CN212887249U

CN212887249U - Connecting fitting device for assembling physical vapor deposition tantalum cavity

Info

Publication number: CN212887249U
Application number: CN202021786723.6U
Authority: CN
Inventors: 刘祥超
Original assignee: Shanghai Zhihao Electronic Technology Co ltd
Current assignee: Shanghai Zhihao Electronic Technology Co ltd
Priority date: 2020-08-25
Filing date: 2020-08-25
Publication date: 2021-04-06
Anticipated expiration: 2030-08-25

Abstract

The utility model discloses a connection fitting device is used in assembly of physical vapor deposition tantalum cavity relates to connection fitting assembly processing and uses technical field, to the problem of connecting in the fitting course of working fixed, now proposes following scheme, including the casing, the inside of casing is equipped with the diaphragm, fixedly connected with motor on the back outer wall of casing. The utility model discloses a combination of various structures makes this device fix processing with the artifical connection accessories of mechanical substitution, thereby not only the convenience is fixed the connection accessories of different specifications, practice thrift the cost and improve various efficiency, this device is fixed convenient to it is processed to the clamp of connection accessories's clamp, thereby through the carving of connecting the accessory surface, increase area of contact, can the adhesion attachment more, disperse the stress distribution of these attachments simultaneously, adnexed attachment is difficult to peel off, reduce the probability that the granule produced, improve the quality of processing procedure, the cycle of extension cavity maintenance, thereby improve the rate of utilization of machine, and the cost is reduced.

Description

Connecting fitting device for assembling physical vapor deposition tantalum cavity

Technical Field

The utility model relates to a technical field is used in connection fitting assembly processing, especially relates to a connection fitting device is used in assembly of physical vapor deposition tantalum cavity.

Background

The physical vapor deposition technique refers to a technique of vaporizing a material source, a solid or a liquid surface into gaseous atoms, molecules or partially ionizing into ions by a physical method under a vacuum condition, and depositing a film with a certain special function on the surface of a substrate through a low-pressure gas (or plasma) process. The main methods of physical vapor deposition include vacuum evaporation, sputter coating, arc plasma coating, ion coating, and molecular beam epitaxy.

The existing connecting fitting device for the physical vapor deposition 200mm tantalum cavity has limited capability of adhering reaction accessories on the surface, and the adhered attachments can be peeled off from the device along with the accumulation of the adhered attachments, so that particles are generated, the quality of a manufacturing process is influenced, the maintenance period of the cavity is shortened, and the connecting fittings with different specifications are either manually fixed or need different fixing devices in the processing process.

SUMMERY OF THE UTILITY MODEL

The utility model provides a pair of connection fitting device is used in assembly of physical vapor deposition tantalum cavity has solved the problem of fixing in the connection fitting course of working.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a connecting accessory device for assembling a physical vapor deposition tantalum cavity comprises a shell, wherein a transverse plate is arranged inside the shell, a motor is fixedly connected to the outer wall of the back face of the shell, a driving gear is installed at the output end of the motor, a gear is arranged on the left side of the driving gear on the left side, a driven gear is arranged on the right side of the driving gear on the right side, a gear is arranged on the right side of the driven gear, the driven gear is respectively in meshing transmission with the driving gear and the gear, racks are arranged below the two gears, a first support rod is hinged to one side, away from each other, of each rack, a second support rod is hinged to the top end of each first support rod, a first wedge block is welded to the top end of each second support rod, a second wedge block is arranged on one side, away from the two side walls of the shell, of the two first wedge, and one side of the push rod, which is far away from the second wedge block, is connected with a fixing plate through a bolt.

Preferably, a support plate is welded on the outer wall of the back of the shell, a motor is connected to the top of the support plate through a bolt, a first slot is formed in the wall of the back of the shell, a first rotating shaft is mounted at the output end of the motor, a second rotating shaft is arranged on the right side of the first rotating shaft, and driving gears are connected to the first rotating shaft and the second rotating shaft through bolts.

Preferably, the front of driving gear is equipped with and is located first pivot and the epaxial runner of second, two be connected with the belt between the runner, the left side of first pivot is rotated the third pivot, there is the gear through bolted connection in the three pivots, the right side of second pivot is rotated the fourth pivot, there is driven gear through bolted connection in the fourth pivot, the right side of fourth pivot is rotated and is connected with the fifth pivot, also there is the gear through bolted connection in the fifth pivot.

Preferably, the driving gear and the rack are in meshing transmission, two first sliding grooves are formed in the wall of the bottom of the shell, a first sliding block is connected to the inside of each first sliding groove in a sliding mode, and the top of each first sliding block is connected with the rack through a bolt.

Preferably, two second slotted holes are formed in the transverse plate, the top end of the second support rod penetrates through the second slotted holes, one sides, close to the first wedge blocks and the second wedge blocks, of the first wedge blocks are inclined planes, two second sliding grooves are formed in the transverse plate, a second sliding block is connected to the inner portions of the second sliding grooves in a sliding mode, and second wedge blocks are welded to the top portions of the second sliding blocks.

Preferably, a workbench is installed in the middle of the top of the transverse plate, two vertical plates are arranged between the inner wall of the top of the shell and the transverse plate, a third slot hole is formed in each vertical plate, one end, far away from the second wedge block, of the push rod penetrates through the third slot hole, a spring is sleeved on the push rod, and a fourth slot hole is formed in the middle of the wall of the top of the shell.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses an installation motor, diaphragm, motor, driving gear, rack, first vaulting pole, second vaulting pole, first voussoir, second voussoir, push rod, fixed plate, runner, driven gear and the combination of spring make the device replace the manual work with machinery at the in-process of carrying out processing to the connection accessory of different specifications and press from both sides its mechanical fastening fixedly to the processing of convenient connection accessory.

To sum up, the utility model discloses a combination of various structures makes this device fix processing with the artifical connection accessories of mechanical substitution, thereby not only the convenience is fixed the connection accessories of different specifications, practice thrift the cost and improve various efficiency, this device is processed it to the tight fixed convenience of clamp of connection accessories, thereby through the carving of connecting the accessory surface, increase area of contact, can the adhesion more accessories, disperse the stress distribution of these attachments simultaneously, adnexed accessory is difficult to peel off, reduce the probability that the granule produced, improve the quality of processing procedure, the cycle of extension cavity maintenance, thereby improve the rate of utilization of machine, and the cost is reduced.

Drawings

FIG. 1 is a schematic diagram of a front cross-sectional structure of a connection fitting device for assembling a physical vapor deposition tantalum chamber according to the present invention;

FIG. 2 is a schematic diagram of a cross-sectional structure of a connection fitting device for assembling a physical vapor deposition tantalum chamber according to the present invention;

fig. 3 is a schematic side view of the connection fitting device for assembling the physical vapor deposition tantalum chamber according to the present invention.

In the figure: the device comprises a shell 1, a transverse plate 2, a motor 3, a driving gear 4, a gear 5, a rack 6, a first support rod 7, a second support rod 8, a first wedge 9, a second wedge 10, a push rod 11, a fixing plate 12, a rotating wheel 13 and a driven gear 14.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-3, a connecting fitting device for assembling a physical vapor deposition tantalum cavity comprises a shell 1, a transverse plate 2 is arranged inside the shell 1, a motor 3 is fixedly connected to the outer wall of the back of the shell 1, a driving gear 4 is installed at the output end of the motor 3, a gear 5 is arranged on the left side of the driving gear 4 on the left side, a driven gear 14 is arranged on the right side of the driving gear 4 on the right side, a gear 5 is arranged on the right side of the driven gear 14, the driven gear 14 is respectively in meshing transmission with the driving gear 4 and the gear 5, racks 6 are arranged below the two gears 5, a first support rod 7 is hinged to the side, away from each other, of the two racks 6, a second support rod 8 is hinged to the top end of the first support rod 7, a first wedge block 9 is welded to the top end of the second support rod 8, a second wedge block 10 is arranged on the side, away from the two side walls of, the side of the push rod 11 far away from the second wedge block 10 is connected with a fixing plate 12 through bolts.

A support plate is welded on the outer wall of the back of the shell 1, the top of the support plate is connected with a motor 3 through a bolt, a first slotted hole is formed in the wall of the back of the shell 1, a first rotating shaft is installed at the output end of the motor 3, a second rotating shaft is arranged on the right side of the first rotating shaft, a driving gear 4 is connected onto the first rotating shaft and the second rotating shaft through bolts, rotating wheels 13 positioned on the first rotating shaft and the second rotating shaft are arranged on the front of the driving gear 4, a belt is connected between the two rotating wheels 13, a third rotating shaft is rotated on the left side of the first rotating shaft, a gear 5 is connected onto the third rotating shaft through a bolt, a fourth rotating shaft is rotated on the right side of the second rotating shaft, a driven gear 14 is connected onto the fourth rotating shaft through a bolt, a fifth rotating shaft is rotatably connected onto the right side of the fourth rotating shaft, the gear 5 is also connected onto the, the inside sliding connection of first spout has first slider, there is rack 6 at the top of first slider through bolted connection, two second slotted holes have been seted up on diaphragm 2, the second slotted hole is passed on the top of second vaulting pole 8, one side that first voussoir 9 and second voussoir 10 are close to mutually is the inclined plane, two second spouts have been seted up on diaphragm 2, the inside sliding connection of second spout has the second slider, the top welding of second slider has second voussoir 10, the mid-mounting at diaphragm 2 top has the workstation, be equipped with two risers between the top inner wall of casing 1 and the diaphragm 2, the third slotted hole has been seted up on the riser, the third slotted hole is passed to the one end that second voussoir 10 was kept away from to push rod 11, the spring has been cup jointed on push rod 11, the fourth slotted hole has been seted up at the middle part.

In this embodiment, first, the connection fitting to be processed is placed on the workbench through the fourth slot, the motor 3 is started to drive the first rotating shaft to rotate, so that the driving gear 4 rotates, so that the second rotating shaft is driven to rotate through the combination of the rotating wheel 13 and the belt, so that the two driving gears 4 are driven to rotate, the driving gear 4 on the left side is respectively in meshing transmission with the gear 5 and the rack 6, the driving gear 4 on the right side drives the transmission gear 14 to rotate, the driven gear 14 is in meshing transmission with the gear 5, so that the fifth rotating shaft is driven to rotate, the driving gear 4 on the right side and the gear 5 are also in meshing transmission with the rack 6, so that the two racks 6 are driven to move towards one end of both sides through the forward rotation of the motor 3, so that the first wedge 9 moves upwards through the combination of the first supporting rod 7 and the second supporting rod 8, and the second wedge 10 moves towards the middle through the, thereby make two push rods 11 drive fixed plate 12 and remove to the centre, compression spring to connecting the accessory clamp tightly fixed, observe through the fourth slotted hole that connecting the accessory and press from both sides tight back and close motor 3, thereby conveniently do the sculpture to connecting the surface of accessory and handle, increase area of contact can the more accessories of adhesion, the stress distribution of dispersion these attachments simultaneously.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a connection fittings device is used in assembly of physical vapor deposition tantalum cavity, includes casing (1), its characterized in that, the inside of casing (1) is equipped with diaphragm (2), fixedly connected with motor (3) on the back outer wall of casing (1), driving gear (4) are installed to the output of motor (3), and the left side of driving gear (4) is equipped with gear (5), and the right side of driving gear (4) is equipped with driven gear (14), the right side of driven gear (14) is equipped with gear (5), and driven gear (14) respectively with driving gear (4) and gear (5) between meshing transmission, two the below of gear (5) is equipped with rack (6), two one side that keeps away from each other of rack (6) articulates there is first vaulting pole (7), the top of first vaulting pole (7) articulates there is second vaulting pole (8), the top welding of second vaulting pole (8) has first voussoir (9), two one side of keeping away from casing (1) both sides conch wall of first voussoir (9) is equipped with second voussoir (10), two one side welding that first voussoir (9) were kept away from in second voussoir (10) has push rod (11), there is fixed plate (12) one side of keeping away from second voussoir (10) through bolted connection in push rod (11).

2. The connecting fitting device for assembling the physical vapor deposition tantalum chamber is characterized in that a supporting plate is welded on the outer wall of the back side of the shell (1), the top of the supporting plate is connected with a motor (3) through a bolt, a first slot is formed in the wall of the back side of the shell (1), a first rotating shaft is installed at the output end of the motor (3), a second rotating shaft is arranged on the right side of the first rotating shaft, and a driving gear (4) is connected to the first rotating shaft and the second rotating shaft through bolts.

3. The connecting fitting device for assembling the physical vapor deposition tantalum cavity as claimed in claim 2, wherein the front face of the driving gear (4) is provided with rotating wheels (13) on a first rotating shaft and a second rotating shaft, a belt is connected between the two rotating wheels (13), the left side of the first rotating shaft rotates a third rotating shaft, the third rotating shaft is connected with a gear (5) through a bolt, the right side of the second rotating shaft rotates a fourth rotating shaft, the fourth rotating shaft is connected with a driven gear (14) through a bolt, the right side of the fourth rotating shaft rotates and is connected with a fifth rotating shaft, and the fifth rotating shaft is also connected with the gear (5) through a bolt.

4. The connecting fitting device for assembling the physical vapor deposition tantalum cavity as claimed in claim 1, wherein the driving gear (4) and the rack (6) are in meshing transmission, two first sliding grooves are formed in the bottom wall of the shell (1), a first sliding block is slidably connected to the inside of the first sliding grooves, and the rack (6) is connected to the top of the first sliding block through a bolt.

5. The connecting fitting device for assembling the physical vapor deposition tantalum cavity according to claim 1, wherein two second slots are formed in the transverse plate (2), the top end of the second stay bar (8) penetrates through the second slots, one sides of the first wedge block (9) close to the second wedge block (10) are inclined planes, two second sliding grooves are formed in the transverse plate (2), a second sliding block is connected to the inside of each second sliding groove in a sliding mode, and the second wedge block (10) is welded to the top of each second sliding block.

6. The connecting accessory device for assembling the physical vapor deposition tantalum cavity as claimed in claim 1, wherein a workbench is installed in the middle of the top of the transverse plate (2), two vertical plates are arranged between the inner wall of the top of the shell (1) and the transverse plate (2), third slotted holes are formed in the vertical plates, one end of the push rod (11) far away from the second wedge block (10) penetrates through the third slotted holes, a spring is sleeved on the push rod (11), and a fourth slotted hole is formed in the middle of the wall of the top of the shell (1).