CN1995444A - Rotary disk for film electroplating and film electroplating machine - Google Patents
Rotary disk for film electroplating and film electroplating machine Download PDFInfo
- Publication number
- CN1995444A CN1995444A CNA2006100328153A CN200610032815A CN1995444A CN 1995444 A CN1995444 A CN 1995444A CN A2006100328153 A CNA2006100328153 A CN A2006100328153A CN 200610032815 A CN200610032815 A CN 200610032815A CN 1995444 A CN1995444 A CN 1995444A
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- Prior art keywords
- plated film
- rotating disk
- substrate fixture
- turntable body
- disk
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Abstract
The invention discloses a rotary table of coater, which comprises the following parts: rotary table bulk, at least one assembling hole on the bulk, at least one base chuck in the assembling hole, at least one motor corresponding to each case to drive the base to turn over chuck, wherein the rotary table avoids repeating utilizing element of vacuum extracting mould, heater, coating target and aerating hole due to handful turnover.
Description
[technical field]
The present invention relates to a kind of film coating apparatus, relate in particular to a kind of plated film with rotating disk and coating equipment.
[background technology]
Usually, optical elements such as the various optical mirror slips (Lens) of optical articles such as photographic camera, digital camera, lens of photographic mobile phone module, spectral filter, because avoid incident light the time through each element, part incident light reflection and the luminous energy loss that causes, need be at the two sides of each optical mirror slip coating anti reflection film, or the one side of spectral filter plate can filter certain section light film (as infrared fileter, ultraviolet filter), and plate anti-reflective film at another side, to increase the antireflective property of optical element, prevent the luminous energy loss by these optical thin films.
The plated film mode of described optical thin film is many carries out with hot evaporation or sputtering way.When the optical element two sides all need plate optical thin film, generally include in its coating process: vacuumize, heat, plated film, cooling, vacuum breaker, manually overturn the optical element anchor clamps, vacuumize, step such as heating, another side plated film, cooling, vacuum breaker, taking-up optical element.Comprise in this coating process vacuumize for twice, heating, plated film, cooling and vacuum breaker process, the considerable processing procedure time accounts for, so how to avoid repeating of described process, reduce the time of processing procedure, be very important problem for the element volume production of two sides plated film.
In view of this, providing a kind of plated film of automatic turn-over is necessary with rotating disk and coating equipment in fact.
[summary of the invention]
Below, the plated film that will a kind of automatic turn-over be described with embodiment is with rotating disk and coating equipment.
A kind of plated film rotating disk comprises: a turntable body; Be arranged at least one installing port on this turntable body; At least one substrate fixture, each substrate fixture correspondence are housed in the installing port; Each substrate fixture correspondence is provided with a motor, and this motor is used to drive corresponding substrate fixture upset.
And, a kind of coating equipment, it comprises: a vacuum vessel; Be arranged at least one target in this vacuum vessel; Reach the plated film rotating disk that is oppositely arranged with target.Wherein, this plated film has with rotating disk: a turntable body; Be arranged at least one installing port on this turntable body; At least one substrate fixture, each substrate fixture correspondence are housed in the installing port; Each substrate fixture correspondence is provided with a motor, and this motor is used to drive corresponding substrate fixture upset.
Prior art is compared, described substrate fixture can be with respect to described turntable body upset by motor control, the manual overturn structure of optical element anchor clamps in the prior art is realized controlled motorized, avoid repeated use owing to the elements such as vacuum suction module, well heater, plated film target and aeration aperture that manual upset of the prior art causes, reduce equipment loss, reduce equipment cost.
[description of drawings]
Fig. 1 is the synoptic diagram of the plated film of preferred embodiment of the present invention with rotating disk.
Fig. 2 is that the plated film of preferred embodiment of the present invention is with the partial synoptic diagram of disassembling of rotating disk.
Fig. 3 is the synoptic diagram of the coating equipment of preferred embodiment of the present invention.
[embodiment]
Below, in conjunction with the accompanying drawings the present invention is described in further detail.
As depicted in figs. 1 and 2, the plated film that provides of preferred embodiment of the present invention comprises with rotating disk 1: turntable body 11; Be arranged at least one installing port 12 on this turntable body 11; At least one substrate fixture 13, each substrate fixture 13 correspondence respectively are housed in the installing port 12; Each substrate fixture 13 correspondence is provided with a motor 15, and this motor 15 is used to drive 13 upsets of corresponding substrate fixture.
Described turntable body 11 usefulness heat conductivility good metal disks are made, as copper coin dish, aluminium disk, platinum disk, plumbous disk or zinc disk etc.
Described installing port 12 connects turntable body 11, does not collide with turntable body 11 when its size requirements substrate fixture 13 overturns in described installing port 12, can be circle, square, rectangle or other axis symmetric shape.
Described substrate fixture 13 is used for clamping substrate 2, can adopt screw to twist mode clampings such as solid, buckle or locking.This substrate fixture 13 can be circular framework, partial arc framework, square framework, rectangle framework, prismatic framework, " ∠ " shape framework, " " shape framework or " | " body etc.In the present embodiment, substrate fixture 13 is the rectangle framework.
Connect by rotating shaft 14 between described substrate fixture 13 and the turntable body 11.Described motor 15 is set in the rotating shaft 14, is used to drive this rotating shaft 14 rotations.In the present embodiment, rotating shaft 14 is located at the axial location of substrate fixture 13.Rotating shaft 14 also can be arranged on to make reaches other positions that axle connects between substrate fixture 13 and the turntable body 11, as an end of substrate fixture 13, at this moment, installing port 12 should have the space of enough substrate fixtures 13 and substrate 2 upsets.
In addition, these rotating shaft 14 1 ends and described 13 rotatable connections of substrate fixture, the other end and turntable body 11 are affixed; Perhaps these rotating shaft 14 1 ends and described substrate fixture 13 are affixed, the other end and 11 rotatable connections of turntable body; Perhaps these rotating shaft 14 two ends all with described substrate fixture 13 and 11 rotatable connections of turntable body.
Described motor 15 can be controlled substrate fixture 13 upsets indirectly.This motor 15 is driven by a battery modules (figure does not show), and power supply that need not be other, wireless device of installing utilizes the mode of remote control to control battery modules work on the switch of this external this battery modules, thereby can realize the automatic control to substrate fixture 13 upsets.
See also Fig. 3, only a substrate 2 that is clamped on the substrate fixture 13 is represented among this figure.Use above-mentioned plated film to comprise: a vacuum vessel 9 with the coating equipment 100 of rotating disk 1; Be arranged at least one target 3 in this vacuum vessel 9; Reach the plated film rotating disk 1 that is oppositely arranged with target 3.
Described coating equipment 100 also comprises: be arranged on the vacuum suction module 4 of vacuum vessel 9 bottoms, be used to make form vacuum environment in the vacuum vessel 9; Drive the revolving bar 7 of plated film with rotating disk 1 rotation; Be arranged on the well heater 6 of vacuum vessel 9 bottoms, be used for heated substrate 2; Aeration aperture 5 is used for inflation in vacuum vessel 9.
When using 100 pairs of substrates of above-mentioned coating equipment 2 to carry out the two sides plated film, specifically carry out following operation.
Step 1 grips a plurality of substrates 2 with opposite first 21 and second surface 22 respectively with substrate fixture 13, at this moment, the first surface 21 of described substrate 2 is relative with target (being negative electrode) 3.
Step 2 with vacuum vessel 9 sealings, is bled with 4 pairs of vacuum vessels 9 of vacuum suction module, makes the vacuum vessel 9 inner vacuum environments that form; Plated film under the effect of revolving bar 7, is that the axle center at the uniform velocity rotates with revolving bar 7 with rotating disk 1 in horizontal plane; With 2 heating of 6 pairs of substrates of well heater.
Step 3 is treated all substrates 2 by behind the even heating, connects voltage for target 3 and makes its ejected electron 8, and this electronics 8 is deposited on the first surface 21 of described substrate 2 and forms plated film.
Step 4, to target 3 outages, 13 upsets of telemotor 15 drive substrate anchor clamps.Thereby the second surface 22 of described substrate 2 is relative with target 3.
Step 5 is connected voltage for target 3 and makes its ejected electron 8, and this electronics 8 is deposited on the second surface 22 of described substrate 2 and forms plated film.
Step 6 is turned off power supply, advance in the vacuum vessel 9 by aeration aperture 5 inflation, the cooling back take out two relatively surface 21,22 all be coated with the substrate 2 of plated film.
By the aforesaid operations step as can be seen, because driving substrate 2 by motor 15 control substrate fixtures 13 overturns, when using plated film that present embodiment provides to carry out the two sides plated film with 100 pairs of substrates of coating equipment 2 of rotating disk 1, only need vacuumize, heating, a plated film, upset substrate fixture 13, the another side plated film, cooling, steps such as vacuum breaker and taking-up optical element, can realize the two sides plated film of substrate 2, omit multiple cooling in the prior art, vacuum breaker, vacuumize and step such as heating, can reduce equipment and repeat loss, reduction equipment use cost, simultaneously, can reduce the processing procedure time, enhance productivity.
Be understandable that, for the person of ordinary skill of the art, can make other various corresponding changes and distortion, and all these changes and distortion all should belong to the protection domain of claim of the present invention according to technical scheme of the present invention and technical conceive.
Claims (10)
1. plated film rotating disk, it comprises a turntable body and at least one substrate fixture, it is characterized in that, this plated film also comprises at least one installing port that is arranged on this turntable body with rotating disk, each substrate fixture correspondence is housed in the installing port, each substrate fixture correspondence is provided with a motor, and this motor is used to drive corresponding substrate fixture upset.
2. plated film rotating disk as claimed in claim 1 is characterized in that, described turntable body is selected from copper coin dish, aluminium disk, platinum disk, plumbous disk or zinc disk.
3. plated film rotating disk as claimed in claim 1 is characterized in that, described installing port is an axis symmetric shape.
4. plated film rotating disk as claimed in claim 3 is characterized in that described installing port is selected from circle, square or rectangular.
5. plated film rotating disk as claimed in claim 1 is characterized in that, described motor is driven by a battery modules.
6. plated film rotating disk as claimed in claim 5 is characterized in that, described battery modules has a switch, and this switch is controlled by a wireless device.
7. plated film rotating disk as claimed in claim 1 is characterized in that, connects by rotating shaft between described substrate fixture and the described turntable body.
8. plated film rotating disk as claimed in claim 7 is characterized in that described motor is set in the described rotating shaft, is used to drive this rotating shaft rotation.
9. coating equipment, it comprises: a vacuum vessel; Be arranged at least one target in this vacuum vessel; Reach the plated film rotating disk that is oppositely arranged with target, this plated film has a turntable body and at least one substrate fixture with rotating disk, it is characterized in that, this plated film also comprises at least one installing port that is arranged on this turntable body with rotating disk, each substrate fixture correspondence is housed in the installing port, each substrate fixture correspondence is provided with a motor, and this motor is used to drive corresponding substrate fixture upset.
10. coating equipment as claimed in claim 9 is characterized in that, connects by rotating shaft between described substrate fixture and the described turntable body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100328153A CN1995444A (en) | 2006-01-06 | 2006-01-06 | Rotary disk for film electroplating and film electroplating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100328153A CN1995444A (en) | 2006-01-06 | 2006-01-06 | Rotary disk for film electroplating and film electroplating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1995444A true CN1995444A (en) | 2007-07-11 |
Family
ID=38250645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006100328153A Pending CN1995444A (en) | 2006-01-06 | 2006-01-06 | Rotary disk for film electroplating and film electroplating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1995444A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101363117B (en) * | 2007-08-08 | 2011-08-24 | 鸿富锦精密工业（深圳）有限公司 | Film coating bracket and film-plating machine |
| CN102212783A (en) * | 2010-04-12 | 2011-10-12 | 鸿富锦精密工业（深圳）有限公司 | Coating support and coating machine |
| CN102234783A (en) * | 2010-04-28 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | A target material pedestal and a film plating apparatus employing the target material pedestal |
| CN102392224A (en) * | 2011-11-22 | 2012-03-28 | 宁波科田磁业有限公司 | Automatic arrangement, turn-over and collection device of vacuum magnetron sputtering workpiece |
| CN101575699B (en) * | 2008-05-06 | 2012-12-19 | 鸿富锦精密工业（深圳）有限公司 | Film plating bracket |
| CN111378949A (en) * | 2020-05-12 | 2020-07-07 | 无锡奥夫特光学技术有限公司 | Coating device capable of realizing high-precision control of surface shape of optical element |
| CN114558717A (en) * | 2022-01-24 | 2022-05-31 | 山东恒瑞磁电科技有限公司 | Paint spraying equipment and paint spraying method for integrally formed carbonyl inductor |
| WO2023033709A1 (en) * | 2021-08-31 | 2023-03-09 | Moveon Technologies Pte. Ltd. | Apparatus and method for coating surfaces of optical elements |
-
2006
- 2006-01-06 CN CNA2006100328153A patent/CN1995444A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101363117B (en) * | 2007-08-08 | 2011-08-24 | 鸿富锦精密工业（深圳）有限公司 | Film coating bracket and film-plating machine |
| CN101575699B (en) * | 2008-05-06 | 2012-12-19 | 鸿富锦精密工业（深圳）有限公司 | Film plating bracket |
| CN102212783A (en) * | 2010-04-12 | 2011-10-12 | 鸿富锦精密工业（深圳）有限公司 | Coating support and coating machine |
| CN102234783A (en) * | 2010-04-28 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | A target material pedestal and a film plating apparatus employing the target material pedestal |
| CN102392224A (en) * | 2011-11-22 | 2012-03-28 | 宁波科田磁业有限公司 | Automatic arrangement, turn-over and collection device of vacuum magnetron sputtering workpiece |
| CN111378949A (en) * | 2020-05-12 | 2020-07-07 | 无锡奥夫特光学技术有限公司 | Coating device capable of realizing high-precision control of surface shape of optical element |
| WO2023033709A1 (en) * | 2021-08-31 | 2023-03-09 | Moveon Technologies Pte. Ltd. | Apparatus and method for coating surfaces of optical elements |
| CN114558717A (en) * | 2022-01-24 | 2022-05-31 | 山东恒瑞磁电科技有限公司 | Paint spraying equipment and paint spraying method for integrally formed carbonyl inductor |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |