CN107058966A - A kind of vacuum coating substrate holder - Google Patents
A kind of vacuum coating substrate holder Download PDFInfo
- Publication number
- CN107058966A CN107058966A CN201611136440.5A CN201611136440A CN107058966A CN 107058966 A CN107058966 A CN 107058966A CN 201611136440 A CN201611136440 A CN 201611136440A CN 107058966 A CN107058966 A CN 107058966A
- Authority
- CN
- China
- Prior art keywords
- vacuum coating
- substrate
- substrate holder
- power transmission
- pallet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of vacuum coating substrate holder, including substrate pallet, rotating shaft and power transmission shaft, the power transmission shaft is connected with rotating mechanism, rotating shaft of the substrate pallet by being arranged at center is connected with power transmission shaft, the substrate tray bottom is provided with the toroidal cavity using tray center as the center of circle, the substrate tray bottom is additionally provided with angular adjustment bar, described angular adjustment bar one end is fixed on plant bottom case, the other end is contact ball end, and the contact ball end can be slided in toroidal cavity.The present invention can realize the planetary rotation of the simple class of substrate holder, so that substrate holder can rotate, overturn in process, improvement technique for vacuum coating is reached to the step coverage of nonplanar structure, the improvement inner walls of deep holes film thickness uniformity especially in the case of deep hole plated film.
Description
Technical field
The present invention relates to a kind of vacuum coating substrate holder, belong to vacuum coater technical field.
Background technology
Vacuum coater is widely used in various facet coatings fields, but for the plated film of three-dimensional special-shaped structure,
The support of the complex mechanisms such as substrate rotation, the upset of complexity is generally required, existing vacuum coating substrate holder is difficult to this
One requires.
The content of the invention
The technical problems to be solved by the invention are to overcome the defect of prior art there is provided a kind of vacuum coating substrate bottom
Seat, can make substrate holder to rotate, overturn in process, reach the platform for improving technique for vacuum coating to nonplanar structure
Improvement inner walls of deep holes film thickness uniformity in the case of rank coverage rate, especially deep hole plated film.
In order to solve the above technical problems, the present invention provides a kind of vacuum coating substrate holder, including substrate pallet, rotating shaft and
Power transmission shaft, the power transmission shaft is connected with rotating mechanism, and the substrate pallet is by being arranged at rotating shaft and the power transmission shaft phase of center
Even, the substrate tray bottom is provided with the toroidal cavity using tray center as the center of circle, and the substrate tray bottom is also set up
Angled adjusting rod, described angular adjustment bar one end is fixed on plant bottom case, and the other end is contact ball end, the contact ball end
It can be slided in toroidal cavity.
The power transmission shaft includes rotating mechanism connecting shaft and joint block, and the rotating mechanism connection the tip of the axis is joint
Spheroid, the joint spheroid is included by ball-joint block, and the ball-joint block is connected with rotating shaft.
The rotating shaft includes structure attachment screw, and described structure attachment screw one end is fixedly connected with substrate pallet, another
End is connected with drive axis.
The structure attachment screw is fixed on the bottom of substrate pallet by fixing screws.
The substrate pallet circle centre position is provided with screw counter bore, and the fixing screws are installed in screw counter bore.
The edge of the substrate pallet is provided with sample spacing ring.
The ball-joint block includes being provided with the shrinkage pool for accommodating rotating shaft in upper cap and lower cover cap, the upper cap.
The beneficial effect that the present invention is reached：
1. vacuum coating is carried out, power transmission shaft is connected with rotating mechanism and constantly rotated, and is put in the sample on substrate pallet to pass
Symmetry axis moves in a circle in top plan view centered on moving axis, on the other hand, due to substrate pallet and the slip of angular adjustment bar
Contact, so that substrate pallet is under angular adjustment bar position-limiting action, circular motion is switched to do in the plane where it certainly
Transhipment is dynamic, to realize the step coverage for improving technique for vacuum coating to nonplanar structure, especially in the case of deep hole plated film
Improve inner walls of deep holes film thickness uniformity.
2. the contact angle at ball end is contacted on angular adjustment bar to be changed with the bending and height of adjusting rod, and then
The angle of inclination of substrate pallet is adjusted, realize to different pore size in technique for vacuum coating than sample uniform coated.
Therefore, a kind of vacuum coating substrate holder provided by the present invention, it is possible to achieve the simple class row of substrate holder
Planetary is rotated, so that substrate holder can rotate, overturn in process, reaches improvement technique for vacuum coating to non-planar junction
Improvement inner walls of deep holes film thickness uniformity in the case of the step coverage of structure, especially deep hole plated film.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings.Following examples are only used for clearly illustrating the present invention
Technical scheme, and can not be limited the scope of the invention with this.
A kind of vacuum coating substrate holder as shown in Figure 1, including substrate pallet 1, rotating shaft and power transmission shaft, the power transmission shaft
It is connected with rotating mechanism, rotating shaft of the substrate pallet 1 by being arranged at center is connected with power transmission shaft, the substrate pallet 1
Bottom is provided with the toroidal cavity 1-3 using tray center as the center of circle, and the substrate tray bottom is additionally provided with angular adjustment bar
5, described one end of angular adjustment bar 5 is fixed on plant bottom case, and the other end can be for contact ball end 5-1, the contact ball end 5-1
Slided in toroidal cavity 1-3.
The power transmission shaft includes rotating mechanism connecting shaft 4 and joint block 3, and the end of the rotating mechanism connecting shaft 4 is
Joint spheroid 4-1, the joint spheroid 4-1 is included by ball-joint block 3, and the ball-joint block 3 is connected with rotating shaft.
The rotating shaft includes structure attachment screw 2, and described one end of structure attachment screw 2 is fixedly connected with substrate pallet 1, separately
One end is connected with drive axis.
The structure attachment screw 2 is fixed on the bottom of substrate pallet 1 by fixing screws 1-4.
The circle centre position of substrate pallet 1 is provided with screw counter bore 1-1, the fixing screws 1-4 and is installed on screw counter bore 1-1
It is interior, to avoid fixing screws 1-4 from being higher than the surface of substrate pallet 1 after installing, make the sample of vacuum coating by jack-up.
The edge of the substrate pallet 1 is provided with sample spacing ring 1-2, prevents that sample is thrown out of substrate in rotary course
Pallet 1.
The ball-joint block 3 includes being provided with receiving rotating shaft on upper cap 3-1 and lower cover cap 3-2, the upper cap 3-1
Shrinkage pool, because ball-joint block 3 is easily worn and torn in rotation.This structure makes ball-joint block 3 be easily installed dismounting,
It is easy to safeguard and changes.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, some improvement and deformation can also be made, these improve and deformed
Also it should be regarded as protection scope of the present invention.
Claims (7)
1. a kind of vacuum coating substrate holder, it is characterised in that including substrate pallet, rotating shaft and power transmission shaft, the power transmission shaft with
Rotating mechanism is connected, and rotating shaft of the substrate pallet by being arranged at center is connected with power transmission shaft, the substrate tray bottom
The toroidal cavity using tray center as the center of circle is provided with, the substrate tray bottom is additionally provided with angular adjustment bar, the angle
Degree adjusting rod one end is fixed on plant bottom case, and the other end is contact ball end, and the contact ball end can be slided in toroidal cavity
It is dynamic.
2. a kind of vacuum coating substrate holder according to claim 1, it is characterised in that the power transmission shaft includes whirler
Structure connecting shaft and joint block, the rotating mechanism connection the tip of the axis is joint spheroid, and the joint spheroid is by ball-joint lid
Cap is included, and the ball-joint block is connected with rotating shaft.
3. a kind of vacuum coating substrate holder according to claim 1, it is characterised in that the rotating shaft is connected including structure
Screw, described structure attachment screw one end is fixedly connected with substrate pallet, and the other end is connected with drive axis.
4. a kind of vacuum coating substrate holder according to claim 3, it is characterised in that the structure attachment screw passes through
Fixing screws are fixed on the bottom of substrate pallet.
5. a kind of vacuum coating substrate holder according to claim 4, it is characterised in that the substrate pallet circle centre position is set
Screw counter bore is equipped with, the fixing screws are installed in screw counter bore.
6. a kind of vacuum coating substrate holder according to claim 1, it is characterised in that the edge of the substrate pallet is set
It is equipped with sample spacing ring.
7. a kind of vacuum coating substrate holder according to claim 2, it is characterised in that the ball-joint block includes upper
The shrinkage pool for accommodating rotating shaft is provided with block and lower cover cap, the upper cap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611136440.5A CN107058966B (en) | 2016-12-12 | 2016-12-12 | A kind of vacuum coating substrate holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611136440.5A CN107058966B (en) | 2016-12-12 | 2016-12-12 | A kind of vacuum coating substrate holder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107058966A true CN107058966A (en) | 2017-08-18 |
| CN107058966B CN107058966B (en) | 2019-10-15 |
Family
ID=59619267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611136440.5A Active CN107058966B (en) | 2016-12-12 | 2016-12-12 | A kind of vacuum coating substrate holder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107058966B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107557749A (en) * | 2017-09-30 | 2018-01-09 | 宣城托新精密科技有限公司 | PVD vacuum coating tool fixtures |
| CN110923655A (en) * | 2018-09-19 | 2020-03-27 | 苏州能讯高能半导体有限公司 | Carry thing device and coating equipment |
| CN114807865A (en) * | 2022-04-18 | 2022-07-29 | 兰州交通大学 | Vacuum evaporation equipment capable of coating films on two sides |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102534536A (en) * | 2010-12-27 | 2012-07-04 | 北京中科信电子装备有限公司 | Multi-axis movement device for silicon wafer stage |
| US20130213302A1 (en) * | 2008-05-20 | 2013-08-22 | Fuji Electric Co., Ltd. | Film deposition apparatus for magnetic recording medium |
| CN104342635A (en) * | 2013-07-25 | 2015-02-11 | 三星显示有限公司 | Thin film deposition apparatus and method, and method of manufacturing organic light-emitting display apparatus |
| CN104630734A (en) * | 2015-02-13 | 2015-05-20 | 北京中科科美真空技术有限责任公司 | Rotary sample stage |
| CN206256161U (en) * | 2016-12-12 | 2017-06-16 | 苏州求是真空电子有限公司 | A kind of vacuum coating substrate holder |
-
2016
- 2016-12-12 CN CN201611136440.5A patent/CN107058966B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130213302A1 (en) * | 2008-05-20 | 2013-08-22 | Fuji Electric Co., Ltd. | Film deposition apparatus for magnetic recording medium |
| CN102534536A (en) * | 2010-12-27 | 2012-07-04 | 北京中科信电子装备有限公司 | Multi-axis movement device for silicon wafer stage |
| CN104342635A (en) * | 2013-07-25 | 2015-02-11 | 三星显示有限公司 | Thin film deposition apparatus and method, and method of manufacturing organic light-emitting display apparatus |
| CN104630734A (en) * | 2015-02-13 | 2015-05-20 | 北京中科科美真空技术有限责任公司 | Rotary sample stage |
| CN206256161U (en) * | 2016-12-12 | 2017-06-16 | 苏州求是真空电子有限公司 | A kind of vacuum coating substrate holder |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107557749A (en) * | 2017-09-30 | 2018-01-09 | 宣城托新精密科技有限公司 | PVD vacuum coating tool fixtures |
| CN107557749B (en) * | 2017-09-30 | 2024-05-17 | 宣城托新精密科技有限公司 | PVD vacuum coating tool fixture |
| CN110923655A (en) * | 2018-09-19 | 2020-03-27 | 苏州能讯高能半导体有限公司 | Carry thing device and coating equipment |
| CN114807865A (en) * | 2022-04-18 | 2022-07-29 | 兰州交通大学 | Vacuum evaporation equipment capable of coating films on two sides |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107058966B (en) | 2019-10-15 |
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| TR01 | Transfer of patent right |
Effective date of registration: 20220216 Address after: 310024 room 414, building 3, Hejing business center, Gudang street, Xihu District, Hangzhou, Zhejiang Patentee after: Hangzhou bifanke Electronic Technology Co.,Ltd. Address before: 215300 Building 1, 232 Yuanfeng Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: SUZHOU ADVANCED VACUUM ELECTRONIC EQUIPMENT CO.,LTD. |
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