmission segment 41 and the second rotation transmission segment 42, described first rotation transmission segment 41 is in transmission connection by the first linkage structure and described second drive unit, and described second rotation transmission segment 42 is fixedly connected with described connection section 22 by universal joint 43.
Particularly, first rotation transmission segment 41 is provided with cavity, second rotation transmission segment 42 is provided with cylinder 45, cylinder 45 is pluggable to be entered in above-mentioned cavity, and axially can move around in cavity along cylinder 45, be provided with the locating structure for cylinder 45 location being fixed on cavity inside on the cavity sidewalls.When needing the axial stretching amount adjusting rotation driving member 4, cylinder 45 is regulated outwards to extract out with the axial length increasing rotation driving member 4 in cavity, cylinder 45 is regulated to insert to cavity inside with the axial length shortening rotation driving member 4, after adjustment, use locating structure that cylinder 45 is fixed on cavity inside.
As one distortion, above-mentioned cavity also can be located in the second rotation transmission segment 41, and cylinder 45 is located in the first rotation transmission segment 42, can realize goal of the invention equally.In addition, the form of cavity and cylinder 45 also can change, the groove in the first rotation transmission segment 41 is positioned at as being arranged to by cavity, cylinder 45 to be arranged to be positioned in the second rotation transmission segment 42 and the projection of above-mentioned groove can be inserted, projection can insert in groove completely, also in partial insertion groove, as long as the object of above-mentioned adjustment rotation driving member 4 axial stretching amount can be realized, all can be able to adopt.
As shown in Figure 5, above-mentioned locating structure comprises the positioning threads through hole be located in described cavity sidewalls, and to be screwed onto on positioning threads through hole and to stretch into cavity inside and extrude described cylinder 45, thus cylinder 45 location is fixed on the tack bolt 44 of cavity inside.
Improve as one, can arrange cylinder 45 is Polygons cylinder, and arranging cavity is the polygonal-shaped cavities that can coordinate grafting with cylinder 45.After Polygons cylinder and polygonal-shaped cavities coordinate grafting, Polygons cylinder is not easy to rotate in polygonal-shaped cavities inside slippage, thus when the second drive unit drives the first rotation driving member 41 to rotate by the first linkage structure, the rotation of the first rotation driving member 41 is better delivered to the second rotation driving member 42, and makes the second rotation driving member 42 better drive sample table 2 rotation by universal joint 43.
As shown in Figure 2, Figure 5 and Figure 6, rotation driving member 4 is fixed on revolution platform 1 by the second strut member; Second strut member comprises the permanent sleeve 46 be rotatably set in by bearing in the first rotation transmission segment 41, be located at the column 47 on the downside of permanent sleeve 46, column 47 is plugged on revolution platform 1, and is fixed on revolution platform 1 by the upper set screw nut 48 that is threaded with column 47 above and below revolution platform 1 respectively and lower set screw nut 49.As one distortion, permanent sleeve 46 also can be set in the second rotation transmission segment 42, can realize goal of the invention equally.
As shown in Figure 2 and Figure 4, above-mentioned second drive unit comprises the rotation transmission shaft 51 of axis and revolution dead in line, and the spinning motor 52 driving rotation transmission shaft 51 to rotate around above-mentioned revolution axis; First linkage structure to comprise on the first conical gear 511 be located on rotation transmission shaft 51 and the one end being located at the first rotation transmission segment 41 and can with the second conical gear 411 of the first conical gear 511 engaged transmission.
As shown in Fig. 2, Fig. 3, Fig. 5 and Fig. 6, above-mentioned first strut member 3 comprises the housing 31 being rotatably set in described sample table 2 outside by bearing, the pillar stiffener 32 be fixedly connected with revolution platform 1, and by rotating for housing 31 rotating connector be fixed on pillar stiffener 32; During rotation driving member 4 axial stretching, can push-and-pull sample table 2 rotate follower link rotate.
Above-mentioned rotating connector comprises the shaft hole 332 be located on pillar stiffener 32, and relative with above-mentioned shaft hole 332 to be located on housing 31 and can to coordinate be rotationally connected rotating shaft 331.As one distortion, also rotating shaft 331 can be set supporting on 32, housing 31 be arranged and can coordinate the shaft hole 332 be rotationally connected with rotating shaft 31, by can object be realized.
Improve as one, above-mentioned pillar stiffener 32 is provided with U-shaped mounting block 33, and shaft hole 332 is located in the two opposite side walls of U-shaped mounting block 33.Pillar stiffener 32 arranges U-shaped mounting block 33, and rotating shaft 331 or shaft hole 332 are located in the two opposite side walls of U-shaped mounting block 33, can fix from the both sides of housing 31 by rotating for housing 31, rotation driving member 4 promote sample table 2 rotate follower link rotate time, the rotation of housing 31 is more stable, not easily wave and rock, rotational angle regulates more accurate.
The set-up mode of rotating connector in the present embodiment, make the supporting part 21 of sample table 2 relative to horizontal direction angle of inclination can within the scope of 20-70 ° free adjustment.
As shown in Figure 4 and Figure 5, also comprise the distance length for regulating the first strut member 3 relative revolution axis, and and then the adjust structure of the distance length of adjustment sample table 2 relative revolution axis.Above-mentioned adjust structure comprises and to be opened on revolution platform 1 along revolution platform 1 radial direction and to be suitable for the long strip shape through hole 34 that pillar stiffener 32 passes, and pillar stiffener 32 is fixed on the adjustable mounting block in long strip shape through hole 34.When needing the distance adjusting sample table 2 relative revolution axis, adjust the above-mentioned adjustable mounting block of pine, in rectangular through hole 34, move radially pillar stiffener 32 along revolution platform 1, during to target range, again tighten above-mentioned adjustable mounting block, the adjustment of the relative hollow shaft linear distance length of sample table 2 can be realized; And on revolution platform 1, offer long strip shape through hole 34 can also play the effect alleviating revolution platform weight.
Above-mentioned adjustable mounting block comprises the upper nut 341 and lower nut 342 that are threaded with pillar stiffener 32 above and below revolution platform 1 respectively.Distance between upper nut 341 and lower nut 342 is adjusted far away, adjustable mounting block can be adjusted pine, now can along revolution platform 1 radial direction movable support post 32 in long strip shape through hole 34, during to target location, distance between upper nut 341 and lower nut 342 is adjusted near, jam-packed revolution platform 1, can tighten adjustable mounting block, be again fixed in long strip shape through hole 34 by pillar stiffener 32.Upper nut 341 can also adjust the height of the relative revolution platform 1 of sample table 2 with the setting of lower nut 342, when the size being positioned at workpiece on sample table 2 supporting part 21 is larger, adjustable sample table 2 and revolution platform 1 have lower height, when the size being positioned at workpiece on sample table 2 supporting part 21 is less, adjustable sample table 2 and revolution platform 1 have high height, make the distance of workpiece and material source moderate, be convenient on workpiece, plate the uniform film of thickness.
As shown in Figure 2 and Figure 4, above-mentioned first drive unit comprises revoluting motor 6, the revolution driving toothed gear 61 of rotation is driven by revoluting motor 6, with the revolution follower gear 62 that is connected with a joggle of revolution driving toothed gear 61, revolution follower gear 62 to be fixedly connected with revolution platform 1 by height adjusting part and to drive revolution platform 1 to rotate around the axis that revolves round the sun.
Above-mentioned height adjusting part comprises some fixed legs 63 be fixed on revolution follower gear 62, relatively with fixed leg 63 to be located on revolution platform 1 and the fixed via 11 that fixed leg 63 inserts can be allowed, and being removably connected to the clip 64 held by revolution platform 1 on fixed leg 63 and from revolution platform 1 bottom.Be fixed on the position on fixed leg 63 by adjustment clip 64, i.e. the height of adjustable revolution platform 1, and structure is simple, is easy to realize.
In addition, as shown in Figure 1, the specimen rotating holder of the present embodiment is also provided with optoelectronic switch 7, conveniently aligns the position of sample table 2 and material source; Revolution platform 1 offers some lightening holes 8, effect is the weight alleviating revolution platform 1, driving revolution platform 1 is rotated sensitiveer.
Process that sample table 2 revolves round the sun is as follows to use specimen rotating holder in the present embodiment to realize: close spinning motor 52, start revoluting motor 6, revoluting motor 6 drives revolution driving toothed gear 61 to rotate, revolution driving toothed gear 61 drives revolution follower gear 62 to rotate by engagement, revolution follower gear 62 drives revolution platform 1 to rotate by fixed leg 63, because sample table 2 is fixed on revolution platform 1 by the first strut member 3, the revolution of sample table 2 thus can be realized.
Specimen rotating holder in the present embodiment is used to realize the process of sample table 2 rotation as follows: to close revoluting motor 6, start spinning motor 52, spinning motor 52 drives rotation transmission shaft 51 to rotate, rotation transmission shaft 51 is engaged with the second conical gear 411 be located on rotation driving member 4 by the first conical gear 511, rotation driving member 4 is driven to rotate, rotation driving member 4 drives sample table 2 rotation by universal joint, because sample table 2 is fixed on revolution platform 1 by the first strut member 3, and the first strut member 3 has the housing 31 for sample table 2 rotation, thus the rotation of sample table 2 can be realized.
Use specimen rotating holder in the present embodiment to realize the process of the planetary public rotation of sample table 2 as follows: to start revoluting motor 6 and spinning motor 52 simultaneously, process of revolution and rotation process start simultaneously, because process of revolution is consistent with the process that above-mentioned sample table 2 revolves round the sun and rotation process with rotation process, do not repeat them here.
Specimen rotating holder in the present embodiment is used to regulate the process at sample table 2 angle of inclination as follows: tack bolt 44 is adjusted pine, the cylinder 45 be located in the second rotation transmission segment 42 is moved in cavity towards the direction away from the first rotation transmission segment 41, second rotation transmission segment 42 promotes by universal joint 43 sample table 2 being positioned at housing 31, with rotating shaft 331 for pivot center is inclined upwardly, when after adjustment sample table 2 to target tilt angle, tack bolt 44 is tightened, cylinder 45 is fixed on cavity inside, completes sample table 2 and to be inclined upwardly the regulate process of angle; When needs regulate sample table 2 downward-sloping, the cylinder 45 be located in the second rotation transmission segment 42 can be moved in cavity towards the direction near the first rotation transmission segment 41, make the second rotation transmission segment 42 pull sample table 2 with rotating shaft 331 for pivot center is downward-sloping by universal joint 43, complete the regulate process of sample table 2 downtilt angles.
Use the process of the relative hollow shaft linear distance of specimen rotating holder adjustment sample table 2 in the present embodiment as follows: to adjust far away by the distance between the upper nut 341 be screwed onto on pillar stiffener 32 and lower nut 342, along revolution platform 1 radial direction movable support post 32 in long strip shape through hole 34, during to target location, distance between upper nut 341 and lower nut 342 is adjusted near, jam-packed revolution platform 1, again pillar stiffener 32 is fixed in long strip shape through hole 34, completes the adjustment of the relative hollow shaft linear distance of sample table 2.
Use the process of revolution platform 1 height relatively of specimen rotating holder adjustment sample table 2 in the present embodiment as follows: by the upper nut 341 that is screwed onto on pillar stiffener 32 and lower nut 342, axially adjust upward along pillar stiffener 32 simultaneously, the height distance between sample table 2 and revolution platform 1 can be shortened; By the upper nut 341 that is screwed onto on pillar stiffener 32 and lower nut 342, along pillar stiffener 32 axially adjustment downwards simultaneously, the height distance between sample table 2 and revolution platform 1 can be increased.
Use the process of specimen rotating holder adjustment revolution platform 1 height in the present embodiment as follows: the position being fixed on fixed leg 63 front band 64 by adjustment, the i.e. height of adjustable revolution platform 1.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all embodiments.And thus the apparent change of extending out or variation be still among the protection domain of the invention.
Claims (15)
1. a specimen rotating holder, it is characterized in that: comprise revolution platform (1), described revolution platform (1) rotates around revolution axis under the driving of the first drive unit, at least one sample table (2) arranged in a distance with described revolution axis, described sample table (2) is supported by the first strut member (3) be fixed on described revolution platform (1), and driving rotation by the rotation driving member (4) be positioned on described revolution platform (1), described rotation driving member (4) is driven by the second drive unit;
The connection section (22) that described sample table (2) has the supporting part (21) for carrying workpiece and is connected with described rotation driving member (4), described rotation driving member (4) can axial stretching with connection section described in push-and-pull (22), and and then sample table described in push-and-pull (2) rotate relative to described first strut member (3), thus adjust the angle of inclination of described supporting part (21).
2. specimen rotating holder according to claim 1, it is characterized in that: described rotation driving member (4) comprise can axial stretching connect the first rotation transmission segment (41) and the second rotation transmission segment (42), described first rotation transmission segment (41) is in transmission connection by the first linkage structure and described second drive unit, and described second rotation transmission segment (42) is fixedly connected with described connection section (22) by universal joint (43).
3. specimen rotating holder according to claim 2, it is characterized in that: described first rotation transmission segment (41) part interconnection with described second rotation transmission segment (42) is provided with cylinder (the 45)/cavity that can coordinate grafting, described cavity sidewalls is also provided with the locating structure for described cylinder (45) location being fixed on described cavity inside.
4. specimen rotating holder according to claim 3, it is characterized in that: described locating structure comprises the positioning threads through hole be located in described cavity sidewalls, and to be screwed onto on described positioning threads through hole and to stretch into described cavity inside and extrude described cylinder (45), thus described cylinder (45) location is fixed on the tack bolt (44) of described cavity inside.
5. specimen rotating holder according to claim 3, is characterized in that: described cylinder (45) is Polygons cylinder, and described cavity is the polygonal-shaped cavities that can coordinate grafting with described cylinder (45).
6. specimen rotating holder according to claim 2, is characterized in that: described rotation driving member (4) is fixed on described revolution platform (1) by the second strut member; Described second strut member comprises the permanent sleeve (46) be rotatably set in by bearing in described first rotation transmission segment (41) or described second rotation transmission segment (42), be located at the column (47) of described permanent sleeve (46) downside, described column (47) is plugged on described revolution platform (1), and is fixed on described revolution platform (1) by the upper set screw nut (48) that is threaded with described column (47) above and below described revolution platform (1) respectively and lower set screw nut (49).
7. specimen rotating holder according to claim 2, it is characterized in that: described second drive unit comprises the rotation transmission shaft (51) of axis and described revolution dead in line, and the spinning motor (52) driving described rotation transmission shaft (51) to rotate around described revolution axis; Described first linkage structure to comprise on the first conical gear (511) be located on described rotation transmission shaft (51) and the one end being located at described first rotation transmission segment (41) and can with second conical gear (411) of described first conical gear (511) engaged transmission.
8. the specimen rotating holder according to any one of claim 1-7, it is characterized in that: described first strut member (3) comprises the housing (31) being rotatably set in described sample table (2) outside by bearing, the pillar stiffener (32) be fixedly connected with described revolution platform (1), and by rotating for described housing (31) rotating connector be fixed on described pillar stiffener (32); During described rotation driving member (4) axial stretching, sample table (2) can rotate around described rotating connector described in push-and-pull.
9. specimen rotating holder according to claim 8, it is characterized in that: described rotating connector comprises and is located at rotating shaft (331) on described pillar stiffener (32) or shaft hole (332), and be located at described housing (331) relative to described rotating shaft (331) or described shaft hole (332) is upper and can coordinate the shaft hole (332) or rotating shaft (331) that are rotationally connected.
10. specimen rotating holder according to claim 9, is characterized in that: described pillar stiffener (32) is provided with U-shaped mounting block (33), and described rotating shaft (331)/shaft hole (332) is located in the two opposite side walls of described U-shaped mounting block (33).
11. specimen rotating holders according to claim 8, it is characterized in that: also comprise the distance length for regulating the relatively described revolution axis of described first strut member (3), and and then regulate the adjust structure of distance length of the relatively described revolution axis of described sample table (2).
12. specimen rotating holders according to claim 11, it is characterized in that: described adjust structure comprises that to be opened in described revolution platform (1) along described revolution platform (1) radial direction upper and be suitable for the long strip shape through hole (34) that described pillar stiffener (32) passes, and described pillar stiffener (32) is fixed on the adjustable mounting block in described long strip shape through hole (34).
13. specimen rotating holders according to claim 12, is characterized in that: described adjustable mounting block comprises the upper nut (341) and lower nut (342) that are threaded with described pillar stiffener (32) above and below described revolution platform (1) respectively.
14. specimen rotating holders according to claim 8, it is characterized in that: described first drive unit comprises revoluting motor (6), the revolution driving toothed gear (61) rotated is driven by described revoluting motor (6), the revolution follower gear (62) be connected with a joggle with described revolution driving toothed gear (61), described revolution follower gear (62) to be fixedly connected with described revolution platform (1) by height adjusting part and to drive described revolution platform (1) to rotate around described revolution axis.
15. specimen rotating holders according to claim 14, it is characterized in that: described height adjusting part comprises some fixed legs (63) be fixed on described revolution follower gear (62), relatively with described fixed leg (63) be located at the upper and fixed via (11) that described fixed leg (63) can be allowed to insert of described revolution platform (1), and be removably connected to the upper and clip (64) held by described revolution platform (1) from described revolution platform (1) bottom of described fixed leg (63).
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| CN201510077375.2A CN104630734B (en) | 2015-02-13 | 2015-02-13 | A kind of specimen rotating holder |
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| CN201510077375.2A CN104630734B (en) | 2015-02-13 | 2015-02-13 | A kind of specimen rotating holder |
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| CN104630734B CN104630734B (en) | 2017-07-11 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008308714A (en) * | 2007-06-13 | 2008-12-25 | Shin Meiwa Ind Co Ltd | Continuous film-forming apparatus |
| CN201280590Y (en) * | 2008-10-22 | 2009-07-29 | 中国航空工业第一集团公司北京航空材料研究院 | Universal clamp apparatus for turbine blade coating |
| CN101724814A (en) * | 2008-10-22 | 2010-06-09 | 徐正群 | Improved holding device of evaporated materials of evaporator |
| CN103590005A (en) * | 2013-11-15 | 2014-02-19 | 浙江星星瑞金科技股份有限公司 | Vacuum coating machine |
| CN104294234A (en) * | 2014-09-23 | 2015-01-21 | 东莞市华星镀膜科技有限公司 | Planet-like coating jig capable of rotating and revoluting and use method of planet-like coating jig |
| CN204509455U (en) * | 2015-02-13 | 2015-07-29 | 北京中科科美真空技术有限责任公司 | A kind of specimen rotating holder |
-
2015
- 2015-02-13 CN CN201510077375.2A patent/CN104630734B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008308714A (en) * | 2007-06-13 | 2008-12-25 | Shin Meiwa Ind Co Ltd | Continuous film-forming apparatus |
| CN201280590Y (en) * | 2008-10-22 | 2009-07-29 | 中国航空工业第一集团公司北京航空材料研究院 | Universal clamp apparatus for turbine blade coating |
| CN101724814A (en) * | 2008-10-22 | 2010-06-09 | 徐正群 | Improved holding device of evaporated materials of evaporator |
| CN103590005A (en) * | 2013-11-15 | 2014-02-19 | 浙江星星瑞金科技股份有限公司 | Vacuum coating machine |
| CN104294234A (en) * | 2014-09-23 | 2015-01-21 | 东莞市华星镀膜科技有限公司 | Planet-like coating jig capable of rotating and revoluting and use method of planet-like coating jig |
| CN204509455U (en) * | 2015-02-13 | 2015-07-29 | 北京中科科美真空技术有限责任公司 | A kind of specimen rotating holder |
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|---|---|---|---|---|
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| CN105671489A (en) * | 2016-03-25 | 2016-06-15 | 沈阳大学 | Device for preparing structure-controllable functional film |
| CN107058966A (en) * | 2016-12-12 | 2017-08-18 | 苏州求是真空电子有限公司 | A kind of vacuum coating substrate holder |
| CN107058966B (en) * | 2016-12-12 | 2019-10-15 | 苏州求是真空电子有限公司 | A kind of vacuum coating substrate holder |
| CN107012445A (en) * | 2017-05-05 | 2017-08-04 | 宁波工程学院 | A kind of chemical vapor deposition is coated with the sample bench of the equipment of diamond film |
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| CN107598788A (en) * | 2017-08-28 | 2018-01-19 | 江门杰利信抛磨材料有限公司 | A kind of knife rest movement governor motion for polishing wind wheel process equipment |
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| CN111041445A (en) * | 2019-12-26 | 2020-04-21 | 北京大学深圳研究院 | Multidirectional rotating device for physical vapor deposition of coatings on surfaces of threaded parts |
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| CN113049881A (en) * | 2021-04-09 | 2021-06-29 | 中国电子技术标准化研究院 | Extension resistance tester for epitaxial layer of integrated circuit |
| CN113265639A (en) * | 2021-04-16 | 2021-08-17 | 布勒莱宝光学设备（北京）有限公司 | Coating film rotating mechanism with automatic swing planetary disc |
| CN114790540A (en) * | 2022-05-11 | 2022-07-26 | 纳峰真空镀膜（上海）有限公司 | Film coating rotating stand |
| CN114959610A (en) * | 2022-05-30 | 2022-08-30 | 陕西工业职业技术学院 | Parallel arm type three-free cooperative driving type film glancing angle sputtering platform |
| CN114959611A (en) * | 2022-05-30 | 2022-08-30 | 陕西工业职业技术学院 | Bent arm type series-parallel driving type film glancing angle sputtering platform |
| CN114959610B (en) * | 2022-05-30 | 2023-08-22 | 陕西工业职业技术学院 | Parallel arm type three-freedom cooperative driving thin film glancing angle sputtering platform |
| CN116083873A (en) * | 2023-04-07 | 2023-05-09 | 宁波招宝磁业有限公司 | Neodymium iron boron cast sheet sputtering device |
| CN116334552A (en) * | 2023-04-07 | 2023-06-27 | 宁波招宝磁业有限公司 | Neodymium iron boron cast sheet sputtering processing method |
| CN116334552B (en) * | 2023-04-07 | 2023-09-05 | 宁波招宝磁业有限公司 | Neodymium iron boron cast sheet sputtering processing method |
| CN118127477A (en) * | 2024-01-24 | 2024-06-04 | 吉林大学 | Rotary sample table |
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Address after: 100080 No. two, No. 13, North Haidian District, Beijing, Zhongguancun Applicant after: Beijing Zhongke Kemei Polytron Technologies Inc Address before: 100080 No. two, No. 13, North Haidian District, Beijing, Zhongguancun Applicant before: BEIJING ZHONGKE KEMEI VACUUM TECHNOLOGY CO., LTD. |
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