JP2008308714A - Continuous film-forming apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a continuous film-forming apparatus which does not need to check the location of a rotary part. <P>SOLUTION: The continuous film-forming apparatus 1 includes a film-forming chamber 2, a vacuum chamber 3 and a gate valve 4. The continuous film-forming apparatus 1 also includes: a rotary part 51 having a substrate holder 11; a fixed part 52; a rotation and revolution mechanism 5 for making the substrate holder 11 rotated and revolved by relatively rotating the rotary part 51 with respect to the fixed part 52; a rotation drive means 7 for rotating and driving the rotary part 51 while being engaged with the rotary part 51; and a transportation means 6 for transporting the rotation and revolution mechanism 5 between the film-forming chamber 2 and the vacuum chamber 3. The rotation and revolution mechanism 5 takes a transportation mode in which the rotary part 51 cannot relatively rotate with respect to the fixed part 52, when being transported by the transporting means 6, and takes a rotation and revolution mode in which the rotary part 51 can relatively rotate with respect to the fixed part 52, when the rotary part 51 is rotated by the rotation drive means 7. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a continuous film forming apparatus for continuously forming a thin film on a substrate.

  2. Description of the Related Art Vacuum deposition apparatuses that form a thin film on a substrate by attaching a film material to a substrate such as glass in a vacuum have been known. In addition, the vacuum film forming apparatus is provided with a self-revolving mechanism for revolving and revolving a plurality of substrates in order to equalize the thickness of the thin film to be deposited (see, for example, Patent Document 1 or 2). .

  The self-revolving mechanism of the vacuum film forming apparatus described in Patent Document 1 includes a fixed portion having a circular rail, a bicycle wheel that travels on the rail, a rotation shaft that rotates as the bicycle wheel travels, and a rotation shaft that rotates together with the rotation shaft. And a rotating part having a substrate holder for holding the substrate. The fixed part is fixed to the film forming chamber, and the rotating part is attached to a rotating mechanism fixed to the film forming chamber.

  With such a configuration, in the vacuum film forming apparatus described in Patent Document 1, when the film forming operation is completed, the film forming chamber must be opened and the substrate must be replaced manually. As a result, when one film formation operation is completed, the film formation chamber is opened to the outside air for the replacement operation, and the vacuum state of the film formation chamber is released. Therefore, when forming a film on another substrate, the film forming chamber must be evacuated again from the beginning, and there is a problem that it takes time to prepare for film formation. Further, once the film formation chamber is opened to the atmosphere, impurities such as moisture may be adsorbed, which may adversely affect the quality of the film formation. Therefore, a continuous vacuum film forming apparatus as described in Patent Document 2 has been proposed.

  The vacuum film forming apparatus described in Patent Document 2 is a continuous film forming apparatus in which the substrate holder is automatically carried in or out while the vacuum state of the film forming chamber is maintained. Specifically, the continuous film forming apparatus includes a film forming chamber for forming a film on a substrate under a vacuum state, an inlet tank and an outlet tank for taking in and out the substrate provided on the side of the film forming chamber. It has. The film forming chamber and the inlet tank, and the film forming chamber and the outlet tank are each partitioned by a gate valve. The continuous film forming apparatus is provided with a roller conveyor that transfers the substrate holder from the inlet tank to the film forming chamber and also transfers the substrate holder from the film forming chamber to the outlet tank. With such a configuration, the substrate holder holding a plurality of substrates can be carried into or out of the film formation chamber while maintaining the vacuum state of the film formation chamber without opening the film formation chamber to the atmosphere. It is possible.

By the way, the continuous film forming apparatus described in Patent Document 2 has a planetary gear mechanism, and the planetary gear mechanism causes the substrate holder to revolve and rotate. However, when the planetary gear mechanism is used in this way, there is a risk of generating dust from the gears. Further, depending on the gear, a large vibration is generated, which may affect the accuracy of the thin film. Therefore, in order to solve these problems, it has been desired to use a vacuum film forming apparatus having a rail and a bicycle wheel described in Patent Document 1 and generating less dust and vibrations in a continuous manner.
Japanese Utility Model Publication No. 3-11056 JP-A-4-202777

  In order to make the vacuum film forming apparatus described in Patent Document 1 continuous, it is necessary to make it possible to transport a self-revolving mechanism composed of a rotating part and a fixed part. However, in the self-revolving mechanism described in Patent Document 1, when the rotating portion is separated from the rotating mechanism, the rotating portion and the fixed portion are in a state in which the rotating portion and the fixed portion can be rotated relative to each other (the bicycle wheel can run on the rail). End up. Therefore, when the self-revolving mechanism of the vacuum film forming apparatus described in Patent Document 1 is simply cut off and transported as it is, for example, by the above-described transporting means such as a roller conveyor, the bicycle wheel freely travels on the rail during transportation. There is a risk that.

  When the bicycle wheel travels during transport in this way, the angle of the rotating part of the rotation mechanism that is transported into the film forming chamber is different each time, and when the rotating part is attached to the rotating mechanism, the position of the engaging part is changed. Cannot be grasped. Therefore, in order to engage the rotating part and the rotating mechanism, it is necessary to first check the angle of the rotating part and rotate the rotating mechanism to a position where it can be engaged. Therefore, in order to confirm the angle of the rotating part, a sensor or the like is required, and there is a problem that the configuration is complicated.

  The present invention has been made in view of such points, and an object of the present invention is to provide a continuous film forming apparatus with less dust generation and vibration with a simple configuration.

  The continuous film formation apparatus according to the present invention partitions a film formation chamber for performing film formation on a substrate in a vacuum state, a vacuum chamber continuous with the film formation chamber, and the film formation chamber and the vacuum chamber. A gate valve that can be opened and closed, a fixed portion having an annular rail, a substrate holder that supports the substrate, a substantially disc-shaped bicycle wheel configured to be able to travel on the annular rail, a center of the bicycle wheel, and the substrate A rotation part having a rotation part that connects the center of the holder and rotates the substrate holder as the bicycle wheel travels, and a rotation / revolution mechanism having the rotation part installed in the film formation chamber, A rotation drive unit that engages and rotates the rotation unit; and a conveyance unit that conveys the rotation and revolution mechanism between at least the film formation chamber and the vacuum chamber, and the rotation and revolution mechanism includes: When transported by the transport means, the rotating unit and When the rotating part is rotated by the rotation driving means, the rotating part and the fixing part become a self-revolving form in which the rotating part and the fixing part are relatively rotatable. It is.

  In the continuous film forming apparatus, the self-revolving mechanism is not fixed in the film forming chamber, and can be carried into the film forming chamber from the vacuum chamber and carried out of the film forming chamber into the vacuum chamber by the conveying means. In addition, a gate valve that can be opened and closed is provided between the film formation chamber and the vacuum chamber. When the vacuum chamber is opened to the atmosphere, the film formation chamber is kept in a vacuum state by closing the gate valve. be able to. Thus, the substrate can be replaced without opening the film formation chamber to the atmosphere. Therefore, according to this continuous film forming apparatus, unlike the film forming apparatus in which the self-revolving mechanism is fixed in the film forming chamber, it is not necessary to re-vacuate the film forming chamber every time the substrate is changed, and the working time is shortened. can do.

  Moreover, in the said continuous-type film-forming apparatus, when a self-revolution mechanism is conveyed, a rotation part and a fixing | fixed part become a conveyance form which cannot rotate relatively. Thereby, the rotating part can be carried into the film forming chamber at a predetermined angle every time. Therefore, it is not necessary to confirm the angle of the rotating part when the rotation driving means and the rotating part are engaged. Therefore, according to the continuous film forming apparatus, it is not necessary to provide a sensor or the like for confirming the angle of the rotating portion, and a continuous film forming apparatus with less dust generation and vibration can be provided with a simple configuration. .

  The self-revolving mechanism is in the transport mode when the rotating part is placed at a predetermined position on the fixing part and the rotating part and the fixing part are engaged, and the rotating part and the fixing part are It is preferable that the self-revolving configuration is achieved by releasing the engagement between the rotating portion and the fixed portion by being separated in the vertical direction.

  Here, “separated in the vertical direction” means that the portion of the contact portion between the rotating portion and the fixed portion that has been unable to relatively rotate by rotating the rotating portion and the fixed portion is separated in the vertical direction. Say that. Therefore, even if the part that does not make the rotating part and the fixed part non-rotatable is in contact, if the part that made the rotating part and the fixed part non-rotatable by engaging is separated in the vertical direction , And “separated in the vertical direction” as used herein.

  In the continuous film forming apparatus, the rotating part and the fixed part of the self-revolving mechanism are engaged with each other when the rotating part is placed at a predetermined position on the fixed part, and cannot rotate relative to each other. Are separated from each other in the vertical direction so that the engagement is released and relative rotation is possible. Therefore, according to the continuous film forming apparatus, the self-revolution mechanism can be easily changed to the conveyance form or the self-revolution form only by changing the relative position between the rotating part and the fixed part in the vertical direction. Moreover, according to the said continuous-type film-forming apparatus, the self-revolution mechanism which has a conveyance form and a self-revolution form can be comprised easily. Furthermore, in the continuous film forming apparatus, the rotating part is placed on the fixed part in the transport mode. Therefore, the self-revolving mechanism can be transported in a compact state.

  The annular rail is formed of a cylindrical member having an axial direction as a vertical direction, and an outer peripheral end of the bicycle wheel is an inner peripheral surface of the annular rail when the self-revolving mechanism shifts from the transporting form to the self-revolving form. It is preferable that the slider slides from a predetermined stationary position to a traveling position above the stationary position.

  By configuring in this way, the self-revolving mechanism or the rotating part in which the rotating part and the fixed part can be rotated relative to each other by a simple operation that relatively moves the rotating part and the fixed part in the vertical direction. And the fixed portion can be changed to a conveyance form in which relative rotation is impossible.

  The portion of the inner peripheral surface of the annular rail that is lower than the traveling position and the outer peripheral end of the bicycle wheel slides is formed of a material that is more slippery than the traveling position portion of the inner peripheral surface of the annular rail. It is preferable.

  Accordingly, when the rotating portion and the fixed portion are separated in the vertical direction, it is possible to suppress the outer peripheral end of the bicycle wheel from being caught on the inner peripheral surface of the annular rail. Therefore, it is possible to smoothly separate the rotating portion and the fixed portion. Moreover, by this, a self-revolution mechanism can be smoothly changed from a conveyance form to a self-revolution form. Further, wear due to friction between the bicycle wheel and the inner peripheral surface of the annular rail can be suppressed.

  It is preferable that the lower end part of the said annular rail is provided with the dust receptacle which protrudes inside the said annular rail.

  As a result, even if dust is generated due to friction between the bicycle wheel and the inner peripheral surface of the annular rail, the dust is collected in the dust receiver. Therefore, dust can be prevented from adhering to the substrate and film formation can be performed with high accuracy.

  The bicycle ring is preferably formed in a shape in which the corners of the disk-like body are chamfered.

  As a result, the bicycle wheel and the inner peripheral surface of the annular rail come into smooth contact. Therefore, according to the said continuous-type film-forming apparatus, it can suppress that the internal peripheral surface of an annular rail is damaged by driving | running | working of a bicycle ring.

  The rotating part preferably has an angle adjusting mechanism for adjusting the angle of the substrate holder.

  According to the continuous film forming apparatus, since the angle of the substrate holder can be adjusted, it is possible to form a film more suitably.

  The rotation driving means includes a motor, a drive shaft that is rotationally driven by the motor, and a plurality of arms that extend radially outward from the drive shaft, and each of the plurality of arms has an arm engaging portion. The rotating portion has a plurality of engaging portions for engaging with the plurality of arm engaging portions, and the plurality of arm engaging portions and the plurality of engaging portions are the arms. Is engaged by being turned in a predetermined direction by the motor, and is preferably released by being turned in a direction opposite to the predetermined direction.

  As a result, the rotation driving means and the rotating portion can be easily engaged.

  In the film formation chamber, the film forming chamber further includes an elevating unit that engages with the fixed unit to support the fixed unit and raises and lowers the fixed unit, and the self-revolution mechanism has the rotating unit engaged with the rotation driving unit. After the combination, it is preferable that the elevating means lowers the fixing portion to form a self-revolving configuration in which the rotating portion and the fixing portion are separated in the vertical direction.

  Thereby, the rotating part and the fixed part can be easily separated in the vertical direction using the lifting means. Therefore, according to the said continuous film-forming apparatus, a self-revolution mechanism can be easily changed from a conveyance form to a self-revolution form.

  As described above, according to the present invention, a continuous film forming apparatus with less dust generation and vibration can be provided with a simple configuration.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

-Schematic configuration of continuous film forming apparatus 1-
FIG. 1 is a side sectional view of a continuous film forming apparatus 1 according to this embodiment. In this embodiment, as an example of the continuous film forming apparatus according to the present invention, an apparatus that forms a film by vapor deposition will be described. However, the continuous film forming apparatus according to the present invention is not limited thereto. For example, the film may be formed using a sputtering apparatus or the like.

  As shown in FIG. 1, the continuous film forming apparatus 1 includes a film forming chamber 2 and a vacuum chamber 3 continuous with the film forming chamber 2. In the film forming chamber 2, after a vacuum is applied, vapor deposition is performed in which a metal or non-metal film material is heated and evaporated to adhere to the surface of the substrate as a thin film. A gate valve 4 that can be opened and closed is provided between the film forming chamber 2 and the vacuum chamber 3. The vacuum chamber 3 is provided with a hatch (not shown), and the vacuum chamber 3 is placed in an airtight state by closing the hatch.

  The continuous film forming apparatus 1 includes a self-revolving mechanism 5 that revolves a substrate holder 11 described later. Although the detailed configuration of the self-revolving mechanism 5 will be described later, the self-revolving mechanism 5 includes a rotating part 51 having the substrate holder 11 and a fixing part 52 formed separately from the rotating part 51. . The continuous film forming apparatus 1 includes a transport unit 6, a rotation drive unit 7, an elevating unit 8, and an evaporation source 9.

  The transport means 6 transports the self-revolving mechanism 5 between the film forming chamber 2 and the vacuum chamber 3. The transport means 6 is attached to the vacuum chamber 3 and is configured to be extendable and contractable in the horizontal direction. Further, the transport means 6 includes a transport base 6a, a slider 6b, and a support base 6c. An engagement protrusion 6d that engages with the self-revolving mechanism 5 is formed on the transport table 6a.

  The support 6 c of the transport unit 6 is fixed to the floor surface of the vacuum chamber 3. A slider 6b is slidably mounted on the support base 6c in the horizontal direction. On the slider 6b, a transport table 6a is slidably attached in the horizontal direction. With such a configuration, when the slider 6b slides on the support base 6c and the transport base 6a slides on the slider 6b, the transport means 6 expands and contracts in the horizontal direction. With such a configuration, the self-revolving mechanism 5 engaged with the transport table 6 a via the engaging protrusion 6 d is transported between the film forming chamber 2 and the vacuum chamber 3 by the transport means 6.

  In addition, the conveyance means 6 is not restricted to the thing of this embodiment. Any form may be used as long as the self-revolving mechanism 5 can be transported at least between the film forming chamber 2 and the vacuum chamber 3.

  The rotation driving means 7 is engaged with the rotating portion 51 of the self-revolving mechanism 5 to rotate the rotating portion 51. The rotation driving means 7 is attached so as to penetrate the top plate of the film forming chamber 2. Specifically, the rotation driving means 7 includes an arm 7a that engages with the rotating portion 51, a rotating shaft 7b to which the arm 7a is attached, a bearing 7c, and a motor 7d. In the present embodiment, the rotation driving means 7 includes four arms 7a, and the four arms 7a are arranged at substantially equal intervals around the rotation shaft 7b. An engaging portion 7f for engaging with the rotating portion 51 is formed at the end of the arm 7a. The rotating shaft 7b is provided so as to penetrate the top plate from the inside of the film forming chamber 2 to the outside. The outer portion of the rotating shaft 7b is rotatably supported by a bearing 7c fixed to the outer surface of the top plate of the film forming chamber 2. The rotating shaft 7b and the motor 7d are connected via the transmission means 7e.

  With such a configuration, the rotating shaft 7b is rotationally driven by the motor 7d via the transmission means 7e. At this time, the arm 7a attached to the rotating shaft 7b turns around the rotating shaft 7b. Therefore, although details will be described later, when the rotating portion 51 and the arm 7a are engaged and the motor 7d of the rotation driving means 7 is started, the rotation portion 51 is rotationally driven by the rotation driving means 7.

  The lifting / lowering means 8 supports and fixes the fixed portion 52 of the self-revolving mechanism 5. The elevating means 8 is attached so as to penetrate the top plate of the film forming chamber 2. Specifically, the base portion 8a that engages with the fixed portion 52 of the self-revolving mechanism 5 and supports the fixed portion 52, the suspension member 8b that suspends the base portion 8a, and the suspension member 8b are wound or unwound. And a drive unit 8c. When the drive unit 8c winds up the suspension member 8b, the base unit 8a moves upward. On the other hand, when the drive unit 8c extends the suspension member 8b, the base unit 8a moves downward. Along with the operation of the lifting and lowering means 8, the fixing portion 52 supported by the base portion 8 a moves up and down. Further, the base portion 8 a is provided with an engaging protrusion 8 d that engages with the fixing portion 52 of the self-revolving mechanism 5.

  In addition, the raising / lowering means 8 is not restricted to the thing of this embodiment, What kind of form may be sufficient. For example, as in the present embodiment, not the suspension type that suspends the base portion 8a, but the push-up type that pushes up the base portion 8a from below. Further, a rail may be provided in the vertical direction of the inner wall surface of the film forming chamber 2 so that the base portion 8a slides along the rail. Further, the shape of the base portion 8a is not limited to that of the present embodiment.

  The evaporation source 9 heats and evaporates the film material by irradiating the film material with an electron beam. The evaporation source 9 is fixed to the inner bottom surface in the film forming chamber 2.

  The above is the schematic configuration of the continuous film forming apparatus 1. Next, the configuration of the self-revolving mechanism 5 will be described in detail with reference to FIGS. 2 and 3 are side sectional views of the self-revolving mechanism 5, and FIG. 4 is a plan view of the self-revolving mechanism 5.

-Auto-revolution mechanism 5-
As shown in FIGS. 2 and 3, the self-revolving mechanism 5 includes a rotating portion 51 and a fixing portion 52 formed separately from the rotating portion 51. When the self-revolving mechanism 5 is transported by the transport means 6, as shown in FIG. 2, the rotating part 51 is placed at a predetermined position on the fixing part 52, thereby causing the rotating part 51 and the fixing part 52 to move. And the rotating portion 51 and the fixed portion 52 are in a conveying form in which relative rotation is impossible. On the other hand, when the rotating part 51 is rotated by the rotation driving means 7, the self-revolving mechanism 5 has the rotating part 51 and the fixed part 52 separated from each other in the vertical direction as shown in FIG. 51 and the fixed part 52 are disengaged, and the rotating part 51 and the fixed part 52 take a self-revolving manner in which the relative rotation is possible. Specific operations will be described later.

  The rotating unit 51 includes a substrate holder 11 that supports the substrate, a disc-shaped bicycle wheel 12, and a rotation shaft 13 that passes through the center of the bicycle wheel 12. The substrate holder 11 and the bicycle wheel 12 are connected by a rotation shaft 13 so as not to be relatively rotatable. With such a configuration, the substrate holder 11 rotates (spins) as the bicycle wheel 12 rotates. As shown in FIG. 4, in the present embodiment, the rotating unit 51 has four substrate holders 11, bicycle wheels 12, and rotation shafts 13, which are substantially equiangular on the same circumference. It is arranged for each.

  The rotating unit 51 includes four angle adjusting mechanisms 14 that adjust the angles of the four substrate holders 11, and support legs 15 connected to the angle adjusting mechanism 14.

  As shown in FIGS. 2 and 3, the angle adjusting mechanism 14 has two movable frames 14a provided so as to sandwich the bicycle wheel 12, and a gate-shaped adjusting frame 14b sandwiching both movable frames 14a. Yes. A notch 18 is formed at the tip of both movable frames 14a, and a shaft 17 is inserted into the notch 18 of both movable frames 14a. Thereby, both the movable frames 14a and the shaft 17 are engaged. On the other hand, grooves 16 are formed on the surfaces of the adjustment frame 14b that are in contact with the movable frames 14a. The groove 16 is formed in an arc shape centered on a point where the outer peripheral end 12a of the bicycle wheel 12 contacts an annular rail 22 of the fixed portion 52 described later. A shaft 17 is inserted into both the grooves 16 so as to be slidable in the grooves 16. In addition, the shaft 17 is fixed to the adjustment frame 14b so as not to slide by using a fastener such as a bolt (not shown).

  When the fastener is removed, the shaft 17 can be slid in the substantially arc-shaped groove 16. When the shaft 17 is slid in the groove 16, the angle of the movable frame 14a with respect to the adjustment frame 14b changes. Thereby, the rotating shaft 13 fixed to the movable frame 14a, the substrate holder 11 fixed to the rotating shaft 13, and the bicycle wheel 12 are centered on the outer peripheral end 12a that contacts the inner peripheral surface 22a of the annular rail 22 of the bicycle wheel 12. Swing as. With such a configuration, the angle of the substrate holder 11 with respect to the horizontal plane can be freely adjusted.

  The support leg 15 includes an engagement portion 15a formed at the upper end portion, and four leg members 15b attached to the four angle adjusting mechanisms 14, respectively, and an annular support member 15c that fixes the four leg members 15b. Is formed. The engaging portion 15a is formed so as to be engageable with the engaging portion 7f of the rotation driving means 7 (see FIG. 1) described above.

  The fixing portion 52 connects the base 21 made of an annular plate-like body, the annular rail 22 made of a cylindrical member having the substantially vertical direction as an axial direction, the base 21 and the annular rail 22, and suspended the annular rail. And a connecting member 23. Note that the outer peripheral end 12 a of the bicycle wheel 12 is in contact with the annular rail 22 in both the conveying mode shown in FIG. 2 and the self-revolving mode shown in FIG. 3. As shown in FIG. 4, the base 21 has an engagement hole 26 that engages with the engagement protrusion 6d of the transport base 6a, and an engagement hole 28 that engages with the engagement protrusion 8d of the base portion 8a. Is formed. Further, the base 21 is provided with an engagement protrusion 21 a that engages with an engagement hole (not shown) formed in the support member 15 c of the support leg 15.

  FIG. 5 is an enlarged side sectional view showing the annular rail 22 and a part of the bicycle wheel 12. As shown in FIG. 5, the bicycle wheel 12 is formed in a shape in which the corners of the disk-like body are chamfered. Therefore, the bicycle wheel 12 is formed in a tapered shape as it goes outward in the radial direction.

  Although the detailed operation will be described later, when the transport mode is changed to the self-revolving mode, the outer peripheral end 12a of the bicycle wheel 12 is stopped from the predetermined stationary position P0 along the inner peripheral surface 22a of the annular rail 22. It slides to the traveling position P1 that is above the position P0. Therefore, the portion of the inner peripheral surface 22a of the annular rail 22 that is lower than the traveling position P1 and the outer peripheral end 12a of the bicycle wheel 12 slides is more slippery than the traveling position P1 portion of the inner peripheral surface 22a of the annular rail 22. It is made of material. Here, the traveling position P1 portion refers to a portion of the inner peripheral surface 22a that contacts the outer peripheral end 12a of the bicycle wheel 12 when the bicycle wheel 12 travels.

  Specifically, in the present embodiment, the annular rail 22 is press-fitted with a lubricating member 25 coated with a lubricant (for example, a fluororesin or the like), and the lubricating member 25 causes a part of the inner peripheral surface 22a to be pressed. Is formed. In addition, what forms the part of the inner peripheral surface 22a of the annular rail 22 below the travel position P1 and the outer peripheral end 12a of the bicycle wheel 12 slides is not limited to the lubricating member 25. For example, instead of press-fitting the lubricating member 25 into the annular rail 22, the portion of the inner peripheral surface 22a may be coated with a lubricant.

  As shown in FIGS. 2 to 4, a dust receiver 24 is provided at the lower end of the annular rail 22. In the present embodiment, the dust receiver 24 is formed of an annular member having an L-shaped cross section.

  The above is the configuration of the self-revolving mechanism 5. Next, the operation of the continuous film forming apparatus 1 will be described with reference to FIGS. 1 and 6 to 12. 6 to 10 and 12 are side cross-sectional views showing the operation of the continuous film forming apparatus 1, and FIGS. 11A and 11B are plane views showing the operation of the continuous film forming apparatus 1. FIG. FIG.

-Operation of the continuous film forming apparatus 1-
First, a hatch (not shown) provided in the vacuum chamber 3 is opened, and the self-revolving mechanism 5 is carried into the vacuum chamber 3 from the hatch. When the carry-in of the revolution mechanism 5 is completed, the hatch is closed. When the hatch is closed, the vacuum chamber 3 is evacuated by a vacuum device (not shown). In addition, the self-revolving mechanism 5 carried into the vacuum chamber 3 is engaged with the transport unit 6 and supported by the transport unit 6 (see FIG. 1).

  Thereafter, as shown in FIGS. 1 and 6, the gate valve 4 provided between the film forming chamber 2 and the vacuum chamber 3 is opened. Then, the self-revolution mechanism 5 is transported into the film forming chamber 2 by the transport means 6. Specifically, the slider 6b of the transport means 6 is slid on the support base 6c in the direction of the arrow in FIGS. 1 and 6, and the transport base 6a is slid on the slider 6b in the same direction. As a result, the transfer means 6 extends, and the transfer table 6 a reaches the film forming chamber 2. Accordingly, the self-revolving mechanism 5 engaged with the transport means 6 is transported into the film forming chamber 2 (see FIG. 7).

  In addition, when engaging with the transport means 6 as described above and transported to the film forming chamber 2, the self-revolution mechanism 5 has the rotating unit 51 placed at a predetermined position on the fixed unit 52 and the rotating unit 51. When the fixed portion 52 is engaged, the rotating portion 51 and the fixed portion 52 take a conveyance form in which relative rotation is impossible. Specifically, as shown in FIG. 2, the support member 15c of the support leg 15 is engaged with a predetermined position on the base 21 of the fixing portion 52 (the engagement hole of the support member 15c and the engagement protrusion 21a of the base 21 are engaged). The base 21 and the support member 15c are engaged with each other. As a result, the rotating unit 51 is supported by the fixed unit 52. By taking such a form, the rotation part 51 and the fixed part 52 cannot be relatively rotated. Therefore, it is possible to prevent the rotating part 51 of the self-revolving mechanism 5 from rotating with respect to the fixed part 52 when being transported by the transporting means 6.

  When the self-revolving mechanism 5 is transported into the film forming chamber 2, the driving unit 8c of the elevating means 8 raises the base unit 8a. Eventually, the engagement protrusion 8d of the base portion 8a fits into the engagement hole 26 formed in the base 21 of the fixing portion 52, and the base portion 8a and the fixing portion 52 engage (see FIG. 8). And the self-revolving mechanism 5 is lifted with the raise of the base part 8a. Along with this, the engagement between the self-revolving mechanism 5 and the conveying means 6 is eventually released, and the self-revolving mechanism 5 is separated from the conveying means 6 (see FIG. 9).

  After the self-revolving mechanism 5 and the conveying means 6 are separated, the conveying table 6a and the slider 6b of the conveying means 6 slide to the vacuum chamber 3 side. Thereby, the conveying means 6 is stored in the vacuum chamber 3 (see FIG. 10). When it is confirmed that the transport means 6 is stored in the vacuum chamber 3, the gate valve 4 is closed.

  At this time, the rotation shaft 7b of the rotation driving means 7 is driven to rotate by the motor 7d, and the arm 7a is turned in a predetermined direction (the direction of the arrow in FIG. 10) around the rotation shaft 7b. Each of the four arms 7a is turned to an angular position equal to each engaging portion 15a of the support leg 15 that supports the four substrate holders of the self-revolving mechanism 5. As the four arms 7a turn in this way, each engaging portion 7f of the arm 7a moves to a position where it overlaps with each engaging portion 15a of the support leg 15 in plan view (FIG. 11A, (See (b)). At this time, as shown in FIG. 10, the engaging portion 7f of the arm 7a and the engaging portion 15a of the support leg 15 are in a position where they are not engaged in the vertical direction.

  Then, the fixing portion 52 of the self-revolving mechanism 5 is lowered by the lifting / lowering means 8. Specifically, the driving portion 8c of the lifting / lowering means 8 is driven and the base portion 8a is lowered. As the base portion 8a is lowered, the fixing portion 52 engaged with the base portion 8a is also lowered. As the fixing portion 52 is lowered, the rotating portion 51 placed on the fixing portion 52 is also lowered. As described above, each engagement portion 7f of the arm 7a is in a position overlapping with each engagement portion 15a of the support leg 15 in plan view. Therefore, when the rotating part 51 is lowered, the engaging part 7f of the arm 7a and the engaging part 15a of the support leg 15 which are separated in the vertical direction approach each other and are engaged with each other. Thereby, the rotation part 51 is suspended and supported by the rotation drive means 7 via the arm 7a.

  Further, even after the rotating portion 51 is engaged with the rotation driving means 7 and supported by the rotation driving means, the base portion 8a is lowered and the fixing portion 52 is also lowered. Thereby, the rotation part 51 and the fixing | fixed part 52 are spaced apart in the up-down direction, and the rotation part 51 and the fixing | fixed part 52 become a self-revolving form which can be rotated relatively (refer FIG. 12). Specifically, a portion in which the rotating portion 51 and the fixed portion 52 cannot be relatively rotated by engaging with each other (in this embodiment, an engagement hole (not shown) formed in the support member 15c of the support leg 15). And the engaging protrusions 21a provided on the base 21) are separated in the vertical direction and the engagement is released, so that the rotating portion 51 and the fixed portion 52 can be rotated relative to each other.

  As described above, when the rotating part 51 and the fixed part 52 are separated in the vertical direction, that is, when the transfer form is shifted to the self-revolving form, the outer peripheral end 12 a of the bicycle wheel 12 is the inner periphery of the annular rail 22. It slides upward along the inner circumferential surface 22a without leaving the surface 22a (see FIG. 5). Specifically, the outer peripheral end 12a of the bicycle wheel 12 slides from a predetermined stationary position P0 on the inner peripheral surface 22a to a traveling position P1 above the stationary position P0. Here, as described above, the portion of the inner peripheral surface 22a of the annular rail 22 that is lower than the travel position P1 and the outer peripheral end 12a of the bicycle wheel 12 slides is more than the travel position P1 portion of the inner peripheral surface 22a. Made of slippery material. Therefore, the outer peripheral end 12a of the bicycle wheel 12 slides smoothly on the inner peripheral surface 22a.

  In this manner, the self-revolving mechanism 5 is capable of relative rotation by separating the rotating portion 51 and the fixed portion 52 that were not relatively rotatable by being engaged via the engaging protrusion 21a in the vertical direction. It becomes a self-revolving form (refer FIG. 12).

  In this state, the film material is evaporated by the evaporation source 9 and the motor 7d of the rotation driving means 7 is started. Thereby, the rotating shaft 7b is rotationally driven by the motor 7d, and the rotating part 51 rotates. At this time, the rotating part 51 and the fixed part 52 are in a relatively rotatable state, and only the rotating part 51 rotates and the fixed part 52 does not rotate. Thereby, the outer peripheral end 12a of the bicycle wheel 12 of the rotating portion 51 that is in contact with the inner peripheral surface 22a of the annular rail 22 of the fixed portion 52 that does not rotate travels on the inner peripheral surface 22a.

  Specifically, in this embodiment, at least the traveling position P1 portion of the inner peripheral surface 22a is formed of a material that is difficult to slip. Therefore, when the bicycle wheel 12 rotates around the rotation shaft 7b while being in contact with the travel position P1 portion of the inner peripheral surface 22a of the annular rail 22, the bicycle wheel 12 is between the outer peripheral end 12a and the inner peripheral surface 22a. It will drive | work on the internal peripheral surface 22a with this frictional force. That is, the bicycle wheel 12 rotates around the rotation shaft 13 while revolving around the rotation shaft 7b. Along with this, the substrate holder 11 also rotates around the rotation axis 13 while revolving around the rotation axis 7b.

  In this way, the film material is evaporated on the substrate held by the substrate holder 11 by uniformly evaporating the film material from the evaporation source 9 while revolving and rotating the substrate holder 11 in the film formation chamber 2. Form a film. After film formation, the process reverse to the above process is followed.

  Specifically, the fixing unit 52 is raised by the elevating means 8 and lifts the rotating unit 51. Then, the arm 7a of the rotation driving means 7 is turned in the direction opposite to the predetermined direction (the direction of the arrow in FIG. 10) to release the engagement between the rotation driving means 7 and the rotating portion 51. Thereafter, the transfer means 6 is expanded again into the film forming chamber 2. Then, the fixing unit 52 on which the rotating unit 51 is placed is lowered by the lifting and lowering unit 8, and the fixing unit 52 and the conveying unit 6 are engaged. Then, the self-revolving mechanism 5 is transported to the vacuum chamber 3 by the transport means 6. Thereafter, the gate valve 4 is closed and the hatch (not shown) of the vacuum chamber 3 is opened while keeping the vacuum state in the film forming chamber 2. Then, the self-revolving mechanism 5 holding the substrate after film formation is unloaded from the hatch, and a new self-revolving mechanism 5 holding the substrate before film formation is carried in.

  As described above, in the continuous film forming apparatus 1 according to this embodiment, the self-revolving mechanism 5 is not fixed in the film forming chamber 2, and is carried into the film forming chamber 2 from the vacuum chamber 3 by the transport unit 6. In addition, it can be carried out from the film forming chamber 2 to the vacuum chamber 3. A gate valve 4 is provided between the film forming chamber 2 and the vacuum chamber 3. Thereby, the substrate can be replaced without opening the film formation chamber 2 to the atmosphere. Therefore, according to the continuous film forming apparatus 1, unlike the vacuum film forming apparatus in which the self-revolving mechanism 5 is fixed in the film forming chamber 2, it is not necessary to make the film forming chamber vacuum again each time the substrate is replaced. Work time can be shortened.

  Moreover, according to this continuous film-forming apparatus 1, when the auto-revolution mechanism 5 is conveyed, the rotation part 51 and the fixing | fixed part 52 become a conveyance form which cannot be relatively rotated. Therefore, it is possible to prevent the rotating part 51 from rotating relative to the fixed part 52 during the conveyance. Thereby, the rotating part 51 can be carried into the film forming chamber 2 at a predetermined angle set in advance. Therefore, it is not necessary to confirm the positions of the rotation drive unit 7 and the rotation unit 51 when the rotation drive unit 7 and the rotation unit 51 are engaged. Therefore, according to the continuous film forming apparatus 1, it is not necessary to provide a sensor or the like in order to confirm the angle of the rotating unit 51, and the continuous film forming apparatus 1 with less dust generation and vibration is provided with a simple configuration. be able to.

  In the continuous film forming apparatus 1, the rotation unit 51 and the fixed unit 52 of the self-revolution mechanism 5 are different from the rotation unit 51 by placing the rotation unit 51 at a predetermined position on the fixed unit 52. When the fixing portion 52 is engaged (the engaging hole of the support member 15c and the engaging protrusion 21a of the base 21 are engaged), the relative rotation is impossible, and the rotating portion 51 and the fixing portion 52 are separated in the vertical direction. As a result, the engagement between the rotating portion 51 and the fixed portion 52 is released, and the relative rotation is enabled.

  Here, “separated in the vertical direction” means a portion of the contact portion between the rotating portion 51 and the fixed portion 52 that has made the rotating portion 51 and the fixed portion 52 relatively unrotatable by engaging with each other (this In the embodiment, the engagement hole (not shown) formed in the support member 15c of the support leg 15 and the engagement protrusion 21a provided on the base 21) are separated in the vertical direction.

  As a result, according to the continuous film forming apparatus 1, the self-revolution mechanism 5 can be easily changed to the conveyance form or the self-revolution form simply by changing the relative position of the rotating part 51 and the fixed part 52 in the vertical direction. Can be made. Moreover, according to this continuous film-forming apparatus 1, the self-revolving mechanism 5 which has a conveyance form and a self-revolution form can be comprised easily. Further, in the continuous film forming apparatus 1, the rotating unit 51 is placed on the fixed unit 52 in the transport mode. Therefore, the self-revolving mechanism 5 can be conveyed in a compact state.

  In the continuous film forming apparatus 1, the annular rail 22 of the fixed portion 52 is formed by a cylindrical member whose axial direction is the vertical direction. Further, the outer peripheral end of the bicycle wheel 12 is located above the predetermined stationary position P0 from the predetermined stationary position P0 along the inner peripheral surface 22a of the annular rail 22 when the self-revolving mechanism 5 shifts from the conveying form to the self-revolving form. To the travel position P1. By comprising in this way, the rotation part 51 and the fixed part 52 can be relatively rotated in the self-revolving mode or relative rotation impossible with the simple operation which only moves the rotary part 51 and the fixed part 52 up and down. Can be changed to a proper transport mode.

  Further, according to the continuous film forming apparatus 1, the portion below the travel position P <b> 1 of the inner peripheral surface 22 a of the annular rail 22 and the outer peripheral end 12 a of the bicycle wheel 12 slides is the inner peripheral surface of the annular rail 22. It is formed of a material that is more slippery than the traveling position P1 portion of 22a. Thereby, when the rotation part 51 and the fixing | fixed part 52 are spaced apart in the up-down direction, it can suppress that the outer peripheral end 12a of the bicycle ring 12 catches on the inner peripheral surface 22a of the annular rail 22. FIG. Therefore, it is possible to smoothly separate the rotating part 51 and the fixed part 52. Moreover, by this, the self-revolving mechanism 5 can be smoothly changed from the conveyance form to the self-revolving form. Further, wear due to friction between the bicycle wheel 12 and the inner peripheral surface 22a of the annular rail 22 can be suppressed.

  In the present embodiment, at least the traveling position P1 portion of the inner peripheral surface 22a is formed of a material that is difficult to slip. Therefore, it is possible to travel the bicycle wheel 12 while suppressing the bicycle wheel 12 from slipping with respect to the annular rail 22 at the travel position. Thereby, rotation of substrate holder 11 can be performed smoothly.

  Further, a dust receiver 24 that protrudes inside the annular rail 22 is provided at the lower end of the annular rail 22 of the continuous film forming apparatus 1. Thus, even if dust is generated due to friction between the bicycle wheel 12 and the inner peripheral surface 22 a of the annular rail 22, the dust is collected in the dust receiver 24. Therefore, dust can be prevented from adhering to the substrate and film formation can be performed with high accuracy.

  In the continuous film forming apparatus 1, the bicycle ring 12 is formed in a shape in which the corners of the disk-like body are chamfered. As a result, the bicycle wheel 12 and the inner peripheral surface 22a of the annular rail 22 come into smooth contact. Therefore, according to the continuous film forming apparatus 1, it is possible to prevent the inner peripheral surface 22 a of the annular rail 22 from being damaged by the traveling of the bicycle wheel 12.

  By the way, in the continuous film forming apparatus using the conventional planetary gear mechanism, in order to change the angle of the substrate holder, it is necessary to change the angle at which the gears mesh with each other, and work such as replacing the gear itself is required. there were. Therefore, the angle of the substrate holder cannot be easily changed.

  However, the rotating unit 51 of the continuous film forming apparatus 1 has the angle adjusting mechanism 14 that adjusts the angle of the substrate holder 11. Specifically, the substrate holder 11, the bicycle ring 12, and the rotation shaft 13 are integrally swung around the outer peripheral end 12 a that contacts the inner peripheral surface 22 a of the annular rail 22 of the bicycle wheel 12 by the angle adjusting mechanism 14. It is configured to be movable. Therefore, according to the continuous film forming apparatus 1, the angle of the substrate holder 11 can be easily changed without replacing the constituent members. Therefore, it can form into a film more suitably according to the shape of a substrate.

  In the continuous film forming apparatus 1, the engagement portions 7 f of the plurality of arms 7 a of the rotation drive unit 7 and the engagement portions 7 f of the rotation unit 51 are arranged in a predetermined direction (the arm 7 a is driven by the motor 7 d ( Engagement is made by turning in the direction of the arrow in FIG. 10, and engagement is released by turning in the direction opposite to the predetermined direction. In this way, according to the continuous film forming apparatus 1, the rotation driving means 7 and the rotating unit 51 can be easily engaged.

  Further, in the continuous film forming apparatus 1, the self-revolution mechanism 5 includes the rotating unit 51 and the fixed unit when the rotating unit 51 is engaged with the rotation driving unit 7 and then the lifting unit 8 lowers the fixed unit 52. 52 is in a self-revolving form separated from the vertical direction. Therefore, according to the continuous film forming apparatus 1, the rotating unit 51 and the fixed unit 52 can be easily separated in the vertical direction by using the elevating means 8. Therefore, according to this continuous film-forming apparatus 1, the self-revolving mechanism 5 can be easily shifted from a conveyance form to a self-revolving form.

  In the present embodiment, the vacuum chamber 3 is used only for the purpose of maintaining the vacuum state of the film forming chamber 2, but the vacuum chamber 3 is not limited to this. For example, the vacuum chamber 3 may also be a film forming chamber kept in a vacuum state for film formation.

  As described above, the present invention is useful for a continuous film forming apparatus that continuously forms a thin film on a substrate.

It is side surface sectional drawing of the continuous-type film-forming apparatus which concerns on embodiment. It is side surface sectional drawing of the self-revolving mechanism at the time of a conveyance form. It is side surface sectional drawing of the self-revolution mechanism vicinity at the time of a self-revolution form. It is a top view of a self-revolving mechanism. It is side surface sectional drawing which expands and shows a ring rail and a part of bicycle ring. It is a top view which shows operation | movement of a continuous-type film-forming apparatus. It is side surface sectional drawing which shows operation | movement of a continuous-type film-forming apparatus. It is side surface sectional drawing which shows operation | movement of a continuous-type film-forming apparatus. It is side surface sectional drawing which shows operation | movement of a continuous-type film-forming apparatus. It is side surface sectional drawing which shows operation | movement of a continuous-type film-forming apparatus. (A) And (b) is a top view which shows operation | movement of a continuous type film-forming apparatus. It is side surface sectional drawing which shows operation | movement of a continuous-type film-forming apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Continuous film-forming apparatus 2 Film-forming chamber 3 Vacuum chamber 4 Gate valve 5 Self-revolving mechanism 6 Conveyance means 7 Rotation drive means 7a Arm 7b Rotating shaft 7d Motor 7f Engagement part (arm engagement part)
DESCRIPTION OF SYMBOLS 8 Elevating means 8d Engagement protrusion 9 Evaporation source 11 Substrate holder 12 Bicycle wheel 12a Outer peripheral end 13 Rotating shaft 14 Angle adjustment mechanism 15a Engagement part 21 Base 21a Engagement protrusion 22 Annular rail 22a Inner peripheral surface 23 Connecting member 24 Dust receiver 25 Lubricating member 51 Rotating part 52 Fixed part P0 Rest position P1 Traveling position

Claims (9)

A film formation chamber for performing film formation on the substrate in a vacuum state;
A vacuum chamber continuous with the film forming chamber;
A gate valve that partitions the film formation chamber and the vacuum chamber and can be opened and closed;
A fixed part having an annular rail;
A substrate holder that supports the substrate, a substantially disc-shaped bicycle wheel configured to be able to travel on the annular rail, a center of the bicycle wheel and a center of the substrate holder are connected, and the bicycle wheel is moved along with the traveling of the bicycle wheel. A rotating part having a rotation axis for rotating the substrate holder; and
A self-revolving mechanism having
A rotation driving means that is installed in the film forming chamber, engages with the rotation unit, and rotates the rotation unit;
Transport means for transporting the revolving mechanism between at least the film forming chamber and the vacuum chamber,
The revolving mechanism is
When transported by the transport means, the rotating unit and the fixed unit are transported in a relatively non-rotatable manner,
A continuous film forming apparatus in which, when the rotating unit is rotated by the rotation driving unit, the rotating unit and the fixed unit are rotated and revolved relative to each other. The continuous film forming apparatus according to claim 1,
The revolving mechanism is
The rotating portion is placed at a predetermined position on the fixed portion, and the rotating portion and the fixed portion engage with each other to form the transport mode.
A continuous film forming apparatus in which the rotating part and the fixed part are spaced apart in the vertical direction and the engagement between the rotating part and the fixed part is released, so that the self-revolving mode is achieved. The continuous film forming apparatus according to claim 2,
The annular rail is composed of a cylindrical member whose axial direction is the vertical direction,
The outer peripheral end of the bicycle wheel is above a predetermined rest position from a predetermined rest position along the inner peripheral surface of the annular rail when the self-revolution mechanism shifts from the transport mode to the self-revolution mode. Continuous film deposition system that slides to the running position. The continuous film forming apparatus according to claim 3,
The portion of the inner peripheral surface of the annular rail that is lower than the traveling position and the outer peripheral end of the bicycle wheel slides is formed of a material that is more slippery than the traveling position portion of the inner peripheral surface of the annular rail. Continuous film forming equipment. The continuous film forming apparatus according to claim 3 or 4,
A continuous film forming apparatus in which a dust receiver is provided at a lower end portion of the annular rail and protrudes inside the annular rail. A continuous film forming apparatus according to any one of claims 3 to 5,
The bicycle ring is a continuous film forming apparatus in which a corner portion of a disk-like body is formed in a chamfered shape. The continuous film forming apparatus according to any one of claims 1 to 6,
The rotating part has a continuous film forming apparatus having an angle adjusting mechanism for adjusting an angle of the substrate holder. A continuous film forming apparatus according to any one of claims 1 to 7,
The rotational drive means includes a motor, a drive shaft that is rotationally driven by the motor, and a plurality of arms that extend radially outward from the drive shaft,
Each of the plurality of arms is formed with an arm engaging portion,
The rotating portion has a plurality of engaging portions for engaging with the plurality of arm engaging portions,
The plurality of arm engaging portions and the plurality of engaging portions are engaged when the arm is turned in a predetermined direction by the motor and is turned in a direction opposite to the predetermined direction. Is a continuous film forming apparatus. A continuous film forming apparatus according to any one of claims 1 to 8,
The film forming chamber further includes an elevating unit that engages with the fixing unit to support the fixing unit, and moves the fixing unit up and down.
The self-revolving mechanism is configured such that after the rotating part is engaged with the rotation driving means, the elevating means lowers the fixing part, whereby the rotating part and the fixing part are separated in the vertical direction. A continuous film forming apparatus in the form.

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