CN116334552B - Neodymium iron boron cast sheet sputtering processing method - Google Patents
Neodymium iron boron cast sheet sputtering processing method Download PDFInfo
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- CN116334552B CN116334552B CN202310365434.0A CN202310365434A CN116334552B CN 116334552 B CN116334552 B CN 116334552B CN 202310365434 A CN202310365434 A CN 202310365434A CN 116334552 B CN116334552 B CN 116334552B
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Abstract
The invention discloses a sputtering processing method of a neodymium iron boron cast sheet, which comprises the following steps: under the initial state of the placing gap, firstly placing a casting piece with a cylindrical structure in the placing gap; SS02, sputtering mechanism, in which the upper end face of the cast sheet is sputtered, and at this time, the first material roller can rotate, so that the peripheral end face of the cast sheet can be directly processed by the sputtering mechanism; SS03, the first support is driven to rotate forward by the first push rod in an extending mode, at the moment, the front end of the placing gap is lowered, the tail end of the placing gap is raised, the tail end face of the cast piece leaks out to be opposite to the sputtering mechanism, and the cast piece can be processed by the sputtering mechanism; SS04, the first support is driven to reversely rotate by the rotating shaft A through the retraction of the first push rod, at the moment, the front end of the placing gap is raised, the tail end of the placing gap is lowered, the front end face of the cast sheet leaks out to be opposite to the sputtering mechanism, and the cast sheet can be processed by the sputtering mechanism; SS05, standing the cast sheet after sputtering in a placing gap, and taking out the cast sheet after the sputtered material is effectively combined with the end face.
Description
Technical Field
The invention relates to the technical field of neodymium iron boron cast sheet processing, in particular to a sputtering processing method of neodymium iron boron cast sheets.
Background
The neodymium iron boron serving as a rare earth permanent magnet material has the advantages of high cost performance, small volume, light weight, good mechanical properties and strong magnetism, extremely high magnetic energy product and coercive force, is known as a magnetic king in the field of magnetism, and is widely applied to the fields of electronics, electric machinery, medical equipment, toys, packaging, hardware machinery, aerospace and the like, and more commonly comprises a permanent magnet motor, a loudspeaker, a magnetic separator, a computer disk drive, a magnetic resonance imaging device instrument and the like.
At present, in the processing process of the neodymium iron boron cast sheet, the neodymium iron boron cast sheet needs to be coated to improve the coercivity resistance, and a PVD coating mode is generally adopted as a coating mode.
Wherein PVD coating is physical vapor deposition: refers to a process in which physical processes are used to effect mass transfer, transferring atoms or molecules from a source onto a substrate surface. The effect of the paint is that certain particles with special properties (high strength, wear resistance, heat dissipation, corrosion resistance and the like) can be sprayed on a parent body with lower properties, so that the parent body has better properties. PVD basic method: vacuum evaporation, sputtering, ion plating (hollow cathode ion plating, hot cathode ion plating, arc ion plating, active reaction ion plating, radio frequency ion plating, direct current discharge ion plating), wherein when PVD coating is carried out on neodymium iron boron (namely, surface grain boundary), coating is carried out by a vacuum ion coating machine;
however, in the existing film plating machine, a plurality of neodymium iron boron cast sheets are hung on a hook arranged on the surface of a hanging rod, when the neodymium iron boron cast sheets are hung on the hook, the hanging area of the neodymium iron boron cast sheets cannot be effectively coated, subsequent secondary processing is required, or clamping is required to be carried out by a clamping mechanism matched with replacement, if the clamping mechanism is adopted, a contact surface exists between the clamping mechanism and the neodymium iron boron cast sheets, and the contact surface is smaller, but the subsequent secondary film plating processing is required;
in addition, when the existing neodymium iron boron cast sheet is coated, the surface of the neodymium iron boron cast sheet opposite to the sputtering mechanism is better in coating effect, the surface coating effect which is not opposite is poorer, and the coating uniformity cannot meet the actual requirements.
Disclosure of Invention
Aiming at the defects and shortcomings of the prior art, the sputtering processing method of the neodymium iron boron cast sheet comprises a vacuum box, a sputtering mechanism and a placing frame are arranged in the vacuum box,
the placing rack comprises two first material rollers which are oppositely arranged, a placing gap is arranged between the two first material rollers, and the placing gap is positioned below the sputtering mechanism;
the first material rollers are respectively connected with a first bracket, the first brackets are hinged to a second bracket, a first push rod is arranged between the first brackets and the second brackets, and the first push rod drives the first brackets to rotate by taking a hinged position as a rotating shaft A;
the placing gap is in an initial position state, and in the initial position state, an axis B of the placing gap is horizontally arranged;
the first push rod stretches to drive the first support to rotate in the forward direction of the rotating shaft A, the first support rotates in the forward direction to drive the first material roller to rotate in the forward direction, the axis B of the placing gap is inclined in the radial direction, the front end of the placing gap is lowered, and the tail end of the placing gap is raised so as to drive the tail end face of the cast piece to leak out and be opposite to the sputtering mechanism;
the first push rod retracts to drive the first support to reversely rotate by the rotary shaft A, the first support reversely rotates to drive the first material roller to reversely rotate, the axis B of the placing gap is inclined radially, and the front end of the placing gap is lifted and the tail end of the placing gap is lowered to drive the front end face of the casting piece to leak out and be opposite to the sputtering mechanism;
under the initial state of the placing gap, firstly placing a casting piece with a cylindrical structure in the placing gap;
SS02, sputtering mechanism, in which the upper end face of the cast sheet is sputtered, and at this time, the first material roller can rotate, so that the peripheral end face of the cast sheet can be directly processed by the sputtering mechanism;
SS03, the first support is driven to rotate forward by the first push rod in an extending mode, at the moment, the front end of the placing gap is lowered, the tail end of the placing gap is raised, the tail end face of the cast piece leaks out to be opposite to the sputtering mechanism, and the cast piece can be processed by the sputtering mechanism;
SS04, the first support is driven to reversely rotate by the rotating shaft A through the retraction of the first push rod, at the moment, the front end of the placing gap is raised, the tail end of the placing gap is lowered, the front end face of the cast sheet leaks out to be opposite to the sputtering mechanism, and the cast sheet can be processed by the sputtering mechanism;
and SS05, standing the cast sheet after sputtering in a placing gap, and taking out the cast sheet after the sputtered material is effectively combined with the end face.
After the structure is adopted, the sputtering processing method of the neodymium iron boron cast sheet has the following advantages compared with the prior art: when the axis B of the placing gap is in a horizontal state, placing the casting piece to be processed in the placing gap, and performing sputtering processing on the upper end surface of the casting piece through a sputtering mechanism;
further, the first support is driven to rotate forwards by the extension of the first push rod, at the moment, the front end of the placing gap is lowered, the tail end of the placing gap is raised, the tail end face of the cast piece leaks out to be opposite to the sputtering mechanism, and the cast piece can be processed by the sputtering mechanism;
the first support is driven to reversely rotate by the rotating shaft A through the retraction of the first push rod, at the moment, the front end of the placing gap is raised, the tail end of the placing gap is lowered, the front end face of the cast sheet leaks out to be opposite to the sputtering mechanism, and the cast sheet can be processed by the sputtering mechanism;
after the improvement, the peripheral side and the end face of the cast sheet are processed by a sputtering mechanism, so that extra processing steps are reduced, and the working flow is optimized; the sputtering processing of the whole surface can be completed by one processing flow.
As an improvement of the invention, a third bracket is arranged on the first bracket, the inner end of the third bracket is rotationally connected with the upper end of the first bracket, a second material roller is arranged on the third bracket, and the second material roller is arranged in parallel with the axis of the first material roller;
the two third brackets are folded inwards to rotate so as to drive the second material roller to gradually approach the center of the placing gap, and the two third brackets are unfolded outwards to drive the second material roller to gradually keep away from the center of the placing gap;
a third material roller is arranged above the placing gap, and is connected with a Y-axis moving mechanism, and the Y-axis moving mechanism drives the third material roller to vertically move towards the placing gap or vertically move away from the placing gap;
if the cast sheet to be processed is of a tile-shaped structure, then:
under the initial state of the placing gap, firstly placing the cast sheet with the tile-shaped structure in the placing gap, and enabling the inner ring of the cast sheet to face the sputtering mechanism;
SS02, sputtering mechanism carry on sputtering process to the inner ring surface of the cast piece, at this moment, can rotate through the first material roller, in order to adjust the angle between output end of sputtering device and the centre of the inner ring of the cast piece, make the inner ring surface more area can all receive the direct processing of the sputtering mechanism;
SS03, the first support is driven to rotate forward by the first push rod in an extending mode, at the moment, the front end of the placing gap is lowered, the tail end of the placing gap is raised, the tail end face of the cast piece leaks out to be opposite to the sputtering mechanism, and the cast piece can be processed by the sputtering mechanism;
SS04, the first support is driven to reversely rotate by the rotating shaft A through the retraction of the first push rod, at the moment, the front end of the placing gap is raised, the tail end of the placing gap is lowered, the front end face of the cast sheet leaks out to be opposite to the sputtering mechanism, and the cast sheet can be processed by the sputtering mechanism;
SS05, after the two end faces and the inner annular surface of the to-be-cast sheet are processed, standing the cast sheet and placing the cast sheet in a gap, and effectively combining the to-be-sputtered material with the end faces;
SS06 and the third material roller move downwards to enter the inner ring of the casting piece and are abutted against the wall surface of the inner ring;
SS07, the two third brackets are folded and rotated inwards, the second material roller is positioned above the first material roller, a passing gap is formed between the second material roller and the third material roller, the rotation of the third material roller applies acting force to the cast sheet to drive one end of the cast sheet to enter the gap, and the cast sheet gradually rotates until the cast sheet is positioned above the third material roller, and the inner ring surface of the cast sheet is downward;
SS08, drive the third material roller to vertically descend, the peripheral side end of the cast sheet is lapped on the first material roller, spread the rotation of the outside of two third brackets, spill that the cast sheet outer ring faces upwards, the sputtering mechanism carries on the sputtering process to the outer ring surface of the cast sheet;
after the steps are finished, the sputtering processing of the whole outer wall surface of the tile-shaped structure casting piece can be finished.
As an improvement of the invention, the second material roller is connected with a pressing mechanism, the pressing mechanism comprises a second push rod and a third push rod, the fixed end of the second push rod is hinged with the inner end of the third bracket, and the output end points to the outer end of the third bracket and is hinged with the rotating shaft of the second material roller;
the fixed end of the third push rod is hinged to the tail end of the third bracket, and the output end of the third push rod points to the inner end of the third bracket and is hinged to the fixed end of the second push rod;
in step SS07, when the third roll drives the cast sheet into the gap, the second push rod extends or retracts, and continuously changes the position of the second roll in cooperation with the extension or retraction of the third push rod, so that the outer periphery of the second roll keeps effectively contacting with the outer ring surface of the cast sheet, and the outer ring surface of the cast sheet is kept in tight contact with the outer ring surface of the cast sheet.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic view of the structure of the placement gap of the present invention in the initial position state.
Fig. 3 is an enlarged schematic view of the structure of fig. 2C according to the present invention.
Fig. 4 is a schematic view of the structure of the present invention after the first support is rotated forward when a cylindrical structural cast sheet is placed in the placement gap.
Fig. 5 is a schematic view showing the structure of the present invention after the first support is rotated in the opposite direction when the cylindrical structural cast sheet is placed in the placement gap.
Fig. 6 is a schematic view of the structure of the present invention with a gap for placing a tile-shaped structural cast sheet.
FIG. 7 is a schematic view of the third stand of the present invention after the third stand is rotated inward, and the third roll drives the cast sheet into the gap between the first roll and the second roll.
FIG. 8 is a schematic view of the third roll of the present invention with a cast sheet further entering the gap between the first and second rolls.
FIG. 9 is a schematic view of the casting sheet of the present invention rotated above the third roll.
FIG. 10 is a schematic view of the third roll of the present invention with the cast sheet lowered to the point where the end contacts the first roll.
Fig. 11 is a schematic structural view of the third support after the third roll drives the cast sheet to descend until the end contacts the first roll and the third support rotates outwards.
Fig. 12 is a schematic view of a partial cross-sectional structure of a third roll of the present invention.
The figure shows: 1. a vacuum box; 1.1, a sputtering mechanism; 2. a first material roller; 2.1, placing a gap; 3. a first bracket; 3.1, a supporting seat; 3.11, a damping component; 3.2, a motor; 3.21, a second driving wheel; 4. a second bracket; 5. a first push rod; 6. a third bracket; 6.1, a second material roller; 6.2, a first driving wheel; 6.3, a fourth material roller; 7. a third material roller; 7.1, Y-axis moving mechanism; 7.2, an electric heating tube; 8. a second push rod; 9. a third push rod; 10. a first X-axis moving mechanism; 11. a second X-axis moving mechanism; 12. casting the sheet.
Detailed Description
The invention will be further described with reference to the drawings and the specific examples.
Referring to fig. 1-12, a sputtering method for producing neodymium iron boron cast sheet comprises a vacuum box 1, a sputtering mechanism 1.1 and a placing frame are arranged in the vacuum box 1,
the placing frame comprises two first material rollers 2 which are oppositely arranged, a placing gap 2.1 is arranged between the two first material rollers 2, and the placing gap 2.1 is positioned below the sputtering mechanism 1.1;
the first material rollers 2 are respectively connected with a first bracket 3, the first brackets 3 are hinged on a second bracket 4, a first push rod 5 is arranged between the first brackets 3 and the second bracket 4, and the first push rod 5 drives the first brackets 3 to rotate by taking a hinge joint as a rotating shaft A;
the placing gap 2.1 has an initial position state, and in the initial position state, the axis B of the placing gap 2.1 is horizontally arranged;
the first push rod 5 stretches to drive the first support 3 to rotate in the forward direction of the rotating shaft A, the first support 3 rotates in the forward direction to drive the first material roller 2 to rotate in the forward direction, the axis B of the placing gap 2.1 is inclined in the radial direction, the front end of the placing gap 2.1 is lowered, and the tail end of the placing gap is raised to drive the tail end face of the casting piece 12 to leak out and face the sputtering mechanism 1.1;
the first push rod 5 retracts to drive the first support 3 to reversely rotate by the rotary shaft A, the first support 3 reversely rotates to drive the first material roller 2 to reversely rotate, the axis B of the placing gap 2.1 is inclined radially, the front end of the placing gap 2.1 is lifted and the tail end of the placing gap is lowered, so that the front end face of the casting piece 12 is driven to leak out and face the sputtering mechanism 1.1;
in the initial state of SS01 and placing gap 2.1, firstly placing a casting piece 12 with a cylindrical structure in the placing gap 2.1;
SS02 and sputtering means 1.1 sputter-process the upper end surface of cast piece 12, and at this time, the first material roll 2 can be rotated, so that the end surface on the circumferential side of cast piece 12 can be directly processed by sputtering means 1.1;
SS03, the first bracket 3 is driven to rotate forward by the first push rod 5, at the moment, the front end of the placing gap 2.1 is lowered, the tail end is raised, the tail end face of the cast sheet 12 leaks out to be opposite to the sputtering mechanism 1.1, and the cast sheet can be processed by the sputtering mechanism 1.1;
SS04, the first support 3 is driven to rotate reversely by the first push rod 5, at this time, the front end of the placing gap 2.1 is raised, the tail end is lowered, the front end face of the casting piece 12 leaks out to be opposite to the sputtering mechanism 1.1, and the casting piece can be processed by the sputtering mechanism 1.1;
and SS05, standing the cast sheet 12 subjected to sputtering in the placing gap 2.1, and taking out the cast sheet 12 after the material to be sputtered is effectively combined with the end face.
After adopting the structure, the neodymium iron boron cast sheet 12 sputtering device has the following advantages compared with the prior art: when the axis B of the placing gap 2.1 is in a horizontal state, placing the casting piece 12 to be processed in the placing gap 2.1, and performing sputtering processing on the upper end surface of the casting piece 12 through a sputtering mechanism 1.1;
further, the first support 3 is driven to rotate forward by the first push rod 5, at the moment, the front end of the placing gap 2.1 is lowered, the tail end of the placing gap is raised, the tail end face of the casting piece 12 leaks out to be opposite to the sputtering mechanism 1.1, and the casting piece can be processed by the sputtering mechanism 1.1;
the first support 3 is driven to reversely rotate by the rotating shaft A through the retraction of the first push rod 5, at the moment, the front end of the placing gap 2.1 is lifted, the tail end of the placing gap is lowered, the front end face of the casting piece 12 leaks out to be opposite to the sputtering mechanism 1.1, and the casting piece can be processed by the sputtering mechanism 1.1;
after the improvement, the peripheral side and the end face of the cast sheet 12 are processed by the sputtering mechanism 1.1, so that extra processing steps and optimized working flow are reduced; the sputtering process of the entire surface of the cylindrical structure cast sheet 12 can be completed by one process flow.
As an improvement of the invention, a third bracket 6 is arranged on the first bracket 3, the inner end of the third bracket 6 is rotatably connected with the upper end of the first bracket 3, a second material roller 6.1 is arranged on the third bracket 6, and the second material roller 6.1 is arranged in parallel with the axis of the first material roller 2;
the two third brackets 6 are folded inwards to rotate so as to drive the second material roller 6.1 to gradually approach the center position of the placing gap 2.1, and the two third brackets 6 are unfolded outwards to rotate so as to drive the second material roller 6.1 to gradually keep away from the center position of the placing gap 2.1;
a third material roller 7 is arranged above the placing gap 2.1, the third material roller 7 is connected with a Y-axis moving mechanism 7.1, and the Y-axis moving mechanism 7.1 drives the third material roller 7 to vertically move towards the placing gap 2.1 or vertically move away from the placing gap 2.1;
if the cast sheet 12 to be processed is of a tile-shaped structure, then:
in the initial state of SS01 and the placement gap 2.1, firstly placing the cast piece 12 with a tile-shaped structure in the placement gap 2.1, and enabling the inner ring surface of the cast piece 12 to face the sputtering mechanism 1.1;
SS02 and sputtering mechanism 1.1 sputter the inner ring surface of cast sheet 12, at this time, the first material roller 2 can rotate to adjust the angle between the center of the inner ring of cast sheet 12 and the output end of sputtering device, so that more areas of the inner ring surface can be directly processed by sputtering mechanism 1.1;
SS03, the first bracket 3 is driven to rotate forward by the first push rod 5, at the moment, the front end of the placing gap 2.1 is lowered, the tail end is raised, the tail end face of the cast sheet 12 leaks out to be opposite to the sputtering mechanism 1.1, and the cast sheet can be processed by the sputtering mechanism 1.1;
SS04, the first support 3 is driven to rotate reversely by the first push rod 5, at this time, the front end of the placing gap 2.1 is raised, the tail end is lowered, the front end face of the casting piece 12 leaks out to be opposite to the sputtering mechanism 1.1, and the casting piece can be processed by the sputtering mechanism 1.1;
SS05, after the two end faces and the inner annular surface of the casting piece 12 are processed, standing the casting piece 12 in a clearance 2.1, and effectively combining the material to be sputtered with the end faces;
SS06, third roll 7 move down into the inner ring of cast sheet 12 and abut against the inner ring wall;
SS07, the two third brackets 6 are folded and rotated inwards, at this time, the second material roller 6.1 is located above the first material roller 2, a passing gap is formed between the second material roller 6.1 and the third material roller 7, the rotation of the third material roller 7 applies acting force to the casting piece 12 to drive one end of the casting piece 12 into the gap, and gradually rotates until the casting piece 12 is located above the third material roller 7, at this time, the inner ring of the casting piece 12 faces downwards;
SS08, driving the third material roller 7 to vertically descend, overlapping the circumferential end parts of the cast sheet 12 on the first material roller 2, rotating the two third brackets 6 to spread outwards, leaking the outer ring surface of the cast sheet 12 upwards, and performing sputtering processing on the outer ring surface of the cast sheet 12 by the sputtering mechanism 1.1;
after the above steps are completed, the sputtering process of the entire outer wall surface of the tile-shaped structure casting 12 can be completed.
After the improvement, the device has good applicability when the cast sheet 12 with the tile-shaped structure is subjected to sputtering processing, and the functionality of the device is improved.
As an improvement of the invention, the second material roller 6.1 is connected with a pressing mechanism, the pressing mechanism comprises a second push rod 8 and a third push rod 9, the fixed end of the second push rod 8 is hinged with the inner end of the third bracket 6, and the output end points to the outer end of the third bracket 6 and is hinged with the rotating shaft of the second material roller 6.1;
the fixed end of the third push rod 9 is hinged to the tail end of the third bracket 6, and the output end points to the inner end of the third bracket 6 and is hinged to the fixed end of the second push rod 8;
in step SS07, when the third roll 7 drives the cast sheet 12 into the gap, the second push rod 8 extends or retracts, and the position of the second roll 6.1 is continuously changed in cooperation with the extension or retraction of the third push rod 9, so that the outer circumference of the second roll 6.1 keeps in effective contact with the outer ring surface of the cast sheet 12, and the outer ring surface of the cast sheet 12 is kept in tight contact, and in this process, the two third supports 6 can also continuously change and retract inwards or expand outwards, so that the second roll 6.1 obtains a better tight contact position.
After the improvement, the second material roller 6.1 with the position being continuously changed can be continuously and effectively abutted against the outer ring surface of the casting sheet 12 by the second material roller 6.1;
when the tile-shaped structure casting piece 12 rotates, the second material roller 6.1 and the third material roller 7 are matched to clamp the casting piece 12, so that the rotation of the casting piece 12 can be more stable. .
As an improvement of the invention, the first material roller 2 is rotatably connected to the supporting seat 3.1, one end of the supporting seat 3.1 is hinged with the first bracket 3, and a damping component 3.11 is arranged between the supporting seat 3.1 and the first bracket 3. The inner end of the supporting seat 3.1 is hinged with the first bracket 3, the first material roller 2 is positioned at the outer end of the supporting seat 3.1, the damping component 3.11 can be a spring cylinder with a damper, one end of the damping component is hinged on the first bracket 3, the other end of the damping component is hinged at the outer end of the supporting seat 3.1, and the spring cylinder is arranged at an inclined angle to be matched with the rotation of the supporting seat 3.1.
When in use, the spring cylinder is matched with the hinged supporting seat 3.1 to play a role in buffering the cast sheet 12 in the placing gap 2.1, so that the rotation of the cast sheet 12 is stable.
The third material roller 7 is connected with a Y-axis moving mechanism 7.1, and the Y-axis moving mechanism 7.1 drives the third material roller 7 to move vertically towards the placing gap 2.1 or move vertically away from the placing gap 2.1.
As an improvement of the invention, the rotating shaft of the third bracket 6 is provided with a first driving wheel 6.2, the first bracket 3 is provided with a motor 3.2, the output end of the motor 3.2 is provided with a second driving wheel 3.21, and the second driving wheel 3.21 is connected with the first driving wheel 6.2 through a driving belt. After the improvement, the output end of the motor 3.2 rotates to drive the second driving wheel 3.21 to rotate, the second driving wheel 3.21 drives the first driving wheel 6.2 to rotate through a driving belt, the first driving wheel 6.2 drives the third bracket 6 to rotate, and the motor 3.2 drives the third bracket 6 to rotate, so that the angle adjustment is rapid and stable; when the tile structure casting plate 12 is used, the movable range of the second material roller 6.1 can be enlarged by changing the position of the third bracket 6 through the motor 3.2 and matching with the use of the second push rod 8 and the third push rod 9 on the third bracket 6, so that the tile structure casting plate 12 can be suitable for the processing requirements of various tile structures;
in addition, when the tile structure casting sheet 12 is processed, the position of the third bracket 6 can be continuously changed through the motor 3.2, so that the second material roller 6.1 can obtain a better abutting position and abut against the outer ring of the casting sheet 12.
As an improvement of the invention, the tail end of the third bracket 6 is also provided with a fourth material roller 6.3, and the axis of the fourth material roller 6.3 is parallel to the axis of the first material roller 2. According to the improvement, the fourth material roller 6.3 is arranged on the outer side of the third material roller 7, when the tile-shaped structural cast sheet 12 is processed, some cast sheets 12 with larger diameters are processed, the propping positions of the third material roller 7 to the outer ring surface of the cast sheet 12 are fewer, the fourth material roller 6.3 is arranged to assist in propping the outer ring surface of the cast sheet 12, so that the propping effect is improved, and the stability of the cast sheet 12 is high.
As an improvement of the invention, the second roll 6.1 has a smaller diameter than the first roll 2 and the fourth roll 6.3. The above improvement, the diameter of the second material roller 6.1 is smaller than the diameter of the first material roller 2 and the diameter of the fourth material roller 6.3, the distance between the peripheral wall of the second material roller 6.1 and the peripheral walls of the first material roller 2 and the fourth material roller 6.3 is large, the moving range of the second material roller 6.1 between the second material roller and the first material roller 2 and between the second material roller 6.1 and the fourth material roller 6.3 is wider, the processing requirements of the tile structure cast sheet 12 with different diameter types can be met, and the continuous and stable propping effect can be obtained in the process of propping the outer ring of the cast sheet 12.
As an improvement of the invention, the two second brackets 4 are respectively connected with a first X-axis moving mechanism 10, the moving ends of the two first X-axis moving mechanisms 10 are connected with the second brackets 4, the moving ends of the two first X-axis moving mechanisms 10 move to drive the second brackets 4 to move, the second brackets 4 move relatively close to drive the placing gap 2.1 to reduce the distance, or the second brackets 4 move relatively far away to drive the placing gap 2.1 to increase the distance. After the improvement, the distance between the two first material rollers 2 is adjusted through the two first X-axis moving mechanisms 10 so as to adjust the distance between the placing gaps 2.1, so that the placing gaps 2.1 can be used for placing casting pieces 12 with various diameters, and the applicability of the device is further improved.
As an improvement of the invention, the third material roller 7 is internally provided with an electric heating tube 7.2, and the electric heating tube 7.2 is arranged close to the roller surface and extends along the axial direction of the third material roller 7. The electrothermal tube 7.2 is arranged in the third material roller 7, the heating effect of the electrothermal tube 7.2 enables the third material roller 7 to have higher heat, and when the third material roller contacts with the surface of the casting sheet 12, heat is transferred to the casting sheet 12, so that the sputtered area of the casting sheet 12 can be quickly bonded, falling is reduced, the processing yield is improved, and secondary processing is reduced.
The sputtering mechanism 1.1 in the device is connected with a second X-axis moving mechanism 11, the third material roller 7 is positioned above the sputtering mechanism 1.1, and the third material roller 7 is connected with a Y-axis moving mechanism 7.1 and is also positioned above the sputtering mechanism 1.1.
The second X-axis moving mechanism 11 is used for driving the sputtering mechanism 1.1 to move transversely, has a position right above the placing gap 2.1, and can also be driven to move transversely to a position right above the placing gap 2.1, when the second X-axis moving mechanism is located right above the placing gap 2.1, the second X-axis moving mechanism is used for performing sputtering processing on the upper end face of the cast sheet 12, when the second X-axis moving mechanism needs to avoid the third material roller 7, the second X-axis moving mechanism is located right above the placing gap 2.1, and when the third material roller 7 enters below the sputtering mechanism 1.1, the second X-axis moving mechanism 11 can also drive the sputtering mechanism 1.1 to reenter the position right above the placing gap 2.1, and perform sputtering processing on the cast sheet 12 on the third material roller 7.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (3)
1. A sputtering processing method of neodymium iron boron cast sheets is characterized in that: comprises a vacuum box (1), a sputtering mechanism (1.1) and a placing frame are arranged in the vacuum box (1),
the placing rack comprises two first material rollers (2) which are oppositely arranged, a placing gap (2.1) is arranged between the two first material rollers (2), and the placing gap (2.1) is positioned below the sputtering mechanism (1.1);
the first material rollers (2) are respectively connected with a first bracket (3), the first brackets (3) are hinged to a second bracket (4), a first push rod (5) is arranged between the first brackets (3) and the second bracket (4), and the first push rod (5) drives the first brackets (3) to rotate by taking a hinged position as a rotating shaft A;
the placing gap (2.1) has an initial position state, and in the initial position state, the axis B of the placing gap (2.1) is horizontally arranged;
the first push rod (5) stretches to drive the first support (3) to rotate positively by the rotary shaft A, the first support (3) rotates positively to drive the first material roller (2) to rotate positively, the axis B of the placing gap (2.1) is inclined radially, the front end of the placing gap (2.1) is lowered, and the tail end of the placing gap is raised to drive the tail end face of the casting piece (12) to leak out and face the sputtering mechanism (1.1);
the first push rod (5) retracts to drive the first support (3) to reversely rotate by the rotary shaft A, the first support (3) reversely rotates to drive the first material roller (2) to reversely rotate, the axis B of the placing gap (2.1) is inclined radially, the front end of the placing gap (2.1) is lifted, and the tail end of the placing gap is lowered to drive the front end face of the casting piece (12) to leak out and face the sputtering mechanism (1.1);
in the initial state of SS01 and placing gaps (2.1), firstly placing a casting piece (12) with a cylindrical structure in the placing gaps (2.1);
SS02 and a sputtering mechanism (1.1) perform sputtering processing on the upper end surface of the casting piece (12), and at this time, the first material roller (2) can rotate to enable the peripheral end surface of the casting piece (12) to be subjected to direct processing by the sputtering mechanism (1.1);
SS03, the first bracket (3) is driven to rotate forward by the rotation shaft A through the extension of the first push rod (5), at the moment, the front end of the placing gap (2.1) is lowered, the tail end is raised, the tail end face of the casting piece (12) leaks out to be opposite to the sputtering mechanism (1.1), and the casting piece can be processed by the sputtering mechanism (1.1);
SS04, the first bracket (3) is driven to reversely rotate by the rotating shaft A through the retraction of the first push rod (5), at the moment, the front end of the placing gap (2.1) is lifted, the tail end of the placing gap is lowered, the front end face of the casting piece (12) leaks out to be opposite to the sputtering mechanism (1.1), and the casting piece can be processed by the sputtering mechanism (1.1);
and SS05, standing the cast sheet (12) subjected to sputtering in the placing gap (2.1), and taking out the cast sheet (12) after the sputtered material is effectively combined with the end face.
2. The method of sputter processing a neodymium iron boron cast sheet (12) according to claim 1, wherein: a third support (6) is arranged on the first support (3), the inner end of the third support (6) is rotationally connected to the upper end of the first support (3), a second material roller (6.1) is arranged on the third support (6), and the second material roller (6.1) is arranged in parallel with the axis of the first material roller (2);
the two third brackets (6) are folded inwards to rotate so as to drive the second material roller (6.1) to gradually approach the center position of the placing gap (2.1), and the two third brackets (6) are unfolded outwards to rotate so as to drive the second material roller (6.1) to gradually keep away from the center position of the placing gap (2.1);
a third material roller (7) is arranged above the placing gap (2.1), the third material roller (7) is connected with a Y-axis moving mechanism (7.1), and the Y-axis moving mechanism (7.1) drives the third material roller (7) to vertically move towards the placing gap (2.1) or vertically move away from the placing gap (2.1);
if the cast sheet (12) to be processed is of a tile-shaped structure, then:
in the initial state of SS01 and the placing gap (2.1), firstly placing a cast piece (12) with a tile-shaped structure in the placing gap (2.1), and enabling the inner ring surface of the cast piece (12) to face the sputtering mechanism (1.1);
SS02, sputtering mechanism (1.1) carry on the sputtering process to the inner ring surface of the cast sheet (12), at this moment, can rotate through the first material roller (2), in order to adjust the angle between output end of sputtering apparatus and the centre of the inner ring of the cast sheet (12), make the inner ring surface more area can all receive the direct processing of sputtering mechanism (1.1);
SS03, the first bracket (3) is driven to rotate forward by the rotation shaft A through the extension of the first push rod (5), at the moment, the front end of the placing gap (2.1) is lowered, the tail end is raised, the tail end face of the casting piece (12) leaks out to be opposite to the sputtering mechanism (1.1), and the casting piece can be processed by the sputtering mechanism (1.1);
SS04, the first bracket (3) is driven to reversely rotate by the rotating shaft A through the retraction of the first push rod (5), at the moment, the front end of the placing gap (2.1) is lifted, the tail end of the placing gap is lowered, the front end face of the casting piece (12) leaks out to be opposite to the sputtering mechanism (1.1), and the casting piece can be processed by the sputtering mechanism (1.1);
after SS05, two end faces of the cast piece (12) and the inner annular surface are processed, standing the cast piece (12) in a clearance (2.1) and effectively combining the material to be sputtered with the end faces;
SS06 and a third material roller (7) move downwards to enter the inner ring of the casting piece (12) and are abutted against the wall surface of the inner ring;
SS07, the two third brackets (6) are folded and rotated inwards, at this time, the second material roller (6.1) is positioned above the first material roller (2), a passing gap is formed between the second material roller (6.1) and the third material roller (7), the rotation of the third material roller (7) applies acting force to the casting piece (12) to drive one end of the casting piece (12) to enter the gap, and gradually rotates until the casting piece (12) is positioned above the third material roller (7), at this time, the inner ring of the casting piece (12) faces downwards;
SS08 drives the third material roller (7) to vertically descend, the peripheral end part of the casting piece (12) is lapped on the first material roller (2), the two third brackets (6) are outwards unfolded to rotate, the outer ring of the casting piece (12) leaks upwards, and the sputtering mechanism (1.1) carries out sputtering processing on the outer ring surface of the casting piece (12);
after the above steps are completed, the sputtering process of the entire outer wall surface of the tile-shaped structure casting sheet (12) can be completed.
3. A method of sputter processing a neodymium iron boron cast sheet (12) according to claim 2, characterized by: the second material roller (6.1) is connected with a pressing mechanism, the pressing mechanism comprises a second push rod (8) and a third push rod (9), the fixed end of the second push rod (8) is hinged with the inner end of the third bracket (6), and the output end points to the outer end of the third bracket (6) and is hinged with the rotating shaft of the second material roller (6.1);
the fixed end of the third push rod (9) is hinged to the tail end of the third bracket (6), and the output end points to the inner end of the third bracket (6) and is hinged to the fixed end of the second push rod (8);
in step SS07, when the third roll (7) drives the cast sheet (12) into the gap, the second push rod (8) extends or retracts, and the second push rod (9) extends or retracts continuously to change the position of the second roll (6.1), so that the periphery of the second roll (6.1) keeps in effective contact with the outer ring surface of the cast sheet (12), and the outer ring surface of the cast sheet (12) is kept in tight contact, in this process, the two third supports (6) can also continuously change to retract inwards or expand outwards, so that the second roll (6.1) obtains a better tight contact position.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009028055A1 (en) * | 2007-08-29 | 2009-03-05 | Canon Anelva Corporation | Film deposition method and device by sputtering |
| CN101440475A (en) * | 2007-11-19 | 2009-05-27 | 小岛压力加工工业株式会社 | Substrate supporting device and sputtering apparatus including the same |
| CN104109841A (en) * | 2014-07-23 | 2014-10-22 | 中国科学院上海光学精密机械研究所 | Magnetron sputtering coating equipment employing glancing angle deposition |
| CN104630734A (en) * | 2015-02-13 | 2015-05-20 | 北京中科科美真空技术有限责任公司 | Rotary sample stage |
| CN109423629A (en) * | 2017-08-31 | 2019-03-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | The disposable full-surface deposition work piece actuating device of disk part by performing and gaseous phase deposition stove |
| CN109473247A (en) * | 2018-11-16 | 2019-03-15 | 宁波尼兰德磁业股份有限公司 | A kind of preparation method of neodymium iron boron crystal boundary infiltration alloy casting piece |
| CN209974876U (en) * | 2019-05-05 | 2020-01-21 | 深圳市沃克力技术有限公司 | But height-adjusting's vertical two-sided magnetron sputtering coating equipment |
| CN214168116U (en) * | 2020-10-21 | 2021-09-10 | 浙江艾微普科技有限公司 | Adjustable baffle of magnetron sputtering equipment |
| CN214496460U (en) * | 2020-12-16 | 2021-10-26 | 厦门海辰智能科技有限公司 | Independent mechanism of changing of sputter source target |
-
2023
- 2023-04-07 CN CN202310365434.0A patent/CN116334552B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009028055A1 (en) * | 2007-08-29 | 2009-03-05 | Canon Anelva Corporation | Film deposition method and device by sputtering |
| CN101440475A (en) * | 2007-11-19 | 2009-05-27 | 小岛压力加工工业株式会社 | Substrate supporting device and sputtering apparatus including the same |
| CN104109841A (en) * | 2014-07-23 | 2014-10-22 | 中国科学院上海光学精密机械研究所 | Magnetron sputtering coating equipment employing glancing angle deposition |
| CN104630734A (en) * | 2015-02-13 | 2015-05-20 | 北京中科科美真空技术有限责任公司 | Rotary sample stage |
| CN109423629A (en) * | 2017-08-31 | 2019-03-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | The disposable full-surface deposition work piece actuating device of disk part by performing and gaseous phase deposition stove |
| CN109473247A (en) * | 2018-11-16 | 2019-03-15 | 宁波尼兰德磁业股份有限公司 | A kind of preparation method of neodymium iron boron crystal boundary infiltration alloy casting piece |
| CN209974876U (en) * | 2019-05-05 | 2020-01-21 | 深圳市沃克力技术有限公司 | But height-adjusting's vertical two-sided magnetron sputtering coating equipment |
| CN214168116U (en) * | 2020-10-21 | 2021-09-10 | 浙江艾微普科技有限公司 | Adjustable baffle of magnetron sputtering equipment |
| CN214496460U (en) * | 2020-12-16 | 2021-10-26 | 厦门海辰智能科技有限公司 | Independent mechanism of changing of sputter source target |
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| CN116334552A (en) | 2023-06-27 |
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