CN105441901B - It is accurately positioned the transmission device of work stage - Google Patents
It is accurately positioned the transmission device of work stage Download PDFInfo
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- CN105441901B CN105441901B CN201511033445.0A CN201511033445A CN105441901B CN 105441901 B CN105441901 B CN 105441901B CN 201511033445 A CN201511033445 A CN 201511033445A CN 105441901 B CN105441901 B CN 105441901B
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- axle
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- fixed mount
- work stage
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H1/00—Toothed gearings for conveying rotary motion
- F16H1/02—Toothed gearings for conveying rotary motion without gears having orbital motion
- F16H1/20—Toothed gearings for conveying rotary motion without gears having orbital motion involving more than two intermeshing members
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Gear Transmission (AREA)
- Automatic Assembly (AREA)
Abstract
The transmission device of work stage is accurately positioned, it has pull-push piece, the first driving member, vertical fixed mount, magnetic seal, the first to the second motor, the first to the 3rd axle and horizontal work stage, the first gear ring, first gear, loading plate；The first gear ring and first gear of engagement are straight spur gear；The first to the second motor, magnetic seal upside, inner underside outside fixed mount；It is socketed in the middle part of hollow first axle, inside and outside magnetic seal, there is the shaft shoulder first axle upper end and connects the first gear ring, and the first motor shaft extension is entered in fixed mount and connects first gear；Pull-push piece is between the shaft shoulder and fixed mount inner underside；First axle bottom connects with loading plate side, and loading plate opposite side has the 3rd axle, and work stage is connect on the 3rd axle；Second axle enters in fixed mount with first axle, the inside and outside socket of the first gear ring, the second motor shaft extension and connects the second axle upper end, and the first driving member is located between the bottom of the second axle and the 3rd axle.The present apparatus makes workpiece station positioning accuracy higher.
Description
Technical field
The present invention relates to vacuum coating equipment field, is related specifically to a kind of transmission device for being accurately positioned work stage.
Background technology
At present, under high vacuum coating environment, control the work stage of coating machine to obtain positioning with workpiece of taking, be to pass through biography
For dynamic device come what is realized, the transmission device species is various, configurations (having manually or automatically structure type), but mostly exists
Structure design unreasonable (such as part is more, complicated), manufactures and assembles the defects of cumbersome, so that cost is higher, positioning
Precision is poor.
The content of the invention
The technical problems to be solved by the invention are overcome the deficiencies in the prior art, there is provided a kind of work stage that is accurately positioned
Transmission device, the structure design of this transmission device are relatively reasonable (such as：Part is less, simple and compact for structure etc.), transmission performance is steady
It is fixed so that the positioning precision of work stage is higher, and normal, the lasting progress of coating process is effectively ensured.
In order to solve the above technical problems, the invention provides a kind of transmission device for being accurately positioned work stage, it includes work
Part platform, fixed mount, the first motor, first gear, first axle, the first gear ring, loading plate, pull-push piece, magnetic seal, the second electricity
Machine, the second axle, the 3rd axle, the first driving member；
Fixed mount, magnetic seal, the first motor, the second motor, first axle, the second axle, the 3rd axle are vertical arrangement
State, work stage, the first gear ring, first gear, loading plate are horizontal disposition, and the first gear ring, first gear are straight
Tooth roller gear；
First motor, the second motor are located at the upside outside fixed mount, and magnetic seal is located at the downside in fixed mount；
First axle is hollow shaft, is coaxially socketed inside and outside the middle part of first axle, magnetic seal, the upper end of first axle is higher than magnetic
Property seal and in the fixed mount, there is the shaft shoulder upper end of first axle and by the shaft shoulder with being connected with the first hollow gear ring, the
The motor shaft of one motor puts in fixed mount and is connected to first gear, and first gear is meshed with the first gear ring；
Pull-push piece of the first axle along its axial displacement is allowed to be located between the downside in the shaft shoulder and fixed mount；
The lower end of first axle connects beyond fixed mount certain distance and bottom with the side of loading plate, the opposite side of loading plate
Provided with the 3rd axle being rotatably assorted with it, the upper end of the 3rd axle higher than loading plate and is connected with work stage, the lower end of the 3rd axle together
Less than loading plate；
Respectively with being coaxially socketed inside and outside first axle, the first gear ring, the upper and lower side of first axle is respectively provided with one and is used for second axle
The plane bearing of second axle is installed, the upper end of the second axle is higher than the first gear ring and in fixed mount, the motor shaft of the second motor
Put in fixed mount and connect with the upper end of the second axle, the lower end of the second axle exceeds first axle certain distance, allows work stage around the
The first driving member that three axle axis rotate is located between the bottom of the second axle and the bottom of the 3rd axle.
It is equal to the transmission device of the present invention for being accurately positioned work stage below for the sake of succinctly clearly demonstrating problem
Referred to as this transmission device.
After the technical scheme of the above,
First motor drives the first gear ring, the first axle of linkage magnetic seal sealing by first gear, and then drives
Loading plate, work stage rotate around first axle axis, realize the revolution of work stage；
Second motor drives the second axle, and the second axle allows work stage around the 3rd axle axle by the first driving member the 3rd axle of linkage
Line rotates, and realizes the rotation of work stage；
By pull-push piece, first axle is allowed along its axial displacement, so as to drive loading plate, the 3rd axle, work stage in vertical side
To up and down motion, the axial displacement of work stage is realized；
By magnetic seal dynamic sealing, be advantageous to work stage and positioning is realized in vacuum environment；
The rotation of accurate control the first motor, the second motor, can be achieved being accurately positioned for work stage.
So, the structure design of this transmission device is relatively reasonable (such as：Part is less, simple and compact for structure etc.), it is gearing
Can be stable so that the positioning precision of work stage is higher, and normal, the lasting progress of coating process is effectively ensured.
First driving member includes second gear, bridge gear shaft, the 3rd gear, and second gear is located under the second axle
Portion, the 3rd gear are located at the bottom of the 3rd axle, the bridge gear shaft being rotatably assorted with it are provided with the downside of the stage casing region of loading plate,
Bridge gear shaft is between second gear, the 3rd gear and carrier gear is meshed with second gear, the 3rd gear respectively, the
Two gears, carrier gear, the 3rd gear are straight spur gear.
So, the structure design of the first driving member is relatively reasonable (such as：Part is less, simple and compact for structure etc.), it is gearing
Can be stable, in use, the second motor drives the second axle, the second axle drives second gear, by carrier gear link the 3rd gear,
3rd axle, allow work stage to be rotated around the 3rd axle axis, realize the rotation of work stage.
The fixed mount is motor mounting plate, four vertical support bars, the square sky of horizontal cylinder mounting plate composition
Heart framework, motor mounting plate, cylinder mounting plate arrange that four support bars are square arrangement up and down, and motor mounting plate and cylinder are pacified
Loading board is respectively connected to a support bar with the front and rear side at end, motor mounting plate by first level plate, vertical plate, the second level board successively
Connect composition, and first level plate is less than the second level board, and first level plate is corresponding in position with the first motor, and second is horizontal
Plate is corresponding in position with the second motor, and cylinder mounting plate is straight panel；
First motor is located at the upside of first level plate, and the second motor is located at the upside of the second level board, magnetic seal
It is located at the upside in cylinder mounting plate stage casing region.
So, the structure design of fixed mount is relatively reasonable (such as：Part is less, simple and compact for structure etc.), it is easy to utilize it
First motor, the second motor, magnetic seal are installed.
The pull-push piece includes two cylinders arranged vertically, horizontally disposed draw back plate, and two cylinders are located at cylinder peace
It is located in loading board and respectively the both sides of magnetic seal, the cylinder rod of two cylinders points to motor mounting plate, and each cylinder rod is with pushing away
The homonymy corresponding end of arm-tie connects；
It is socketed inside and outside the central area of axis body and draw back plate of the first axle top between the shaft shoulder and magnetic seal.
So, the structure design of pull-push piece is relatively reasonable (such as：Part is less, simple and compact for structure etc.), in use, passing through
The cylinder rod of two cylinders pushes up draw back plate, and draw back plate contacts with the shaft shoulder, promote first axle, the first gear ring along it axially upwards
Displacement (during this, synchronous interaction magnetic seal), drive loading plate, the 3rd axle, work stage, the 3rd gear, carrier gear
Axle moves upwards in vertical direction；Conversely, pulling downward on draw back plate by the cylinder rod of two cylinders, draw back plate departs from the shaft shoulder to be connect
Touch, the first gear ring, first axle, loading plate, the 3rd axle, work stage, the 3rd gear, bridge gear shaft Action of Gravity Field under, compel
Make first axle, the first gear ring along its axially downwardly displacement (during this, synchronous interaction magnetic seal), drive loading plate, the
Three axles, work stage, the 3rd gear, bridge gear shaft move downward in vertical direction；It is real so as to allow first axle along its axial displacement
The axial displacement of existing work stage.
It should be noted that in the axial displacement process of above-mentioned first axle, because the first gear ring, first gear are straight-tooth
Roller gear, second gear, carrier gear, the 3rd gear are straight spur gear, therefore the first gear ring, the 3rd gear, gap bridge
The up and down motion of gear vertical direction is achieved, and the first gear ring will not be interfered by first gear, and the 3rd gear will not be by
To the interference of carrier gear, carrier gear will not be interfered by second gear.
The motor shaft of second motor is connected by the second driving member with the upper end of the second axle, and the second driving member includes the
Four gears, the 5th gear, the 4th gear are located at the motor shaft bottom of the second motor, the 5th gear be located at the upper end of the second axle and with
Axial gap is left between first gear ring, the 4th gear is meshed with the 5th gear, and the 4th gear, the 5th gear are straight-tooth circle
Stud wheel.
So, the structure design of the second driving member is relatively reasonable (such as：Part is less, simple and compact for structure etc.), it is gearing
Can be stable, in use, the second motor drives the second axle by the second driving member, more stably realize the rotation of work stage.
Brief description of the drawings
Fig. 1 is the structural representation of this transmission device.
Embodiment
The invention will be further described with reference to the accompanying drawings and examples.
Referring to Fig. 1：
This transmission device, it includes work stage 5, fixed mount 8, the first motor 1, first gear 1a, first axle 2, the first tooth
Enclose 2b, loading plate 2c, pull-push piece 7, magnetic seal 6, the second motor 3, the second axle 4, the 3rd axle 2d, the first driving member, second
Driving member.
Fixed mount 8, magnetic seal 6, the first motor 1, the second motor 3, first axle 2, the second axle 4, the 3rd axle 2d are
Vertical arrangement states, work stage 5, the first gear ring 2b, first gear 1a, loading plate 2c are horizontal disposition, the first gear ring
2b, first gear 1a are straight spur gear.
Fixed mount 8 is motor mounting plate, four vertical support bar 8d, the square sky of horizontal cylinder mounting plate 8e compositions
Heart framework, motor mounting plate, cylinder mounting plate 8e arrange that four support bar 8d are square arrangement up and down, and motor mounting plate is gentle
Cylinder installing plate 8e is respectively connected to a support bar 8d with the front and rear side at end, and motor mounting plate is by first level plate 8a, vertical plate 8b, the
Two level board 8c connect successively composition, the second level board 8c, first level plate 8a or so arrangement, first level plate 8a be less than second
Level board 8c, first level plate 8a and the first motor 1 are corresponding in position, and the second level board 8c and the second motor 3 are in position
Upper corresponding, cylinder mounting plate 8e is straight panel.
Magnetic seal 6 is prior art part.Magnetic seal 6 includes interior hollow cylinder, the external hollow cylinder arranged vertically
6a, axially spaced in the middle part of the outer wall of interior hollow cylinder to be provided with some annular magnetic grooves, coaxial sleeve inside and outside interior hollow cylinder, external hollow cylinder 6a
Connect, interior hollow cylinder is rotatably assorted by annular magnetic groove and external hollow cylinder 6a, institute's shape between each annular magnetic groove and external hollow cylinder 6a
Into each respective cavities in be marked with magnetic fluid (described interior hollow cylinder, annular magnetic groove, magnetic fluid not shown in accompanying drawing).
First motor 1 is located at first level plate 8a upside, and the second motor 3 is located at the second level board 8c upside, and second
Motor 3, the first motor 1 are spaced in position, and magnetic seal 6 is located in cylinder mounting plate 8e by its external hollow cylinder 6a
The upside in section region.So so that the first motor 1, the second motor 3 are located at the upside outside fixed mount 8, and magnetic seal 6 is located at
Downside in fixed mount 8.
First axle 2 is hollow shaft, is coaxially socketed inside and outside the middle part of first axle 2, the interior hollow cylinder of magnetic seal 6, and interior
Hollow cylinder is fixed at the middle part of first axle 2, and the upper end of first axle 2 higher than magnetic seal 6 and is located in fixed mount 8, the
There is the shaft shoulder 2a upper end of one axle 2 and by shaft shoulder 2a with the first hollow gear ring 2b is connected with, and the motor shaft of the first motor 1 is put in
In fixed mount 8 and first gear 1a is connected to, first gear 1a is meshed with the first gear ring 2b.
Pull-push piece 7 includes two cylinder 7a arranged vertically, horizontally disposed draw back plate 7b, two cylinder 7a are located at cylinder
It is located on installing plate 8e and respectively the both sides of magnetic seal 6, two cylinder 7a cylinder rod points to motor mounting plate, each cylinder rod
Connect with draw back plate 7b homonymy corresponding end.
Inside and outside axis body of the top of first axle 2 between shaft shoulder 2a and magnetic seal 6 and draw back plate 7b central area
Socket, the axis of first axle 2 and draw back plate 7b centerline collineation, draw back plate 7b central area is provided with sliding bearing (accompanying drawing
Not shown in described sliding bearing), so, allow pull-push piece 7 of the first axle 2 along its axial displacement to be located at shaft shoulder 2a and fixed mount
Between downside in 8.
The lower end of first axle 2 is beyond the cylinder mounting plate 8e certain distances of fixed mount 8 and bottom and loading plate 2c side
Connect, loading plate 2c opposite side is provided with the 3rd axle 2d being rotatably assorted with it, the 3rd axle 2d upper end higher than loading plate 2c and
With work stage 5 is connected with, the 3rd axle 2d lower end is less than loading plate 2c.
For second axle 4 respectively with being coaxially socketed inside and outside first axle 2, the first gear ring 2b, the upper and lower side of first axle 2 is respectively provided with one
For installing the plane bearing of the second axle 4, wherein：The plane bearing of upper end is located above shaft shoulder 2a and is located at the first gear ring 2b
Interior, the height of the plane bearing is less than or equal to the first gear ring 2b height so that the second axle 4 is axially being positioned (accompanying drawing
Not shown in described two plane bearings).
The lower end of second axle 4 exceeds the certain distance of first axle 2.The first biography for allowing work stage 5 to be rotated around the 3rd axle 2d axis
Moving part is located between the bottom of the second axle 4 and the 3rd axle 2d bottom.
First driving member is located at the second axle including second gear 4b, bridge gear shaft 2f, the 3rd gear 2e, second gear 4b
4 bottom, the 3rd gear 2e are located at the 3rd axle 2d bottom, are provided with the downside of loading plate 2c stage casing region and to be rotatably assorted with it
Bridge gear shaft 2f, bridge gear shaft 2f between second gear 4b, the 3rd gear 2e and carrier gear respectively with the second tooth
Wheel 4b, the 3rd gear 2e are meshed, and second gear 4b, carrier gear, the 3rd gear 2e are straight spur gear.
Higher than the first gear ring 2b and in fixed mount 8, the motor shaft of the second motor 3 puts in fixation for the upper end of second axle 4
Connect in frame 8 and by the second driving member with the upper end of the second axle 4.
Second driving member includes the 4th gear 3a, the 5th gear 4a, and the 4th gear 3a is located under the motor shaft of the second motor 3
Portion, the 5th gear 4a are located at the upper end of the second axle 4 and axial gap, the 4th gear 3a and the 5th are left between the first gear ring 2b
Gear 4a is meshed, and the 4th gear 3a, the 5th gear 4a are straight spur gear.
The step of when this transmission device uses, is as follows：
1st, two cylinder 7a are controlled, allow the loading plate 2c for being connected to work stage 5 to be located at " low " position；
2nd, the first motor 1 is controlled, driving loading plate 2c, work stage 5 are rotated to the position for workpiece of taking；
3rd, two cylinder 7a are controlled, promote work stage 5 to make its position to " height " position；
4th, the second motor 3 is controlled, the second axle 4 of driving, the first driving member, drives work stage 5 to go to specified location (this certainly
Place, workpiece are removed).
The above 1, into 4, step, can use manually or automatically mode, the first motor 1, the second motor 3 are controlled with accurate
Operating.
In addition, 1 can be repeated several times, to 4, step.
Certainly, the present invention is not merely defined in the dependency structure in the present embodiment, any to be equal to what the present invention was carried out
Modifications and substitutions are also all in the protection category of the present invention.Such as：First driving member, the second driving member, fixed mount, push-and-pull
Part can also use other suitable structure types.
Claims (5)
1. being accurately positioned the transmission device of work stage, it includes work stage, it is characterised in that：
It also includes fixed mount, the first motor, first gear, first axle, the first gear ring, loading plate, pull-push piece, magnetic seal
Part, the second motor, the second axle, the 3rd axle, the first driving member；
Fixed mount, magnetic seal, the first motor, the second motor, first axle, the second axle, the 3rd axle are vertical arrangement states,
Work stage, the first gear ring, first gear, loading plate are horizontal disposition, and the first gear ring, first gear are straight tooth column
Gear；
First motor, the second motor are located at the upside outside fixed mount, and magnetic seal is located at the downside in fixed mount；
First axle is hollow shaft, is coaxially socketed inside and outside the middle part of first axle, magnetic seal, the upper end of first axle is close higher than magnetic
There is the shaft shoulder sealing and in the fixed mount, the upper end of first axle and by the shaft shoulder with being connected with the first hollow gear ring, the first electricity
The motor shaft of machine puts in fixed mount and is connected to first gear, and first gear is meshed with the first gear ring；
Pull-push piece of the first axle along its axial displacement is allowed to be located between the downside in the shaft shoulder and fixed mount；
The lower end of first axle connects beyond fixed mount certain distance and bottom with the side of loading plate, and the opposite side of loading plate is provided with
The 3rd axle being rotatably assorted with it, higher than loading plate and with work stage is connected with, the lower end of the 3rd axle is less than for the upper end of the 3rd axle
Loading plate；
Respectively with being coaxially socketed inside and outside first axle, the first gear ring, the upper and lower side of first axle is respectively provided with one and is used for installing second axle
The plane bearing of second axle, higher than the first gear ring and in fixed mount, the motor shaft of the second motor is put in for the upper end of the second axle
Connect in fixed mount and with the upper end of the second axle, the lower end of the second axle exceeds first axle certain distance, allows work stage around the 3rd axle
The first driving member that axis rotates is located between the bottom of the second axle and the bottom of the 3rd axle.
2. the transmission device as claimed in claim 1 for being accurately positioned work stage, it is characterised in that：
First driving member includes second gear, bridge gear shaft, the 3rd gear, and second gear is located at the bottom of the second axle,
3rd gear is located at the bottom of the 3rd axle, and the bridge gear shaft being rotatably assorted with it, mistake are provided with the downside of the stage casing region of loading plate
Axle gear axle is between second gear, the 3rd gear and carrier gear is meshed with second gear, the 3rd gear respectively, and second
Gear, carrier gear, the 3rd gear are straight spur gear.
3. the transmission device as claimed in claim 2 for being accurately positioned work stage, it is characterised in that：
The fixed mount is motor mounting plate, four vertical support bars, the square hollow frame of horizontal cylinder mounting plate composition
Frame, motor mounting plate, cylinder mounting plate arrange that four support bars are square arrangement, motor mounting plate and cylinder mounting plate up and down
Front and rear side with end is respectively connected to a support bar, and motor mounting plate is connected successively by first level plate, vertical plate, the second level board
Form, first level plate be less than the second level board, and first level plate is corresponding in position with the first motor, the second level board and
Second motor is corresponding in position, and cylinder mounting plate is straight panel；
First motor is located at the upside of first level plate, and the second motor is located at the upside of the second level board, and magnetic seal is located at
The upside in cylinder mounting plate stage casing region.
4. the transmission device as claimed in claim 3 for being accurately positioned work stage, it is characterised in that：
The pull-push piece includes two cylinders arranged vertically, horizontally disposed draw back plate, and two cylinders are located at cylinder mounting plate
Both sides that are upper and being located at magnetic seal respectively, the cylinder rods of two cylinders point to motor mounting plate, and each cylinder rod is and draw back plate
Homonymy corresponding end connect；
It is socketed inside and outside the central area of axis body and draw back plate of the first axle top between the shaft shoulder and magnetic seal.
5. the transmission device as claimed in claim 3 for being accurately positioned work stage, it is characterised in that：
The motor shaft of second motor is connected by the second driving member with the upper end of the second axle, and the second driving member includes the 4th tooth
Wheel, the 5th gear, the 4th gear are located at the motor shaft bottom of the second motor, and the 5th gear is located at the upper end of the second axle and with first
Axial gap is left between gear ring, the 4th gear is meshed with the 5th gear, and the 4th gear, the 5th gear are straight tooth column tooth
Wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511033445.0A CN105441901B (en) | 2015-12-31 | 2015-12-31 | It is accurately positioned the transmission device of work stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511033445.0A CN105441901B (en) | 2015-12-31 | 2015-12-31 | It is accurately positioned the transmission device of work stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105441901A CN105441901A (en) | 2016-03-30 |
| CN105441901B true CN105441901B (en) | 2018-03-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511033445.0A Active CN105441901B (en) | 2015-12-31 | 2015-12-31 | It is accurately positioned the transmission device of work stage |
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| CN (1) | CN105441901B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108789752A (en) * | 2018-06-16 | 2018-11-13 | 佛山市同鑫智能装备科技有限公司 | A kind of furniture processing positioning gear and localization method |
| CN109848589A (en) * | 2019-01-24 | 2019-06-07 | 李慧 | A kind of gear shaft laser welding axial gap adjustment close loop mechanism |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101285518A (en) * | 2007-02-14 | 2008-10-15 | 三星电子株式会社 | Power transmission device and image forming apparatus having the same |
| CN104630734A (en) * | 2015-02-13 | 2015-05-20 | 北京中科科美真空技术有限责任公司 | Rotary sample stage |
| CN205275696U (en) * | 2015-12-31 | 2016-06-01 | 蚌埠雷诺真空技术有限公司 | Transmission of accurate positioning work piece platform |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3626166B2 (en) * | 2003-01-17 | 2005-03-02 | 日産自動車株式会社 | Hybrid transmission |
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2015
- 2015-12-31 CN CN201511033445.0A patent/CN105441901B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101285518A (en) * | 2007-02-14 | 2008-10-15 | 三星电子株式会社 | Power transmission device and image forming apparatus having the same |
| CN104630734A (en) * | 2015-02-13 | 2015-05-20 | 北京中科科美真空技术有限责任公司 | Rotary sample stage |
| CN205275696U (en) * | 2015-12-31 | 2016-06-01 | 蚌埠雷诺真空技术有限公司 | Transmission of accurate positioning work piece platform |
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| Publication number | Publication date |
|---|---|
| CN105441901A (en) | 2016-03-30 |
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