CN206256161U - A kind of vacuum coating substrate holder - Google Patents
A kind of vacuum coating substrate holder Download PDFInfo
- Publication number
- CN206256161U CN206256161U CN201621354383.3U CN201621354383U CN206256161U CN 206256161 U CN206256161 U CN 206256161U CN 201621354383 U CN201621354383 U CN 201621354383U CN 206256161 U CN206256161 U CN 206256161U
- Authority
- CN
- China
- Prior art keywords
- vacuum coating
- substrate
- substrate holder
- power transmission
- pallet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of vacuum coating substrate holder, including substrate pallet, rotating shaft and power transmission shaft, the power transmission shaft is connected with rotating mechanism, rotating shaft of the substrate pallet by being arranged at center is connected with power transmission shaft, the substrate tray bottom is provided with the toroidal cavity with tray center as the center of circle, the substrate tray bottom is additionally provided with angular adjustment bar, described angular adjustment bar one end is fixed on plant bottom case, the other end is contact ball end, and the contact ball end can be slided in toroidal cavity.The utility model can realize the planetary rotation of simple class of substrate holder, so that substrate holder can rotate, overturn in process, the step coverage for improving technique for vacuum coating to nonplanar structure is reached, especially the improvement inner walls of deep holes film thickness uniformity in the case of deep hole plated film.
Description
Technical field
The utility model is related to a kind of vacuum coating substrate holder, belongs to vacuum coater technical field.
Background technology
Vacuum coater is widely used in various facet coatings fields, but for the plated film of three-dimensional special-shaped structure,
The support of the complex mechanisms such as substrate rotation, the upset of complexity is generally required, existing vacuum coating substrate holder is difficult to this
One requires.
Utility model content
Technical problem to be solved in the utility model is the defect for overcoming prior art, there is provided a kind of vacuum coating substrate
Base, can make substrate holder to rotate in process, overturn, and reach improvement technique for vacuum coating to nonplanar structure
Improvement inner walls of deep holes film thickness uniformity in the case of step coverage, especially deep hole plated film.
In order to solve the above technical problems, the utility model provides a kind of vacuum coating substrate holder, including substrate pallet, turn
Axle and power transmission shaft, the power transmission shaft are connected with rotating mechanism, and the substrate pallet is by being arranged at the rotating shaft of center and being driven
Axle is connected, and the substrate tray bottom is provided with the toroidal cavity with tray center as the center of circle, and the substrate tray bottom is also
Angular adjustment bar is provided with, described angular adjustment bar one end is fixed on plant bottom case, the other end is contact ball end, the contact
Ball end can be slided in toroidal cavity.
The power transmission shaft includes rotating mechanism connecting shaft and joint block, and the rotating mechanism connection the tip of the axis is joint
Spheroid, the joint spheroid is included by ball-joint block, and the ball-joint block is connected with rotating shaft.
The rotating shaft includes structure attachment screw, and described structure attachment screw one end is fixedly connected with substrate pallet, another
End is connected with drive axis.
The structure attachment screw is fixed on the bottom of substrate pallet by fixing screws.
The substrate pallet circle centre position is provided with screw counter bore, and the fixing screws are installed in screw counter bore.
The edge of the substrate pallet is provided with sample spacing ring.
The ball-joint block includes upper cap and lower cover cap, and the shrinkage pool for accommodating rotating shaft is provided with the upper cap.
The beneficial effect that the utility model is reached：
1. when vacuum coating is carried out, power transmission shaft is connected with rotating mechanism and constantly rotates, and is put in the sample on substrate pallet
Symmetry axis moves in a circle in top plan view centered on power transmission shaft, on the other hand, due to substrate pallet and angular adjustment bar
Sliding contact, so that substrate pallet switchs in the plane where it circular motion under angular adjustment bar position-limiting action
Do rotation movement, to realize improving technique for vacuum coating to the step coverage of nonplanar structure, especially deep hole plated film situation
Under improvement inner walls of deep holes film thickness uniformity.
2. the contact angle that ball end is contacted on angular adjustment bar can change with the bending of adjusting rod and height, and then
Angle of inclination to substrate pallet is adjusted, realize to different pore size in technique for vacuum coating than sample uniform coated.
Therefore, a kind of vacuum coating substrate holder provided by the utility model, it is possible to achieve substrate holder it is simple
The planetary rotation of class, so that substrate holder can rotate, overturn in process, reaches improvement technique for vacuum coating to non-flat
Improvement inner walls of deep holes film thickness uniformity in the case of the step coverage of face structure, especially deep hole plated film.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Specific embodiment
The utility model is further described below in conjunction with the accompanying drawings.Following examples are only used for clearly illustrating this
The technical scheme of utility model, and protection domain of the present utility model can not be limited with this.
A kind of vacuum coating substrate holder as shown in Figure 1, including substrate pallet 1, rotating shaft and power transmission shaft, the power transmission shaft
It is connected with rotating mechanism, rotating shaft of the substrate pallet 1 by being arranged at center is connected with power transmission shaft, the substrate pallet 1
Bottom is provided with the toroidal cavity 1-3 with tray center as the center of circle, and the substrate tray bottom is additionally provided with angular adjustment bar
5, described one end of angular adjustment bar 5 is fixed on plant bottom case, and the other end can be for contact ball end 5-1, the contact ball end 5-1
Slided in toroidal cavity 1-3.
The power transmission shaft includes rotating mechanism connecting shaft 4 and joint block 3, and the end of the rotating mechanism connecting shaft 4 is
Joint spheroid 4-1, the joint spheroid 4-1 are included by ball-joint block 3, and the ball-joint block 3 is connected with rotating shaft.
The rotating shaft includes structure attachment screw 2, and described one end of structure attachment screw 2 is fixedly connected with substrate pallet 1, separately
One end is connected with drive axis.
The structure attachment screw 2 is fixed on the bottom of substrate pallet 1 by fixing screws 1-4.
The circle centre position of substrate pallet 1 is provided with screw counter bore 1-1, the fixing screws 1-4 and is installed on screw counter bore 1-1
It is interior, higher than the surface of substrate pallet 1, to make the sample of vacuum coating by jack-up after avoiding fixing screws 1-4 from installing.
The edge of the substrate pallet 1 is provided with sample spacing ring 1-2, prevents the sample in rotary course to be thrown out of substrate
Pallet 1.
The ball-joint block 3 includes upper cap 3-1 and lower cover cap 3-2, and receiving rotating shaft is provided with the upper cap 3-1
Shrinkage pool, due to ball-joint block 3 be susceptible in rotation abrasion.This structure makes ball-joint block 3 be easily installed dismounting,
It is easy to safeguard and changes.
The above is only preferred embodiment of the present utility model, it is noted that for the common skill of the art
For art personnel, on the premise of the utility model know-why is not departed from, some improvement and deformation can also be made, these change
Enter and deform also to should be regarded as protection domain of the present utility model.
Claims (7)
1. a kind of vacuum coating substrate holder, it is characterised in that including substrate pallet, rotating shaft and power transmission shaft, the power transmission shaft with
Rotating mechanism is connected, and rotating shaft of the substrate pallet by being arranged at center is connected with power transmission shaft, the substrate tray bottom
The toroidal cavity with tray center as the center of circle is provided with, the substrate tray bottom is additionally provided with angular adjustment bar, the angle
Degree adjusting rod one end is fixed on plant bottom case, and the other end is contact ball end, and the contact ball end can be slided in toroidal cavity
It is dynamic.
2. a kind of vacuum coating substrate holder according to claim 1, it is characterised in that the power transmission shaft includes whirler
Structure connecting shaft and joint block, the rotating mechanism connection the tip of the axis is joint spheroid, and the joint spheroid is by ball-joint lid
Cap is included, and the ball-joint block is connected with rotating shaft.
3. a kind of vacuum coating substrate holder according to claim 1, it is characterised in that the rotating shaft includes structure connection
Screw, described structure attachment screw one end is fixedly connected with substrate pallet, and the other end is connected with drive axis.
4. a kind of vacuum coating substrate holder according to claim 3, it is characterised in that the structure attachment screw passes through
Fixing screws are fixed on the bottom of substrate pallet.
5. a kind of vacuum coating substrate holder according to claim 4, it is characterised in that the substrate pallet circle centre position sets
Screw counter bore is equipped with, the fixing screws are installed in screw counter bore.
6. a kind of vacuum coating substrate holder according to claim 1, it is characterised in that the edge of the substrate pallet sets
It is equipped with sample spacing ring.
7. a kind of vacuum coating substrate holder according to claim 2, it is characterised in that the ball-joint block includes upper
Block and lower cover cap, are provided with the shrinkage pool for accommodating rotating shaft in the upper cap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621354383.3U CN206256161U (en) | 2016-12-12 | 2016-12-12 | A kind of vacuum coating substrate holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621354383.3U CN206256161U (en) | 2016-12-12 | 2016-12-12 | A kind of vacuum coating substrate holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206256161U true CN206256161U (en) | 2017-06-16 |
Family
ID=59028737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621354383.3U Expired - Fee Related CN206256161U (en) | 2016-12-12 | 2016-12-12 | A kind of vacuum coating substrate holder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206256161U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107058966A (en) * | 2016-12-12 | 2017-08-18 | 苏州求是真空电子有限公司 | A kind of vacuum coating substrate holder |
| CN109972092A (en) * | 2019-05-20 | 2019-07-05 | 中国电子科技集团公司第十二研究所 | A kind of surface processing device of concave matrix |
-
2016
- 2016-12-12 CN CN201621354383.3U patent/CN206256161U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107058966A (en) * | 2016-12-12 | 2017-08-18 | 苏州求是真空电子有限公司 | A kind of vacuum coating substrate holder |
| CN107058966B (en) * | 2016-12-12 | 2019-10-15 | 苏州求是真空电子有限公司 | A kind of vacuum coating substrate holder |
| CN109972092A (en) * | 2019-05-20 | 2019-07-05 | 中国电子科技集团公司第十二研究所 | A kind of surface processing device of concave matrix |
| CN109972092B (en) * | 2019-05-20 | 2021-07-06 | 中国电子科技集团公司第十二研究所 | Surface treatment device for concave substrate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170616 Termination date: 20201212 |