CN105887036B - A kind of workpiece fixture - Google Patents

A kind of workpiece fixture Download PDF

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Publication number
CN105887036B
CN105887036B CN201610316743.9A CN201610316743A CN105887036B CN 105887036 B CN105887036 B CN 105887036B CN 201610316743 A CN201610316743 A CN 201610316743A CN 105887036 B CN105887036 B CN 105887036B
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CN
China
Prior art keywords
workpiece
pedestal
clamping
hole
clamping workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201610316743.9A
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Chinese (zh)
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CN105887036A (en
Inventor
徐子明
傅绍英
向勇
胡杨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chengdu Cvac Vacuum Technology Co Ltd
Original Assignee
Chengdu Cvac Vacuum Technology Co Ltd
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Application filed by Chengdu Cvac Vacuum Technology Co Ltd filed Critical Chengdu Cvac Vacuum Technology Co Ltd
Priority to CN201610316743.9A priority Critical patent/CN105887036B/en
Publication of CN105887036A publication Critical patent/CN105887036A/en
Application granted granted Critical
Publication of CN105887036B publication Critical patent/CN105887036B/en
Expired - Fee Related legal-status Critical Current
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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering

Abstract

The invention discloses a kind of workpiece fixture, the pedestal of the cavity bottom including being located at sputtering chamber, the fixing axle on pedestal, the clamping workpiece plate between two neighboring fixing axle, the clamping workpiece hole set on clamping workpiece plate, the transmission shaft between the cavity bottom of the pedestal and the sputtering chamber;Due to the clamping workpiece hole on each clamping workpiece plate can at least two different types of workpiece of clamping simultaneously, can the different types of workpiece of sputter simultaneously, improve the efficiency of sputter.

Description

A kind of workpiece fixture
Technical field
This application involves magnetron sputtering technology field more particularly to a kind of workpiece fixtures.
Background technology
With the continuous improvement of people's living standards, more and more coated products are widely used, and it is corresponding The manufacture of vacuum coating equipment also become further important in the promotion of coating technique.Magnetron sputtering plating is exactly wherein one The coating technique that kind is widely used, principle are with splashing during accelerating to fly to base material under the action of electric field using electronics Penetrate gases argon collision, ionize out a large amount of argon ion and electronics, electronics flies to base film, in the process constantly with argon Atomic collision generates more ar atmos and electronics;Argon ion accelerates to bombard target under the action of electric field, sputters a large amount of Target atom, the target atom being in neutrality (or molecule) are deposited on the coating technique of substrate surface.
Magnetron sputtering plating is current widely applied coating technique method, is widely used in optics, microelectronics, resistance to The industrial fields such as mill, anti-corrosion, decoration, to provide thin film coating that is reliable and stablizing.It such as decorates with colored plated film, mobile phone shell plating Film, building glass low-E plated films, transparent conducting glass plated film etc..By the substrate or workpiece of plated film, typically glass, metal-back, Ya Keli, PET (pet resin, poly (ethylene terephthalate)) film etc., is placed It on fixture, then is placed in moveable substrate frame, is brought into automatically by substrate frame and plated film is carried out in magnetron sputtering plating room.
Due to vacuum film formation technical characterstic, complex part surface spatter film forming technique film thickness control, uniformity and with The binding force of workpiece shows relatively difficult and complicated.With the fast development of machinery manufacturing industry, workpiece surface coating technique Application range is expanded to precise punching die, space flight and aviation component and electronic components plug-in unit by cutter.New high-performance film layer is not It is disconnected to occur, such as TiAlCN (cyaniding aluminium titanium), AlCrN (chromium nitride aluminum), TiSiN (titanium silicon nitride), diamond-like, improve work The service life and processing efficiency of mold.Mesh is particularly important to the research of complex part surface magnetic control sputtering coating technique Before, it is quite extensively and ripe in the technology and technique of planar substrate or workpiece surface plated film using magnetron sputtering.
For magnetron sputtering plating, planar substrate installation way generally can be divided into several sides such as vertical, horizontal, cylindrical Method.It is and also very extensive to the research of the installation way of planar substrate.Such as the vertical coating clamp of magnetron sputtering, improve plating The versatility of film fixture can be used in the plated film of different sizes substrate, reduce special fixture system to a certain extent Make expense.Such as certain stationary fixture again also realizes the variation of the distance of target-substrate distance to a certain extent, realizes and adjusts target-substrate distance Purpose, improve plating membrane efficiency.
Also there is the research to special-shaped workpiece installation way in the prior art, but be also typically only capable to the single special-shaped work of clamping Part.Such as a kind of steel ball coating clamp device based on magnetron sputtering technique.The device can solve steel ball to a certain extent Surface coating unbalanced problem during plated film, so as to improve the mechanical performance of steel ball and surface uniformity.But the device is suitable It is relatively low with property, other types of special-shaped workpiece may not applied to.
Therefore, design a kind of strong applicability and can simultaneously clamping different workpieces magnetron sputtering special-shaped workpiece plated film dress Fixture is pressed from both sides, to improving the efficiency of magnetron sputtering special-shaped workpiece plated film, lower cost has a very important significance.
Invention content
It, cannot the different types of work of clamping simultaneously to solve the prior art invention provides a kind of workpiece fixture The technical issues of part.
In order to solve the above technical problems, the present invention provides a kind of workpiece fixture, including:
Pedestal, positioned at the cavity bottom of sputtering chamber, the side wall setting target of the sputtering chamber;N is provided on the pedestal A first mounting hole;The distance at the center of each first mounting hole and the pedestal is equal;N >=2 and for positive integer;
N number of fixing axle and N number of first mounting hole correspond to, and each fixing axle is connected by respective first mounting hole The pedestal;
M clamping workpiece plate between two neighboring fixing axle, is provided with P workpiece dress on each clamping workpiece plate At least two different types of workpiece are installed in folder hole, the P clamping workpiece hole;Wherein, M is positive integer, P >=2 and be just whole Number;
Transmission shaft, between the cavity bottom of the pedestal and the sputtering chamber;The transmission shaft is fixedly connected described Pedestal, the transmission shaft are driven by driving motor and operated, and then drive the pedestal rotation;
In sputter coating, by the rotation of the transmission shaft, the pedestal, drive in the P clamping workpiece plate On described at least two different types of workpiece rotated, target is hit by the indoor gas molecule of sputter, makes target Atom or molecule are splashed to described at least two different types of workpiece surfaces and carry out plated film, and then simultaneously to the inhomogeneity The workpiece of type carries out plated film.
Preferably, the workpiece fixture further includes:
Head cover and the pedestal correspond to;
N number of second mounting hole is provided on the head cover, each second mounting hole and corresponding first mounting hole are matched It closes, respective fixing axle is fixed between the head cover and the pedestal.
Preferably, first mounting hole and second mounting hole are all threaded hole;
The both ends of each fixing axle are both provided with screw thread corresponding with the threaded hole.
Preferably, pin is provided on each clamping workpiece plate, corresponding pin hole is provided in each fixing axle;
Pass through the cooperation of the pin and the pin hole so that each clamping workpiece plate be in two neighboring fixing axle it Between.
Preferably, the width of the distance of two neighboring fixing axle and the target is equal.
Preferably, clamping device is provided in each clamping workpiece hole, for clamping workpiece.
Preferably, the clamping device includes:Hoodle and spring;
The hoodle is in the duct opened up on the hole madial wall in corresponding clamping workpiece hole, the opening in the duct Diameter be less than the hoodle diameter;
One end of the spring is connected with the hoodle, and the other end of the spring is fixed in the clamping workpiece hole Duct bottom on side wall.
Preferably, the head cover is circular top cover;The pedestal is cup dolly.
Preferably, in the M clamping workpiece plate, the size of each clamping workpiece plate, shape can it is identical can also It is different.
By one or more technical solution of the present invention, the invention has the advantages that advantage:
The invention discloses a kind of workpiece fixture, on the pedestal of the cavity bottom including being located at sputtering chamber, pedestal Fixing axle, the clamping workpiece plate between two neighboring fixing axle, the clamping workpiece hole set on clamping workpiece plate, positioned at institute State the transmission shaft between the cavity bottom of pedestal and the sputtering chamber;Since the clamping workpiece hole on each clamping workpiece plate can be same When at least two different types of workpiece of clamping, therefore can the different types of workpiece of sputter simultaneously, improve the efficiency of sputter.
Description of the drawings
Fig. 1 is the structure diagram of workpiece fixture in the embodiment of the present invention;
Fig. 2 is the vertical view of workpiece fixture in the embodiment of the present invention;
Fig. 3 is the structure diagram of pedestal in the embodiment of the present invention;
Fig. 4 is the structure diagram of clamping workpiece plate in the embodiment of the present invention.
Reference sign:Sputtering chamber 1, target 2, pedestal 3, fixing axle 4, head cover 5, clamping workpiece plate 6, clamping workpiece hole 7th, transmission shaft 8, the first mounting hole 9.
Specific embodiment
In order to which the application the technical staff in the technical field is made to be more clearly understood that the application, below in conjunction with the accompanying drawings, Technical scheme is described in detail by specific embodiment.
In embodiments of the present invention, a kind of workpiece fixture is disclosed, is mainly used to clamping workpiece, such as base to be coated Piece.Certainly, workpiece is alternatively special-shaped workpiece, and special-shaped workpiece is exactly to refer to workpiece in irregular shape, such as hemispheric to be coated Substrate.
Fig. 1-Fig. 2 is please referred to below, is the structure diagram of the workpiece fixture of the present invention.
Target 2 is provided on the side wall of sputtering chamber 1, and workpiece fixture is located at the chamber central of sputtering chamber 1, and Workpiece fixture is consistent with the distance of each target 2 on side wall, is so designed that the uniformity that can ensure sputter and sputter matter Amount.
In an embodiment of the present invention, workpiece fixture includes:Pedestal 3, head cover 5, between head cover 5 and pedestal 3 Fixing axle 4, the clamping workpiece plate 6 between two neighboring fixing axle 4, the clamping workpiece hole set on clamping workpiece plate 6 7。
Lower mask body introduces all parts.
Pedestal 3, positioned at the cavity bottom of sputtering chamber 1.The shape of pedestal 3 can be round, referring to Fig. 3, and size It can customize as needed, selecting various sizes of pedestal 3 that can realize target-substrate distance, (target 2 to film substrate to be plated is (i.e.:Workpiece) Distance) adjustment, so as to improve plating membrane efficiency and coating quality.
In addition, corresponding with pedestal 3 is head cover 5, i.e.,:The size shape of pedestal 3 is consistent with the size shape of head cover 5.If Head cover 5 is circular top cover, then the pedestal 3 is cup dolly.
It is provided with N number of first mounting hole 9 on the base 3;The distance at the center of each first mounting hole 9 and the pedestal 3 It is equal.Each first mounting hole 9 can consolidate a piece fixing axle 4 of installation.Two are needed due to fixing a clamping workpiece plate 6 admittedly Dead axle 4, therefore the minimum number of the first mounting hole 9 is 2, maximum number does not limit.I.e.:N >=2 and for positive integer.It is if fixed The quantity of axis 4 is at least 3, then corresponding first mounting hole 9 can be circumferentially distributed along pedestal 3.As shown in Figure 1, fixing axle 4 exists What pedestal 3 was formed is octagon.If the quantity of fixing axle 4 is more, corresponding first mounting hole 9 is arranged closer to circle.
N number of second mounting hole is provided on head cover 5, each second mounting hole and corresponding first mounting hole 9 are matched It closes, respective fixing axle 4 is fixed between the head cover 5 and the pedestal 3.Therefore, the number of the second mounting hole and first The number of mounting hole 9 is consistent.
In addition, pedestal 3 can drive rotation by transmission shaft 8.
Transmission shaft 8, between the pedestal 3 and the cavity bottom of the sputtering chamber 1;The transmission shaft 8 is fixedly connected The pedestal 3, the transmission shaft 8 are driven by driving motor and operated, and then the pedestal 3 is driven to rotate.
Specifically, driving motor and transmission shaft 8 are introduced using dynamic sealing principle in the cavity bottom of sputtering chamber 1, driven Under the driving of dynamic motor, which can do accurate rotation.Transmission shaft 8 pass through pedestal 3 center, and across place with The form formation of upper and lower nut is bonded, across being fixedly connected in a manner of being spirally connected, welding etc. with head cover 5 later, for solid Fixed mode is subject to actual conditions, and the present invention repeats no more.The transmission shaft 8 is driven by driving motor and operated, and then is driven The pedestal 3 rotates.
In sputter coating, by the rotation of the transmission shaft 8, the pedestal 3, drive in the P clamping workpiece Described at least two different types of workpiece on plate 6 are rotated, and are hit target 2 by the gas molecule in sputtering chamber 1, are made 2 atom of target or molecule are splashed to described at least two different types of workpiece surfaces and carry out plated film, and then simultaneously to described Different types of workpiece carries out plated film, and since distance of each clamping workpiece plate 6 apart from target 2 is consistent, it can ensure The uniformity of plated film.
N number of fixing axle 4 and N number of first mounting hole 9 correspond to.The number of the number of fixing axle 4 and the first mounting hole 9 Unanimously.
Each fixing axle 4 connects the pedestal 3 by respective first mounting hole 9.It is provided in head cover 5 and is fixed with first In the case of 9 corresponding second mounting hole of hole, the both ends of each fixing axle 4 are inserted between the first mounting hole 9 and the second mounting hole. In alternatively possible embodiment, first mounting hole 9 and second mounting hole are all threaded hole;And each fixing axle 4 both ends are both provided with screw thread corresponding with the threaded hole, therefore each fixing axle 4 is screwed onto the head cover 5 and the bottom Between seat 3.And about the shape of fixing axle 4, the present invention is not limited.For example, the middle section of fixing axle 4 can be arbitrary Geometry, including cylinder, long strip type, elongated rectangular shape, prismatic etc., convenient for the fixation of clamping workpiece plate 6.
M clamping workpiece plate 6, between two neighboring fixing axle 4.Wherein, M is positive integer, i.e.,:The workpiece of the present invention Clamping plate 6 is at least one piece.The structure diagram of clamping workpiece plate 6 is referring to Fig. 4.
And on each clamping workpiece plate 6, it is provided with P clamping workpiece hole 7, P >=2 and be positive integer.P of the present invention Clamping workpiece hole 7 can at least install two distinct types of workpiece, can the different types of work at least two simultaneously during sputter Part carries out sputter.The number in the clamping workpiece hole 7 of the present invention is at least 2, and maximum number does not limit, as long as each clamping workpiece Plate 6 can accommodate.
When M clamping workpiece plate 6 is installed, pin is provided on each clamping workpiece plate 6, is set in each fixing axle 4 There is corresponding pin hole;Pass through the cooperation of the pin and the pin hole so that each clamping workpiece plate 6 is in two neighboring fixation Between axis 4.Specifically, 4 identical pin holes of size are both provided in each fixing axle 4, wherein 2 pin holes are located at admittedly The upper end of 4 intermediate unthreaded portion of dead axle, other two pin hole are located at the lower end of 4 intermediate unthreaded portion of fixing axle.These pins Hole is both provided with pin for fixing clamping workpiece plate 6 on each clamping workpiece plate 6, by the cooperation of pin and pin hole by work Part clamping plate 6 is fixed between two neighboring fixing axle 4, and when dismounting need to only remove clamping workpiece plate 6, and handling are extremely square Just.Certainly, if only two fixing axles 4 fix clamping workpiece plate 6, then the both ends of each fixing axle 4 can be set respectively One pin hole, for 6 pin joint of clamping workpiece plate.
The size of clamping workpiece plate 6 has depending on the combination of two neighboring fixing axle 4 on each clamping workpiece plate 6 Multiple clamping workpiece holes 7, the spread geometry in all clamping workpiece holes 7 on each clamping workpiece plate 6 are indefinite, such as workpiece Clamping hole 7 can be arranged as multiple circular concentrics, can also be arranged in matrix shape, can also be arranged as wavy etc.. In a kind of possible embodiment, clamping workpiece plate 6 is rectangle, sets a large amount of clamping workpiece hole 7 thereon, clamping workpiece hole 7 Number can be determined according to the receiving degree of clamping workpiece plate 6, the quantity of workpiece, type, size etc. are comprehensive.
In addition, clamping device is provided in each clamping workpiece hole 7, for the two distinct types of workpiece of clamping.Specifically For, hoodle and spring are provided in clamping device.
The clamping device includes:Hoodle and spring.Hoodle may include steel ball.
Duct is offered on the hole madial wall in clamping workpiece hole 6.
The hoodle is in the duct opened up on the hole madial wall in corresponding clamping workpiece hole 6, the opening in the duct The diameter at place is less than the diameter of the hoodle;
One end of the spring is connected with the hoodle, and the other end of the spring is fixed in the clamping workpiece hole Duct bottom on side wall.
In clamping workpiece (such as hemispherical workpiece), hemispherical workpiece is put into clamping workpiece hole 7, passes through bullet Hoodle is withstood on the recess of the hemispherical workpiece by the elastic force of spring, makes the projection portion of hemispherical workpiece out of clamping workpiece hole 7 Ejection, rest part are stuck in clamping workpiece hole 7 and are fixed.
Type, shape, size according to the workpiece of required plated film etc., these clamping workpiece holes 7 may be configured as round, side Shape or other shapes and it can be set to different size dimensions.The clamping workpiece plate 6 is easy to process, and size can standardize. And according to different workpiece, different clamping workpiece holes 7 is may customize, and clamping quantity is more, different shape and not can be suitable for With the workpiece of size.I.e.:In same clamping workpiece plate 6, shape, the size in each clamping workpiece hole 7 can be different.Therefore, Each clamping workpiece hole 7 can install different types of workpiece.In addition, clamping workpiece plate 7 also may customize.
Target 2, on the side wall of the sputtering chamber 1.In a kind of possible embodiment, two neighboring fixing axle 4 Distance and the target 2 width it is equal.It is so designed that, can ensure the uniformity of plated film, improve the quality of plated film.
Since fixing axle 4, the number of clamping workpiece plate 6 are all indefinite, the present invention is illustrated with fixed number The structure of workpiece fixture, certainly, citing herein are intended merely to explain the present invention, are not intended to limit the present invention.
It is provided with the centre-to-centre spacing of the first mounting hole 9 being circumferentially distributed, each first mounting hole 9 and pedestal 3 on the base 3 From equal, the first mounting hole 9 totally 8.The size of pedestal 3 can customize as needed.
Head cover 5 and pedestal 3 correspond to, and are provided with the second mounting hole for being circumferentially distributed on head cover 5, each second mounting hole and The centre distance of pedestal 3 is equal, the second mounting hole totally 8.
And 8 fixing axles 4 are fixed in respective first mounting hole, 9 and second mounting hole, in this way, just being formed after installation One octagon prism stent.4 identical pin holes of size are both provided in each fixing axle 4, is located at fixes respectively The upper and lower ends of 4 intermediate unthreaded portion of axis, often hold each two.These pin holes facilitate handling for fixing clamping workpiece plate 6.
Clamping workpiece plate 6 herein sets a large amount of clamping workpiece hole 7 above by taking rectangle as an example.Each clamping workpiece hole 7 In be provided with clamping device, for clamping workpiece.According to the shapes and sizes size of the workpiece of required plated film, these clamping workpieces Hole 7 may be configured as round, rectangular or other shapes and can be set to different size dimensions.And each clamping workpiece plate 6 The arrangement mode in upper all clamping workpiece holes 7 is indefinite.
The clamping workpiece plate 6 is easy to process, and size can standardize, and according to different workpiece, may customize different workpiece dresses Folder hole 7, and clamping quantity is more, can be suitable for different shape and different size of workpiece.
After clamping workpiece, clamping workpiece plate 6 is installed on by pin joint on octagon prism stent, thus The octagon prism of an opposing seal is formd, so as to prevent from workpiece " inner surface " or be not required to the surface of plated film to be contaminated (diffraction of magnetron sputtering plating is very strong).Octagon prism branch is placed on the center of magnetron sputtering chamber, we are each Faceted pebble is provided with cathodic sputtering cell at corresponding position, so as to place most 7 sputtering target materials 2.Each sputtering target material 2 Can be identical material, so as to be greatly improved the efficiency of sputter coating, and available in workpiece surface coating thick film.Each Sputtering target material 2 or different materials, therefore with the accurate rotation of octagon prism stent, it can be primary in workpiece surface Property plates the film of a variety of different function.In addition, according to different targets 2 and the various requirement of institute's plated film, different bottoms may be selected 3 disks of seat, but ensure to install each end land width of the regular polygon prism formed after fixing axle 4 and 2 equivalent width of target. In this way, selecting different 3 disks of pedestal that can realize the adjustment of target-substrate distance, membrane efficiency and coating quality are plated so as to improve.
Two layers of functional membrane of plating, institute's plated film can carry out workpiece (such as hemisphere face special-shaped workpiece) using the workpiece fixture For optical anti-reflective film.
1st, according to requiring, suitable pedestal 3 is selected, assembles octagon prism stent, including transmission shaft 8, pedestal 3, solid The assembling of dead axle 4, head cover 5.Target-substrate distance is 80mm after assembling.
2nd, by hemisphere face special-shaped workpiece clamping and clamping workpiece plate 6, by clamping device, clamping consolidates.
3rd, the clamping workpiece plate 6 for installing hemisphere face special-shaped workpiece is installed on octagon prism stent, passes through pin joint It is fixed.
4th, the applicable target 2 of selection, 2 number of target are two, are symmetrically placed in splashing for octagon prism stent both sides It penetrates on cathode.
5th, vacuum chamber is closed, mechanical pump is opened and vacuum chamber is extracted into 10 by molecular pump-4torr。
6th, reaction gas is filled with, it is 260sccm to adjust air-flow size, and detection gas pressure stability reaches in 10~30Pa The required gas pressure of build-up of luminance.
7th, magnetron sputtering power supply, open cycle cooling water are opened, adjusting sets target sputtering power as more than 5~7KW.
8th, simultaneously, transmission shaft 8 drives the rotation of octagon prism stent, rotary speed 1r/min.
9th, plated film is completed, and opens hatch door, after removing clamping workpiece plate 6 successively, then installation next group hemisphere face abnormity successively Workpiece.
10th, step 5 to 9 is repeated, until hemispherical workpiece whole plated film finishes.
11st, cleaning equipment, pass hull closure.
By one or more embodiment of the present invention, the invention has the advantages that advantage:
The invention discloses a kind of workpiece fixture, on the pedestal of the cavity bottom including being located at sputtering chamber, pedestal Fixing axle, the clamping workpiece plate between two neighboring fixing axle, the clamping workpiece hole set on clamping workpiece plate, positioned at institute State the transmission shaft between the cavity bottom of pedestal and the sputtering chamber;Since the clamping workpiece hole on each clamping workpiece plate can be same When at least two different types of workpiece of clamping, therefore can the different types of workpiece of sputter simultaneously, improve the efficiency of sputter.
Although the preferred embodiment of the application has been described, one of ordinary skilled in the art once knows substantially Creative concept, then additional changes and modifications may be made to these embodiments.So appended claims are intended to be construed to wrap It includes preferred embodiment and falls into all change and modification of the application range.
Obviously, those skilled in the art can carry out the application essence of the various modification and variations without departing from the application God and range.In this way, if these modifications and variations of the application belong to the range of the application claim and its equivalent technologies Within, then the application is also intended to include these modifications and variations.

Claims (9)

1. a kind of workpiece fixture, which is characterized in that including:
Pedestal, positioned at the cavity bottom of sputtering chamber, the side wall setting target of the sputtering chamber;N number of the is provided on the pedestal One mounting hole;The distance at the center of each first mounting hole and the pedestal is equal;N >=2 and for positive integer;
N number of fixing axle and N number of first mounting hole correspond to, and each fixing axle passes through described in the connection of respective first mounting hole Pedestal;
M clamping workpiece plate between two neighboring fixing axle, is provided with P clamping workpiece hole on each clamping workpiece plate, The P clamping workpiece hole is installed by least two different types of workpiece;Wherein, M is positive integer, P >=2 and be positive integer;
Transmission shaft, between the cavity bottom of the pedestal and the sputtering chamber;The transmission shaft is fixedly connected with the pedestal, The transmission shaft is driven by driving motor and operated, and then drives the pedestal rotation;
In sputter coating, by the rotation of the transmission shaft, the pedestal, drive on the P clamping workpiece hole At least two different types of workpiece is rotated, and is hit target by the indoor gas molecule of sputter, is made target atom Or molecule is splashed to described at least two different types of workpiece surfaces and carries out plated film, and then simultaneously to described different types of Workpiece carries out plated film.
2. a kind of workpiece fixture as described in claim 1, which is characterized in that the workpiece fixture further includes:
Head cover and the pedestal correspond to;
N number of second mounting hole, each second mounting hole and the cooperation of corresponding first mounting hole are provided on the head cover, it will Respective fixing axle is fixed between the head cover and the pedestal.
3. a kind of workpiece fixture as claimed in claim 2, which is characterized in that
First mounting hole and second mounting hole are all threaded hole;
The both ends of each fixing axle are both provided with screw thread corresponding with the threaded hole.
4. a kind of workpiece fixture as described in claim 1, which is characterized in that
Pin is provided on each clamping workpiece plate, corresponding pin hole is provided in each fixing axle;
Pass through the cooperation of the pin and the pin hole so that each clamping workpiece plate is between two neighboring fixing axle.
A kind of 5. workpiece fixture as described in claim 1, which is characterized in that the distance of two neighboring fixing axle and described The width of target is equal.
6. a kind of workpiece fixture as described in claim 1, which is characterized in that be provided with clamping in each clamping workpiece hole Device, for clamping workpiece.
7. a kind of workpiece fixture as claimed in claim 6, which is characterized in that the clamping device includes:Hoodle and bullet Spring;
The hoodle is in the duct opened up on the hole madial wall in corresponding clamping workpiece hole, the opening in the duct it is straight Diameter is less than the diameter of the hoodle;
One end of the spring is connected with the hoodle, and the other end of the spring is fixed on the side wall in the clamping workpiece hole On duct bottom.
8. a kind of workpiece fixture as claimed in claim 2, which is characterized in that
The head cover is circular top cover;The pedestal is cup dolly.
9. a kind of workpiece fixture as described in claim 1, which is characterized in that in the M clamping workpiece plate, each Size, the shape of clamping workpiece plate can be the same or different.
CN201610316743.9A 2016-05-12 2016-05-12 A kind of workpiece fixture Expired - Fee Related CN105887036B (en)

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CN107675139B (en) * 2017-11-13 2020-02-07 赫得纳米科技(昆山)有限公司 Film coating device

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US8371565B2 (en) * 2010-04-08 2013-02-12 Hon Hai Precision Industry Co., Ltd. Clamping device and coating apparatus having same
CN203960324U (en) * 2014-07-25 2014-11-26 蓝思科技股份有限公司 A kind of two sides coating clamp of magnetron sputtering coater
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CN205688006U (en) * 2016-05-12 2016-11-16 成都西沃克真空科技有限公司 A kind of workpiece fixture

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